Mask storage device and film forming device

Abstract

A mask storage device and a film forming device are provided that can reduce the space required for picking up and placing mask boxes. The mask storage chamber (100) includes: a mask box (200) capable of storing multiple masks in multiple layers; a chamber body (111) capable of storing the mask box (200); and a cover (120) capable of opening and closing the opening (111a) of the chamber body (111). The mask storage chamber (100) is characterized in that it includes a cover moving mechanism (125) that moves the cover (120) between a first position in which the cover (120) closes the opening (111a) and a second position that is vertically above the first position. The mask storage chamber (100) is configured such that when the cover (120) is moved to the second position, the mask box (200) moves horizontally and can move to a position between the opening (111a) and the cover (120).

Description

Technical Field

[0001] This invention relates to a mask storage device and a film forming device. Background Technology

[0002] Previously, it was known that in film-forming apparatuses, a mask storage device capable of accommodating multiple masks was provided to enable mask replacement within the apparatus. Patent Document 1 discloses a technique in which a mask box capable of storing multiple masks in multiple layers can be placed and removed relative to the chamber body by opening the cover of the upper part of the chamber body.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Description of Chinese Patent Application Publication No. 109852925 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] In the case of the technology disclosed in Patent Document 1, because of the structure that allows the cover to slide horizontally, it is necessary to move the mask box while it is being lifted high, and to pick it up and put it in relative to the chamber body. Therefore, there is still room for improvement regarding the picking up and putting in the mask box.

[0008] The purpose of this invention is to provide a mask storage device and a film forming device that can reduce the space required for picking up and placing mask boxes.

[0009] Methods for solving problems

[0010] The mask storage device of the present invention includes:

[0011] A mask box, which can accommodate multiple masks in multiple layers;

[0012] The chamber body, capable of housing the mask box; and

[0013] A cover, capable of opening and closing the opening of the chamber body.

[0014] Its features are,

[0015] The mask storage device includes a cover moving mechanism that moves the cover between a first position where the cover closes the opening and a second position that is vertically above the first position.

[0016] The mask storage device is configured such that, when the cover is moved to the second position, the mask box moves horizontally and can move to a position between the opening and the cover.

[0017] Invention Effects

[0018] As explained above, according to the present invention, the space required for picking up and placing the mask box can be reduced. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of a part of the film-forming device.

[0020] Figure 2 This is a schematic diagram of the film-forming chamber.

[0021] Figure 3 This is a schematic diagram of the mask storage chamber (mask storage device).

[0022] Figure 4 This is a schematic diagram of the mask box.

[0023] Figure 5 This is a diagram illustrating the mechanism of the mask storage chamber.

[0024] Figure 6 This is a diagram illustrating the mechanism of the mask storage chamber.

[0025] Figure 7 This is a diagram illustrating the mechanism of the mask storage chamber.

[0026] Figure 8 This is a diagram illustrating the mechanism of the mask storage chamber.

[0027] Figure 9 This is a diagram illustrating the mechanism of the mask storage chamber.

[0028] Figure 10 This is a diagram illustrating the mechanism of the mask storage chamber.

[0029] Figure 11 This is a diagram illustrating the mechanism of the mask storage chamber.

[0030] Figure 12 This is a diagram illustrating the mechanism of the mask storage chamber.

[0031] Figure 13 This is a diagram illustrating the mechanism of the mask storage chamber.

[0032] Figure 14 This is a diagram illustrating the mechanism of the mask storage chamber.

[0033] Figure 15 This is a diagram illustrating the mechanism of the mask storage chamber.

[0034] Figure 16 This is a diagram illustrating the mechanism of the mask storage chamber.

[0035] Figure 17 This is a diagram illustrating the mechanism of the mask storage chamber.

[0036] Figure 18 This is a diagram illustrating the mechanism of the mask storage chamber.

[0037] Figure 19 This is a diagram illustrating the mechanism of the mask storage chamber.

[0038] Figure 20 It is an overall view of the organic EL display device and a cross-sectional view of the components of the organic EL display device. Detailed Implementation

[0039] Hereinafter, with reference to the accompanying drawings, embodiments for carrying out the present invention will be described in detail. However, the following embodiments are merely illustrative examples of preferred structures of the present invention, and the scope of the present invention is not limited to these structures. Furthermore, unless specifically stated otherwise, the scope of the present invention is not intended to be limited to the hardware and software structures, processing flows, manufacturing conditions, dimensions, materials, shapes, etc., of the apparatus described below.

[0040] This invention relates to a film-forming apparatus for forming thin films on a substrate. The invention is preferably applied to apparatuses for forming thin films with desired patterns on the surface of a substrate by vacuum evaporation. As the substrate material, any material such as glass, resin, or metal can be selected; furthermore, as the evaporation material, any material such as organic or inorganic materials (metals, metal oxides, etc.) can be selected. Specifically, the technology of this invention can be applied to manufacturing apparatuses for organic electronic devices (e.g., organic EL display devices, thin-film solar cells), optical components, etc. This invention can also be applied to film-forming apparatuses using methods other than evaporation, such as sputtering.

[0041] (Example)

[0042] Reference Figures 1-20 The mask storage device and film forming device of the present invention will be described in the following description.

[0043] <Production Line of Electronic Equipment>

[0044] Figure 1 It is a schematic structural diagram of a part of a film-forming apparatus, and more specifically, a top view schematically showing a part of the structure of an electronic equipment production line.

[0045] Generally speaking, such as Figure 1 As shown, the film forming apparatus 1 includes multiple film forming chambers 10 for forming films on a substrate, a mask storage chamber 100 serving as a mask storage device for storing masks before and after use, and a transport chamber 30 disposed in the center thereon.

[0046] A transport robot 40 is disposed within the transport chamber 30. The transport robot 40 is used to transport substrates between multiple film-forming chambers 10 and to transport masks between the film-forming chambers 10 and the mask storage chamber 100. The transport robot 40 is, for example, a robot with a configuration in which a robotic hand for holding substrates or masks is mounted on a multi-jointed arm.

[0047] In the substrate flow direction, a path chamber 50 and a buffer chamber 60 are connected to the film deposition apparatus 1. The path chamber 50 transports the substrate transported from the upstream side to the film deposition apparatus 1, and the buffer chamber 60 is used to transport the substrate after film deposition in the film deposition apparatus 1 to other film deposition apparatuses downstream. A transport robot 40 receives the substrate from the upstream path chamber 50 and transports it to one of the film deposition chambers 10 within the film deposition apparatus. Additionally, the transport robot 40 receives the substrate after film deposition in the film deposition apparatus 1 from one of the multiple film deposition chambers 10 and transports it to the buffer chamber 60 connected to the downstream side. A swivel chamber 70 is provided between the buffer chamber 60 and the further downstream path chamber 50 to change the orientation of the substrate. This allows the substrate to be oriented in the same direction in both the upstream and downstream film deposition apparatuses, facilitating substrate processing.

[0048] In the mask storage chamber 100, the masks to be used in the film deposition process in the film deposition chamber 10 and the used masks are separately stored in two mask boxes. The conveying robot 40 transports the used masks from the film deposition chamber 10 to the mask boxes in the mask storage chamber 100, and transports new masks stored in other mask boxes in the mask storage chamber 100 to the film deposition chamber 10.

[0049] The various chambers, including the film deposition chamber 10, mask storage chamber 100, transport chamber 30, buffer chamber 60, and gyratory chamber 70, are maintained in a high vacuum state during the manufacturing process of the organic EL display panel. A series of film deposition processes, such as the transfer of substrates with the transport robot 40, the adjustment (alignment) of the relative positions of the substrates and masks, the fixing of the substrates onto the masks, and film deposition (evaporation), are automatically performed by the film deposition apparatus 1.

[0050] In addition, the film deposition apparatus 1 includes a control unit 80. Besides controlling various functions of the mask storage chamber 100, which serves as a mask storage device, the control unit 80 also controls substrate transport and alignment, as well as film deposition. The control unit 80 can be configured, for example, as a computer with a processor, memory, storage device, I / O, etc. In this case, the functions of the control unit 80 are implemented by the processor executing a program stored in the memory or storage device. The computer can be a general-purpose personal computer, an embedded computer, or a PLC (programmable logic controller). Alternatively, some or all of the functions of the control unit 80 can be configured using circuits such as ASICs or FPGAs. Furthermore, a control unit 80 can be provided for each film deposition apparatus, or multiple film deposition apparatuses can be controlled by a single control unit 80.

[0051] <Film-forming chamber>

[0052] Especially referencing Figure 2 The structure of the film-forming chamber 10 and the film-forming process will be described. The film-forming chamber 10 includes a chamber 11, a support mechanism 12 disposed within the chamber 11, and a film-forming source 13 disposed within the chamber 11. The chamber 11 is configured to maintain a vacuum atmosphere or an inactive gas atmosphere. Within the chamber 11, a substrate S, which is the object of film formation, is supported downward by the support mechanism 12. In addition, a mask M is disposed on the underside of the substrate S in a position positioned relative to the substrate S. The mask M has openings at positions corresponding to where a thin film will be formed on the substrate S, and is configured to cover the positions on the substrate S where a thin film will not be formed. Thus, by performing film formation on the substrate S via the mask M, a thin film with the desired pattern (the pattern corresponding to the position where the opening is provided) is formed on the substrate S. Furthermore, as a specific example of the mask M, a component consisting of a mask frame disposed on the outer periphery and having high rigidity, and a mask foil disposed on the inner side of the mask frame and having low rigidity can be cited. The mask frame and the mask foil can be joined by welding or the like. In a mask constructed in this way, the aforementioned openings are provided in the mask foil. Furthermore, as another specific example, a mask that integrally comprises a portion corresponding to the mask frame and a portion corresponding to the mask foil can be cited. Such a mask can be fabricated, for example, by processing a silicon wafer.

[0053] In this embodiment, film formation (evaporation) based on vacuum evaporation is performed. Specifically, the film formation source 13 in this embodiment is an evaporation source. The film formation material evaporates or sublimates from the film formation source 13 and passes through the opening of the mask M, depositing the film formation material onto the substrate S and forming a thin film on the substrate S. Since the evaporation source is a known technology, it will be described simply here. For example, the evaporation source consists of a container (crucible) for containing the evaporation material, a heater for heating the container, a baffle for stopping the release of the evaporation material, a drive mechanism for driving the baffle and other components, and an evaporation rate monitor for identifying the thickness of the film being formed. Furthermore, in this embodiment, the evaporation source is shown as the film formation source 13, but this is not the case in the present invention, and it can also be applied to sputtering apparatuses that use a sputtering target as the film formation source.

[0054] In the film-forming chamber 10, while the mask M, which is housed in the mask storage chamber 100 that serves as a mask storage device, is moved to a position overlapping with the substrate S, a film-forming source 13 is used to form a film on the substrate S.

[0055] <Mask Storage Device>

[0056] Reference Figures 3-19 The structure and operation (mechanism) of the mask storage chamber 100, which serves as a mask storage device, are explained. Furthermore, in each figure, the structure (mechanism) required for explaining the operation mechanism is shown as the central focus, and other structures are appropriately omitted. Additionally, some structures are indicated with dashed lines as needed to facilitate differentiation from other structures. Figures 5-15 , Figures 17-19 In the image, (a) shows a view from above, and (b) shows a view from the side. Additionally, in... Figure 3 , Figures 5-19 The diagram shows three axes (X, Y, and Z axes). The Z-axis corresponds to the vertical direction when the film-forming apparatus 1 is set in a horizontal plane, while the X and Y axes correspond to directions that are parallel to and orthogonal to the horizontal plane.

[0057] <<Overall Structure of Mask Storage>>

[0058] Figure 3 This is a schematic diagram showing the overall structure of the mask storage chamber 100. The mask storage chamber 100 includes: a mask box 200 capable of storing multiple masks M in multiple layers; a chamber body 111 capable of housing the mask box 200; and a cover 120 capable of opening and closing an opening 111a of the chamber body 111. On the inner (lower) side of the cover 120, a plurality of ribs 121 are provided to enhance the strength of the cover 120 within a range that does not interfere with various internal mechanisms of the chamber body 111.

[0059] In the chamber body 111, an opening 111a is provided at the upper part in the vertical direction, and a cover 120 configured to reciprocate along the Z-axis (vertical direction) opens and closes the opening 111a. The mask storage chamber 100 of this embodiment includes a cover moving mechanism 125, which moves the cover 120 between a first position where the opening 111a is closed and a second position that is vertically above the first position. Figure 3 In the figure, the solid line shows the cover 120 in the first position, and the dashed line shows the cover 120 in the second position. As shown, the mask box 200 is configured to move horizontally and move to the position between the opening 111a and the cover 120 when the cover 120 is in the second position.

[0060] The cover moving mechanism 125 includes a lead screw shaft 125a, a drive source 125b such as a motor that rotates the lead screw shaft 125a in both directions, and a nut 125c that moves along the lead screw shaft 125a in conjunction with its rotation. The cover 120 moves together with the nut 125c by being fixed to it. Furthermore, it is desirable to provide a linear guide so that the cover 120 moves up and down in a stable state, but this is omitted in the figures. In this embodiment, the cover moving mechanism 125 is shown as being constructed using a ball screw mechanism, but any mechanism capable of linearly reciprocating the cover 120 is acceptable and is not limited to a ball screw mechanism; various structures such as rack and pinion mechanisms can be used. In the mask storage chamber 100 of this embodiment, there are multiple other mechanisms that reciprocate each component, but various known technologies such as ball screw mechanisms and rack and pinion mechanisms can also be used in these mechanisms; therefore, their descriptions are appropriately omitted below.

[0061] Furthermore, the mask storage chamber 100 is equipped with a mask box moving mechanism, which lowers the mask box 200, which has been moved to a position between the opening 111a and the cover 120 (located in the second position), into the interior of the chamber body 111. Additionally, this mask box moving mechanism is also used to raise the mask box 200 when it is removed from the chamber body 111. The mask box moving mechanism and its operation will be described later.

[0062] A mask opening 111b is provided on the side wall of the chamber body 111 for placing and removing the mask M relative to the interior of the chamber body 111. The mask opening 111b is configured to be opened and closed using a cover 112.

[0063] Inside the chamber body 111 are: a support platform 130 supporting the mask box 200; and a lifting mechanism that raises and lowers the support platform 130 to change the positional relationship between the mask box 200 and the mask opening 111b in the height direction. Similar to the cover moving mechanism 125, this lifting mechanism employs a ball screw mechanism with a lead screw shaft 135 and a drive source 136 such as a motor; however, as described above, other mechanisms may also be used. Furthermore, the support platform 130 can function as a nut, or it can be fixed to a nut. The lifting mechanism configured as described above allows the mask box 200 and the support platform 130 to move together, so that the mask M removed from the chamber body 111 is at the same height as the mask opening 111b, and the mask M can be removed using a robot arm 90. Additionally, the used mask M can be moved into the chamber body 111 and placed in a predetermined position within the mask box 200. This allows for the replacement of used masks M with newly used masks M. Furthermore, in this embodiment, the mask boxes 200 are configured to be stacked and housed multiple times inside the chamber body 111. Figure 3 The image shows a state where the mask box 200 is stacked in two layers and housed inside the chamber body 111, but the mask box 200 can also be configured to be stacked in three or more layers.

[0064] <<Mask Box>>

[0065] Reference Figure 4 The detailed structure of the mask box 200 will be explained. Figure 4 (a) is a top view of the mask box, (b) is a bottom view of the mask box, (c) is a front view of the mask box, and (d1) and (d2) are side views of the mask box. (d1) shows one of the two side views, and (d2) shows the other side view.

[0066] The mask box 200 includes a top plate portion 210, a bottom plate portion 220, and multiple support portions 215 connecting the top plate portion 210 and the bottom plate portion 220. Furthermore, multiple support portions 230 for supporting masks M are provided on the inner surface of the support portions 215. Thus, multiple masks M can be stored in multiple layers.

[0067] The top plate portion 210 is provided with a plurality of first supported portions 211 and positioning pins 212 (upper surface side pins). The bottom plate portion 220 is provided with a plurality of through holes 221 for the first supported portions 211 to enter, so that the first supported portions 211 of the mask box 200 located on the lower side will not interfere when the mask box 200 is overlapped.

[0068] In addition, the base plate 220 is provided with a plurality of positioning holes 222, which are used to align the mask boxes 200 with each other in the X-axis and Y-axis directions by inserting positioning pins 212 for the mask box 200 mounted on the lower side when the mask boxes 200 are overlapped. Furthermore, the support platform 130 is also provided with positioning pins 131, which are inserted into the positioning holes 222 when the mask box 200 is directly supported on the support platform 130. This also aligns the mask box 200 with respect to the support platform 130 in the X-axis and Y-axis directions. Ideally, the pins 212 and 131 are tapered. This allows for more reliable insertion of the pins 212 and 131 into the positioning holes 222 even if there is a slight positional misalignment between the mask boxes 200 and each other or between the mask box 200 and the support platform 130 in the X-axis and Y-axis directions. Furthermore, it allows for correction of any such positional misalignment. Furthermore, by making the inner circumferential surface of the positioning hole 222 tapered towards the depth of the hole, the aforementioned positional offset can be corrected more reliably.

[0069] Multiple second supported portions 223 and pressed surfaces 224 are provided on the side of the mask box 200, and a pair of guide surfaces 225 are provided. The second supported portions 223 are provided at the lower end of the support portion 215, and the pressed surfaces 224 and the pair of guide surfaces 225 are provided on the inner side of the second supported portions 223.

[0070] When the mask box 200 is moved up and down using the mask box moving mechanism, a plurality of first supported portions 211 provided on the top plate portion 210 and a plurality of second supported portions 223 provided on the side surfaces of the mask box 200 are used. Additionally, the pressed surface 224 and a pair of guide surfaces 225 are used to align the mask box 200 in the X-axis and Y-axis directions midway through the process of lowering the mask box 200 using the mask box moving mechanism. The mechanism and operation for picking up and placing the mask box 200 relative to the chamber body 111 will be described below.

[0071] <<The Action of Mask Storage>>

[0072] Reference Figures 5-19 The operation of the mask storage chamber 100 will be explained. Furthermore, in these figures, the mechanism for picking up and placing the mask box 200 relative to the chamber body 111 is shown as the center, and various structures such as the chamber body 111 are shown in a way that is appropriately omitted.

[0073] As described above, the mask storage chamber 100 includes a mask box moving mechanism. The mask box moving mechanism includes a first moving mechanism 140 and a second moving mechanism 150 disposed at a position lower in the vertical direction than the first moving mechanism 140.

[0074] The first moving mechanism 140 includes: a first support portion 141 supporting the mask box 200; and a fixing unit 142 disposed on the first support portion 141 and configured to fix and release the mask box 200. Furthermore, in the illustrated example, the first support portion 141 and the fixing unit 142 are provided at four locations, but their number is not limited and can be adjusted according to usage conditions. Regarding the fixing unit 142, it can be a mechanism capable of mechanically fixing and releasing the mask box 200, or it can be a mechanism capable of fixing and releasing the mask box 200 using magnetic force or the like. The first support portion 141 and the fixing unit 142 are configured to reciprocate along the Z-axis direction (see reference). Figure 5 (b)), and is configured to also be able to reciprocate along the X-axis (see reference). Figure 5 (a) Furthermore, regarding the mechanism for reciprocating the first support portion 141 and the fixing unit 142 along the Z-axis, it can be provided as a mechanism independent of the cover moving mechanism 125, or it can be configured such that the first support portion 141 is fixed to the cover 120, thereby using the cover moving mechanism 125 to move the first support portion 141 and the fixing unit 142 together with the cover 120. The latter structure is used in the illustrated example. That is, the cover moving mechanism 125 also functions as the Z-axis moving mechanism in the first moving mechanism 140. In addition, regarding the mechanism for reciprocating the first support portion 141 and the fixing unit 142 along the X-axis, a ball screw mechanism or a rack and pinion mechanism can be used as described above. Since the reciprocating distance is relatively short, an electric actuator such as a solenoid is also preferred. As described above, the first moving mechanism 140 includes a mechanism for moving the first support portion 141 and the fixing unit 142 along the Z-axis direction and a mechanism for moving the first support portion 141 and the fixing unit 142 along the X-axis direction.

[0075] The second moving mechanism 150 includes a second support portion 151 and pressing members 152. The second support portion 151 supports the mask box 200. A pair of pressing members 152 are provided next to the second support portion 151. Furthermore, in the illustrated example, the second support portion 151 and the pair of pressing members 152 are provided at four locations, but their number is not limited and can be adjusted according to usage conditions, etc. The second support portion 151 and the pressing members 152 are configured to reciprocate along the Z-axis direction (see reference). Figure 5 (b)), and is configured to also be able to reciprocate along the X-axis (see reference). Figure 5(a) The second support portion 151 and the pressing member 152 are configured to reciprocate along the Z-axis direction using a Z-axis direction moving mechanism 153. This Z-axis direction moving mechanism 153 includes a support member 153a, a lead screw shaft 153b, a drive source 153c, and a pair of linear guides 153d. The support member 153a has a nut. In the illustrated example, the Z-axis direction moving mechanism 153 is configured with Z-axis direction moving mechanisms 153 on both sides of the X-axis direction, allowing both sets of second support portions 151 and pressing members 152 to reciprocate together along the Z-axis direction using a single Z-axis direction moving mechanism 153. Regarding the mechanism for reciprocating the second support portions 151 and pressing members 152 along the X-axis direction, a ball screw mechanism or a rack and pinion mechanism can be used as described above. Since the reciprocating distance is relatively short, an electrically driven actuator such as a solenoid is also preferred. As described above, the second moving mechanism 150 includes a mechanism (Z-axis moving mechanism 153) for moving the second support portion 151 and the pressing member 152 along the Z-axis direction and a mechanism for moving the second support portion 151 and the pressing member 152 along the X-axis direction.

[0076] The operation of moving the mask box 200 into the chamber body 111 and supporting it on the support platform 130 using the mask storage chamber 100 configured as described above will be explained in the order of the operation.

[0077] First, the cover 120 is moved to the second position using the cover moving mechanism 125 (see reference). Figure 6 At this time, the first support 141 and the fixing unit 142 are in the standby position (outer position in the X-axis direction). Additionally, the second support 151 and the pressing member 152 are located below in the Z-axis direction and in the standby position (outer position in the X-axis direction). Next, the second support 151 is moved inward in the X-axis direction using the second moving mechanism 150 (see reference). Figure 7 ).

[0078] In this state, the mask box 200 is moved horizontally (Y-axis direction) by the transfer machine 95 and moved to the position between the opening 111a of the chamber body 111 and the cover 120 (see reference). Figure 8 Then, the second support portion 151 is moved vertically upward using the second moving mechanism 150, and moved to the position of supporting the mask box 200 (see reference). Figure 9 Then, the transfer machine 95 is moved to a position outside the chamber body 111 (see reference). Figure 10Thus, the second support portion 151 supports the second supported portion 223, and the mask box 200 is in a supported state. Furthermore, in this embodiment, a structure is adopted in which the lower end of the support column 215 serves as the second supported portion 223 and the second support portion 151 supports the second supported portion 223. However, it is also possible to adopt a structure in which the bottom surface of the base plate portion 220 of the mask box 200 serves as the second supported portion and the second support portion 151 supports the bottom surface of the base plate portion 220. In this case, there is the advantage of increasing the design freedom of the support column 215.

[0079] Subsequently, in order to adjust the position in the Z-axis direction, the second moving mechanism 150 is used to slightly lower the second support 151 to a predetermined position, and the first moving mechanism 140 is used to move the first support 141 and the fixing unit 142 inward in the X-axis direction (see reference). Figure 11 Then, by utilizing the second moving mechanism 150, the second support portion 151 is moved downward in the vertical direction (see reference). Figure 12 The mask box 200 is supported on the first support portion 141. In this state, the mask box 200 is fixed by the fixing unit 142. Then, the second support portion 151 is moved to a standby position on the outer side in the X-axis direction by the second moving mechanism 150 (see reference). Figure 13 ).

[0080] Next, the first moving mechanism 140 is used to move the first support 141 and the fixing unit 142 to a predetermined position in the vertical direction ( ). Figure 14 Then, by releasing the fixing unit 142 from the mask box 200, the mask box 200 is placed in a state that allows movement in the horizontal direction (X-axis and Y-axis directions). In this state, the pressing member 152 is moved inward in the X-axis direction by the second moving mechanism 150 (see reference). Figure 15 And make horizontal adjustments to the mask box 200.

[0081] Reference Figure 16 The horizontal movement adjustment of the mask box 200 will be described in more detail. As mentioned above, a plurality of pressing surfaces 224 are provided on the side of the mask box 200, and a pair of guide surfaces 225 are provided. More specifically, as Figure 16 As shown, two locations on each of the two sides of the mask box 200 (a total of four locations) are provided with areas that are pressed by the pressing member 152. Three of the four locations are formed by a pressed surface 224. The pressed surface 224 is formed by a plane perpendicular to the X-axis direction. And the remaining location is formed by a pair of guide surfaces 225. The pair of guide surfaces 225 are formed by a pair of inclined surfaces whose spacing gradually narrows with the pressing direction toward the pressing member 152.

[0082] With the above structure, when the pressing members 152 at the four locations move inward in the X-axis direction to press the pressed surfaces 224 at three locations and the pair of guide surfaces 225 respectively, the mask box 200 is clamped in from both sides in the X-axis direction, thus achieving positional adjustment in the X-axis direction. Furthermore, since the pair of guide surfaces 225 are pressed by the pressing members 152, the mask box 200 also undergoes positional adjustment in the Y-axis direction. Because the pair of guide surfaces 225 are only provided at one location, the mask box 200 can be appropriately positioned relative to the Y-axis direction. In addition, the pressing member 152 in this embodiment is composed of a cylindrical member and is configured to rotate freely about a central axis parallel to the Z-axis direction. Therefore, during the positional adjustment of the mask box 200, sliding between the pressing member 152 and the pressed surface 224, and between the pressing member 152 and the guide surfaces 225, can be suppressed, and the generation of abrasive powder can be suppressed.

[0083] Thus, the mask storage chamber 100 is equipped with a plurality of pressing members 152, which position the mask box 200 in the X-axis direction by pressing it from both sides relative to the X-axis direction (first direction) parallel to the support surface of the first support portion 141 while the mask box 200 is supported on the first support portion 141, thereby positioning the mask box 200 in the X-axis direction. Furthermore, a guide surface 225 is provided at one of the plurality of locations pressed by the pressing members 152 in the mask box 200. The guide surface 225, when pressed by the pressing members 152, causes the mask box 200 itself to move in the Y-axis direction (second direction) parallel to the support surface and perpendicular to the X-axis direction.

[0084] As described above, after adjusting the horizontal position of the mask box 200, the mask box 200 is fixed again using the fixing unit 142. Then, the pressing member 152 is moved to the standby position on the outer side of the X-axis direction using the second moving mechanism 150 (see reference). Figure 17 Then, the first moving mechanism 140 moves the first support 141 and the fixing unit 142 downward in the vertical direction, and the front end of the positioning pin 131 provided on the support platform 130 is inserted into the positioning hole 222. In this state, the fixing unit 142 is released from fixing the mask box 200, and then the first moving mechanism 140 moves the first support 141 downward in the vertical direction. As a result, the positioning pin 131 is fully inserted into the positioning hole 222, and the mask box 200 is supported in the state of being positioned on the support platform 130 (see reference). Figure 18As described above, the positioning pin 131 is tapered, with its tip inserted into the positioning hole 222, and fully inserted into the positioning hole 222 after the fixing unit 142 is released from the mask box 200. Therefore, torsion of the first moving mechanism 140 and the mask box 200 can be avoided, and positioning of the mask box 200 and the support platform 130 can be achieved. Then, the first moving mechanism 140 moves the first support 141 and the fixing unit 142 to a standby position on the outer side in the X-axis direction (see reference). Figure 19 ).

[0085] Through the above procedures, the support action of the mask box 200 on the support platform 130 is completed. Then, the cover 120 is moved to a first position vertically downward using the cover moving mechanism 125, and the opening 111a is closed. Furthermore, while the operation of supporting the mask box 200 on the support platform 130 has been described above, the same operation is performed when other mask boxes 200 overlap with the mask box 200. In this case, up to the above... Figure 17 The actions up to this point are the same. Then, the first moving mechanism 140 moves the first support 141 and the fixing unit 142 downwards in the vertical direction, and the front end of the positioning pin 212 of the lower mask box 200 is inserted into the positioning hole 222 of the upper mask box 200. The mechanism of the action from the insertion of the front end of the pin 212 into the positioning hole 222 until it is fully inserted is the same as the mechanism of the action from the insertion of the front end of the positioning pin 131 into the positioning hole 222 until it is fully inserted. Subsequent actions are also the same.

[0086] Furthermore, when moving the mask box 200 out of the chamber body 111, it can be moved out in a sequence that is roughly the reverse of the previously described order of movement in; therefore, its description is omitted.

[0087] <Methods for Manufacturing Electronic Devices>

[0088] Next, an example of a method for manufacturing an electronic device using the film-forming apparatus 1 of this embodiment will be described. Hereinafter, as an example of an electronic device, the structure and manufacturing method of an organic EL display device will be illustrated. First, the organic EL display device to be manufactured will be described. Figure 20 (a) is an overall view of the organic EL display device 560. Figure 20 (b) shows the cross-sectional structure of a pixel.

[0089] like Figure 20As shown in (a), a plurality of pixels 562, each equipped with a plurality of light-emitting elements, are arranged in a matrix in the display area 561 of the organic EL display device 560. Each light-emitting element has a structure having an organic layer sandwiched between a pair of electrodes, which will be described in detail later. Furthermore, the pixel referred to herein is the smallest unit capable of displaying a desired color in the display area 561. In the case of the organic EL display device of this embodiment, the pixel 562 is constructed by showing a combination of a first light-emitting element 562R, a second light-emitting element 562G, and a third light-emitting element 562B that emit different colors. The pixel 562 is mostly composed of a combination of red light-emitting elements, green light-emitting elements, and blue light-emitting elements, but it may also be a combination of yellow light-emitting elements, cyan light-emitting elements, and white light-emitting elements, as long as it is at least one color, and is not particularly limited.

[0090] Figure 20 (b) is Figure 20 (a) is a partial cross-sectional view at line AB. Pixel 562 has an organic EL element, which has a first electrode (anode) 564, a hole transport layer 565, any one of light-emitting layers 566R, 566G, and 566B, an electron transport layer 567, and a second electrode (cathode) 568 on a substrate 563. The hole transport layer 565, the light-emitting layers 566R, 566G, 566B, and the electron transport layer 567 are equivalent to organic layers. In this embodiment, the light-emitting layer 566R is an organic EL layer that emits red light, the light-emitting layer 566G is an organic EL layer that emits green light, and the light-emitting layer 566B is an organic EL layer that emits blue light. The light-emitting layers 566R, 566G, and 566B are formed in patterns corresponding to the light-emitting elements (sometimes referred to as organic EL elements) emitting red, green, and blue light, respectively. Furthermore, the first electrode 564 is formed separately for each light-emitting element. The hole transport layer 565, electron transport layer 567, and second electrode 568 can be formed together by multiple light-emitting elements 562R, 562G, and 562B, or they can be formed for each light-emitting element. Furthermore, to prevent short circuits between the first electrode 564 and the second electrode 568 due to foreign matter, an insulating layer 569 is provided between the first electrode 564. Moreover, since the organic EL layer is susceptible to degradation due to moisture and oxygen, a protective layer 570 is provided to protect the organic EL element from moisture and oxygen corrosion.

[0091] exist Figure 20In (b), the hole transport layer 565 and the electron transport layer 567 are shown as a single layer, but depending on the structure of the organic EL display element, they can also be formed by multiple layers, including a hole blocking layer and an electron blocking layer. Additionally, a hole injection layer can also be formed between the first electrode 564 and the hole transport layer 565, and this hole injection layer has a band structure that allows for smooth injection of holes from the first electrode 564 to the hole transport layer 565. Similarly, an electron injection layer can also be formed between the second electrode 568 and the electron transport layer 567.

[0092] Next, an example of a method for manufacturing an organic EL display device will be specifically described. First, a substrate 563 is prepared, on which a circuit (not shown) for driving the organic EL display device and a first electrode 564 are formed.

[0093] Acrylic resin is formed on substrate 563 where the first electrode 564 is formed by spin coating. An insulating layer 569 is formed by patterning the acrylic resin using photolithography to create an opening in the portion where the first electrode 564 is formed. This opening corresponds to the light-emitting area where the light-emitting element actually emits light.

[0094] A substrate 563, on which the insulating layer 569 has been patterned, is placed into a first film-forming apparatus. The substrate is held by a substrate support unit, and a hole transport layer 565 is formed on the first electrode 564 of the display area as a common layer. The hole transport layer 565 is formed by vacuum evaporation. In fact, the hole transport layer 565 is formed to a size larger than the display area 561; therefore, a high-precision mask is not required.

[0095] Next, the substrate 563, to which the hole transport layer 565 is formed, is moved into the second film deposition apparatus and held by the substrate support unit. Alignment (first alignment and second alignment) is performed between the substrate and the mask, the substrate is placed on the mask, and a red light emitting layer 566R is formed on the portion of the substrate 563 where the red light emitting element is arranged.

[0096] Similar to the deposition of the light-emitting layer 566R, a green light-emitting layer 566G is deposited using a third film-forming apparatus, and a blue light-emitting layer 566B is deposited using a fourth film-forming apparatus. After the deposition of the light-emitting layers 566R, 566G, and 566B is completed, an electron transport layer 567 is deposited over the entire display area 561 using a fifth film-forming apparatus. The electron transport layer 567 is formed as a common layer on the three color light-emitting layers 566R, 566G, and 566B.

[0097] The substrate to which the electron transport layer 567 is formed is moved to a sputtering apparatus to form a film on the second electrode 568, and then moved to a plasma CVD apparatus to form a film on the protective layer 570, thus completing the organic EL display device 560.

[0098] From the moment the substrate 563, to which the insulating layer 569 has been patterned, is placed into the film-forming apparatus until the protective layer 570 is formed, the light-emitting layer made of organic EL material may deteriorate due to moisture and oxygen exposure if exposed to an atmosphere containing moisture and oxygen. Therefore, in this example, the transfer of substrates between film-forming apparatuses is performed in a vacuum atmosphere or an inactive gas atmosphere.

[0099] <Advantages of the mask storage chamber and film forming apparatus in this embodiment>

[0100] According to this embodiment, the mask box 200 is configured such that when the cover 120 is moved to the second position using the cover moving mechanism 125, it can move horizontally and move to a position between the opening 111a of the chamber body 111 and the cover 120. Therefore, it is not necessary to lift the mask box 200 high while moving it and picking it up and putting it in relative to the chamber body 111, thus reducing the space required for picking up and putting in the mask box 200.

[0101] (other)

[0102] In the above embodiment, a positioning structure for positioning the mask box 200 and the support platform 130 is shown, consisting of a positioning pin 131 provided on the support platform 130 and a positioning hole 222 provided on the mask box 200. However, it is also possible to use a structure in which a pointed positioning pin is provided on the lower surface of the mask box 200 and a positioning hole is provided on the support platform 130. This allows for a positioning structure for positioning the mask box 200 and the support platform 130. Furthermore, in this case, by providing an upper surface-side positioning hole on the upper surface of the mask box 200, multiple mask boxes 200 can be overlapped while in a positioned state. Moreover, with this structure, the mechanism of insertion from the tip of the pin into the positioning hole until full insertion is the same as the mechanism of insertion from the tip of the positioning pin 131 into the positioning hole 222 until full insertion.

[0103] Explanation of reference numerals in the attached figures

[0104] 1: Film forming device; 10: Film forming chamber; 11: Chamber; 12: Support mechanism; 13: Film forming source; 30: Conveying chamber; 40: Conveying robot; 50: Path chamber; 60: Buffer chamber; 70: Rotation chamber; 80: Control unit; 90: Robot hand; 95: Transfer machine; 100: Mask storage chamber; 111: Chamber body; 111a: Opening; 111b: Mask opening; 112: Cover for mask opening; 120: Cover; 121: Rib; 125: Cover moving mechanism; 125a: Lead screw; 125b: Drive source; 125c: Nut; 130: Support platform; 131: Pin; 135: Lead screw; 140 First moving mechanism 141: First support part 142: Fixing unit 150: Second moving mechanism 151: Second support part 152: Pressing member 153: Z-axis moving mechanism 153a: Support member 153b: Lead screw shaft 153c: Drive source 153d: Linear guide 200: Mask box 210: Top plate part 211: First supported part 212: Pin 215: Support part 220: Bottom plate part 221: Through hole 222: Positioning hole 223: Second supported part 224: Pressed surface 225: Guide surface 230: Support part M: Mask S: Substrate.

Claims

1. A mask storage device, the mask storage device comprising: A mask box capable of housing multiple masks in multiple layers; The chamber body, capable of housing the mask box; and A cover, capable of opening and closing the opening of the chamber body. Its features are, The mask storage device includes a cover moving mechanism that moves the cover between a first position where the cover closes the opening and a second position that is vertically above the first position. The mask storage device is configured such that, when the cover is moved to the second position, the mask box moves horizontally and can move to a position between the opening and the cover.

2. The mask storage device according to claim 1, characterized in that, The mask storage device includes a mask box moving mechanism, which lowers the mask box, which has been moved to a position between the opening and the cover, into the interior of the chamber body.

3. The mask storage device according to claim 1, characterized in that, An opening for placing and removing the mask relative to the interior of the chamber body is provided on the side wall of the chamber body, and a support platform for supporting the mask box is provided inside the chamber body. The mask storage device includes a lifting mechanism that raises and lowers the support platform to change the positional relationship between the mask box and the mask opening in the height direction.

4. The mask storage device according to claim 3, characterized in that, The mask storage device has a positioning structure, which positions the mask box and the support platform.

5. The mask storage device according to claim 4, characterized in that, The positioning structure consists of a pointed pin disposed on one side of the mask box and the support platform, and a positioning hole disposed on the other side of the mask box and the support platform for the pin to be inserted.

6. The mask storage device according to claim 5, characterized in that, The mask boxes are configured to be stacked in multiples and housed inside the chamber body, and, The lower surface of the mask box is provided with the pin or the positioning hole, and the upper surface of the mask box is provided with an upper surface side positioning hole for the pin to be inserted when the mask boxes are overlapped, or a pointed upper surface side pin inserted into the positioning hole.

7. The mask storage device according to claim 6, characterized in that, The mask storage device includes a mask box moving mechanism, which lowers the mask box, which has been moved to a position between the opening and the cover, into the interior of the chamber body. The mask box moving mechanism includes a fixing unit, which is configured to fix and release the mask box. With the mask box fixed using the fixing unit, after inserting the front end of the pin or the upper surface side pin into the positioning hole or the upper surface side positioning hole, the fixing based on the fixing unit is released, and then the pin or the upper surface side pin is fully inserted into the positioning hole or the upper surface side positioning hole.

8. The mask storage device according to claim 1, characterized in that, The mask storage device includes: Support member, the support member being disposed in the chamber body and supporting the mask box; and Multiple pressing members press the mask box from both sides in a first direction parallel to the support surface of the support member while the mask box is supported on the support member, thereby positioning the mask box in the first direction. In the mask box, a guide surface is provided at one of the multiple locations pressed by the multiple pressing members. The guide surface is pressed by the pressing members, thereby causing the mask box itself to move in a second direction that is parallel to the support surface and perpendicular to the first direction.

9. The mask storage device according to claim 8, characterized in that, The guide surface is composed of a pair of inclined surfaces, the distance between the pair of inclined surfaces gradually narrowing as they move toward the pressing direction of the pressing member.

10. The mask storage device according to claim 9, characterized in that, The mask storage device includes a mask box moving mechanism, which lowers the mask box, which has been moved to a position between the opening and the cover, into the interior of the chamber body. The mask box moving mechanism includes a fixing unit, which is configured to fix and release the mask box in both the first and second directions. When a pressing action is performed based on the pressing member, the fixation based on the fixing unit is released.

11. A film-forming apparatus, characterized in that, The film-forming apparatus includes: The mask storage device according to any one of claims 1 to 10; as well as A film-forming source, wherein the film-forming source forms a film on the substrate while moving the mask housed in the mask housing device to a position overlapping with the substrate.

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