A vacuum processing apparatus and a vacuum processing device

Abstract

The application belongs to the technical field of vacuum processing, and discloses a dismounting device for vacuum processing and a vacuum processing equipment. The dismounting device for vacuum processing comprises a first shell, a supporting mechanism, an adsorption mechanism, a pressing mechanism and a rotating mechanism. The first shell is provided with a conveying port as an import and export of a mask plate. The supporting mechanism comprises a supporting seat and a rotating part. The supporting seat is fixed in the first shell, and the rotating part is rotatably arranged on the supporting seat. The rotating part is used for supporting a clamp. The clamp is adsorptively connected with the mask plate, and the substrate is fixed on the clamp. The adsorption mechanism is arranged on the first shell. The output end of the adsorption mechanism can adsorb the mask plate and move the mask plate. The pressing mechanism is arranged on the first shell. The output end of the pressing mechanism can press the clamp on the supporting mechanism. The rotating mechanism is arranged on the first shell. The output end of the rotating mechanism is used for driving the rotating part to rotate. The application can simply dismount and mount the mask plate, has high dismounting and mounting efficiency, can ensure stable dismounting and mounting, and can meet the needs of subsequent vacuum processing.

Description

Technical Field

[0001] This invention relates to the field of vacuum processing technology, and in particular to a disassembly and assembly device and a vacuum processing equipment for vacuum processing. Background Technology

[0002] In vacuum processing processes such as vacuum coating, a mask is used to control the working substance of vacuum processing, such as thin film material, to act only on a designated location on the substrate, so as to form a vacuum processing area on the substrate corresponding to the window of the mask.

[0003] Because different areas of the substrate surface require different masks, mask replacement is often necessary during vacuum processing to meet diverse needs. In some existing technologies, mask assembly / disassembly devices primarily involve the installation and removal of the same mask, including clamping and lifting components. The clamping component includes a mounting plate, a magnetic plate, a substrate clamp, and a mask clamp. The magnetic plate is mounted on the mounting plate, with the substrate and mask positioned below it. The substrate clamp holds the substrate, and the mask clamp holds the mask. Magnetic forces exist between the magnetic plate and the mask, allowing them to adhere to each other. During mask removal, the lifting component lifts the magnetic plate upwards, overcoming the magnetic force between them. Simultaneously, the magnetic plate opens the mask clamp and substrate clamp, allowing the mask to detach freely from the substrate. However, installation requires manual or other manual intervention, resulting in complex operations and low efficiency.

[0004] Therefore, there is an urgent need for a disassembly and assembly device and vacuum processing equipment for vacuum processing to solve the above-mentioned technical problems. Summary of the Invention

[0005] The purpose of this invention is to provide a disassembly and assembly device and a vacuum processing equipment for vacuum processing, which simplifies the disassembly and assembly of the mask, has high efficiency, and thus has high efficiency in replacing different mask plates. In addition, it can ensure the stability of the disassembly and assembly operation and meet the requirements of subsequent vacuum processing.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] On the one hand, a disassembly and assembly device for vacuum processing is provided, comprising:

[0008] The first housing is provided with a conveying port, which is used as the inlet and outlet of the mask plate;

[0009] The support mechanism includes a support base and a rotating component. The support base is fixed inside the first housing, and the rotating component is rotatably disposed on the support base. The rotating component is used to support the clamp. The clamp is adsorbed and connected to the mask plate. The substrate is fixed to the clamp and located between the clamp and the mask plate.

[0010] An adsorption mechanism is disposed in the first housing. The output end of the adsorption mechanism can adsorb the mask plate and can move the mask plate.

[0011] A clamping mechanism is disposed in the first housing, and the output end of the clamping mechanism can clamp the clamp to the support mechanism;

[0012] A rotating mechanism is disposed in the first housing, and the output end of the rotating mechanism is used to drive the rotating component to rotate.

[0013] In some possible implementations, the adsorption mechanism includes a first mounting frame, a first driving member, a first moving member, and a magnetic head. The first mounting frame is fixed to the first housing, and the first driving member is fixed to the first mounting frame for driving the first moving member to move in a vertical direction. The first moving member passes through the first housing, and the magnetic head is connected to the first moving member. The magnetic head can magnetically attract the mask plate.

[0014] In some possible implementations, the clamping mechanism and the adsorption mechanism are arranged opposite to each other. The clamping mechanism includes a second mounting bracket, a second driving member, a second moving member, and a clamping claw. The second mounting bracket is fixed to the first housing, and the second driving member is fixed to the second mounting bracket for driving the second moving member to move in a vertical direction. The second moving member passes through the first housing, and the clamping claw is connected to the second moving member and can abut against the clamp.

[0015] In some possible implementations, the first driving element is a lead screw, which is fixed to the first mounting bracket, and the output end of the lead screw is connected to the first moving element for driving the first moving element to move vertically; and / or,

[0016] The adsorption mechanism further includes a first elastic corrugated tube, the first moving member includes a connecting plate and a first moving rod, the connecting plate is connected to the output end of the first driving member, the first moving rod is fixed to the connecting plate, the first elastic corrugated tube is sleeved on the first moving rod, and both ends abut against the connecting plate and the first housing, respectively.

[0017] In some possible implementations, the second driving member is a cylinder, which is fixed to the second mounting bracket, and the output end of the cylinder is throttle-connected to the second moving member for driving the second moving member to move vertically; and / or,

[0018] The clamping mechanism further includes a second elastic bellows. The second moving part includes a connecting seat and a second moving rod. The connecting seat is connected to the output end of the second driving part. The second moving rod is fixed to the connecting seat. The second elastic bellows is sleeved on the second moving part, and its two ends abut against the connecting seat and the first housing, respectively.

[0019] In some possible implementations, the rotating mechanism includes a motor, a rotating shaft, a driving gear, and a driven gear. The output end of the motor is connected to the rotating shaft for transmission. The rotating shaft passes through the first housing and is connected to the driving gear. The driven gear is rotatably sleeved on the support base and meshes with the driving gear. The rotating component is fixedly connected to the driven gear.

[0020] In some possible implementations, the rotating mechanism further includes a magnetorheological fluid element fixed to the outer surface of the first housing and sleeved around the rotating shaft.

[0021] In some possible implementations, the rotating member includes a fixed ring and at least two overlapping platforms, the fixed ring being fixedly connected to the driven gear, the at least two overlapping platforms being circumferentially spaced and fixed to the fixed ring, and the clamp overlapping the overlapping platforms.

[0022] In some possible implementations, the rotating mechanism further includes a backlash adjustment assembly, which includes a fixing member, an adjusting member, and a bolt. The fixing member is fixed to the first housing, one end of the adjusting member is slidably connected to the fixing member, the other end of the adjusting member is rotatably connected to the rotating shaft, and the bolt is threadedly connected to the adjusting member.

[0023] On the other hand, a vacuum processing apparatus is provided, including a conveying device and a vacuum processing disassembly and assembly device as described in any of the above embodiments. The conveying device includes a second housing and a conveying assembly. The second housing is sealed to a first housing at a conveying port. The conveying assembly is fixed to the second housing and can convey a mask plate into the first housing through the conveying port.

[0024] The beneficial effects of this invention are:

[0025] The vacuum processing disassembly and assembly device provided by this invention includes a first housing, a support mechanism, an adsorption mechanism, a clamping mechanism, and a rotating mechanism. The adsorption mechanism adsorbs and moves the mask plate to a fixture, allowing it to be adsorbed and thus installed, ensuring the mask plate adheres to the substrate on the fixture. The adsorption mechanism, with an adsorption force greater than that of the fixture, disengages the mask plate from the fixture. Simultaneously, the adsorption mechanism moves the mask plate away from the fixture, enabling disassembly. The adsorption mechanism's action on the mask plate allows for both installation and disassembly, simplifying the operation and increasing efficiency, thus facilitating the replacement of different masks. Furthermore, the clamping mechanism ensures stability during the disassembly and assembly operation by maintaining the stability of the adsorption mechanism and the mask plate adsorbed on the fixture. Since different masks have holes in different positions and shapes, the areas to be vacuum processed are different. After the mask is bonded to the substrate, the rotating mechanism drives the rotating component to rotate, so that the areas to be vacuum processed on different masks can be located within the vacuum processing area of ​​the vacuum processing mechanism, thus meeting the requirements of subsequent vacuum processing. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the first part of the vacuum processing disassembly and assembly device provided by the present invention;

[0027] Figure 2 This is a schematic diagram of the second part of the vacuum processing disassembly and assembly device provided by the present invention;

[0028] Figure 3 This is a cross-sectional view of the vacuum processing disassembly and assembly device provided by the present invention;

[0029] Figure 4 This is a top view of a portion of the structure of the vacuum processing disassembly and assembly device provided by the present invention;

[0030] Figure 5 This is a first disassembly structure diagram of the vacuum processing disassembly and assembly device provided by the present invention when disassembling a mask plate;

[0031] Figure 6 This is a second disassembly structure diagram of the vacuum processing disassembly and assembly device provided by the present invention when disassembling a mask plate;

[0032] Figure 7 This is a first installation structure diagram of the vacuum processing disassembly and assembly device provided by the present invention when installing another type of mask plate;

[0033] Figure 8 This is a second installation structure diagram of the vacuum processing disassembly and assembly device provided by the present invention when installing another type of mask plate.

[0034] In the picture:

[0035] 1. First housing; 11. Conveying port; 12. Housing body; 13. First connector; 14. Second connector;

[0036] 2. Support mechanism; 21. Support base; 22. Rotating component; 221. Fixing ring; 222. Overlapping platform;

[0037] 3. Adsorption mechanism; 31. First mounting bracket; 32. First driving component; 33. First moving component; 331. Connecting plate; 332. First moving rod; 34. Magnetic suction head; 35. Support component; 36. First elastic corrugated tube;

[0038] 4. Clamping mechanism; 41. Second mounting bracket; 42. Second driving component; 43. Second moving component; 431. Connecting seat; 432. Second moving rod; 44. Clamping claw; 441. Step groove; 45. Second elastic bellows;

[0039] 5. Rotating mechanism; 51. Rotating shaft; 52. Driving gear; 53. Driven gear; 54. Magnetorheological fluid component; 55. Backlash adjustment assembly; 551. Fixing component; 552. Adjusting component; 553. Bolt; 56. Bearing;

[0040] 100. Mask plate; 200. Fixture. Detailed Implementation

[0041] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0042] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0043] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0044] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0045] like Figures 1 to 8 As shown, the present invention provides a vacuum processing disassembly and assembly device for disassembling and assembling a mask 100 in a vacuum environment. The device includes a first housing 1, a support mechanism 2, an adsorption mechanism 3, a pressing mechanism 4, and a rotating mechanism 5. The first housing 1 has a conveying port 11, which serves as the inlet and outlet of the mask 100. The support mechanism 2 includes a support base 21 and a rotating component 22. The support base 21 is fixed inside the first housing 1, and the rotating component 22 is rotatably disposed on the support base 21. The rotating component 22 supports a clamp 200, which is adsorbed onto the mask 100. A substrate is fixed to the clamp 200 and located between the clamp 200 and the mask 100. The adsorption mechanism 3 is disposed in the first housing 1. The output end of the adsorption mechanism 3 can adsorb the mask 100 and move the mask 100. The pressing mechanism 4 is disposed in the first housing 1. The output end of the pressing mechanism 4 can press the clamp 200 against the support mechanism 2. The rotating mechanism 5 is disposed in the first housing 1. The output end of the rotating mechanism 5 drives the rotating component 22 to rotate.

[0046] like Figure 5 As shown, taking the deposition of different photomasks 100 at different positions on the substrate as an example, when disassembling one photomask 100, the clamping mechanism 4 clamps the fixture 200 to the support mechanism 2, and then the output end of the adsorption mechanism 3 moves to the fixture 200 and adsorbs the photomask 100. The adsorption force of the adsorption mechanism 3 on the photomask 100 is greater than the adsorption force of the fixture 200 on the photomask 100, causing the photomask 100 to detach from the fixture 200. Then, as... Figure 6As shown, the output end of the adsorption mechanism 3 drives the mask plate 100 to move away from the fixture 200; finally, the output end of the adsorption mechanism 3 disengages from the adsorption mask plate 100, and the mask plate 100 is moved out from the transfer port 11 to other functional cavities. Then another mask plate 100 is moved in from the transfer port 11, as shown. Figure 7 As shown, when installing another type of mask 100, the clamping mechanism 4 presses the clamp 200 against the support mechanism 2, and the output end of the adsorption mechanism 3 adsorbs the mask 100 and moves the mask 100 to the clamp 200. Figure 8 As shown, when the mask 100 is adsorbed onto the fixture 200, the output end of the adsorption mechanism 3 detaches from the adsorption of the mask 100 and moves away from the fixture 200. The clamping mechanism 4 releases the fixture 200, and then the rotating mechanism 5 drives the rotating component 22 to rotate, adjusting the angle of the fixture 200 to meet the requirements of subsequent vacuum processing, thereby completing the replacement of the mask 100.

[0047] This invention uses an adsorption mechanism 3 to adsorb the mask 100 and move it to the fixture 200, where it is adsorbed and attached to the substrate on the fixture 200. When the adsorption force of the adsorption mechanism 3 exceeds the adsorption force of the fixture 200, the mask 100 is detached from the fixture 200. Simultaneously, the adsorption mechanism 3 moves the mask 100 away from the fixture 200, allowing for its removal. The adsorption and movement of the mask 100 by the adsorption mechanism 3 enables both installation and removal of the mask 100. This simple and efficient operation significantly improves the efficiency of changing different mask 100s. Furthermore, during the adsorption process between the adsorption mechanism 3 and the mask plate 100 adsorbed on the fixture 200, a clamping mechanism 4 is provided to prevent the fixture 200 from shaking, ensuring the stability of the assembly and disassembly operations. Since different mask plates 100 have holes of different positions and shapes, resulting in different areas to be vacuum-treated, after the mask plate 100 is attached to the substrate, the rotating mechanism 5 drives the rotating component 22 to rotate. This ensures that the areas to be vacuum-treated on different mask plates 100 are all located within the vacuum treatment area of ​​the vacuum treatment mechanism, meeting the requirements of subsequent vacuum treatment.

[0048] Furthermore, it is understood that in some embodiments, when the clamp 200 and the mask 100 are in a separated state without being attached, the rotating mechanism 5 drives the rotating member 22 to rotate, and can also adjust the rotation angle of the clamp 200 relative to the mask 100, so as to adjust the mounting direction of the mask 100 and make the mounting position of the mask 100 on the substrate accurate.

[0049] The adsorption mechanism 3 can adsorb the mask plate 100 by electrostatic adsorption or magnetic attraction. The clamp 200 is electrostatically or magnetically connected to the mask plate 100. Preferably, in this embodiment, the adsorption mechanism 3 magnetically attracts the mask plate 100, and the clamp 200 is magnetically connected to the mask plate 100. The mask plate 100 contains at least one of elements such as iron, cobalt, and nickel, which enables the adsorption mechanism 3 or the clamp 200 to magnetically attract the mask plate 100. Figure 3 As shown, the adsorption mechanism 3 includes a first mounting frame 31, a first driving member 32, a first moving member 33, and a magnetic head 34. The first mounting frame 31 is fixed to the first housing 1, and the first driving member 32 is fixed to the first mounting frame 31, used to drive the first moving member 33 to move vertically. The first moving member 33 passes through the first housing 1, and the magnetic head 34 is connected to the first moving member 33, capable of magnetically attracting the mask plate 100. With this configuration, the first driving member 32 drives the first moving member 33 to move vertically, resulting in a short movement distance for the mask plate 100 and high assembly / disassembly efficiency. When the magnetic head 34 is energized, it enables the adsorption mechanism 3 to attract the mask plate 100; when the magnetic head 34 is de-energized, it allows the adsorption mechanism 3 to detach from the mask plate 100. Specifically, in this embodiment, as shown... Figure 2 As shown, the adsorption mechanism 3 also includes a support member 35. Magnetic heads 34 are connected to the first moving member 33 via the support member 35, and multiple magnetic heads 34 are circumferentially spaced on the support member 35. This arrangement increases the magnetic attraction force of the adsorption mechanism 3 on the mask plate 100 and ensures uniform force distribution on the mask plate 100. In other embodiments, the adsorption mechanism 3 includes a robotic arm and magnetic heads 34. The output end of the robotic arm is connected to the magnetic heads 34. Of course, other forms of moving structures are also possible, as long as they enable movement of the magnetic heads 34. Optionally, in this embodiment, the magnetic head 34 is an electromagnet.

[0050] Optionally, in this embodiment, as Figure 1 As shown, the clamping mechanism 4 and the adsorption mechanism 3 are arranged opposite to each other. The clamping mechanism 4 includes a second mounting bracket 41, a second driving member 42, a second moving member 43, and a clamping claw 44. The second mounting bracket 41 is fixed to the first housing 1, and the second driving member 42 is fixed to the second mounting bracket 41, used to drive the second moving member 43 to move vertically. The second moving member 43 passes through the first housing 1, and the clamping claw 44 is connected to the second moving member 43 and can abut against the clamp 200. The second driving member 42 drives the second moving member 43 to move vertically, resulting in a short movement distance for the clamping claw 44 and high assembly / disassembly efficiency. Specifically, as shown... Figure 3As shown, the bottom surface of the clamping claw 44 is provided with a stepped groove 441. The stepped groove 441 includes an abutment surface and a positioning surface connected in sequence. The abutment surface is used to abut against the top surface of the clamp 200, and the positioning surface is used to abut against the side surface of the clamp 200. By setting the positioning surface, the position of the clamp 200 can be further defined, preventing the clamp 200 from slipping when the clamping claw 44 abuts against the clamp 200. In this embodiment, multiple clamping claws 44 are provided, and the multiple clamping claws 44 are circumferentially spaced on the second moving member 43. This arrangement makes the clamp 200 uniformly stressed. In other embodiments, the clamping mechanism 4 includes a robotic arm and clamping claws 44. The output end of the robotic arm is connected to the clamping claws 44. Of course, other forms of moving structures can also be used, as long as they can realize the movement of the clamping claws 44.

[0051] Optionally, in this embodiment, the first driving member 32 is a lead screw, which is fixed to the first mounting bracket 31. The output end of the lead screw is connected to the first moving member 33 for driving the first moving member 33 to move vertically. This configuration provides high accuracy in the movement of the mask 100, facilitating the determination of the moving position of the mask 100. In other embodiments, the first driving member 32 may also be an electric push rod, a pneumatic cylinder, or a hydraulic cylinder.

[0052] Optionally, in this embodiment, the second driving component 42 is a cylinder, which is fixed to the second mounting bracket 41. The output end of the cylinder is connected to the second moving component 43 for driving the second moving component 43 to move vertically. This invention requires relatively low clamping force; it only needs to be able to clamp the clamp 200 onto the support mechanism 2. This embodiment uses a cylinder, which is low-cost, has a simple and lightweight structure, and is easy to install and maintain. In other embodiments, the first driving component 32 can also be an electric push rod, a lead screw, or a hydraulic cylinder.

[0053] Optionally, in this embodiment, as Figure 3 As shown, the adsorption mechanism 3 also includes a first elastic bellows 36, and the first moving member 33 includes a connecting plate 331 and a first moving rod 332. The connecting plate 331 is connected to the output end of the first driving member 32, the first moving rod 332 is fixed to the connecting plate 331, and the first elastic bellows 36 is sleeved on the first moving rod 332, with both ends abutting against the connecting plate 331 and the first housing 1 respectively. Since the first moving member 33 passes through the first housing 1, the outside of the first housing 1 is the atmospheric side, and the inside of the first housing 1 is a vacuum cavity. By setting the first elastic bellows 36, a sealing function is provided to ensure that the airtightness of the vacuum cavity is not affected when the first moving member 33 moves.

[0054] Optionally, in this embodiment, as Figure 1As shown, the clamping mechanism 4 also includes a second elastic bellows 45. The second moving member 43 includes a connecting seat 431 and a second moving rod 432. The connecting seat 431 is connected to the output end of the second driving member 42. The second moving rod 432 is fixed to the connecting seat 431. The second elastic bellows 45 is sleeved on the second moving member 43, and its two ends abut against the connecting seat 431 and the first housing 1, respectively. Since the second moving member 43 passes through the first housing 1, the second elastic bellows 45 provides a sealing function, ensuring that the movement of the second moving member 43 does not affect the airtightness of the inner cavity of the first housing 1.

[0055] Optionally, such as Figure 2 and Figure 3 As shown, the rotating mechanism 5 includes a motor, a rotating shaft 51, a driving gear 52, and a driven gear 53. The output end of the motor is connected to the rotating shaft 51 for transmission. The rotating shaft 51 passes through the first housing 1 and is connected to the driving gear 52. The driven gear 53 is rotatably sleeved on the support base 21 and meshes with the driving gear 52. The rotating component 22 is fixedly connected to the driven gear 53. Specifically, in this embodiment, the driving gear 52 and the driven gear 53 are externally meshed, avoiding interference between the adsorption mechanism 3 and the rotating mechanism 5. In other embodiments, the driving gear 52 and the driven gear 53 can also be internally meshed. In this embodiment, a bearing 56 is provided between the driven gear 53 and the support base 21, improving the flexibility of rotation.

[0056] Optionally, in this embodiment, the rotating mechanism 5 further includes a magnetic fluid component 54, which is fixed to the outer surface of the first housing 1 and sleeved around the rotating shaft 51. By providing the magnetic fluid component 54, the airtightness of the inner cavity of the first housing 1 is ensured when the rotating shaft 51 rotates. The magnetic fluid component 54 is a mature technology in related fields, and will not be described in detail in this embodiment.

[0057] Optionally, in this embodiment, the rotating component 22 includes a fixed ring 221 and at least two overlapping platforms 222. The fixed ring 221 is fixedly connected to the driven gear 53, and the at least two overlapping platforms 222 are circumferentially spaced and fixed to the fixed ring 221. The clamp 200 overlaps the overlapping platforms 222. The at least two overlapping platforms 222 being circumferentially spaced and fixed to the fixed ring 221 facilitates the transport assembly to transport the mask plate 100 from the gap between two adjacent overlapping platforms 222, avoiding interference between the transport assembly and the rotating component 22.

[0058] Optionally, in this embodiment, as Figure 2 and Figure 3As shown, the rotating mechanism 5 also includes a backlash adjustment assembly 55, which includes a fixing member 551, an adjusting member 552, and a bolt 553. The fixing member 551 is fixed to the first housing 1. One end of the adjusting member 552 is slidably connected to the fixing member 551, and the other end of the adjusting member 552 is rotatably connected to the rotating shaft 51. The bolt 553 is threadedly connected to the adjusting member 552. When adjusting the gap between the driving gear 52 and the driven gear 53, the adjusting member 552 slides relative to the fixing member 551 by rotating the bolt 553, thereby moving the adjusting member 552 closer to or further away from the driven gear 53. Since the adjusting member 552 is rotatably connected to the rotating shaft 51, the gap between the rotating shaft 51 and the driving gear 52 relative to the driven gear 53 can be adjusted. This configuration is simple in structure and convenient in adjustment.

[0059] Optionally, in this embodiment, as Figure 1 As shown, the first housing 1 includes a housing body 12, a first connecting member 13, and a second connecting member 14. The housing body 12 has a first through hole and a second through hole. The first connecting member 13 covers and is detachably connected to the first through hole. A first mounting bracket 31 is fixed to the first connecting member 13, and the second connecting member 14 covers and is detachably connected to the second through hole. A second mounting bracket 41 is fixed to the second connecting member 14. This arrangement facilitates the assembly and disassembly of the adsorption mechanism 3 and the pressing mechanism 4. During installation, the adsorption mechanism 3 and the first connecting member 13 can be installed separately, as can the pressing mechanism 4 and the second connecting member 14. After installation, they are then mounted as a whole onto the housing body 12. Specifically, in this embodiment, the second connecting member 14 protrudes into the inner cavity of the housing body 12 and has an installation cavity for installing the pressing mechanism 4. This arrangement saves space and shortens the moving distance of the pressing claw 44, resulting in higher assembly and disassembly efficiency.

[0060] This invention also provides a vacuum processing apparatus, including a conveying device and a vacuum processing disassembly and assembly device. The conveying device includes a second housing and a conveying assembly. The second housing is sealed to a first housing 1 at a conveying port 11. The conveying assembly is fixed to the second housing and can convey a mask 100 into the first housing 1 through the conveying port 11. This vacuum processing apparatus simplifies the disassembly and assembly of the mask 100, has high efficiency, and thus provides high efficiency for replacing different mask 100s. Furthermore, it ensures the stability of the disassembly and assembly operations and meets the requirements of subsequent vacuum processing. In this embodiment, the conveying assembly is a robotic arm, which enables flexible transport of the mask 100.

[0061] Understandably, in some embodiments, the vacuum processing equipment is used for vacuum coating. As a vacuum coating apparatus, the mask 100 is used to control the deposition of a specified functional thin film within a designated area of ​​the substrate. The vacuum processing disassembly and assembly device provided by this invention can efficiently and stably replace the mask 100 of the substrate to deposit different functional thin films in different areas of the substrate. After the mask 100 is attached to the substrate, the rotating mechanism 5 drives the rotating component 22 to rotate, ensuring that the areas of different mask 100s to be vacuum coated are all located within the specific vacuum coating area of ​​the vacuum coating equipment through rotation, thus improving the quality of vacuum coating.

[0062] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A disassembly and assembly device for vacuum processing, characterized in that, include: The first housing (1) is provided with a conveying port (11) for use as the inlet and outlet of the mask plate (100); The support mechanism (2) includes a support base (21) and a rotating member (22). The support base (21) is fixed inside the first housing (1). The rotating member (22) is rotatably disposed on the support base (21). The rotating member (22) is used to support the clamp (200). The clamp (200) is adsorbed and connected to the mask plate (100). The substrate is fixed to the clamp (200) and located between the clamp (200) and the mask plate (100). An adsorption mechanism (3) is disposed in the first housing (1). The output end of the adsorption mechanism (3) can adsorb the mask plate (100) and can move the mask plate (100). A clamping mechanism (4) is disposed in the first housing (1), and the output end of the clamping mechanism (4) can clamp the clamp (200) to the support mechanism (2); A rotating mechanism (5) is disposed in the first housing (1), and the output end of the rotating mechanism (5) is used to drive the rotating component (22) to rotate.

2. The vacuum processing disassembly and assembly device according to claim 1, characterized in that, The adsorption mechanism (3) includes a first mounting frame (31), a first driving member (32), a first moving member (33), and a magnetic head (34). The first mounting frame (31) is fixed to the first housing (1), and the first driving member (32) is fixed to the first mounting frame (31) to drive the first moving member (33) to move in the vertical direction. The first moving member (33) passes through the first housing (1), and the magnetic head (34) is connected to the first moving member (33). The magnetic head (34) can magnetically attract the mask plate (100).

3. The vacuum processing disassembly and assembly device according to claim 1, characterized in that, The pressing mechanism (4) and the adsorption mechanism (3) are arranged opposite to each other. The pressing mechanism (4) includes a second mounting bracket (41), a second driving member (42), a second moving member (43), and a pressing claw (44). The second mounting bracket (41) is fixed to the first housing (1), and the second driving member (42) is fixed to the second mounting bracket (41) for driving the second moving member (43) to move in the vertical direction. The second moving member (43) passes through the first housing (1), and the pressing claw (44) is connected to the second moving member (43) and can abut against the clamp (200).

4. The vacuum processing disassembly and assembly device according to claim 2, characterized in that, The first driving component (32) is a lead screw, which is fixed to the first mounting bracket (31). The output end of the lead screw is connected to the first moving component (33) for driving the first moving component (33) to move vertically; and / or, The adsorption mechanism (3) further includes a first elastic corrugated tube (36). The first moving part (33) includes a connecting plate (331) and a first moving rod (332). The connecting plate (331) is connected to the output end of the first driving part (32). The first moving rod (332) is fixed to the connecting plate (331). The first elastic corrugated tube (36) is sleeved on the first moving rod (332), and both ends abut against the connecting plate (331) and the first housing (1) respectively.

5. The vacuum processing disassembly and assembly device according to claim 3, characterized in that, The second driving component (42) is a cylinder, which is fixed to the second mounting bracket (41). The output end of the cylinder is connected to the second moving component (43) for driving the second moving component (43) to move vertically; and / or, The clamping mechanism (4) further includes a second elastic bellows (45). The second moving part (43) includes a connecting seat (431) and a second moving rod (432). The connecting seat (431) is connected to the output end of the second driving part (42). The second moving rod (432) is fixed to the connecting seat (431). The second elastic bellows (45) is sleeved on the second moving part (43), and both ends abut against the connecting seat (431) and the first housing (1) respectively.

6. The vacuum processing disassembly and assembly device according to claim 1, characterized in that, The rotating mechanism (5) includes a motor, a rotating shaft (51), a driving gear (52), and a driven gear (53). The output end of the motor is connected to the rotating shaft (51) for transmission. The rotating shaft (51) passes through the first housing (1) and is connected to the driving gear (52). The driven gear (53) is rotatably sleeved on the support base (21) and meshes with the driving gear (52). The rotating component (22) is fixedly connected to the driven gear (53).

7. The vacuum processing disassembly and assembly device according to claim 6, characterized in that, The rotating mechanism (5) further includes a magnetic fluid component (54), which is fixed to the outer surface of the first housing (1) and sleeved on the outside of the rotating shaft (51).

8. The vacuum processing disassembly and assembly device according to claim 6, characterized in that, The rotating component (22) includes a fixed ring (221) and at least two overlapping platforms (222). The fixed ring (221) is fixedly connected to the driven gear (53). At least two overlapping platforms (222) are circumferentially spaced and fixed to the fixed ring (221). The clamp (200) overlaps the overlapping platform (222).

9. The vacuum processing disassembly and assembly device according to claim 6, characterized in that, The rotating mechanism (5) further includes a backlash adjustment assembly (55), which includes a fixing member (551), an adjusting member (552), and a bolt (553). The fixing member (551) is fixed to the first housing (1). One end of the adjusting member (552) is slidably connected to the fixing member (551), and the other end of the adjusting member (552) is rotatably connected to the rotating shaft (51). The bolt (553) is threadedly connected to the adjusting member (552).

10. A vacuum processing device, characterized in that, The device includes a conveying device and a disassembly and assembly device for vacuum processing as described in any one of claims 1-9. The conveying device includes a second housing and a conveying assembly. The second housing is sealed to a first housing (1) at a conveying port (11). The conveying assembly is fixed to the second housing and can convey a mask plate (100) into the first housing (1) through the conveying port (11).

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