A steerable sample heating stage

Abstract

The application discloses a controllable sample heating table, which comprises an adapter flange, a rotating mechanism and a cooling structure. The upper end of the adapter flange is sequentially provided with a lifting mechanism one, a rotating driving mechanism and a lifting mechanism two from bottom to top. The rotating mechanism comprises a sleeve, a connecting flange one, a linear bearing and a placing table. The sleeve is arranged in the through hole of the adapter flange. The lower end of the sleeve is internally provided with the linear bearing. The lower end of the sleeve is fixedly connected with a mounting frame. The lower end of the mounting frame is fixedly connected with the placing table. The upper end of the sleeve is provided with the connecting flange one. The cooling structure comprises a supporting pipe, a cooling water pipe, a VCR joint, a cooling assembly and a cooling circular plate. The controllable sample heating table adopts a cooling mechanism of a water-cooling pool plus a wrapped heating module. The temperature and vacuum degree of the peripheral cavity are reduced during the heating process. Meanwhile, the overheating of the top part is prevented, the heat shielding effect is enhanced, the rotation of the sample is more stable, and the uniformity of sample growth is better.

Description

Technical Field

[0001] This invention relates to the field of high-quality thin film material preparation technology, such as molecular beam epitaxy, specifically to a controllable sample heating stage. Background Technology

[0002] In the field of high-quality two-dimensional thin film material preparation, an ultra-high vacuum environment is required because the atmosphere affects the quality of the prepared materials. Generally speaking, the higher the vacuum level, the higher the quality of the prepared materials. Thin film material preparation equipment includes molecular beam epitaxy (MBE) and pulsed laser deposition (PLD), both of which require a controllable sample heating stage within a vacuum for raising, rotating, heating, and measuring the temperature of the sample.

[0003] While existing products on the market can achieve sample lifting, rotation, heating, and temperature measurement functions, they lack thermal shielding and water-cooling structures for the sample heater. This results in the surrounding cavity and components being heated to higher temperatures, significantly degrading the vacuum level. Furthermore, heat conduction can damage other components of the controllable sample heating stage, significantly reducing the cavity vacuum level and thus affecting the quality of material preparation. Additionally, the sample rotation heating process is unstable, affecting the uniformity of sample growth. Therefore, we propose a controllable sample heating stage. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the existing defects and provide a controllable sample heating stage, which adopts a water-cooled pool and a cooling mechanism that wraps the heating module. During the heating process, the temperature and vacuum of the outer cavity are reduced, while the top parts are prevented from overheating, the heat shielding effect is enhanced, the rotation of the sample is more stable, and the uniformity of sample growth is better. This can effectively solve the problems in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a controllable sample heating stage, comprising an adapter flange, a rotating mechanism, and a cooling structure; The adapter flange has, from bottom to top, a lifting mechanism 1, a rotary drive mechanism, and a lifting mechanism 2. Rotating mechanism: It includes a sleeve, a connecting flange, a linear bearing, and a placement platform. The sleeve is disposed inside the through hole of the adapter flange. A linear bearing is disposed inside the lower end of the sleeve. A mounting bracket is fixedly connected to the lower end of the sleeve. A placement platform is fixedly connected to the lower end of the mounting bracket. A connecting flange is disposed at the upper end of the sleeve. Cooling structure: It includes a support tube, cooling water pipes, VCR connectors, cooling components, and a cooling disc. The support tube is inserted into the inner ring of the linear bearing. Two cooling water pipes are installed inside the support tube. A cooling disc is installed at the lower end of the support tube. A cooling component is installed at the upper end of the cooling disc. A VCR connector is installed between the cooling component and the lower end of the cooling water pipes. A heating mechanism is installed at the lower end of the cooling disc. The cooling disc is located at the upper end of the placement stage. A cooling mechanism consisting of a water-cooled pool and a heating module is used to reduce the temperature and vacuum of the outer cavity during heating, while preventing overheating of the top parts, enhancing the heat shielding effect, and making the sample rotation more stable and the sample growth more uniform.

[0006] Furthermore, the cooling structure also includes heating and temperature measuring electrodes and a connecting seat. The connecting seat is fixedly connected to the upper end of the support tube, and two connecting pipes are fixedly connected to the outer arc surface of the connecting seat. The upper ends of the cooling water pipes are respectively used in conjunction with the adjacent connecting pipes. A heating and temperature measuring electrode is provided in the middle of the upper end of the connecting seat. The input end of the heating electrode of the heating and temperature measuring electrode is electrically connected to the output end of the molecular beam epitaxy equipment controller, and the temperature measuring electrode of the heating and temperature measuring electrode is bidirectionally electrically connected to the molecular beam epitaxy equipment controller to realize the power supply and detection of the disc graphite heater.

[0007] Furthermore, the cooling assembly includes a water storage tank, a return pipe, and an injection pipe. The water storage tank is fixedly connected to the upper end of the inner arc surface of the cooling circular plate. The upper surface of the water storage tank is fixedly connected to the lower end of the support pipe. The return pipe and the injection pipe are symmetrically arranged on the upper surface of the water storage tank. VCR connectors are respectively arranged between the upper end of the return pipe and the lower end of the adjacent cooling water pipe, and between the upper end of the injection pipe and the lower end of the adjacent cooling water pipe, to block heat transfer in directions other than the direction facing the sample.

[0008] Furthermore, the heating mechanism also includes a disc graphite heater and a housing. The housing is fixedly connected to the lower end of the inner arc surface of the cooling disc. The lower end of the housing is fixedly connected to the disc graphite heater. The input end of the disc graphite heater is electrically connected to the output end of the heating electrode of the heating and temperature measuring electrode to achieve sample heating.

[0009] Furthermore, the heating mechanism also includes molybdenum heat insulation sheets and fixing columns. The top wall of the outer shell is fixedly connected with uniformly distributed fixing columns, all of which are located at the upper end of the disc graphite heater. Molybdenum heat insulation sheets are inserted between the fixing columns, and uniformly distributed isolation rings are inserted at the lower end of each fixing column. The molybdenum heat insulation sheets are respectively located between two vertically adjacent isolation rings to prevent the heat from the disc graphite heater from being transferred upward.

[0010] Furthermore, the heating mechanism also includes a ceramic tube and a thermocouple. The ceramic tube is fixedly connected to the upper end of the outer shell, and the lower end of the ceramic tube passes through the clearance hole in the middle of the molybdenum heat insulation sheet. A thermocouple is inserted inside the ceramic tube. The thermocouple is used in conjunction with the disc graphite heater. The thermocouple is bidirectionally electrically connected to the heating and temperature measuring electrodes. The cables of the disc graphite heater and the thermocouple pass through the inner ring of the water storage tank to detect the temperature change of the disc graphite heater.

[0011] Furthermore, the lifting mechanism includes a bottom flange, a bellows, a top flange, and a linear guide rail. The bottom flange is connected to the adapter flange by bolts. A linear guide rail is provided on the upper surface of the bottom flange away from the adapter flange. The top flange is fixedly connected to the slide of the linear guide rail near the adapter flange. A bellows is sleeved on the upper outer side of the sleeve. The bellows is fixedly connected between the top flange and the bottom flange, driving the rotating mechanism and the cooling structure to lift as a whole.

[0012] Furthermore, the rotary drive mechanism includes a second connecting flange, a second bottom flange, a housing, a second top flange, and a rotary driver. The lower end of the housing is provided with a second bottom flange, which is bolted to the first top flange. The rotary driver is installed inside the housing. The lower end of the output shaft of the rotary driver is provided with a second connecting flange, which is bolted to the first connecting flange. The second top flange is fixedly connected to the upper surface of the housing. The upper end of the support tube passes through the round hole in the middle of the second connecting flange and the round hole in the middle of the second top flange. The input end of the rotary driver is electrically connected to the output end of the molecular beam epitaxy device controller, driving the sample to rotate.

[0013] Furthermore, the lifting mechanism two includes a bottom flange three, a bellows two, a top flange three, a slider, a sliding column one, and a sliding column two. The bottom flange three and the top flange two are connected by bolts. The upper surface of the bottom flange three is fixedly connected to the sliding column one and the sliding column two. A connecting plate is fixedly connected between the upper ends of the sliding column one and the sliding column two. The slider is slidably connected to the outside of the sliding column one. The upper surface of the slider is fixedly connected to the top flange three. The top flange three is connected to the connecting seat by bolts. The end of the top flange three away from the connecting seat is slidably connected to the outside of the sliding column two. The upper end of the support tube is sleeved with a bellows two. The bellows two is fixedly connected between the bottom flange three and the top flange three, realizing the independent lifting of the support tube.

[0014] Furthermore, the second lifting mechanism also includes a lead screw and a handwheel. The lead screw is rotatably connected between the bottom flange and the connecting plate. The middle part of the slider is threadedly connected to the middle part of the lead screw. The lead screw passes through the through hole in the middle of the top flange. The upper end of the lead screw is fixedly fitted with a handwheel, which is located at the upper end of the connecting plate, driving the top flange to rise and fall.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: This controllable sample heating stage has the following advantages: 1. The disc graphite heater is located inside the cooling disc, with only the side facing the sample exposed. The heat is carried away by the flow of coolant in the water tank at the top of the cooling disc, which can play a good thermal shielding role, preventing the surrounding cavity and components from being heated. This effectively ensures that the system vacuum does not deteriorate and improves the sample growth quality.

[0016] 2. Numerous molybdenum shielding plates are installed on the side of the circular graphite heater away from the sample, which effectively reduces the thermal damage to the heating stage components and also reduces the impact of vacuum degradation caused by the heating of these components.

[0017] 3. A large linear bearing is installed between the sleeve and the support tube to make the sample rotation more stable and prevent shaking, thereby improving the uniformity of sample growth during the sample rotation heating process. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the rotating mechanism of the present invention; Figure 3 This is a schematic diagram of the cooling structure of the present invention; Figure 4 This is a cross-sectional view of the cooling assembly of the present invention; Figure 5 This is a cross-sectional view of the heating mechanism of the present invention; Figure 6 This is a schematic diagram of the lifting mechanism of the present invention; Figure 7 This is a schematic diagram of the rotary drive mechanism of the present invention; Figure 8 This is a schematic diagram of the lifting mechanism II of the present invention; Figure 9 This is a schematic diagram of the structure of the present invention after removing lifting mechanism one and lifting mechanism two.

[0019] In the diagram: 1. Adapter flange; 2. Rotating mechanism; 21. Sleeve; 22. Connecting flange one; 23. Linear bearing; 24. Placement platform; 3. Cooling structure; 31. Heating and temperature measuring electrodes; 32. Connecting seat; 33. Support pipe; 34. Cooling water pipe; 35. VCR connector, 36 cooling components, 361 water tank, 362 return pipe, 363 injection pipe, 37 cooling plate, 4 heating mechanism, 41 disc graphite heater, 42 housing, 43 molybdenum heat insulation sheet, 44 fixed column, 45 ceramic tube, 46 thermocouple, 5 lifting mechanism I, 51 bottom flange I, 52 bellows I, 53 top flange I, 54 linear guide, 6 rotary drive mechanism, 61 connecting flange II, 62 bottom flange II, 63 housing, 64 top flange II, 65 rotary actuator, 7 lifting mechanism II, 71 bottom flange III, 72 bellows II, 73 top flange III, 74 slider, 75 slide column I, 76 lead screw I, 77 slide column II, 78 handwheel. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Please see Figure 1-9 This embodiment provides a technical solution: a controllable sample heating stage, including a connecting flange 1, a rotating mechanism 2 and a cooling structure 3; Adapter flange 1: Its upper end is provided with lifting mechanism 1 5, rotary drive mechanism 6 and lifting mechanism 2 7 from bottom to top; The lifting mechanism 5 includes a bottom flange 51, a bellows 52, a top flange 53, and a linear guide rail 54. The bottom flange 51 is bolted to the adapter flange 1. The upper surface of the bottom flange 51 is provided with a linear guide rail 54 at the end away from the adapter flange 1. The slide of the linear guide rail 54 is fixedly connected to the top flange 53 at the end near the adapter flange 1. The upper end of the sleeve 21 is fitted with a bellows 52, which is fixedly connected between the top flange 53 and the bottom flange 51. The entire lifting of the controllable sample heating stage can be achieved through the linear guide rail 54. The linear guide rail 54 is a lead screw module. The lead screw drives the slider 74 to move up and down. To avoid interference, the drive ends can be connected by a worm gear structure. The drive ends can be driven by a rotating wheel or a motor. When the slider 74 rises, it drives the housing 63 to rise, which in turn drives the entire rotating mechanism 2 and the cooling structure 3 to rise synchronously. The lifting mechanism 5 can adjust the sample growth position and also transfer samples in a vacuum. The rotary drive mechanism 6 includes a connecting flange 61, a bottom flange 62, a housing 63, a top flange 64, and a rotary driver 65. The bottom flange 62 is located at the lower end of the housing 63 and is bolted to the top flange 53. The rotary driver 65 is located inside the housing 63. The lower end of the output shaft of the rotary driver 65 is connected to the connecting flange 61 and is bolted to the connecting flange 22. The top flange 64 is fixedly connected to the upper surface of the housing 63. The upper end of the support tube 33 passes through the round hole in the middle of the connecting flange 61 and the round hole in the middle of the top flange 64. The input end of the rotary driver 65 is electrically connected to the output end of the molecular beam epitaxy device controller. The lifting mechanism 27 includes a bottom flange 371, a bellows 272, a top flange 373, a slider 74, a sliding column 175, and a sliding column 277. The bottom flange 371 and the top flange 274 are connected by bolts. The upper surface of the bottom flange 371 is fixedly connected to the sliding column 175 and the sliding column 277. A connecting plate is fixedly connected between the upper ends of the sliding column 175 and the sliding column 277. The slider 74 is slidably connected to the outside of the sliding column 175. The upper surface of the slider 74 is fixedly connected to the top flange 373. The top flange 373 is connected to the connecting seat 32 by bolts. The end of the top flange 373 away from the connecting seat 32 is slidably connected to the outside of the sliding column 277. The upper end of the support tube 33 is fitted with a bellows 272, which is fixedly connected to the bottom flange 371 and the top flange 373. The lifting mechanism 27 also includes a lead screw 76 and a handwheel 78. The lead screw 76 is rotatably connected between the bottom flange 3 71 and the connecting plate. The middle part of the slider 74 is threadedly connected to the middle part of the lead screw 76. The lead screw 76 passes through the through hole in the middle of the top flange 3 73. The upper end of the lead screw 76 is fixedly fitted with a handwheel 78, which is located at the upper end of the connecting plate. In use, the sample is placed on the upper end of the placement stage 24, and the handwheel 78 is rotated. The lead screw 76 rotates, causing the slider 74 and the top flange 3 73 to slide downward between the slide column 1 75 and the slide column 2 77. The support tube 33 descends, the cooling disc 37 descends, and the disc graphite heater 41 approaches the sample to heat the sample. The heating efficiency of the sample can be adjusted by adjusting the distance between the disc graphite heater 41 and the sample. Rotation mechanism 2: It includes a sleeve 21, a connecting flange 1 22, a linear bearing 23, and a placement stage 24. The sleeve 21 is located inside the through hole of the adapter flange 1. The lower end of the sleeve 21 is equipped with a linear bearing 23. The lower end of the sleeve 21 is fixedly connected to a mounting bracket, and the lower end of the mounting bracket is fixedly connected to the placement stage 24. The upper end of the sleeve 21 is equipped with a connecting flange 1 22. While the sample is being heated, the output shaft of the rotary driver 65 drives the connecting flange 2 61 to rotate. The rotary driver 65 is a drive motor plus synchronous belt drive structure (the transmission method can be gear or belt drive or other methods). The output shaft is a hollow output shaft. The support tube 33 passes through the inside of the hollow output shaft. The output end of the drive motor drives the hollow output shaft to rotate through the synchronous belt drive, thereby driving the sleeve 21 to rotate. The placement stage 24 and the sample rotate, but the support tube 33 does not rotate, so that the sample rotates continuously around the disc graphite heater 41, ensuring the uniformity of sample growth. Cooling structure 3 includes a support pipe 33, cooling water pipes 34, a VCR connector 35, a cooling assembly 36, and a cooling disc 37. The support pipe 33 is inserted into the inner ring of the linear bearing 23. Two cooling water pipes 34 are installed inside the support pipe 33. A cooling disc 37 is installed at the lower end of the support pipe 33. A cooling assembly 36 is installed at the upper end of the cooling disc 37. A VCR connector 35 is installed between the cooling assembly 36 and the lower end of the cooling water pipes 34. A heating mechanism 4 is installed at the lower end of the cooling disc 37. The cooling disc 37 is located at the upper end of the placement platform 24. The cooling assembly 36 includes a water storage tank 361, a return pipe 362, and an injection pipe 363. The water storage tank 361 is fixedly connected to the upper end of the inner arc surface of the cooling disc 37. The upper surface of the water storage tank 361 is fixedly connected to the lower end of the support pipe 33. The return pipe 362 and the injection pipe 363 are symmetrically arranged on the upper surface of the water storage tank 361. Pipe 363 and VCR connector 35 are respectively located between the upper end of return pipe 362 and the lower end of adjacent cooling water pipe 34, and between the upper end of injection pipe 363 and the lower end of adjacent cooling water pipe 34. Coolant is injected from the connecting pipe on the injection side of connector 32, passes through cooling water pipe 34 and injection pipe 363 and enters the interior of water storage tank 361. Then it is discharged through return pipe 362, another cooling water pipe 34 and return side connecting pipe. Cooling circulating water flows through water storage tank 361 to cool it down, blocking the heat radiation of the disc graphite heater 41 to other directions except the sample, reducing the heating of cooling disc 37 and components, thereby ensuring that the ultra-high vacuum will not deteriorate significantly. The lower end of injection pipe 363 is close to the bottom wall of water storage tank 361, and the lower end of return pipe 362 is flush with the top wall of water storage tank 361, which facilitates the circulation of coolant inside water storage tank 361. The cooling structure 3 also includes a heating and temperature measuring electrode 31 and a connecting seat 32. The connecting seat 32 is fixedly connected to the upper end of the support tube 33. Two connecting pipes are fixedly connected to the outer arc surface of the connecting seat 32. The upper end of the cooling water pipe 34 is used in conjunction with the adjacent connecting pipes. The heating and temperature measuring electrode 31 is provided in the middle of the upper end of the connecting seat 32. The input end of the heating electrode of the heating and temperature measuring electrode 31 is electrically connected to the output end of the molecular beam epitaxy equipment controller. The temperature measuring electrode of the heating and temperature measuring electrode 31 is bidirectionally electrically connected to the molecular beam epitaxy equipment controller. The inspection signal of the thermocouple 46 is transmitted to the molecular beam epitaxy equipment controller through the temperature measuring electrode of the heating and temperature measuring electrode 31. The heating and temperature measuring electrode 31 (professionally called feedthrough, is an electrical feed-through device. Its principle is to introduce an electrical signal from the atmosphere into the vacuum without affecting the vacuum seal) is used to introduce the heating current into the vacuum, thereby realizing the heating of the disc graphite heater 41 and obtaining the signal of the thermocouple 46 to achieve precise temperature control. The heating mechanism 4 also includes a disc graphite heater 41 and a housing 42. The housing 42 is fixedly connected to the lower end of the inner arc surface of the cooling disc 37. The lower end of the housing 42 is fixedly connected to the disc graphite heater 41. The input end of the disc graphite heater 41 is electrically connected to the output end of the heating electrode of the heating and temperature measuring electrode 31. The heating mechanism 4 also includes a molybdenum heat insulation sheet 43 and a fixing column 44. The top wall of the housing 42 is fixedly connected to a uniformly distributed fixing column 44. The fixing columns 44 are all located at the upper end of the disc graphite heater 41. The uniformly distributed molybdenum heat insulation sheets 43 are inserted between the fixing columns 44. The lower end of the fixing columns 44 is inserted with a uniformly distributed isolation ring. The molybdenum heat insulation sheets 43 are respectively located between two vertically adjacent isolation rings. The spaced molybdenum heat insulation sheets 43 are used to isolate the heat of the disc graphite heater 41 from the heating of the top element. The heating mechanism 4 also includes a ceramic tube 45 and a thermocouple 46. The ceramic tube 45 is fixedly connected to the upper end of the outer shell 42. The lower end of the ceramic tube 45 passes through the clearance hole in the middle of the molybdenum heat insulation sheet 43. The thermocouple 46 is inserted inside the ceramic tube 45. The thermocouple 46 is used in conjunction with the disc graphite heater 41. The thermocouple 46 is bidirectionally electrically connected to the temperature measuring electrode of the heating and temperature measuring electrode 31. The cables of the disc graphite heater 41 and the thermocouple 46 both pass through the inner ring of the water storage tank 361. The detection end of the thermocouple 46 directly contacts the upper surface of the disc graphite heater 41 to directly check the temperature change of the disc graphite heater 41.

[0022] The working principle of the controllable sample heating stage provided by the present invention is as follows: The controllable sample heating stage is installed on the molecular beam epitaxy equipment through the adapter flange 1. When in use, the sample is placed on the upper end of the placement stage 24. The handwheel 78 is turned, the lead screw 76 rotates, and the whole assembly consisting of the slider 74 and the top flange 73 slides downward between the slide column 75 and the slide column 77. The support tube 33 descends, the cooling plate 37 descends, and the disc graphite heater 41 approaches the sample to heat the sample. The heating efficiency of the sample can be adjusted by adjusting the distance between the disc graphite heater 41 and the sample. The lead screw protective cover can be fitted on both the upper and lower ends of the lead screw 76. The lead screw protective cover is fixedly connected between the bottom flange 71 and the slider 74 and between the connecting plate and the top flange 73, respectively. The entire lifting and lowering of the controllable sample heating stage can be achieved through the linear guide rail 54. The linear guide rail 54 is a lead screw module. The lead screw drives the slider 74 to move up and down. In order to avoid interference, the drive ends can be connected by a worm gear structure. The drive ends can be driven by a rotating wheel or a motor. When the slider 74 rises, it drives the housing 63 to rise, which in turn drives the entire rotating mechanism 2 and the cooling structure 3 to rise synchronously. The lifting mechanism 5 can adjust the sample growth position and transfer the sample in the vacuum at the same time. Lifting mechanism 1 (5), rotary drive mechanism 6, and lifting mechanism 2 (7) are all mature products in the existing technology and can be purchased directly according to requirements. The lower end of the sleeve 21 is provided with a large linear bearing 23. The linear bearing contains a small ball that contacts the outer arc surface of the support tube 33, so that the sleeve 21 can abut against the support tube 33 to ensure the stability of rotation. At the same time, the support tube 33 can move up and down inside the linear bearing 23.

[0023] While the sample is being heated, the output shaft of the rotary actuator 65 drives the connecting flange 61 to rotate. The rotary actuator 65 is a drive motor with a synchronous belt drive structure (the transmission method can be gear or belt drive or other methods). The output shaft is a hollow output shaft, and the support tube 33 passes through the inside of the hollow output shaft. The output end of the drive motor drives the hollow output shaft to rotate through the synchronous belt drive, thereby driving the sleeve 21 to rotate. The placement stage 24 and the sample rotate, while the support tube 33 does not rotate, so that the sample can rotate continuously around the disc graphite heater 41, ensuring the uniformity of sample growth. The detection end of thermocouple 46 directly contacts the upper surface of disc graphite heater 41 to directly check the temperature change of disc graphite heater 41. Molybdenum heat insulation sheets 43 are spaced apart to isolate the heat of disc graphite heater 41 from the heating of the top element. The inspection signal of thermocouple 46 is transmitted to the molecular beam epitaxy equipment controller through the temperature measuring electrode of heating and temperature measuring electrode 31. Heating and temperature measuring electrode 31 (technically called feedthrough, is an electrical feed-in device that introduces an electrical signal from the atmosphere into the vacuum without affecting the vacuum seal) is used to introduce heating current into the vacuum, thereby realizing the heating of the disc graphite heater 41 and obtaining the signal from thermocouple 46 to achieve precise temperature control. Coolant is injected from the injection side of the connector 32, passes through the cooling water pipe 34 and the injection pipe 363 and enters the interior of the water storage tank 361. Then it is discharged through the return pipe 362, another cooling water pipe 34 and the return side connector. Cooling circulating water flows through the water storage tank 361 to cool it down, blocking the heat radiation of the disc graphite heater 41 to other directions except the sample, reducing the heat generation of the cooling disc 37 and components, thereby ensuring that the ultra-high vacuum will not deteriorate significantly. The lower end of the injection pipe 363 is close to the bottom wall of the water storage tank 361, and the lower end of the return pipe 362 is flush with the top wall of the water storage tank 361, which facilitates the circulation of coolant inside the water storage tank 361. VCR connector 35 is a metal gasket surface sealing connector designed to achieve ultra-high purity and ultra-high vacuum systems. Its core sealing principle relies on the plastic deformation of a precision metal gasket when the nut is tightened, forming a metal-to-metal hard seal with the connector body and the connecting pipe. This completely avoids the risks of particulate contamination and chemical incompatibility caused by elastomer O-rings. It can meet the stringent cleanliness requirements of cutting-edge industries such as semiconductors, photovoltaics, and special gas transportation. The lower end of the cooling water pipe 34 can be made into a flexible stainless steel corrugated pipe, which can be bent to the outside of the support pipe 33. The VCR connector 35, which achieves ultra-high vacuum sealing, is connected to the VCR connector 35 at the top of the return pipe 362 and the injection pipe 363, solving the difficulty that the VCR connector 35 could not be placed inside the support pipe 33 due to its large size.

[0024] It is worth noting that the thermocouple 46 disclosed in the above embodiments can be a K-type thermocouple, the heating and temperature measuring electrode 31 can be a PFA series vacuum electrode, and the lifting mechanism 1 5, the rotary drive mechanism 6 and the lifting mechanism 2 7 can be freely configured according to the actual application scenario. The molecular beam epitaxy equipment controller controls the operation of the disk graphite heater 41, the thermocouple 46, the heating and temperature measuring electrode 31 and the drive motor of the rotary drive mechanism 6 using methods commonly used in the prior art.

[0025] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural or procedural transformations made based on the content of the present invention specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A controllable sample heating stage, characterized in that: It includes a transition flange (1), a rotating mechanism (2), and a cooling structure (3); Adapter flange (1): Its upper end is provided with lifting mechanism one (5), rotary drive mechanism (6) and lifting mechanism two (7) from bottom to top. Rotating mechanism (2): It includes a sleeve (21), a connecting flange (22), a linear bearing (23) and a placement platform (24). The sleeve (21) is located inside the through hole of the adapter flange (1). The lower end of the sleeve (21) is provided with a linear bearing (23). The lower end of the sleeve (21) is fixedly connected to a mounting bracket. The lower end of the mounting bracket is fixedly connected to a placement platform (24). The upper end of the sleeve (21) is provided with a connecting flange (22). Cooling structure (3): It includes a support pipe (33), a cooling water pipe (34), a VCR connector (35), a cooling component (36), and a cooling disc (37). The support pipe (33) is inserted into the inner ring of the linear bearing (23). Two cooling water pipes (34) are provided inside the support pipe (33). A cooling disc (37) is provided at the lower end of the support pipe (33). A cooling component (36) is provided at the upper end of the cooling disc (37). A VCR connector (35) is provided between the cooling component (36) and the lower end of the cooling water pipe (34). A heating mechanism (4) is provided at the lower end of the cooling disc (37). The cooling disc (37) is located at the upper end of the placement platform (24).

2. The controllable sample heating stage according to claim 1, characterized in that: The cooling structure (3) also includes a heating and temperature measuring electrode (31) and a connecting seat (32). The connecting seat (32) is fixedly connected to the upper end of the support tube (33). Two connecting pipes are fixedly connected to the outer arc surface of the connecting seat (32). The upper end of the cooling water pipe (34) is used in conjunction with the adjacent connecting pipes. The heating and temperature measuring electrode (31) is provided in the middle of the upper end of the connecting seat (32). The input end of the heating electrode of the heating and temperature measuring electrode (31) is electrically connected to the output end of the molecular beam epitaxy device controller. The temperature measuring electrode of the heating and temperature measuring electrode (31) is bidirectionally electrically connected to the molecular beam epitaxy device controller.

3. The controllable sample heating stage according to claim 2, characterized in that: The cooling assembly (36) includes a water storage tank (361), a return pipe (362), and an injection pipe (363). The water storage tank (361) is fixedly connected to the upper end of the inner arc surface of the cooling circular plate (37). The upper surface of the water storage tank (361) is fixedly connected to the lower end of the support pipe (33). The return pipe (362) and the injection pipe (363) are symmetrically arranged on the upper surface of the water storage tank (361). VCR connectors (35) are respectively arranged between the upper end of the return pipe (362) and the lower end of the adjacent cooling water pipe (34) and between the upper end of the injection pipe (363) and the lower end of the adjacent cooling water pipe (34).

4. The controllable sample heating stage according to claim 3, characterized in that: The heating mechanism (4) also includes a disc graphite heater (41) and a housing (42). The housing (42) is fixedly connected to the lower end of the inner arc surface of the cooling disc (37). The lower end of the housing (42) is fixedly connected to the disc graphite heater (41). The input end of the disc graphite heater (41) is electrically connected to the output end of the heating electrode of the heating and temperature measuring electrode (31).

5. A controllable sample heating stage according to claim 4, characterized in that: The heating mechanism (4) also includes a molybdenum heat insulation sheet (43) and a fixing column (44). The top wall of the outer shell (42) is fixedly connected with a uniformly distributed fixing column (44). The fixing columns (44) are all located at the upper end of the disc graphite heater (41). A uniformly distributed molybdenum heat insulation sheet (43) is inserted between the fixing columns (44). A uniformly distributed isolation ring is inserted at the lower end of the fixing columns (44). The molybdenum heat insulation sheet (43) is located between two vertically adjacent isolation rings.

6. The controllable sample heating stage according to claim 5, characterized in that: The heating mechanism (4) also includes a ceramic tube (45) and a thermocouple (46). The ceramic tube (45) is fixedly connected to the upper end of the outer shell (42). The lower end of the ceramic tube (45) passes through the clearance hole in the middle of the molybdenum heat insulation sheet (43). The thermocouple (46) is inserted inside the ceramic tube (45). The thermocouple (46) is used in conjunction with the disc graphite heater (41). The thermocouple (46) is bidirectionally electrically connected to the heating and temperature measuring electrode (31). The cables of the disc graphite heater (41) and the thermocouple (46) pass through the inner ring of the water storage tank (361).

7. A controllable sample heating stage according to claim 2, characterized in that: The lifting mechanism 1 (5) includes a bottom flange 1 (51), a bellows 1 (52), a top flange 1 (53), and a linear guide rail (54). The bottom flange 1 (51) is connected to the transition flange (1) by bolts. A linear guide rail (54) is provided at the end of the upper surface of the bottom flange 1 (51) away from the transition flange (1). The slide of the linear guide rail (54) is fixedly connected to the top flange 1 (53) at the end near the transition flange (1). A bellows 1 (52) is sleeved on the upper end of the sleeve (21). The bellows 1 (52) is fixedly connected between the top flange 1 (53) and the bottom flange 1 (51).

8. A controllable sample heating stage according to claim 7, characterized in that: The rotary drive mechanism (6) includes a connecting flange two (61), a bottom flange two (62), a housing (63), a top flange two (64), and a rotary driver (65). The bottom flange two (62) is provided at the lower end of the housing (63). The bottom flange two (62) is connected to the top flange one (53) by bolts. The rotary driver (65) is provided inside the housing (63). The output shaft of the rotary driver (65) is provided at the lower end of the connecting flange two (61). The connecting flange two (61) is connected to the connecting flange one (22) by bolts. The top flange two (64) is fixedly connected to the upper surface of the housing (63). The upper end of the support tube (33) passes through the round hole in the middle of the connecting flange two (61) and the round hole in the middle of the top flange two (64). The input end of the rotary driver (65) is electrically connected to the output end of the molecular beam epitaxy device controller.

9. A controllable sample heating stage according to claim 8, characterized in that: The lifting mechanism 2 (7) includes a bottom flange 3 (71), a bellows 2 (72), a top flange 3 (73), a slider (74), a sliding column 1 (75), and a sliding column 2 (77). The bottom flange 3 (71) and the top flange 2 (64) are connected by bolts. The upper surface of the bottom flange 3 (71) is fixedly connected to the sliding column 1 (75) and the sliding column 2 (77). A connecting plate is fixedly connected between the upper ends of the sliding column 1 (75) and the sliding column 2 (77). The external sliding connection is a slider (74), and the upper surface of the slider (74) is fixedly connected to a top flange three (73). The top flange three (73) is connected to the connecting seat (32) by bolts. The end of the top flange three (73) away from the connecting seat (32) is slidably connected to the outside of the sliding column two (77). The upper end of the support tube (33) is fitted with a corrugated pipe two (72), and the corrugated pipe two (72) is fixedly connected between the bottom flange three (71) and the top flange three (73).

10. A controllable sample heating stage according to claim 9, characterized in that: The second lifting mechanism (7) also includes a lead screw (76) and a handwheel (78). The lead screw (76) is rotatably connected between the bottom flange (71) and the connecting plate. The middle part of the slider (74) is threadedly connected to the middle part of the lead screw (76). The lead screw (76) passes through the through hole in the middle of the top flange (73). The upper end of the lead screw (76) is fixedly fitted with a handwheel (78), which is located at the upper end of the connecting plate.

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