Method of manufacturing a laser chamber and electronics

Abstract

Provided is a method for manufacturing a laser chamber and electronic devices. The laser chamber includes: a container that houses a laser gas; a pair of discharge electrodes; a fan that circulates the laser gas; a first guide that includes a first face and a second face, and guides the laser gas along the first face, and a first space that narrows in a first direction toward the inside is formed between the second face and an inner surface of the container; and a second guide that includes a third face, and guides the laser gas toward the vicinity of the first guide along the third face.

Description

Technical Field

[0001] This disclosure relates to a method for manufacturing a laser cavity and electronic devices. Background Technology

[0002] In recent years, with the miniaturization and high integration of semiconductor integrated circuits, there has been a demand for higher resolution in semiconductor exposure equipment. Therefore, efforts are underway to shorten the wavelength of light emitted from the exposure light source. For example, as gas laser devices for exposure, KrF excimer lasers using lasers with an output wavelength of approximately 248 nm and ArF excimer lasers using lasers with an output wavelength of approximately 193 nm are being developed.

[0003] Furthermore, the pulse widths of excimer lasers output from KrF and ArF excimer laser devices are only tens of nanoseconds, with wavelengths as short as approximately 248 nm and 193 nm, respectively. Therefore, they are sometimes used for the direct processing of polymer materials or glass materials. The chemical bonds in polymer materials can be broken using excimer lasers, which have photon energies higher than bond energies. Therefore, it is known that excimer lasers can be used for non-thermal processing of polymer materials, producing aesthetically pleasing shapes. Additionally, it is known that glass, ceramics, and other materials have high absorption rates for excimer lasers; therefore, even materials that are difficult to process using visible and infrared lasers can be processed using excimer lasers.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2007-208183

[0007] Patent Document 2: U.S. Patent Application Publication No. 2003 / 031225

[0008] Patent Document 3: US Patent No. 5,978,405 Summary of the Invention

[0009] One aspect of this disclosure relates to a laser chamber comprising: a container for receiving laser gas; a pair of discharge electrodes; a fan for circulating the laser gas; a first guide including a first surface and a second surface and guiding the laser gas along the first surface, forming a first space between the second surface and an inner surface of the container that narrows in a first direction toward the inward; and a second guide including a third surface and guiding the laser gas along the third surface toward the vicinity of the first guide.

[0010] One aspect of the present invention relates to a method for manufacturing an electronic device, comprising the steps of: generating laser light using a discharge-excited gas laser device; outputting the laser light to an exposure apparatus; and exposing the laser light on a photosensitive substrate within the exposure apparatus to manufacture the electronic device. The discharge-excited gas laser device includes: an optical resonator; and a laser chamber located in the optical path of the optical resonator. The laser chamber includes: a container for containing laser gas; a pair of discharge electrodes; a fan for circulating the laser gas; a first guide member including a first surface and a second surface, guiding the laser gas along the first surface, forming a first space between the second surface and the inner surface of the container that narrows in a first direction toward the inward side; and a second guide member including a third surface, guiding the laser gas along the third surface toward the vicinity of the first guide member. Attached Figure Description

[0011] The following description, by way of example only, refers to the accompanying drawings to illustrate several embodiments of this disclosure.

[0012] Figure 1 The structure of the laser device in the comparative example is shown.

[0013] Figure 2 The structure of the laser chamber in the comparative example is shown when viewed from the -Z direction.

[0014] Figure 3 A magnified view shows the area near the boundary between the first guide and the tilting component in the comparative example.

[0015] Figure 4 A magnified view shows the vicinity of the boundary between the first guide and the tilting member in the first embodiment.

[0016] Figure 5 This is a perspective view showing a portion of the first guide in the first embodiment.

[0017] Figure 6 A magnified view shows the vicinity of the boundary between the first guide and the tilting member in the second embodiment.

[0018] Figure 7 A magnified view shows the vicinity of the boundary between the first guide and the tilting member in the third embodiment.

[0019] Figure 8 A magnified view shows the vicinity of the boundary between the first guide and the tilting member in the fourth embodiment.

[0020] Figure 9 A magnified view shows the vicinity of the boundary between the first guide and the tilting member in the fifth embodiment.

[0021] Figure 10 The first and second hypothetical logarithmic spirals are shown.

[0022] Figure 11 The structure of the laser chamber in the fifth embodiment is shown when viewed along the -Z direction.

[0023] Figure 12 The structure of the exposure system is shown. Detailed Implementation

[0024] <Content>

[0025] 1. Comparative Example

[0026] 1.1 Structure

[0027] 1.2 Actions

[0028] 2. The topic of comparative examples

[0029] 3. A laser chamber 10 having a first space A1 between the first guide 10d and the inner surface of the container 19.

[0030] 3.1 Structure

[0031] 3.2 Function

[0032] 4. A laser chamber 10 containing 10g of sound-absorbing material is configured in the first space A1.

[0033] 4.1 Structure

[0034] 4.2 Function

[0035] 5. A laser chamber 10 having a second space A2 located further inward than the first space A1.

[0036] 5.1 Structure

[0037] 5.2 Function

[0038] 6. Laser chamber 10, the angle between the second surface 42 and the inner surface of container 19 changes according to the position in the H direction.

[0039] 6.1 Structure

[0040] 6.2 Function

[0041] 7. The first surface 41 has a cross-section in the shape of a logarithmic spiral, forming a laser cavity 10h.

[0042] 7.1 Structure

[0043] 7.2 Function

[0044] 8. Other

[0045] 8.1 Manufacturing methods for electronic devices

[0046] 8.2 Laser Control Processor 30

[0047] 8.3 Supplement

[0048] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. The embodiments described below illustrate several examples of the present disclosure and do not limit the content of the present disclosure. In addition, not all the structures and operations described in each embodiment are necessary. Furthermore, the same reference numerals are used to refer to the same constituent elements, and repeated descriptions are omitted.

[0049] 1. Comparative Example

[0050] 1.1 Structure

[0051] Figure 1 The structure of laser device 1 in the comparative example is shown. The comparative examples disclosed herein are methods known only to the applicant and are not publicly known examples endorsed by the applicant.

[0052] Laser device 1 is a discharge-excited gas laser device capable of outputting laser beam LB to exposure device 100. Laser device 1 includes a laser chamber 10, a power supply 13, a narrowband module 14, an output coupling mirror 15, a heat exchanger 26, and a laser control processor 30. The narrowband module 14 and the output coupling mirror 15 constitute an optical resonator. Laser chamber 10 includes windows 10a and 10b, a first discharge electrode 11a and a second discharge electrode 11b, and a container 19. Laser chamber 10 is configured such that windows 10a and 10b are located in the optical path of the optical resonator. Laser control processor 30 is described later.

[0053] The narrowband module 14 includes a prism 14a and a grating 14b. The prism 14a is positioned in the optical path of the light emitted from the window 10a. The grating 14b is positioned in the optical path of the light transmitted through the prism 14a. The output coupling mirror 15 is composed of partially reflecting mirrors.

[0054] The travel direction of the laser LB output from the output coupling mirror 15 is defined as the Z direction. The first discharge electrode 11a and the second discharge electrode 11b extend along the Z direction. The direction in which the first discharge electrode 11a and the second discharge electrode 11b are opposite each other is defined as the V direction or the -V direction. The Z direction and the V direction are perpendicular to each other; the direction perpendicular to both is defined as the H direction or the -H direction. Figure 1 The structure of the laser device 1 as viewed along the -H direction is shown in the figure.

[0055] Figure 2The structure of the laser chamber 10 in the comparative example, viewed along the -Z direction, is shown. The laser chamber 10 includes a container 19, which houses a first guide 10d, a first discharge electrode 11a and a second discharge electrode 11b, tilting members 12a-12d, a crossflow fan 21, a cooling section 25, and a guide section 28. The tilting member 12d corresponds to the second guide in this disclosure. The crossflow fan 21 corresponds to the fan in this disclosure.

[0056] The container 19 is sealed with a laser gas containing, for example, argon or krypton as a rare gas, fluorine as a halogen gas, or neon as a buffer gas. Alternatively, a laser gas containing fluorine and a buffer gas may also be sealed in.

[0057] An opening is formed in a portion of the container 19, and this opening is sealed by an electrically insulating portion 20. A cover 18 seals the opening by covering the surface of the container 19 containing the opening from the outside. The electrically insulating portion 20 supports the second discharge electrode 11b. A plurality of conductive portions 20a are embedded in the electrically insulating portion 20. The conductive portions 20a are electrically connected to the second discharge electrode 11b. Power supply device 13 (see reference) Figure 1 The device includes a charger (not shown) connected to the second discharge electrode 11b via a conductive part 20a. Inclined members 12b and 12d are each in the shape of a triangular prism and are fixed to the electrically insulating part 20 in such a way that they cover a portion of two sides of the second discharge electrode 11b.

[0058] A return plate 10c is disposed inside the laser chamber 10. The first discharge electrode 11a is supported by the return plate 10c. The first discharge electrode 11a is electrically connected to ground potential via the return plate 10c and wiring (not shown). Figure 2 As shown, return board 10c is in Figure 1 The paper has gaps on its depth side and front side for the passage of laser gas. The tilting members 12a and 12c are each in the shape of a triangular prism and are fixed to the return plate 10c in such a way that they cover a portion of the two sides of the first discharge electrode 11a.

[0059] The crossflow fan 21 includes a plurality of blades 21b arranged about a rotating shaft 21a. The rotating shaft 21a is connected to a motor (not shown).

[0060] The tilting components 12a and 12b are configured to gradually narrow the flow path of the laser gas, so as to efficiently guide the laser gas delivered from the crossflow fan 21 to the discharge space between the first discharge electrode 11a and the second discharge electrode 11b. The tilting components 12c and 12d are configured to gradually widen the flow path of the laser gas, so as to efficiently guide the laser gas that has passed through the discharge space toward the direction closer to the guide portion 28.

[0061] The guide section 28 is fixed to the tilting member 12c to guide the laser gas passing between the tilting member 12c and the tilting member 12d to the cooling section 25.

[0062] The cooling section 25 includes multiple refrigerant pipes and heat sinks disposed around each refrigerant pipe. Each refrigerant pipe is arranged such that its length extends along the Z-direction. The refrigerant pipes are connected to the heat exchanger 26 via pipes 26a and 26b (see reference). Figure 1 ).

[0063] 1.2 Actions

[0064] The laser control processor 30 receives a target value of the pulse energy E and a light emission trigger signal from the exposure apparatus 100. Based on the target value of the pulse energy E, the laser control processor 30 sends setting data of the charging voltage to the charger included in the power supply device 13. In addition, the laser control processor 30 sends a trigger signal to the power supply device 13 based on the light emission trigger signal.

[0065] When the power supply device 13 receives a trigger signal from the laser control processor 30, it generates a pulsed high voltage from the electrical energy being charged to the charger and applies the high voltage between the first discharge electrode 11a and the second discharge electrode 11b.

[0066] When a high voltage is applied between the first discharge electrode 11a and the second discharge electrode 11b, a discharge occurs between them. The energy from this discharge excites the laser medium within the laser chamber 10, causing it to transfer to a higher energy level. Upon subsequent transfer to a lower energy level, the excited laser medium emits light of a wavelength corresponding to the energy level difference.

[0067] The light generated inside the laser chamber 10 is emitted to the outside of the laser chamber 10 through windows 10a and 10b. The light emitted from window 10a of the laser chamber 10 passes through prism 14a, which expands the beam width in a plane parallel to the HZ plane, and then it enters the grating 14b.

[0068] Light incident on grating 14b is reflected by multiple slots in grating 14b and diffracted in a direction corresponding to the wavelength of the light. The wavelength of the diffracted light returning from grating 14b to prism 14a is selected by aligning the incident angle of the light onto grating 14b with the diffraction angle of the desired wavelength. Prism 14a narrows the beam width of the diffracted light returning from grating 14b in a plane parallel to the HZ plane and allows the light to return to laser chamber 10 via window 10a.

[0069] The output coupling mirror 15 allows a portion of the light emitted from the window 10b of the laser chamber 10 to pass through and be output, while reflecting the other portion back into the laser chamber 10.

[0070] Thus, the light emitted from the laser chamber 10 oscillates between the narrowing module 14 and the output coupling mirror 15. This light is amplified each time it passes through the discharge space between the first discharge electrode 11a and the second discharge electrode 11b, and narrowed each time it folds back in the narrowing module 14. The narrowed light, thus undergoing laser oscillation, is output from the output coupling mirror 15 as laser LB and incident on the exposure apparatus 100.

[0071] When the motor (not shown) rotates the crossflow fan 21, the laser gas... Figure 2 The flow, indicated by the middle arrow, circulates within the laser chamber 10. Discharge products generated by the laser gas excited by the discharge between the first discharge electrode 11a and the second discharge electrode 11b are removed from the discharge space by the flow of the laser gas before the next discharge. Thus, the discharge space and its vicinity become a state with few discharge products, thereby stabilizing the discharge. Repeated discharges generate rarefaction waves in the laser gas, which propagate as sound waves within the container 19.

[0072] 2. The topic of comparative examples

[0073] Figure 3 A magnified view shows the vicinity of the boundary between the first guide 10d and the tilting member 12d in the comparative example. The first guide 10d has a first surface 41, and the tilting member 12d has a third surface 43. The tilting member 12d guides the laser gas in the H direction along the third surface 43 toward the vicinity of the first guide 10d. The first guide 10d guides the laser gas along the first surface 41 toward the cooling section 25.

[0074] A gap exists between the container 19 and the electrical insulation part 20, and the V-direction end of this gap is sealed by the cover part 18. The upstream end 10e of the first guide member 10d and the downstream end 12e of the inclined member 12d are located at the -V-direction ends of the gap between the container 19 and the electrical insulation part 20. The upstream end 10e is the upstream side of the laser gas flow, i.e., the -H-direction end, and the downstream end 12e is the downstream side of the laser gas flow, i.e., the H-direction end.

[0075] The position of the first guide 10d is adjusted by sandwiching a shim (not shown) between the first guide 10d and the inner surface of the container 19 to minimize the gap and step between the first guide 10d and the tilting member 12d. However, due to machining accuracy issues and the necessity of allowing the (not shown) wiring connected to the return plate 10c to pass through, the first guide 10d and the tilting member 12d cannot completely cover the -V direction end of the gap between the container 19 and the electrical insulation part 20, resulting in a small gap. Furthermore, the step cannot be completely eliminated.

[0076] A portion of the sound wave propagating from the discharge space between the first discharge electrode 11a and the second discharge electrode 11b is reflected by the gap or step between the first guide 10d and the inclined member 12d, and propagates radially inside the container 19 as a returning sound wave W with the location of this gap or step as a line sound source S. The reason why the sound source of the returning sound wave W is a line sound source S is that the gap or step between the first guide 10d and the inclined member 12d extends along the Z direction and is considered as a uniform sound source in the Z direction. The returning sound wave W may also include a portion of the sound wave propagating from the discharge space, i.e., the sound wave that enters the gap between the container 19 and the electrical insulation part 20, diffusely reflects off the wall surface of the gap including the cover part 18, and propagates radially through the line sound source S.

[0077] When the returning acoustic wave W reaches the discharge space, it creates variations in the density of the laser gas within the discharge space, causing the refractive index of the light to become non-uniform. Consequently, the intensity distribution of the laser LB changes, and the beam quality may decrease. The implementation method described below relates to suppressing the returning acoustic wave W from reaching the discharge space.

[0078] 3. A laser chamber 10 having a first space A1 between the first guide 10d and the inner surface of the container 19.

[0079] 3.1 Structure

[0080] Figure 4 A magnified view shows the vicinity of the boundary between the first guide 10d and the inclined member 12d in the first embodiment. In the first embodiment, the first guide 10d includes a second surface 42 in addition to the first surface 41. The second surface 42 forms a first space A1 between itself and the inner surface of the container 19. The size of the first space A1 in the V direction narrows as it moves inward. The direction toward the inward side of the first space A1 is defined as the first direction, which is the direction away from the second discharge electrode 11b. The first direction is approximately aligned with the H direction.

[0081] The upstream end 10e of the first guide 10d is located in a different position in a second direction than the downstream end 12e of the inclined member 12d. This second direction is perpendicular to the surface 44 in the inner surface of the container 19 that contacts the first space A1. The second direction is approximately consistent with the V direction. As a result, the position of the linear sound source S is slightly different from that in the comparative example, regressing to the position of the gap between the container 19 and the inclined member 12d.

[0082] Preferably, the second surface 42 is longer than the surface 44 in the H direction. Additionally, preferably a portion of the first guide 10d and a portion of the inclined member 12d are located at a position that overlaps when viewed along the second direction.

[0083] The angle α1 formed by the second face 42 and the face 44 of container 19 is greater than 0° and less than 90°, and is an angle different from 180° / N, where N is an arbitrary natural number.

[0084] The first space A1 is configured such that the extended surface 43a of the third surface 43 passes through the first space A1. Furthermore, the angle α5 formed by the third surface 43 and the second surface 42 is greater than 0° and less than 90°, and is an angle different from 180° / N, where N is an arbitrary natural number. Additionally, the angle formed by the third surface 43 and the surface 44 of the container 19 is greater than 0° and less than 10°.

[0085] Figure 5 This is a perspective view showing a portion of the first guide 10d in the first embodiment. Preferably, the first guide 10d has a plurality of grooves 10f on its second surface 42, which contacts the first space A1. Alternatively, a plurality of grooves 10f may also be present on the surface 44 of the inner surface of the container 19, which contacts the first space A1. Preferably, the depth of the grooves 10f is one-quarter of the wavelength of the sound wave. The cross-sectional shape of the grooves 10f may be rectangular, triangular, or arc-shaped.

[0086] 3.2 Function

[0087] (1) According to the first embodiment, the laser chamber 10 includes a container 19 for receiving laser gas, a first discharge electrode 11a and a second discharge electrode 11b, a crossflow fan 21 for circulating laser gas, a first guide member 10d, and a tilting member 12d. The first guide member 10d includes a first surface 41 and a second surface 42, along which the laser gas is guided. The second surface 42 forms a first space A1 between itself and the inner surface of the container 19, which narrows in a first direction toward the inward side. The tilting member 12d includes a third surface 43, along which the laser gas is guided toward the vicinity of the first guide member 10d.

[0088] Therefore, even if there is a gap or step between the container 19 and the inclined member 12d, the returning sound wave W, which is reflected by such a gap or step, can be reflected within the first space A1, delaying its return to the discharge space, or causing the returning sound wave W to attenuate within the first space A1. Thus, the arrival of the returning sound wave W in the discharge space can be suppressed.

[0089] (2) According to the first embodiment, the first direction toward the inner side of the first space A1 is the H direction away from the second discharge electrode 11b.

[0090] Therefore, it is possible to suppress the sound waves that have entered the first space A1 from the discharge space from returning to the discharge space.

[0091] (3) According to the first embodiment, the angle α1 formed by the second surface 42 and the inner surface of the container 19 that contacts the first space A1 is greater than 0° and less than 90°, and is different from 180° / N, where N is an arbitrary natural number.

[0092] Therefore, it is possible to prevent sound waves entering the first space A1 from the discharge space from being reflected N times and returning to the discharge space.

[0093] (4) According to the first embodiment, the extension surface 43a of the third surface 43 passes through the first space A1.

[0094] Therefore, the sound waves generated in the discharge space and reflected by the third surface 43 can enter the first space A1 and attenuate.

[0095] (5) According to the first embodiment, the angle α5 formed by the second surface 42 and the third surface 43 is greater than 0° and less than 90°, and is different from 180° / N, where N is any natural number.

[0096] This prevents sound waves from being reflected N times by the third surface 43 and the second surface 42 and returning to the discharge space.

[0097] (6) According to the first embodiment, the upstream end 10e of the laser gas flow direction of the first guide 10d and the downstream end 12e of the laser gas flow direction of the inclined member 12d are located at different positions in a second direction, which is perpendicular to the direction of the surface 44 in the inner surface of the container 19 that contacts the first space A1.

[0098] Therefore, even without making adjustments to minimize the gap between the first guide 10d and the tilting member 12d, it is possible to suppress the return of sound waves to the discharge space.

[0099] (7) According to the first embodiment, the length of the second surface 42 in the first direction is longer than the surface 44 in the inner surface of the container 19 that contacts the first space A1.

[0100] Thus, the second surface 42 receives the returning sound wave W reflected by the gap or step between the container 19 and the inclined member 12d and reflects it within the first space A1, thereby delaying or attenuating the time it returns to the discharge space.

[0101] (8) According to the first embodiment, a portion of the first guide 10d and a portion of the tilting member 12d are located at a position that overlaps when viewed from a second direction, which is perpendicular to the surface 44 in the inner surface of the container 19 that contacts the first space A1.

[0102] Therefore, the return sound wave W reflected by the gap or step between the container 19 and the inclined member 12d can be received more reliably by the second surface 42.

[0103] (9) According to the first embodiment, a plurality of grooves 10f are formed in any of the surfaces 44 that are in contact with the first space A1 on the inner surfaces of the second surface 42 and the container 19.

[0104] Thus, a phase difference corresponding to the depth of the groove 10f is generated in the sound waves reflected in the first space A1, so that the sound waves can cancel each other out and attenuate.

[0105] In other respects, the first embodiment is the same as the comparative example.

[0106] 4. A laser chamber 10 containing 10g of sound-absorbing material is configured in the first space A1.

[0107] 4.1 Structure

[0108] Figure 6 A magnified view shows the vicinity of the boundary between the first guide 10d and the inclined member 12d in the second embodiment. In the second embodiment, a sound-absorbing material 10g is disposed in the first space A1 between the second surface 42 and the inner surface of the container 19. The sound-absorbing material 10g may, for example, have a triangular prism shape, and the first space A1 may be entirely or partially filled with the sound-absorbing material 10g. Alternatively, the sound-absorbing material 10g may be configured to cover entirely or partially either the second surface 42 or the surface 44.

[0109] The 10g of sound-absorbing material can be made of either foamed nickel or porous alumina. Both are not easily reacted with fluorine gas and therefore do not easily deteriorate. In addition, foamed nickel has excellent sound absorption and processability, while porous alumina is an insulator, so it can suppress short circuits even when close to the second discharge electrode 11b.

[0110] 4.2 Function

[0111] (10) According to the second embodiment, 10g of sound-absorbing material is disposed in the first space A1.

[0112] Therefore, by configuring 10g of sound-absorbing material to suppress sound wave reflection, sound waves can be attenuated within the first space A1. Furthermore, configuring 10g of sound-absorbing material can suppress the inflow of laser gas into the first space A1 and prevent gas stagnation.

[0113] (11) In the second embodiment, the sound-absorbing material 10g may also be configured to cover any of the surfaces 44 that are in contact with the first space A1, including the second surface 42 and the inner surface of the container 19.

[0114] Therefore, the reflection of sound waves in the first space A1 can be suppressed, and the sound waves can be attenuated within the first space A1.

[0115] In other respects, the second implementation method is the same as the first implementation method.

[0116] 5. A laser chamber 10 having a second space A2 located further inward than the first space A1.

[0117] 5.1 Structure

[0118] Figure 7 A magnified view shows the vicinity of the boundary between the first guide 10d and the inclined member 12d in the third embodiment. In the third embodiment, a second space A2 communicating with the first space A1 is formed between the second surface 42 and the inner surface of the container 19, and further inward than the first space A1. The second space A2 has a shape in which the size of the V-direction wound expands the further away from the first space A1.

[0119] In the second space A2, the angle α4 formed by the second surface 42 and the inner surface of the container 19 that contacts the second space A2 is greater than 0° and less than 180°, and is an angle different from 180° / N, where N is an arbitrary natural number.

[0120] 5.2 Function

[0121] (12) According to the third embodiment, the second surface 42 forms a second space A2 that communicates with the first space A1 between itself and the inner surface of the container 19 at a position further inward than the first space A1.

[0122] Thus, the sound waves can be sealed into the second space A2, suppressing the sound waves from returning to the discharge space.

[0123] (13) According to the third embodiment, the second space A2 has a shape that expands as it moves further away from the first space A1.

[0124] Therefore, it is possible to suppress the sound waves that enter the second space A2 from returning to the first space A1.

[0125] In other respects, the third embodiment is the same as the first embodiment. Alternatively, in the third embodiment, sound-absorbing materials may be disposed in either or both of the first space A1 and the second space A2.

[0126] 6. Laser chamber 10, the angle between the second surface 42 and the inner surface of container 19 changes according to the position in the H direction.

[0127] 6.1 Structure

[0128] Figure 8A magnified view shows the vicinity of the boundary between the first guide 10d and the tilting member 12d in the fourth embodiment.

[0129] In the fourth embodiment, the angles α1 and α2 formed by the second surface 42 and surface 44 in the first space A1 become smaller as they approach the inner side of the first space A1. For example, compared to the angle α1 at a position in the first space A1 close to the second discharge electrode 11b, the angle α2 at a position farther away from the second discharge electrode 11b becomes smaller. Alternatively, the angle formed by the second surface 42 and surface 44 can also change in multiple stages, and the second surface 42 can also be composed of a curved surface, with the angle formed by the second surface 42 and surface 44 changing continuously.

[0130] In the fourth embodiment, the angles α3 and α4 formed by the second surface 42 and surface 45 in the second space A2 increase as they move further away from the first space A1. For example, compared to the angle α3 at a position in the second space A2 closer to the first space A1, the angle α4 at a position further away from the first space A1 becomes larger. Alternatively, the angle formed by the second surface 42 and surface 45 can also change in multiple stages, and the second surface 42 can also be composed of a curved surface, with the angle formed by the second surface 42 and surface 45 changing continuously.

[0131] 6.2 Function

[0132] (14) According to the fourth embodiment, the angles α1 and α2 formed by the second surface 42 and the inner surface of the container 19 and the surface 44 that contacts the first space A1 decrease along a first direction toward the inner side of the first space A1.

[0133] Therefore, by setting the angle to be smaller towards the inside of the first space A1, the sound wave can be attenuated within the first space A1.

[0134] (15) According to the fourth embodiment, the second surface 42 is located further inward than the first space A1, and forms a second space A2 that communicates with the first space A1 between it and the inner surface of the container 19. The angles α3 and α4 formed by the second surface 42 and the surface 45 in contact with the second space A2 on the inner surface of the container 19 are larger the further away from the first space A1.

[0135] Therefore, it is possible to suppress the sound waves that enter the second space A2 from returning to the first space A1.

[0136] In other respects, the fourth implementation is the same as the third implementation.

[0137] 7. The first surface 41 has a cross-section in the shape of a logarithmic spiral, forming a laser cavity 10h.

[0138] 7.1 Structure

[0139] Figure 9A magnified view shows the vicinity of the boundary between the first guide 10d and the inclined member 12d in the fifth embodiment. In the fifth embodiment, when viewed in cross-section with a plane perpendicular to the Z direction, the shape of the first surface 41 of the first guide 10d is approximately the same as the shape of the logarithmic spiral L0. "Approximately the same as the shape of the logarithmic spiral L0" means that it extends between the following first imaginary logarithmic spiral L1 and second imaginary logarithmic spiral L2.

[0140] Figure 10 The diagram shows a first hypothetical logarithmic spiral L1 and a second hypothetical logarithmic spiral L2. Both L1 and L2 are curves whose curvature decreases along the flow direction of the laser gas. The first hypothetical logarithmic spiral L1 is a spiral from which a straight line drawn from the origin O intersects the tangent of L1 at an angle of 103°. The second hypothetical logarithmic spiral L2 is a spiral from which a straight line drawn from the origin O intersects the tangent of L2 at an angle φ2 of 96°. In both L1 and L2, angles φ1 and φ2 are different from each other, but the origin O is the same.

[0141] Figure 11 The structure of the laser chamber 10h in the fifth embodiment, viewed along the -Z direction, is shown. Not only the first surface 41, but also the inner surface 19a of the container 19 that forms the gas flow path between the first guide 10d and the cooling section 25 can be located between the first imaginary logarithmic spiral L1 and the second imaginary logarithmic spiral L2.

[0142] Refer again Figure 9 Preferably, not only the first surface 41, but also at least a portion of the third surface 43 of the inclined member 12d is located between the first imaginary logarithmic spiral L1 and the second imaginary logarithmic spiral L2. Furthermore, preferably not only the first surface 41, but also the discharge surface 11c of the second discharge electrode 11b near the inclined member 12d is located between the first imaginary logarithmic spiral L1 and the second imaginary logarithmic spiral L2. The discharge surface 11c refers to the surface opposite the first discharge electrode 11a.

[0143] 7.2 Function

[0144] (16) According to the fifth embodiment, when the laser cavity 10 is viewed in section by a VH plane perpendicular to both the first surface 41 and the second surface 42, the first surface 41 extends between the first imaginary logarithmic spiral L1 and the second imaginary logarithmic spiral L2. The curvature of the first imaginary logarithmic spiral L1 decreases along the flow direction of the laser gas, and the angle φ1 at which the straight line drawn from the origin O intersects the tangent of the first imaginary logarithmic spiral L1 is 103°. The curvature of the second imaginary logarithmic spiral L2 decreases along the flow direction of the laser gas, and the angle φ2 at which the straight line drawn from the origin O intersects the tangent of the second imaginary logarithmic spiral L2 is 96°.

[0145] Therefore, by extending the first surface 41 between the first imaginary logarithmic spiral L1 and the second imaginary logarithmic spiral L2, whose curvature decreases along the flow direction of the laser gas, it is possible to suppress the stagnation of laser gas near the first surface 41, which would increase the flow path resistance.

[0146] (17) According to the fifth embodiment, at least a portion of the third surface 43 is located between the first hypothetical logarithmic spiral L1 and the second hypothetical logarithmic spiral L2.

[0147] Therefore, since at least a portion of the third surface 43 is located between the first hypothetical logarithmic spiral L1 and the second hypothetical logarithmic spiral L2, it is possible to suppress the stagnation of laser gas in the gas flow path from the vicinity of the third surface 43 to the vicinity of the first surface 41.

[0148] (18) According to the fifth embodiment, the discharge surface 11c of the second discharge electrode 11b near the inclined member 12d is located between the first imaginary logarithmic spiral L1 and the second imaginary logarithmic spiral L2.

[0149] Therefore, the discharge surface 11c of the second discharge electrode 11b is located between the first imaginary logarithmic spiral L1 and the second imaginary logarithmic spiral L2, thus suppressing the retention of laser gas in the gas flow path from the vicinity of the second discharge electrode 11b to the vicinity of the first surface 41.

[0150] Regarding other aspects, the fifth embodiment is the same as the first embodiment. Alternatively, in the fifth embodiment, a second space A2 may be provided, and 10g of sound-absorbing material may be disposed in the first space A1 or the second space A2. The angle formed by the second surface 42 and the surface 44 or 45 may vary depending on the position in the H direction.

[0151] 8. Other

[0152] 8.1 Manufacturing methods for electronic devices

[0153] Figure 12 The structure of the exposure system is shown. The exposure system includes a laser device 1 and an exposure device 100. The laser device 1 is configured to output a laser LB to the exposure device 100.

[0154] The exposure apparatus 100 includes an illumination optics system 50 and a projection optics system 51. The illumination optics system 50 illuminates a mask pattern (not shown) disposed on a mask stage RT using a laser LB incident from the laser device 1. The projection optics system 51 projects and reduces the laser LB transmitted through the mask onto a workpiece (not shown) disposed on a workpiece stage WT. The workpiece is a photosensitive substrate such as a semiconductor wafer coated with photoresist.

[0155] The exposure apparatus 100 exposes the workpiece with a laser beam LB reflecting the mask pattern by synchronously and parallelly moving the mask stage RT and the workpiece stage WT. After transferring the mask pattern onto the semiconductor wafer through the above exposure process, electronic devices can be manufactured through multiple processes.

[0156] 8.2 Laser Control Processor 30

[0157] The laser control processor 30 may also be physically configured in hardware to execute the various processes included in this disclosure. For example, the laser control processor 30 may also be a computer comprising a memory storing control programs that define various processes and a processing device for executing the control programs. The control programs may be stored in a single memory or separately in multiple physically separate memories, defining various processes through the control programs as a collection of these memories. The processing device may be a general-purpose processing device such as a CPU or a purpose-specific processing device such as a GPU.

[0158] Furthermore, the laser control processor 30 can also be programmed in software to perform the various processes included in this disclosure. For example, the laser control processor 30 can also have the functions of performing various processes installed in a dedicated device such as an ASIC or a programmable device such as an FPGA.

[0159] The various processes included in this disclosure can be executed by a single computer, a single dedicated device, or a single programmable device, or can be executed through the cooperation of multiple physically separate computers, multiple dedicated devices, or multiple programmable devices. The various processes can also be executed by a combination of at least two of more than one computer, more than one dedicated device, and more than one programmable device.

[0160] 8.3 Supplement

[0161] The foregoing description is not limiting but merely illustrative. Therefore, modifications to the embodiments of this disclosure can be made without departing from the claims, as will be apparent to those skilled in the art. Furthermore, it will be apparent to those skilled in the art that embodiments of this disclosure can be combined in various ways.

[0162] Unless otherwise expressly stated, all terms used in this specification and claims shall be interpreted as "non-limiting". For example, terms such as "comprising", "having", "possessing", and "comprise" shall be interpreted as "not excluding the presence of constituent elements other than those described". Furthermore, the modifier "a" shall be interpreted as "at least one" or "one or more". In addition, the phrase "at least one of A, B, and C" shall be interpreted as "A", "B", "C", "A+B", "A+C", "B+C", or "A+B+C". Moreover, it shall also be interpreted as including combinations of these with constituent elements other than "A", "B", and "C".

Claims

1. A laser chamber, wherein, The laser chamber includes: A container for holding laser gas; A pair of discharge electrodes; A fan circulates the laser gas; A first guide includes a first surface and a second surface, and guides the laser gas along the first surface, forming a first space between the second surface and the inner surface of the container that narrows in a first direction toward the inward side; as well as The second guide includes a third surface and guides the laser gas along the third surface toward the vicinity of the first guide.

2. The laser chamber according to claim 1, wherein, The first direction is the direction away from the discharge electrode.

3. The laser chamber according to claim 1, wherein, The angle between the second surface and the surface on the inner surface of the container that contacts the first space is greater than 0° and less than 90°, and is different from 180° / N, where N is an arbitrary natural number.

4. The laser chamber according to claim 1, wherein, The extended surface of the third surface passes through the first space.

5. The laser chamber according to claim 4, wherein, The angle between the second face and the third face is greater than 0° and less than 90°, and is different from 180° / N, where N is any natural number.

6. The laser chamber according to claim 1, wherein, The upstream end of the first guide in the direction of laser gas flow and the downstream end of the second guide in the direction of laser gas flow are located at different positions in a second direction, which is perpendicular to the surface of the inner surface of the container that contacts the first space.

7. The laser chamber according to claim 1, wherein, The length of the second surface in the first direction is longer than the length of the surface on the inner surface of the container that contacts the first space in the first direction.

8. The laser chamber according to claim 1, wherein, When viewed from a second direction, a portion of the first guide and a portion of the second guide are located in an overlapping position, the second direction being perpendicular to the surface of the inner surface of the container that contacts the first space.

9. The laser chamber according to claim 1, wherein, Multiple grooves are formed on any of the surfaces of the second surface that are in contact with the inner surface of the container and the first space.

10. The laser chamber according to claim 1, wherein, Sound-absorbing material is provided in the first space.

11. The laser chamber according to claim 10, wherein, The sound-absorbing material is configured to cover any one of the surfaces of the second surface and the inner surface of the container, as well as the surface that contacts the first space.

12. The laser chamber according to claim 1, wherein, The second surface is located further inward than the first space, forming a second space that communicates with the inner surface of the container.

13. The laser chamber according to claim 12, wherein, The second space has a shape that expands as it moves further away from the first space.

14. The laser chamber according to claim 1, wherein, The angle between the second surface and the surface in contact with the first space on the inner surface of the container decreases along the first direction of the first space.

15. The laser chamber according to claim 1, wherein, The second surface, located further inward than the first space, forms a second space with the inner surface of the container that communicates with the first space. The angle between the second surface and the surface in contact with the second space on the inner surface of the container is larger the further away from the first space.

16. The laser chamber according to claim 1, wherein, When the laser cavity is viewed in section with a plane perpendicular to both the first and second surfaces, the first surface extends between a first hypothetical logarithmic spiral and a second hypothetical logarithmic spiral. The curvature of the first hypothetical logarithmic spiral decreases along the flow direction, and the angle between the straight line drawn from the origin and the tangent of the first hypothetical logarithmic spiral is 103°. The curvature of the second hypothetical logarithmic spiral decreases along the flow direction, and the angle between the straight line drawn from the origin and the tangent of the second hypothetical logarithmic spiral is 96°.

17. The laser chamber according to claim 16, wherein, At least a portion of the third face lies between the first hypothetical logarithmic spiral and the second hypothetical logarithmic spiral.

18. The laser chamber according to claim 16, wherein, The discharge surface of the electrode closest to the second guide in the discharge electrode is located between the first hypothetical logarithmic spiral and the second hypothetical logarithmic spiral.

19. A discharge-excited gas laser device, wherein, The discharge-excited gas laser device includes: Optical resonators; and The laser cavity of claim 1 is located in the optical path of the optical resonator.

20. A method for manufacturing an electronic device, wherein, The method for manufacturing the electronic device includes the following steps: Laser is generated using a discharge-excited gas laser device. The laser is output to the exposure device; and The laser is exposed on a photosensitive substrate within the exposure apparatus to manufacture the electronic device. The discharge-excited gas laser device includes a laser chamber. The laser chamber includes: A container for holding laser gas; A pair of discharge electrodes; A fan circulates the laser gas; A first guide includes a first surface and a second surface, which guides the laser gas along the first surface and forms a first space between the second surface and the inner surface of the container that narrows in a first direction toward the inward side. as well as The second guide includes a third surface that guides the laser gas toward the vicinity of the first guide.

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