Chemical adding device for semiconductor manufacturing

Abstract

The present application relates to the field of semiconductor manufacturing, specifically to a kind of chemical liquid feeding equipment for semiconductor manufacturing.CDS liquid supply equipment is specifically provided, centering adjusting mechanism is arranged in liquid supply area, which is used to adjust the center of liquid supply barrel to fixed position, connector connecting mechanism is arranged in the space above the liquid supply barrel at the top of liquid supply area, gas-liquid connector and liquid return connector are arranged on connector connecting mechanism, limiting rod is arranged on the top of connector connecting mechanism, the center of limiting rod coincides with the center of liquid supply barrel, support is arranged on liquid supply area for limiting rod to pass through, a plurality of elastic ropes are arranged on connector connecting mechanism, and elastic ropes are connected with support.The present application can adapt to liquid supply barrels of different sizes, quickly adjust them to fixed center position, without manual repeated adjustment of barrel position, reduce physical consumption and operation time;Gas-liquid connector and liquid return connector can also be quickly aligned and connected, and centering mechanism and connector distance adjusting mechanism can adapt to liquid supply barrels of different specifications, improve the versatility of equipment.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more particularly to a chemical dispensing device for semiconductor manufacturing. Background Technology

[0002] In semiconductor manufacturing processes, the Chemical Supply System (CDS) is a critical infrastructure component, used to stably and accurately deliver high-purity chemical liquids, such as etching solutions, developing solutions, and cleaning agents, to process equipment. A typical CDS supply system includes a supply tank, delivery pipelines, filters, valves, pumps, and a control system.

[0003] In existing CDS (Chemical Dispenser) liquid supply systems, the connection between the supply tank and the equipment often uses dedicated liquid / gas connectors to facilitate chemical replacement and replenishment while minimizing the risk of leakage and contamination. While this design offers convenience in standard operation, it still has significant limitations in practical applications. Operators must manually adjust the position or angle of the supply tank to precisely align the port on the tank with the connector on the equipment. When the supply tank is large or heavy, this process is extremely physically demanding, increases operation time, raises the risk of contamination, and also poses certain safety risks. Summary of the Invention

[0004] The purpose of this invention is to address the problem in the prior art that manually adjusting the angle and position of the liquid supply tank is time-consuming and labor-intensive, and to propose a chemical dispensing device for semiconductor manufacturing.

[0005] The technical solution of this invention: A chemical dispensing device for semiconductor manufacturing, specifically a CDS liquid dispensing device. The CDS liquid dispensing device consists of a liquid dispensing area and a dispensing area. The liquid dispensing area is located in front of the dispensing area. A closed door is provided on the liquid dispensing area. Multiple conveying rollers are rotatably arranged at the bottom of the liquid dispensing area, and a liquid dispensing tank is placed on the conveying rollers. A gas-liquid port and a return port are provided on the top of the liquid dispensing tank. A centering adjustment mechanism is provided in the liquid dispensing area to adjust the center of the liquid dispensing tank to a fixed position. A connector connection mechanism is provided in the space above the liquid dispensing tank at the top of the liquid dispensing area. A gas-liquid connector and a return connector are provided on the connector connection mechanism. The distance between the gas-liquid connector and the return connector can be adjusted. A limiting rod is provided at the top of the connector connection mechanism. The center of the limiting rod coincides with the center of the liquid dispensing tank. A bracket is provided on the liquid dispensing area for the limiting rod to pass through. Multiple elastic ropes are provided on the connector connection mechanism, and the elastic ropes are connected to the bracket.

[0006] Preferably, the centering adjustment mechanism includes an arc-shaped plate that is slidably disposed in the liquid supply area in the front-back direction, a mounting seat disposed on the inner wall of the liquid supply area, and a telescopic device disposed on the mounting seat. The telescopic end of the telescopic device is connected to the arc-shaped plate, and the liquid supply tank contacts the arc-shaped surface on the arc-shaped plate.

[0007] Preferably, the liquid supply area is provided with two liquid supply positions, one on the left and one on the right. Each liquid supply position is provided with a centering adjustment mechanism and a liquid supply tank is placed on each liquid supply position.

[0008] Preferably, the connector connection mechanism includes a support plate, connector fixing brackets a and b slidably mounted on the support plate, and a distance adjustment component mounted on the support plate and driving connector fixing brackets a and b to move closer or further apart; the support plate is connected to the bottom of the limiting rod via a flat plate, the gas-liquid connector is mounted on connector fixing bracket a, and the return liquid connector is mounted on connector fixing bracket b.

[0009] Preferably, connector fixing bracket b and connector fixing bracket a are respectively provided with an insert plate and a slot plate, one end of the insert plate is inserted into the slot plate, and scale lines are provided on the insert plate; connector fixing bracket a is provided with a vertical through hole, and an elastic ring is fitted on the gas-liquid connector, and the elastic ring is connected to the inner wall of the through hole.

[0010] Preferably, the distance adjustment assembly includes a bearing housing mounted on a support plate, a rotating shaft passing through the bearing housing, screws mounted at both ends of the rotating shaft with opposite thread directions, and fixing blocks mounted on joint fixing bracket a and joint fixing bracket b, with the two fixing blocks respectively threadedly engaged with the two screws.

[0011] Preferably, the gas-liquid connector passes through the connector fixing frame a, and the return liquid connector passes through the connector fixing frame b and is threadedly connected to the connector fixing frame b; the bottom of the return liquid connector is a threaded part and mates with the thread on the inner wall of the return liquid port, and the connector fixing frame b is provided with a power module that drives the return liquid connector to rotate.

[0012] Preferably, the power module includes a gear a mounted on the return fluid connector, an encoder motor mounted on the connector mounting bracket b, and a gear b mounted on the output shaft of the encoder motor. Gear b meshes with gear a, and the thickness of gear b is greater than the thickness of gear a.

[0013] Compared with the prior art, the present invention has the following beneficial technical effects: 1. With the cooperation of the arc plate and the telescopic device, it can adapt to the liquid supply tank of different sizes and automatically adjust it to a fixed center position. There is no need for manual repeated adjustment of the tank position, which reduces physical labor and operation time. The distance between the gas-liquid connector and the return liquid connector can be flexibly adjusted according to the interface position of the liquid supply tank and can be intuitively calibrated through the scale line, avoiding the tedious steps of manual alignment and improving docking accuracy and speed. 2. The gas-liquid connector is fixed by a manual locking turntable, while the return liquid connector is automatically tightened by an encoder motor-driven gear mechanism. The control system can precisely control the locking force and position to avoid leakage or damage caused by improper human operation. 3. The centering mechanism and the connector distance adjustment mechanism can adapt to different specifications of liquid supply tanks, improving the equipment's versatility. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of one embodiment of the present invention; Figure 2 for Figure 1 Schematic diagram of the internal structure of the liquid supply area; Figure 3 for Figure 2 Partial structural diagram; Figure 4 for Figure 3 A structural diagram from another perspective; Figure 5 This is a schematic diagram of the connector connection mechanism; Reference numerals: 1. CDS liquid supply equipment; 2. Liquid supply area; 3. Distribution area; 4. Conveying roller; 5. Liquid supply tank; 6. Arc plate; 7. Guide rod; 8. Mounting base; 9. Telescopic device; 10. Gas-liquid port; 11. Liquid return port; 12. Support plate; 13. Handle; 14. Bearing seat; 15. Fixing block; 16. Rotating shaft; 17. Screw; 18. Knob; 19. Flat plate; 20. Limiting rod; 21. Elastic rope; 22. Gas-liquid connector; 23. Locking turntable; 24. Liquid return connector; 25. Connector fixing bracket a; 26. Connector fixing bracket b; 27. Gear a; 28. Gear b; 29. ​​Encoder motor; 30. Insert plate; 31. Slot plate; 32. Elastic ring; 33. Sealing door. Detailed Implementation

[0015] Example 1; as Figures 1-2As shown, this invention proposes a chemical dispensing device for semiconductor manufacturing, specifically a CDS (Chemical Dispensing System) device 1. The CDS device 1 consists of a dispensing zone 2 and a distribution zone 3. The dispensing zone 2 is located in front of the distribution zone and is equipped with a closed door 33. Multiple conveying rollers 4 are rotatably mounted at the bottom of the dispensing zone 2, and a dispensing tank 5 is placed on each of the conveying rollers 4. The top of the dispensing tank 5 is equipped with a gas-liquid port 10 and a return port 11. The distribution zone 3 of the CDS device 1 precisely delivers chemicals from the dispensing tank 5 to relevant semiconductor manufacturing process equipment, such as coating machines and cleaning machines, through pumps, valves, and pipelines. It is necessary to ensure that the chemicals are delivered at a stable flow rate and pressure to avoid bubbles or pressure fluctuations affecting process stability. Furthermore, a filter is required to remove particulate contaminants from the chemicals. To ensure the purity of the delivered liquid, sensors monitor for leaks, pressure anomalies, and temperature changes in real time throughout the process, triggering alarms or automatically shutting down the system. The distribution area typically uses high-purity materials such as PTFE and PFA piping to reduce chemical contamination and corrosion. Piping design must avoid dead ends to ensure complete chemical evacuation and prevent cross-contamination. Pumps are generally non-polluting pumps such as diaphragm pumps or magnetic pumps, driven by a motor to draw chemicals from the supply tank and maintain a constant flow rate. Pumps are usually equipped with frequency converters to adapt to different process requirements. Valves are generally pneumatic or electric, such as diaphragm valves, to control pipeline opening and closing, enabling the start, stop, switching, or flow direction adjustment of chemicals. Valve materials must be corrosion-resistant and have extremely high sealing requirements. (CDS) The distribution area structure of the liquid supply device 1 is a conventional structure of existing equipment, and will not be described in detail here. A centering adjustment mechanism is installed in the liquid supply area 2 to adjust the center of the liquid supply tanks 5 of various sizes to a fixed position. A connector connection mechanism is installed in the space above the liquid supply tanks 5 at the top of the liquid supply area 2. The connector connection mechanism is equipped with a gas-liquid connector 22 and a return liquid connector 24. The gas-liquid connector 22 is connected to an infusion hose and a gas infusion hose, and the return liquid connector 24 is connected to an infusion hose. Both the infusion hose and the gas infusion hose extend into the distribution area and connect to specific pipelines. Both the gas-liquid connector 22 and the return liquid connector 24 are commercially available connectors, such as those from COBBAT. The distance between the gas-liquid connector 22 and the return liquid connector 24 is adjustable. A limiting rod 20 is set at the top of the connector connection mechanism. The center of the limiting rod 20 coincides with the center of the liquid supply tank 5. A bracket is set on the liquid supply area 2 for the limiting rod 20 to pass through. Multiple elastic ropes 21 are set on the connector connection mechanism and the elastic ropes 21 are connected to the bracket. The distance between the gas-liquid port 10 and the return port 11 on different models of liquid supply tanks 5 is different. Before use, adjust the distance between the gas-liquid connector 22 and the return port 24 so that the gas-liquid connector 22 is directly above the gas-liquid port 10 and the return port 24 is directly above the return port 11. Then insert the suction tube under the gas-liquid connector 22 and the return port 24 respectively and extend it into the liquid supply tank 5. Then pull down the connector connection mechanism to connect the return port 24 with the return port 11 and the gas-liquid connector 22 with the gas-liquid port 10.

[0016] Example 2; as Figure 2 As shown, this invention proposes a chemical dispensing device for semiconductor manufacturing. Compared to Embodiment 1, this embodiment details the structure of the centering adjustment mechanism. Specifically, the centering adjustment mechanism includes an arc-shaped plate 6 slidably disposed within the liquid supply area 2 in the front-to-back direction, a mounting base 8 disposed on the inner wall of the liquid supply area 2, and a telescopic device 9 disposed on the mounting base 8. The telescopic end of the telescopic device 9 is connected to the arc-shaped plate 6, thereby driving the arc-shaped plate 6 to move in the forward direction. The telescopic device 9 is a cylinder, a hydraulic cylinder, or an electric push rod. The liquid supply tank 5 contacts the arc-shaped surface on the arc-shaped plate 6. When replacing the liquid supply tank 5, the used liquid supply tank 5 is first removed, and then a new liquid supply tank 5 is installed from... The trolley pushes the liquid supply tank 5 onto the conveyor roller 4 and pushes it inward to the farthest distance. At this time, the center of the liquid supply tank 5 enters the designed position. When using liquid supply tanks 5 of different sizes, the front and rear positions of the arc plate 6 are changed by the telescopic device 9 to ensure that the center of the liquid supply tank 5 is always located at the set position. Specifically, when replacing the liquid supply tank 5 with a larger size, the arc plate 6 needs to move backward a set distance. When replacing the liquid supply tank 5 with a smaller size, the arc plate 6 needs to move forward a set distance. In an optional embodiment, multiple guide rods 7 are horizontally arranged on the rear inner wall of the liquid supply area 2 in the front and rear direction, and multiple guide holes for the guide rods 7 to pass through are provided on the arc plate 6.

[0017] Furthermore, the liquid supply area 2 is equipped with two liquid supply positions, one on the left and one on the right. Each liquid supply position is equipped with a centering adjustment mechanism and a liquid supply tank 5 is placed on each liquid supply position. The two liquid supply tanks 5 can be configured as primary and backup to ensure continuous liquid supply.

[0018] Example 3; as Figures 2-4 As shown, this invention proposes a chemical dispensing device for semiconductor manufacturing. Compared to Embodiment 1, this embodiment details the structure of the connector connection mechanism. Specifically, the connector connection mechanism includes a support plate 12, connector fixing frames a25 and b26 slidably disposed on the support plate 12, and a distance adjustment component disposed on the support plate 12 to drive connector fixing frames a25 and b26 to move closer or further apart. The support plate 12 is connected to the bottom of the limiting rod 20 via a flat plate 19. A gas-liquid connector 22 is disposed on connector fixing frame a25, and a return liquid connector 24 is disposed on connector fixing frame b26. A handle 13 is provided on the front side of the support plate 12, which can be used to control the raising and lowering of the support plate 12.

[0019] A plate 30 and a slot plate 31 are respectively provided on the connector fixing bracket b26 and connector fixing bracket a25. One end of the plate 30 is inserted into the slot plate 31. The plate 30 is provided with scale lines to facilitate observation of the distance between the gas-liquid connector 22 and the return connector 24, so as to facilitate matching different models of liquid supply tanks 5. A through hole is vertically provided on the connector fixing bracket a25. An elastic ring 32 is fitted on the gas-liquid connector 22. The elastic ring 32 is connected to the inner wall of the through hole. By setting the elastic ring 32, the position of the gas-liquid connector 22 can be finely adjusted within a small range, which can easily adapt to processing errors or errors in the alignment of the liquid supply tank 5.

[0020] The distance adjustment assembly includes a bearing seat 14 mounted on a support plate 12, a rotating shaft 16 passing through the bearing seat 14, screws 17 mounted at both ends of the rotating shaft 16 with opposite thread directions, and fixing blocks 15 mounted on the connector fixing bracket a25 and the connector fixing bracket b26. The two fixing blocks 15 are threadedly engaged with the two screws 17 respectively. To facilitate the rotation of the screws 17, a knob 18 is provided at the end of one of the screws 17.

[0021] Example 4; as Figures 2-4 As shown, this invention proposes a chemical dispensing device for semiconductor manufacturing. Compared to Embodiment 3, this embodiment details the connection method of the gas-liquid connector 22 and the return connector 24. Specifically, the gas-liquid connector 22 passes through the connector fixing frame a25, and the return connector 24 passes through the connector fixing frame b26 and is threadedly connected to the connector fixing frame b26. The locking turntable 23 on the gas-liquid connector 22 is located below the connector fixing frame a25. After the gas-liquid connector 22 is inserted into the gas-liquid port 10, the locking turntable 23 is manually rotated to lock the gas-liquid connector 22 onto the gas-liquid port 10. The bottom of the return connector 24 has a threaded part that engages with the thread on the inner wall of the return port 11. The connector fixing frame b26 is equipped with a power module that drives the return connector 24 to rotate. The lifting and lowering speed of the threaded part at the bottom of the return connector 24 when rotating inside the return port 11 is equal to the lifting and lowering speed of the return connector 24 on the connector fixing frame b26 when rotating.

[0022] Furthermore, the power module includes a gear a27 mounted on the return connector 24, an encoder motor 29 mounted on the connector mounting bracket b26, and a gear b28 mounted on the output shaft of the encoder motor 29. Gear b28 meshes with gear a27, and the thickness of gear b28 is greater than that of gear a27. When the return connector 24 rotates into the return port 11, gear a27 and gear b28 move relative to each other. A control system is installed in the supply zone 2, and the control system is connected to the encoder motor 29. The control system forms a control panel on the top front side of the supply zone 2 to control the operation of the encoder motor 29.

[0023] In summary, when using this invention, the two liquid supply tanks 5 can be configured as primary and backup to ensure continuous liquid supply. When it is necessary to replace the liquid supply tank 5, first open the sealing door 33 to remove the used liquid supply tank 5, and then push the new liquid supply tank 5 from the trolley onto the conveying roller 4, pushing the liquid supply tank 5 inward to its furthest distance. At this time, the center of the liquid supply tank 5 enters the designed position. It should be noted that when the liquid supply tank 5 enters the conveying roller 4, try to ensure that the return liquid port 11 and the gas-liquid port 10 are distributed left and right. Of course, the angle does not need to be strictly required, just ensure the approximate state. When using liquid supply tanks 5 of different sizes, the front and rear positions of the arc plate 6 can be changed by the telescopic device 9 to ensure... Ensure the center of the supply tank 5 is always in the set position; after the center of the supply tank 5 is fixed, take two suction tubes and connect them to the gas-liquid connector 22 and the return connector 24 respectively, and insert the suction tubes into the supply tank 5. Hold the handle 13 and pull down the support plate 12 to drive the gas-liquid connector 22 and the return connector 24 down. Rotate the support plate 12 as needed so that the gas-liquid connector 22 is inserted into the gas-liquid port 10 and the return connector 24 is inserted into the return port 11. The gas-liquid connector 22 needs to be manually rotated to lock the locking turntable 23. The locking of the return connector 24 can be achieved by controlling the encoder motor 29 to work a set number of revolutions through the control panel. Finally, close the sealing door 33.

[0024] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited thereto. Various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention.

Claims

1. A chemical dispensing device for semiconductor manufacturing, specifically a CDS liquid dispensing device (1), the CDS liquid dispensing device (1) comprising a liquid dispensing area (2) and a dispensing area (3), the liquid dispensing area (2) being located in front of the dispensing area, a closed door (33) being provided on the liquid dispensing area (2), a plurality of conveying rollers (4) being rotatably arranged at the bottom of the liquid dispensing area (2), a liquid dispensing tank (5) being placed on the conveying rollers (4), and a gas-liquid port (10) and a return port (11) being provided on the top of the liquid dispensing tank (5); characterized in that, A centering adjustment mechanism is provided in the liquid supply area (2) to adjust the center of the liquid supply tank (5) to a fixed position. A connector connection mechanism is provided in the space above the liquid supply tank (5) at the top of the liquid supply area (2). A gas-liquid connector (22) and a return liquid connector (24) are provided on the connector connection mechanism. The distance between the gas-liquid connector (22) and the return liquid connector (24) can be adjusted. A limiting rod (20) is provided at the top of the connector connection mechanism. The center of the limiting rod (20) coincides with the center of the liquid supply tank (5). A bracket is provided on the liquid supply area (2) for the limiting rod (20) to pass through. Multiple elastic ropes (21) are provided on the connector connection mechanism. The elastic ropes (21) are connected to the bracket.

2. The chemical dispensing equipment for semiconductor manufacturing according to claim 1, characterized in that, The centering adjustment mechanism includes an arc plate (6) that slides in the liquid supply area (2) along the front-back direction, a mounting seat (8) on the inner wall of the liquid supply area (2), and a telescopic device (9) on the mounting seat (8). The telescopic end of the telescopic device (9) is connected to the arc plate (6), and the liquid supply tank (5) contacts the arc surface on the arc plate (6).

3. The chemical dispensing equipment for semiconductor manufacturing according to claim 2, characterized in that, Two liquid supply positions are set in the liquid supply area (2), one on the left and one on the right. Each liquid supply position is equipped with a centering adjustment mechanism, and a liquid supply tank (5) is placed on each liquid supply position.

4. The chemical dispensing equipment for semiconductor manufacturing according to claim 1, characterized in that, The connector connection mechanism includes a support plate (12), a connector fixing frame a (25) and a connector fixing frame b (26) slidably disposed on the support plate (12), and a distance adjustment component disposed on the support plate (12) and driving the connector fixing frame a (25) and the connector fixing frame b (26) to move closer or further away from each other; the support plate (12) is connected to the bottom of the limiting rod (20) through a flat plate (19), the gas-liquid connector (22) is disposed on the connector fixing frame a (25), and the return liquid connector (24) is disposed on the connector fixing frame b (26).

5. The chemical dispensing equipment for semiconductor manufacturing according to claim 4, characterized in that, A plug plate (30) and a slot plate (31) are respectively provided on the connector fixing bracket b (26) and the connector fixing bracket a (25). One end of the plug plate (30) is inserted into the slot plate (31). A scale line is provided on the plug plate (30). A through hole is vertically provided on the connector fixing bracket a (25). An elastic ring (32) is fitted on the gas-liquid connector (22). The elastic ring (32) is connected to the inner wall of the through hole.

6. The chemical dispensing equipment for semiconductor manufacturing according to claim 4, characterized in that, The distance adjustment assembly includes a bearing seat (14) mounted on a support plate (12), a rotating shaft (16) passing through the bearing seat (14), screws (17) mounted at both ends of the rotating shaft (16) with opposite thread directions, and fixing blocks (15) mounted on the joint fixing bracket a (25) and the joint fixing bracket b (26), with the two fixing blocks (15) threadedly engaged with the two screws (17) respectively.

7. The chemical dispensing equipment for semiconductor manufacturing according to claim 4, characterized in that, The gas-liquid connector (22) passes through the connector fixing frame a (25), and the return liquid connector (24) passes through the connector fixing frame b (26) and is threadedly connected to the connector fixing frame b (26); the bottom of the return liquid connector (24) is threaded and engages with the thread on the inner wall of the return liquid port (11); the connector fixing frame b (26) is equipped with a power module that drives the return liquid connector (24) to rotate.

8. The chemical dispensing equipment for semiconductor manufacturing according to claim 7, characterized in that, The power module includes a gear a (27) mounted on the return fluid connector (24), an encoder motor (29) mounted on the connector mounting bracket b (26), and a gear b (28) mounted on the output shaft of the encoder motor (29). The gear b (28) meshes with the gear a (27), and the thickness of the gear b (28) is greater than the thickness of the gear a (27).

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