Process for the preparation of anti-glare biomimetic moth-eye structures for glass surfaces
The biomimetic moth-eye structure was prepared by combining laser pretreatment and chemical etching, which solved the problems of complex process and high cost in the existing technology. It achieved the preparation of high-precision, low-reflectivity biomimetic moth-eye structure, which is suitable for display, photovoltaic and optical fields.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- ZHE JIANG CHANGXING HELI OPTOELECTRONIC TECH CO LTD
- Filing Date
- 2026-04-07
- Publication Date
- 2026-06-09
AI Technical Summary
Existing technologies for fabricating biomimetic moth-eye structured glass suffer from complex processes, high costs, and the tendency for the structure to detach, limiting its widespread application in the industrial field.
By employing a combination of laser pretreatment and chemical etching, periodic nanostructures are induced on the glass surface, and the structural stability is enhanced by plasma treatment or hydrophobic coating, thus fabricating a biomimetic moth-eye structure. This method avoids photoresist assistance and template transfer, simplifies the process, and reduces costs.
A high-precision, low-reflectivity biomimetic moth-eye structure has been fabricated, possessing excellent mechanical stability and self-cleaning function. It is suitable for various display, photovoltaic, and optical fields, and maintains low reflectivity over a wide spectral and angular range.
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Figure CN122167034A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of glass anti-glare technology, specifically to the fabrication process of a biomimetic moth-eye structure for anti-glare on glass surfaces. Background Technology
[0002] Anti-glare technology has important application value in the fields of modern optics and display. Traditional anti-glare methods mainly use multi-layer interference coating or surface frosting treatment.
[0003] However, when using multilayer interference coating, the reflectivity of multilayer coating technology is high (about 1-2%) and it is only effective at specific wavelengths and angles. When using surface frosting, although surface frosting can reduce reflectivity, it will significantly reduce transmittance (by about 10-15%). Furthermore, while nanoimprinting technology can fabricate biomimetic moth-eye structures, it requires photoresist assistance and template transfer, making the process complex and costly. More importantly, the micro-nano structures are made of different materials than the glass substrate, making them prone to detachment during use and causing the anti-glare effect to fail. The biomimetic moth-eye structure is a naturally occurring nanoscale microstructure composed of a large number of hexagonal or conical protrusions with a diameter of 100-200 nanometers. These protrusions are arranged periodically on the surface, causing diffuse reflection of the irradiated light in different directions, effectively reducing the reflectivity. Although this structure can reduce the reflectivity of the glass surface to 0.23%, which is far superior to traditional methods, existing fabrication technologies (such as wet etching and nanoimprinting) have shortcomings in terms of process complexity, cost control, and structural stability, limiting their widespread application in the industrial field. Summary of the Invention
[0004] This invention provides a process for fabricating a biomimetic moth-eye structure for anti-glare on glass surfaces, solving the problems mentioned in the background art.
[0005] To achieve the above objectives, the present invention is implemented through the following technical solution: a biomimetic moth-eye structure preparation process for anti-glare on glass surfaces, including a biomimetic moth-eye structure and a processing technology, wherein the processing technology includes a laser pretreatment stage, a chemical etching treatment stage, and a post-treatment stage; The laser pretreatment stage induces periodic nanostructures on the glass surface using femtosecond or picosecond lasers; The chemical etching process involves immersing the pretreated glass in a hydrofluoric acid etching solution to selectively dissolve the modified region and form a nanocone array. The post-processing stage employs plasma treatment or hydrophobic coating to enhance structural stability and self-cleaning properties.
[0006] Optionally, the wavelength of the femtosecond and picosecond lasers is set to be an ultraviolet laser or a near-infrared laser of 355-1064nm; Both the femtosecond and picosecond lasers employ pulse train technology, with a pulse number of 5-20 and an energy density of 1-5 J / cm². 2 The scanning speed is 50-500 mm / s, and the pulse width is <1000 fs.
[0007] Optionally, the concentration of the hydrofluoric acid etching solution is set to 40-50%, the etching temperature is set to 25-40℃, and the etching time is set to 10-60min.
[0008] Optionally, the period of the nanostructure is set to 300-500 nm, the aspect ratio is set to 1:1 to 2:1, and the top diameter is set to 100-200 nm.
[0009] Optionally, the laser pretreatment stage employs a dynamic feedback system to monitor the laser energy distribution and adjust the power density in real time. Optionally, the chemical etching stage employs microporous airflow pressurization technology to suppress defects caused by uneven solution flow.
[0010] Optionally, the hydrophobic coating is made of perfluoropolyether or fluorosilane and formed by immersion or vapor deposition to achieve a water contact angle of not less than 150°.
[0011] Optionally, the plasma treatment uses Ar gas plasma with a power of 100-300W and a treatment time of 10-30min.
[0012] Optionally, the glass with the biomimetic moth-eye structure has a reflectivity of less than 0.5% and a transmittance of more than 98% in the 300-2500nm wavelength range, and maintains low reflectivity in the 0°-85° incident angle range.
[0013] Optionally, the glass is used for display screens, photovoltaic panel covers, or spacecraft optical windows.
[0014] The present invention has the following beneficial effects: 1. The fabrication process of the biomimetic moth-eye structure for anti-glare glass surfaces, through laser-induced chemical etching, successfully solves the problems of complex fabrication process, high cost, and easy detachment of the structure. This provides a feasible solution for the large-scale production of super anti-glare glass. This technology not only has significant advantages in optical performance, but also has excellent mechanical stability and self-cleaning function, and is suitable for various display, photovoltaic, optical and architectural fields.
[0015] 2. The fabrication process of the biomimetic moth eye structure for anti-glare on glass surfaces changes the properties of the glass surface through laser pretreatment. It eliminates the need for masks or templates, significantly reducing process complexity and production costs. It solves the problem of complex and costly processes caused by the need for photoresist assistance and template transfer in existing nanoimprinting technology, achieving the effect of process simplification and cost reduction.
[0016] 3. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces avoids the problem of easy structure detachment in traditional nanoimprinting by directly molding the biomimetic moth-eye structure into the glass substrate material. Furthermore, the biomimetic moth-eye structure exhibits excellent durability in mechanical wear, chemical corrosion, or thermal cycling tests, with no significant attenuation of reflectivity, achieving the effect of integrated molding and high stability.
[0017] 4. The biomimetic moth-eye structure fabrication process for anti-glare glass surfaces reduces thermal damage through the cold processing characteristics of ultrafast lasers, and achieves precise control of nanoscale structures by combining chemical etching. This technology is applicable to a variety of glass materials, such as soda-lime glass, borosilicate glass, and fused silica, and maintains low reflectivity over a wide spectrum and wide angle range, achieving high precision and wide applicability.
[0018] 5. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces, by introducing a dynamic feedback system and microporous airflow pressurization technology, can dynamically adjust the laser power or etching solution concentration based on real-time monitoring of the structural morphology feedback, ensuring structural consistency during large-area processing and achieving the effect of dynamic parameter adjustment and processing consistency. Attached Figure Description
[0019] Figure 1 This is a flowchart of the fabrication process of the biomimetic moth eye structure of the present invention; Figure 2 This diagram illustrates the application of the biomimetic moth-eye structure glass of this invention in various fields. Detailed Implementation
[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0021] Please see Figure 1 and Figure 2 The present invention provides a technical solution: a process for preparing a biomimetic moth-eye structure for anti-glare on glass surfaces, including a biomimetic moth-eye structure and a processing technology, wherein the processing technology includes a laser pretreatment stage, a chemical etching stage, and a post-treatment stage; In the laser pretreatment stage, ultrafast lasers (femtosecond or picosecond level) are used to precisely etch the glass surface, forming periodic nanostructures. The laser parameters can be optimized according to the glass material and the target structure. The mathematical relationship between the laser parameters and the structure period is: period ≈ λ / (2n), where λ is the laser wavelength and n is the number of pulses in the pulse train. A laser beam, through a specific polarization direction (parallel to the scanning direction) and focusing method (such as cylindrical lens focusing), forms periodic energy deposition on the glass surface, exciting surface plasmon waves (SPP) and grating coupling effects, thereby inducing subwavelength periodic structures (period 300-500nm) on the glass surface. The key innovation in this stage is to use femtosecond pulse trains to replace traditional single-pulse lasers. By controlling the number of pulses (n) and energy density, the period and depth of the nanostructure can be actively modulated, making the structure more regular and easier to subsequently etch and amplify. The chemical etching stage involves immersing the laser-pretreated glass in a chemical etching solution of a specific composition. Utilizing the difference in dissolution rates between the laser-modified and unmodified areas, material is selectively removed, thus amplifying the nanostructure. During the etching process, the glass surface in the laser-modified zone exhibits a higher etching rate due to changes in its physicochemical properties (such as increased hydroxyl density and altered crystallinity), thereby forming nanoscale grooves or conical structures. The key innovation in this stage lies in altering the chemical properties of the glass surface through laser pretreatment, enabling it to exhibit selective dissolution behavior in the etching solution. This allows for precise control of nanoscale structures without the need for traditional masks. The cold processing characteristics of ultrafast lasers reduce thermal damage, and combined with chemical etching, precise control of nanoscale (100-300nm) structures can be achieved. This technology is applicable to a variety of glass materials, such as soda-lime glass, borosilicate glass, and fused silica, and maintains low reflectivity in a wide spectrum (300-2500nm) and wide angle (0°-85°) range, achieving high precision and wide applicability. The post-treatment stage employs plasma treatment or hydrophobic coating to enhance structural stability and self-cleaning properties. The hydrophobic coating consists of perfluoropolyether, fluorosilane, and other components, and is prepared by methods such as immersion and vapor deposition. The plasma treatment parameters are: Ar gas plasma, power 100-300W, and treatment time 10-30min.
[0022] The processing technology also includes structural optimization and uniformity control. By introducing a dynamic feedback system and microporous airflow pressurization technology, in order to ensure the uniformity and consistency of the structure during large-area processing, structural optimization and uniformity control includes a dynamic feedback system, microporous airflow pressurization, and structural parameter design. Among them, the parameter range of microporous airflow pressurization technology is: pressure 0.1-0.5MPa, micropore diameter 20-50μm; Among them, the dynamic feedback system monitors the laser energy distribution in real time through a CCD camera, and dynamically adjusts the power density (±5% compensation) and scanning speed to ensure uniform energy distribution; Micro-pore airflow pressurization: Applying micro-pore airflow pressurization (pressure 0.1-0.5MPa) during the etching process suppresses defects caused by uneven solution flow and improves processing uniformity; Structural parameter design: The aspect ratio of the nanocone is controlled between 1:1 and 2:1 (e.g., height 250nm, diameter 150nm), and the top diameter is precisely controlled within the range of 100-200nm to balance optical effects and mechanical strength.
[0023] The wavelengths of femtosecond and picosecond lasers are set to ultraviolet or near-infrared lasers of 355-1064nm, with 355nm ultraviolet lasers and 1064nm near-infrared lasers being preferred. Both femtosecond and picosecond lasers employ pulse train technology, with a pulse number ranging from 5 to 20. Precise control of the structural period is achieved by adjusting the pulse number, resulting in an energy density of 1-5 J / cm². 2 The preferred energy density is 2-3 J / cm³. 2 The scanning speed is 50-500 mm / s, with a preferred scanning speed of 100-300 mm / s. The pulse width is an ultrashort pulse of <1000 fs, preferably a femtosecond laser of 250-950 fs.
[0024] The concentration of the hydrofluoric acid etching solution is set to 40-50%, with the preferred concentration being 45%. The etching temperature is set to 25-40℃, with the preferred etching temperature being 35℃. The etching time is set to 10-60 min, with the preferred etching time being 30 min. Surfactants or buffers can also be added to adjust the etching rate and surface roughness.
[0025] The period of the nanostructure is set to 300-500 nm, the aspect ratio is set to 1:1 to 2:1, and the top diameter is set to 100-200 nm.
[0026] The laser preprocessing stage employs a dynamic feedback system to monitor the laser energy distribution and adjust the power density in real time to ensure uniform energy distribution. Specifically, the dynamic feedback system is implemented through a closed-loop system of CCD camera and laser power control.
[0027] The chemical etching process employs microporous airflow pressurization technology to suppress defects caused by uneven solution flow and improve processing uniformity.
[0028] Hydrophobic coatings are formed on glass surfaces through immersion or vapor deposition methods (such as perfluoropolyethers and fluorosilanes), achieving a water contact angle of over 150° and thus enabling self-cleaning.
[0029] The plasma treatment uses Ar gas plasma with a power of 100-300W and a treatment time of 10-30 minutes to enhance surface bonding strength and reduce defects.
[0030] The biomimetic moth-eye structure glass has a reflectivity of less than 0.5% and a transmittance of more than 98% in the 300-2500nm wavelength range, and maintains low reflectivity in the 0°-85° incident angle range.
[0031] Glass is used in display screens, photovoltaic panel covers, or spacecraft optical windows; When glass is used in display screens, it reduces specular reflection and improves visibility in bright light environments. When glass is used as a cover for photovoltaic panels, it increases light transmittance and reduces reflection loss. When glass is used in spacecraft optical windows, it meets the optical requirements of high vacuum and extreme temperature environments.
[0032] In summary, the fabrication process of this biomimetic moth-eye structure for anti-glare on glass surfaces, when used: Example 1: Fabrication of moth-eye structures using 355nm ultraviolet femtosecond laser Laser parameters: wavelength 355nm, pulse width 250fs, energy density 2.5J / cm² 2 Scanning speed 200mm / s, pulse train number n=10; Etching solution parameters: 45% HF solution, temperature 35℃, etching time 30 minutes; Structural features: Nanocone period 400nm, aspect ratio 1.5:1, top diameter 180nm; Optical performance: Reflectivity 0.35%, transmittance 98.6%, maintaining low reflectivity within the incident angle range of 0°-80°.
[0033] Example 2: Fabrication of moth-eye structures using 1064nm near-infrared femtosecond laser Laser parameters: wavelength 1064nm, pulse width 500fs, energy density 3.0J / cm² 2 The scanning speed is 150 mm / s, and the number of pulses in the pulse train is n=15. Etching solution parameters: 45% HF solution, temperature 35℃, etching time 40 minutes; Structural features: Nanocone period of 500nm, aspect ratio of 2:1, top diameter of 150nm; Optical performance: Reflectivity 0.42%, transmittance 98.5%, maintaining low reflectivity within the incident angle range of 0°-85°.
[0034] Example 3: Dynamic Feedback System and Microporous Airflow Pressurization Technology Laser parameters: wavelength 355nm, pulse width 300fs, energy density 2.8J / cm² 2 The scanning speed is 180 mm / s, and the number of pulses in the pulse train is n=12. Etching solution parameters: 45% HF solution, temperature 35℃, etching time 35 minutes; Dynamic feedback system: A CCD camera monitors the laser energy distribution in real time and dynamically adjusts the power density by ±5%; Microporous airflow pressurization: pressure 0.3MPa, suppressing defects caused by uneven solution flow; Structural features: Nanocone period 450nm, aspect ratio 1.8:1, top diameter 160nm; Optical performance: Reflectivity 0.28%, transmittance 98.7%, maintaining low reflectivity within the incident angle range of 0°-85°; Uniformity: When processing large areas (2000×3000mm), the reflectivity fluctuation is less than ±0.1%, and the transmittance fluctuation is less than ±0.2%. Example 4: Post-treatment of hydrophobic coating Laser parameters: wavelength 355nm, pulse width 300fs, energy density 2.8J / cm² 2 The scanning speed is 180 mm / s, and the number of pulses in the pulse train is n=12. Etching solution parameters: 45% HF solution, temperature 35℃, etching time 35 minutes; Hydrophobic coating: Perfluoropolyether coating, formed by immersion method, with a water contact angle of 162°; Optical performance: Reflectivity 0.30%, transmittance 98.6%, maintaining low reflectivity within the incident angle range of 0°-85°; Self-cleaning performance: The water droplet roll-off angle is less than 2°, and it still maintains a hydrophobicity of more than 150° after 100 friction tests; Durability: The reflectivity showed no significant change after 1000 hours of accelerated aging test.
[0035] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. Moreover, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0036] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A process for fabricating a biomimetic moth-eye structure for anti-glare on glass surfaces, characterized in that: It includes a biomimetic moth eye structure and processing technology, wherein the processing technology includes a laser pretreatment stage, a chemical etching stage, and a post-treatment stage; The laser pretreatment stage induces periodic nanostructures on the glass surface using femtosecond or picosecond lasers; The chemical etching process involves immersing the pretreated glass in a hydrofluoric acid etching solution to selectively dissolve the modified region and form a nanocone array. The post-processing stage employs plasma treatment or hydrophobic coating to enhance structural stability and self-cleaning properties.
2. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces according to claim 1, characterized in that: The wavelengths of the femtosecond and picosecond lasers are set to ultraviolet lasers of 355-1064nm or near-infrared lasers of 1064nm. Both the femtosecond and picosecond lasers employ pulse train technology, with a pulse number of 5-20 and an energy density of 1-5 J / cm². 2 The scanning speed is 50-500 mm / s, and the pulse width is <1000 fs.
3. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces according to claim 1, characterized in that: The concentration of the hydrofluoric acid etching solution is set to 40-50%, the etching temperature is set to 25-40℃, and the etching time is set to 10-60min.
4. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces according to claim 1, characterized in that: The period of the nanostructure is set to 300-500 nm, the aspect ratio is set to 1:1 to 2:1, and the top diameter is set to 100-200 nm.
5. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces according to claim 1, characterized in that: The laser preprocessing stage employs a dynamic feedback system to monitor the laser energy distribution and adjust the power density in real time.
6. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces according to claim 1, characterized in that: The chemical etching process employs microporous airflow pressurization technology to suppress defects caused by uneven solution flow.
7. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces according to claim 1, characterized in that: The hydrophobic coating is made of perfluoropolyether or fluorosilane and is formed by immersion or vapor deposition to achieve a water contact angle of not less than 150°.
8. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces according to claim 1, characterized in that: The plasma treatment uses Ar gas plasma with a power of 100-300W and a treatment time of 10-30 minutes.
9. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces according to claim 1, characterized in that: The biomimetic moth-eye structure glass has a reflectivity of less than 0.5% and a transmittance of more than 98% in the 300-2500nm wavelength range, and maintains low reflectivity in the 0°-85° incident angle range.
10. The fabrication process of the biomimetic moth-eye structure for anti-glare on glass surfaces according to claim 9, characterized in that: The glass is used for display screens, photovoltaic panel covers, or spacecraft optical windows.