Clean room functional gas source input state monitoring device

Abstract

The application relates to the technical field of monitoring, in particular to a clean room functional air source input state monitoring device, which comprises an air source input state monitoring device body, a bypass pipeline is fixedly connected to the inside of the air source input state monitoring device body, a monitoring box is fixedly connected to the inner wall of the air source input state monitoring device body, an inlet pipe is fixedly connected to the outer wall of the bottom of the monitoring box in a penetrating mode, an exhaust pipe is fixedly connected to the outer wall of the bottom of the monitoring box in a penetrating mode, the outer wall of the bottom of the inlet pipe is fixedly connected to the inside of the bypass pipeline in a penetrating mode, and the outer wall of the bottom of the exhaust pipe is fixedly connected to the inside of the bypass pipeline in a penetrating mode. The sensor is arranged in the inside of the monitoring box, the sensor is prevented from directly contacting with the gas in the inside of the bypass pipeline, the sensitive element of the sensor is prevented from being continuously scoured by high-speed airflow, signal drift and measurement error are avoided, the probe aging is slowed down, and the stability and accuracy of monitoring are improved.

Description

Technical Field

[0001] This invention belongs to the field of monitoring technology, specifically relating to a functional gas source input status monitoring device for cleanrooms. Background Technology

[0002] The functional gas source input status monitoring device for cleanrooms is an intelligent monitoring device specifically designed for high-cleanliness environments. It can monitor the status parameters of key process gases (such as nitrogen, oxygen, and argon) entering the cleanroom in real time and with high accuracy, including pressure, purity, dew point, and particulate matter content. By integrating high-sensitivity sensors and a data acquisition system, the device continuously assesses whether the gas source quality meets process standards. Once an anomaly is detected or a deviation from a set threshold is detected, an alarm will be immediately issued or triggering control measures, thereby ensuring the stability of the production process, product yield, and controlled environmental conditions within the cleanroom. It is a core auxiliary equipment for ensuring gas source reliability and process safety in fields such as semiconductors, biopharmaceuticals, and precision manufacturing.

[0003] However, traditional devices still have the following problems when in use: In the existing technology, the sensitive elements of the monitoring device are easily exposed to factors such as high-speed airflow, gas cleanliness fluctuations, and temperature and humidity changes, which can easily cause signal drift and measurement errors, while also accelerating probe aging and affecting the stability and accuracy of monitoring. Therefore, we need a functional air source input status monitoring device for cleanrooms to solve the problem of sensor probe aging caused by high-speed airflow when the sensor probe is directly inserted, thereby extending the service life of the sensor probe. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the present invention aims to provide a functional gas source input status monitoring device for cleanrooms, which has the advantage of extending the service life of sensor probes.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a functional gas source input status monitoring device for cleanrooms, comprising a gas source input status monitoring device body, a bypass pipe fixedly connected inside the gas source input status monitoring device body, a monitoring box fixedly connected to the inner wall of the gas source input status monitoring device body, an inlet pipe fixedly connected through the outer wall of the bottom of the monitoring box, an exhaust pipe fixedly connected through the outer wall of the bottom of the monitoring box, the outer wall of the bottom of the inlet pipe fixedly connected through the interior of the bypass pipe, the outer wall of the bottom of the exhaust pipe fixedly connected through the interior of the bypass pipe, and a one-way valve fixedly connected inside the inlet pipe and the exhaust pipe, respectively.

[0006] Preferably, the outer wall of the top of the monitoring box has an insertion hole, and a mounting plate three is movably inserted into the insertion hole. A particle detection sensor is fixedly connected to the outer wall of one side of the mounting plate three, a gas pressure detection sensor is fixedly connected to the outer wall of one side of the mounting plate three, a gas detection sensor is fixedly connected to the outer wall of one side of the mounting plate three, and a flow guide plate is fixedly connected inside the monitoring box.

[0007] Preferably, a fixing plate is fixedly connected to the outer wall of the bottom of the monitoring box, a fixing sleeve is fixedly connected to the inner wall of the two fixing plates, the two fixing sleeves are rotatably connected to the same linkage rod, and a rotating rod is fixedly connected to the outer wall of both ends of the linkage rod.

[0008] Preferably, a sealing plate is fixedly connected to the outer wall of one opposite side of the two rotating rods, and the outer wall of the two sealing plates is in movable contact with the inner wall of the inlet pipe and the exhaust pipe, respectively.

[0009] Preferably, a linkage block is fixedly connected to the middle of the outer wall of the linkage rod, an operating shell is fixedly connected inside the linkage block, and a fixing rod is slidably connected to both sides inside the operating shell. A fixing hole is opened on the outer wall of the two fixing sleeves on opposite sides, and the outer wall of the fixing rod is movably inserted into the fixing hole.

[0010] Preferably, a fixing plate 2 is fixedly connected to the inner wall of the operating shell, and two fixing plates 2 have circular holes that connect the outer walls on both sides. A reset spring 2 is fixedly connected to the outer wall on the opposite side of the two fixing plates 2, and the opposite ends of the two reset spring 2 are fixedly connected to the inner wall of the operating shell.

[0011] Preferably, a rotating rod two is rotatably connected through the outer wall of the top of the operating shell, a take-up wheel is fixedly connected to the outer wall of the bottom of the rotating rod two, a force-bearing rope is fixedly connected to the outer wall of the take-up wheel, the opposite ends of the two force-bearing ropes are fixedly connected to the opposite ends of the two fixed rods, the outer wall of the force-bearing rope is slidably connected through the inside of the circular hole, and the outer wall of the force-bearing rope is movably inserted into the inside of the return spring two.

[0012] Preferably, a connection hole is provided on one side of the outer wall of the exhaust pipe, and an exhaust gas collection pipe is fixedly connected inside the connection hole. A second mounting plate is fixedly connected to the inner wall of the exhaust gas collection pipe. A third return spring is fixedly connected to the outer wall of one end of the second mounting plate. A sealing shell is fixedly connected to the outer wall of one end of the third return spring. The outer wall of the sealing shell is slidably connected to the inner wall of the exhaust gas collection pipe.

[0013] Preferably, the outer wall of the sealing shell is provided with an air inlet, the outer wall of the connecting hole is fixedly connected with a sealing ring, one side of the outer wall of the sealing ring is in movable contact with the protruding ring on the sealing shell, and one end of the sealing shell is in movable contact with the outer wall of the sealing plate.

[0014] Preferably, a calibration gas interface one is fixedly connected through the outer wall of the top of the monitoring box, and a calibration gas interface two is fixedly connected through the outer wall of the top of the monitoring box. Mounting plates one are fixedly connected evenly to the inner walls of calibration gas interface one and calibration gas interface two, and a return spring one is fixedly connected to the outer wall of the top of the two mounting plates one. A piston block is fixedly connected to the outer wall of the top of the return spring one, and the outer wall of the piston block is tightly fitted with the inner wall of calibration gas interface one.

[0015] Compared with the prior art, the beneficial effects of the present invention are: By placing the sensor inside the monitoring box, direct contact between the sensor and the gas inside the bypass pipe is avoided. This prevents the high-speed airflow from continuously eroding the sensor's sensitive elements, thus avoiding signal drift and measurement errors. Consequently, it slows down probe aging and improves the stability and accuracy of monitoring. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention.

[0017] Figure 2 for Figure 1 Enlarged structural diagram at point A in the middle.

[0018] Figure 3 This is a schematic diagram of the internal structure of the monitoring box of the present invention.

[0019] Figure 4 This is a schematic diagram of the top structure of the monitoring box of the present invention.

[0020] Figure 5 This is a schematic diagram of the guide plate structure of the present invention.

[0021] Figure 6 for Figure 3 Enlarged structural diagram at point B.

[0022] Figure 7 for Figure 3 Enlarged structural diagram at point C.

[0023] Figure 8 This is a schematic diagram of the internal structure of the operating shell of the present invention.

[0024] Figure 9 This is a schematic diagram of the fixing hole structure of the present invention.

[0025] Figure 10 This is a schematic diagram of the sealing shell in the closed state of the present invention.

[0026] Figure 11 This is a schematic diagram of the sealing shell structure in the open state of the present invention.

[0027] In the diagram: 1. Main body of the gas source input status monitoring device; 11. Bypass pipe; 2. Monitoring box; 21. Particle detection sensor; 22. Gas pressure detection sensor; 23. Gas detection sensor; 24. Mounting plate three; 25. Guide plate; 3. Calibration gas interface one; 31. Calibration gas interface two; 32. Mounting plate one; 33. Reset spring one; 34. Piston block; 4. Inlet pipe; 5. Exhaust pipe; 6. Linkage rod; 7. Linkage block; 71. Fixing sleeve; 72. Fixing plate one; 73. Rotating rod one; 74. Sealing plate; 8. Operating shell; 81. Fixing rod; 82. Fixing hole; 83. Reset spring two; 84. Fixing plate two; 85. Force rope; 86. Retracting wheel; 87. Rotating rod two; 9. Waste gas collection pipe; 91. Sealing shell; 92. Sealing ring; 93. Reset spring three; 94. Air inlet; 95. Mounting plate two; 96. Raised ring. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the present invention clear and complete, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of the present invention, and are merely illustrative of the embodiments of the present invention. They are not intended to limit the embodiments of the present invention. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] Example 1, please refer to Figures 1 to 11 This invention provides a technical solution for a functional gas source input status monitoring device for cleanrooms: It includes a gas source input status monitoring device body 1, a bypass pipe 11 fixedly connected inside the gas source input status monitoring device body 1, a monitoring box 2 fixedly connected to the inner wall of the gas source input status monitoring device body 1, an inlet pipe 4 fixedly connected through the outer wall of the bottom of the monitoring box 2, an exhaust pipe 5 fixedly connected through the outer wall of the bottom of the monitoring box 2, the outer wall of the bottom of the inlet pipe 4 fixedly connected through the interior of the bypass pipe 11, the outer wall of the bottom of the exhaust pipe 5 fixedly connected through the interior of the bypass pipe 11, one-way valves fixedly connected inside the inlet pipe 4 and the exhaust pipe 5, an insertion hole opened on the outer wall of the top of the monitoring box 2, a mounting plate 24 movably inserted into the insertion hole, a particle detection sensor 21 fixedly connected to one side of the outer wall of the mounting plate 24, a gas pressure detection sensor 22 fixedly connected to one side of the outer wall of the mounting plate 24, a gas detection sensor 23 fixedly connected to one side of the outer wall of the mounting plate 24, and a guide plate 25 fixedly connected inside the monitoring box 2.

[0030] It should be noted that the connection between the mounting plate 324 and the insertion hole is equipped with a sealing structure.

[0031] By placing the sensor inside the monitoring box 2, direct contact between the sensor and the gas inside the bypass pipe 11 is avoided, preventing high-speed airflow from continuously scouring the sensor's sensitive element, avoiding signal drift and measurement errors, and consequently reducing probe aging and improving the stability and accuracy of monitoring.

[0032] Example 2, as Figures 1 to 11 As shown, based on Embodiment 1, a fixing plate 72 is fixedly connected to the outer wall of the bottom of the monitoring box 2, a fixing sleeve 71 is fixedly connected to the inner wall of the two fixing plates 72, the same linkage rod 6 is rotatably connected inside the two fixing sleeves 71, a rotating rod 73 is fixedly connected to the outer wall of both ends of the linkage rod 6, and a sealing plate 74 is fixedly connected to the outer wall of the opposite side of the two rotating rods 73. The outer walls of the two sealing plates 74 are in movable contact with the inner walls of the inlet pipe 4 and the exhaust pipe 5, respectively.

[0033] When the working state of the sealing plate 74 is changed, the sealing plate 74 is closed inside the inlet pipe 4 and the exhaust pipe 5, preventing the gas inside the bypass pipe 11 from entering the monitoring box 2. At the same time, the intake and return gas passages are cut off, completely and thoroughly isolating the monitoring box 2 from the main gas passage to form an independent space for subsequent work.

[0034] Example 3, as Figures 1 to 11 As shown in Embodiment 2, a linkage block 7 is fixedly connected to the middle of the outer wall of the linkage rod 6. An operating shell 8 is fixedly connected inside the linkage block 7. Fixed rods 81 are slidably connected to both sides inside the operating shell 8. Fixed holes 82 are opened on the outer walls of the two fixed sleeves 71 on opposite sides. The outer walls of the fixed rods 81 are movably inserted into the fixed holes 82. Fixed plates 84 are fixedly connected to the inner wall of the operating shell 8. Two fixed plates 84 have circular holes on their two outer walls that connect to each other. The outer walls of the two fixed plates 84 on opposite sides are fixedly connected to each other. A return spring 83 is fixedly connected. The opposite ends of the two return springs 83 are fixedly connected to the inner wall of the operating housing 8. A rotating rod 87 is rotatably connected through the top outer wall of the operating housing 8. A take-up wheel 86 is fixedly connected to the bottom outer wall of the rotating rod 87. A force-bearing rope 85 is fixedly connected to the outer wall of the take-up wheel 86. The opposite ends of the two force-bearing ropes 85 are fixedly connected to the opposite ends of the two fixed rods 81. The outer wall of the force-bearing rope 85 is slidably connected through the inside of the round hole. The outer wall of the force-bearing rope 85 is movably inserted into the inside of the return spring 83.

[0035] While the force rope 85 drives the fixing rod 81 to compress the reset spring 83, the two fixing rods 81 are moved away from the inside of the fixing hole 82, thereby releasing the fixation between the fixing hole 82 and the fixing rod 81. After releasing the fixation of the fixing rod 81, the fixing of the sealing plate 74 can be released. The fixation between the fixing hole 82 and the fixing rod 81 prevents the sealing plate 74 from rotating during operation, thereby increasing the stability of the sealing plate 74 and reducing the occurrence of errors.

[0036] Example 4, as Figures 1 to 11 As shown, based on Embodiment 2, a connection hole is provided on one side of the outer wall of the exhaust pipe 5. An exhaust gas collection pipe 9 is fixedly connected inside the connection hole. An installation plate 2 95 is fixedly connected to the inner wall of the exhaust gas collection pipe 9. A return spring 3 93 is fixedly connected to the outer wall of one end of the installation plate 2 95. A sealing shell 91 is fixedly connected to the outer wall of one end of the return spring 3 93. The outer wall of the sealing shell 91 is slidably connected to the inner wall of the exhaust gas collection pipe 9. An air inlet hole 94 is provided on the outer wall of the connection hole. A sealing ring 92 is fixedly connected to the outer wall of the connection hole. The outer wall of one side of the sealing ring 92 is in movable contact with the protruding ring 96 on the sealing shell 91. One end of the sealing shell 91 is in movable contact with the outer wall of the sealing plate 74.

[0037] After being moved into the interior of the exhaust pipe 5 through the air inlet 94, the path of the gas outflow inside the exhaust pipe 5 is changed. This ensures that during maintenance, the gas inside the monitoring box 2 will not accidentally leak into the working environment or bypass pipe 11 through the exhaust pipe 5 when it is released. Instead, it is actively guided to the dedicated exhaust gas collection pipe 9, thereby achieving safe isolation and directional collection of exhaust gas during maintenance operations.

[0038] In Example 5, based on Example 4, the outer wall of the top of the monitoring box 2 is fixedly connected with calibration gas interface 1 3 and calibration gas interface 2 31. The inner walls of calibration gas interface 1 3 and calibration gas interface 2 31 are respectively evenly fixedly connected with mounting plates 1 32. The outer walls of the top of the two mounting plates 1 32 are fixedly connected with reset springs 1 33. The outer wall of the top of the reset springs 1 33 is fixedly connected with piston blocks 34. The outer wall of the piston blocks 34 is tightly fitted with the inner wall of calibration gas interface 1 3.

[0039] After calibration, the gas enters the interior of the exhaust pipe 5, and then enters the exhaust gas collection pipe 9 through the air inlet 94 and is discharged and collected. The path of the calibration gas is the same as that during normal monitoring, which ensures the consistency between the calibration environment and the working environment. The calibration results can truly reflect the actual measurement performance of the sensor. The calibration accuracy is high and the effectiveness is good. Operators can complete the calibration on-site in a few minutes without waiting for disassembly, external inspection and reinstallation, which greatly reduces the system downtime.

[0040] The working principle and usage process of this invention are as follows: During operation, due to the fixed connection between the bypass pipe 11 and the inlet pipe 4, with the sealing plate 74 open, the gas inside the bypass pipe 11 enters the monitoring box 2 through the inlet pipe 4. Then, through the guide plate 25 fixedly connected inside the monitoring box 2, the gas is guided, allowing it to pass through the particle detection sensor 21, the pressure detection sensor 22, and the gas detection sensor 23. These sensors detect the air source entering the cleanroom. The gas is then discharged into the bypass pipe 11 through the exhaust pipe 5. Since both the inlet pipe 4 and the exhaust pipe 5 are equipped with one-way valves, backflow of gas is prevented. The sensors are located inside the monitoring box 2, avoiding direct contact between the sensors and the gas inside the bypass pipe 11. This prevents high-speed airflow from continuously eroding the sensor's sensitive elements, avoiding signal drift and measurement errors, and correspondingly reducing probe aging, thus improving the stability and accuracy of monitoring.

[0041] It should be noted that the connection between mounting plate 24 and monitoring box 2 is a standard device available on the market and will not be described in detail here. Particle detection sensor 21, air pressure detection sensor 22 and gas detection sensor 23 are all existing products on the market and will not be described in detail here.

[0042] This invention allows the operator to manually rotate the rotating rod 87. Due to the fixed connection between the rotating rod 87 and the winding wheel 86, the rotating rod 87 drives the winding wheel 86 to rotate simultaneously. Furthermore, due to the fixed connection between the winding wheel 86 and the two force-bearing ropes 85, the rotating wheel 86 winds up the force-bearing ropes 85. As the length of the force-bearing ropes 85 shortens, they cause the fixing rods 81 to press against the reset spring 83, simultaneously causing the two fixing rods 81 to move away from the fixing holes 82. This releases the fixation between the fixing holes 82 and the fixing rods 81. After releasing the fixing rods 81, the sealing plate 74 can be released from its fixation. The fixation between the fixing holes 82 and the fixing rods 81 prevents the sealing plate 74 from rotating during operation, thereby increasing the stability of the sealing plate 74 and reducing errors.

[0043] It should be noted that the return spring 83 pushes 81 back to its original position under its own force.

[0044] This invention allows the observer to determine the position of the fixing rod 81 and the fixing hole 82 by observing the insertion position of the fixing rod 81. This reveals the state of the sealing plate 74 inside the inlet pipe 4 and the exhaust pipe 5. When the fixing rod 81 is connected to the fixing hole 82 above the linkage rod 6, the sealing plate 74 is in the open state, allowing gas inside the bypass pipe 11 to enter the monitoring box 2 through the inlet pipe 4. When the fixing rod 81 is inserted and connected to the fixing hole 82 on one side of the linkage rod 6, the sealing plate 74 is in the closed state, preventing gas from entering the monitoring box 2. This simplifies the safety confirmation procedure before maintenance. Maintenance personnel can confidently perform maintenance work once they see the fixing rod locked in the closed position, without the need for additional valve operations or complex system confirmations.

[0045] After the connection between the fixing rod 81 and the fixing hole 82 is released, the linkage block 7 is rotated by operating it. Due to the fixed connection between the linkage block 7 and the linkage rod 6, the linkage rod 6 drives the two rotating rods 73 to rotate simultaneously as the linkage block 7 rotates. Furthermore, due to the fixed connection between the rotating rods 73 and the sealing plate 74, the sealing plate 74 rotates simultaneously as the rotating rods 73 rotate, thereby changing the working state of the sealing plate 74. This keeps the sealing plate 74 closed inside the inlet pipe 4 and the exhaust pipe 5, preventing gas inside the bypass pipe 11 from entering the monitoring box 2. At the same time, it cuts off the intake and return gas passages, completely and thoroughly isolating the monitoring box 2 from the main gas path, forming an independent space for subsequent work.

[0046] When the sealing plate 74 of the present invention is in a closed state inside the exhaust pipe 5, one side of the sealing plate 74 is no longer in contact with one end of the sealing shell 91. At this time, due to the force of the return spring 93 itself, the sealing shell 91 can be pushed to move inside the exhaust gas collection pipe 9. The length of the return spring 93 is only enough for the air inlet 94 to move out of the exhaust gas collection pipe 9, and will not make the sealing shell 91 completely leave the interior of the exhaust gas collection pipe 9. After moving to the interior of the exhaust pipe 5 through the air inlet 94, the route of gas flow out of the exhaust pipe 5 is changed, ensuring that during maintenance, the gas inside the monitoring box 2 will not be accidentally leaked into the working environment or bypass pipe 11 through the exhaust pipe 5 when it is released, but will be actively guided to the dedicated exhaust gas collection pipe 9.

[0047] When the sealing plate 74 inside the exhaust pipe 5 is in the open state, one side of the sealing plate 74 will push the sealing shell 91 into the interior of the exhaust gas collection pipe 9, so that the air inlet 94 is completely sealed inside the exhaust gas collection pipe 9, preventing airflow from entering the air inlet 94. Furthermore, due to the sealing ring 92 provided on the outer wall of the connecting hole, after the sealing shell 91 enters the interior of the exhaust gas collection pipe 9, the protrusion on the outer wall of the sealing shell 91 squeezes the sealing ring 92. The sealing ring 92 is deformed by the squeezing force, filling the gap at the connection between the exhaust gas collection pipe 9 and the sealing shell 91, thereby increasing the sealing performance between the exhaust gas collection pipe 9 and the sealing shell 91.

[0048] It should be noted that a roller is rotatably connected to the sealing plate 74. When the sealing plate 74 is rotated to the open position, the roller first contacts the end face of the sealing shell 91.

[0049] This invention allows the operator to simultaneously change the working states of the inlet pipe 4, the exhaust pipe 5, and the waste gas collection pipe 9 simply by rotating the linkage block 7. It integrates the switching actions of multiple valves, which previously required separate, step-by-step operation, into a single rotary operation. The operator only needs to complete one action—rotating the linkage block 7—and the system can automatically and accurately switch the states of all pipelines. This prevents the common risks of missing a step or making a mistake in the sequence during multi-step manual operation. The invention rigidly guarantees the integrity and correct sequence of the operation through mechanical linkage, fundamentally eliminating safety hazards caused by human negligence.

[0050] This invention, with the inlet pipe 4 and exhaust pipe 5 in a closed state, connects zero-point gas and span standard gas to calibration gas interface 1 3 and calibration gas interface 2 31 respectively. When the connector is inserted into calibration gas interface 1 3 and calibration gas interface 2 31 respectively, the connector can push the piston block 34 towards calibration gas interface 2 31, allowing the gas to enter the monitoring box 2 through calibration gas interface 1 3 and calibration gas interface 2 31 to calibrate the internal particle detection sensor 21, air pressure detection sensor 22 and gas detection sensor 23. The calibrated gas enters the exhaust pipe 5 and then enters the exhaust gas collection pipe 9 through the air inlet 94 for collection. This ensures the consistency between the calibration environment and the working environment, and the calibration results most accurately reflect the actual measurement performance of the sensors. The calibration accuracy is high and the effectiveness is good. Operators can complete the calibration on-site within a few minutes without waiting for disassembly, external inspection and reinstallation, which greatly reduces system downtime.

[0051] It should be noted that: zero point gas is a reference gas used to calibrate the starting point of instrument measurement. Its target component concentration is usually zero or extremely low to ensure that the instrument reading is accurately zeroed when there is no target substance. Range standard gas is a reference gas used to calibrate the measurement range of an instrument. Its target components have known and precise concentrations close to the upper limit of the instrument's range to verify and adjust the instrument's measurement accuracy at the high concentration end.

[0052] It should be noted that by setting the piston block 34 and the return spring 33, the calibration gas interface 3 and the calibration gas interface 2 31 can be blocked when they are not in operation, preventing gas from flowing out from the calibration gas interface 3 and the calibration gas interface 2 31.

[0053] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A functional gas source input status monitoring device for cleanrooms, comprising a gas source input status monitoring device body (1), wherein a bypass pipe (11) is fixedly connected inside the gas source input status monitoring device body (1), characterized in that: The inner wall of the main body (1) of the gas source input status monitoring device is fixedly connected to a monitoring box (2). The outer wall of the bottom of the monitoring box (2) is fixedly connected to an inlet pipe (4). The outer wall of the bottom of the monitoring box (2) is fixedly connected to an exhaust pipe (5). The outer wall of the bottom of the inlet pipe (4) is fixedly connected to the inside of the bypass pipe (11). The outer wall of the bottom of the exhaust pipe (5) is fixedly connected to the inside of the bypass pipe (11). One-way valves are fixedly connected to the inside of the inlet pipe (4) and the exhaust pipe (5) respectively.

2. The functional gas source input status monitoring device for cleanrooms according to claim 1, characterized in that: An insertion hole is provided on the outer wall of the top of the monitoring box (2). An installation plate three (24) is movably inserted into the insertion hole. A particle detection sensor (21) is fixedly connected to the outer wall of one side of the installation plate three (24). A gas pressure detection sensor (22) is fixedly connected to the outer wall of one side of the installation plate three (24). A gas detection sensor (23) is fixedly connected to the outer wall of one side of the installation plate three (24). A flow guide plate (25) is fixedly connected inside the monitoring box (2).

3. The functional gas source input status monitoring device for cleanrooms according to claim 1, characterized in that: The monitoring box (2) has a fixed plate (72) fixedly connected to the outer wall at the bottom. The two fixed plates (72) have a fixed sleeve (71) fixedly connected to the inner wall. The two fixed sleeves (71) are rotatably connected to the same linkage rod (6). The two ends of the linkage rod (6) have a rotating rod (73) fixedly connected to the outer wall.

4. The functional gas source input status monitoring device for cleanrooms according to claim 3, characterized in that: A sealing plate (74) is fixedly connected to the outer wall of the opposite side of the two rotating rods (73), and the outer wall of the two sealing plates (74) is in contact with the inner wall of the inlet pipe (4) and the exhaust pipe (5), respectively.

5. A functional gas source input status monitoring device for cleanrooms according to claim 3, characterized in that: A linkage block (7) is fixedly connected to the middle of the outer wall of the linkage rod (6). An operating shell (8) is fixedly connected inside the linkage block (7). Fixed rods (81) are slidably connected to both sides inside the operating shell (8). Fixed holes (82) are opened on the outer walls of the two fixed sleeves (71) on opposite sides. The outer wall of the fixed rod (81) is movably inserted into the fixed hole (82).

6. A functional gas source input status monitoring device for cleanrooms according to claim 5, characterized in that: The inner wall of the operating shell (8) is fixedly connected to a fixing plate two (84). The two fixing plates two (84) have round holes that connect the outer walls on both sides. The outer walls on opposite sides of the two fixing plates two (84) are fixedly connected to a reset spring two (83). The opposite ends of the two reset spring two (83) are fixedly connected to the inner wall of the operating shell (8).

7. A functional gas source input status monitoring device for cleanrooms according to claim 6, characterized in that: The top outer wall of the operating shell (8) is rotatably connected to a rotating rod two (87). The bottom outer wall of the rotating rod two (87) is fixedly connected to a take-up wheel (86). The outer wall of the take-up wheel (86) is fixedly connected to a force-bearing rope (85). The opposite ends of the two force-bearing ropes (85) are fixedly connected to the opposite ends of the two fixed rods (81). The outer wall of the force-bearing rope (85) is slidably connected to the inside of the circular hole. The outer wall of the force-bearing rope (85) is movably inserted into the inside of the reset spring two (83).

8. A functional gas source input status monitoring device for cleanrooms according to claim 4, characterized in that: A connection hole is provided on one side of the outer wall of the exhaust pipe (5). An exhaust gas collection pipe (9) is fixedly connected inside the connection hole. An installation plate two (95) is fixedly connected to the inner wall of the exhaust gas collection pipe (9). A reset spring three (93) is fixedly connected to the outer wall of one end of the installation plate two (95). A sealing shell (91) is fixedly connected to the outer wall of one end of the reset spring three (93). The outer wall of the sealing shell (91) is slidably connected to the inner wall of the exhaust gas collection pipe (9).

9. A functional gas source input status monitoring device for cleanrooms according to claim 8, characterized in that: The outer wall of the sealing shell (91) is provided with an air inlet (94), and a sealing ring (92) is fixedly connected to the outer wall of the connecting hole. The outer wall of one side of the sealing ring (92) is in contact with the protruding ring (96) on the sealing shell (91), and one end of the sealing shell (91) is in contact with the outer wall of the sealing plate (74).

10. A functional gas source input status monitoring device for cleanrooms according to claim 1, characterized in that: The outer wall of the top of the monitoring box (2) is fixedly connected to a calibration gas interface 1 (3), and the outer wall of the top of the monitoring box (2) is fixedly connected to a calibration gas interface 2 (31). The inner walls of the calibration gas interface 1 (3) and the calibration gas interface 2 (31) are respectively evenly fixedly connected to mounting plates 1 (32). The outer walls of the top of the two mounting plates 1 (32) are fixedly connected to a reset spring 1 (33). The outer wall of the top of the reset spring 1 (33) is fixedly connected to a piston block (34). The outer wall of the piston block (34) is tightly fitted to the inner wall of the calibration gas interface 1 (3).

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