Frequency modulation method of quartz crystal tuning fork oscillator and resonator

By implementing a composite frequency modulation process of primary vacuum coating and secondary printing coating on quartz crystal tuning fork oscillators, the problems of frequency accuracy control and material waste have been solved, achieving efficient and low-cost frequency regulation and improving production yield and frequency accuracy.

CN122178858APending Publication Date: 2026-06-09SHENZHEN XINYIJING TECH CO LTD
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Patent Information

Application Number
CN202610106387.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-01-27
Publication Date
2026-06-09

AI Technical Summary

Technical Problem

In the process of miniaturizing the 32.768kHz tuning fork quartz crystal resonator to the 3215, frequency precision control is difficult, material utilization is low, and the frequency modulation method is singular and irreversible, resulting in material waste and high maintenance costs.

Method used

The composite frequency modulation process of "one-time vacuum coating + two-time printing coating" is adopted. After depositing a base metal layer on the surface of the quartz crystal tuning fork oscillator, conductive paste is printed multiple times to form a printed frequency modulation layer. Laser ablation is used for fine tuning to achieve nanometer-level precise frequency locking.

Benefits of technology

Significantly reduces precious metal consumption, improves production yield and trimming accuracy, lowers costs, improves high-frequency characteristics, increases material utilization to 95%, and laser trimming does not damage the substrate.

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Abstract

The embodiment of the invention discloses a frequency modulation method of a quartz crystal tuning fork oscillator and a resonator, and the method comprises the following steps: a film coating step: cleaning a quartz crystal blank, and depositing a basic metal layer after the cleaning is completed; a coarse tuning step: printing conductive slurry in a tuning fork arm frequency modulation area for multiple times and curing to form a printing frequency modulation layer, and adjusting the frequency of the tuning fork oscillator to be within a preset frequency range; and a fine tuning step: carrying out excitation test to obtain the current frequency F1, carrying out fixed-point ablation on the printing frequency modulation layer by using laser, and stopping when the frequency reaches a target value F2 to complete the frequency modulation of the quartz crystal tuning fork oscillator. According to the invention, a layered coating structure is adopted, a full-vacuum process is abandoned, and a laminated structure of primary vacuum coating (basic conductive / reflecting layer) and secondary printing coating (frequency modulation weight increasing layer) is adopted, so that the problem of material waste is solved, and nanoscale precise locking of frequency is realized.
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