Diaphragm frame for electrodeposition tool

Abstract

An electrodeposition tool includes an anode chamber and a cathode chamber. A high resistance virtual anode (HRVA) is disposed within the cathode chamber. An ion exchange membrane is disposed between the anode chamber and the cathode chamber. The ion exchange membrane is supported by a membrane frame. The electrodeposition tool further includes a suction flow path configured to evacuate a space between the HRVA and the ion exchange membrane. The suction flow path is defined by a recess in the ion exchange membrane and the membrane frame.

Description

Background Technology

[0001] Electrodeposition is used in integrated circuit manufacturing processes to deposit conductive films onto a substrate. Electrodeposition involves the electrochemical reduction of dissolved ions of a selected metal to their elemental state on the substrate to form a film of the selected metal. An electrodeposition system includes a cathode chamber through which a cathode electrolyte circulates and an anode chamber through which an anolyte circulates. An ion-exchange membrane is disposed between the cathode and anode chambers. The ion-exchange membrane selectively allows some ions to transfer from the anolyte to the cathode electrolyte while preventing the passage of other ions and organic additives. Summary of the Invention

[0002] This invention is provided to introduce the chosen concepts in a simplified form, which will be further described in the following detailed implementations. This invention is not intended to identify key or essential features of the claimed subject matter, nor is it intended to limit the scope of the claimed subject matter. Furthermore, the claimed subject matter is not limited to implementations that address any or all of the shortcomings mentioned in any part of this disclosure.

[0003] An example of efficiently draining a cathode electrolyte solution from the volume between a high-resistivity virtual anode (HRVA) and an ion-exchange membrane in an electrodeposition system is disclosed. In an exemplary system, the electrodeposition tool includes an anode chamber and a cathode chamber. The HRVA is disposed within the cathode chamber. An ion-exchange membrane is disposed between the anode and cathode chambers. The ion-exchange membrane is supported by a membrane frame. The electrodeposition tool further includes a suction flow path configured to drain the volume between the HRVA and the ion-exchange membrane. The suction flow path is defined by grooves in the ion-exchange membrane and the membrane frame.

[0004] In some such examples, the grooves are formed at least partially around the periphery of the diaphragm frame.

[0005] Additionally or alternatively, in some such examples, the diaphragm frame includes a suction port in fluid communication with the groove, wherein the suction port is in fluid communication with the pump.

[0006] Additionally or alternatively, in some such examples, the diaphragm frame includes baffles extending toward the HRVA.

[0007] Additionally or alternatively, in some such examples, grooves are formed in the baffle.

[0008] Additionally or alternatively, in some such examples, the baffle includes multiple openings.

[0009] Additionally or alternatively, in some such examples, two or more of the multiple openings are located on opposite sides of the baffle.

[0010] Additionally or alternatively, in some such examples, two or more openings are offset along the length of the baffle.

[0011] Additionally or alternatively, in some such examples, the baffle is one of a plurality of baffles that divide the space between the HRVA and the ion exchange membrane into a plurality of spaces of different sizes, wherein the largest space is located between a pair of baffles closer to the suction port, and wherein the smallest space is located between the periphery of the membrane frame and the baffles farther from the suction port.

[0012] Additionally or alternatively, in some such examples, the suction flow path includes a tube extending from the diaphragm frame into the space between the HRVA and the ion exchange diaphragm.

[0013] Another example provides a diaphragm frame for an electrodeposition tool. The diaphragm frame includes a plurality of baffles. Each of the plurality of baffles extends between relative positions along the periphery of the diaphragm frame. The diaphragm frame includes a groove formed in the periphery of the diaphragm frame or in at least one or more of the plurality of baffles. The groove is configured to define a suction flow path to empty the space between the HRVA and the ion exchange membrane when the ion exchange membrane is disposed on the diaphragm frame and when the diaphragm frame is disposed in the electrodeposition tool.

[0014] In some such examples, each baffle includes multiple openings.

[0015] Additionally or alternatively, in some such examples, two or more of the multiple openings are located on opposite sides of the baffle.

[0016] Additionally or alternatively, in some such examples, two or more openings are offset along the length of the baffle.

[0017] Additionally or alternatively, in some such examples, the multiple baffles divide the space between the HRVA and the ion exchange membrane into multiple spaces of different sizes, wherein the largest space is located between a pair of baffles closer to the suction port, and wherein the smallest space is located between the baffles around the membrane frame and the baffles farther from the suction port.

[0018] Another example provides a method for draining a volume of cathodic electrolyte from the space between a high-resistivity virtual anode (HRVA) and an ion-exchange membrane in an electrodeposition apparatus. The method includes generating a pressure differential to move the volume of cathodic electrolyte through a suction port in fluid communication with a suction path defined by a groove in the ion-exchange membrane and the membrane frame.

[0019] In some such examples, creating a pressure difference to move that volume of cathode electrolyte involves evacuating the vacuum through a suction port.

[0020] Additionally or alternatively, in some such examples, moving the volume of cathode electrolyte includes moving the volume of cathode electrolyte through a portion of the groove formed in the baffle.

[0021] Additionally or alternatively, in some such examples, moving the volume of cathode electrolyte includes moving at least a portion of the volume of cathode electrolyte through multiple openings in the baffle.

[0022] Additionally or alternatively, in some such examples, moving the cathode electrolyte of that volume involves emptying multiple spaces of different sizes formed by multiple baffles. Attached Figure Description

[0023] Figure 1 shows an exemplary electrodeposition tool.

[0024] Figure 2 shows a schematic top view of an exemplary ion exchange membrane frame for an electrodeposition tool.

[0025] Figure 3 shows a schematic bottom view of the ion exchange membrane framework of Figure 2.

[0026] Figure 4 shows a cross-sectional view of the ion exchange membrane framework of Figure 2-3.

[0027] Figure 5 shows a schematic top view of another exemplary ion exchange membrane frame for electrodeposition tools.

[0028] Figure 6 shows a schematic bottom view of the ion exchange membrane framework of Figure 5.

[0029] Figure 7 shows a cross-sectional view of another exemplary ion exchange membrane frame for electrodeposition tools.

[0030] Figure 8 shows an exemplary method flowchart for draining a certain volume of cathode electrolyte from the space between the high-resistivity virtual anode (HRVA) and the ion exchange membrane in the electrodeposition tool.

[0031] Figure 9 shows a schematic bottom view of another exemplary ion exchange membrane frame for an electrodeposition tool.

[0032] Figure 10 shows a schematic bottom view of another exemplary ion exchange membrane frame for an electrodeposition tool. Detailed Implementation

[0033] The term HRVA generally refers to a high-resistance virtual anode.

[0034] The term "anode" generally refers to a conductive structure that undergoes electrochemical oxidation during the electrodeposition process.

[0035] The term "anode chamber" generally refers to a physical structure configured to contain at least an anode and an anode electrolyte and to provide selective separation from the cathode chamber.

[0036] The term "anodic electrolyte" generally refers to the solution used in the anode chamber during the electrodeposition process.

[0037] The term "suction path" generally refers to one or more channels that allow fluid to flow out of a space.

[0038] The term "suction port" generally refers to a structure that serves as an outlet for fluid to be discharged from a space.

[0039] The term "baffle" generally refers to a structure that prevents a liquid or solution from flowing in a given direction.

[0040] The term "cathode" generally refers to a conductive layer on a substrate that is grown during electrodeposition through the electrochemical reduction of ions.

[0041] The term "cathode chamber" generally refers to a physical structure configured to contain at least a cathode and a cathode electrolyte.

[0042] The term "cathode electrolyte" generally refers to the solution used in the cathode chamber during the electrodeposition process.

[0043] The terms “deposition,” “electrodeposition,” and their variations generally refer to the process of reducing dissolved ions of one or more metals on a substrate surface to form a film of that one or more metals.

[0044] The term "electrodeposition system" generally refers to a machine configured to perform electrodeposition.

[0045] The term "frame unit" generally refers to a void in the membrane frame that exposes the ion exchange membrane underneath.

[0046] The term "fluid connectivity" generally refers to the fluid flow path between components.

[0047] The term "groove" generally refers to a recess in the diaphragm frame that accommodates fluid flow.

[0048] The term "high-resistivity virtual anode" (HRVA) generally refers to an ion-resistive structure disposed between the substrate holder and the anode in an electrodeposition tool, through which ions flow from the anode to the cathode during electrodeposition. The HRVA approximates a suitable, constant, and uniform current source adjacent to the cathode.

[0049] The term "ion exchange membrane" generally refers to a semi-permeable membrane that allows the passage of certain dissolved ions but not other dissolved ions, nor neutrally charged molecules.

[0050] The term "diaphragm frame" generally refers to the device that supports the ion exchange diaphragm.

[0051] The term "periphery" generally refers to the outer boundary of a structure.

[0052] The term "pump" generally refers to a device configured to move fluid.

[0053] The term "substrate" generally refers to any object on which a film can be deposited.

[0054] The term "substrate holder" generally refers to any structure used to support the substrate during the electrodeposition process.

[0055] The term "pipe fitting" generally refers to an elongated structure with a hollow interior configured to transport fluid.

[0056] As described above, the electrodeposition system includes a cathode chamber through which a cathode electrolyte solution circulates and an anode chamber through which an anolyte solution circulates. Ions in the cathode electrolyte solution are reduced to form a metal film on a substrate disposed in the cathode chamber. A corresponding oxidation reaction in the anolyte occurs in the anode chamber. An ion-exchange membrane is disposed between the cathode and anode chambers. The ion-exchange membrane selectively allows some ions to transfer from the anolyte to the cathode electrolyte while preventing the passage of other ions and organic additives.

[0057] The electrodeposition system may further include a high-resistivity virtual anode (HRVA). The HRVA is an ion-resistive structure disposed between the substrate holder and the ion-exchange membrane of the electrodeposition tool. The HRVA can approximate a constant and uniform current source adjacent to the cathode of the electrodeposition tool.

[0058] Before performing maintenance on the electrodeposition tool, the cathodic and anodic electrolyte solutions are typically drained from the tool. Pumps are used to circulate the cathodic and anodic electrolytes along their respective flow loops, and can also be used to assist in draining these solutions. However, the cathodic electrolyte solution in the space between the HRVA and the ion exchange membrane can be difficult to remove. Removing this solution may require partial disassembly of the electrodeposition tool. Furthermore, the solution must be removed manually, for example, using a vacuum or siphon device. This can be time-consuming. Additionally, rinsing the electrolyte out of this space consumes a significant amount of water.

[0059] Accordingly, an example of efficiently draining cathodic electrolyte from the space between the HRVA and the ion exchange membrane is disclosed. In an example system, a suction flow path is configured to empty the space between the HRVA and the ion exchange membrane. The suction flow path is defined by grooves in the ion exchange membrane and the membrane frame. Using the defined flow path allows the cathodic electrolyte solution to be drained directly from the space between the HRVA and the ion exchange membrane. In this way, the cathodic electrolyte solution can be at least partially removed from this space without any disassembly of the electrodeposition tool.

[0060] Figure 1 schematically illustrates a block diagram of an exemplary electrodeposition tool 100. The electrodeposition tool 100 includes an electrodeposition tank 102, which includes an anode chamber 104 and a cathode chamber 106. The electrodeposition tool 100 further includes an ion exchange membrane 108 separating the anode chamber 104 from the cathode chamber 106, and an HRVA 109 within the cathode chamber 106. The anode chamber 104 contains an anode 110. The anode chamber 104 further contains an anolyte. The cathode chamber 106 contains a catholyte. The catholyte comprises ionic material deposited as metal on a cathode layer of substrate 111 by electrochemical reduction. In some examples, the anode 110 comprises a consumable anode formed of the deposited metal. In other examples, the anode 110 comprises an inert anode. When the anode 110 contains the deposited metal, the electrochemical oxidation of the anode 110 at least partially replenishes the ionic material consumed by the electrodeposition process. Sometimes, a large amount of anolyte and / or catholyte solution can be added to replenish ionic substances.

[0061] The substrate holder 112 is coupled to a substrate holder movement system 113 including a lifting member 114, which is configured to adjust the spacing between the substrate holder 112 and the HRVA 109. For example, the lifting member 114 may lower the substrate holder 112 to position the substrate 111 within the cathode electrolyte for electrodeposition. The lifting member 114 may further raise the substrate holder 112 from the cathode electrolyte after electrodeposition. The substrate holder movement system 113 may further include components for controlling the opening and closing of the substrate holder 112.

[0062] The cathode electrolyte can be circulated between the cathode chamber 106 and the cathode electrolyte container 120 by gravity in combination with one or more pumps 122. Similarly, the anolyte can be circulated between the anolyte container 124 and the anode chamber 104 by gravity in combination with one or more pumps 126.

[0063] The ion exchange membrane 108 prevents organic matter and some ionic substances from passing between the cathode chamber 106 and the anode chamber 104, and allows selected ions to pass from the anode chamber 104 to the cathode chamber 106. As an example, the ion exchange membrane 108 may allow metal ions to pass from the anode chamber 104 to the cathode chamber 106 for deposition.

[0064] The ion exchange membrane 108 is supported by a membrane frame 128. Figures 2-3 show an exemplary membrane frame 200 that can serve as the membrane frame 128 of Figure 1. Figure 4 shows a cross-sectional view of the membrane frame 200 along line 4-4 of Figure 2.

[0065] The membrane frame 200 includes a grid structure 202 comprising a plurality of openings 204 exposing the underlying ion exchange membrane. The openings 204 may also be referred to as “frame cells” within the membrane frame to distinguish them from other openings formed in baffles to form part of the suction flow path. The membrane frame 200 also includes a plurality of baffles 206. Each baffle 206 extends laterally between relative positions along the periphery of the membrane frame 200. The baffles 206 extend vertically from the grid structure 202 toward the HRVA. The baffles 206 are arranged transversely to the direction of cathodic electrolyte flow through the HRVA (as indicated by arrow 208). The baffles 206 are configured to contact the HRVA. This helps to prevent cathodic electrolyte from flowing through the space between the HRVA and the ion exchange membrane. This impedance helps to maintain control over the cathodic electrolyte flow across the substrate during the electrodeposition process. The grid structure of the membrane frame 200 helps to regulate the positioning of the baffles in a manner that avoids disrupting the ionic conductivity of the entire ion exchange membrane.

[0066] The diaphragm frame 200 can be configured as a replacement component in an existing electrodeposition system. In such examples, the diaphragm frame 200 may have substantially the same normal projection (onto the substrate) as the diaphragm frame being replaced. In this way, the diaphragm frame 200 can be replaced by another diaphragm frame without changing the chemical processes or methods used to process the substrate.

[0067] As shown in Figures 3-4, the membrane frame 200 includes at least one recess 210A, 210B. As described in more detail below, each of the recesses 210A, 210B defines a suction flow path configured to empty the space between the HRVA and the ion exchange membrane when the ion exchange membrane is disposed on the membrane frame 200. In other examples, the recesses may have any other suitable configuration. For example, and as described in more detail below with reference to Figures 4-5, the recesses may additionally or alternatively extend around at least a portion of the periphery of the membrane frame and / or along one or more baffles.

[0068] When the ion exchange membrane is disposed on the membrane frame 200, the groove forms a manifold between the membrane frame 200 and the ion exchange membrane. This allows for the extraction of space between the ion exchange membrane and the HRVA, and allows access to the individual cavities isolated by baffles.

[0069] In some examples, the diaphragm frame 200 includes at least one suction port. In the depicted example, two suction ports 212A and 212B are shown. Suction ports 212A and 212B are in fluid communication with recesses 210A and 210B, respectively. One or more of suction ports 212A and 212B are in fluid communication with a pump of the electrodeposition tool. For example, the diaphragm frame 128 of FIG1 is in fluid communication with a pump 130. Pump 130 creates a pressure differential between the diaphragm frame 128 and the evacuation system 132. In other examples, pump 130 or other mechanisms (e.g., a compressed gas source) may be used to provide a positive pressure differential. For example, pump 130 may pump water (e.g., deionized water) into electrodeposition tank 102. In this way, pump 130 is configured to remove cathode electrolyte from the space between ion exchange membrane 108 and HRVA 109.

[0070] As shown in Figure 4, one or more of the baffles 206 may include at least one opening 214. Each opening 214 is configured to allow cathode electrolyte to flow through the baffle. In this way, the opening 214 and the grooves 210A, 210B together achieve the extraction and drainage of the space above the ion exchange membrane.

[0071] In some examples, the opening 214 may be relatively small compared to the baffle 206. Therefore, the cathode electrolyte flow through the opening 214 may have a significantly higher impedance than the cathode electrolyte solution flow 208 across the substrate. In this way, the opening 214 can help maintain an appropriately high impedance to the cathode electrolyte solution flow to avoid disturbing the cathode electrolyte solution flow 208 across the substrate.

[0072] Figures 5-6 show another example of a diaphragm frame 500. The diaphragm frame 500 can be the diaphragm frame 128 of Figure 1. Similar to the diaphragm frame 200 of Figures 2-4, the diaphragm frame 500 includes a grid structure 502 containing a plurality of frame elements 504. The diaphragm frame 500 also includes a plurality of baffles 506 and grooves 510. The grooves 510 are formed around at least a portion of the periphery of the grid structure 502.

[0073] The membrane frame 500 further includes a plurality of additional grooves 512A-512D. Each additional groove 512A-512D is formed in one of the baffles 506. Furthermore, each additional groove 512A-512D is in fluid communication with a groove 510 at the periphery of the mesh structure 502. As described in more detail below, the additional grooves 512A-512D further facilitate the extraction of space between the HRVA and the ion exchange membrane.

[0074] As shown in Figure 6, one or more of the baffles 506 include a pair of openings 514A, 514B. Similar to the opening 214 in the baffle 206 of Figure 2-4, openings 514A, 514B allow cathode electrolyte to flow into the groove 512A.

[0075] In some examples, openings 514A and 514B are located on opposite sides of the baffle. Alternatively or additionally, openings 514A and 514B may be offset along the length of baffle 506. In this way, as shown in FIG. 6, openings 514A and 514B are staggered. The staggered openings 514A and 514B impede significant flow of the cathodic electrolyte below the HRVA or between the membrane and the HRVA. In this way, openings 514A and 514B can be pumped out and maintain a suitably high impedance to the cathodic electrolyte solution flow to avoid disturbing the cathodic electrolyte solution flow across the substrate.

[0076] In the example of Figures 5-6, multiple baffles 506 divide the space between the HRVA and the ion exchange membrane into spaces of different sizes. The eight spaces formed by the baffles 506 are indicated in Figure 5 by brackets 516A-516H. Spaces 516A and 516B are at least partially defined by the periphery of the membrane frame 500 and groove 512A. Spaces 516C and 516D are at least partially defined by the periphery of the membrane frame 500 and groove 512B. Spaces 516E and 516F are at least partially defined by the periphery of the membrane frame 500 and groove 512C. Spaces 516G and 516H are at least partially defined by the periphery of the membrane frame 500 and groove 512D. Spaces 516D and 516E are larger than spaces 516C and 516F. Spaces 516C and 516F are larger than spaces 516B and 516G. Spaces 516B and 516G are larger than spaces 516A and 516H. Spaces 516D and 516E are closer to the suction port than spaces 516C and 516F. Spaces 516C and 516F are closer to the suction port than spaces 516B and 516G. Spaces 516B and 516G are closer to the suction port than spaces 516A and 516H. Therefore, larger spaces can be pumped out at a relatively faster rate than smaller spaces due to the smaller flow restriction within the pumping groove. In this way, each of the multiple spaces 516A-516H can be emptied in substantially the same amount of time.

[0077] Figure 7 shows another example of a diaphragm frame 700. The diaphragm frame 700 can be used as the diaphragm frame 128 of Figure 1. As shown in Figure 7, the diaphragm frame 700 includes at least one tube 702A, 702B extending from the periphery of the diaphragm frame 700. The tubes 702A, 702B can supplement or replace the recesses 210A, 210B of Figure 3, the recess 510 of Figure 6, and / or the recesses 512A-512D of Figure 6.

[0078] Each fitting 702A, 702B is in fluid communication with suction ports 704A, 704B, respectively. Suction ports 704A, 704B can be similar to suction ports 212A, 212B as described above with reference to Figure 4. In this way, fittings 702A, 702B can pump out the space between the HRVA and the ion exchange membrane.

[0079] In some examples, each fitting 702A, 702B is supported by one or more supports 706A, 706B. In the example of Figure 7, supports 706A, 706B extend from the membrane-facing surface 708 of the diaphragm frame 700. Supports 706A, 706B are configured to stabilize fittings 702A, 702B. In some examples, supports 706A, 706B include snap-on supports. In other examples, any other suitable type of support may be used.

[0080] Figure 8 shows a flow chart depicting an exemplary method 800 for discharging a volume of cathodic electrolyte from the space between the HRVA and the ion exchange membrane in an electrodeposition tool. The following description of method 800 is provided with reference to Figures 1-7 above. Method 800 also applies to Figures 9 and 10, which will be described below. It should be understood that method 800 can also be performed in other contexts.

[0081] At 802, method 800 includes generating a pressure differential to move the volume of cathodic electrolyte through a suction port in fluid communication with a suction flow path defined by a groove in the ion exchange membrane and the membrane frame. In some examples, at 804, generating a pressure differential to move the volume of cathodic electrolyte includes evacuating through the suction port. For example, pump 130 of FIG1 can be used to evacuate in electrodeposition tank 102. In this way, pump 130 can pump out the space between HRVA 109 and ion exchange membrane 108. In some examples, water (e.g., deionized water) is supplied to the electrodeposition tank while the cathodic electrolyte is being evacuated.

[0082] In some examples, moving the volume of cathode electrolyte in Figure 506 involves passing it through a portion of a groove formed in a baffle. For example, the diaphragm frame 500 of Figures 5-6 includes additional grooves 512A-512D formed in the baffle 506. Each additional groove 512A-512D is in fluid communication with a groove 510 located at the periphery of the diaphragm frame 500. In this way, the cathode electrolyte can flow through the additional grooves 512A-512D, through the groove 510, and out of the diaphragm frame 500.

[0083] In some examples, at 808, moving the volume of cathodic electrolyte includes moving at least a portion of the volume of cathodic electrolyte through multiple openings in the baffle. For example, the cathodic electrolyte may flow through opening 214 in the diaphragm frame 200 of Figures 2-4. In the examples of Figures 5-6, the cathodic electrolyte may flow through openings 514A, 514B in the diaphragm frame 500. These openings further facilitate the drainage of the cathodic electrolyte from the space between the HRVA and the ion exchange membrane.

[0084] In some examples, moving the volume of cathode electrolyte involves emptying multiple spaces of different sizes formed by multiple baffles. For example, baffle 506 in Figure 5 divides the diaphragm frame 500 into multiple spaces 516A-516H of different sizes. The larger spaces are closer to the suction port 518 than the smaller spaces. In this way, each of the multiple spaces 516A-516H can be emptied in substantially the same amount of time.

[0085] In 812, in some examples, the method optionally further includes supplying deionized water to the suction port to backfill the space between the ion exchange membrane and the HRVA. Depending on the structure of the membrane frame, in some cases it may be difficult to completely remove the cathodic electrolyte solution by the suction process described above. For example, a portion of the cathodic electrolyte solution may remain in the space between the ion exchange membrane and the HRVA, such as in an opening or recess within the membrane frame. Therefore, backfilling the suction port with deionized water (or another suitable liquid) can advantageously be used to flush away any remaining cathodic electrolyte solution from the electrodeposition tool. The deionized water can be supplied to the suction port in any suitable manner. For example, pump 130 can be used to pump deionized water through a suction path into the electrodeposition tool—for example, after changing the state of the valve.

[0086] Figure 9 illustrates another example of a membrane frame 900. The membrane frame 900 can be the membrane frame 128 of Figure 1. Similar to the membrane frame 200 of Figures 2-4, the membrane frame 900 includes a mesh structure 902 containing a plurality of frame units 904 exposing the underlying ion exchange membrane. The membrane frame additionally includes recesses 906. In this example, the recesses 906 are peripheral recesses surrounding the plurality of frame units 904. The membrane further includes intersecting recesses 908 extending between openings in the peripheral recesses 906.

[0087] The peripheral groove 906 and intersecting groove 908 define a portion of a suction flow path configured to drain the space between the HRVA and the ion exchange membrane. In Figure 9, the membrane frame includes a suction port 910 in fluid communication with the grooves 906, 908 and a pump (e.g., pump 130). The pump can be used to generate a pressure differential, thereby drawing cathodic electrolyte through the suction flow path. In some examples, as discussed above, the suction port can be further used to backfill deionized water (or another suitable liquid) into the grooves 906, 908 and frame unit 904 to flush out residual cathodic electrolyte from the electrodeposition tool.

[0088] One or more of the plurality of frame units may include an opening that allows fluid communication between the frame unit and the intersecting groove. For example, in FIG9, opening 912 allows fluid communication between the intersecting groove 908 and adjacent frame units among the plurality of frame units 904. Any or all of the frame units adjacent to the intersecting groove may include, in some examples, an opening leading to the intersecting groove, thereby allowing cathodic electrolyte to flow from the frame unit into the intersecting groove.

[0089] In some examples, the diaphragm frame may have an inclined profile. In other words, the peripheral groove 906 may define a plane parallel to the page, as shown in Figure 9. When the intersecting groove 908 extends from the opening in the peripheral groove toward the center of the diaphragm frame, the intersecting groove is not parallel to the plane of the peripheral groove, but extends into the page. In this way, the center of the intersecting groove may be relatively farther from the plane of the peripheral groove than other points along the intersecting groove. When mounted in an electrodeposition tool, this inclined profile can cause liquid to drain toward the center of the intersecting groove with the aid of gravity.

[0090] When the diaphragm frame has a tilted profile, the tilt angle can vary depending on the implementation. As a non-limiting example, the diaphragm frame 900 may have a tilt angle of one degree. As a non-limiting example, the diaphragm frame 1000 of Figure 10 may have a tilt angle of seven degrees. In some cases, diaphragm frames with different tilt angles can be used for different types of electrodeposition processes.

[0091] In some cases, openings may be defined between different frame units of the plurality of frame units 904, such that a given frame unit is in fluid communication with one or more of its adjacent frame units. Figure 9 includes an enlarged view of a set of frame units, one of which is labeled as the first frame unit 914. It should be understood that the specific arrangement of openings between the frame units shown in Figure 9 is non-limiting. Generally, different frame units of the plurality of frame units 904 may have different numbers of openings leading to their orthogonal and / or diagonally adjacent frame units. Furthermore, different diaphragm frames may have openings with different arrangements connecting their respective frame units. For example, alternative arrangements of frame unit openings will be described below with reference to Figure 10.

[0092] The first frame unit 914 includes an opening 916 leading to a second frame unit 918 diagonally adjacent to the plurality of frame units. This allows the cathode electrolyte in the frame unit 918 to drain through the opening 916 toward the intersecting groove into the frame unit 914. In the case of frame unit 914, it is connected to two different diagonally adjacent frame units, but this is not limiting, and other examples may have different configurations. Generally, the frame units in the plurality of frame units may include openings leading to any suitable number of their diagonally adjacent units, or may not include openings leading to diagonally adjacent units.

[0093] In the example of Figure 9, the first frame unit further includes a second opening 920 leading to an orthogonally adjacent third frame unit 922 among the plurality of frame units. This allows the cathode electrolyte to flow from frame unit 914 through the opening 920 into frame unit 922 via the intersecting groove. Generally, the frame units among the plurality of frame units may include openings leading to any suitable number of their orthogonally adjacent units, or may not include any such openings.

[0094] In some examples, to further facilitate the drainage of cathodic electrolyte from the space between the ion exchange membrane and the HRVA, one or more of the plurality of frame units may include openings leading to peripheral recesses. For example, in FIG9, frame unit 924 of the plurality of frame units includes an opening 926 that allows fluid communication between frame unit 924 and peripheral recess 906. This facilitates the drainage of cathodic electrolyte from frame units relatively far from intersecting recesses (e.g., frame unit 924). This further enables the flushing of cathodic electrolyte from the membrane frame through a suction port during backfilling—for example, opening 926 allows deionized water to flow from the peripheral recess into frame unit 924 and other frame units in fluid communication with frame unit 924.

[0095] Figure 10 illustrates another example of a membrane frame 1000. The membrane frame 1000 can be the membrane frame 128 of Figure 1. Similar to the membrane frame 200 of Figures 2-4, the membrane frame 1000 includes a mesh structure 1002 containing a plurality of frame units 1004 exposing the underlying ion exchange membrane. The membrane frame additionally includes grooves 1006. In this example, the grooves 1006 are peripheral grooves surrounding the plurality of frame units 1004. The membrane further includes intersecting grooves 1008A extending between openings in the peripheral grooves 1006.

[0096] In this example, the intersecting groove 1008A is one of several intersecting grooves that divide the plurality of frame units into different unit spaces. Specifically, in this example, there are a total of eight intersecting grooves 1008A-1008G, each extending between different corresponding pairs of openings in the peripheral groove 1006. In this way, the peripheral groove and the intersecting groove together define a portion of the suction flow path capable of drawing cathode electrolyte.

[0097] In this example, intersecting grooves divide the plurality of frame cells into separate cell spaces 1010A-H. Each intersecting groove includes one or more openings leading to different corresponding cell spaces. Figure 10 includes an enlarged view of frame cell 1012 among the plurality of frame cells 1004. Frame cell 1012 is contained within cell space 1010C and includes an opening 1014 leading to intersecting groove 1008C. Frame cell 1012 additionally includes openings leading to other frame cells within the same cell space 1010C. For example, frame cell 1012 includes an opening 1016 leading to a diagonally adjacent frame cell 1018. This allows the cathode electrolyte within the frame cells of cell space 1010C to drain into intersecting groove 1008C and ultimately be extracted from the electrodeposition tool via a suction port.

[0098] Similarly, intersecting groove 1008B may include one or more openings leading to frame units in unit space 1010B, and intersecting groove 1008A may include one or more openings leading to frame units in unit space 1010A, etc. In this way, the cathode electrolyte in each unit space can be individually pumped into the peripheral grooves through different intersecting grooves. Furthermore, in the example of FIG10, the different frame units in the plurality of frame units do not have openings leading to their orthogonally adjacent frame units. As described above, compared to the diaphragm frame 900 of FIG9, the diaphragm frame 1000 of FIG10 may have a steeper slope profile (e.g., a seven-degree slope). This steeper slope can improve the discharge of cathode electrolyte toward the center of the diaphragm frame, thereby omitting the openings between orthogonally adjacent frame units while still providing effective cathode electrolyte suction. Conversely, it is believed that openings between orthogonally adjacent frame units in a diaphragm frame with a relatively steeply inclined profile (as in the case of Figure 10) can lead to a "short circuit," thereby reducing the efficiency of the suction process.

[0099] This disclosure is presented by way of example and references the accompanying drawings. In one or more drawings, substantially identical parts, processing steps, and other elements may be identified coordinately and described with minimal repetition. However, it should be noted that the coordinately identified elements may also differ to some extent. It should also be noted that some drawings may be schematic and not to scale. Different drawing scales, aspect ratios, and the number of parts shown in the drawings may be intentionally distorted to make particular features or relationships easier to observe.

[0100] The “and / or” used here is defined as including or ∨, as listed in the truth table below: The term "one or more of A or B" as used herein includes: A, B, or a combination of A and B. The term "one or more of A, B, or C" is equivalent to A, B, and / or C. Therefore, "one or more of A, B, or C" as used herein includes: A alone, B alone, C alone, a combination of A and B, a combination of A and C, a combination of B and C, or a combination of A, B, and C.

[0101] It should be understood that the configurations and / or methods described herein are exemplary in nature, and these specific implementations or examples should not be considered limiting, as many variations are possible. The specific routines or methods described herein may represent one or more of any number of strategies. Therefore, the various actions shown and / or described may be performed in the order shown and / or described, in another order, in parallel, or omitted. Similarly, the order of the above processes may be changed.

[0102] The subject matter of this disclosure includes all novel and non-obvious combinations and sub-combinations of various processes, systems and configurations, as well as other features, functions, behaviors and / or characteristics disclosed herein, and any and all equivalent schemes thereof.

Claims

1. An electrodeposition tool comprising: Anode chamber; Cathode chamber; A high-resistance virtual anode (HRVA) is disposed in the cathode chamber; An ion exchange membrane is disposed between the anode chamber and the cathode chamber, and the ion exchange membrane is supported by a membrane frame; as well as A suction flow path is configured to empty the space between the HRVA and the ion exchange membrane, the suction flow path being defined by grooves in the ion exchange membrane and the membrane frame.

2. The electrodeposition tool of claim 1, wherein the groove is a peripheral groove formed at least partially around the periphery of the diaphragm frame.

3. The electrodeposition tool of claim 2, wherein the diaphragm frame comprises a plurality of frame units surrounded by the peripheral groove, and wherein the diaphragm frame further comprises intersecting grooves extending between opposing openings in the peripheral groove.

4. The electrodeposition tool of claim 3, wherein the diaphragm frame comprises two or more intersecting grooves, wherein the plurality of frame units are divided into two or more individual unit spaces, and wherein each intersecting groove comprises an opening leading to a different corresponding unit space in the two or more individual unit spaces.

5. The electrodeposition tool of claim 3, wherein the first frame unit of the plurality of frame units includes an opening leading to a diagonally adjacent second frame unit among the plurality of frame units.

6. The electrodeposition tool of claim 5, wherein the first frame unit further includes a second opening leading to an orthogonally adjacent third frame unit of the plurality of frame units.

7. The electrodeposition tool of claim 3, wherein the frame unit of the plurality of frame units includes an opening leading to the peripheral groove.

8. The electrodeposition tool of claim 1, wherein the diaphragm frame further includes a suction port in fluid communication with the groove, wherein the suction port is in fluid communication with a pump.

9. The electrodeposition tool of claim 1, wherein the diaphragm frame includes a baffle extending toward the HRVA, and wherein the groove is formed in the baffle.

10. The electrodeposition tool of claim 9, wherein the baffle includes a plurality of openings, and two or more of the plurality of openings are located on opposite sides of the baffle.

11. The electrodeposition tool of claim 9, wherein the baffle includes a plurality of openings, and wherein two or more of the openings are offset along the length of the baffle.

12. The electrodeposition tool of claim 9, wherein the baffle is one of a plurality of baffles that divide the space between the HRVA and the ion exchange membrane into a plurality of spaces of different sizes, wherein the largest space of the plurality of spaces of different sizes is located between a pair of baffles closer to the suction port, and wherein the smallest space of the plurality of spaces of different sizes is located between the periphery of the membrane frame and the baffle farther from the suction port.

13. The electrodeposition tool of claim 1, wherein the suction flow path further comprises a tube extending from the diaphragm frame into the space between the HRVA and the ion exchange diaphragm.

14. A diaphragm frame for an electrodeposition tool, the diaphragm frame comprising: Multiple baffles, wherein each of the multiple baffles extends between relative positions along the periphery of the diaphragm frame; as well as A groove, formed in the periphery of the membrane frame or in one or more of the plurality of baffles, is configured to define a suction flow path to drain the space between the high-resistivity virtual anode (HRVA) and the ion exchange membrane when the ion exchange membrane is disposed on the membrane frame and when the membrane frame is disposed in the electrodeposition tool.

15. A method for discharging a volume of cathode electrolyte from the space between a high-resistivity virtual anode (HRVA) and an ion-exchange membrane in an electrodeposition apparatus, the method comprising: A pressure difference is generated to move the volume of the cathode electrolyte through a suction port in fluid communication with a suction path defined by grooves in the ion exchange membrane and membrane frame.

16. The method of claim 15, wherein generating the pressure difference to move the volume of the cathode electrolyte comprises evacuating through the suction port.

17. The method of claim 15, wherein moving the volume of the cathode electrolyte comprises moving the volume of the cathode electrolyte through a portion of the groove formed in the baffle.

18. The method of claim 17, wherein moving the volume of the cathode electrolyte comprises moving at least a portion of the volume of the cathode electrolyte through a plurality of openings in the baffle.

19. The method of claim 15, wherein moving the volume of the cathode electrolyte comprises emptying a plurality of spaces of different sizes formed by a plurality of baffles.

20. The method of claim 15, further comprising supplying deionized water to the suction port to backfill the deionized water into the space between the HRVA and the ion exchange membrane.

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