Geometric parameter controllable micro-nano single-flow channel structure and preparation method thereof

By using a micro/nano single-channel structure with controllable geometric parameters, and generating the channel centerline using a sinusoidal centerline and parameterized curves, the problem of difficulty in independently controlling curvature/torsion in existing technologies is solved. This enables single-variable comparative experiments, improves the comparability and processing consistency between samples, and supports the establishment of a standard sample library.

CN122212017APending Publication Date: 2026-06-16SHANGHAI JIAOTONG UNIV
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Patent Information

Application Number
CN202610302781.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-12
Publication Date
2026-06-16

AI Technical Summary

Technical Problem

In the existing technology of micro-nano manufacturing, the curvature/torsion is difficult to parameterize and control, making it difficult to systematically control the curvature/torsion as an independent adjustable variable. Furthermore, the curvature is strongly coupled with the channel length and width, making it difficult to achieve single-variable comparison.

Method used

Employing a micro/nano single-channel structure with controllable geometric parameters, the channel centerline is defined by a sinusoidal centerline and generated by a parametric curve. Combined with anodic bonding, direct bonding, thermocompression bonding, or adhesive encapsulation, independent control of curvature/torsion is achieved. Furthermore, through parametric layout generation and etching processes, decoupled control of curvature from length and width is ensured.

Benefits of technology

It realizes the systematic control of curvature as an independent and adjustable variable, meets the requirements of univariate comparative experiments, improves the comparability between samples and the causal credibility of the conclusions, reduces the influence of inter-slice drift, improves processing quality and batch consistency, and supports the establishment and large-scale preparation of standard sample libraries.

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Abstract

The application discloses a micro-nano single-flow channel structure with controllable geometric parameters and a preparation method thereof. The structure comprises a substrate layer, a cover layer, an inlet cavity, an outlet cavity, an inlet through hole and an outlet through hole. The geometric parameters of the single-flow channel groove are defined by a parameter set G={L, w, h, Θ}. L is the effective length of the channel center line, w is the effective width, h is the effective depth, and Θ is the bending degree / tortuosity parameter set. The preparation method comprises parameterized design and layout generation, substrate preparation, photoetching pattern transfer, etching forming, inlet / outlet processing, bonding packaging, geometric characterization and acceptance. The application defines the bending degree by parameterization, introduces arc length constraint and line width compensation, realizes decoupling control of the bending degree and the length and width, can construct a series of single-flow channel samples according to needs, and meets the demand of single-variable comparison for micro-nano scale transport mechanism research. The application has the advantages of controllable geometric parameters, serializable preparation, strong single-variable comparability and good manufacturability.
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