Semiconductor wafer transfer basket with nitrogen replacement

Abstract

This invention relates to the field of semiconductor wafer processing and discloses a semiconductor wafer transfer basket rack with nitrogen purging. The rack includes a frame with two basket chambers mounted on it. An external movable sealing door assembly is located on one side of each basket chamber, and an internal movable sealing door assembly is located on the other side. The external and internal movable sealing door assemblies have the same structure. A nitrogen inlet pipe is mounted on the frame, with one end extending to the bottom of each basket chamber. An outlet pipe is mounted on the frame, with one end extending to the top of each basket chamber. An oxygen content detection tube is mounted at the top of each basket chamber. Gas-filled sealing rings are symmetrically mounted at both ends of each basket chamber. This invention, by introducing nitrogen into the basket chamber through the nitrogen inlet pipe, can remove the existing oxygen within the basket chamber, ensuring that the wafer remains in a nitrogen environment during transfer, thus preventing oxidation.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor wafer processing, specifically a semiconductor wafer transfer basket rack with nitrogen purging. Background Technology

[0002] During the deposition process of semiconductor wafers, oxidation easily occurs in high-temperature environments, requiring diffusion furnaces to have oxidation resistance. In the exposed areas of the wafer, nitrogen is used to replace oxygen, providing a low-oxygen process environment, which is a good solution to wafer oxidation. The wafer transfer basket rack is connected to the basket chamber, and it is necessary to maintain a low oxygen content within the chamber. However, the following drawbacks exist during use: Existing semiconductor wafer transfer basket racks with nitrogen purging involve placing the basket into a chamber with front and rear doors. The doors swing and press against a sealing gasket at the edge of the chamber to achieve a seal. Nitrogen is then introduced into the sealed chamber to replace the oxygen, achieving the low oxygen content requirement in the basket area during wafer transfer. The sealing doors are opened by a cylinder pushing the door assembly to swing and disengage from the sealing gasket. The cylinder then drives the door to move to one side of the wafer transfer window. This structure is relatively complex, and the swinging of the door requires a large amount of space. Summary of the Invention

[0003] In view of the above situation and to overcome the defects of the prior art, the present invention provides a semiconductor wafer transfer basket rack with nitrogen replacement, which effectively solves the problems mentioned in the background art.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a semiconductor wafer transfer basket rack with nitrogen purging, comprising a frame, wherein two basket chambers are installed on the frame, an external movable sealing door assembly is provided on one side of the basket chamber, and an internal movable sealing door assembly is provided on the other side of the basket chamber, wherein the external movable sealing door assembly and the internal movable sealing door assembly have the same structure. A nitrogen inlet pipe is installed on the frame, with one end of the nitrogen inlet pipe extending to the bottom of the flower basket chamber. An outlet pipe is installed on the frame, with one end of the outlet pipe extending to the top of the flower basket chamber. An oxygen content detection tube for the flower basket chamber is installed at the top of the flower basket chamber. Inflatable sealing rings are symmetrically installed at both ends of the flower basket chamber. The inflatable sealing ring includes a sealing ring body symmetrically installed at both ends of the basket chamber. Rectangular grooves are symmetrically opened on both sides of the basket chamber. The sealing ring body is installed in the rectangular groove. Air nozzles are installed on the sealing ring body. Two air nozzles are connected to one end of the nitrogen inlet pipe and a nitrogen inlet assembly.

[0005] Preferably, the air nozzle is equipped with an inflation sealing ring solenoid valve assembly, a pressure detection switch, and a pressure reducing valve.

[0006] Preferably, the external movable sealing door assembly includes two fixed plates fixedly installed on the frame, guide shafts symmetrically installed between the two fixed plates, a sealing door plate between the two fixed plates, a slider fixedly installed on the sealing door plate, the slider being slidably connected to the guide shaft, a cylinder bracket installed on one of the fixed plates, a telescopic cylinder installed on the cylinder bracket, a push plate connected to the output end of the telescopic cylinder, and the push plate being fixedly connected to one of the sliders.

[0007] Preferably, two detection plates are symmetrically installed on the sealing door panel, and a cylinder retraction detection switch and a cylinder extension detection switch are respectively installed on the two fixed plates.

[0008] Preferably, the nitrogen inlet assembly includes a circular valve housing, an inlet pipe is installed on the front of the circular valve housing, one end of the inlet pipe is connected to a nitrogen source and a gas pump, side pipes are symmetrically installed on both sides of the circular valve housing, a rotating motor is fixedly installed at the top center of the circular valve housing, wherein the rotating motor is connected to the nitrogen inlet pipe, the two side pipes are respectively connected to two gas nozzles, an internal valve body is provided inside the circular valve housing, and a moisture discharge component is provided on the side of the circular valve housing away from the inlet pipe.

[0009] Preferably, the internal valve body includes a circular valve block rotatably mounted inside a circular valve housing. A sealing gasket is installed on the outer wall of the circular valve block. An air inlet groove and an air outlet groove are formed inside the circular valve block, forming an L-shape. One end of the air inlet groove corresponds to the air inlet pipe. A side groove is formed on the side of the air outlet groove away from the air inlet pipe. A nitrogen drying element is installed inside the side groove. The side of the circular valve block away from the air inlet pipe is fixedly connected to the output shaft of a rotating motor. The rotating motor is fixedly mounted on the circular valve housing.

[0010] Preferably, the nitrogen drying component includes a placement box movably installed inside the side groove. The inner cavity of the placement box is filled with molecular sieves. Two fixed pipes are installed on the side of the placement box away from the outlet groove. A baffle is provided on the side of the fixed pipe away from the placement box. Two through holes are opened on the baffle. A sliding groove is opened on the side of the placement box near the baffle. A sliding plate is installed on the baffle and is slidably installed in the sliding groove. A second spring is installed on the side of the sliding plate near the inlet groove. One end of the second spring is fixedly connected to the inner wall of the end of the sliding groove.

[0011] Preferably, the circular valve block has a movable groove inside, which is located on the side of the side groove away from the air inlet groove. A push plate is provided inside the side groove, and a connecting rod is hinged on the push plate. One end of the connecting rod is hinged to the placement box. A counterweight U-shaped frame is movably installed inside the movable groove. The end of the counterweight U-shaped frame extends into the side groove and is fixedly connected to the push plate. A first spring is installed between the counterweight U-shaped frame and the inner wall of the movable groove near the side groove.

[0012] Preferably, the moisture discharge component includes a sliding frame fixedly installed on the side of the circular valve housing away from the air inlet pipe. The sliding frame is located below the rotating motor. A sliding block is slidably installed inside the sliding frame. Two tubes are installed on the sliding block. One end of the tubes passes through the interior of the circular valve housing. A screw is rotatably installed inside the sliding frame. The screw is threadedly connected to the sliding block. One end of the screw is fixedly connected to the output shaft of the drive motor. The drive motor is fixedly installed on the sliding frame. The ends of the two tubes are respectively connected to a hot air source and a condenser.

[0013] Compared with the prior art, the beneficial effects of the present invention are: This invention features symmetrically arranged sealing ring bodies on both sides of the basket chamber. When the sealing ring bodies expand, they can fit tightly against the sealing door panel, preventing outside air from entering the basket chamber. At the same time, nitrogen inlet and outlet pipes are respectively provided at the bottom and top of the basket chamber. Nitrogen gas is introduced into the basket chamber through the nitrogen inlet pipe, which can expel the original oxygen in the basket chamber. This ensures that the wafer is always in a nitrogen environment during the transfer process, preventing oxidation. In addition to ensuring the sealing effect, the sealing pressure can also be adjusted, and the required movement space is small. This invention connects the gas nozzle to the side pipe and the nitrogen inlet pipe to the middle pipe. By controlling the rotation of the circular valve block, one end of the gas outlet groove is connected to the middle pipe or the side pipe. This allows control of the nitrogen to flow into the basket chamber or into the sealing ring body. The same nitrogen source enables oxygen removal protection and expansion sealing, making the equipment easy to use. In this invention, when the circular valve block rotates to the side of the gas outlet groove facing the central tube, the counterweight U-shaped frame moves downward under the action of gravity, thereby pushing the placement box into the gas outlet groove. This allows the nitrogen gas entering the basket chamber to pass through the molecular sieve in the placement box, absorbing the moisture in the nitrogen gas and improving the protection of the wafer. In this invention, when the circular valve block rotates to the position where the air outlet groove faces downward, the baffle moves downward under the action of gravity, so that the two through holes correspond to the two fixed tubes respectively. Hot air is then introduced into the placement box through the insertion tube, which facilitates the discharge of moisture from the molecular sieve and facilitates subsequent nitrogen treatment. Attached Figure Description

[0014] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention and do not constitute a limitation thereof.

[0015] In the attached diagram: Figure 1 This is a schematic diagram of the semiconductor wafer transfer basket structure with nitrogen replacement according to the present invention; Figure 2 This is a schematic diagram of the framework structure of the present invention; Figure 3 This is a schematic diagram of one side of the flower basket chamber structure of the present invention; Figure 4 This is a schematic diagram of the other side of the flower basket chamber of the present invention; Figure 5 This is a schematic diagram of the inflatable sealing ring structure of the present invention; Figure 6 This is a cross-sectional view of the inflatable sealing ring of the present invention; Figure 7 This is a diagram showing the sealing ring body of the present invention in an uninflated state; Figure 8 This is a diagram showing the state of the sealing ring body after it has been inflated. Figure 9 This is a schematic diagram of the front structure of the external movable sealing door assembly of the present invention; Figure 10 This is a schematic diagram of the rear structure of the external movable sealing door assembly of the present invention; Figure 11 This is a diagram showing the connection between the nozzle and the end of the nitrogen inlet pipe of the present invention; Figure 12 This is a schematic diagram of the nitrogen inlet component structure of the present invention; Figure 13 This is a schematic diagram of the internal structure of the circular valve housing of the present invention; Figure 14 This is a schematic diagram of the circular valve block structure of the present invention; Figure 15 For the present invention Figure 14 Enlarged view of point A in the middle; Figure 16 This is a schematic diagram of the nitrogen drying component of the present invention; Figure 17 This is a schematic diagram of the water discharge component of the present invention; In the diagram: 1. Frame; 2. Basket chamber; 3. External movable sealing door assembly; 301. Fixing plate; 302. Guide shaft; 303. Slider; 304. Sealing door panel; 305. Telescopic cylinder; 306. Cylinder bracket; 307. Push plate; 308. Cylinder retraction detection switch; 309. Cylinder extension detection switch; 310. Detection plate; 4. Internal movable sealing door assembly; 5. Inflatable sealing ring solenoid valve group; 6. Pressure detection switch; 7. Pressure reducing valve; 8. Oxygen content detection tube inside the basket chamber; 9. Nitrogen inlet pipe; 10. Outlet pipe; 11. Inflatable sealing ring; 1101. Sealing ring body; 1102. Air nozzle; 12. Nitrogen inlet assembly; 1201. Circular valve shell; 1202. Inlet pipe; 1203. Central pipe; 1204. Side tube; 1205, Internal valve body; 12051, Circular valve block; 12052, Air inlet slot; 12053, Air outlet slot; 12054, Side slot; 12055, Push plate; 12056, Connecting rod; 12057, Movable slot; 12058, Counterweight U-shaped frame; 12059, First spring; 1206, Nitrogen drying component; 12061, Placement box; 12062, Fixed tube; 12063, Baffle; 12064, Through hole; 12065, Slide plate; 12066, Slide groove; 12067, Second spring; 1207, Moisture discharge component; 12071, Insert tube; 12072, Sliding frame; 12073, Sliding block; 12074, Screw; 12075, Drive motor; 1208, Rotation motor. Detailed Implementation

[0016] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0017] Example 1, by Figures 1-10 The present invention relates to a semiconductor wafer transfer basket rack with nitrogen purging, comprising a frame 1, two basket chambers 2 mounted on the frame 1, an external movable sealing door assembly 3 disposed on one side of the basket chamber 2, and an internal movable sealing door assembly 4 disposed on the other side of the basket chamber 2, the external movable sealing door assembly 3 and the internal movable sealing door assembly 4 having the same structure, a nitrogen inlet pipe 9 mounted on the frame 1, one end of the nitrogen inlet pipe 9 extending to the bottom of the basket chamber 2, an outlet pipe 10 mounted on the frame 1, one end of the outlet pipe 10 extending to the top of the basket chamber 2, an oxygen content detection tube 8 mounted at the top of the basket chamber 2, and air-filled sealing rings 11 symmetrically mounted at both ends of the basket chamber 2; The inflatable sealing ring 11 includes a sealing ring body 1101 symmetrically installed at both ends of the basket chamber 2. Rectangular grooves are symmetrically opened on both sides of the basket chamber 2. The sealing ring body 1101 is installed in the rectangular groove. An air nozzle 1102 is installed on the sealing ring body 1101. The two air nozzles 1102 are connected to one end of the nitrogen inlet pipe 9 by a nitrogen inlet assembly 12. An inflatable sealing ring solenoid valve group 5, a pressure detection switch 6 and a pressure reducing valve 7 are installed on the air nozzles 1102.

[0018] The external movable sealing door assembly 3 includes two fixed plates 301 fixedly mounted on the frame 1. Guide shafts 302 are symmetrically mounted between the two fixed plates 301. A sealing door plate 304 is provided between the two fixed plates 301. Sealing ring bodies 1101 are symmetrically arranged on both sides of the basket chamber 2. When the sealing ring bodies 1101 expand, they can tightly adhere to the sealing door plate 304, preventing outside air from entering the basket chamber 2. Simultaneously, nitrogen inlet pipes 9 and outlet pipes 10 are respectively provided at the bottom and top of the basket chamber 2 to... Nitrogen gas is introduced into the basket chamber 2 through the nitrogen inlet pipe 9, which can expel the original oxygen in the basket chamber 2, ensuring that the wafer is always in a nitrogen environment during the transfer process, preventing oxidation and ensuring a sealing effect. A slider 303 is fixedly installed on the sealing door plate 304, and the slider 303 is slidably connected to the guide shaft 302. A cylinder bracket 306 is installed on one of the fixed plates 301, and a telescopic cylinder 305 is installed on the cylinder bracket 306. The output end of the telescopic cylinder 305 is connected to a push plate 307, which pushes... Plate 307 is fixedly connected to one of the sliders 303. Two detection plates 310 are symmetrically installed on the sealing door plate 304. A cylinder retraction detection switch 308 and a cylinder extension detection switch 309 are respectively installed on the two fixed plates 301. When the flower basket transfer operation begins, the sealing ring body 1101 corresponding to the external moving sealing door assembly 3 is depressurized, the sealing ring body 1101 retracts and disengages from the sealing door plate 304, and the telescopic cylinder 305 extends to open the sealing door plate 304. At this time, the flower basket robot arm will be fully loaded. The wafer-carrying basket is sent into the basket chamber 2, and then the telescopic cylinder 305 is retracted, the sealing door 304 is closed, the sealing ring body 1101 is inflated and pressed on the sealing door 304 to seal the basket chamber 2. The nitrogen inlet pipe 9 starts to fill the basket chamber 2 with high-purity nitrogen to replace the air in the sealed chamber. The outlet pipe 10 discharges the replaced air to the outside of the equipment. The oxygen content detection pipe 8 in the basket chamber extracts the gas in the sealed chamber in real time, and the oxygen content is measured by the oxygen content analyzer of the equipment.

[0019] When the oxygen content drops below the process requirement standard, the sealing ring body 1101 corresponding to the internal moving sealing door assembly 4 releases air and retracts, disengaging from the sealing door plate 304. The telescopic cylinder 305 extends, the sealing door plate 304 opens, and the basket chamber 2 connects with the wafer basket chamber inside the equipment, isolating the inside of the equipment from the outside air and maintaining a nitrogen environment inside the equipment. Then the wafer transfer robot begins to remove the wafer from the basket. Among them, the inflatable sealing ring solenoid valve group 5 controls the inflation and deflation of the sealing ring body 1101, the pressure detection switch 6 detects the inflation pressure inside the inflatable sealing ring in real time, and the sealing door plate 304 only opens and closes when the pressure reaches the set value. The function of the pressure reducing valve 7 is to adjust the inflation pressure of the inflatable sealing ring 11, thereby adjusting the sealing pressure.

[0020] Based on Example 1, by Figures 10-17 The nitrogen inlet assembly 12 includes a circular valve housing 1201. An air inlet pipe 1202 is installed on the front of the circular valve housing 1201. One end of the air inlet pipe 1202 is connected to a nitrogen source and a gas pump. Side pipes 1204 are symmetrically installed on both sides of the circular valve housing 1201. A rotating motor 1208 is fixedly installed at the top center of the circular valve housing 1201. The rotating motor 1208 is connected to the nitrogen inlet pipe 9. The two side pipes 1204 are respectively connected to two gas nozzles 1102. An internal valve body 1205 is provided inside the circular valve housing 1201. A moisture discharge component 1207 is provided on the side of the circular valve housing 1201 away from the air inlet pipe 1202. The internal valve body 1205 includes a circular valve block 12051 rotatably mounted inside the circular valve housing 1201. A sealing gasket is installed on the outer wall of the circular valve block 12051. The circular valve block 12051 has an inlet groove 12052 and an outlet groove 12053 inside, which form an L-shape. One end of the inlet groove 12052 corresponds to the inlet pipe 1202. The air nozzle 1102 is connected to the side pipe 1204. Nitrogen inlet pipe 9 Connected to the central pipe 1203, the circular valve block 12051 is rotated to connect one end of the outlet groove 12053 to either the central pipe 1203 or the side pipe 1204. This allows control of nitrogen flow into the basket chamber 2 or into the sealing ring body 1101. Oxygen venting protection and expansion sealing are achieved through the same nitrogen source, facilitating equipment use. A side groove 12054 is provided on the side of the outlet groove 12053 away from the inlet pipe 1202. The interior of the side groove 12054 is designed with… A nitrogen drying element 1206 is provided. A circular valve block 12051 is fixedly connected to the output shaft of a rotary motor 1208 on the side away from the air inlet pipe 1202. The rotary motor 1208 is fixedly mounted on the circular valve housing 1201. A movable groove 12057 is provided inside the circular valve block 12051. The movable groove 12057 is located on the side of the side groove 12054 away from the air inlet groove 12052. A push plate 12055 is provided inside the side groove 12054. The push plate 12055 is hinged on the side. A connecting rod 12056 is installed, one end of which is hinged to a nitrogen drying component 1206. A counterweight U-shaped frame 12058 is movably installed inside the movable slot 12057. The end of the counterweight U-shaped frame 12058 extends into the side slot 12054, and the end of the counterweight U-shaped frame 12058 is fixedly connected to a push plate 12055. A first spring 12059 is installed between the counterweight U-shaped frame 12058 and the inner wall of the movable slot 12057 near the side slot 12054. The nitrogen drying component 1206 includes a placement box 12061 movably installed inside a side groove 12054. The inner cavity of the placement box 12061 is filled with molecular sieves. Two fixed pipes 12062 are installed on the side of the placement box 12061 away from the outlet groove 12053. A baffle 12063 is provided on the side of the fixed pipes 12062 away from the placement box 12061. Two through holes 12064 are provided on the baffle 12064. A sliding groove 12066 is provided on the side of the placement box 12061 near the baffle 12063. A sliding plate 12065 is installed on the baffle 12063 and is slidably mounted on the side of the placement box 12061 near the baffle 12063. Inside the slide 12066, a second spring 12067 is installed on the side of the slide plate 12065 near the air inlet slot 12052. One end of the second spring 12067 is fixedly connected to the inner wall of the end of the slide 12066. When the circular valve block 12051 rotates to the side of the air outlet slot 12053 facing the middle tube 1203, the counterweight U-shaped frame 12058 moves downward under the action of gravity, and then pushes the placement box 12061 into the air outlet slot 12053, so that the nitrogen gas entering the basket chamber 2 can pass through the molecular sieve in the placement box 12061 to absorb the moisture in the nitrogen gas and improve the protection of the wafer.

[0021] The moisture discharge component 1207 includes a sliding bracket 12072 fixedly installed on the side of the circular valve housing 1201 away from the air intake pipe 1202. The sliding bracket 12072 is located below the rotating motor 1208. A sliding block 12073 is slidably installed inside the sliding bracket 12072. Two inserts 12071 are installed on the sliding block 12073, with one end of each insert penetrating into the interior of the circular valve housing 1201. A screw 12074 is rotatably installed inside the sliding bracket 12072. The screw 12074 is threadedly connected to the sliding block 12073, and one end of the screw 12074 is connected to the drive motor. The output shaft of the machine 12075 is fixedly connected, and the drive motor 12075 is fixedly installed on the sliding frame 12072. The ends of the two insertion tubes 12071 are respectively connected to the hot air source and the condenser. When the circular valve block 12051 rotates to the position where the air outlet groove 12053 faces downward, the baffle 12063 moves downward under the action of gravity, so that the two through holes 12064 correspond to the two fixed tubes 12062 respectively. Hot air is introduced into the placement box 12061 through the insertion tube 12071, which facilitates the discharge of moisture on the molecular sieve and facilitates subsequent nitrogen treatment.

[0022] Working principle: When in use, the telescopic cylinder 305 pushes the sealing door plate 304 to move along the guide shaft 302, opening one end of the flower basket chamber 2. Then, the flower basket is placed into the flower basket chamber 2. Then, the telescopic cylinder 305 pulls the sealing door plate 304 back to close one end of the flower basket chamber 2. Then, the rotating motor 1208 is turned on to drive the circular valve block 12051 to rotate, so that one end of the air outlet groove 12053 on the circular valve block 12051 rotates to the position corresponding to one of the side pipes 1204. This side pipe 1204 is connected to the air nozzle 1102 on the sealing ring body 1101 on the corresponding side of the external movable sealing door assembly 3. Then, the air pump is turned on to drive the nitrogen in the nitrogen source to enter the sealing ring body 1101, so that the sealing ring body 1101 expands and is tightly attached to the sealing door panel 304. Then rotate the circular valve block 12051 to the position where the air outlet groove 12053 corresponds to the other side pipe 1204, so that the sealing ring body 1101 on the other side of the flower basket chamber 2 expands and makes it fit tightly against the sealing door plate 304 on the internal movable sealing door assembly 4. Then, the circular valve block 12051 is driven to rotate by the rotating motor 1208 to a position corresponding to one end of the air outlet groove 12053 and the middle pipe 1203. Nitrogen is output to the nitrogen inlet pipe 9 by the air pump, so that the nitrogen enters the interior of the flower basket chamber 2. Since one end of the nitrogen inlet pipe 9 is located at the bottom of the flower basket chamber 2 and one end of the air outlet pipe 10 is located at the top of the flower basket chamber 2, and the density of nitrogen is almost the same as that of air, the nitrogen enters the interior of the flower basket chamber 2 from bottom to top, which can push the air inside the flower basket chamber 2 to be discharged from the air outlet pipe 10, so as to achieve the low oxygen content requirement of the flower basket area during the transfer. The oxygen content detection tube 8 inside the flower basket chamber can detect the oxygen content inside the flower basket chamber 2 after the air is discharged. After the wafer has completed the deposition process inside the equipment, it needs to be transferred out. At this time, the sealing door plate 304 on the internal moving sealing door assembly 4 is opened, and the basket is taken out from the other side of the basket chamber 2. When the circular valve block 12051 rotates to the position corresponding to the outlet groove 12053 and the middle tube 1203, the outlet groove 12053 is in a vertical state, and the inlet groove 12052 is located at the bottom of the outlet groove 12053. At this time, the counterweight U-shaped frame 12058 moves downward under the action of gravity, that is, moves towards the side groove 12054, and pushes the placement box 12061 towards the inside of the outlet groove 12053 through the connecting rod 12056, so that the outlet groove 12053 enters the interior of the outlet groove 12053. When the nitrogen passes through the interior of the outlet groove 12053, it passes through the inner cavity of the placement box 12061. The inner cavity of the placement box 12061 is filled with molecular sieves, which can intercept the moisture in the nitrogen and ensure that the nitrogen entering the basket chamber 2 is dry, thereby protecting the wafer. After a period of time, the molecular sieve in the placement box 12061 needs to be dried. During use, the circular valve block 12051 is rotated so that the air outlet groove 12053 faces downwards. At this time, under the action of gravity, the baffle 12063 moves downwards, so that the two through holes 12064 correspond to the two fixed tubes 12062 respectively, and the two fixed tubes 12062 correspond to the positions of the two insertion tubes 12071 respectively. Then, the drive motor 12075 is turned on, driving the screw 12074 to rotate. Because... The screw 12074 is threadedly connected to the sliding block 12073, thereby driving the two insertion tubes 12071 to be inserted into the two fixed tubes 12062 respectively. The two insertion tubes 12071 are respectively connected to the hot air source and the condenser, driving the hot air to enter the placement box 12061 through the insertion tubes 12071. When the hot air passes through the molecular sieve, it turns the water absorbed by the molecular sieve into water vapor, which is then carried into the condenser through the other insertion tube 12071, so that the molecular sieve can restore its original water absorption effect.

[0023] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0024] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A semiconductor wafer transfer basket rack with nitrogen purging, comprising a frame (1), characterized in that: Two flower basket chambers (2) are installed on the frame (1). An external movable sealing door assembly (3) is provided on one side of the flower basket chamber (2), and an internal movable sealing door assembly (4) is provided on the other side of the flower basket chamber (2). The external movable sealing door assembly (3) and the internal movable sealing door assembly (4) have the same structure. A nitrogen inlet pipe (9) is installed on the frame (1), one end of which extends to the bottom of the flower basket chamber (2). An outlet pipe (10) is installed on the frame (1), one end of which extends to the top of the flower basket chamber (2). An oxygen content detection tube (8) is installed at the top of the flower basket chamber (2). Inflatable sealing rings (11) are symmetrically installed at both ends of the flower basket chamber (2). The inflatable sealing ring (11) includes a sealing ring body (1101) symmetrically installed at both ends of the basket chamber (2). Rectangular grooves are symmetrically opened on both sides of the basket chamber (2). The sealing ring body (1101) is installed in the rectangular groove. An air nozzle (1102) is installed on the sealing ring body (1101). The two air nozzles (1102) are connected to one end of the nitrogen inlet pipe (9) with a nitrogen inlet assembly (12).

2. The semiconductor wafer transfer basket rack with nitrogen purging according to claim 1, characterized in that: The air nozzle (1102) is equipped with an inflation sealing ring solenoid valve assembly (5), a pressure detection switch (6), and a pressure reducing valve (7).

3. A semiconductor wafer transfer basket rack with nitrogen purging according to claim 1, characterized in that: The external movable sealing door assembly (3) includes two fixed plates (301) fixedly installed on the frame (1), guide shafts (302) are symmetrically installed between the two fixed plates (301), a sealing door plate (304) is provided between the two fixed plates (301), a slider (303) is fixedly installed on the sealing door plate (304), the slider (303) is slidably connected to the guide shaft (302), a cylinder bracket (306) is installed on one of the fixed plates (301), a telescopic cylinder (305) is installed on the cylinder bracket (306), a push plate (307) is connected to the output end of the telescopic cylinder (305), and the push plate (307) is fixedly connected to one of the sliders (303).

4. A semiconductor wafer transfer basket rack with nitrogen purging according to claim 3, characterized in that: Two detection plates (310) are symmetrically installed on the sealing door panel (304), and cylinder retraction detection switch (308) and cylinder extension detection switch (309) are respectively installed on the two fixing plates (301).

5. A semiconductor wafer transfer basket rack with nitrogen purging according to claim 1, characterized in that: The nitrogen inlet assembly (12) includes a circular valve housing (1201), an air inlet pipe (1202) is installed on the front of the circular valve housing (1201), one end of the air inlet pipe (1202) is connected to a nitrogen source and an air pump, side pipes (1204) are symmetrically installed on both sides of the circular valve housing (1201), a rotating motor (1208) is fixedly installed at the top center of the circular valve housing (1201), wherein the rotating motor (1208) is connected to the nitrogen inlet pipe (9), the two side pipes (1204) are respectively connected to two air nozzles (1102), an internal valve body component (1205) is provided inside the circular valve housing (1201), and a moisture discharge component (1207) is provided on the side of the circular valve housing (1201) away from the air inlet pipe (1202).

6. A semiconductor wafer transfer basket rack with nitrogen purging according to claim 5, characterized in that: The internal valve body component (1205) includes a circular valve block (12051) rotatably mounted inside a circular valve housing (1201). A sealing gasket is installed on the outer wall of the circular valve block (12051). An air inlet groove (12052) and an air outlet groove (12053) are provided inside the circular valve block (12051). The air inlet groove (12052) and the air outlet groove (12053) form an L-shape. One end of the air inlet groove (12052) is connected to the air inlet. Corresponding to the inlet pipe (1202), the outlet slot (12053) has a side slot (12054) on the side away from the inlet pipe (1202). A nitrogen drying component (1206) is installed inside the side slot (12054). The side of the circular valve block (12051) away from the inlet pipe (1202) is fixedly connected to the output shaft of the rotating motor (1208). The rotating motor (1208) is fixedly installed on the circular valve housing (1201).

7. A semiconductor wafer transfer basket rack with nitrogen purging according to claim 6, characterized in that: The nitrogen drying component (1206) includes a placement box (12061) movably installed inside the side groove (12054). The inner cavity of the placement box (12061) is filled with molecular sieves. Two fixed pipes (12062) are installed on the side of the placement box (12061) away from the gas outlet groove (12053). A baffle (12063) is provided on the side of the fixed pipes (12062) away from the placement box (12061). Two through holes (12) are opened on the baffle (12063). 064), a slide groove (12066) is provided on the side of the placement box (12061) near the baffle (12063). A slide plate (12065) is installed on the baffle (12063). The slide plate (12065) is slidably installed in the slide groove (12066). A second spring (12067) is installed on the side of the slide plate (12065) near the air intake slot (12052). One end of the second spring (12067) is fixedly connected to the inner wall of the end of the slide groove (12066).

8. A semiconductor wafer transfer basket rack with nitrogen purging according to claim 6, characterized in that: The circular valve block (12051) has a movable groove (12057) inside. The movable groove (12057) is located on the side of the side groove (12054) away from the air inlet groove (12052). A push plate (12055) is provided inside the side groove (12054). A connecting rod (12056) is hinged to the push plate (12055). One end of the connecting rod (12056) is hinged to the placement box (12061). A counterweight U-shaped frame (12058) is movably installed inside the moving groove (12057). The end of the counterweight U-shaped frame (12058) extends into the side groove (12054), and the end of the counterweight U-shaped frame (12058) is fixedly connected to the push plate (12055). A first spring (12059) is installed between the counterweight U-shaped frame (12058) and the inner wall of the moving groove (12057) near the side groove (12054).

9. A semiconductor wafer transfer basket rack with nitrogen purging according to claim 5, characterized in that: The water discharge component (1207) includes a sliding frame (12072) fixedly installed on the side of the circular valve housing (1201) away from the air inlet pipe (1202). The sliding frame (12072) is located below the rotating motor (1208). A sliding block (12073) is slidably installed inside the sliding frame (12072). Two inserts (12071) are installed on the sliding block (12073). One end of the insert (12071) extends into the interior of the circular valve housing (1201). A screw (12074) is rotatably installed inside the sliding frame (12072). The screw (12074) is threadedly connected to the sliding block (12073). One end of the screw (12074) is fixedly connected to the output shaft of the drive motor (12075). The drive motor (12075) is fixedly installed on the sliding frame (12072). The ends of the two tubes (12071) are respectively connected to a hot air source and a condenser.

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