A probe mounting structure for hot and cold stages

Abstract

This invention relates to the field of measurement probe technology and discloses a probe mounting structure for a hot and cold stage. The structure includes a hot and cold stage, with several probe arms inside. An adjustable displacement stage is mounted on the outside of the stage, with its moving end connected to one of the probe arms. A probe body is detachably mounted on each probe arm, and a mounting hole is provided in the probe arm. A clamp is installed in the mounting hole, and a mounting groove is provided at the upper end of the probe body. The probe arm is clamped and fixed by the clamp, and the mounting groove engages with the clamp. The annular clamping structure composed of the first and second clamping plates in this design can restrict the probe body at all angles, effectively preventing the probe body from shaking due to external forces, temperature changes, or its own vibration during use. This ensures that the probe body maintains a precise position and orientation during measurement and detection operations, improving the accuracy and reliability of the measurement data.

Description

Technical Field

[0001] This invention relates to the field of measurement probe technology, and more specifically, to a probe mounting structure for a hot and cold stage. Background Technology

[0002] In the semiconductor testing field, the hot and cold stage serves as a testing platform for precise temperature control. Its core testing component—the probe—needs to establish stable contact with the electrodes / test points of semiconductor samples such as wafers or chips within a wide temperature range of -196℃ to 600℃ to complete the measurement of electrical characteristics or physical parameters. Existing probes typically use materials with low thermal expansion coefficients, such as tungsten, beryllium copper, or rhenium alloys, to manufacture the tip portion, while the probe arm is mostly made of high-rigidity metal materials such as stainless steel or tungsten steel. The mounting structure achieves spatial positioning and angle calibration of the probe through an adjustable XYZ three-axis displacement platform and a rotation mechanism, and uses magnetic attraction, vacuum adsorption, or snap-fit ​​connection mechanisms (such as dovetail groove-wedge block fit structure) to achieve quick assembly and disassembly, adapting to the probe height adjustment requirements of different testing scenarios.

[0003] However, during thermal cycling tests, the probe system faces significant thermodynamic challenges: the difference in thermal expansion coefficients between the probe arm material (such as stainless steel, tungsten carbide, etc.) and the tip material (such as tungsten, beryllium copper, rhenium alloy, etc.) causes varying degrees of thermal expansion or contraction of the probe arm and probe, resulting in misalignment between the aligned probe tip and the sample electrode (Pad point), leading to problems such as sudden changes in contact resistance, signal distortion, and even test interruption. Therefore, a probe mounting structure for thermal cycling is proposed. Summary of the Invention

[0004] This invention provides a probe mounting structure for a hot and cold stage, which can solve the problems mentioned in the background art, such as the probe arm and probe undergoing different degrees of thermal expansion or contraction during hot and cold cycling tests, causing the aligned probe tip to shift between the probe and the sample electrode, which in turn leads to sudden changes in contact resistance, signal distortion, or even test interruption.

[0005] To achieve the above objectives, this solution provides a probe mounting structure for a hot and cold stage, including a hot and cold stage, a plurality of probe arms disposed inside the hot and cold stage, an adjustable displacement stage mounted on the outside of the hot and cold stage, the movable end of the adjustable displacement stage being connected to the probe arms, a probe body being detachably mounted on the probe arm, a mounting hole being provided on the probe arm, a clamp being disposed in the mounting hole, a mounting groove being provided at the upper end of the probe body, the probe body being clamped and fixed by the clamp, and the mounting groove engaging with the clamp.

[0006] Optionally, the inner wall of the hot and cold stage is provided with a connection hole, and the end of the probe arm passes through the connection hole and is connected to the moving end of the adjustment displacement stage.

[0007] Optionally, the clamp includes a first clamping plate and a second clamping plate. The end of the probe arm away from the adjustment displacement stage is provided with a threaded hole. A knob cap is rotatably provided at the end of the probe arm. A threaded post is fixedly installed on the side of the knob cap. The threaded post is threadedly engaged with the threaded hole.

[0008] Optionally, the first clamping piece and the second clamping piece are configured as curved arc-shaped pieces with a C-shaped cross section, both the first clamping piece and the second clamping piece are made of metal, and the first clamping piece and the second clamping piece are symmetrically arranged.

[0009] Optionally, the probe arm has a clamping cavity inside, a limiting groove is provided in the clamping cavity, a slide rod is slidably installed in the limiting groove, a turntable is rotatably installed on the end wall of the threaded column, a connecting rod is fixedly installed at the end of the slide rod, the turntable is rotatably connected to the connecting rod, and the other end of the connecting rod is fixedly connected to the first clamping piece.

[0010] Optionally, an mounting plate is fixedly installed inside the clamping cavity, and the other end of the mounting plate is fixedly connected to the second clamping piece.

[0011] Optionally, the first clamping piece and the second clamping piece are provided with a plurality of notches, the notches dividing the first clamping piece and the second clamping piece into petal shapes.

[0012] Optionally, the bottom wall of the second clamping piece is provided with a through hole, and a variable rod is fixedly installed in the clamping cavity. The variable rod passes through the bottom wall of the second clamping piece through the through hole, and a reinforcing plate is fixedly provided at the top end of the variable rod.

[0013] Optionally, the variable rod is configured as a metal rod with a coefficient of thermal expansion greater than that of the clamp.

[0014] Optionally, when a hot-cold cycle occurs inside the hot-cold stage, the changing rod slides into contact with the bottom wall of the second clamping plate.

[0015] The probe mounting structure for hot and cold stages provided by the above technical solution is used as follows: The adjustable design of the first clamping piece allows the holder to adapt to probe bodies of different specifications and sizes, enhancing the versatility and compatibility of the structure. It can be used frequently for various types of probes. At the same time, the ring-shaped clamping structure composed of the first and second clamping pieces can restrict the probe body at all angles, effectively preventing the probe body from shaking due to external forces, temperature changes, or its own vibration during use. This ensures that it can always maintain a precise position and posture during measurement, detection and other operations, improving the accuracy and reliability of measurement data. During high-temperature expansion, the increased C-shaped bending of the first and second clamping plates further increases their contact area with the mounting groove on the probe body, significantly enhancing the engagement effect. At this time, the clamping force of the clamp on the probe body also increases significantly, allowing the probe body to maintain a stable position and state. When the probe arm contracts at low temperatures, the length of the variable rod will shorten as the temperature decreases due to thermal expansion. At this time, the reinforcing plate at the top of the variable rod will move downwards, putting pressure on the bottom wall of the second clamping piece. This pressure causes the second clamping piece to move downwards, making the middle of the second clamping piece tightly engaged with the mounting groove. This prevents the probe body from moving upwards even at low temperatures. In this way, the pressure between the probe tip and the sample remains stable, significantly improving the reliability and accuracy of this probe mounting structure during use.

[0016] Other features and advantages of this solution will be described in detail in the following detailed implementation section. Attached Figure Description

[0017] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the following detailed description to explain the present invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention.

[0018] Figure 2 This is a schematic diagram of the split three-dimensional structure of the present invention.

[0019] Figure 3 For the present invention Figure 2 A magnified structural diagram at point A.

[0020] Figure 4 This is a cross-sectional three-dimensional structural diagram of the probe arm of the present invention.

[0021] Figure 5 This is a three-dimensional structural diagram of the clamp of the present invention.

[0022] Figure 6 This is a structural schematic diagram of the cross-section of the clamp of the present invention.

[0023] Explanation of reference numerals in the attached drawings: 101, Hot / Cold stage; 102, Probe arm; 103, Adjustable displacement stage; 104, Probe body; 105, Connecting hole; 201, Mounting hole; 202, Clamp; 203, Mounting groove; 204, First clamping piece; 205, Second clamping piece; 206, Threaded hole; 207, Knob cap; 208, Threaded post; 301, Clamping cavity; 302, Restricting groove; 303, Slide rod; 304, Turntable; 305, Connecting rod; 306, Mounting plate; 401, Notch; 402, Variable rod; 403, Reinforcing plate. Detailed Implementation

[0024] To make the aforementioned objectives, features, and advantages of this solution more apparent and understandable, the specific embodiments of this solution are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this solution. However, this solution can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this solution. Therefore, this solution is not limited to the specific embodiments disclosed below.

[0025] In the description of this solution, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this solution and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this solution. The terms "first" and "second" are used to distinguish one element from another and do not have sequential or importance. Furthermore, in the following description, when referring to the accompanying drawings, the same reference numerals in different drawings indicate the same or similar elements, which will not be repeated here.

[0026] In this solution, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this solution based on the specific circumstances.

[0027] According to some embodiments of this solution, a probe mounting structure for a hot and cold stage is provided, as shown in the reference. Figures 1-6As shown, the probe mounting structure for the hot and cold stage includes a hot and cold stage 101, with several probe arms 102 disposed inside the hot and cold stage 101. An adjustable displacement stage 103 is mounted on the outside of the hot and cold stage 101, and the movable end of the adjustable displacement stage 103 is connected to the probe arms 102. A probe body 104 is detachably mounted on the probe arm 102. A connection hole 105 is provided on the inner wall of the hot and cold stage 101, and the end of the probe arm 102 passes through the connection hole 105 and connects to the movable end of the adjustable displacement stage 103.

[0028] The probe arm 102 has a mounting hole 201, and a clamp 202 is provided in the mounting hole 201. The upper end of the probe body 104 has a mounting groove 203. The probe body 104 is clamped and fixed by the clamp 202, and the mounting groove 203 is engaged with the clamp 202.

[0029] The hot and cold stage 101, probe arm 102, and adjustable displacement stage 103 in this solution are all existing technology products, and therefore will not be described in detail. The difference from the existing technology lies in the internal mounting structure of the probe arm 102.

[0030] Specifically, the mounting hole 201 is inclined, so the probe body 104 inserted into it is installed at an angle, and the clamp 202 is also inclined.

[0031] See Figure 4 and Figure 5 The clamp 202 includes a first clamping piece 204 and a second clamping piece 205. Specifically, the first clamping piece 204 and the second clamping piece 205 are curved arc-shaped pieces with a C-shaped cross-section. Both the first clamping piece 204 and the second clamping piece 205 are made of metal, such as tungsten steel. The first clamping piece 204 and the second clamping piece 205 are symmetrically arranged, forming a ring-shaped clamp that restricts the probe body 104 around its perimeter, preventing the probe body 104 from shaking and improving the stability and reliability of this probe mounting structure during use.

[0032] Additionally, see Figure 3 The probe arm 102 has a threaded hole 206 at the end away from the adjustment displacement stage 103. A knob cap 207 is rotatably provided at the end of the probe arm 102. A threaded post 208 is fixedly installed on the side of the knob cap 207. The threaded post 208 is threadedly engaged with the threaded hole 206.

[0033] Furthermore, the probe arm 102 has a clamping cavity 301 inside, and a limiting groove 302 is provided in the clamping cavity 301. A slide rod 303 is slidably installed in the limiting groove 302. A turntable 304 is rotatably installed on the end wall of the threaded column 208. A connecting rod 305 is fixedly installed at the end of the slide rod 303. The turntable 304 is rotatably connected to the connecting rod 305. The other end of the connecting rod 305 is fixedly connected to the first clamping piece 204.

[0034] Thus, as the knob cap 207 rotates, it drives the threaded post 208, which is closely connected to it, to rotate synchronously. The threaded post 208, with its threaded structure, engages with the threaded hole 206 at the end of the probe arm 102. Under this engagement, the threaded post 208 begins to move laterally, and this lateral movement of the threaded post 208 causes the connecting rod 305 to move along with it. At this time, the limiting groove 302 and the sliding rod 303, through their sliding engagement, set the trajectory and boundary for the movement of the connecting rod 305, ensuring that the connecting rod 305 can only move smoothly in the horizontal direction, avoiding unnecessary offset and wobbling.

[0035] Furthermore, the horizontal movement of the connecting rod 305 directly acts on the first clamping piece 204, enabling the first clamping piece 204 to change its horizontal position according to a preset path. Before the probe body 104 is installed, the operator precisely controls the rotation of the knob cap 207 to move the first clamping piece 204 away from the second clamping piece 205, creating sufficient and suitable space for the insertion of the probe body 104. After the probe body 104 is successfully inserted into the predetermined position, the operator turns the knob cap 207 again. This time, the knob cap 207 causes the first clamping piece 204 to slowly approach the second clamping piece 205. As the two gradually approach each other, they are precisely and firmly inserted into the mounting slot 203 on the probe body 104, achieving a quick, precise, and secure installation and fixation of the probe body 104.

[0036] Furthermore, an mounting plate 306 is fixedly installed inside the clamping cavity 301, and the other end of the mounting plate 306 is fixedly connected to the second clamping piece 205. The second clamping piece 205 in the clamper 202 is fixedly installed in the clamping cavity 301 by the mounting plate 306, while the first clamping piece 204 can be adjusted by rotating the knob cap 207.

[0037] The first clamping piece 204 and the second clamping piece 205 have a plurality of notches 401, which divide the first clamping piece 204 and the second clamping piece 205 into petal shapes.

[0038] Specifically, during the thermal cycling test, the probe arm 102 and the probe body 104 will undergo thermal expansion and contraction. Since the probe arm 102 is made of stainless steel or tungsten steel, its expansion and contraction changes are more pronounced. When the probe arm 102 expands internally, the C-shaped bending degree of the first clamping piece 204 and the second clamping piece 205 increases, further increasing their contact area with the mounting groove 203 on the probe body 104. This significantly strengthens the engagement effect, thereby increasing the clamping force of the clamp 202 on the probe body 104.

[0039] However, in low-temperature environments, when the probe arm 102 retracts, a gap appears between the originally tightly fitted clamp 202 and the mounting groove 203, providing space for the probe body 104 to move upwards. Once the probe body 104 shifts, the pressure between the probe tip and the sample changes, which seriously affects the accuracy and reliability of the probe measurement data, introducing significant errors to scientific research experiments or industrial testing.

[0040] In response, see Figure 5 and Figure 6 The bottom wall of the second clamping piece 205 has a through hole, and a variable rod 402 is fixedly installed in the clamping cavity 301. The variable rod 402 passes through the bottom wall of the second clamping piece 205 through the through hole, and a reinforcing plate 403 is fixedly installed at the top end of the variable rod 402. The variable rod 402 is a metal rod with a coefficient of thermal expansion greater than that of the clamp 202.

[0041] When a hot-cold cycle occurs inside the hot-cold stage 101, the changing rod 402 slides against the bottom wall of the second clamping plate 205. It should be noted that the changing rod 402 is made of high-quality chromium-nickel stainless steel. Chromium-nickel stainless steel has unique physical properties, with a coefficient of thermal expansion of approximately 17.2 × 10⁻⁻⁻⁶. 6 The coefficient of thermal expansion of the chromium-nickel stainless steel rod is greater than that of tungsten steel and tungsten at / ℃. This means that the length change of the chromium-nickel stainless steel rod is more significant when the temperature changes. This solution utilizes the transformation of temperature change into a change in the length of the rod 402, which in turn acts on the second clamping piece 205 through the reinforcing plate 403, bringing a positive effect to the clamp 202.

[0042] Through the above technical solution, the probe mounting structure for hot and cold stages provided by this solution, when in use, first turn the knob cap 207, causing the knob cap 207 to drive the threaded post 208 to rotate. This causes the threaded post 208 to undergo lateral displacement through the threaded engagement with the threaded hole 206. This causes the threaded post 208 to drive the connecting rod 305 to move. By restricting the sliding engagement of the sliding groove 302 and the sliding rod 303, the movement of the connecting rod 305 is restricted, allowing the connecting rod 305 to move only horizontally, thus realizing the change of the horizontal position of the first clamping piece 204. Therefore, before installing the probe body 104, the first clamping piece 204 is controlled to be away from the second clamping piece 205. After the probe body 104 is inserted, the knob cap 207 is turned again to drive the first clamping piece 204 closer to the second clamping piece 205, so that both the first clamping piece 204 and the second clamping piece 205 are engaged in the mounting groove 203 of the probe body 104, realizing the rapid installation and fixation of the probe body 104.

[0043] Furthermore, thanks to the variable rod 402 and the reinforcing plate 403, during thermal expansion, the variable rod 402 and the perforation on the second clamping piece 205 can still slide together. Therefore, the variable rod 402 and the second clamping piece 205 move relative to each other, and the variable rod 402 will not have a negative impact on the second clamping piece 205. During cold contraction, the length of the variable rod 402 decreases, and the reinforcing plate 403 at its top moves down, putting pressure on the bottom wall of the second clamping piece 205. This causes the second clamping piece 205 to move downward, and its arc surface fits tightly against the mounting groove 203. This deepens the engagement between the middle of the second clamping piece 205 and the mounting groove 203, preventing the probe body 104 from moving upward. This ensures the pressure of the probe tip contacting the sample, further improving the reliability and accuracy of this probe mounting structure during use.

[0044] The preferred embodiments of this solution have been described in detail above with reference to the accompanying drawings. However, this solution is not limited to the specific details in the above embodiments. Within the scope of the technical concept of this solution, various simple modifications can be made to the technical solution, and these simple modifications all fall within the protection scope of this solution.

[0045] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable way without contradiction. In order to avoid unnecessary repetition, this solution will not describe the various possible combinations separately.

[0046] Furthermore, various implementations of this solution can be combined in any way, as long as they do not violate the spirit of this solution, they should also be regarded as the content disclosed in this solution.

Claims

1. A probe mounting structure for a hot and cold stage, comprising a hot and cold stage (101), wherein a plurality of probe arms (102) are disposed inside the hot and cold stage (101), and an adjustable displacement stage (103) is mounted on the outside of the hot and cold stage (101), the movable end of the adjustable displacement stage (103) being connected to the probe arms (102), a probe body (104) being detachably mounted on the probe arm (102), and a mounting hole (201) being provided on the probe arm (102), characterized in that, A clamp (202) is provided in the mounting hole (201), and a mounting groove (203) is provided at the upper end of the probe body (104). The probe body (104) is clamped and fixed by the clamp (202), and the mounting groove (203) engages with the clamp (202).

2. The probe mounting structure for a hot and cold stage according to claim 1, characterized in that: The inner wall of the hot and cold stage (101) is provided with a connection hole (105), and the end of the probe arm (102) passes through the connection hole (105) and is connected to the moving end of the adjustment displacement stage (103).

3. The probe mounting structure for a hot and cold stage according to claim 1, characterized in that: The clamp (202) includes a first clamping piece (204) and a second clamping piece (205). The probe arm (102) has a threaded hole (206) at the end away from the adjustment displacement stage (103). A knob cap (207) is rotatably provided at the end of the probe arm (102). A threaded post (208) is fixedly installed on the side of the knob cap (207). The threaded post (208) is threadedly engaged with the threaded hole (206).

4. The probe mounting structure for a hot and cold stage according to claim 3, characterized in that: The first clamping piece (204) and the second clamping piece (205) are configured as curved arc pieces with a C-shaped cross section. Both the first clamping piece (204) and the second clamping piece (205) are made of metal, and the first clamping piece (204) and the second clamping piece (205) are symmetrically arranged.

5. The probe mounting structure for a hot and cold stage according to claim 3, characterized in that: The probe arm (102) has a clamping cavity (301) inside, and a limiting groove (302) is provided in the clamping cavity (301). A slide rod (303) is slidably installed in the limiting groove (302). A turntable (304) is rotatably installed on the end wall of the threaded column (208). A connecting rod (305) is fixedly installed at the end of the slide rod (303). The turntable (304) is rotatably connected to the connecting rod (305). The other end of the connecting rod (305) is fixedly connected to the first clamping piece (204).

6. The probe mounting structure for a hot and cold stage according to claim 5, characterized in that: An mounting plate (306) is fixedly installed inside the clamping cavity (301), and the other end of the mounting plate (306) is fixedly connected to the second clamping piece (205).

7. The probe mounting structure for a hot and cold stage according to claim 3, characterized in that: The first clamping piece (204) and the second clamping piece (205) are provided with a plurality of notches (401), which divide the first clamping piece (204) and the second clamping piece (205) into petal shapes.

8. The probe mounting structure for a hot and cold stage according to claim 5, characterized in that: The bottom wall of the second clamping piece (205) has a through hole, and a variable rod (402) is fixedly installed in the clamping cavity (301). The variable rod (402) passes through the bottom wall of the second clamping piece (205) through the through hole, and a reinforcing plate (403) is fixedly installed at the top end of the variable rod (402).

9. The probe mounting structure for a hot and cold stage according to claim 8, characterized in that: The variable rod (402) is a metal rod with a coefficient of thermal expansion greater than that of the clamp (202).

10. A probe mounting structure for a hot and cold stage according to claim 9, characterized in that: When a hot and cold cycle occurs inside the hot and cold stage (101), the change rod (402) slides in contact with the bottom wall of the second clamping piece (205).

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