Classification method, apparatus and storage medium

By compiling a composite function based on multiple type conditions in semiconductor inspection to generate a type result array, the problem of low classification efficiency caused by compilation time is solved, realizing efficient and fast wafer defect classification, improving equipment yield and reducing costs.

CN122286371APending Publication Date: 2026-06-26FEICESIKAIPU (SHANGHAI) SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202610331124.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-17
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

In existing technologies, the expression group needs to be recompiled each time different semiconductor defects are classified, which results in long compilation time, affects classification efficiency, and cannot meet the needs of rapid production.

Method used

By compiling based on multiple type conditions, an executable composite function is determined, and a type result array is generated based on the composite function and the parameters of the target to be classified, so that the type of the target to be classified can be determined in a single compilation.

Benefits of technology

It reduces the number of compilation steps, improves defect classification efficiency, saves system resources, meets the semiconductor metrology field's demand for efficient and rapid wafer defect classification, increases equipment yield, and reduces costs.

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Abstract

This application discloses a classification method, apparatus, and storage medium, belonging to the field of semiconductor detection technology. The method includes: acquiring multiple type conditions; compiling based on the multiple type conditions to determine an executable composite function; acquiring parameters of the current target to be classified; determining a type result array based on the composite function and the parameters of the current target to be classified, the type result array indicating whether the current target to be classified satisfies some or all of the multiple type conditions; and determining the type of the current target to be classified based on the type result array. This application can reduce the number of compilation iterations, solve the problem of poor classification efficiency caused by compilation time, and improve classification efficiency.
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