A method for femtosecond laser etching of large-area periodic circular ring microgrooves on a hard and brittle material surface
By employing a group processing strategy and sub-ablation modification in the fabrication of optical windows made of hard and brittle materials, the problems of low processing efficiency and depth consistency were solved, enabling the fabrication of large-area, high-precision microgrooves and improving the performance and reliability of optical windows.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 西安应用光学研究所
- Filing Date
- 2026-05-08
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technologies face challenges in manufacturing optical windows from hard and brittle materials, including low processing efficiency, easy deformation of thin optical windows, and difficulty in controlling depth consistency. In particular, there is the problem of nonlinear accumulation of overlapping area depth caused by material history dependence effects.
A group processing strategy is adopted, which divides the processing into two stages: "shaping" and "locking". High-energy pulses are used to process the target morphology first, and then low-energy pulses are used for passivation treatment. By inducing sub-ablation modification, the material damage threshold is raised, and further etching of the overlapping area is avoided.
It has achieved high-precision, consistent-depth microgroove processing on large-area hard and brittle material surfaces, solved the problem of nonlinear accumulation of depth in overlapping areas, improved processing efficiency and quality, and ensured the functionality and reliability of optical windows.
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