Fluid replacement system and control method

Abstract

This application discloses a liquid replenishment system and control method, belonging to the field of semiconductor manufacturing technology. The liquid replenishment system includes a raw material tank, a buffer tank, a supply tank, a cutting device, a liquid level detection unit, and a control unit. The raw material tank is used to store cutting fluid; the buffer tank is connected to the raw material tank via a first drive pump; the supply tank is connected to the buffer tank via a second drive pump; the cutting device includes a machine buffer tank and a machine mixing tank, and the supply tank, machine buffer tank, and machine mixing tank are arranged sequentially from top to bottom, with adjacent tanks connected to each other for gravity-fed liquid supply; the liquid level detection unit is disposed in at least one of the buffer tank, supply tank, and machine buffer tank; the control unit is configured to control the first drive pump and the second drive pump to operate or stop based on the liquid level signal generated by the liquid level detection unit. The liquid replenishment system of this application can realize automatic replenishment of cutting fluid and can also reduce the number of pumps.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a liquid replenishment system and control method. Background Technology

[0002] In the semiconductor industry chain, wafer slicing is a crucial process in processing single-crystal silicon rods into silicon wafers that meet requirements for thickness, flatness, and cleanliness. The semiconductor wafer manufacturing industry's demand for cost reduction is increasing, and large-area silicon wafers have significant advantages in terms of the number of chips produced per unit and unit cost. Therefore, the size of semiconductor silicon substrate wafers is continuously trending towards larger diameters, from the earliest 2-inch and 3-inch wafers to the current mainstream 8-inch and 12-inch wafers, and the 18-inch wafer currently under development.

[0003] In wafer slicing, the supply of cutting fluid is a critical step. The cutting fluid is supplied to the cutting equipment to provide cooling, lubrication, and cleaning. However, current technologies rely on manual inspection and replenishment. When the cutting fluid runs out, operators often fail to detect it in time, leading to equipment downtime or decreased processing quality. Furthermore, frequent manual replenishment increases labor costs. In addition, multiple pump sets are needed to transport the cutting fluid from the raw material tank to the cutting equipment, and booster pumps are also required within the cutting equipment to deliver the cutting fluid. This results in a large number of pumps, high energy consumption, significant equipment investment, and high maintenance costs. Summary of the Invention

[0004] This application provides a fluid replenishment system that can automatically replenish cutting fluid and reduce the number of pumps.

[0005] Another objective of this application is to provide a control method.

[0006] To achieve the above objectives, according to a first aspect of this application, a fluid resuscitation system is provided, comprising: A raw material tank, wherein the raw material tank is used to store cutting fluid; A buffer tank, which is connected to the raw material tank via a first drive pump, is used to store cutting fluid from the raw material tank; A liquid supply tank, which is connected to the buffer tank via a second drive pump; A cutting device, comprising a machine buffer tank and a machine mixing tank, wherein the liquid supply tank, the machine buffer tank and the machine mixing tank are arranged sequentially from top to bottom, and adjacent ones are connected to supply liquid by gravity; A liquid level detection unit is disposed in at least one of the buffer tank, the supply tank, and the machine buffer tank; The control unit is communicatively connected to the first drive pump, the second drive pump, and the liquid level detection unit, and is configured to control the first drive pump and the second drive pump to operate or stop according to the liquid level signal generated by the liquid level detection unit.

[0007] Optionally, the supply tank is provided with a first overflow port, which is connected to the buffer tank via a third pipeline; and / or, The buffer tank is provided with a second overflow port, wherein the second overflow port is connected to the raw material tank through a fourth pipeline; or, the replenishment system further includes a reflux buffer tank, wherein the second overflow port is connected to the reflux buffer tank through a fourth pipeline.

[0008] Optionally, the buffer tank is connected to the raw material tank via a first pipeline, and the first drive pump is disposed on the first pipeline; The first pipeline is also equipped with a proximity switch, which is used to detect whether cutting fluid flows in the first pipeline when the first drive pump is running; and / or, The first pipeline is also equipped with a first one-way valve, which is used to prevent the cutting fluid in the buffer tank from flowing back to the raw material tank; and / or, The first pipeline is also provided with at least one first control valve, which is used to control the opening and closing of the first pipeline.

[0009] Optionally, the supply tank is connected to the buffer tank via a second pipeline, and the second drive pump is disposed on the second pipeline; The second pipeline is further equipped with a second one-way valve, which prevents the cutting fluid in the supply tank from flowing back into the buffer tank; and / or, The second pipeline is also equipped with at least one second control valve, which is used to control the on / off state of the second pipeline; and / or, The number of the second drive pumps is one or more. When there are multiple second drive pumps, the multiple second drive pumps are arranged in parallel.

[0010] Optionally, the cutting device further includes a pure water supply unit for supplying pure water to the machine mixing tank.

[0011] Optionally, the liquid supply tank is connected to the machine's buffer tank via a fifth pipeline, the fifth pipeline being equipped with a third control valve for controlling the on / off state of the fifth pipeline; and / or, The machine's buffer box and the machine's mixing box are connected via a sixth pipeline, which is equipped with a fourth control valve. The fourth control valve is used to control the on / off state of the sixth pipeline; and / or, The pure water supply unit and the mixing tank of the machine are connected by a seventh pipeline, which is equipped with a fifth control valve for controlling the on / off state of the seventh pipeline; and / or, The orthographic projection of the end of the machine buffer box facing the machine mixing box in the direction of gravity is located within the range of the orthographic projection of the end of the machine buffer box facing away from the machine mixing box in the direction of gravity.

[0012] Optionally, the mixing chamber of the machine is provided with a third overflow port, which is connected to the mixing chamber of the machine via an eighth pipeline. The cutting device also includes an overflow box, which is located on the eighth pipeline. The eighth pipeline is also provided with a filter and a third drive pump. The overflow tank is equipped with the liquid level detection unit, and the third drive pump is communicatively connected to the control unit. The control unit is configured to control the third drive pump to operate or stop based on the liquid level signal detected by the liquid level detection unit in the overflow tank; and / or, The eighth pipeline is also equipped with at least one sixth control valve, which is used to control the on / off state of the eighth pipeline.

[0013] Optionally, the cutting device further includes a defoamer supply unit for adding defoamer to the machine mixing tank; The defoamer supply unit is equipped with the liquid level detection unit; and / or, The mixing chamber of the machine is equipped with a foam detection unit. The defoamer supply unit and the mixing chamber of the machine are connected through a ninth pipeline. The ninth pipeline is equipped with a seventh control valve. The foam detection unit and the seventh control valve are respectively connected to the control unit. The control unit is configured to control the seventh control valve to open or close according to the detection signal of the foam detection unit.

[0014] Optionally, the raw material tank, the buffer tank, the liquid supply tank, and the cutting device are arranged in spatial layers; The raw material tank and the buffer tank are both located on the first layer, and the liquid supply tank and the cutting device are both located on the second layer, which is above the first layer.

[0015] According to a second aspect of this application, a control method is provided, applied to a fluid replacement system as described in any one of the above claims, the control method comprising: Liquid level detection step: The current liquid level in the buffer tank, the supply tank, or the machine buffer tank is detected by the liquid level detection unit; Liquid level comparison and execution steps: The current liquid level is compared with multiple preset liquid level thresholds, and the first drive pump and the second drive pump are controlled to operate or stop according to the comparison results.

[0016] Optionally, the plurality of liquid level thresholds includes at least one of a first threshold, a second threshold, a third threshold, and a fourth threshold: The liquid level comparison and execution steps include: If the current liquid level is lower than or equal to the first threshold, a prompt for manual intervention will be made; When the current liquid level is lower than or equal to the second threshold and higher than the first threshold, control the first drive pump and / or the second drive pump to operate; If the current liquid level rises to the third threshold, control the first drive pump and / or the second drive pump to stop. If the current liquid level rises to the fourth threshold, prompt for manual intervention and stop the replenishment.

[0017] Optionally, the control method further includes: an automatic solution preparation step; The automatic liquid preparation step includes: the pure water supply unit adding pure water to the machine mixing tank, and the machine buffer tank adding cutting fluid to the machine mixing tank.

[0018] Optionally, the control method further includes: an ultra-high liquid level reflux step; The ultra-high liquid level reflux step includes: when the liquid level in the supply tank exceeds the first overflow port of the supply tank, the excess cutting fluid is refluxed back to the buffer tank through a third pipeline; and / or If the liquid level in the buffer tank exceeds the second overflow port of the buffer tank, the excess cutting fluid will flow back to the return buffer tank or the raw material tank through the fourth pipeline.

[0019] Optionally, the control method further includes an overflow defoaming step; The overflow defoaming step includes: when the liquid level in the mixing tank of the machine exceeds the third overflow port, the excess mixture flows back to the overflow tank through the eighth pipeline, and the mixture in the overflow tank then flows back to the mixing tank of the machine through the eighth pipeline, wherein the eighth pipeline is also equipped with a filter and a third drive pump; and / or, When the amount of foam in the mixture in the mixing tank of the machine reaches a preset value, the control unit controls the seventh control valve to open so that the defoamer supply unit adds defoamer to the mixing tank of the machine.

[0020] In the fluid replenishment system of this application embodiment, a liquid level detection unit and a control unit are set up. The control unit is communicatively connected to the first drive pump, the second drive pump, and the liquid level detection unit. The control unit is configured to control the first drive pump and the second drive pump to operate or stop according to the liquid level signal generated by the liquid level detection unit. This enables automatic replenishment of cutting fluid, which not only improves the stability and continuity of equipment operation, thereby improving production efficiency and product quality, but also reduces the frequency of operator inspections and manual fluid replenishment, thus reducing labor costs. By arranging the machine buffer tank and machine mixing tank, the fluid supply tank, the machine buffer tank, and the machine mixing tank sequentially from top to bottom, with adjacent tanks connected, multi-stage fluid supply is achieved using gravity. This not only reduces the number of pumps, thereby reducing equipment costs and energy consumption, but also reduces potential failure points, thereby reducing maintenance costs and improving the stability of fluid supply.

[0021] The control method of this application embodiment is applied to a fluid replenishment system. The control method has the beneficial effects produced by the fluid replenishment system, which will not be described in detail here.

[0022] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0025] Figure 1 This is a schematic diagram of the structure of a fluid replenishment system provided in an exemplary embodiment of this application; Figure 2 This is a schematic diagram of another fluid replenishment system provided in an exemplary embodiment of this application; Figure 3 This is a schematic diagram of the liquid supply tank and cutting device provided in an exemplary embodiment of this application.

[0026] Explanation of reference numerals in the attached figures: 1. Raw material tank; 11. First pipeline; 12. First drive pump; 13. Proximity switch; 14. First check valve; 15. First control valve; 2. Buffer tank; 21. Second pipeline; 22. Second drive pump; 23. Second overflow port; 24. Fourth pipeline; 25. Second check valve; 26. Second control valve; 3. Supply tank; 31. First overflow port; 32. Third pipeline; 33. Fifth pipeline; 34. Third control valve; 4. Cutting device; 41. Machine buffer tank; 411. Sixth pipeline; 412. Fourth control valve; 42. Machine mixing tank; 421. Third overflow port; 422. Eighth pipeline; 423. Foam detection unit; 424. Second drain outlet; 43. Pure water supply unit; 431. Seventh pipeline; 432. Fifth control valve; 44. Overflow tank; 441. Filter; 442. Third drive pump; 443. Sixth control valve; 45. Defoamer supply unit; 451. Ninth pipeline; 452. Seventh control valve; 5. Liquid level detection unit; 51. First liquid level detection unit; 52. Second liquid level detection unit; 53. Third liquid level detection unit; 54. Fourth liquid level detection unit; 55. Fifth liquid level detection unit; 56. Sixth liquid level detection unit; 6. Control unit; 7. Return buffer tank; 71. First drain outlet; 8. First layer; 9. Second layer. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. In addition, it should be understood that the specific embodiments described herein are only for illustration and explanation of this application and are not intended to limit this application. In this application, unless otherwise stated, directional terms such as "up," "down," "left," and "right" generally refer to up, down, left, and right in the actual use or working state of the device, specifically the drawing directions in the accompanying drawings.

[0028] In this application, unless otherwise expressly specified and limited, the terms "connected," "linked," "stacked," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two elements or the interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0029] This application provides a fluid replacement system and a control method, which are described in detail below. It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of the embodiments of this application. Furthermore, the descriptions of each embodiment have their own emphasis; parts not described in detail in a certain embodiment can be referred to in the relevant descriptions of other embodiments.

[0030] According to the first aspect of this application, referring to Figure 1 One embodiment of this application provides a liquid replenishment system, which may include: a raw material tank 1, a buffer tank 2, a liquid supply tank 3, a cutting device 4, a liquid level detection unit 5, and a control unit 6.

[0031] Specifically, refer to Figure 1 Raw material tank 1 is used to store cutting fluid. Raw material tank 1 can be made of plastic or metal, etc. Raw material tank 1 can be any suitable capacity storage container, for example, its volume can be 200L, 500L, or 1000L. Raw material tank 1 can be equipped with an inlet and an outlet. The inlet of raw material tank 1 is used to replenish new cutting fluid, and the outlet of raw material tank 1 is used to supply fluid to downstream equipment. In practical applications, raw material tank 1 can be placed at the bottom of the fluid replenishment system (i.e., the first layer 8) to facilitate operator replacement and replenishment of materials. To facilitate observation of the liquid level in raw material tank 1, raw material tank 1 can be made of transparent material or equipped with a liquid level observation window.

[0032] Reference Figure 1 The buffer tank 2 can be connected to the raw material tank 1 via the first drive pump 12. The buffer tank 2 stores the cutting fluid from the raw material tank 1, serving as a buffer and intermediate storage. The buffer tank 2 can also be equipped with an inlet and an outlet. The inlet of the buffer tank 2 receives the cutting fluid from the raw material tank 1, and the outlet of the buffer tank 2 supplies fluid to subsequent equipment. The inlet of the buffer tank 2 can be connected to the outlet of the raw material tank 1 via a first pipeline 11, and the first drive pump 12 can be installed on the first pipeline 11. The volume of the buffer tank 2 can be selected according to actual needs, such as 50L, 100L, or 200L. By setting up the buffer tank 2, the fluid supply can be prevented from being interrupted when the raw material tank 1 is changed, and the cutting fluid can also be initially stabilized and settled. The buffer tank 2 can be located on the first layer 8, on the same layer as the raw material tank 1, for easy pipeline connection and maintenance.

[0033] Reference Figure 1The supply tank 3 can be connected to the buffer tank 2 via the second drive pump 22. The supply tank 3 may also have an inlet and an outlet. The inlet of the supply tank 3 is used to receive cutting fluid from the buffer tank 2, and the outlet of the supply tank 3 is used to supply fluid to subsequent equipment. The inlet of the supply tank 3 can be connected to the outlet of the buffer tank 2 via a second pipe 21. To utilize gravity for fluid supply, the supply tank 3 can be positioned at a higher location, such as on the upper level (i.e., the second layer 9). The volume of the supply tank 3 can be set to be similar to or slightly smaller than that of the buffer tank 2, such as 30L, 50L, or 80L.

[0034] Reference Figure 1 The cutting device 4 may include a machine buffer tank 41 and a machine mixing tank 42. The supply tank 3, machine buffer tank 41, and machine mixing tank 42 are arranged sequentially from top to bottom, with adjacent tanks connected to each other for gravity-fed fluid supply. This top-down layout allows the cutting fluid to flow from the supply tank 3 to the machine buffer tank 41 and then to the machine mixing tank 42 under gravity, eliminating the need for a drive pump at each level. This reduces equipment costs, energy consumption, and simplifies control logic, while also reducing potential failure points, thus lowering maintenance costs and improving fluid supply stability. As an example, the supply tank 3 may be located above the machine buffer tank 41, and its outlet and the inlet of the machine buffer tank 41 may be connected via a fifth pipe 33. The machine buffer tank 41 may be located above the machine mixing tank 42, and its outlet and the inlet of the machine mixing tank 42 may be connected via a sixth pipe 411.

[0035] In some embodiments, the orthographic projection of the end of the machine buffer tank 41 facing the machine mixing tank 42 in the direction of gravity is located within the range of the orthographic projection of the end of the machine buffer tank 41 facing away from the machine mixing tank 42 in the direction of gravity. As an example, the machine buffer tank 41 can adopt an inverted barn-shaped structure, thus giving the machine buffer tank 41 a conical or truncated conical shape, which is beneficial for the first-in-first-out of the cutting fluid and pressurized fluid supply.

[0036] The mixing tank 42 may also be provided with a second drain port 424 for discharging the liquid inside the mixing tank 42. The second drain port 424 can be connected to a drainage system or a recycling system, so that the liquid can be collected and treated, thereby further reducing the risk of environmental pollution.

[0037] Reference Figure 1The liquid level detection unit 5 can be installed in at least one of the buffer tank 2, the supply tank 3, and the machine buffer tank 41. The liquid level detection unit 5 can be any sensor capable of detecting liquid level, such as a float-type liquid level sensor, an ultrasonic liquid level sensor, a pressure-type liquid level sensor, or a capacitive liquid level sensor. The liquid level detection unit 5 is used to detect the liquid level in the corresponding container and generate a corresponding liquid level signal. The liquid level signal can be an analog signal or a digital signal.

[0038] The number of liquid level detection units 5 can be one or more. In this embodiment, the number of liquid level detection units 5 can be multiple. Multiple liquid level detection units 5 may include a first liquid level detection unit 51, a second liquid level detection unit 52, and a third liquid level detection unit 53. The first liquid level detection unit 51 is disposed in the buffer tank 2 and is used to detect the liquid level in the buffer tank 2. The second liquid level detection unit 52 is disposed in the supply tank 3 and is used to detect the liquid level in the supply tank 3. The third liquid level detection unit 53 is disposed in the machine buffer tank 41 and is used to detect the liquid level in the machine buffer tank 41.

[0039] The control unit 6 can be communicatively connected to the first drive pump 12, the second drive pump 22, and the liquid level detection unit 5, respectively. The control unit 6 can be a programmable logic controller, a microcontroller, a digital signal processor, an industrial computer, or any other device with data processing and control functions. The control unit 6 is configured to control the operation or shutdown of the first drive pump 12 and the second drive pump 22 based on the liquid level signal generated by the liquid level detection unit 5.

[0040] As an example, the control unit 6 can receive a liquid level signal from the liquid level detection unit 5, compare the current liquid level with a preset liquid level threshold, and make a control decision based on the comparison result. For instance, when the liquid level in the machine buffer tank 41 is lower than the preset intermediate liquid level, the control unit 6 can control the second drive pump 22 to start, replenishing liquid from the buffer tank 2 to the supply tank 3. When the liquid level in the supply tank 3 is lower than the preset value, the control unit 6 can control the first drive pump 12 to start, replenishing liquid from the raw material tank 1 to the buffer tank 2. This improves the stability of the continuous supply of cutting fluid, thereby reducing equipment downtime due to liquid shortage.

[0041] Control unit 6 also has data processing and storage functions, capable of recording liquid level change history, pump operating time, alarm information, etc., facilitating equipment maintenance and troubleshooting. Furthermore, control unit 6 can communicate with automation systems to achieve remote monitoring and data management.

[0042] In this application, by setting up a liquid level detection unit 5 and a control unit 6, the control unit 6 is communicatively connected to the first drive pump 12, the second drive pump 22, and the liquid level detection unit 5. The control unit 6 is configured to control the first drive pump 12 and the second drive pump 22 to operate or stop according to the liquid level signal generated by the liquid level detection unit 5. This enables automatic replenishment of the cutting fluid, which not only improves the stability and continuity of equipment operation, thereby improving production efficiency and product quality, but also reduces the frequency of operator inspections and manual replenishment, thus reducing labor costs. By arranging the machine buffer tank 41 and the machine mixing tank 42, the liquid supply tank 3, the machine buffer tank 41, and the machine mixing tank 42 sequentially from top to bottom, with adjacent tanks connected, multi-stage liquid supply is achieved using gravity. This not only reduces the number of pumps, thereby reducing equipment costs and energy consumption, but also reduces potential failure points, thereby reducing maintenance costs and improving the stability of the liquid supply.

[0043] In some embodiments, refer to Figure 1 The supply tank 3 may be equipped with a first overflow port 31, which is connected to the buffer tank 2 via a third pipe 32. The first overflow port 31 may be located on the upper side wall of the supply tank 3, and its height may correspond to the upper limit of the safe liquid level of the supply tank 3. When the liquid level in the supply tank 3 exceeds the position of the first overflow port 31, the excess cutting fluid can automatically flow out through the first overflow port 31 and return to the buffer tank 2 via the third pipe 32. In this way, even if the liquid replenishment control fails, such as the second drive pump 22 failing to stop in time, the cutting fluid in the supply tank 3 will not overflow outside the equipment, but will flow back into the buffer tank 2, thereby reducing the risk of cutting fluid waste and environmental pollution, and also improving the safety of the system.

[0044] Reference Figure 1 and Figure 2 The buffer tank 2 may be provided with a second overflow port 23, which may be located on the upper side wall of the buffer tank 2. As an example, the second overflow port 23 is connected to the raw material tank 1 through a fourth pipe 24. Alternatively, the replenishment system may also include a return buffer tank 7, and the second overflow port 23 is connected to the return buffer tank 7 through a fourth pipe 24.

[0045] The second overflow outlet 23 offers two selectable return paths. (Refer to...) Figure 2 One method involves connecting the fourth pipe 24 to either the raw material tank 1 or the first pipe 11, allowing excess cutting fluid to flow back to either the raw material tank 1 or the first pipe 11. (See reference...) Figure 1Alternatively, the replenishment system may include a return buffer tank 7, with the second overflow port 23 connected to the return buffer tank 7 via a fourth pipe 24. The return buffer tank 7 can be a container specifically designed to collect overflow liquid, and its volume can be set as needed. When the liquid level in the buffer tank 2 exceeds the position of the second overflow port 23, the excess cutting fluid can flow back to the raw material tank 1 or the first pipe 11 via the fourth pipe 24, or it can flow back to the return buffer tank 7 via the fourth pipe 24. The second overflow port 23 also serves to prevent overflow and improve safety.

[0046] Reference Figure 1 The reflux buffer tank 7 may be equipped with a liquid level detection unit 5, which may be a sixth liquid level detection unit 56, used to detect the liquid level in the reflux buffer tank 7. When the liquid level in the reflux buffer tank 7 reaches the set value, the cutting fluid can be pumped to the raw material tank 1 or the operator can be notified to handle the situation.

[0047] The reflux buffer tank 7 may also be equipped with a first drain port 71 for discharging the liquid inside the reflux buffer tank 7. The first drain port 71 can be connected to a drainage system or a recycling system, so that the liquid can be collected and treated, thereby further reducing the risk of environmental pollution.

[0048] In some embodiments, refer to Figure 1 The first pipeline 11 can also be equipped with a proximity switch 13, which is used to detect whether there is cutting fluid flowing in the first pipeline 11 when the first drive pump 12 is running. The proximity switch 13 can be an inductive proximity switch, a capacitive proximity switch, or a photoelectric proximity switch, etc. As an example, the working principle of the proximity switch 13 is as follows: when the first pipeline 11 is full of liquid, the proximity switch 13 detects the presence of the medium and outputs a signal; when there is no liquid in the first pipeline 11 (i.e., the raw material tank 1 is empty), the proximity switch 13 outputs different signals. The control unit 6 can determine whether the raw material tank 1 is low on liquid based on the signal from the proximity switch 13. When the material is detected to be emptied, the control unit 6 can trigger a buzzer alarm (not shown) or other alarm signals to prompt the operator to replace the raw material tank 1 or replenish the cutting fluid in time. This can reduce the risk of liquid supply interruption and equipment shutdown due to material depletion.

[0049] The first pipeline 11 may also be equipped with a first check valve 14, which is used to prevent the cutting fluid in the buffer tank 2 from flowing back to the raw material tank 1. The flow direction of the first check valve 14 is set to allow the cutting fluid to flow from the raw material tank 1 to the buffer tank 2, while preventing the cutting fluid from flowing back from the buffer tank 2 to the raw material tank 1. As an example, the first check valve 14 can be located downstream of the first drive pump 12. When the first drive pump 12 stops operating, the first pipeline 11 in the area of ​​the first drive pump 12 can be kept full of cutting fluid, which not only allows for rapid establishment of fluid supply upon the next startup, improving the response speed, but also reduces the risk of pump damage due to cavitation.

[0050] The first pipeline 11 may also be equipped with at least one first control valve 15, which is used to control the opening and closing of the first pipeline 11. The first control valve 15 can be a manual valve (such as a ball valve, a gate valve, etc.) or an automatic valve (such as a pneumatic valve, a solenoid valve, an electric valve, etc.). The manual valve is convenient for shutting off the first pipeline 11 in scenarios such as maintenance, replacement of parts, or failure of the automatic valve. The automatic valve can work with the control unit 6 to achieve remote control and automated operation. As an example, there can be two first control valves 15: a manual ball valve is installed in the first pipeline 11 between the raw material tank 1 and the first drive pump 12, and a pneumatic valve is installed in the first pipeline 11 between the first drive pump 12 and the buffer tank 2, so as to facilitate flexible control.

[0051] In some embodiments, refer to Figure 1 The second pipeline 21 may also be equipped with a second check valve 25, which is used to prevent the cutting fluid in the supply tank 3 from flowing back to the buffer tank 2. The flow direction of the second check valve 25 is set to allow the cutting fluid to flow from the buffer tank 2 to the supply tank 3, while preventing the cutting fluid from flowing back from the supply tank 3 to the buffer tank 2. As an example, the second check valve 25 can be located downstream of the second drive pump 22. When the second drive pump 22 stops operating, the second pipeline 21 in the area of ​​the second drive pump 22 can be kept full of cutting fluid, which not only allows for rapid establishment of the fluid supply upon the next startup, improving the response speed, but also reduces the risk of pump damage due to cavitation.

[0052] The second pipeline 21 may also be equipped with at least one second control valve 26, which is used to control the opening and closing of the second pipeline 21. The second control valve 26 can be a manual valve (such as a ball valve, gate valve, etc.) or an automatic valve (such as a pneumatic valve, solenoid valve, electric valve, etc.). The manual valve is convenient for shutting off the second pipeline 21 in scenarios such as maintenance, replacement of parts, or failure of the automatic valve. The automatic valve can be used in conjunction with the control unit 6 to achieve remote control and automated operation.

[0053] The number of second drive pumps 22 can be one or more. If there are multiple second drive pumps 22, they can be connected in parallel. This increases the fluid supply flow rate to meet high flow rate requirements and also increases the fluid supply pressure, allowing the cutting fluid to be delivered to higher positions. Furthermore, multiple second drive pumps 22 can provide redundancy; if one second drive pump 22 fails, the others can continue to operate, thus improving system reliability. For example, two second drive pumps 22 can be configured, one as the working pump and the other as a standby pump. When the working pump fails, the control unit 6 can automatically switch to the standby pump and issue an alarm signal to notify maintenance personnel.

[0054] As an example, when there are two second drive pumps 22, the number of second control valves 26 can be five, of which four can be manual ball valves and the other can be a pneumatic valve. Each second drive pump 22 can be equipped with a manual ball valve at its inlet and outlet. When one of the second drive pumps 22 needs to be stopped, this can be achieved by closing the manual ball valves at both ends of that second drive pump 22. This not only isolates that second drive pump 22 from the others but also allows for maintenance, replacement, and other operations on that second drive pump 22. A pneumatic valve is installed in the second pipeline 21 between the second check valve 25 and the supply tank 3 for flexible control.

[0055] In some embodiments, refer to Figure 1 and Figure 3 The cutting device 4 may also include a pure water supply unit 43, which can be connected to the machine mixing tank 42. The pure water supply unit 43 is used to supply pure water to the machine mixing tank 42. Pure water and cutting fluid can be mixed in the machine mixing tank 42 according to a preset ratio to form a mixture for cutting.

[0056] In some embodiments, refer to Figure 1 and Figure 3 The liquid supply tank 3 and the machine buffer tank 41 can be connected via a fifth pipeline 33. The fifth pipeline 33 may be equipped with a third control valve 34, which controls the opening and closing of the fifth pipeline 33. The third control valve 34 can be a pneumatic valve, a solenoid valve, or an electric valve, etc., and can communicate with the control unit 6. The control unit 6 can control the opening and closing of the third control valve 34 based on the liquid level signal of the machine buffer tank 41, thereby achieving automatic liquid replenishment of the machine buffer tank 41.

[0057] The machine buffer tank 41 and the machine mixing tank 42 can be connected via a sixth pipeline 411. The sixth pipeline 411 can be equipped with a fourth control valve 412, which controls the opening and closing of the sixth pipeline 411. The fourth control valve 412 can be a pneumatic valve, a solenoid valve, or an electric valve, and it can also communicate with the control unit 6. By controlling the opening time or degree of the fourth control valve 412, the supply of cutting fluid from the machine buffer tank 41 to the machine mixing tank 42 can be controlled.

[0058] The pure water supply unit 43 and the mixing tank 42 can be connected via a seventh pipeline 431. A fifth control valve 432 can be installed on the seventh pipeline 431 to control its on / off state. The fifth control valve 432 can be a pneumatic valve, a solenoid valve, or an electric valve, and it can communicate with the control unit 6.

[0059] In this application, by setting a fourth control valve 412 and a fifth control valve 432, the replenishment system has an automatic liquid preparation function. As an example, when liquid preparation is required, the control unit 6 first controls the fifth control valve 432 to open, adding pure water to the machine mixing tank 42; once the amount of pure water added reaches a preset value, the control unit 6 closes the fifth control valve 432, then controls the fourth control valve 412 to open, adding cutting fluid to the machine mixing tank 42; once the amount of cutting fluid added reaches a preset value, the control unit 6 closes the fourth control valve 412. By controlling the opening time of the fourth control valve 412 and the fifth control valve 432, or by using a flow meter or other methods for metering, a precise ratio of pure water and cutting fluid can be achieved. This sequential independent working logic of adding water first and then liquid can accurately control the ratio of pure water and cutting fluid, improving the stability of the cutting fluid concentration and thus improving the slicing quality. In other embodiments, pure water and cutting fluid can be added to the machine mixing tank 42 simultaneously, or the cutting fluid can be added first and then the pure water.

[0060] In some embodiments, refer to Figure 1 and Figure 3The mixing tank 42 of the machine tool can be equipped with a third overflow port 421. The third overflow port 421 can be connected to the mixing tank 42 via an eighth pipe 422 to form a circulation loop. For example, one end of the eighth pipe 422 can be connected to the third overflow port 421, and the other end of the eighth pipe 422 can be connected to the bottom or lower side wall of the mixing tank 42. The cutting device 4 can also include an overflow tank 44, which can be installed in the eighth pipe 422. The overflow tank 44 serves as a buffer and temporary storage, preventing waste and pollution caused by overflow liquid discharge. The eighth pipe 422 can also be equipped with a filter 441 and a third drive pump 442. The filter 441 can filter out impurities in the mixture, such as foam, silica powder, cutting debris, etc., to improve the cleanliness of the return liquid. The number of filters 441 can be one or more. In this embodiment, there are two filters 441. One filter 441 is installed on the eighth pipeline 422 between the third overflow port 421 and the overflow tank 44, and the other filter 441 is installed on the eighth pipeline 422 between the third drive pump 442 and the machine mixing tank 42. The third drive pump 442 can be installed downstream of the overflow tank 44 to pump the mixture in the overflow tank 44 to the machine mixing tank 42.

[0061] As an example, when the liquid level in the machine mixing tank 42 exceeds the position of the third overflow port 421, the excess mixture (a mixture of cutting fluid and pure water, which may contain foam) flows out through the third overflow port 421, is filtered by one of the filters 441, and then enters the overflow tank 44. The mixture in the overflow tank 44, driven by the third drive pump 442, is filtered by another filter 441 and then flows back to the machine mixing tank 42.

[0062] The overflow tank 44 may be equipped with a liquid level detection unit 5, which may be a fourth liquid level detection unit 54, used to detect the liquid level in the overflow tank 44. Both the fourth liquid level detection unit 54 and the third drive pump 442 can be communicatively connected to the control unit 6. The control unit 6 is configured to control the third drive pump 442 to operate or stop based on the liquid level signal generated by the liquid level detection unit 5. For example, the fourth liquid level detection unit 54 detects the liquid level in the overflow tank 44 and outputs a liquid level signal. When the liquid level in the overflow tank 44 reaches a set value, the control unit 6 starts the third drive pump 442 to pump back; when the liquid level drops to a low level, the third drive pump 442 stops.

[0063] The eighth pipeline 422 may also be equipped with at least one sixth control valve 443, which is used to control the on / off state of the eighth pipeline 422. The sixth control valve 443 can be a manual valve (such as a ball valve, shut-off valve, etc.) or an automatic valve (such as a pneumatic valve, solenoid valve, electric valve, etc.). The manual valve facilitates the shut-off of the eighth pipeline 422 in scenarios such as maintenance, component replacement, or automatic valve malfunction. The automatic valve can work with the control unit 6 to achieve remote control and automated operation. As an example, there can be two sixth control valves 443: a manual ball valve is installed on the eighth pipeline 422 between the overflow tank 44 and the third drive pump 442, and a pneumatic valve is installed on the eighth pipeline 422 between the third drive pump 442 and the machine mixing tank 42, for flexible control.

[0064] In this application, by setting up an overflow tank 44, the risk of working environment contamination caused by bubbling and overflowing cutting fluid can be reduced. Simultaneously, the overflowing cutting fluid can be recycled, achieving cutting fluid recycling, reducing material waste, and lowering production costs. By setting up a filter 441, the cleanliness of the recycled fluid can be improved, reducing the impact of impurities on cutting quality.

[0065] In some embodiments, refer to Figure 1 and Figure 3 The cutting device 4 may also include an antifoaming agent supply unit 45, which adds antifoaming agent to the machine mixing tank 42. Antifoaming agent is a chemical additive that can reduce the surface tension of a liquid and eliminate foam. During the circulation of the cutting fluid, foam is easily generated due to mechanical stirring, liquid flow, etc. Excessive foam can lead to overflow (liquid leakage) problems and also affect the cooling and lubrication effects of the cutting fluid. By adding antifoaming agent, foam can be eliminated, allowing the cutting fluid to be used normally.

[0066] The defoamer supply unit 45 may be equipped with a liquid level detection unit 5, which may be the fifth liquid level detection unit 55, for detecting the liquid level in the defoamer supply unit 45. When the defoamer is insufficient, an alarm is issued to prompt the operator to replenish it.

[0067] The mixing chamber 42 can be equipped with a foam detection unit 423. The foam detection unit 423 can be any sensor capable of detecting the foam content in a liquid, such as a photoelectric foam sensor, a capacitive foam sensor, or an ultrasonic foam sensor. The defoamer supply unit 45 and the mixing chamber 42 can be connected via a ninth pipe 451. The ninth pipe 451 can be equipped with a seventh control valve 452, which controls the opening and closing of the ninth pipe 451. The seventh control valve 452 can be a pneumatic valve, a solenoid valve, or an electric valve. The foam detection unit 423 and the seventh control valve 452 can each communicate with the control unit 6. The control unit 6 is configured to control the seventh control valve 452 to open or close based on the detection signal from the foam detection unit 423, thereby achieving automatic addition of the defoamer.

[0068] As an example, when the foam detection unit 423 detects that the amount of foam in the mixing tank 42 of the machine has reached a preset threshold, the control unit 6 can control the seventh control valve 452 to open, and the defoamer supply unit 45 adds a certain amount of defoamer to the mixing tank 42 of the machine; after the amount of foam drops to a safe range, the control unit 6 can close the seventh control valve 452. This allows the foam to be dealt with in a timely manner, reducing the uncertainty and lag risk of manually adding defoamer.

[0069] In some embodiments, refer to Figure 1 and Figure 2 The raw material tank 1, buffer tank 2, supply tank 3, and cutting device 4 are arranged in spatial layers. Both raw material tank 1 and buffer tank 2 can be located on the first layer 8, and both supply tank 3 and cutting device 4 can be located on the second layer 9, which is above the first layer 8. As an example, the first layer 8 can be the ground floor, and the second layer 9 can be an upper platform or mezzanine. The machine buffer tank 41 and machine mixing tank 42 in the cutting device 4 are located on the second layer 9, on the same level as the supply tank 3, but the supply tank 3 is higher than the machine buffer tank 41, and the machine buffer tank 41 is higher than the machine mixing tank 42, to facilitate gravity-fed liquid supply.

[0070] In this application, a spatially layered layout is adopted, which can isolate the fluid replenishment system from the processing equipment, facilitate centralized management and maintenance, thereby shortening troubleshooting and repair time. It also allows for a more organized pipeline layout, shortens pipeline length, and reduces fluid flow resistance. In addition, the raw material tank 1 is located on the first layer 8, which facilitates the operation of operators to replace the raw material tank 1 and perform equipment maintenance. The fluid supply tank 3 and the cutting device 4 are located on the second layer 9, which helps to improve the cleanliness of the cutting fluid.

[0071] According to a second aspect of this application, one embodiment of this application provides a control method applied to the liquid replenishment system as described above. The control method includes a liquid level detection step and a liquid level comparison and execution step.

[0072] Liquid level detection steps: The current liquid level in the buffer tank 2, the supply tank 3, or the machine buffer tank 41 is detected by the liquid level detection unit 5.

[0073] Specifically, the replenishment system is started, and the control unit 6 initializes various parameters, including setting the liquid level thresholds and pump operating parameters. The control unit 6 reads the liquid level signal from the first liquid level detection unit 51 located in the buffer tank 2 to obtain the current liquid level of the buffer tank 2. The control unit 6 reads the liquid level signal from the second liquid level detection unit 52 located in the supply tank 3 to obtain the current liquid level of the supply tank 3. The control unit 6 reads the liquid level signal from the third liquid level detection unit 53 located in the machine buffer tank 41 to obtain the current liquid level of the machine buffer tank 41.

[0074] In some embodiments, the control unit 6 may also read signals from other liquid level detection units 5, such as the fourth liquid level detection unit 54 disposed in the overflow tank 44, the fifth liquid level detection unit 55 disposed in the defoamer supply unit 45, and the sixth liquid level detection unit 56 disposed in the reflux buffer tank 7.

[0075] Liquid level comparison and execution steps: The current liquid level is compared with multiple preset liquid level thresholds, and the first drive pump 12 and the second drive pump 22 are controlled to operate or stop according to the comparison results.

[0076] Specifically, the multiple liquid level thresholds include at least one of the following: a first threshold (low alarm level), a second threshold (medium level), a third threshold (high level), and a fourth threshold (high alarm level). In practical applications, different containers can be set with the same or different liquid level thresholds, depending on the volume, function, and safety requirements of each container.

[0077] As an example, the control of buffer tank 2 will be used for illustration.

[0078] The control unit 6 compares the current liquid level in the buffer tank 2 with a first threshold. If the current liquid level is lower than or equal to the first threshold, it indicates that the cutting fluid in the buffer tank 2 is about to run out, requiring manual intervention. At this time, the control unit 6 can trigger a buzzer alarm to sound an alarm, and simultaneously display alarm information on the human-machine interface (not shown), prompting the operator to troubleshoot or manually replenish the fluid. The first threshold can be set to 0% to 15% of the total volume of the buffer tank 2, such as 5%, 10%, or 12%, to allow sufficient time for intervention.

[0079] The control unit 6 compares the current liquid level of the buffer tank 2 with a second threshold and a first threshold. If the current liquid level is lower than or equal to the second threshold but higher than the first threshold, it indicates that the liquid level in the buffer tank 2 is too low and replenishment needs to be initiated. The control unit 6 controls the first drive pump 12 to operate, replenishing liquid from the raw material tank 1 to the buffer tank 2. The second threshold can be set to 40% to 50% of the total volume of the buffer tank 2, such as 40%, 45%, or 50%, to improve the stability of the liquid supply and reduce the risk of liquid shortage due to supply delays during replenishment.

[0080] Control unit 6 compares the current liquid level in buffer tank 2 with a third threshold. If the current liquid level rises to the third threshold, it indicates that the liquid level in buffer tank 2 is sufficient, and replenishment needs to be stopped. Control unit 6 can control the first drive pump 12 to stop operating, and it can also control the automatic valve in the first control valve 15 to close. To prevent over-filling, a hysteresis range can be set. For example, replenishment can stop when the liquid level rises to the third threshold and restart when the liquid level falls back below the second threshold. The third threshold can be set to 80% to 85% of the total volume of buffer tank 2, such as 80%, 82%, or 85%, to improve liquid level utilization while allowing for potential liquid level fluctuations.

[0081] Control unit 6 compares the current liquid level in buffer tank 2 with the fourth threshold. If the current liquid level rises to the fourth threshold, it indicates that the liquid level in buffer tank 2 is too high and has reached a dangerous level. At this time, control unit 6 triggers a buzzer alarm and prompts the operator to manually stop replenishing the liquid, such as manually shutting off the first drive pump 12 or manually closing the manual valve in the first control valve 15. The fourth threshold can be set to 90% to 95% of the total volume of buffer tank 2, such as 90%, 93%, or 95%, to allow time for overflow handling and prevent cutting fluid from spilling.

[0082] The control of the supply tank 3 and the machine buffer tank 41 can be similar to the above method, but the replenishment source is different. The supply tank 3 is replenished from the buffer tank 2, with the cutting fluid in the buffer tank 2 being transported to the supply tank 3 via the second drive pump 22. The machine buffer tank 41 is replenished from the supply tank 3, with the fourth control valve 412 opened by the control unit 6, allowing the cutting fluid in the supply tank 3 to flow into the machine buffer tank 41 under gravity. The control unit 6 can achieve tiered linkage control based on the liquid level signals of each container. For example, when the liquid level in the supply tank 3 is lower than the preset liquid level, the control unit 6 starts the second drive pump 22 to replenish the supply tank 3 from the buffer tank 2. When the liquid level in the machine buffer tank 41 drops as a result and falls below the preset liquid level, the control unit 6 opens the fourth control valve 412 to replenish the machine buffer tank 41 from the supply tank 3. This cascaded control ensures the continuity and stability of the entire replenishment chain.

[0083] In some embodiments, the control method further includes an automatic liquid preparation step. The automatic liquid preparation step can be responsive to a liquid preparation command triggered by an operator (e.g., by an operator via buttons or a touchscreen on a human-machine interface). The automatic liquid preparation step includes: the pure water supply unit 43 adding pure water to the machine mixing tank 42, and the machine buffer tank 41 adding cutting fluid to the machine mixing tank 42.

[0084] Specifically, the control unit 6 receives the automatic liquid preparation command, checks the current status of the machine mixing tank 42, and confirms that it is in a state of waiting for liquid replenishment.

[0085] Control unit 6 controls the fifth control valve 432 to open, and pure water supply unit 43 adds pure water to the mixing tank 42 of the machine. Control unit 6 controls the amount of pure water added through a flow meter or timer, etc., and closes the fifth control valve 432 when the amount added reaches the preset first preset value.

[0086] Control unit 6 controls the fourth control valve 412 to open, and the machine buffer tank 41 adds cutting fluid to the machine mixing tank 42. Control unit 6 controls the amount of cutting fluid added through a flow meter or timer, and closes the fourth control valve 412 when the amount added reaches a preset second value.

[0087] The order in which pure water and cutting fluid are added can be water first, followed by the fluid, which can improve the accuracy of the mixing ratio.

[0088] In some embodiments, the control method may further include an ultra-high liquid level reflux step.

[0089] The ultra-high liquid level return step may include: when the liquid level in the supply tank 3 exceeds the first overflow port 31 of the supply tank 3, the excess cutting fluid is returned to the buffer tank 2 through the third pipeline 32.

[0090] The second liquid level detection unit 52 can detect the liquid level of the supply tank 3 and transmit the liquid level signal of the supply tank 3 to the control unit 6. When the liquid level in the supply tank 3 exceeds the height of the first overflow port 31 of the supply tank 3, the excess cutting fluid can flow back to the buffer tank 2 through the third pipeline 32.

[0091] If the liquid level in the buffer tank 2 exceeds the second overflow port 23 of the buffer tank 2, the excess cutting fluid will flow back to the return buffer tank 7 or the raw material tank 1 through the fourth pipeline 24.

[0092] The first liquid level detection unit 51 can detect the liquid level of the buffer tank 2 and transmit the liquid level signal of the buffer tank 2 to the control unit 6. When the liquid level in the buffer tank 2 exceeds the height of the second overflow port 23 of the buffer tank 2, the excess cutting fluid can be returned to the return buffer tank 7 or the raw material tank 1 through the fourth pipeline 24.

[0093] The ultra-high liquid level reflux step can serve as a last line of defense in case the control unit 6 fails or the liquid replenishment control malfunctions. It prevents the cutting fluid from overflowing through the overflow port and pipeline, thereby improving the reliability and safety of the liquid replenishment system.

[0094] In some embodiments, the control method may further include an overflow defoaming step.

[0095] The overflow defoaming step may include: when the liquid level in the mixing tank 42 of the machine exceeds the third overflow port 421, the excess mixture can be returned to the overflow tank 44 through the eighth pipe 422, and the mixture in the overflow tank 44 can be returned to the mixing tank 42 of the machine through the eighth pipe 422. The eighth pipe 422 is also equipped with a filter 441 and a third drive pump 442.

[0096] Specifically, when the liquid level in the mixing tank 42 exceeds the third overflow port 421, the excess mixture is filtered through the first filter 441 and then enters the overflow tank 44. The fourth liquid level detection unit 54 can detect the liquid level in the overflow tank 44 and transmit the liquid level signal of the overflow tank 44 to the control unit 6. When the liquid level in the overflow tank 44 reaches the preset start-up liquid level, the control unit 6 can control the third drive pump 442 to operate, extract the mixture in the overflow tank 44, and return it to the mixing tank 42 after being filtered through the second filter 441. The two filters 441 can filter out solid impurities, foam, etc. in the mixture, thereby improving the cleanliness of the returned liquid. When the liquid level in the overflow tank 44 drops to the preset stop liquid level, the control unit 6 can control the third drive pump 442 to stop operating. The control unit 6 can also simultaneously control the automatic valve of the sixth control valve 443 to close, so as to prevent the mixture in the mixing tank 42 from flowing back.

[0097] The overflow defoaming step may also include: when the amount of foam in the mixture in the machine mixing tank 42 reaches a preset value, the control unit 6 controls the seventh control valve 452 to open so that the defoamer supply unit 45 adds defoamer to the machine mixing tank 42.

[0098] Specifically, the foam detection unit 423 can detect the amount of foam in the mixing tank 42 of the machine and transmit the foam amount signal of the mixing tank 42 to the control unit 6. When the amount of foam detected by the foam detection unit 423 reaches a preset threshold, the control unit 6 can control the seventh control valve 452 to open, and the defoamer supply unit 45 can add defoamer to the mixing tank 42. When the amount of foam detected by the foam detection unit 423 drops below a safe value, the control unit 6 can control the seventh control valve 452 to close, stopping the addition of defoamer.

[0099] The overflow defoaming step not only solves the problem of cutting fluid bubbling and overflowing, but also allows for the recycling of overflowing cutting fluid, reducing material waste. At the same time, the automatic addition of defoamer improves the defoaming effect of the cutting fluid during use, thereby improving cutting quality and process stability.

[0100] In some embodiments, the control method may further include a material evacuation alarm step. The material evacuation alarm step may include: detecting whether there is cutting fluid flowing in the first pipeline 11 when the first drive pump 12 is operating via a proximity switch 13. As an example, the detection principle of the proximity switch 13 may be: when the first drive pump 12 is operating and there is liquid in the first pipeline 11, the proximity switch 13 outputs a high-level signal; when the first drive pump 12 is operating and there is no liquid in the first pipeline 11 (i.e., air is mixed in the liquid column), the proximity switch 13 outputs a low-level signal.

[0101] When the first drive pump 12 operates and the proximity switch 13 outputs a low-level signal for a period exceeding a preset delay (e.g., 3 seconds), the control unit 6 determines that the raw material tank 1 is empty. The control unit 6 triggers a buzzer alarm to sound an alarm, and simultaneously displays alarm messages such as "Raw material low, please replace" on the human-machine interface. The control unit 6 can automatically stop the first drive pump 12 to prevent damage from dry running. After the operator replaces the raw material tank 1, the alarm can be cleared through the reset button or touchscreen, and the control unit 6 can resume normal control of the first drive pump 12.

[0102] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0103] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0104] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.

[0105] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.

Claims

1. A fluid replacement system, characterized in that, include: A raw material tank, wherein the raw material tank is used to store cutting fluid; A buffer tank, which is connected to the raw material tank via a first drive pump, is used to store cutting fluid from the raw material tank; A liquid supply tank, which is connected to the buffer tank via a second drive pump; A cutting device, comprising a machine buffer tank and a machine mixing tank, wherein the liquid supply tank, the machine buffer tank and the machine mixing tank are arranged sequentially from top to bottom, and adjacent ones are connected to supply liquid by gravity; A liquid level detection unit is disposed in at least one of the buffer tank, the supply tank, and the machine buffer tank; The control unit is communicatively connected to the first drive pump, the second drive pump, and the liquid level detection unit, and is configured to control the first drive pump and the second drive pump to operate or stop according to the liquid level signal generated by the liquid level detection unit.

2. The fluid replenishment system according to claim 1, characterized in that, The supply tank is provided with a first overflow port, which is connected to the buffer tank via a third pipeline; and / or, The buffer tank is provided with a second overflow port, wherein the second overflow port is connected to the raw material tank through a fourth pipeline; or, the replenishment system further includes a reflux buffer tank, wherein the second overflow port is connected to the reflux buffer tank through a fourth pipeline.

3. The fluid replenishment system according to claim 1, characterized in that, The buffer tank is connected to the raw material tank through a first pipeline, and the first drive pump is disposed on the first pipeline; The first pipeline is also equipped with a proximity switch, which is used to detect whether cutting fluid flows in the first pipeline when the first drive pump is running; and / or, The first pipeline is also equipped with a first one-way valve, which is used to prevent the cutting fluid in the buffer tank from flowing back to the raw material tank; and / or, The first pipeline is also provided with at least one first control valve, which is used to control the opening and closing of the first pipeline.

4. The fluid replenishment system according to claim 1, characterized in that, The supply tank is connected to the buffer tank via a second pipeline, and the second drive pump is located on the second pipeline; The second pipeline is further equipped with a second one-way valve, which prevents the cutting fluid in the supply tank from flowing back into the buffer tank; and / or, The second pipeline is also equipped with at least one second control valve, which is used to control the on / off state of the second pipeline; and / or, The number of the second drive pumps is one or more. When there are multiple second drive pumps, the multiple second drive pumps are arranged in parallel.

5. The fluid replacement system according to claim 1, characterized in that, The cutting device also includes a pure water supply unit, which is used to supply pure water to the mixing tank of the machine.

6. The fluid replenishment system according to claim 5, characterized in that, The liquid supply tank is connected to the machine's buffer tank via a fifth pipeline, which is equipped with a third control valve for controlling the on / off state of the fifth pipeline; and / or, The machine's buffer box and the machine's mixing box are connected via a sixth pipeline, which is equipped with a fourth control valve. The fourth control valve is used to control the on / off state of the sixth pipeline; and / or, The pure water supply unit and the mixing tank of the machine are connected by a seventh pipeline. The seventh pipeline is equipped with a fifth control valve, which is used to control the on / off state of the seventh pipeline.

7. The fluid replenishment system according to claim 5, characterized in that, The mixing chamber of the machine is provided with a third overflow port, which is connected to the mixing chamber of the machine via an eighth pipeline. The cutting device also includes an overflow box, which is located on the eighth pipeline. The eighth pipeline is also provided with a filter and a third drive pump. The overflow tank is equipped with the liquid level detection unit, and the third drive pump is communicatively connected to the control unit. The control unit is configured to control the third drive pump to operate or stop based on the liquid level signal detected by the liquid level detection unit in the overflow tank; and / or, The eighth pipeline is also equipped with at least one sixth control valve, which is used to control the on / off state of the eighth pipeline.

8. The fluid replacement system according to claim 5, characterized in that, The cutting device also includes a defoamer supply unit, which is used to add defoamer to the machine mixing box; The defoamer supply unit is equipped with the liquid level detection unit; and / or, The mixing chamber of the machine is equipped with a foam detection unit. The defoamer supply unit and the mixing chamber of the machine are connected through a ninth pipeline. The ninth pipeline is equipped with a seventh control valve. The foam detection unit and the seventh control valve are respectively connected to the control unit. The control unit is configured to control the seventh control valve to open or close according to the detection signal of the foam detection unit.

9. The fluid replacement system according to claim 1, characterized in that, The orthographic projection of the end of the machine buffer box facing the machine mixing box in the direction of gravity is located within the range of the orthographic projection of the end of the machine buffer box facing away from the machine mixing box in the direction of gravity.

10. The fluid replenishment system according to claim 1, characterized in that, The raw material tank, the buffer tank, the liquid supply tank, and the cutting device are arranged in layers in space; The raw material tank and the buffer tank are both located on the first layer, and the liquid supply tank and the cutting device are both located on the second layer, which is above the first layer.

11. A control method, characterized in that, The control method, applied to the fluid resuscitation system as described in any one of claims 1 to 10, comprises: Liquid level detection step: The current liquid level in the buffer tank, the supply tank, or the machine buffer tank is detected by the liquid level detection unit; Liquid level comparison and execution steps: The current liquid level is compared with multiple preset liquid level thresholds, and the first drive pump and the second drive pump are controlled to operate or stop according to the comparison results.

12. The control method according to claim 11, characterized in that, The plurality of liquid level thresholds includes at least one of a first threshold, a second threshold, a third threshold, and a fourth threshold: The liquid level comparison and execution steps include: If the current liquid level is lower than or equal to the first threshold, a prompt for manual intervention will be made; When the current liquid level is lower than or equal to the second threshold and higher than the first threshold, control the first drive pump and / or the second drive pump to operate; If the current liquid level rises to the third threshold, control the first drive pump and / or the second drive pump to stop. If the current liquid level rises to the fourth threshold, prompt for manual intervention and stop the replenishment.

13. The control method according to claim 11, characterized in that, The control method further includes: an automatic solution preparation step; The automatic liquid preparation step includes: the pure water supply unit adding pure water to the machine mixing tank, and the machine buffer tank adding cutting fluid to the machine mixing tank.

14. The control method according to claim 11, characterized in that, The control method further includes: an ultra-high liquid level reflux step; The ultra-high liquid level reflux step includes: when the liquid level in the supply tank exceeds the first overflow port of the supply tank, the excess cutting fluid is refluxed back to the buffer tank through a third pipeline; and / or If the liquid level in the buffer tank exceeds the second overflow port of the buffer tank, the excess cutting fluid will flow back to the return buffer tank or the raw material tank through the fourth pipeline.

15. The control method according to claim 11, characterized in that, The control method further includes: an overflow defoaming step; The overflow defoaming step includes: when the liquid level in the mixing tank of the machine exceeds the third overflow port, the excess mixture flows back to the overflow tank through the eighth pipeline, and the mixture in the overflow tank then flows back to the mixing tank of the machine through the eighth pipeline, wherein the eighth pipeline is also equipped with a filter and a third drive pump; and / or, When the amount of foam in the mixture in the mixing tank of the machine reaches a preset value, the control unit controls the seventh control valve to open so that the defoamer supply unit adds defoamer to the mixing tank of the machine.

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