Heat flow field synergic regulation method and device based on gallium oxide crystal growth and medium

Abstract

The embodiment of the application discloses a heat flow field synergic regulation method and device based on gallium oxide crystal growth, equipment and medium, belongs to the crystal growth regulation technical field, solves the problem that the coupling instability of the heat field and the flow field restricts the growth quality and the yield of gallium oxide single crystal in the actual growth process of the gallium oxide flux method crystal. Including, the temperature field distribution and the convection velocity field of the melt free surface are monitored in real time;Based on the temperature field distribution and the convection velocity field, the corresponding temperature hot spot area and harmful turbulent vortex area when the solid-liquid interface is unstable are determined;According to the temperature gradient corresponding to the temperature hot spot area, the rotation direction corresponding to the harmful turbulent vortex area, and the field intensity information and the local supersaturation gradient information, the dynamic ratio between the temperature compensation amplitude and the magnetic field strength is determined, and the dynamic ratio is corrected;Based on the corrected dynamic ratio, temperature compensation and magnetic field compensation are carried out in the solid-liquid interface instability area, and the synergic regulation of the heat field and the flow field is realized.

Description

Technical Field

[0001] This application relates to the field of crystal growth control technology, and in particular to a method, device and medium for coordinated control of thermal flow field based on gallium oxide crystal growth. Background Technology

[0002] Gallium oxide (GaO), as a wide-bandgap metal-oxide semiconductor material, shows broad application prospects in high-power power electronic devices and deep-ultraviolet optoelectronic devices. The preparation of high-quality, large-size GaO single-crystal substrates is the foundation for its industrial application, and the flux method has become one of the important technical routes for GaO single-crystal growth due to its advantages such as low growth temperature and avoidance of high-temperature decomposition and crucible reaction.

[0003] In the gallium oxide flux-grown crystal process, the temperature field distribution and convection velocity field on the free surface of the melt are key factors determining the stability of the solid-liquid interface. An ideal growth environment requires a uniform temperature distribution and stable convection state within the melt, thereby maintaining a constant supersaturation near the solid-liquid interface and providing a stable thermodynamic driving force for the ordered growth of the crystal.

[0004] However, in the actual growth process of gallium oxide crystals using the flux method, the high viscosity, low thermal diffusivity, and strong absorption of infrared radiation inherent in the gallium oxide flux melt easily lead to uneven natural convection and temperature distribution within the melt. This instability in the coupling between the thermal and flow fields causes periodic or sudden fluctuations in supersaturation near the solid-liquid interface, resulting in problems such as polycrystalline nucleation, uneven impurity segregation, and increased defect density within the crystal, severely restricting the growth quality and yield of gallium oxide single crystals. Summary of the Invention

[0005] This application provides a method, device, and medium for coordinated control of thermal and flow fields in gallium oxide crystal growth, which is used to solve the following technical problem: In the actual growth process of gallium oxide flux crystal, the coupling instability of thermal field and flow field will cause problems such as polycrystalline nucleation, uneven segregation of impurities, and increased defect density inside the crystal, which seriously restricts the growth quality and yield of gallium oxide single crystal.

[0006] The embodiments of this application adopt the following technical solutions: This application provides a method for coordinated control of thermal and flow fields in gallium oxide crystal growth. The method includes: during gallium oxide flux-grown crystal growth, real-time monitoring of the temperature field distribution on the free surface of the melt using an infrared thermal imager, and real-time monitoring of the convection velocity field on the free surface of the melt using a velocimeter; based on the temperature field distribution and convection velocity field, identifying the temperature hotspot region and the harmful turbulent vortex region corresponding to the solid-liquid interface instability; determining the dynamic ratio between temperature compensation amplitude and magnetic field strength based on the temperature gradient corresponding to the temperature hotspot region, the rotation direction corresponding to the harmful turbulent vortex region, and field strength information and local supersaturation gradient information; correcting the dynamic ratio based on the field strength change trend of the temperature hotspot region and the harmful turbulent vortex region; determining the thermomagnetic coordinated control amount for the flux melt properties based on the corrected dynamic ratio; and performing temperature compensation and magnetic field compensation in the solid-liquid interface instability region based on the thermomagnetic coordinated control amount to achieve coordinated control of the thermal and flow fields.

[0007] In one implementation of this application, based on the temperature field distribution and the convection velocity field, the temperature hotspot region and the harmful turbulent vortex region corresponding to the solid-liquid interface instability are determined. Specifically, this includes: acquiring the physical parameters of the gallium oxide flux melt; wherein the physical parameters include at least the melt viscosity, surface tension, and thermal diffusivity at the current growth temperature; performing local gradient analysis on the temperature field distribution to extract candidate hotspot regions with temperature gradient amplitudes greater than a first threshold; wherein the first threshold is dynamically calibrated based on the melt viscosity and thermal diffusivity; calculating the vorticity of the convection velocity field and extracting hotspot regions with vorticity intensity greater than a second threshold, and... Candidate vortex regions whose projected distance between the core center and the solid-liquid interface is less than the third threshold; wherein, the second threshold is dynamically calibrated based on melt viscosity and surface tension; the angle between the temperature gradient direction of the candidate hot spot region and the rotation direction of the vortex core of the candidate vortex region is determined, and when the angle is less than the fifth threshold, the candidate hot spot region and the candidate vortex region are marked as an associated pair; the local supersaturation at the location of the associated pair is obtained, and when the local supersaturation is greater than the sixth threshold and the Euclidean distance between the associated pairs is less than the fourth threshold, the candidate hot spot region is marked as a temperature hot spot region, and the candidate vortex region is marked as a harmful turbulent vortex region.

[0008] In one implementation of this application, the dynamic ratio between temperature compensation amplitude and magnetic field strength is determined based on the temperature gradient corresponding to the temperature hotspot region, the rotation direction corresponding to the harmful turbulent vortex region, and the field strength information and local oversaturation gradient information. Specifically, this includes: constructing a thermal-fluid coupling coordinate system based on the spatial angle between the temperature gradient direction vector and the vortex core rotation axis direction vector; determining the decomposition ratio of the applied thermal flux direction of temperature compensation on different components based on the spatial angle and the relative orientation between the temperature gradient direction vector and the vortex core rotation axis direction vector; determining the applied magnetic field direction based on the direction of the coordinate axes in the thermal-fluid coupling coordinate system; determining the dynamic ratio between temperature compensation amplitude and magnetic field strength based on the ratio between the temperature gradient amplitude of the temperature hotspot region and the vortex amplitude of the harmful turbulent vortex region, and the local oversaturation gradient amplitude at the location of the temperature hotspot region; and generating a thermomagnetic synergistic control quantity for flux melt properties based on the two components, the applied magnetic field direction, and the dynamic ratio.

[0009] In one implementation of this application, the dynamic mix ratio is corrected based on the field strength variation trends of the temperature hotspot region and the harmful turbulent vortex region. Specifically, this includes: determining a first rate of change corresponding to the temperature gradient amplitude and a second rate of change corresponding to the vorticity amplitude within a preset time period; determining the instantaneous value of the instability driving factor based on the ratio between the first and second rates of change; wherein the instability driving factor is related to the relative contributions of thermal and flow driving to instability; obtaining the local supersaturation gradient amplitude at the location of the temperature hotspot region and determining the supersaturation response coefficient based on the ratio of the local supersaturation gradient amplitude to the temperature gradient amplitude; multiplying the instability driving factor by the supersaturation response coefficient to obtain a correction coefficient; and correcting the dynamic mix ratio based on the correction coefficient to obtain the corrected dynamic mix ratio.

[0010] In one implementation of this application, a thermomagnetic synergistic control quantity for flux melt properties is determined based on the modified dynamic ratio. Specifically, this includes: obtaining the local supersaturation gradient direction corresponding to the location of the temperature hotspot region and obtaining the eddy current change rate corresponding to the harmful turbulent vortex region; filling the components determined according to the decomposition ratio and the direction of magnetic field application into the thermofluid-coupled coordinate system to generate a three-dimensional control vector; using the modified dynamic ratio as the modulus scaling factor of the three-dimensional control vector to scale the three-dimensional control vector as a whole to obtain the synergistic control vector; rotating and correcting the synergistic control vector according to the deviation angle between the local supersaturation gradient direction and the projection direction of the synergistic control vector on the horizontal plane, and the eddy current change rate; and using the rotated and corrected synergistic control vector as the thermomagnetic synergistic control quantity for flux melt properties.

[0011] In one implementation of this application, the cooperative control vector is rotated and corrected based on the deviation angle between the local supersaturation gradient direction and the projection direction of the cooperative control vector on the horizontal plane, as well as the vortex change rate. Specifically, this includes: obtaining the height of the free surface of the melt at the location of the temperature hotspot region, and obtaining the depth position of the vortex core center of the harmful turbulent vortex region in the vertical direction; determining the vertical distance between the temperature hotspot region and the harmful turbulent vortex region based on the difference between the height of the free surface of the melt and the depth position of the vortex core center; determining the horizontal distance between the temperature hotspot region and the harmful turbulent vortex region, and determining the tilt angle correction amount of the cooperative control vector based on the ratio between the vertical distance and the horizontal distance; tilting the cooperative control vector in the vertical direction based on the tilt angle correction amount, so that the spatial orientation of the cooperative control vector extends from the location of the temperature hotspot region to the depth position of the vortex core center of the harmful turbulent vortex region; obtaining the projection direction of the local supersaturation gradient direction at the location of the temperature hotspot region on the horizontal plane, and rotating the tilt angle-corrected cooperative control vector on the horizontal plane to the side away from the projection direction to complete the rotation correction.

[0012] In one implementation of this application, temperature and magnetic field compensation are performed in the unstable region of the solid-liquid interface based on thermomagnetic coordinated control. Specifically, this includes: activating multiple heating units sequentially above the location of the temperature hotspot region according to the applied heat flow direction information in the thermomagnetic coordinated control, to form a traveling wave thermal field propagating along the applied heat flow direction below the free surface of the melt; wherein there is a time delay between the start-up times of adjacent heating units, and the time delay is negatively correlated with the melt thermal diffusivity in the applied heat flow direction; activating multiple sets of magnetic field coils layer by layer from the outside to the inside of the harmful turbulent vortex region according to the magnetic field application direction information in the thermomagnetic coordinated control, to construct a gradient magnetic field; wherein the current intensity of each set of magnetic field coils decreases radially from the inside to the outside; causing the traveling wave thermal field and the gradient magnetic field to converge in the harmful turbulent vortex region, forming a thermomagnetic cross grid to divide the harmful turbulent vortex region into multiple sub-vortices; and performing heat dissipation and magnetic damping on each sub-vortex until the vortex intensity of the harmful turbulent vortex region drops below a preset threshold.

[0013] In one implementation of this application, the traveling wave thermal field and the gradient magnetic field intersect in the harmful turbulent vortex region to form a thermomagnetic cross grid. Specifically, this includes: obtaining the vortex core center position and vortex radius of the harmful turbulent vortex region; determining the thermal front width of the traveling wave thermal field and the magnetic field line spacing of the gradient magnetic field based on the vortex radius; wherein both the thermal front width and the magnetic field line spacing are less than half of the vortex radius; controlling the propagation direction of the traveling wave thermal field and the magnetic field line direction of the gradient magnetic field to be perpendicular to each other on the horizontal plane, so that the thermal front and the magnetic field lines form a rectangular grid in the region where the harmful turbulent vortex region is located; adjusting the density of the rectangular grid according to the vortex intensity distribution of the harmful turbulent vortex region to construct the thermomagnetic cross grid.

[0014] This application provides a device for coordinated control of thermal and flow fields based on gallium oxide crystal growth, comprising: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, which, when executed by the at least one processor, enables the at least one processor to: monitor the temperature field distribution of the free surface of the melt in real time using an infrared thermal imager and the convection velocity field of the free surface of the melt in real time using a velocimeter during the gallium oxide flux crystal growth process; determine the temperature hotspot region and the harmful turbulent vortex region corresponding to the solid-liquid interface instability based on the temperature field distribution and the convection velocity field; determine the dynamic ratio between the temperature compensation amplitude and the magnetic field strength according to the temperature gradient corresponding to the temperature hotspot region, the rotation direction corresponding to the harmful turbulent vortex region, and the field strength information and the local supersaturation gradient information; correct the dynamic ratio according to the field strength change trend of the temperature hotspot region and the harmful turbulent vortex region; determine the thermomagnetic coordinated control amount for the flux melt characteristics based on the corrected dynamic ratio; and perform temperature compensation and magnetic field compensation in the solid-liquid interface instability region based on the thermomagnetic coordinated control amount to achieve coordinated control of the thermal field and the flow field.

[0015] The non-volatile computer storage medium provided in this application embodiment stores computer-executable instructions. These instructions are configured to: during the gallium oxide flux crystal growth process, monitor the temperature field distribution of the free surface of the melt in real time using an infrared thermal imager, and monitor the convection velocity field of the free surface of the melt in real time using a velocimeter; based on the temperature field distribution and convection velocity field, determine the temperature hotspot region and the harmful turbulent vortex region corresponding to the solid-liquid interface instability; determine the dynamic ratio between the temperature compensation amplitude and the magnetic field strength based on the temperature gradient corresponding to the temperature hotspot region, the rotation direction corresponding to the harmful turbulent vortex region, and the field strength information and local supersaturation gradient information; correct the dynamic ratio based on the field strength change trend of the temperature hotspot region and the harmful turbulent vortex region; determine the thermomagnetic synergistic control amount for the flux melt characteristics based on the corrected dynamic ratio; and perform temperature compensation and magnetic field compensation in the solid-liquid interface instability region based on the thermomagnetic synergistic control amount to achieve coordinated control of the thermal field and the flow field.

[0016] The above-mentioned technical solutions adopted in the embodiments of this application can achieve the following beneficial effects: In the process of gallium oxide flux crystal growth, the embodiments of this application identify the temperature hotspot region and harmful turbulent vortex region corresponding to the instability of the solid-liquid interface based on the temperature field distribution and convection velocity field, realizing the accurate positioning of the instability precursor and avoiding misjudgment or omission caused by monitoring a single physical quantity. Secondly, based on the temperature gradient corresponding to the temperature hotspot region and the rotation direction corresponding to the harmful turbulent vortex region, the thermomagnetic synergistic control quantity for flux melt characteristics is determined, so that the control of the thermal field and the flow field can be coupled and optimized. Finally, based on the thermomagnetic synergistic control quantity, temperature compensation and magnetic field compensation are performed simultaneously in the instability region of the solid-liquid interface. The two cooperate in space and time, thereby effectively suppressing the supersaturation fluctuation caused by uneven natural convection of the melt and uneven temperature distribution, reducing the risk of polycrystalline nucleation and uneven impurity segregation from the root, realizing efficient synergistic control of the thermal field and the flow field, and improving the growth quality and yield of gallium oxide single crystals. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. In the drawings: Figure 1 A flowchart illustrating the method for coordinated control of thermal flow field based on gallium oxide crystal growth provided in this application embodiment; Figure 2 A schematic diagram of the structure of the heat flow field coordinated control device based on gallium oxide crystal growth provided in the embodiments of this application.

[0018] Figure label: 200: Thermal flow field coordinated control device based on gallium oxide crystal growth; 201: Processor; 202: Memory. Detailed Implementation

[0019] This application provides a method, device, and medium for coordinated control of thermal flow field based on gallium oxide crystal growth.

[0020] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this specification, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this application.

[0021] Figure 1 A flowchart of the method for coordinated control of thermal flow field based on gallium oxide crystal growth provided in this application embodiment is shown below. Figure 1 As shown, the method for coordinated control of thermal flow field based on gallium oxide crystal growth includes the following steps: S101. During the crystal growth process of gallium oxide flux method, the temperature field distribution of the free surface of the melt is monitored in real time by infrared thermal imager, and the convection velocity field of the free surface of the melt is monitored in real time by velocimeter. In one implementation of this application, during the gallium oxide flux-based crystal growth process, the crystal growth furnace employs resistance heating. A crucible is placed inside the furnace chamber, containing a molten mixture of gallium oxide raw material and flux. An infrared-transmitting observation window, made of sapphire crystal material, is opened at the top of the furnace. An infrared thermal imager is fixedly mounted outside the observation window, with its lens optical axis pointing vertically downwards at the free surface of the melt inside the crucible. During crystal growth, the infrared thermal imager continuously acquires infrared radiation images of the free surface of the melt at a sampling frequency of ten to thirty frames per second and converts them into a two-dimensional temperature matrix. The temperature matrix data is transmitted in real-time to a host computer via an Ethernet interface, forming dynamic temperature field distribution data of the free surface of the melt.

[0022] Two symmetrical side-viewing windows, also made of sapphire crystal material, are opened on both sides of the furnace body. The laser emitter of the particle image velocimetry system projects pulsed laser light horizontally through one of the side viewing windows onto a thin layer of one to two millimeters below the free surface of the melt. The acquisition camera of the particle image velocimetry system vertically acquires images of the scattered light from the tracer particles through the other side viewing window. The trigger signals of the laser emitter and the acquisition camera are coordinated by a synchronous controller.

[0023] In this embodiment, the tracer particles can be alumina microspheres, which are added to the crucible along with gallium oxide raw materials and flux during the charging stage. They are uniformly dispersed through natural convection during melting and homogenization. During crystal growth, a particle image velocimetry system continuously acquires scattered light images of the tracer particles at a dual-frame acquisition frequency of five to fifteen pairs per second. The time interval between each pair of dual-frame images is 100 to 500 microseconds. After receiving the dual-frame images, the host computer processes them using a cross-correlation algorithm. By calculating the displacement of the tracer particle cluster within each query window between two moments, and combining the time interval of the dual-frame images with the image magnification, a two-dimensional instantaneous velocity vector field of the thin layer region below the free surface of the melt is obtained. Multiple consecutive frames of velocity vector fields are stored in a time sequence to form dynamic convection velocity field data of the free surface of the melt.

[0024] The host computer performs spatiotemporal registration between the temperature matrix acquired by the infrared thermal imager and the velocity vector field acquired by the particle image velocimetry system. Spatial registration is achieved through a pre-calibrated coordinate transformation matrix, unifying the pixel coordinates of the temperature matrix and the spatial coordinates of the velocity vector field into the same coordinate system. Temporal registration is achieved through a unified timestamp, ensuring that the temperature matrix of each frame is aligned with the velocity vector field at the corresponding moment in time.

[0025] S102. Based on the temperature field distribution and convection velocity field, the temperature hotspot region and harmful turbulent vortex region corresponding to the solid-liquid interface instability are determined.

[0026] In one implementation of this application, physical parameters of the gallium oxide flux melt are obtained; these physical parameters include at least the melt viscosity, surface tension, and thermal diffusivity at the current growth temperature. Local gradient analysis is performed on the temperature field distribution to extract candidate hotspot regions where the temperature gradient amplitude is greater than a first threshold; wherein the first threshold is dynamically calibrated based on the melt viscosity and thermal diffusivity. Eddy power is calculated on the convection velocity field, and candidate vortex regions are extracted where the eddy power intensity is greater than a second threshold and the projected distance between the vortex core center and the solid-liquid interface is less than a third threshold; wherein the second threshold is dynamically calibrated based on the melt viscosity and surface tension. The angle between the temperature gradient direction of the candidate hotspot region and the rotation direction of the vortex core of the candidate vortex region is determined, and when the angle is less than a fifth threshold, the candidate hotspot region and the candidate vortex region are marked as a pair. The local supersaturation at the location of the pair is obtained; when the local supersaturation is greater than a sixth threshold and the Euclidean distance between the pairs is less than a fourth threshold, the candidate hotspot region is marked as a temperature hotspot region, and the candidate vortex region is marked as a harmful turbulent vortex region.

[0027] Specifically, the host computer first acquires the physical parameters of the gallium oxide flux melt, including the melt viscosity, surface tension, and thermal diffusivity at the current growth temperature. Secondly, the host computer performs local gradient analysis on the temperature field distribution. In this embodiment, the local gradient analysis can be performed by convolving the temperature matrix using the Sobel operator to obtain the temperature gradient magnitude and direction at each pixel location. The temperature gradient magnitude is compared with a first threshold, and pixel regions with temperature gradient magnitudes greater than the first threshold are extracted and marked as candidate hotspot regions. It should be noted that the first threshold in this embodiment is dynamically calibrated based on the melt viscosity and thermal diffusivity. When the melt viscosity increases, heat transfer within the melt is suppressed, thus the first threshold decreases accordingly. When the thermal diffusivity decreases, the propagation speed of temperature disturbances in the melt slows down, thus the first threshold also decreases accordingly.

[0028] Furthermore, the host computer performs curl calculations on the velocity vector field to obtain the vortex intensity and vortex core rotation axis direction at each spatial location. The vortex intensity is compared with a second threshold, and regions with vortex intensity greater than the second threshold are extracted. Simultaneously, the projected distance between the vortex core center and the solid-liquid interface of each candidate vortex region is calculated, and only candidate vortex regions with a projected distance less than a third threshold are retained. In this embodiment, the second threshold is dynamically calibrated based on melt viscosity and surface tension. When melt viscosity increases, the damping effect of the melt on flow strengthens, and the same vortex intensity implies a stronger risk of flow instability; therefore, the second threshold is correspondingly reduced. When surface tension increases, Marangoni convection driven by the surface tension gradient is enhanced, and harmful turbulent vortex regions are more easily generated on the free surface of the melt; therefore, the second threshold is also correspondingly reduced.

[0029] Furthermore, the host computer calculates the spatial angle between the temperature gradient direction vector of each candidate hotspot region and the rotation axis direction vector of each candidate vortex region. When this spatial angle is less than the fifth threshold, it indicates a directional coupling relationship between the thermal disturbance of the candidate hotspot region and the flow disturbance of the candidate vortex region. The host computer then marks the candidate hotspot region and the candidate vortex region as a pair. Based on the temperature value at the location of the pair in the temperature field distribution, the saturation concentration at that temperature is obtained by querying the solubility curve of gallium oxide in the flux. Based on the initial feed ratio and growth time of crystal growth, the actual concentration of gallium oxide in the melt is estimated. The difference between the actual concentration and the saturation concentration is divided by the saturation concentration to obtain the local supersaturation. Next, the Euclidean distance between the center of the candidate hotspot region and the center of the vortex core of the candidate vortex region in each pair is calculated. When the local supersaturation is greater than the sixth threshold and the Euclidean distance is less than the fourth threshold, the candidate hotspot region in the pair is marked as a temperature hotspot region, and the candidate vortex region in the pair is marked as a harmful turbulent vortex region.

[0030] S103. Based on the temperature gradient corresponding to the temperature hotspot region, the rotation direction corresponding to the harmful turbulent vortex region, and the field strength information and local oversaturation gradient information, determine the dynamic ratio between the temperature compensation amplitude and the magnetic field strength.

[0031] In one implementation of this application, a heat-fluid coupling coordinate system is constructed based on the spatial angle between the temperature gradient direction vector and the vortex core rotation axis direction vector; based on the spatial angle and the relative orientation between the temperature gradient direction vector and the vortex core rotation axis direction vector, the decomposition ratio of the applied heat flux direction for temperature compensation on different components is determined; based on the orientation of the coordinate axes in the heat-fluid coupling coordinate system, the applied magnetic field direction is determined; based on the decomposition ratio, the ratio between the temperature gradient amplitude of the temperature hotspot region and the vorticity amplitude of the harmful turbulent vortex region, and the local supersaturation gradient amplitude at the location of the temperature hotspot region, the dynamic ratio between the temperature compensation amplitude and the magnetic field strength is determined.

[0032] Specifically, the host computer acquires the temperature gradient direction vector of the temperature hotspot region and the vortex core rotation axis direction vector of the harmful turbulent vortex region. It then calculates the spatial angle between the temperature gradient direction vector and the vortex core rotation axis direction vector, using the cosine of this spatial angle as a first allocation ratio and the sine of the spatial angle as a second allocation ratio. These first and second allocation ratios represent the decomposition ratios of the applied heat flow direction for temperature compensation in two components, where the direction of the first component is opposite to the temperature gradient direction vector. Next, the projection vector of the vortex core rotation axis direction vector onto a plane perpendicular to the temperature gradient direction vector is calculated, where the direction of the second component is the same as the projection vector.

[0033] Next, the host computer calculates the cross product of the temperature gradient direction vector and the vortex core rotation axis direction vector to obtain an intermediate vector. This intermediate vector is perpendicular to the plane formed by the temperature gradient direction vector and the vortex core rotation axis direction vector. Using the direction of this intermediate vector as the first coordinate axis direction, the host computer calculates the cross product of the temperature gradient direction vector and the first coordinate axis to obtain another intermediate vector. This other intermediate vector is perpendicular to both the temperature gradient direction vector and the first coordinate axis, and its direction is used as the second coordinate axis direction. The host computer then uses the direction of the temperature gradient direction vector as the third coordinate axis direction. At this point, the host computer has completed the construction of the thermal-fluid coupling coordinate system and set the direction of the applied magnetic field as the first coordinate axis direction.

[0034] Further, the host computer calculates the ratio of the temperature gradient amplitude to the vorticity amplitude to obtain a first intermediate value. The host computer also acquires the local supersaturation gradient amplitude at the location of the temperature hotspot region. Multiplying the first allocation ratio by the first intermediate value yields a second intermediate value. Multiplying the second allocation ratio by the local supersaturation gradient amplitude yields a third intermediate value. Adding the second and third intermediate values ​​yields a dynamic matching reference value. This dynamic matching reference value is input into a preset matching mapping function, and the output value of this function is the dynamic ratio between the temperature compensation amplitude and the magnetic field strength.

[0035] S104. The dynamic ratio is corrected based on the field strength variation trend of temperature hotspots and harmful turbulent vortex regions.

[0036] In one implementation of this application, the dynamic ratio is corrected based on the field strength variation trends of temperature hotspot regions and harmful turbulent vortex regions. This includes: acquiring a data sequence of temperature gradient amplitude changes over time using a host computer; extracting temperature gradient amplitude data for the most recent preset time period from this data sequence; performing linear fitting on the temperature gradient amplitude data for this time period to obtain a first rate of change corresponding to the temperature gradient amplitude within that time period; and acquiring a data sequence of vorticity amplitude changes over time; extracting vorticity amplitude data for the same preset time period from this data sequence; similarly performing linear fitting on the vorticity amplitude data for this time period to obtain a second rate of change corresponding to the vorticity amplitude within that time period. The ratio of the first rate of change to the second rate of change is determined, and this ratio is used as the instantaneous value of the instability driving factor. When this ratio is large, it indicates that the rate of change of the temperature gradient is faster than the rate of change of the vorticity, in which case thermal driving dominates the contribution to instability. When this ratio is small, it indicates that the rate of change of the vorticity is faster than the rate of change of the temperature gradient, in which case flow driving dominates the contribution to instability.

[0037] Furthermore, the local supersaturation gradient amplitude at the location of the temperature hotspot region is obtained, and the ratio of the local supersaturation gradient amplitude to the temperature gradient amplitude is calculated. This ratio is used as the supersaturation response coefficient. A large supersaturation response coefficient indicates that the temperature compensation is highly efficient in controlling supersaturation, and a small temperature change can cause a large change in supersaturation. A small supersaturation response coefficient indicates that the temperature compensation is less efficient in controlling supersaturation, and a larger temperature change is required to cause the desired change in supersaturation. The instantaneous value of the instability driving factor is multiplied by the supersaturation response coefficient to obtain a correction coefficient. The host computer then multiplies the previously determined dynamic ratio by the correction coefficient to obtain the corrected dynamic ratio. When both the instantaneous value of the instability driving factor and the supersaturation response coefficient are large, the correction coefficient is large, and the corrected dynamic ratio increases, indicating that the weight of temperature compensation needs to be strengthened. When the instantaneous value of the instability driving factor or the supersaturation response coefficient is small, the correction coefficient is small, and the corrected dynamic ratio decreases or remains unchanged, indicating that the weight of the magnetic field needs to be maintained or strengthened.

[0038] S105. Based on the corrected dynamic ratio, determine the thermomagnetic synergistic control amount for flux melt properties.

[0039] In one implementation of this application, based on the modified dynamic ratio, the thermomagnetic synergistic control quantity for the flux melt properties is determined, including: the host computer acquiring the direction of the local supersaturation gradient corresponding to the location of the temperature hotspot region, and acquiring the eddy current change rate corresponding to the harmful turbulent vortex region. Based on the modified dynamic ratio and the preset total control energy limit, the specific values ​​of the temperature compensation amplitude and the magnetic field strength are calculated. The ratio of the temperature compensation amplitude to the magnetic field strength is equal to the modified dynamic ratio, and the sum of the square of the temperature compensation amplitude and the square of the magnetic field strength does not exceed the preset total control energy limit.

[0040] Multiplying the temperature compensation amplitude by the first allocation ratio yields the amplitude of the first component. Multiplying the temperature compensation amplitude by the second allocation ratio yields the amplitude of the second component. The direction of the first component is opposite to the temperature gradient direction vector, while the direction of the second component is the same as the projection direction of the vortex core rotation axis direction vector onto a plane perpendicular to the temperature gradient direction vector. The amplitude of the first component is assigned to the component along the third coordinate axis in the thermal-fluid coupling coordinate system, the amplitude of the second component is assigned to the component along the second coordinate axis, and the magnetic field strength is assigned to the component along the first coordinate axis. This generates a three-dimensional control vector in the thermal-fluid coupling coordinate system. Using the corrected dynamic ratio as the module scaling factor, the original module length of the three-dimensional control vector is calculated. Multiplying the original module length by the corrected dynamic ratio yields the scaled module length. Keeping the direction of the three-dimensional control vector unchanged, its coordinate components are scaled proportionally according to the dynamic ratio to obtain the coordinated control vector. Calculate the projection vector of the coordinated regulation vector onto the horizontal plane, obtain the projection direction of the local oversaturation gradient direction onto the horizontal plane, and determine the deviation angle between the projection direction of the coordinated regulation vector onto the horizontal plane and the projection direction of the local oversaturation gradient direction onto the horizontal plane.

[0041] Furthermore, the coordinated control vector is rotated and corrected based on the deviation angle and vortex change rate. This includes acquiring the spatial coordinates of the temperature hotspot region in the temperature field distribution data using an infrared thermal imager to obtain the height of the free surface of the melt at the location of the temperature hotspot region. The depth of the vortex core center of the harmful turbulent vortex region in the vertical direction is obtained using the spatial coordinates of the vortex core center in the convection velocity field data. The difference between the height of the free surface of the melt and the depth of the vortex core center is calculated, and the absolute value of this difference is taken as the vertical distance between the temperature hotspot region and the harmful turbulent vortex region.

[0042] Based on the horizontal coordinates of the temperature hotspot region and the vortex core center, the straight-line distance between the two points on the horizontal plane is calculated. This straight-line distance is taken as the horizontal distance between the temperature hotspot region and the harmful turbulent vortex region. The ratio of the vertical distance to the horizontal distance is calculated, and the arctangent of this ratio is taken as the tilt correction. This tilt correction represents the angle at which the collaborative control vector needs to tilt in the vertical direction, so that its spatial orientation extends from the location of the temperature hotspot region to the depth of the vortex core center of the harmful turbulent vortex region. The collaborative control vector is tilted and corrected according to the tilt correction by rotating it around the horizontal axis in the vertical plane by an angle equal to the tilt correction. The spatial orientation of the rotated collaborative control vector points from the location of the temperature hotspot region to the depth of the vortex core center. The projection direction of the local supersaturation gradient direction at the location of the temperature hotspot region onto the horizontal plane is obtained. The tilt-corrected collaborative control vector is then projected onto the horizontal plane to obtain the horizontal projection vector. Calculate the angle between the horizontal projection direction and the projection direction of the local oversaturation gradient direction onto the horizontal plane. Rotate the horizontal projection vector away from the projection direction of the local oversaturation gradient direction onto the horizontal plane by an angle equal to this angle. The angle between the rotated horizontal projection vector and the projection direction of the local oversaturation gradient direction onto the horizontal plane increases. Update the horizontal component of the collaborative control vector based on the rotated horizontal projection vector to complete the rotation correction.

[0043] For example, the three coordinate components of the coordinated control vector in the thermal-fluid coupling coordinate system are: 1.395 Gauss for the first coordinate axis, 0.866 degrees Celsius for the second coordinate axis, and 0.5 degrees Celsius for the third coordinate axis. The projection direction of this coordinated control vector onto the horizontal plane makes an angle of approximately 60 degrees with the horizontal direction. The projection direction of the local supersaturation gradient onto the horizontal plane is horizontal to the right, i.e., 0 degrees, with a deviation angle of 60 degrees between the two. The vorticity change rate is 0.02 s / s, a positive value, indicating that the harmful turbulent vortex region is intensifying. The host computer first rotates the coordinated control vector counterclockwise by 60 degrees on the horizontal plane to a side away from the horizontal to the right, so that the angle between the projection direction of the rotated coordinated control vector onto the horizontal plane and the horizontal direction becomes 120 degrees. The host computer then increases the magnitude of the coordinated control vector by 10%, from 1.7 to 1.87, and simultaneously scales up each coordinate component proportionally. The corrected coordinated control vector has a component of 1.5345 Gauss in the first coordinate axis direction, 0.9526 degrees Celsius in the second coordinate axis direction, and 0.55 degrees Celsius in the third coordinate axis direction. The coordinated control vector after rotational and magnitude corrections is used as the thermomagnetic coordinated control quantity for flux melt properties.

[0044] S106. Based on the thermomagnetic synergistic control, temperature compensation and magnetic field compensation are performed in the unstable region of the solid-liquid interface to achieve synergistic control of the thermal field and the flow field.

[0045] In one implementation of this application, multiple heating units are sequentially activated above the location of the temperature hotspot region based on the applied heat flow direction information in the thermomagnetic coordinated control quantity, to form a traveling wave thermal field propagating along the applied heat flow direction below the free surface of the melt; wherein there is a time delay between the start-up times of adjacent heating units, and the time delay is negatively correlated with the thermal diffusivity of the melt in the applied heat flow direction. Based on the magnetic field application direction information in the thermomagnetic coordinated control quantity, multiple sets of magnetic field coils are activated layer by layer from the outside to the inside of the harmful turbulent vortex region to construct a gradient magnetic field; wherein the current intensity of each set of magnetic field coils decreases radially from the inside to the outside. The traveling wave thermal field and the gradient magnetic field intersect in the harmful turbulent vortex region to form a thermomagnetic cross grid, thereby dividing the harmful turbulent vortex region into multiple sub-vortices. Each sub-vortex is subjected to heat dissipation and magnetic damping until the vortex intensity of the harmful turbulent vortex region drops below a preset threshold.

[0046] Specifically, the applied heat flow direction information is extracted from the thermomagnetic coordinated control quantity. This applied heat flow direction information includes the direction of a first component and the direction of a second component. The propagation direction of the traveling wave thermal field is determined based on the combined direction of the first and second components. Secondly, in this embodiment, multiple heating units are arranged above the location of the temperature hotspot region, with each heating unit arranged sequentially along the propagation direction of the traveling wave thermal field. Each heating unit is activated sequentially according to the propagation direction of the traveling wave thermal field. First, the first heating unit located at the beginning of the propagation direction is activated. After a time delay, the second heating unit adjacent to the first heating unit is activated. This process continues, activating subsequent heating units sequentially until the last heating unit is activated. In this embodiment, there is a time delay between the activation times of adjacent heating units, the magnitude of which is determined based on the melt thermal diffusivity in the applied heat flow direction. The thermal diffusivity of the melt was measured using the laser flare method. The time delay was negatively correlated with the thermal diffusivity; when the thermal diffusivity was high, heat propagated quickly within the melt, resulting in a smaller time delay; conversely, when the thermal diffusivity was low, heat propagated slowly within the melt, resulting in a larger time delay. By controlling the time delay between the start-up times of adjacent heating units, a traveling wave thermal field propagating along the applied heat flow direction was formed below the free surface of the melt.

[0047] Furthermore, the magnetic field application direction information is extracted from the thermomagnetic coordinated control quantity. Multiple sets of magnetic field coils are arranged around the periphery of the harmful turbulent vortex region, with the coils arranged layer by layer from the outside to the inside along the radial direction of the harmful turbulent vortex region. Each set of magnetic field coils is activated layer by layer from the outside to the inside. The outermost set is activated first, followed by the next outermost set after a time interval. This process continues until the innermost set is activated. The current intensity of each set of magnetic field coils decreases radially from the inside to the outside, with the innermost coil having the highest current intensity and the outermost coil having the lowest. By controlling the radial decrease in current intensity of each set of magnetic field coils, a gradient magnetic field that increases radially from the outside to the inside is formed within the harmful turbulent vortex region. The traveling wave thermal field propagates along the applied heat flow direction to the region where the harmful turbulent vortex region is located, and the gradient magnetic field has been established in that region. The thermal front of the traveling wave thermal field and the magnetic field lines of the gradient magnetic field intersect in the harmful turbulent vortex region. The thermal front and magnetic field lines spatially intersect each other, forming a thermomagnetic cross-grid that divides the harmful turbulent vortex region into multiple sub-vortices. For each sub-vortex, the order and intensity of heat dissipation and magnetic damping are determined based on its vorticity intensity, rotation direction, and spatial scale. Heat dissipation and magnetic damping are continuously applied to each sub-vortex until its vorticity intensity drops below a preset threshold. When the vorticity intensity of all sub-vortices drops below the preset threshold, the harmful turbulent vortex region is considered eliminated.

[0048] In one implementation of this application, the traveling wave thermal field and the gradient magnetic field intersect in a harmful turbulent vortex region to form a thermomagnetic cross-grid. This includes calculating the vorticity of the velocity vector field, extracting the vortex core center position of the harmful turbulent vortex region from the convective velocity field data, and determining the vortex radius by statistically analyzing the region where the vorticity intensity is greater than half of the vorticity peak value. The maximum distance from the edge of this region to the vortex core center is taken as the vortex radius. The width of the thermal front of the traveling wave thermal field is determined based on the vortex radius, wherein the thermal front width is set to be less than half the vortex radius. The spacing of the magnetic field lines of the gradient magnetic field is also determined based on the vortex radius, wherein the magnetic field line spacing is also set to be less than half the vortex radius. Since both the thermal front width and the magnetic field line spacing are less than half the vortex radius, the grid size of the thermomagnetic cross-grid is smaller than the characteristic scale of the vortex, thereby effectively segmenting the vortex.

[0049] Furthermore, the propagation direction of the traveling wave thermal field is controlled to be perpendicular to the direction of the magnetic field lines of the gradient magnetic field on the horizontal plane. The propagation direction of the traveling wave thermal field is controlled by adjusting the activation sequence of the heating units, and the direction of the magnetic field lines of the gradient magnetic field is controlled by adjusting the arrangement direction and energizing sequence of the magnetic field coils. When the propagation direction of the traveling wave thermal field and the direction of the magnetic field lines of the gradient magnetic field are perpendicular to each other on the horizontal plane, the thermal front of the traveling wave thermal field and the magnetic field lines of the gradient magnetic field form a rectangular grid in the region where the harmful turbulent vortex region is located. By calculating the vorticity of the velocity vector field, the vorticity intensity distribution in the harmful turbulent vortex region is obtained. The density of the rectangular grid is adjusted according to the vorticity intensity distribution. In the region with high vorticity intensity, the width of the thermal front and the spacing of the magnetic field lines are reduced to densify the rectangular grid; in the region with low vorticity intensity, the width of the thermal front and the spacing of the magnetic field lines are increased to sparse the rectangular grid. By adjusting the density of the rectangular grid, a thermomagnetic cross grid matching the vorticity intensity distribution in the harmful turbulent vortex region is constructed.

[0050] Figure 2 This is a schematic diagram of the structure of a heat flow field coordinated control device based on gallium oxide crystal growth provided in an embodiment of this application. Figure 2 As shown, a thermal-fluid field coordinated control device 200 based on gallium oxide crystal growth includes: at least one processor 201; and a memory 202 communicatively connected to at least one processor 201. The memory 202 stores instructions executable by at least one processor 201, which, when executed, enable at least one processor 201 to: monitor the temperature field distribution of the free surface of the melt in real time using an infrared thermal imager and the convection velocity field of the free surface of the melt in real time using a velocimeter during gallium oxide flux crystal growth; determine the temperature hotspot region and the harmful turbulent vortex region corresponding to the solid-liquid interface instability based on the temperature field distribution and the convection velocity field; determine the thermomagnetic coordinated control amount for the flux melt characteristics based on the temperature gradient corresponding to the temperature hotspot region and the rotation direction corresponding to the harmful turbulent vortex region when the temperature hotspot region and the harmful turbulent vortex region are detected; and perform temperature compensation and magnetic field compensation in the solid-liquid interface instability region based on the thermomagnetic coordinated control amount to achieve coordinated control of the thermal field and the flow field.

[0051] The non-volatile computer storage medium provided in this application embodiment stores computer-executable instructions. These instructions are configured to: during the gallium oxide flux crystal growth process, monitor the temperature field distribution of the free surface of the melt in real time using an infrared thermal imager, and monitor the convection velocity field of the free surface of the melt in real time using a velocimeter; based on the temperature field distribution and convection velocity field, determine the temperature hotspot region and the harmful turbulent vortex region corresponding to the solid-liquid interface instability; when the temperature hotspot region and the harmful turbulent vortex region are detected, determine the thermomagnetic synergistic control amount for the flux melt characteristics based on the temperature gradient corresponding to the temperature hotspot region and the rotation direction corresponding to the harmful turbulent vortex region; based on the thermomagnetic synergistic control amount, perform temperature compensation and magnetic field compensation in the solid-liquid interface instability region to achieve synergistic control of the thermal field and the flow field.

[0052] The various embodiments in this application are described in a progressive manner. Similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, the embodiments for devices and non-volatile computer storage media are basically similar to the method embodiments, so the descriptions are relatively simple; relevant parts can be referred to the descriptions of the method embodiments.

[0053] The above descriptions are merely embodiments of this application and are not intended to limit the scope of this application. For those skilled in the art, various modifications and variations can be made to the embodiments of this application. These modifications or substitutions do not cause the essence of the corresponding technical solutions to depart from the spirit and scope of the technical solutions in the embodiments of this application.

Claims

1. A method for coordinated control of heat flow field in gallium oxide crystal growth, characterized in that, The method includes: During the gallium oxide flux method crystal growth process, the temperature field distribution of the free surface of the melt is monitored in real time by an infrared thermal imager, and the convection velocity field of the free surface of the melt is monitored in real time by a velocimeter. Based on the temperature field distribution and the convection velocity field, the temperature hotspot region and the harmful turbulent vortex region corresponding to the solid-liquid interface instability are determined. Based on the temperature gradient corresponding to the temperature hotspot region, the rotation direction corresponding to the harmful turbulent vortex region, and the field strength information and local oversaturation gradient information, the dynamic ratio between the temperature compensation amplitude and the magnetic field strength is determined. The dynamic ratio is corrected based on the field strength variation trends of the temperature hotspot region and the harmful turbulent vortex region. Based on the corrected dynamic ratio, the thermomagnetic synergistic control amount for flux melt properties was determined; Based on the aforementioned thermomagnetic synergistic control, temperature compensation and magnetic field compensation are performed in the unstable region of the solid-liquid interface to achieve synergistic control of the thermal field and the flow field.

2. The method for coordinated control of heat flow field based on gallium oxide crystal growth according to claim 1, characterized in that, Based on the temperature field distribution and the convection velocity field, the temperature hotspot region and harmful turbulent vortex region corresponding to the solid-liquid interface instability are determined, specifically including: Obtain the physical parameters of the gallium oxide flux melt; wherein the physical parameters include at least the melt viscosity, surface tension, and thermal diffusivity at the current growth temperature; Local gradient analysis is performed on the temperature field distribution to extract candidate hotspot regions where the temperature gradient amplitude is greater than a first threshold; wherein, the first threshold is dynamically calibrated based on the melt viscosity and the thermal diffusivity. Eddy power is calculated on the convective velocity field, and candidate vortex regions with eddy power intensity greater than a second threshold and the projected distance between the vortex core center and the solid-liquid interface less than a third threshold are extracted; wherein, the second threshold is dynamically calibrated based on the melt viscosity and surface tension. Determine the angle between the temperature gradient direction of the candidate hot spot region and the rotation direction of the vortex core of the candidate vortex region, and mark the candidate hot spot region and the candidate vortex region as an association pair when the angle is less than a fifth threshold. Obtain the local oversaturation at the location of the correlation pair. When the local oversaturation is greater than the sixth threshold and the Euclidean distance between the correlation pairs is less than the fourth threshold, mark the candidate hot spot region as the temperature hot spot region and the candidate vortex region as the harmful turbulent vortex region.

3. The method for coordinated control of heat flow field based on gallium oxide crystal growth according to claim 1, characterized in that, The step of determining the dynamic ratio between temperature compensation amplitude and magnetic field strength based on the temperature gradient corresponding to the temperature hotspot region, the rotation direction corresponding to the harmful turbulent vortex region, and the field strength information and local oversaturation gradient information specifically includes: A thermal-fluid coupled coordinate system is constructed based on the spatial angle between the temperature gradient direction vector and the vortex core rotation axis direction vector. Based on the spatial angle and the relative orientation between the temperature gradient direction vector and the vortex core rotation axis direction vector, the decomposition ratio of the applied heat flow direction for temperature compensation on different components is determined: The direction of the applied magnetic field is determined based on the orientation of the coordinate axes in the thermal-fluid coupling coordinate system. Based on the decomposition ratio, the ratio between the temperature gradient amplitude of the temperature hotspot region and the vortex amplitude of the harmful turbulent vortex region, and the local supersaturation gradient amplitude at the location of the temperature hotspot region, the dynamic ratio between the temperature compensation amplitude and the magnetic field strength is determined.

4. The method for coordinated control of heat flow field based on gallium oxide crystal growth according to claim 3, characterized in that, The step of correcting the dynamic ratio based on the field strength variation trends of the temperature hotspot region and the harmful turbulent vortex region specifically includes: Within a preset time period, a first rate of change corresponding to the temperature gradient amplitude and a second rate of change corresponding to the vorticity amplitude are determined. The instantaneous value of the instability driving factor is determined based on the ratio between the first rate of change and the second rate of change; wherein the instability driving factor is related to the relative contributions of thermal driving and flow driving to instability; The local oversaturation gradient magnitude at the location of the temperature hotspot region is obtained, and the oversaturation response coefficient is determined based on the ratio of the local oversaturation gradient magnitude to the temperature gradient magnitude. Multiply the instability driving factor by the oversaturation response coefficient to obtain the correction coefficient; The dynamic ratio is corrected based on the correction coefficient to obtain the corrected dynamic ratio.

5. The method for coordinated control of heat flow field based on gallium oxide crystal growth according to claim 3, characterized in that, The determination of the thermomagnetic synergistic control amount for flux melt properties based on the modified dynamic ratio specifically includes: Obtain the direction of the local supersaturation gradient corresponding to the location of the temperature hotspot region, and obtain the vortex change rate corresponding to the harmful turbulent vortex region; The components determined according to the decomposition ratio and the direction of application of the magnetic field are filled into the thermal-fluid coupling coordinate system to generate a three-dimensional control vector. The modified dynamic ratio is used as the scaling factor of the three-dimensional control vector, and the three-dimensional control vector is scaled as a whole to obtain the collaborative control vector. The coordinated control vector is rotated and corrected based on the deviation angle between the local oversaturation gradient direction and the projection direction of the coordinated control vector on the horizontal plane, and the vorticity change rate. The rotationally corrected synergistic control vector is used as the thermomagnetic synergistic control quantity for flux melt properties.

6. The method for coordinated control of heat flow field based on gallium oxide crystal growth according to claim 5, characterized in that, The step of rotating and correcting the coordinated control vector based on the deviation angle between the local oversaturation gradient direction and the projection direction of the coordinated control vector on the horizontal plane, and the vorticity change rate, specifically includes: Obtain the height of the free surface of the melt at the location of the temperature hotspot region, and obtain the depth position of the vortex core center of the harmful turbulent vortex region in the vertical direction; The vertical distance between the temperature hotspot region and the harmful turbulent vortex region is determined based on the difference between the height of the free surface of the melt and the depth of the vortex core center. The horizontal distance between the temperature hotspot region and the harmful turbulent vortex region is determined, and the tilt angle correction amount of the coordinated control vector is determined based on the ratio between the vertical distance and the horizontal distance. Based on the tilt correction, the coordinated control vector is tilted in the vertical direction so that the spatial orientation of the coordinated control vector extends from the location of the temperature hotspot region to the depth of the vortex core center of the harmful turbulent vortex region. The projection direction of the local supersaturation gradient direction at the location of the temperature hotspot region onto the horizontal plane is obtained. The cooperative control vector after tilt correction is rotated on the horizontal plane to the side away from the projection direction to complete the rotation correction.

7. The method for coordinated control of heat flow field based on gallium oxide crystal growth according to claim 1, characterized in that, The temperature and magnetic field compensation in the solid-liquid interface instability region based on the aforementioned thermomagnetic synergistic control amount specifically includes: Based on the applied heat flow direction information in the thermomagnetic coordinated control quantity, multiple heating units are sequentially activated above the location of the temperature hot spot region to form a traveling wave thermal field propagating along the applied heat flow direction below the free surface of the melt; wherein, there is a time delay between the start-up times of adjacent heating units, and the time delay is negatively correlated with the melt thermal diffusivity in the applied heat flow direction; Based on the magnetic field application direction information in the thermomagnetic synergistic control quantity, multiple sets of magnetic field coils are activated layer by layer from the outside to the inside of the harmful turbulent vortex region to construct a gradient magnetic field; wherein, the current intensity of each set of magnetic field coils decreases radially from the inside to the outside. The traveling wave thermal field and the gradient magnetic field converge in the harmful turbulent vortex region to form a thermomagnetic cross grid, thereby dividing the harmful turbulent vortex region into multiple sub-vortices; Each of the sub-vortices is subjected to thermal dissipation and magnetic damping until the vortex intensity of the harmful turbulent vortex region drops below a preset threshold.

8. The method for coordinated control of heat flow field based on gallium oxide crystal growth according to claim 7, characterized in that, The process of causing the traveling wave thermal field and the gradient magnetic field to converge in the harmful turbulent vortex region to form a thermomagnetic cross grid specifically includes: Obtain the vortex core center position and vortex radius of the harmful turbulent vortex region; Based on the vortex radius, the width of the thermal front of the traveling wave thermal field and the spacing of the magnetic field lines of the gradient magnetic field are determined; wherein, both the width of the thermal front and the spacing of the magnetic field lines are less than half of the vortex radius; The propagation direction of the traveling wave thermal field is controlled to be perpendicular to the direction of the magnetic field lines of the gradient magnetic field on the horizontal plane, so that the thermal front and the magnetic field lines form a rectangular grid in the region where the harmful turbulent vortex region is located. The density of the rectangular grid is adjusted according to the vortex intensity distribution of the harmful turbulent vortex region to construct the thermomagnetic cross grid.

9. A device for coordinated control of heat flow field based on gallium oxide crystal growth, characterized in that, The device includes a memory for storing computer program instructions and a processor for executing the program instructions, wherein when the computer program instructions are executed by the processor, the device is triggered to perform the method according to any one of claims 1-8.

10. A non-volatile computer storage medium storing computer-executable instructions, characterized in that, The computer-executable instructions are capable of performing the method described in any one of claims 1-8.

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