A servo energy-saving vacuum pump control method and system

Abstract

The present application belongs to the technical field of vacuum pump control, and relates to a servo energy-saving vacuum pump control method and system, which comprises the following steps: obtaining the running parameters of the vacuum pump; comparing the running parameters with preset parameters to determine whether the triggering condition of the automatic energy-saving mode is met; when the triggering condition of the automatic energy-saving mode is met, executing the automatic energy-saving mode, which comprises the following steps: when the running speed of the upper pump is greater than the preset frequency-reducing speed of the upper pump and the running current of the upper pump is lower than the preset frequency-reducing current of the upper pump, controlling the upper pump to enter the energy-saving mode after a delay; after the upper pump enters the energy-saving mode, when the running speed of the lower pump is greater than the preset frequency-reducing speed of the lower pump and the running current of the lower pump is lower than the preset frequency-reducing current of the lower pump, controlling the lower pump to enter the energy-saving mode after a delay; when the triggering condition of the automatic energy-saving mode is not met, the upper and lower pumps run at full speed; the present application can automatically enter the energy-saving mode according to the running state of the pump itself or external working conditions, without external signals, thereby improving the energy-saving efficiency and control precision.

Description

Technical Field

[0001] The invention relates to the field of vacuum pump control technology, and in particular to a servo energy-saving vacuum pump control method and system. Background Technology

[0002] Vacuum pumps are widely used in various fields such as semiconductors, chemicals, food packaging, and medical equipment. Traditional vacuum pumps typically control entry into or exit from energy-saving mode by opening and closing energy-saving terminal contacts. However, this control method has significant drawbacks: First, the triggering of the energy-saving mode depends on an externally provided energy-saving signal and cannot be automatically determined based on the pump's own operating status; second, its energy-saving control usually uses a fixed frequency and cannot be dynamically adjusted according to actual operating conditions, resulting in low energy efficiency, limited energy-saving range, and inability to meet diverse customer needs.

[0003] Therefore, the present invention provides a servo energy-saving vacuum pump control method and system, which is a vacuum pump control system that can automatically and accurately enter the energy-saving mode according to the pump's own operating parameters or external operating conditions, so as to improve energy-saving efficiency and expand the scope of application of energy-saving applications. Summary of the Invention

[0004] The purpose of this invention is to provide a servo energy-saving vacuum pump control method and system, addressing the problems of existing vacuum pump energy-saving modes relying on external signals, low control precision, and low energy-saving efficiency. The specific solution is as follows: A servo energy-saving vacuum pump control method includes: acquiring the operating parameters of the vacuum pump; the vacuum pump includes an upper pump and a lower pump; the operating parameters include the operating speed of the upper pump, the operating current of the upper pump, the operating speed of the lower pump, and the operating current of the lower pump; comparing the operating parameters with preset parameters to determine whether the vacuum pump meets the trigger conditions for an automatic energy-saving mode; the preset parameters include the reduced-frequency speed of the upper pump, the reduced-frequency current of the upper pump, the reduced-frequency speed of the lower pump, and the reduced-frequency current of the lower pump; when the vacuum pump meets the trigger conditions for the automatic energy-saving mode, executing the automatic energy-saving mode, including: when the operating speed of the upper pump is greater than the preset reduced-frequency speed of the upper pump and the operating current of the upper pump is lower than the preset reduced-frequency current of the upper pump, controlling the upper pump to enter the energy-saving mode with a delay; after the upper pump enters the energy-saving mode, when the operating speed of the lower pump is greater than the preset reduced-frequency speed of the lower pump and the operating current of the lower pump is lower than the preset reduced-frequency current of the lower pump, controlling the lower pump to enter the energy-saving mode with a delay; when the vacuum pump does not meet the trigger conditions for the automatic energy-saving mode, both the upper and lower pumps run at full speed.

[0005] Furthermore, it also includes an analog energy-saving mode: the vacuum value in the pipeline is collected by a vacuum gauge; the vacuum value is compared with the preset target vacuum value; when the vacuum value is less than the target vacuum range, the operating frequency of the upper and lower pumps is reduced; when the vacuum value is within the target vacuum range, the upper and lower pumps maintain the current operating frequency; when the vacuum value is greater than the target vacuum range, the operating frequency of the upper and lower pumps is increased.

[0006] Furthermore, the increase in operating frequency is directly proportional to the absolute value of the vacuum difference; the vacuum difference refers to the difference between the vacuum value and the target vacuum value.

[0007] Furthermore, it also includes a tailpipe flow meter energy-saving mode; the flow rate of the exhaust gas is collected by a flow meter installed at the tailpipe; the flow rate is compared with a preset flow threshold; when the flow rate is less than or equal to the flow threshold, the vacuum pump is controlled to enter the energy-saving mode; when the flow rate is greater than the flow threshold, the vacuum pump unit is controlled to exit the energy-saving mode.

[0008] Furthermore, the energy-saving mode includes reducing the operating frequency of the upper and / or lower pumps.

[0009] This invention also provides a servo energy-saving vacuum pump control system for implementing the aforementioned servo energy-saving vacuum pump control method, comprising a vacuum pump and a control motherboard; the vacuum pump includes an upper pump and a lower pump; the control motherboard is connected to the vacuum pump and configured to acquire the operating parameters of the vacuum pump; compare the operating parameters with preset parameters to determine whether the vacuum pump meets the trigger conditions for an automatic energy-saving mode; when the vacuum pump meets the trigger conditions for an automatic energy-saving mode, the automatic energy-saving mode is executed; when the vacuum pump does not meet the trigger conditions for an automatic energy-saving mode, both the upper and lower pumps run at full speed.

[0010] Furthermore, the control motherboard includes an automatic energy-saving mode execution module, which is configured to control the upper pump to enter the energy-saving mode after a delay when the upper pump's operating speed is greater than the preset upper pump frequency reduction speed and the upper pump's operating current is lower than the preset upper pump frequency reduction current; and after the upper pump enters the energy-saving mode, control the lower pump to enter the energy-saving mode after a delay when the lower pump's operating speed is greater than the preset lower pump frequency reduction speed and the lower pump's operating current is lower than the preset lower pump frequency reduction current.

[0011] Furthermore, it also includes a vacuum gauge; the vacuum gauge is connected to the control motherboard via an analog interface and is configured to collect the vacuum value in the pipeline; the control motherboard is also configured to compare the vacuum value with a preset target vacuum value; when the vacuum value is less than the target vacuum range, the operating frequency of the upper and lower pumps is reduced; when the vacuum value is within the target vacuum range, the upper and lower pumps maintain their current operating frequency; when the vacuum value is greater than the target vacuum range, the operating frequency of the upper and lower pumps is increased.

[0012] Furthermore, it also includes a flow meter; the flow meter is installed at the tailpipe and is configured to collect the flow rate value of the exhaust gas; the control board is also configured to compare the flow rate value with a preset flow rate threshold; when the flow rate value is less than or equal to the flow rate threshold, the vacuum pump is controlled to enter the energy-saving mode; when the flow rate value is greater than the flow rate threshold, the vacuum pump unit is controlled to exit the energy-saving mode.

[0013] Furthermore, the control board is also configured to switch between automatic energy-saving mode, analog energy-saving mode, and tailpipe flow meter energy-saving mode according to user selection.

[0014] The present invention has the following advantages and beneficial effects: This invention introduces an automatic energy-saving mode, enabling the system to automatically determine and enter energy-saving mode based on the vacuum pump's own operating frequency and current parameters without external signals, thus achieving automated and intelligent energy saving. The analog energy-saving mode allows for precise control of the constant vacuum chamber, while the flow meter energy-saving mode further enhances energy efficiency. The combination of multiple energy-saving modes allows the system to adapt to a wider range of customer application scenarios, significantly improving energy efficiency and control precision. Attached Figure Description

[0015] Figure 1 An exemplary flowchart of the automatic energy-saving mode of the servo energy-saving vacuum pump control method provided in the embodiments of the present invention; Figure 2 An exemplary flowchart of another automatic energy-saving mode of the servo energy-saving vacuum pump control method provided in the embodiments of the present invention; Figure 3 An exemplary hardware structure of a servo energy-saving vacuum pump control system provided in an embodiment of the present invention; Attached labels: 1-vacuum gauge, 2-control main board, 3-vacuum port, 4-exhaust port, and 5-flow meter. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0017] Example 1 This embodiment provides a servo-driven energy-saving vacuum pump control system for achieving automatic energy-saving control of the vacuum pump. (Reference) Figure 3The system includes a vacuum pump and a control motherboard 2. The vacuum pump consists of an upper pump and a lower pump, each driven by an independent servo motor. The control motherboard 2 is connected to the frequency converter of the vacuum pump and is used to acquire the operating parameters of the vacuum pump and send control commands.

[0018] The control motherboard 2 is configured to acquire the operating parameters of the vacuum pump, including the operating speed of the upper pump, the operating current of the upper pump, the operating speed of the lower pump, and the operating current of the lower pump. The operating speeds of the upper and lower pumps are determined by the current operating frequencies fed back from the upper and lower pump frequency converters, respectively, while the operating currents of the upper and lower pumps are determined by the current current values ​​fed back from the upper and lower pump frequency converters.

[0019] The control motherboard 2 compares the acquired operating parameters with preset parameters to determine whether the vacuum pump meets the trigger conditions for the automatic energy-saving mode. The preset parameters include the upper pump frequency reduction speed, upper pump frequency reduction current, lower pump frequency reduction speed, and lower pump frequency reduction current. The upper pump frequency reduction speed is determined by the preset energy-saving frequency of the upper pump, for example, it can be calculated by multiplying the value set by the user through menu 205 by the percentage set through menu 268; the upper pump frequency reduction current is set by the user through menu 269; the lower pump frequency reduction speed is determined by the preset energy-saving frequency of the lower pump. For example, it can be calculated by multiplying the value set by the user through menu 206 by the percentage set through menu 268; the lower pump frequency reduction current is set by the user through menu 272. All of the above preset parameters can be preset by the user according to actual operating conditions and stored in the control motherboard 2.

[0020] When the vacuum pump meets the trigger conditions for the automatic energy-saving mode, the control motherboard 2 executes the automatic energy-saving mode. Specifically, the trigger conditions for the automatic energy-saving mode include: the upper pump's operating speed is greater than the preset upper pump frequency reduction speed, and the upper pump's operating current is lower than the preset upper pump frequency reduction current. When the above conditions are met, the control motherboard 2 controls the upper pump to enter the energy-saving mode after a first preset time (e.g., 5 seconds). For example, reducing the operating frequency of the upper pump. After the upper pump enters the energy-saving mode, the control motherboard 2 further determines whether the lower pump's operating parameters meet the trigger conditions, i.e., the lower pump's operating speed is greater than the preset lower pump frequency reduction speed, and the lower pump's operating current is lower than the preset lower pump frequency reduction current. When the lower pump meets the above conditions, the control motherboard 2 controls the lower pump to enter the energy-saving mode after a second preset time (e.g., 5 seconds). For example, reducing the operating frequency of the lower pump. When the vacuum pump does not meet the trigger conditions for the automatic energy-saving mode, the control motherboard 2 controls both the upper and lower pumps to run at full speed.

[0021] With the above-mentioned automatic energy-saving mode, the system does not need to rely on external energy-saving signals. It can automatically judge and execute energy-saving operations based solely on the operating parameters of the vacuum pump itself, realizing the automation and intelligence of energy-saving control and avoiding energy-saving failures caused by external signal failure or improper configuration.

[0022] Example 2 This embodiment, based on Embodiment 1, further provides an analog energy-saving mode. (See reference...) Figure 3 The system also includes a vacuum gauge 1, which is installed in the pipeline near the vacuum pump's suction port 3 to collect the vacuum value within the pipeline. The vacuum gauge 1 is connected to the control motherboard 2 via an analog interface, transmitting the collected analog vacuum value to the control motherboard 2 in real time.

[0023] In analog energy-saving mode, the control motherboard 2 pre-stores the user-defined target vacuum value and target vacuum range. The target vacuum range refers to an allowable fluctuation range centered on the target vacuum value. For example, if the target vacuum value is -80 kPa, the target vacuum range can be set to -78 kPa to -82 kPa. The control motherboard 2 compares the received vacuum value with the preset target vacuum value and dynamically adjusts the operating frequency of the upper and lower pumps based on the comparison result.

[0024] Specifically, when the vacuum value is lower than the lower limit of the target vacuum range (e.g., vacuum value below -82 kPa, i.e., vacuum is too high), the control board 2 reduces the operating frequency of the upper and lower pumps to decrease the pumping rate and allow the vacuum value to rise back to the target range. When the vacuum value is within the target vacuum range (e.g., between -82 kPa and -78 kPa), the control board 2 maintains the current operating frequency of the upper and lower pumps. When the vacuum value is higher than the upper limit of the target vacuum range (e.g., vacuum value above -78 kPa, i.e., vacuum is insufficient), the control board 2 increases the operating frequency of the upper and lower pumps to increase the pumping rate and allow the vacuum value to drop back to the target range.

[0025] To improve control precision, the control motherboard 2 employs a proportional control method, meaning the increase or decrease in operating frequency is directly proportional to the absolute value of the vacuum difference, where the vacuum difference refers to the difference between the currently acquired vacuum value and the target vacuum value. The larger the absolute value of the vacuum difference, the further the current vacuum level deviates from the target value, and the greater the frequency adjustment amplitude, thus quickly approaching the target vacuum value. As the vacuum difference gradually decreases, the frequency adjustment amplitude also decreases accordingly, avoiding overshoot and achieving precise constant vacuum control.

[0026] Through analog energy-saving mode, the system can dynamically adjust the operating frequency of the vacuum pump according to the real-time vacuum value in the pipeline, so that the vacuum degree is stable within the target range set by the user. This not only ensures the vacuum degree requirements of the process, but also minimizes energy consumption to the greatest extent while meeting the requirements. It is especially suitable for scenarios that require a constant vacuum chamber.

[0027] Example 3 This embodiment, based on Embodiment 1 or Embodiment 2, further provides an energy-saving mode for the tailpipe flow meter. (Reference) Figure 3The system also includes a flow meter 5, which is installed on the tailpipe at the exhaust port 4 of the vacuum pump to collect the flow rate of the exhaust gas. The flow meter 5 is communicatively connected to the control main board 2 and transmits the collected flow rate value to the control main board 2 in real time.

[0028] In the energy-saving mode of the tailpipe flow meter, the control motherboard 2 has a user-set flow threshold pre-stored in it. The control motherboard 2 compares the received flow value with the preset flow threshold and controls the vacuum pump to enter or exit the energy-saving mode based on the comparison result.

[0029] Specifically, when the vacuum pump is operating normally, the rotor rotates, discharging the gas in the pipeline and chamber through the tailpipe. When the system load is low or the chamber to be evacuated is close to a vacuum, the gas flow rate discharged from the tailpipe is low. When the flow rate is less than or equal to the preset flow rate threshold, it indicates that the current system load is low and full-speed operation is not required. The control board 2 then controls the vacuum pump to enter energy-saving mode. For example, reducing the operating frequency of the upper pump and / or lower pump. When the flow rate is greater than the preset flow rate threshold, it indicates that the system load is high or a large amount of gas is being evacuated, requiring full-speed operation to maintain or quickly reach the required vacuum level. The control board 2 then controls the vacuum pump to exit energy-saving mode and resume full-speed operation.

[0030] By employing the tailpipe flow meter's energy-saving mode, the system can automatically determine its load status based on the gas flow rate discharged from the tailpipe and automatically reduce energy consumption during low-load conditions, further improving energy efficiency. This mode is particularly suitable for applications with large load fluctuations, enabling dynamic energy saving without affecting process requirements.

[0031] Example 4 In this embodiment, based on any of the above embodiments, the control motherboard 2 is further configured to switch between automatic energy-saving mode, analog energy-saving mode, and tailpipe flowmeter energy-saving mode according to user selection. Users can select a suitable energy-saving mode through the human-machine interface of the control motherboard 2 according to actual application scenarios and process requirements. For example, for scenarios that do not require a constant vacuum and where load changes are infrequent, the automatic energy-saving mode can be selected; for processes that require precise maintenance of vacuum, the analog energy-saving mode can be selected; and for scenarios with large load fluctuations, the tailpipe flowmeter energy-saving mode can be selected. Through flexible switching between multiple energy-saving modes, the system can adapt to a wider range of customer application scenarios, significantly improving energy efficiency and control accuracy.

[0032] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A servo-controlled energy-saving vacuum pump control method, characterized in that, include: Obtain the operating parameters of the vacuum pump; the vacuum pump includes an upper pump and a lower pump; the operating parameters include the operating speed of the upper pump, the operating current of the upper pump, the operating speed of the lower pump, and the operating current of the lower pump; The operating parameters are compared with the preset parameters to determine whether the vacuum pump meets the triggering conditions of the automatic energy-saving mode. The preset parameters include the upper pump frequency reduction speed, the upper pump frequency reduction current, the lower pump frequency reduction speed, and the lower pump frequency reduction current; When the vacuum pump meets the trigger conditions for automatic energy-saving mode, the automatic energy-saving mode is executed, including: When the operating speed of the upper pump is greater than the preset upper pump frequency reduction speed and the operating current of the upper pump is lower than the preset upper pump frequency reduction current, the upper pump is controlled to enter the energy-saving mode after a delay. After the upper pump enters the energy-saving mode, when the lower pump's operating speed is greater than the preset lower pump frequency reduction speed and the lower pump's operating current is lower than the preset lower pump frequency reduction current, the lower pump is controlled to enter the energy-saving mode after a delay. When the vacuum pump does not meet the triggering conditions for the automatic energy-saving mode, both the upper and lower pumps will run at full speed.

2. The servo energy-saving vacuum pump control method according to claim 1, characterized in that, It also includes analog power saving mode: The vacuum level in the pipeline is collected using a vacuum gauge; Compare the vacuum value with the preset target vacuum value; When the vacuum value is less than the target vacuum range, reduce the operating frequency of the upper and lower pumps; When the vacuum value is within the target vacuum range, the upper and lower pumps maintain their current operating frequency. When the vacuum value is greater than the target vacuum range, increase the operating frequency of the upper and lower pumps.

3. The servo energy-saving vacuum pump control method according to claim 2, characterized in that, The increase in operating frequency is proportional to the absolute value of the vacuum difference; the vacuum difference refers to the difference between the vacuum value and the target vacuum value.

4. The servo energy-saving vacuum pump control method according to claim 1, characterized in that, It also includes a tailpipe flow meter energy-saving mode; The flow rate of the exhaust gas is collected by a flow meter installed at the tailpipe. Compare the traffic volume value with a preset traffic volume threshold; When the flow rate is less than or equal to the flow rate threshold, the vacuum pump is controlled to enter the energy-saving mode. When the flow rate exceeds the flow threshold, the vacuum pump unit is controlled to exit the energy-saving mode.

5. The servo energy-saving vacuum pump control method according to claim 4, characterized in that, The energy-saving mode includes reducing the operating frequency of the upper and / or lower pumps.

6. A servo-driven energy-saving vacuum pump control system, characterized in that, The method for implementing the servo energy-saving vacuum pump control method as described in any one of claims 1-5 includes a vacuum pump and a control motherboard. Vacuum pumps consist of an upper pump and a lower pump; The control motherboard is connected to the vacuum pump and is configured to acquire the operating parameters of the vacuum pump; compare the operating parameters with preset parameters to determine whether the vacuum pump meets the trigger conditions for automatic energy saving mode; when the vacuum pump meets the trigger conditions for automatic energy saving mode, the automatic energy saving mode is executed; when the vacuum pump does not meet the trigger conditions for automatic energy saving mode, both the upper and lower pumps run at full speed.

7. The servo energy-saving vacuum pump control system according to claim 6, characterized in that, The control motherboard includes an automatic energy-saving mode execution module, which is configured to control the upper pump to enter the energy-saving mode after a delay when the upper pump's operating speed is greater than the preset upper pump frequency reduction speed and the upper pump's operating current is lower than the preset upper pump frequency reduction current; after the upper pump enters the energy-saving mode, when the lower pump's operating speed is greater than the preset lower pump frequency reduction speed and the lower pump's operating current is lower than the preset lower pump frequency reduction current, the lower pump will be controlled to enter the energy-saving mode after a delay.

8. The servo energy-saving vacuum pump control system according to claim 6, characterized in that, It also includes a vacuum gauge; The vacuum gauge is connected to the control motherboard via an analog interface and is configured to collect the vacuum value in the pipeline. The control board is also configured to compare the vacuum value with a preset target vacuum value; when the vacuum value is less than the target vacuum range, reduce the operating frequency of the upper and lower pumps; when the vacuum value is within the target vacuum range, maintain the current operating frequency of the upper and lower pumps; and when the vacuum value is greater than the target vacuum range, increase the operating frequency of the upper and lower pumps.

9. The servo energy-saving vacuum pump control system according to claim 6, characterized in that, It also includes flow meters; The flow meter is installed at the tailpipe and is configured to collect the flow rate of the exhaust gas. The control board is also configured to compare the flow rate value with a preset flow rate threshold; When the flow rate is less than or equal to the flow rate threshold, the vacuum pump is controlled to enter the energy-saving mode; when the flow rate is greater than the flow rate threshold, the vacuum pump unit is controlled to exit the energy-saving mode.

10. The servo energy-saving vacuum pump control system according to claim 6, characterized in that, The control board is also configured to switch between automatic energy-saving mode, analog energy-saving mode and tailpipe flow meter energy-saving mode according to user selection.

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