Light source device and exposure apparatus

Abstract

This application discloses a light source device and an exposure apparatus. The light source device includes a housing and a reflector. The housing has a first wall. The reflector is disposed inside the housing and has an open end and a bottom end away from the open end. The open end is sealed to the inner wall of the housing, and the bottom end is connected to the first wall. A cavity is formed between the outer wall of the reflector, the inner wall of the housing, and the first wall. A partition is disposed inside the housing, dividing the cavity into a first chamber near the open end and a second chamber near the first wall. The housing has an input port communicating with the first chamber and an output port communicating with the second chamber. The input port is used to connect a cooling medium, and the output port is used to output the cooling medium. The first chamber is connected to the second chamber via a transition port, which is spaced apart from the input port and the output port. This application example can reduce the problem of reflector deformation caused by excessive temperature gradients.

Description

Technical Field

[0001] This application relates to the field of exposure equipment technology, and in particular to a light source device and an exposure device. Background Technology

[0002] Reflectors can be used in the light source of exposure equipment. When installing a reflector, the bottom end of the reflector usually needs to be connected to the supporting structure. During the use of the light source device, the bottom end of the reflector exchanges heat with the supporting structure, causing the temperature of the bottom end of the reflector to be lower than that of the top end. This results in the reflector deforming due to the large temperature gradient between different parts. Summary of the Invention

[0003] This application provides a light source device and an exposure apparatus, which aim to improve the deformation problem of a reflector caused by excessive temperature gradients in different parts.

[0004] To achieve the above-mentioned technical effects, one technical solution adopted in this application is: to provide a light source device, comprising:

[0005] The shell, the shell having a first wall; and

[0006] A reflector is disposed inside the housing. The reflector has an open end and a bottom end away from the open end. The open end is sealed to the inner wall of the housing, and the bottom end is connected to the first wall.

[0007] The outer wall of the reflector, the inner wall of the housing, and the first wall enclose a cavity. A partition is provided inside the housing, which divides the cavity into a first chamber near the open end and a second chamber near the first wall. The housing is provided with an input port that connects to the first chamber and an output port that connects to the second chamber. The input port is used to connect to the cooling medium, and the output port is used to output the cooling medium. The first chamber is connected to the second chamber through a transition port, which is spaced apart from the input port and the output port.

[0008] In this application example, a partition is used to divide the accommodating cavity into a first chamber and a second chamber. A cooling medium is input through an input port, allowing heat exchange between the cooling medium and the corresponding part of the reflector in the first chamber. By connecting the first and second chambers through a transition port, the cooling medium can further enter the second chamber and exchange heat with the corresponding part of the reflector in the second chamber, and then output the cooling medium. Since the temperature of the cooling medium entering the second chamber is relatively lower than that entering the first chamber, the amount of heat exchanged by the cooling medium entering the second chamber is relatively small, which offsets the heat loss at the bottom of the reflector, reduces the temperature gradient between different areas of the reflector, and thus reduces the problem of reflector deformation caused by excessive temperature gradient.

[0009] The adapter ports include:

[0010] A first adapter is connected to the housing, the first adapter communicates with the first chamber, and the first adapter is spaced apart from the input port; and

[0011] The second adapter is connected to the housing. The second adapter connects the second chamber and the first adapter. The second adapter and the output port are spaced apart.

[0012] The first adapter and the input port are located on opposite sides of the housing.

[0013] The second adapter and the output port are located on opposite sides of the housing.

[0014] The distance between the input port and the first wall is no greater than the distance between the first adapter and the first wall.

[0015] The distance between the second adapter and the first wall is no greater than the distance between the output port and the first wall.

[0016] The aperture of the first adapter is smaller than that of the second adapter.

[0017] The light source device also includes:

[0018] A heat-conducting component is disposed in the first chamber and is in contact with the outer wall surface of the reflector.

[0019] The mirror contains multiple heat-conducting components, which are spaced apart along the outer periphery of the mirror.

[0020] The thermal conductivity of the heat-conducting component is greater than that of the reflector.

[0021] The light source device also includes:

[0022] The connecting part protrudes from the bottom end on the side facing the first wall;

[0023] The first wall has a concave arc surface, and the gap between the concave arc surface and the bottom end gradually decreases from the edge of the concave arc surface towards the geometric center of the bottom end; a groove is opened on the concave arc surface, and the connecting part is embedded in the groove.

[0024] The number of connecting parts is multiple, and the multiple connecting parts are distributed at intervals along the circumference of the bottom end. In the vertical projection of the first wall, the multiple connecting parts are arranged in a ring array with the geometric center of the bottom end as the center. The connecting parts have a windward end and a leeward end that are arranged opposite to each other, as well as a windward surface and a leeward surface located between the windward end and the leeward end. The leeward surface is arranged facing the geometric center of the bottom end. On the windward side, the line connecting the windward end and the leeward end is tangent to the circumference of the concave arc surface.

[0025] The thickness of the connecting part gradually increases from the bottom towards the first wall.

[0026] Among them, from the windward end to the leeward end, the thickness of the connecting part gradually decreases, and the leeward end is connected to the bottom end.

[0027] The leeward side is a convex arc surface with an installation groove. A vibration detection component is installed in the installation groove to detect the vibration signal of the connection. The adapter port is equipped with a control valve electrically connected to the vibration detection component. The control valve is used to control the flow rate of the cooling medium at the adapter port according to the vibration signal.

[0028] This application also proposes an exposure apparatus, which includes a light source device as in any of the examples above. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of an example of the light source device of this application;

[0031] Figure 2 This is a schematic diagram of an example of the structure of the reflector in the bottom direction of this application;

[0032] Figure 3 This is a schematic diagram of an example of the connection part of this application;

[0033] Figure 4 This is a schematic diagram of another example of the connecting part of this application;

[0034] Figure 5 This is a schematic diagram of an example control module of the light source device of this application.

[0035] Wherein: 100, light source device; 110, light-emitting element; 120, power supply;

[0036] 10. Housing; 11. First wall; 111. Concave arc surface; 112. Countersunk groove; 12. Input port; 13. Output port; 14. Adapter port; 141. First adapter port; 142. Second adapter port; 143. Control valve;

[0037] 20. Reflector; 21. Open end; 22. Bottom end; 23. Reflective surface; 24. Backlighting surface;

[0038] 30. Thermal conductive components;

[0039] 40. Receiving cavity; 41. Partition; 42. First chamber; 43. Second chamber;

[0040] 50. Connecting part; 51. Windward end; 52. Leeward end; 53. Windward surface; 54. Leeward surface; 55. Vibration detection component; 56. Mounting slot;

[0041] 60. Main control board. Detailed Implementation

[0042] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0043] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified. It should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" in this application description should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this document based on the specific circumstances.

[0044] In this application, the term "exemplary" is used to mean "used as an example, illustration, or description." Any embodiment described as "exemplary" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to make and use this application. Details are set forth in the following description for purposes of explanation. It should be understood that those skilled in the art will recognize that this application can be made without using these specific details. In other instances, well-known structures and processes are not described in detail to avoid obscuring the description of this application with unnecessary detail. Therefore, this application is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed in this application.

[0045] Photolithography (optical exposure) is the process of creating patterns on a circuit board by irradiating it with light of a specific wavelength. Optical exposure is a complex physicochemical process characterized by its large area coverage, high repeatability, ease of operation, and low cost, making it a core step in the manufacturing of semiconductor devices and large-scale integrated circuits.

[0046] The light source device of the exposure equipment can be used to generate light of a specific wavelength. Since the reflector is in direct contact with the structural component that connects to the reflector, there is heat transfer between the reflector and the connecting component, which causes the temperature at the connection between the reflector and the structural component to drop. Different parts of the reflector will deform due to the large temperature gradient.

[0047] Please see Figure 1 and Figure 2 To address the aforementioned problems, this application proposes a light source device 100, comprising a housing 10 and a reflector 20. The housing 10 has a first wall 11; the reflector 20 is disposed within the housing 10, and the reflector 20 has an open end 21 and a bottom end 22 away from the open end 21. The open end 21 is sealed to the inner wall surface of the housing 10, and the bottom end 22 is connected to the first wall 11; wherein, the outer wall surface of the reflector 20, the inner wall surface of the housing 10, and the first wall 11 enclose a receiving cavity 40, and a partition is provided inside the housing 10. Plate 41 and partition 41 divide the accommodating cavity 40 into a first chamber 42 near the open end 21 and a second chamber 43 near the first wall 11. The housing 10 is provided with an input port 12 that connects to the first chamber 42 and an output port 13 that connects to the second chamber 43. The input port 12 is used to connect to the cooling medium, and the output port 13 is used to output the cooling medium. The first chamber 42 is connected to the second chamber 43 through a transition port 14, which is spaced apart from the input port 12 and the output port 13.

[0048] The housing 10 is used to mount the reflector 20. The housing 10 is at least partially hollow, and the reflector 20 is mounted inside the housing 10. The housing 10 has a first wall 11, which is one of the wall surfaces of the housing 10. The reflector 20 is mounted on the first wall 11 so that the reflector 20 can be fixed in a predetermined position inside the housing 10.

[0049] The reflector 20 has a reflective surface 23 and a backlight surface 24 facing away from the reflective surface 23. The reflective surface 23 of the reflector 20 is a concave arc surface. A light-emitting element 110 can be disposed on the inner side of the reflector 20. The reflective surface 23 can be used to reflect the light beam generated by the light-emitting element 110 in a preset direction. In this example, the light-emitting element 110 can be driven to work by a power supply 120. The reflector 20 has an open end 21 and a bottom end 22. The wire of the power supply 120 can pass through the bottom end 22 and be electrically connected to the light-emitting element 110 located inside the reflector 20. The reflective surface 23 can reflect the light emitted by the light-emitting element 110 in the direction outside the open end 21. The bottom end 22 is used to connect to the first wall 11. In this example, the bottom end 22 can be directly or indirectly connected to the first wall 11, which can serve to support the reflector 20.

[0050] The open end 21 of the reflector 20 is sealed to the inner wall of the housing 10, and the bottom end 22 of the reflector 20 is connected to the first wall 11, so that the back surface 24 of the reflector 20, the first wall 11 and the inner wall of the housing 10 form a receiving cavity 40, which can be an annular cavity surrounding the outer periphery of the reflector 20.

[0051] A partition 41 is disposed within the receiving cavity 40. The partition 41 can be connected to the housing 10 or the reflector 20 so that the partition 41 is fixed in a predetermined position within the receiving cavity 40. The partition 41 divides the receiving cavity 40 into a first chamber 42 near the open end 21 and a second chamber 43 near the first wall 11. The first chamber 42 and the second chamber 43 are two annular chambers that respectively surround the outer periphery of the reflector 20.

[0052] An input port 12 and an output port 13 are provided on the housing 10. The input port 12 is connected to the first chamber 42, and the output port 13 is connected to the second chamber 43. The first chamber 42 and the second chamber 43 are connected so that the cooling medium input from the input port 12 into the first chamber 42 can exchange heat with the outer surface of the reflector 20 in the first chamber 42 before entering the second chamber 43. The cooling medium can exchange heat with the part of the reflector 20 corresponding to the second chamber 43 and then be output from the output port 13 to a preset position. In this example, the first chamber 42 and the second chamber 43 are connected through a transition port 14. This can mean that the first chamber 42 and the second chamber 43 are connected through a transition port 14 provided on the partition 41, or that the first chamber 42 and the second chamber 43 are connected through a transition port 14 provided on the housing 10. Alternatively, transition ports 14 can be provided on both the partition 41 and the housing 10, so that the first chamber 42 and the second chamber 43 can be connected through multiple channels.

[0053] The cooling medium can be a gas, liquid, or mixture. The cooling medium can exchange heat with the reflector 20 to achieve cooling. In this example, input port 12 is used to connect the cooling medium, allowing it to enter the first chamber 42. After heat exchange with the portion of the reflector 20 corresponding to the first chamber 42 within the first chamber 42, the cooling medium enters the second chamber 43 via transfer port 14, where it exchanges heat with the portion of the reflector 20 corresponding to the second chamber 43. Then, it is output to a designated location via output port 13. Since high temperatures are generated on the reflector 20 during the use of the light source device 100, assuming the temperature of the cooling medium input through input port 12 is T1, the temperature of the cooling medium output from the first chamber 42 is T2, where T2 < T1. However, the temperature of the cooling medium T2 will still be higher than the temperature of the reflector 20. The cooling medium is then continuously input into the second chamber 43 to exchange heat with the portion of the reflector 20 corresponding to the second chamber 43, thus fully utilizing the cooling medium. Because the temperature T2 of the cooling medium input into the second chamber 43 is lower than its initial temperature T1, the heat exchange between the cooling medium and the part of the reflector 20 corresponding to the second chamber 43 is less than the heat exchange between the cooling medium and the part of the reflector 20 corresponding to the first chamber 42. Consequently, the temperature drop of the part of the reflector 20 corresponding to the second chamber 43 due to the cooling medium is relatively small. Since the bottom end 22 of the reflector 20 contacts the first wall 11, the bottom end 22 of the reflector 20 will generate some heat loss, thus reducing the cooling requirement of the bottom end 22 of the reflector 20. In this example, by reducing the heat exchange of the cooling medium in the second chamber 43, the temperature influence of the cooling medium on the part of the reflector 20 corresponding to the second chamber 43 is reduced, thereby reducing the temperature gradient between the parts of the reflector 20 corresponding to the first chamber 42 and the second chamber 43, and reducing the possibility of deformation of the reflector 20 due to an excessive temperature gradient.

[0054] Optionally, in this example, the spatial size of the first chamber 42 and the second chamber 43 can be controlled by adjusting the position of the partition 41, thereby controlling the residence time of the cooling medium in the first chamber 42 and the second chamber 43, and changing the heat exchange of the portion of the reflector 20 corresponding to the first chamber 42 and the second chamber 43. Optionally, in this example, the flow rate of the cooling medium can be adjusted by adjusting the orifice diameter of the input port 12, the output port 13, and the adapter port 14.

[0055] In some examples, the adapter port 14 includes a first adapter 141 and a second adapter 142. The first adapter 141 is connected to the housing 10 and communicates with the first chamber 42. The first adapter 141 is spaced apart from the input port 12. The second adapter 142 is connected to the housing 10 and communicates with the second chamber 43 and the first adapter 141. The second adapter 142 is spaced apart from the output port 13.

[0056] The first adapter 141 can be a through hole or pipe opened on the housing 10 corresponding to the position of the first chamber 42. The first adapter 141 connects to the first chamber 42 so that the cooling medium in the first chamber 42 can be output from the first adapter 141. The first adapter 141 and the input port 12 are spaced apart to extend the length of the flow path of the cooling medium between the first adapter 141 and the input port 12, thereby extending the heat exchange time between the cooling medium and the reflector 20. Optionally, the input port 12 and the first adapter 141 are located on opposite sides of the housing 10. In this example, the input port 12 and the first adapter 141 can be set at the same height. In order to extend the residence time of the cooling medium in the first chamber 42, the distance between the input port 12 and the first wall 11 can be no greater than the distance between the first adapter 141 and the first wall 11. Taking the open end 21 of the reflector 20 as facing upward as an example, the installation position of the input port 12 is lower than the installation position of the first adapter 141.

[0057] The second adapter 142 can be a through hole or pipe opened on the housing 10 at the position corresponding to the second chamber 43. The second adapter 142 connects the second chamber 43 and the first adapter 141 so that the cooling medium output from the first adapter 141 can enter the second chamber 43 through the second adapter 142. The second adapter 142 is spaced apart from the output port 13 to extend the flow path of the cooling medium between the second adapter 142 and the output port 13, thereby extending the heat exchange time between the cooling medium and the reflector 20. Optionally, the second adapter 142 and the output port 13 are located on opposite sides of the housing 10. In this example, the output port 13 and the second adapter 142 can be set at the same height. In order to prolong the flow time of the cooling medium in the second chamber 43, the distance between the output port 13 and the first wall 11 can be no less than the distance between the second adapter 142 and the first wall 11. Taking the open end 21 of the reflector 20 as facing upward as an example, the installation position of the output port 13 is higher than the installation position of the second adapter 142, so as to prolong the residence time of the cooling medium in the second chamber 43.

[0058] In some examples, the aperture of the second adapter 142 is larger than that of the first adapter 141 so that the cooling medium can be dispersed when it enters the second chamber 43, thereby allowing the cooling medium to contact the reflector 20 more fully and improving the uniformity of heat exchange between the cooling medium and the reflector 20.

[0059] In some examples, the light source device 100 further includes a heat-conducting element 30, which is disposed within the first chamber 42 and in contact with the outer wall surface of the reflector 20. The heat-conducting element 30 is used to conduct heat from the reflector 20 outwards, allowing the cooling medium to exchange heat more fully with the reflector 20. The heat-conducting element 30 can be fixed to the housing 10 and in contact with the outer wall surface of the reflector 20, or it can be connected to the outer wall surface of the reflector 20. Optionally, the heat-conducting element 30 can be metal or other materials capable of heat exchange with the reflector 20. In some examples, the thermal conductivity of the heat-conducting element 30 is greater than that of the reflector 20, so that heat from the reflector 20 can be transferred to the heat-conducting element 30.

[0060] In some examples, there are multiple heat-conducting elements 30, which are spaced apart along the outer periphery of the reflector 20. These multiple heat-conducting elements 30 can be used to conduct heat to multiple parts of the reflector 20, thereby improving the heat exchange efficiency between the cooling medium and the reflector 20. In this example, the heat-conducting elements 30 can be uniformly distributed along the outer periphery of the reflector 20, or they can be distributed according to other patterns along the outer periphery of the reflector 20. Optionally, the length and cross-sectional area of ​​the heat-conducting elements 30 located at different locations can be equal or unequal. Optionally, the surface area of ​​the heat-conducting elements 30 near the partition 41 is smaller than the surface area of ​​the heat-conducting elements 30 away from the partition 41, so that the heat exchange between the heat-conducting elements 30 away from the partition 41 and the cooling medium is relatively larger, thereby reducing the temperature gradient between the parts of the reflector 20 near the partition 41 and the parts away from the partition 41. In this example, the surface area of ​​the heat-conducting element 30 can be changed by altering its quantity and / or volume. Taking the heat-conducting element 30 as a columnar structure as an example, the volume and quantity of the heat-conducting element 30 can be gradually reduced from the open end 21 toward the partition 41.

[0061] Please see Figures 1 to 4 In some examples, the light source device 100 also includes a connecting portion 50, which protrudes from the bottom end 22 on the side facing the first wall 11; the first wall 11 is provided with a concave arc surface 111, and the gap between the concave arc surface 111 and the bottom end 22 gradually decreases from the edge of the concave arc surface 111 towards the geometric center of the bottom end 22; a groove 112 is provided on the concave arc surface 111, and the connecting portion 50 is partially embedded in the groove 112.

[0062] The connecting part 50 is a protrusion provided on the surface of the bottom end 22. The connecting part 50 can serve as an intermediate connecting member between the bottom end 22 and the first wall 11.

[0063] The first wall 11 is recessed inward on the side facing the bottom end 22, forming a concave arc surface 111. A groove 112 is provided on the concave arc surface 111, and the groove 112 corresponds to the position of the connecting part 50. When the reflector 20 is installed on the first wall 11, the connecting part 50 can be aligned with the groove 112 so that the connecting part 50 can be installed in the groove 112 for positioning. In this example, the connecting part 50 can be connected to the inner wall surface of the groove 112 to reduce the contact area between the bottom end 22 and the first wall 11, thereby reducing heat exchange between the bottom end 22 and the first wall 11. When the reflector 20 is installed on the first wall 11, the geometric center of the reflector 20 can coincide with the geometric center of the concave arc surface 111. The curvature of the concave surface 111 is inconsistent with that of the bottom end 22, so that the gap between the concave surface 111 and the bottom end 22 gradually decreases from the edge of the concave surface 111 towards the geometric center of the bottom end 22. As the gap decreases, the flow rate of the cooling medium flowing to the geometric center of the bottom end 22 decreases, thereby reducing the heat exchange between the cooling medium and the bottom end 22. In this example, the connecting part 50 and the recess 112 cooperate to reduce the contact area between the reflector 20 and the first wall 11, thereby reducing the heat exchange area between the bottom end 22 of the reflector 20 and the first wall 11. By reducing the flow rate of the cooling medium at the first wall 11, the influence of the cooling medium on the bottom end 22 of the reflector 20 can be further reduced. Due to the influence of the connecting part 50, turbulence can be generated in the cooling medium flowing to the bottom end 22, thereby reducing the eddies generated when the cooling medium flows at the bottom end 22, which helps to reduce the flow resistance of the cooling medium, shorten the residence time of the cooling medium at the bottom end 22, and further reduce the heat exchange between the cooling medium and the bottom end 22.

[0064] In some examples, there are multiple connecting parts 50, which are spaced apart along the circumference of the bottom end 22. In the vertical projection of the first wall 11, the multiple connecting parts 50 are arranged in a ring array with the geometric center of the bottom end 22 as the center. The connecting parts 50 have a windward end 51 and a leeward end 52 arranged opposite to each other, and a windward surface 53 and a leeward surface 54 located between the windward end 51 and the leeward end 52. The leeward surface 54 is arranged facing the geometric center of the bottom end 22. On the side of the windward surface 53, the line connecting the windward end 51 to the leeward end 52 is tangent to the circumference of the concave arc surface 111.

[0065] The plurality of connecting portions 50 can be used to connect the bottom end 22 and the first wall 11 respectively, so that the plurality of connecting portions 50 can form a plurality of support and connection structures to improve the stability of the reflector 20. The plurality of connecting portions 50 are projected onto the first wall 11 in a direction perpendicular to the first wall 11, and the plurality of connecting portions 50 are distributed in a central array so that the reflector 20 can be uniformly distributed and connected to the first wall 11. The connecting portion 50 has a windward end 51 and a leeward end 52, and a leeward surface 54 and a windward surface 53 are two surfaces between the windward end 51 and the leeward end 52, wherein the leeward surface 54 faces the geometric center of the bottom end 22 and is the inner surface of the connecting portion 50, and the windward surface 53 faces the inner wall of the housing 10 and is the outer surface of the connecting portion 50. The cooling medium can flow from the windward end 51 along the windward surface 53 to the leeward end 52. On the windward side 53, the line connecting the windward end 51 to the leeward end 52 is tangent to the circumference of the concave arc surface 111. When the cooling medium flows to the connecting part 50, the cooling medium can come into more contact with the windward side 53. Under the guiding effect of the windward side 53, the cooling medium is guided towards the leeward end 52, so that the cooling medium can gradually flow towards the inner wall of the housing 10 under the guidance of the windward side 53, thereby reducing the contact between the cooling medium and the bottom end 22. Optionally, the distance between the output port 13 and the first wall 11 is greater than the distance between the second adapter 142 and the first wall 11. Under the guidance of the windward side 53, the cooling medium flows along the inner wall of the housing 10 towards the output port 13. In some examples, the axial direction of the second adapter 142 is parallel to the line connecting the windward end 51 to the leeward end 52, so that the airflow input into the second chamber 43 can have a tendency to flow along the windward side 53 toward the inner wall of the housing 10, further reducing the amount of cooling medium flowing toward the bottom end 22.

[0066] In some examples, the thickness of the connecting portion 50 gradually increases from the bottom end 22 toward the first wall 11; in this example, the area of ​​the end of the connecting portion 50 connected to the bottom end 22 is smaller than the area of ​​the end of the connecting portion 50 connected to the first wall 11, which reduces heat exchange between the connecting portion 50 and the bottom end 22 on the one hand, and improves the stability of the reflector 20 on the other hand.

[0067] Please see Figure 2 , Figure 3 as well as Figure 4In some examples, the leeward side 54 is a convex arc surface to reduce the flow of the cooling medium towards the geometric center of the bottom end 22, thereby reducing heat exchange between the cooling medium and the bottom end 22. During the flow of the cooling medium, the cooling medium flowing towards the bottom end 22 can flow along the convex arc surface of the windward end 51, making it easy for the cooling medium to form a vortex region at the leeward end 52 of the connection 50. The wind resistance formed by the vortex region reduces the flow rate of the cooling medium. Further optionally, the bottom end 22 is connected to the leeward end 52, while the windward end 51 is not connected to the bottom end 22. With the vortex formed on the side of the leeward side 54 near the leeward end 52, the flow rate of the cooling medium at the part of the bottom end 22 near the leeward end 52 is reduced, thereby reducing heat exchange between the cooling medium and the leeward end 52 and reducing heat loss at the connection between the bottom end 22 and the leeward end 52.

[0068] Please see Figure 2 , Figure 3 as well as Figure 4 In some examples, the thickness of the connecting portion 50 gradually decreases from the windward end 51 to the leeward end 52, with the leeward end 52 connecting to the bottom end 22. The thickness of the connecting portion 50 refers to the width of the connecting portion 50 along the opposite direction perpendicular to the windward surface 53. As the cooling medium flows from the windward end 51 to the leeward end 52, when the cooling medium contacts the windward end 51 and flows under the guidance of the leeward surface 54, it is affected by the leeward surface 54 being close to the windward end 51. During the process of the cooling medium meandering along the side of the leeward surface 54 close to the windward end 51, a phenomenon of reduced cooling medium flow occurs. The cooling medium forms vortices at the leeward surface 54, which can further reduce the flow of cooling medium from the leeward surface 54 to the leeward end 52, and reduce the heat exchange between the cooling medium and the leeward end 52 side of the leeward surface 54. In this example, the leeward end 52 is connected to the bottom end 22. By reducing the heat exchange between the cooling medium and the leeward end 52 side of the leeward surface 54, the heat exchange between the part of the bottom end 22 near the leeward end 52 and the connecting part 50 can be reduced, thereby reducing the heat loss at the connection between the bottom end 22 and the connecting part 50.

[0069] Please see Figure 4 and Figure 5 In some examples, the leeward side 54 is provided with a mounting groove 56, and a vibration detection component 55 is provided in the mounting groove 56. The vibration detection component 55 is used to detect the vibration signal of the connection part 50. The adapter port 14 is provided with a control valve 143 electrically connected to the vibration detection component 55. The control valve 143 is used to control the flow rate of the cooling medium in the adapter port 14 according to the vibration signal.

[0070] The mounting groove 56 is a recessed groove 112 formed on the leeward side 54. The mounting groove 56 can be used to form a space to accommodate the vibration detection component 55. In some examples, the thickness of the connecting portion 50 gradually decreases from the windward end 51 to the leeward end 52. The mounting groove 56 can be set close to the leeward end 52. Since the thickness of the connecting portion 50 is relatively smaller on the side of the leeward end 52, the flow rate of the cooling medium on the side of the leeward side 54 close to the leeward end 52 is relatively smaller. Consequently, the flow rate of the cooling medium flowing to the recessed groove 112 is relatively smaller, thereby reducing the interference of the cooling medium on the vibration detection component 55.

[0071] The vibration detection component 55 can be attached to the inner wall of the settling tank 112 so that it can be used to detect the vibration of the connection portion 50. Optionally, the vibration detection component 55 can be a vibration sensor or other device capable of detecting the vibration of an object. In this example, the vibration detection component 55 can be completely contained within the settling tank 112 to minimize the influence of the cooling medium on the vibration detection component 55.

[0072] The adapter port 14 is equipped with a control valve 143, which can be used to control the flow rate of the cooling medium at the adapter port. In this example, the control valve 143 can be a solenoid valve or other valve body structure capable of flow control. In some examples, the adapter port 14 includes the first adapter 141 and the second adapter 142 described in any of the above examples. The control valve 143 can be installed on the first adapter 141 or the second adapter 142, or it can be installed on the pipeline between the first adapter 141 and the second adapter 142. Electrical connection between the control valve 143 and the vibration detection component 55 means that the control valve 143 can transmit electrical signals to the vibration detection component 55. Optionally, the control valve 143 can be wired or wirelessly connected to the vibration detection component 55 so that the control valve 143 can receive the detection signals from the vibration detection component 55.

[0073] Please see Figure 4 and Figure 5In this example, the light source device 100 may further include a main control board 60, which is electrically connected to the control valve 143 and the vibration detection component 55. The main control board 60 can receive the detection signal from the vibration detection component 55 and send a control signal to the control valve 143 according to the detection signal to control the opening degree of the control valve 143. Optionally, the main control board 60 can be integrated into the control valve 143, and the main control board 60 can be connected to the vibration detection component 55 via wired or wireless means. The vibration detection component 55 detects the vibration signal of the connecting part 50. During the flow of the cooling medium, the connecting part 50 is affected by the cooling medium, and the flow of the cooling medium can cause the connecting part 50 to vibrate. When the flow rate of the cooling medium changes, the force exerted by the cooling medium on the connecting part 50 will also change synchronously, thereby causing the vibration signal of the connecting part 50 to change. In this example, the vibration detection component 55 is attached to the connecting part 50 to obtain the vibration signal of the connecting part 50. The control valve 143 receives the vibration signal and can estimate the flow rate signal based on the vibration signal. When an increase in the flow rate signal is detected, the control valve 143 can be controlled to reduce its opening, thereby reducing the flow rate of the cooling medium input into the second chamber 43 and extending the residence time of the cooling medium in the first chamber 42. This reduces the heat exchange between the cooling medium and the portion of the reflector 20 corresponding to the second chamber 43, thus reducing the temperature gradient between the portion of the reflector 20 corresponding to the first chamber 42 and the portion corresponding to the second chamber 43. Optionally, in this example, the numerical range of the vibration signal and the opening of the control valve 143 can be pre-stored so that the opening of the control valve 143 corresponds to the numerical range of the vibration signal. This allows the opening of the control valve 143 to correspond to the flow rate of the cooling medium. When the vibration signal value is within the corresponding range, the opening of the control valve 143 can be quickly adjusted to match the flow rate of the cooling medium, thereby simplifying the control complexity of the control valve 143. In some examples, the power supply 120 may also be electrically connected to the main control board 60, the control valve 143, and the vibration detection component 55, so that the power supply 120 can be used to power the main control board 60, the control valve 143, and the vibration detection component 55.

[0074] Optionally, the leeward surface 54 is a convex arc surface. The thickness of the connecting portion 50 gradually decreases from the windward end 51 to the leeward end 52. By adjusting the shape of the leeward surface 54 and the thickness of the connecting portion 50, the flow of cooling medium to the vibration detection component 55 can be reduced. Simultaneously, the recessed groove 112 within the leeward surface 54 reduces the impact of the cooling medium on the vibration detection component 55, thereby reducing the distortion of the detection signal caused by the flow of the cooling medium and thus helping to improve detection accuracy. In some examples, the curvature of the concave arc surface 111 is inconsistent with the curvature of the bottom end 22, so that the gap between the concave arc surface 111 and the bottom end 22 gradually decreases from the edge of the concave arc surface 111 towards the geometric center of the bottom end 22. As the gap decreases, the flow rate of the cooling medium flowing to the geometric center of the bottom end 22 decreases, further reducing the flow rate of the cooling medium to the vibration detection component 55.

[0075] Based on the aforementioned light source device 100, this application also proposes an example of an exposure apparatus, which includes the light source device 100 as described in any of the above examples. In this example, by reducing the temperature gradient of the reflector 20 and improving the temperature uniformity of the reflector 20, the deformation of the reflector 20 caused by excessive temperature gradient can be reduced, thereby improving the reliability of the reflector 20.

[0076] The exposure apparatus may also include a polarizing mirror, a photomask, a condenser lens, a stage, and a robotic arm for transporting silicon wafers. During operation, the exposure target can be precisely fixed on the stage to create a pattern on the object being exposed. It is understood that the exposure apparatus may also include other functional components, which will not be elaborated further.

[0077] The above are merely embodiments of this application and do not limit the scope of this patent application. Any equivalent structural or procedural changes made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.

Claims

1. A light source device, characterized in that, include: A housing having a first wall; as well as A reflector is disposed within the housing. The reflector has an open end and a bottom end away from the open end. The open end is sealed to the inner wall of the housing, and the bottom end is connected to the first wall. The outer wall of the reflector, the inner wall of the housing, and the first wall form a receiving cavity. A partition is provided inside the housing, which divides the receiving cavity into a first chamber near the open end and a second chamber near the first wall. The housing is provided with an input port communicating with the first chamber and an output port communicating with the second chamber. The input port is used to connect to a cooling medium, and the output port is used to output a cooling medium. The first chamber is connected to the second chamber through a transition port, which is spaced apart from the input port and the output port.

2. The light source device as described in claim 1, characterized in that, The adapter port includes: A first adapter is connected to the housing, the first adapter communicates with the first chamber, and the first adapter is spaced apart from the input port; and The second adapter is connected to the housing, and the second adapter connects the second chamber and the first adapter. The second adapter is spaced apart from the output port.

3. The light source device as described in claim 2, characterized in that, The first adapter and the input port are located on opposite sides of the housing; and / or the second adapter and the output port are located on opposite sides of the housing.

4. The light source device as described in claim 2, characterized in that, The distance between the input port and the first wall is not greater than the distance between the first adapter and the first wall; And / or, the distance between the second adapter and the first wall is not greater than the distance between the output port and the first wall; And / or, the aperture of the first adapter is smaller than the aperture of the second adapter.

5. The light source device as described in claim 1, characterized in that, The light source device also includes: A heat-conducting component is disposed within the first cavity and is in contact with the outer wall surface of the reflector.

6. The light source device as described in claim 5, characterized in that, The number of heat-conducting elements is multiple, and the multiple heat-conducting elements are arranged at intervals along the outer periphery of the reflector; And / or, the thermal conductivity of the heat-conducting element is greater than that of the reflector.

7. The light source device according to any one of claims 1 to 6, characterized in that, The light source device also includes: A connecting portion protrudes from the bottom end on the side facing the first wall; The first wall is provided with a concave arc surface, and the gap between the concave arc surface and the bottom end gradually decreases from the edge of the concave arc surface towards the geometric center of the bottom end; a groove is formed on the concave arc surface, and the connecting part is partially embedded in the groove.

8. The light source device as described in claim 7, characterized in that, The number of connecting parts is multiple, and the multiple connecting parts are distributed at intervals along the circumference of the bottom end. In the vertical projection of the first wall, the multiple connecting parts are arranged in a ring array with the geometric center of the bottom end as the center. The connecting parts have a windward end and a leeward end that are arranged opposite to each other, as well as a windward surface and a leeward surface located between the windward end and the leeward end. The leeward surface is arranged facing the geometric center of the bottom end. On the windward side, the line connecting the windward end and the leeward end is tangent to the circumference of the concave arc surface.

9. The light source device as described in claim 8, characterized in that, The thickness of the connecting portion gradually increases from the bottom end toward the first wall. And / or, from the windward end to the leeward end, the thickness of the connecting portion gradually decreases, and the leeward end is connected to the bottom end; And / or, the leeward side is a convex arc surface, the leeward side is provided with a mounting groove, a vibration detection component is provided in the mounting groove, the vibration detection component is used to detect the vibration signal of the connection part, the adapter port is provided with a control valve electrically connected to the vibration detection component, the control valve is used to control the flow rate of the cooling medium of the adapter port according to the vibration signal.

10. An exposure apparatus, characterized in that, The exposure apparatus includes a light source device as described in any one of claims 1 to 9.

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