Microfluidic-based centrifugation devices, methods, and microfluidic modules

Abstract

The application relates to a microfluidic-based centrifugal device, comprising a main machine, a built-in driving module; the top of the main machine is equipped with a microfluidic module; the microfluidic module comprises a first pipe interface, a second pipe interface, a third pipe interface, a signal interface, a micro flow channel and a special ultrasonic device; the shape of the special ultrasonic device comprises at least two strip-shaped branches; when in a working state, the at least two strip-shaped branches are used for generating acoustic fluid tunnels corresponding to the contour edge positions of the at least two strip-shaped branches in the liquid in the micro flow channel; the microparticles in the liquid in the micro flow channel are captured by the acoustic fluid tunnels and released at the ends of the acoustic fluid tunnels, and are connected to the pipe interface connected with the second outlet of the micro flow channel; wherein the end of the acoustic fluid tunnel refers to the end of the acoustic fluid tunnel close to the downstream, and the end of the acoustic fluid tunnel corresponds to the second outlet of the micro flow channel. The centrifugal method and the microfluidic module are also provided. The application is suitable for high-throughput centrifugal treatment of liquid containing microparticles.

Description

Technical Field

[0001] This application relates to the fields of micro-electro-mechanical systems (MEMS) technology and microfluidics technology, and in particular to a microfluidics-based centrifuge device, method, and microfluidics module. Background Technology

[0002] Centrifuges are commonly used for liquid purification or particle removal. With the development of microfluidics technology, it has become possible to achieve centrifuge functions by manipulating particles using microfluidics. Microfluidic-based solutions include acoustic methods, which offer advantages such as low power consumption and high versatility. Specifically, acoustic particle manipulation technology within microfluidics can utilize ultrasonic devices to create acoustic-fluid tunnels in microfluidic channels to capture flowing particles and release them into downstream target microfluidic channels for particle sorting, liquid purification, etc., thus achieving the functions of a traditional centrifuge.

[0003] However, compared to traditional centrifuges for liquid purification (such as fuel purification to remove particulate impurities from fuel), the biggest drawback of current methods based on acoustic manipulation of particles is their low throughput, which is difficult to meet the demands of industrial liquid processing.

[0004] How to increase liquid throughput when implementing microfluidic-based centrifuges is a technical problem that needs to be solved. Summary of the Invention

[0005] In view of the above-mentioned problems of the prior art, this application provides a microfluidic-based centrifugation device, method and microfluidic module to improve liquid processing throughput and meet the liquid processing volume requirements of industrial applications.

[0006] The first aspect of this application provides a microfluidic-based centrifuge device, including a main unit:

[0007] The host has a built-in drive module for driving the ultrasonic device.

[0008] The top of the host has a groove, in which a microfluidic module is detachably assembled;

[0009] The microfluidic module includes: a first tube interface, a second tube interface, a third tube interface, a signal interface, a microchannel, and a supersonic device;

[0010] The first tube interface is connected to the inlet of the microchannel and is connected to the liquid supply end through a pipeline to introduce liquid containing microparticles into the microchannel; the second tube interface is connected to the first outlet of the microchannel and is connected to the liquid collection end through a pipeline; the third tube interface is connected to the second outlet of the microchannel and is connected to the microparticle collection end through a pipeline.

[0011] The ultrasonic device is disposed at the bottom of the microchannel and is electrically connected to the signal interface; the signal interface is electrically connected to the drive module via a signal line.

[0012] The shape of the ultrasonic device includes at least two strip-shaped branches. When the ultrasonic device is in operation, the at least two strip-shaped branches are used to generate acoustic-fluid tunnels in the liquid within the microchannel, corresponding to the contour edge positions of the at least two strip-shaped branches. Particles in the liquid within the microchannel are captured by the acoustic-fluid tunnels and released at the ends of the acoustic-fluid tunnels. The released particles flow to the second outlet of the microchannel. The end of the acoustic-fluid tunnel refers to the downstream end of the acoustic-fluid tunnel, and the end of the acoustic-fluid tunnel corresponds to the second outlet of the microchannel.

[0013] As one implementation of the first aspect, the at least two strip branches are arranged sequentially along the microchannel extension direction, and each strip branch is inclined to the microchannel extension direction.

[0014] As one implementation of the first aspect, each of the at least two strip branches includes a bend, the protrusion formed by the bend facing downstream of the microchannel; the projection of each bend in the microchannel extension direction corresponds to the second outlet of the microchannel.

[0015] As one implementation of the first aspect, the projections of the turning points of each of the at least two strip branches in the microchannel extension direction coincide.

[0016] As one implementation of the first aspect, the at least two strip branches are arranged sequentially along the cross-sectional direction of the microchannel extension, and at least a portion of each strip branch is arranged parallel to or inclined to the microchannel extension direction; the downstream ends of the at least two strip branches converge toward a point; the projection of the convergence point in the microchannel extension direction corresponds to the second outlet of the microchannel.

[0017] As one implementation of the first aspect, the microfluidic module uses a transparent material as the top layer of the microchannel to encapsulate the microchannel; at least a portion of the first tube interface, the second tube interface, or the third tube interface or the signal interface is disposed in the transparent material.

[0018] As one implementation of the first aspect, an image acquisition module is also included, which is located above the microfluidic module.

[0019] As one implementation of the first aspect, it also includes a cantilever, which includes a vertical part and a horizontal part located at the top of the vertical part. The bottom end of the vertical part is located at the top or side of the host, and the horizontal part extends above the microfluidic module and is equipped with the image acquisition module.

[0020] The second aspect of this application provides a microfluidic-based centrifugation method using any of the microfluidic-based centrifugation devices described in the first aspect, comprising: a liquid supply end supplying a liquid containing microparticles to a microfluidic module via a pipeline; driving an ultrasonic device to operate, causing at least two ribbon-like branches of the ultrasonic device to generate acoustic-fluid tunnels in the liquid within a microchannel, corresponding to the contour edge positions of the at least two ribbon-like branches, wherein microparticles in the liquid within the microchannel are captured by the acoustic-fluid tunnels and released at the ends of the acoustic-fluid tunnels, and the released microparticles flow to a second outlet of the microchannel; a liquid collection end collecting the liquid output from a first outlet of the microchannel via a pipeline; and a microparticle collection end collecting the liquid containing the microparticles output from the second outlet of the microchannel via a pipeline.

[0021] A third aspect of this application provides a microfluidic module for use in any of the microfluidic-based centrifuge devices described in the first aspect, or for use in any of the microfluidic-based centrifuge methods described in the second aspect. The microfluidic module includes: a first tube interface, a second tube interface, a third tube interface, a signal interface, a microchannel, and a supersonic device. The first tube interface is connected to the inlet of the microchannel and is used for external connection to a liquid supply end. The second tube interface is connected to the first outlet of the microchannel and is used for external connection to a liquid collection end. The third tube interface is connected to the second outlet of the microchannel and is used for external connection to a particle collection end. The supersonic device is disposed at the bottom of the microchannel and is connected to the signal interface. The signal interface is electrically connected; the signal interface is used to connect an external signal line to the drive module that drives the ultrasonic device; the ultrasonic device has a shape including at least two strip branches. When the ultrasonic device is in operation, the at least two strip branches are used to generate acoustic-fluid tunnels in the liquid within the microchannel, corresponding to the contour edge positions of the at least two strip branches, so as to capture particles in the liquid within the microchannel and release them at the end of the acoustic-fluid tunnels. The released particles flow to the second outlet of the microchannel; wherein, the end of the acoustic-fluid tunnel refers to the downstream end of the acoustic-fluid tunnel, and the end of the acoustic-fluid tunnel corresponds to the second outlet of the microchannel.

[0022] The solution provided in this application can achieve the function of a traditional centrifuge device, namely, removing particles from a liquid to obtain a liquid after particle removal. This application can achieve high-throughput liquid purification (i.e., removing particles from the liquid) because, compared to a regular pentagonal ultrasonic device with an equal area, it employs multiple strip-shaped branches, allowing it to act over a larger area within the microchannel. This results in more microvortex locations and more acoustic-fluid tunnels, which, when applied to the capture and sorting of particles in the fluid, can act over a larger area within the microchannel, thus achieving better capture results. Furthermore, the multiple captures formed by the multiple strip-shaped branches enhance the probability of particle capture, improving the capture effect and thereby realizing the centrifugation function of liquids at high throughput. Attached Figure Description

[0023] Figure 1a This is a schematic diagram of the jet and secondary flow phenomena generated by the ultrasonic device provided in the embodiments of this application;

[0024] Figure 1b This is a schematic diagram of the acoustic-fluid tunnel provided in an embodiment of this application;

[0025] Figure 2a This is a schematic diagram of the microfluidic-based centrifuge device provided in the first embodiment of this application;

[0026] Figure 2b yes Figure 2a A schematic diagram showing the cantilever arm concealed.

[0027] Figure 2c This is a schematic diagram of the microfluidic module with its top cover hidden.

[0028] Figure 3a This is a schematic diagram of the first implementation of the microfluidic chip provided in the embodiments of this application;

[0029] Figure 3b This is a schematic diagram of a second implementation of the microfluidic chip provided in the embodiments of this application;

[0030] Figure 3c This is a schematic diagram of a third implementation of the microfluidic chip provided in the embodiments of this application;

[0031] Figure 3d This is a schematic diagram of the fourth implementation of the microfluidic chip provided in the embodiments of this application;

[0032] Figure 4 This is a schematic diagram of the ultrasonic device provided in the embodiments of this application;

[0033] Figure 5a This is a diagram showing the results of experiment 1, in which the microfluidic chip provided in this application performs particle sorting.

[0034] Figure 5b This is a result diagram of Experiment 2, which uses the microfluidic chip provided in this application embodiment to perform particle sorting;

[0035] Figure 5c This is a result diagram of Experiment 3, which uses the microfluidic chip provided in the embodiments of this application to sort particles.

[0036] It should be understood that the dimensions and shapes of the blocks in the above structural diagrams are for reference only and should not constitute an exclusive interpretation of the embodiments of the present invention. The relative positions and inclusion relationships between the blocks presented in the structural diagrams are only schematic representations of the structural relationships between the blocks, and are not intended to limit the physical connection methods of the embodiments of the present invention. Detailed Implementation

[0037] The technical solutions provided in this application will be further described below with reference to the accompanying drawings and embodiments. It should be understood that the system architecture and business scenarios provided in the embodiments of this application are mainly for illustrating possible implementations of the technical solutions of this application and should not be construed as the sole limitation on the technical solutions of this application. Those skilled in the art will recognize that the technical solutions provided in this application are equally applicable to similar technical problems as system architectures evolve and new business scenarios emerge.

[0038] It should be understood that the microfluidic solutions provided in this application include microfluidic-based centrifugation devices, centrifugation methods and microfluidic modules, microfluidic methods and ultrasonic devices, and their applications. These applications include, for example, high-throughput particle capture and release, sorting of target particles, purification of target particles or liquids, etc., realizing the function of a centrifuge. Since these technical solutions solve problems based on the same or similar principles, some repetitions may not be repeated in the following descriptions of specific embodiments. However, it should be considered that these specific embodiments have mutual references and can be combined with each other.

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. In case of any inconsistency, the meaning set forth in this specification or derived from the content described herein shall prevail. Furthermore, the terminology used herein is for the purpose of describing embodiments of this application only and is not intended to limit this application. To accurately describe the technical content of this application and to accurately understand the invention, the following explanations or definitions of the terms used in this specification are provided before describing specific embodiments:

[0040] 1) Ultrasonic Device: A high-frequency resonator, which can be a device that generates mechanical vibration by applying voltage based on the piezoelectric effect. In this application, a piezoelectric resonator that generates ultrasonic waves of not less than 0.5 GHz (GHz is equivalent to gigahertz) during operation is used. Preferably, it is a piezoelectric resonator that generates ultrasonic waves of not less than 1 GHz and not more than 30 GHz during operation, for example, it can be 2 GHz to 2.5 GHz. Such piezoelectric resonators can be, for example, surface acoustic wave (SAW) devices, bulk acoustic wave (BAW) devices, etc. For example, when it is BAW, it can be a thin-film bulk acoustic wave resonator (FBAR), a solid-state assembled resonator (SMR), or a Lamb wave resonator (LWR). For ease of description, the piezoelectric resonator that can generate ultrasonic waves of not less than 0.5 GHz will be referred to as an ultrasonic device from now on.

[0041] 2) Jet phenomenon: This is a phenomenon that occurs when the sound waves from an ultrasonic device act on a liquid. The regional vibration generated at the working interface of the ultrasonic device can form a traveling wave in the liquid and exert a continuous thrust on the local liquid in the liquid environment, causing at least a portion of the liquid to move in a straight line along the direction of sound wave propagation. This phenomenon of straight-line movement is called jet phenomenon.

[0042] Secondary flow phenomena, including eddies and thermal backflow, are another phenomenon generated when ultrasonic devices act on liquids. They include eddies (or micro vortices) caused by local circulation generated by the jet driving the liquid, and thermal backflow generated by the heating of ultrasonic devices.

[0043] The jet phenomenon and secondary flow phenomenon can be found in [reference needed]. Figure 1a The images and diagrams shown. Figure 1a The diagram shows a schematic of using eddies (i.e., microvortices) to capture particles.

[0044] 3) Acoustic-fluid tunnel: Under the excitation of an input signal, the ultrasonic device generates ultra-high frequency vibrations emitting sound waves. These sound waves propagate through the fluid, inducing directional movement of the fluid (jet phenomenon), further forming micro-vortices. One such phenomenon is... Figure 1b The simulation diagram shows that several tiny fluid microvortices (such as...) can be generated at the edge of the chip in the ultrasonic device. Figure 1a As shown in the diagram, these fluid microvortices can trap particles in the liquid. Combined with the positional distribution of these fluid microvortices, they exhibit a phenomenon where the particles in the liquid are distributed along the edge of the ultrasonic device chip. Since the particles in the fluid flow through these fluid microvortices distributed along the chip edge, the paths that these fluid microvortices create for the particles to flow through (such as...) Figure 1b As shown in the figure, this application refers to it as an acoustic fluid tunnel.

[0045] 4) Shape of the ultrasonic device: for example, pentagonal, leaf-shaped, spindle-shaped, etc. In this embodiment, the shape of the ultrasonic device refers to the shape of its resonant region. The resonant region is formed by the overlapping regions of the orthographic projections of the bottom electrode layer, piezoelectric layer, and top electrode layer (these three layers can be called resonant layers) onto the substrate. For example, one structure of the resonant layer of the pentagonal ultrasonic device can be composed of a pentagonal bottom electrode layer, piezoelectric layer, and top electrode layer of the same shape with overlapping orthographic projections. Another structure can be composed of bottom electrode layers, piezoelectric layers, and top electrode layers of different shapes, such as a quadrilateral bottom electrode layer, with the projections of the piezoelectric layer and top electrode layer covering the quadrilateral being a pentagon located within the quadrilateral. Thus, the overlapping regions of the orthographic projections of the bottom electrode layer, piezoelectric layer, and top electrode layer onto the substrate are the pentagon, forming the pentagonal ultrasonic device. The term "ultrasonic device" is used here only to illustrate the definition of the shape of the ultrasonic device in this application and does not limit the ultrasonic device to include other layered structures. For example, a reflective layer (such as a Bragg reflective layer, a cavity reflective layer, etc.) may be disposed below the resonant layer, and aluminum nitride may be disposed above the resonant layer as a protective layer. Similarly, unless otherwise specified, the area of ​​the ultrasonic device mentioned in this application refers to the area of ​​the resonant region of the ultrasonic device.

[0046] 5) Particles: refers to geometric bodies with a specific shape within a certain size range. For example, microscopic particles that are located in a liquid environment and can be distinguished from the liquid environment (i.e., insoluble) and can be moved in the liquid environment can all be regarded as particles as described in this application.

[0047] In some embodiments, the particle diameter can range from the nanoscale to the millimeter scale, and the particles can include: cells, molecules, molecular polymers, long-chain molecules, DNA nucleic acids, inorganic particles, metal particles, composite particles, magnetic particles, quantum dots, microbeads (or microspheres, used for functional modification, such as modifying proteins, specific substances, etc.), etc. In some embodiments, the particles can also be non-solid, for example, they can be in the form of droplets, such as in the form of droplets in another immiscible liquid medium, such as water droplets (or water beads) in the oil phase of a microfluidic channel, or oil droplets (or oil beads) in the aqueous phase, etc.

[0048] 6) Reasonable range of parameters, and positive and negative correlations between parameters: A reasonable range refers to the range of parameters that conform to the scheme of this application, such as particle size within a reasonable range, power control within a reasonable range, etc. These ranges can be obtained experimentally. Positive correlation between parameters means that one parameter increases as another parameter increases, and negative correlation means that one parameter increases as another parameter decreases. The parameters mentioned in this application cannot be infinitely small or infinitely large. Therefore, unless otherwise specified, the parameter values ​​mentioned in this application refer to values ​​within a reasonable range. For example, when describing a positive correlation between parameter A and parameter B, it means that within a certain range, parameter A and parameter B are positively correlated, and it can be predicted that beyond this range, parameter B will no longer be positively correlated with parameter A (after parameter A increases to a certain value, B reaches a saturation state, and then parameter B will no longer increase with the increase of parameter A). This range of values ​​is the reasonable range of values.

[0049] When implementing centrifuge functionality based on microfluidics, high throughput is a key technical challenge. The analysis is as follows: Generally, the area of ​​an ultrasonic transducer (UTT) is negatively correlated with its resonant frequency (natural frequency); a larger area results in a lower resonant frequency. Conversely, the resonant frequency of an UTT is positively correlated with its particle capture capability; a higher resonant frequency means greater particle capture capability for the same driving power. Therefore, smaller UTT devices typically have higher resonant frequencies, generating stronger eddies and achieving higher particle capture capabilities, such as capturing smaller particle sizes. However, a smaller UTT area also results in a smaller effective operating range within the microchannel, which is detrimental to capturing particles within a larger space. Furthermore, a smaller UTT area also means a shorter acoustic-fluid tunnel, which is also unfavorable for the number of particles that can be captured. For example, for high-throughput particle capture and sorting within a microchannel, the small UTT area, due to the aforementioned two reasons, may result in the processed liquid not reaching the required high throughput.

[0050] Based on this, this application provides an improved solution that, by setting the shape of the ultrasonic device, can still act on a larger spatial range within the microchannel while maintaining a high resonant frequency, i.e., maintaining a high particle capture capability, thus improving the particle capture capability within a larger space of the microchannel. It is particularly suitable for capturing particles at high throughput, purifying liquids, and realizing the function of a centrifuge.

[0051] The solutions provided in this application will now be described in detail with reference to the accompanying drawings and embodiments.

[0052] refer to Figures 2a-2c As shown, the first embodiment of this application provides a microfluidic-based centrifuge device, including a main unit:

[0053] The host has a built-in drive module for driving the ultrasonic device.

[0054] The top of the host has a groove, in which a microfluidic module is detachably assembled;

[0055] like Figure 2c As shown, the microfluidic module includes: a first tube interface, a second tube interface, a third tube interface, a signal interface, a microchannel, and a supersonic device; wherein, the microchannel and the supersonic device constitute a microfluidic chip;

[0056] The first tube interface is connected to the inlet of the microchannel and is connected to the liquid supply end through a pipeline to introduce liquid containing microparticles into the microchannel; the second tube interface is connected to the first outlet of the microchannel and is connected to the liquid collection end through a pipeline; the third tube interface is connected to the second outlet of the microchannel and is connected to the microparticle collection end through a pipeline.

[0057] The ultrasonic device is disposed at the bottom of the microchannel and is electrically connected to the signal interface; the signal interface is electrically connected to the drive module via a signal line.

[0058] For details, please refer to [link / reference]. Figures 3a-3d As shown in the example, the shape of the ultrasonic device includes at least two strip-shaped branches. When the ultrasonic device is in operation, the at least two strip-shaped branches are used to generate acoustic-fluid tunnels in the liquid within the microchannel, corresponding to the contour edge positions of the at least two strip-shaped branches. Particles in the liquid within the microchannel are captured by the acoustic-fluid tunnels and released at the ends of the acoustic-fluid tunnels. The released particles flow to the second outlet of the microchannel. The end of the acoustic-fluid tunnel refers to the downstream end of the acoustic-fluid tunnel, and the end of the acoustic-fluid tunnel corresponds to the second outlet of the microchannel.

[0059] In some embodiments, a transparent material can be used as the top layer of the microchannel encapsulation, and a top cover can also be provided outside the microchannel. The top cover has through holes to facilitate the observation or acquisition of images or videos of the liquid being processed by the microfluidic module.

[0060] In some embodiments, the first, second, or third pipe interface may be stepped or flared, or threaded, to facilitate plug-in or threaded connection of external pipes. In some embodiments, it may also include a clamp to further secure the external pipe to the corresponding interface.

[0061] In some embodiments, the signal interface and signal line have corresponding terminals, such as male and female terminals, thereby enabling quick connection.

[0062] In some embodiments, the first tube interface, the second tube interface, or the third tube interface or the signal interface may be disposed in the transparent material forming the top layer of the microchannel.

[0063] In some embodiments, such as Figures 3a-3c In the example shown, the at least two strip-shaped branches are arranged sequentially along the microchannel extension direction, and each strip-shaped branch is inclined to the microchannel extension direction. Thus, these strip-shaped branches can form multiple acoustic-fluid tunnels inclined to the microchannel extension direction. Each strip-shaped branch may include at least acoustic-fluid tunnels formed by its upstream edge (the edge of the strip-shaped branch located upstream) and downstream edge (the edge of the strip-shaped branch located downstream).

[0064] In some embodiments, when each of the at least two strip branches is inclined to the microchannel extension direction, they can be inclined to the same side, such as... Figures 3a-3c As shown, for example, they are all tilted at an acute angle (the angle may be the same or different) clockwise from the direction of extension of the microchannel.

[0065] In some embodiments, the at least two strip-shaped branches arranged sequentially along the microchannel extension direction may be non-parallel, but are preferably arranged in parallel. For example... Figures 3a-3c When arranged in parallel as shown, a relatively compact structure is maintained on the one hand, and such a structure is also relatively convenient in the manufacturing process, saving material costs and manufacturing process costs.

[0066] In some embodiments, the at least two strip branches may have the same width and the same length, meaning that the shapes of each strip branch may be identical. In other embodiments, the above parameters may also differ.

[0067] As described above, when the at least two strip branches are arranged in parallel or tilted toward the same side, the particles flowing through the ultrasonic device in the microchannel are captured multiple times by each strip branch, thus improving the capture performance.

[0068] In some embodiments, such as Figure 3a In the example shown, each of the at least two strip branches includes a bend, the protrusion formed by the bend facing downstream of the microchannel; the projection of each bend in the extension direction of the microchannel corresponds to the second outlet of the microchannel. Thus, on both sides of the bend (i.e., the protrusion position) of the strip branch, acoustic-fluid tunnels can be formed with the edge of the strip branch, that is, the bend forms the downstream end of two acoustic-fluid tunnels. The captured particles will flow through the acoustic-fluid tunnels to the bend and be released there, flowing downstream to the corresponding second outlet of the microchannel. This achieves the capture and sorting of particles to the second outlet of the downstream microchannel.

[0069] In some embodiments, such as Figure 3a In the example shown, the projections of the turning points of each of the at least two strip branches in the microchannel extension direction coincide. This ensures that the projections of the release positions of the captured particles from each strip branch coincide in the microchannel extension direction, resulting in a more focused flow path and more precise release position for the particles released by the ultrasonic device.

[0070] In some embodiments, the turning point of each of the at least two strip branches may be located at the center of the strip length or off-center. The positional relationship between the ultrasonic device and the microchannel can be configured such that the turning point faces or is directly opposite the second outlet of the downstream microchannel, as needed.

[0071] In some embodiments, the at least two strip-shaped branches are arranged sequentially along the cross-sectional direction (or perpendicular to the flow extension direction) of the microchannel. In some embodiments, such as Figure 3d In the two left figures, at least a portion of each of the said strip branches is arranged parallel to the microchannel extension direction. In other embodiments, such as... Figure 3d In the rightmost diagram, at least a portion of each of the strip-shaped branches is inclined to the microchannel extension direction. The downstream ends of each of the at least two strip-shaped branches converge at a point; the projection of this convergence point onto the microchannel extension direction corresponds to the second outlet of the microchannel. The orientation of the ultrasonic device and the microchannel can be set according to the location of the second outlet of the microchannel.

[0072] In some embodiments, the convergence point may be located at the intermediate axis of the at least two strip branches, thereby forming a shape such that... Figure 3d The axisymmetrically distributed banded branches are shown. In other embodiments, the convergence point may also be biased to one side (see reference). Figure 3a (The aforementioned bending portion is offset to one side).

[0073] In some embodiments, the microchannel and the ultrasonic device are located on the same substrate, with the ultrasonic device located at the bottom of the microchannel. In some embodiments, the distance between two adjacent strip branches of the ultrasonic device can be maintained at the closest edge of these two adjacent strip branches (e.g., ...). Figure 3a The upstream edge of the upstream strip-shaped branch and the upstream edge of the downstream strip-shaped branch; or Figure 3dAcousto-fluid tunnels can be formed on both the right edge of the left-hand strip branch and the left edge of the right-hand strip branch, and these two tunnels do not interfere with each other (or interfere very little), resulting in a greater number of overall acoustic-fluid tunnels. It should also be noted that even if two adjacent strip branches are close together (in extreme cases, such as extremely close proximity resembling a slit), acoustic-fluid tunnels can still form; however, these two tunnels will be intertwined, resulting in fewer overall acoustic-fluid tunnels compared to the arrangement with a certain distance between them.

[0074] In some embodiments, the width of each of the at least two strip-shaped branches of the ultrasonic device is preferably such that acoustic-fluid tunnels can be formed at both edges of the strip-shaped branch, thereby increasing the overall number of acoustic-fluid tunnels. It should also be noted that even if the strip-shaped branches are narrow, acoustic-fluid tunnels can still be formed; however, these two acoustic-fluid tunnels will be intertwined, resulting in fewer overall acoustic-fluid tunnels in the ultrasonic device compared to the strip-shaped branches with a certain width.

[0075] In some embodiments, the implementation of connecting at least two strip branches may include, but is not limited to, one or any combination of the following:

[0076] 1) A strip-shaped connecting part is provided, which connects the same-side ends of these strip-shaped branches, such as the connecting part connecting the left side end of these strip-shaped branches located in the microchannel.

[0077] 2) Set up two strip-shaped connected parts, which are connected by at least one strip-shaped branch, and each other strip-shaped branch is connected to at least one connected part.

[0078] 3) A strip-shaped connecting part is provided, which connects at least one strip-shaped branch, and other strip-shaped branches are connected to at least one strip-shaped branch that has been connected to the connecting part.

[0079] In some embodiments, the aforementioned connecting portion can be located within a non-resonant region, for example, outside the piezoelectric layer. Figures 3a-3c In the example shown, the connecting portion is located on the substrate outside the microchannel. For example... Figure 3d The connecting part is located on the substrate at the bottom side of the microchannel.

[0080] In some embodiments, such as Figures 3a-3c In the example shown, the length requirement of the at least two strip branches of the ultrasonic device is that the length from at least one end of the strip branch to the other, or from one end to the turning point, can cover the first outlet of a downstream microchannel, thereby allowing the captured particles to be released to the second outlet of the microchannel. In other embodiments, as shown... Figure 3a , Figure 3c , Figure 3dAs shown in the example, the required length of the at least two strip branches of the ultrasonic device can cover the width of the microchannel so that the resulting acoustic-fluid tunnel can cover the entire width direction of the microchannel.

[0081] In some embodiments, such as Figure 3d As shown in the example, the overall width of the ultrasonic device formed by the at least two strip branches can cover the first outlet of the downstream microchannel, thereby allowing the captured particles to be released to the second outlet of the microchannel.

[0082] In some embodiments, an image acquisition module is also included, which is positioned above the microfluidic module.

[0083] In some embodiments, a cantilever is further included, the cantilever including a vertical portion and a horizontal portion located at the top of the vertical portion, the bottom end of the vertical portion being disposed on the side or top of the host, and the horizontal portion extending above the microfluidic module and being equipped with the image acquisition module.

[0084] In some embodiments, a supplementary lighting module is also included, which is located on one side of the image acquisition module.

[0085] The effects of the ultrasonic device provided in the embodiments of this application will be further illustrated below by comparing it with a regular pentagonal ultrasonic device of the same area, including the following:

[0086] 1) The ultrasonic device provided in this application embodiment has a total area of ​​each strip branch that is the same as that of the regular pentagonal ultrasonic device. Therefore, the resonant frequency does not decrease significantly, and it can still maintain a high resonant frequency and still have a strong ability to capture small particles.

[0087] 2) The ultrasonic device provided in this application has a larger overall area formed by connecting the outer points of the vertices of the contour compared to the pentagonal ultrasonic device. It can act on particles distributed in a larger space within the microchannel, thereby enhancing the spatial range of particle capture and thus enhancing the particle capture capability.

[0088] 3) The contour lines of the ultrasonic device provided in this application embodiment are relative to... Figure 1b The pentagonal ultrasonic device shown has more contour lines and more locations where microvortices can be generated, meaning it has more acoustic fluid tunnels for capturing particles, thus enhancing the overall particle capture capability.

[0089] 4) When the ultrasonic device provided in this application is used to capture particles in a fluid, such as... Figures 3a to 3cUnder the relative orientation of the ultrasonic device and the microchannel, the fluid containing particles flows sequentially through multiple ribbon-like branches. The successive action of the acoustic-fluid tunnels within these branches increases the success rate of particle capture, thereby enhancing the overall particle capture capability. One possible reason is that particles not captured by the upstream ribbon-like branch are slowed down by the acoustic-fluid tunnels within those branches, increasing their likelihood of being captured by adjacent downstream ribbon-like branches. Thus, as particles not captured by the upstream ribbon-like branch move downstream, they are successively slowed down as they flow through multiple ribbon-like branches, eventually being captured by the acoustic-fluid tunnel of a downstream branch. This structure is particularly suitable for high-throughput particle sorting.

[0090] 5) When the ultrasonic device provided in this application is used to capture particles in a fluid, such as... Figure 3d The relative orientation of the ultrasonic device and the microchannel allows the fluid containing particles to be captured by multiple branched acoustic-fluid tunnels, increasing the success rate of particle capture and thus enhancing the overall particle capture capability. Each particle flows along its corresponding branched acoustic-fluid tunnel towards the convergence point, where it is released to the second outlet of the downstream microchannel. This structure is particularly suitable for high-throughput particle sorting.

[0091] The second embodiment of this application provides a microfluidic-based centrifugation method, using the microfluidic-based centrifugation device described in the first embodiment or any of the embodiments thereof. The method includes:

[0092] The liquid supply end introduces liquid containing microparticles into the microfluidic module through a pipeline;

[0093] The ultrasonic device is driven to operate, causing at least two of its ribbon-like branches to generate acoustic-fluid tunnels in the liquid within the microchannel, corresponding to the contour edges of the at least two ribbon-like branches. Particles in the liquid within the microchannel are captured by these acoustic-fluid tunnels and released at their ends. The released particles flow towards the second outlet of the microchannel.

[0094] The liquid collection end collects the liquid output from the first outlet of the microchannel through a pipeline;

[0095] The particle collection end collects the liquid containing the particles output from the second outlet of the microchannel through a pipeline.

[0096] In some embodiments, the method further includes: adjusting the power of the ultrasonic device to adjust the effect of the acoustic fluid tunnel in capturing particles, adjusting the size range of the particles that can be captured, with higher power capturing a wider range of particles, including a larger maximum particle size and a smaller minimum particle size.

[0097] In some embodiments, the method further includes adjusting the flow rate of the fluid within the microchannel to adjust the effect of the acoustic fluid tunnel in capturing particles. A faster flow rate results in a narrower range of particles that can be captured, including a smaller maximum particle size and a larger minimum particle size.

[0098] In some embodiments, the method further includes adjusting the power of the ultrasonic device and adjusting the flow rate of the fluid within the microchannel to adjust the particle-capturing effect of the acoustic-fluid tunnel, thereby adjusting the size range of the capturing particles to a desired range. By jointly adjusting these two parameters, a capture effect on particles of a desired size can be achieved. For example, increasing the power of the ultrasonic device and increasing the flow rate of the fluid within the microchannel can reduce the maximum and minimum particle size of the captured particles.

[0099] The third embodiment of this application provides a microfluidic module for use with the microfluidic-based centrifuge device of the first embodiment or any of the embodiments thereof, or for use with the microfluidic-based centrifuge method of the second embodiment or any of the embodiments thereof, wherein:

[0100] like Figure 2c As shown, the microfluidic module includes: a first tube interface, a second tube interface, a third tube interface, a signal interface, a microchannel, and a special ultrasonic device;

[0101] The first tube interface is connected to the inlet of the microchannel and is used for external piping to connect to the liquid supply end; the second tube interface is connected to the first outlet of the microchannel and is used for external piping to connect to the liquid collection end; the third tube interface is connected to the second outlet of the microchannel and is used for external piping to connect to the particle collection end.

[0102] The ultrasonic device is disposed at the bottom of the microchannel and is electrically connected to the signal interface; the signal interface is used to connect an external signal line to the drive module that drives the ultrasonic device to work.

[0103] The ultrasonic device has a shape including at least two strip-shaped branches. When the ultrasonic device is in operation, the at least two strip-shaped branches are used to generate acoustic-fluid tunnels in the liquid within the microchannel, corresponding to the contour edge positions of the at least two strip-shaped branches. These tunnels are used to capture particles in the liquid within the microchannel and release them at the ends of the tunnels. The released particles flow to the second outlet of the microchannel. The end of the acoustic-fluid tunnel refers to the downstream end of the tunnel, and the end of the acoustic-fluid tunnel corresponds to the second outlet of the microchannel.

[0104] In some embodiments, the microfluidic module may further include other pipe interfaces or signal interfaces.

[0105] In some embodiments, the microfluidic module may have multiple microfluidic chips, i.e., multiple microchannels and corresponding ultrasonic devices. These ultrasonic devices can be connected in parallel to the same signal interface or independently to different signal interfaces. The inlets of these microchannels can be connected to the upstream liquid supply end after convergence. The corresponding downstream outlets can also be connected to the downstream collection end after convergence. Thus, the throughput of liquid processing is further improved by using multiple microfluidic chips connected in parallel.

[0106] In some embodiments, the plurality of microfluidic chips may share a common substrate, and the lead-out end of the bottom electrode layer of each special ultrasonic device is connected to an external lead-out end on the substrate, and the top electrode may also be configured to be connected to an external lead-out end.

[0107] The fourth embodiment of this application provides an ultra-ultrasonic device for use in any of the above embodiments. Wherein, as... Figure 4 As shown, the shape of the resonant region of the ultrasonic device includes at least two strip branches, which are respectively used to generate acoustic-fluid tunnels in the liquid within the microchannel corresponding to the contour edge positions of the at least two strip branches; wherein, the resonant region is the overlapping region of the orthographic projections of the bottom electrode layer, piezoelectric layer and top electrode layer of the ultrasonic device onto the substrate.

[0108] in, Figure 4 One example shown is that the top electrode layer is configured to include the strip-shaped branches, which are connected by a connecting portion (located outside the piezoelectric layer, not in the resonant region). It is easy to understand that since the resonant region is the overlapping area of ​​the orthographic projections of the bottom electrode layer, piezoelectric layer, and top electrode layer of the ultrasonic device onto the substrate, other layers could also include the strip-shaped branches. Figure 4 The diagram also shows the lead-out pins of the top and bottom electrode layers. It is easy to understand that these lead-out pins are not limited to being located on the left side or the same side.

[0109] The shape of the resonant region of this special ultrasonic device has several optional embodiments, which can be found in the corresponding description in the first embodiment, or in the appendix. Figures 3a-3d The ultrasonic device shown in the figure, wherein, Figures 3a-3d The dashed box in the image represents the region of the piezoelectric layer.

[0110] This application also provides the results of related experiments based on the above-described embodiments of this application. Below, [the following is an example of experiments conducted using...]. Figure 4The ultrasonic device of the described shape was subjected to the following experiments. The ultrasonic device used had a bend in its strip-shaped branch, forming a long side and a short side. The driving power of the ultrasonic device in each of the following experiments was 1W. The particle size range of the samples used in the following experiments was limited in scope and is not intended to limit this application. In the accompanying drawings corresponding to the following experiments, the bright trajectories are the movement trajectories of the particles captured by the ultrasonic device and their movement trajectories after release. The underlined 200μm marked in some figures represents a scale bar, indicating that the length of the underlined line segment in the figure is 200μm.

[0111] Experiment 1: such as Figure 5a As shown, the convex part of the corner of the turning point of the ribbon branch of the ultrasonic device faces the downstream of the microchannel. The edges of each ribbon branch arranged in the array form stable and considerable acoustic vortices. Particles move along each edge to the turning point and are released under the action of laminar flow. This orientation of the ultrasonic device is particularly suitable for high-throughput screening or high-throughput detection of particles. Figure 5a The left and right images show the effects of the ultrasonic device before and after activation when the sample particles are 150 nm and 1 μm, respectively. The sample particles used in the experiment ranged in size from 200 nm to 1 μm, and all showed significant effects.

[0112] Experiment 2: with Figure 5b As shown, the orientation of the ultrasonic device and microchannel in Experiment 1 was used to test the particle sieving capability under different liquid flow rates, to verify its applicability to high throughput. Taking the capture and release of 1μm particles as an example, the liquid flow rate was increased from 10μl / min to 15μl / min, and then to 20μl / min. When the ultrasonic device was activated, Figure 5b The results all showed that there was a significant screening ability.

[0113] Experiment 3: such as Figure 5c As shown, using the orientation of the ultrasonic device and microchannel in Experiment 1, the experiment tested the effectiveness of sieving 1μm particles from a solution containing a mixture of 200nm and 1μm particles. During the experiment, 200nm particles were pre-stained green and 1μm particles were pre-stained yellow. After mixing, the mixture was injected into the microchannel. Color detection of the fluorescent microspheres captured and sieved by the ultrasonic device showed that all were yellow, indicating 1μm fluorescent microspheres.

[0114] When the ultrasonic device adopts the posture of Experiment 1, the corresponding Figures 5a-5cIn the ultrasonic device, the upstream edge of the same strip branch is brighter than the downstream edge. This may be because the upstream edge contacts the particles first, thus the acoustic-fluid tunnel at the upstream edge captures a large number of particles, and any missed particles continue downstream and may be captured by the acoustic-fluid tunnel at the downstream edge. Conversely, the upstream edge of the downstream strip branch of an adjacent strip branch is brighter than the downstream edge of the upstream strip branch. This may be because the acoustic-fluid tunnel at the downstream edge of the upstream strip branch, while failing to capture particles, does slow them down, making the slowed particles more easily captured by the acoustic-fluid tunnel at the upstream edge of the downstream strip branch.

[0115] This application also tested the lubricating oil and compared it with that of an ultracentrifuge. Specifically, the original sample was treated in an ultracentrifuge at a centrifugal force of 100,000g for 70 minutes, and the supernatant was then compared with the lubricating oil treated by the method described in this application. The comparison results are shown in the table below. After continuous treatment of the lubricating oil using this method, the transmittance of the purified lubricating oil at the outlet is close to that of the lubricating oil treated by a traditional ultracentrifuge.

[0116]

[0117] Experimental results show that, using the proposed method as a centrifuge for continuous processing of lubricating oil, the transmittance of the purified lubricating oil at a wavelength of 500 nm increased by 1.4% compared to the original solution, approaching the transmittance after processing by a traditional ultracentrifuge (centrifugal force: 100,000 g, processing time: 70 minutes). Combined with microscopic observation, the maximum particle size at the purified outlet was significantly reduced, and no impurities larger than 50 μm were detected (the original solution contained particles larger than 50 μm). The circulating outlet concentrated the separated particles, verifying the device's effective separation capability of impurities in lubricating oil. Furthermore, the proposed method, as a centrifuge, achieves fully automated continuous operation through the acoustic-fluid tunneling effect, and compared to traditional membrane filtration and intermittent centrifugation technologies, it possesses the following core advantages:

[0118] No risk of clogging: No filter membrane is required, avoiding equipment downtime and maintenance costs due to particle accumulation;

[0119] High compatibility: Adaptable to lubricating oils of different viscosities (experiments have verified its applicability in the 40-90℃ range), and the separation efficiency can be further optimized by increasing the temperature;

[0120] Energy-efficient and high-performance: A single treatment can achieve the same purification level as a traditional ultracentrifuge, supports continuous flow mode, and is suitable for industrial production line scenarios.

[0121] In the several embodiments provided in this application, it should be understood that the disclosed apparatus and methods are not limited to the above embodiments and can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative. For instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between apparatuses or units may be electrical, mechanical, or other forms.

[0122] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0123] Furthermore, the terms "first, second, third, etc." or similar terms such as module A, module B, and module C used in the specification and claims are only used to distinguish similar objects and do not represent a specific ordering of objects. It is understood that, where permissible, a specific order or sequence may be interchanged so that the embodiments of this application described herein can be implemented in an order other than that illustrated or described herein.

[0124] In the above description, the labels of the steps involved, such as S10, S20, etc., do not mean that the steps will necessarily be executed. The order of the steps can be interchanged or executed simultaneously if permitted.

[0125] The term "comprising" as used in the specification and claims should not be construed as limiting itself to what follows; it does not exclude other elements or steps. Therefore, it should be interpreted as specifying the presence of the mentioned feature, integral, step, or component, but does not exclude the presence or addition of one or more other features, integrals, steps, or components, or groups thereof. Thus, the statement "device comprising means A and B" should not be limited to a device consisting solely of components A and B.

[0126] The terms "an embodiment" or "an embodiment" as used in this specification mean that a particular feature, structure, or characteristic described in conjunction with that embodiment is included in at least one embodiment of this application. Therefore, the terms "in one embodiment" or "in an embodiment" appearing throughout this specification do not necessarily refer to the same embodiment, but may refer to the same embodiment. Furthermore, in one or more embodiments, the particular features, structures, or characteristics can be combined in any suitable manner, as will be apparent to those skilled in the art from this disclosure.

[0127] Note that the above are merely preferred embodiments and the technical principles employed in this application. Those skilled in the art will understand that this application is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of this application. Therefore, although this application has been described in detail through the above embodiments, this application is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of this application, all of which fall within the scope of protection of this application.

Claims

1. A microfluidic-based centrifuge device, characterized in that, Includes a host unit, which has a built-in drive module for driving the ultrasonic device. The top of the host has a groove, in which a microfluidic module is detachably assembled; The microfluidic module includes: a first tube interface, a second tube interface, a third tube interface, a signal interface, a microchannel, and a supersonic device; The first tube interface is connected to the inlet of the microchannel and is connected to the liquid supply end through a pipeline to introduce liquid containing microparticles into the microchannel; the second tube interface is connected to the first outlet of the microchannel and is connected to the liquid collection end through a pipeline; the third tube interface is connected to the second outlet of the microchannel and is connected to the microparticle collection end through a pipeline. The ultrasonic device is disposed at the bottom of the microchannel and is electrically connected to the signal interface; the signal interface is electrically connected to the drive module via a signal line. The shape of the ultrasonic device includes at least two strip-shaped branches. When the ultrasonic device is in operation, the at least two strip-shaped branches are used to generate acoustic-fluid tunnels in the liquid within the microchannel, corresponding to the contour edge positions of the at least two strip-shaped branches. Particles in the liquid within the microchannel are captured by the acoustic-fluid tunnels and released at the ends of the acoustic-fluid tunnels. The released particles flow to the second outlet of the microchannel. The end of the acoustic-fluid tunnel refers to the downstream end of the acoustic-fluid tunnel, and the end of the acoustic-fluid tunnel corresponds to the second outlet of the microchannel.

2. The apparatus according to claim 1, characterized in that, The at least two strip branches are arranged sequentially along the microchannel extension direction, and each strip branch is inclined to the microchannel extension direction.

3. The apparatus according to claim 2, characterized in that, Each of the at least two strip branches includes a bend, the bend forming a convex portion facing downstream of the microchannel; The projection of each turning point in the microchannel extension direction corresponds to the second outlet of the microchannel.

4. The apparatus according to claim 3, characterized in that, The projections of the turning points of each of the at least two strip branches in the microchannel extension direction coincide.

5. The apparatus according to claim 1, characterized in that, The at least two strip branches are arranged sequentially along the cross-sectional direction of the microchannel, and at least a portion of each strip branch is arranged parallel to or inclined to the microchannel extension direction. The downstream ends of the at least two strip branches converge toward one point; The projection of the convergence point in the microchannel extension direction corresponds to the second outlet of the microchannel.

6. The apparatus according to claim 1, characterized in that, The microfluidic module uses a transparent material as the top layer of the microchannel to encapsulate the microchannel. At least a portion of the first tube interface, the second tube interface, or the third tube interface or the signal interface is disposed in the transparent material.

7. The apparatus according to any one of claims 1-6, characterized in that, It also includes an image acquisition module, which is located above the microfluidic module.

8. The apparatus according to claim 7, characterized in that, It also includes a cantilever, which includes a vertical part and a horizontal part located at the top of the vertical part. The bottom end of the vertical part is located at the top of the host, and the horizontal part extends above the microfluidic module and is equipped with the image acquisition module.

9. A microfluidic-based centrifugation method, using the microfluidic-based centrifugation device according to any one of claims 1-5, characterized in that, include: The liquid supply end introduces liquid containing microparticles into the microfluidic module through a pipeline; The ultrasonic device is driven to operate, causing at least two of its ribbon-like branches to generate acoustic-fluid tunnels in the liquid within the microchannel, corresponding to the contour edges of the at least two ribbon-like branches. Particles in the liquid within the microchannel are captured by these acoustic-fluid tunnels and released at their ends. The released particles flow towards the second outlet of the microchannel. The liquid collection end collects the liquid output from the first outlet of the microchannel through a pipeline; The particle collection end collects the liquid containing the particles output from the second outlet of the microchannel through a pipeline.

10. A microfluidic module, used in the microfluidic-based centrifuge device according to any one of claims 1-5, or in the microfluidic-based centrifuge method according to any one of claims 6-9, characterized in that: The microfluidic module includes: a first tube interface, a second tube interface, a third tube interface, a signal interface, a microchannel, and a supersonic device; The first tube interface is connected to the microchannel inlet and is used for external piping to connect to the liquid supply end; the second tube interface is connected to the first outlet of the microchannel and is used for external piping to connect to the liquid collection end; the third tube interface is connected to the second outlet of the microchannel and is used for external piping to connect to the particle collection end. The ultrasonic device is disposed at the bottom of the microchannel and is electrically connected to the signal interface; the signal interface is used to connect an external signal line to the drive module that drives the ultrasonic device. The ultrasonic device has a shape including at least two strip-shaped branches. When the ultrasonic device is in operation, the at least two strip-shaped branches are used to generate acoustic-fluid tunnels in the liquid within the microchannel, corresponding to the contour edge positions of the at least two strip-shaped branches. These tunnels are used to capture particles in the liquid within the microchannel and release them at the ends of the tunnels. The released particles flow to the second outlet of the microchannel. The end of the acoustic-fluid tunnel refers to the downstream end of the tunnel, and the end of the acoustic-fluid tunnel corresponds to the second outlet of the microchannel.

Images