Dust removal system, method and laser processing apparatus

Abstract

The application discloses a dust removal system, a method and a laser processing equipment, and belongs to the technical field of laser processing. In the dust removal system, the detection laser emitting device and the detection laser receiving device are oppositely arranged on two sides of a processing area, the air blowing device is arranged on the dust generation side in the processing area, and the dust extraction device is oppositely arranged with the air blowing device. The control equipment receives the electric signal output by the detection laser receiving device, and dynamically determines the air blowing instruction and the dust extraction instruction according to the electric signal in the case that the dust concentration in the three-dimensional space is greater than the preset concentration indicated by the electric signal. The air blowing device dynamically adjusts the air blowing pressure in response to the air blowing instruction, and the dust extraction device dynamically adjusts the dust extraction power in response to the dust extraction instruction, until the dust concentration is less than or equal to the preset concentration. Through closed-loop feedback, the air blowing pressure and the dust extraction power are always maintained at the optimal balance point under the current working condition, the dust concentration is timely reduced, and the dust removal effect and the dust removal efficiency are improved.

Description

Technical Field

[0001] This application relates to the field of laser processing technology, and in particular to a dust removal system, method and laser processing equipment. Background Technology

[0002] Laser processing is widely used in circuit board manufacturing, panel cutting, semiconductor packaging, and other fields. During laser processing (such as cutting, drilling, and grooving), processing byproducts such as dust and particulate matter are generated. If these are not removed in time, the dust will absorb or scatter the processing laser energy, resulting in a mismatch between the effective energy acting on the workpiece and the process settings. Furthermore, it will contaminate the clean equipment environment, depositing on the laser processing head, light source components, and moving mechanisms. Therefore, a dust removal device, typically consisting of an air blowing assembly and a dust extraction assembly, is usually installed above the processing area to remove the dust.

[0003] However, in traditional dust removal solutions, on the one hand, dust detection methods are mostly based on single-point detection, which has a limited actual detection range and makes it difficult to accurately reflect the actual dust concentration; on the other hand, air blowing and dust extraction are mostly fixed values ​​or preset offline according to the processing mode, which cannot respond to the real-time changes in dust concentration in the processing area. When processing different materials, different processing depths or apertures, different processing densities, or even different process sections of the same workpiece, the amount of dust generated per unit time varies greatly. When the amount of dust increases suddenly, the air blowing volume cannot be increased in time to remove the dust, and when the amount of dust is small, the air blowing volume cannot be reduced. Excessive air blowing volume will cause the dust that can be captured by the dust extraction port to be blown out of the dust extraction range, resulting in poor dust removal effect. Summary of the Invention

[0004] This application provides a dust removal system, method, and laser processing equipment, which can improve the dust removal effect. The technical solution is as follows: In a first aspect, a dust removal system is provided, comprising a detection laser emitting device, a detection laser receiving device, an air blowing device, a dust extraction device, and a control device; the detection laser emitting device and the detection laser receiving device are arranged opposite each other on both sides of a processing area, such that the three-dimensional laser beam emitted by the detection laser emitting device covers the upper area of ​​the processing area in a three-dimensional space formed between the detection laser receiving device and the detection laser emitting device; the air blowing device is arranged on the dust generating side of the processing area, and the dust extraction device is arranged opposite to the air blowing device; the control device receives an electrical signal output by the detection laser receiving device, and when the electrical signal indicates that the dust concentration in the three-dimensional space is greater than a preset concentration, dynamically determines an air blowing command and a dust extraction command based on the electrical signal; the air blowing device dynamically adjusts the air blowing pressure in response to the air blowing command, and the dust extraction device dynamically adjusts the dust extraction power in response to the dust extraction command, until the dust concentration is less than or equal to the preset concentration; when the dust concentration is less than or equal to the preset concentration, the air blowing device blows air at a preset air blowing pressure, and the dust extraction device extracts dust at a preset dust extraction power.

[0005] Secondly, a dust removal method is provided, the method comprising: acquiring an electrical signal output by a detection laser receiving device; the electrical signal indicating the dust concentration in a three-dimensional space; the three-dimensional space covering the area above the processing area; when the dust concentration is greater than a preset concentration, dynamically determining a blowing command and a dust extraction command based on the electrical signal; the blowing command driving the blowing device to dynamically adjust the blowing pressure, and the dust extraction command driving the dust extraction device to dynamically adjust the dust extraction power, until the dust concentration is less than or equal to the preset concentration; when the dust concentration is less than or equal to the preset concentration, controlling the blowing device to blow air at a preset blowing pressure, and controlling the dust extraction device to extract dust at a preset dust extraction power.

[0006] Thirdly, a laser processing apparatus is provided, the laser processing apparatus including a laser processing head and a dust removal system as described in the first aspect; the dust removal system is used to extract dust generated in the processing area where the laser processing head is located.

[0007] Fourthly, a control device is provided, the control device including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the computer program, when executed by the processor, implements the method described in the first aspect.

[0008] Fifthly, a computer-readable storage medium is provided, the computer-readable storage medium storing a computer program that, when executed by a processor, implements the method described in the first aspect.

[0009] In a sixth aspect, a computer program product containing instructions is provided that, when run on a computer, causes the computer to perform the method described in the first aspect.

[0010] This application provides a dust removal system, method, and laser processing equipment. According to the solution provided in this application, the dust removal system includes a laser emission detector, a laser receiver, an air blowing device, a dust extraction device, and a control device. The laser emission detector and the laser receiver are positioned opposite each other on both sides of the processing area, so that the three-dimensional space formed between the three-dimensional laser beam emitted by the laser emission detector and the laser receiver covers the area above the processing area. By using the laser emission detector and the laser receiver to detect changes in dust concentration in the upper area in real time, the detection range is expanded to cover the three-dimensional space above the area, improving the accuracy of the detection results. The air blowing device is positioned on the dust-generating side of the processing area, and the dust extraction device is positioned opposite the air blowing device. The control device receives the electrical signal output by the laser receiver. When the electrical signal indicates that the dust concentration in the three-dimensional space is greater than a preset concentration, the dust removal system is in a dynamic dust removal adjustment phase, dynamically determining the air blowing command and the dust extraction command based on the electrical signal. The control equipment dynamically and cyclically adjusts the blowing pressure and dust extraction power based on the detection results (i.e., the electrical signal converted from the detected optical signal). Both the blowing pressure and dust extraction power are positively correlated with the dust concentration; the higher the dust concentration, the higher the blowing pressure and dust extraction power, achieving refined dust removal control. The blowing device dynamically adjusts the blowing pressure in response to blowing commands, and the dust extraction device dynamically adjusts the dust extraction power in response to dust extraction commands, until the dust concentration is less than or equal to a preset concentration. When the dust concentration is less than or equal to the preset concentration, the dust removal system is in a steady-state maintenance phase, with the blowing device blowing at the preset blowing pressure and the dust extraction device extracting dust at the preset dust extraction power. Through closed-loop feedback, the blowing pressure and dust extraction power are always maintained at the optimal balance point under the current operating conditions, promptly reducing the dust concentration and improving the dust removal effect and efficiency. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a front view of a dust removal system provided in an embodiment of this application; Figure 2 This is a top view of a dust removal system provided in an embodiment of this application; Figure 3 This is a bottom view of a dust removal system provided in an embodiment of this application; Figure 4 This is a side view of a dust removal system provided in an embodiment of this application; Figure 5 This is a side view of another dust removal system provided in an embodiment of this application; Figure 6 This is a schematic diagram of a dynamically adjustable link provided in an embodiment of this application; Figure 7 This is a schematic diagram of the structure of a dust removal system provided in an embodiment of this application; Figure 8 This is a schematic diagram of another dust removal system provided in an embodiment of this application; Figure 9 This is a schematic diagram of another dust removal system provided in the embodiments of this application; Figure 10 This is a schematic diagram of another dust removal system provided in the embodiments of this application; Figure 11 This is a schematic diagram of another dust removal system provided in the embodiments of this application; Figure 12 This is a flowchart of a dust removal method provided in an embodiment of this application; Figure 13 This is a schematic diagram of the structure of a control device provided in an embodiment of this application. Detailed Implementation

[0013] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0014] It should be understood that "multiple" as mentioned in this application refers to two or more. In the description of this application, unless otherwise stated, " / " indicates "or," for example, A / B can mean A or B; "and / or" in this document is merely a description of the relationship between related objects, indicating that three relationships can exist, for example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Furthermore, to facilitate a clear description of the technical solutions of this application, the terms "first," "second," etc., are used to distinguish identical or similar items with essentially the same function and effect. Those skilled in the art will understand that the terms "first," "second," etc., do not limit the quantity or execution order, and that "first," "second," etc., do not necessarily imply differences.

[0015] Before providing a detailed explanation of the embodiments of this application, the relevant technologies of the embodiments of this application will be described first.

[0016] Current technologies using fixed, single-point detection (e.g., D2-class dust detectors) can only detect localized concentrations and cannot reflect the true dust distribution across the entire processing area. When the detection point is located at a low dust concentration, the control equipment may misjudge the situation, causing the air blowing and dust extraction devices to lag in their adjustments. Conversely, when the detection point is located at a high dust concentration, the control equipment may misjudge the situation, leading to over-adjustment of the air blowing and dust extraction devices and affecting the dust removal efficiency.

[0017] This application provides a dust removal system, such as Figure 1 As shown, Figure 1 This is a front view of a dust removal system provided in an embodiment of this application. To facilitate observation of the dust removal system from different perspectives, this embodiment of the application also provides accompanying drawings of the dust removal system from different perspectives, such as... Figures 2-5 As shown, Figure 2 This is a top view of a dust removal system provided in an embodiment of this application. Figure 3 This is a bottom view of a dust removal system provided in an embodiment of this application. Figure 4 and Figure 5 This is a side view of a dust removal system provided in an embodiment of this application.

[0018] The dust removal system includes a detection laser emitting device 10, a detection laser receiving device 20, an air blowing device 30, a dust extraction device 40, and a control device 50. The control device 50 is connected to the detection laser emitting device 10, the detection laser receiving device 20, the air blowing device 30, and the dust extraction device 40 respectively (i.e., the control device 50 establishes signal connections with the above four devices through wired or wireless communication links). The control device 50 sends a transmission command to the detection laser emitting device 10, and the detection laser emitting device 10 responds to the transmission command by emitting a detection laser, which is a three-dimensional laser beam.

[0019] The detection laser emitting device 10 and the detection laser receiving device 20 are arranged opposite each other on both sides of the processing area, so that the three-dimensional space formed between the three-dimensional laser beam emitted by the detection laser emitting device 10 and the detection laser receiving device 20 covers the area above the processing area. By detecting the changes in dust concentration in the area above in real time through the detection laser emitting device 10 and the detection laser receiving device 20, the detection range is expanded to cover the three-dimensional space above, improving the accuracy of the detection results (i.e., the electrical signals converted from the detected optical signals). The blowing device 30 is arranged on the dust-generating side of the processing area, and the dust extraction device 40 is arranged opposite to the blowing device 30. The control device 50 receives the electrical signals output by the detection laser receiving device 20. When the electrical signal indicates that the dust concentration in the three-dimensional space is greater than the preset concentration, the dust removal system is in the dynamic dust removal adjustment stage, and the blowing command and dust extraction command are dynamically determined according to the electrical signal. The control device 50 dynamically and cyclically adjusts the blowing pressure and dust extraction power based on the detection results (i.e., the electrical signals). Both the blowing pressure and dust extraction power are positively correlated with the dust concentration. The higher the dust concentration, the higher the blowing pressure and dust extraction power, thus achieving refined dust removal control. The blowing device 30 dynamically adjusts the blowing pressure in response to the blowing command, and the dust extraction device 40 dynamically adjusts the dust extraction power in response to the dust extraction command, until the dust concentration is less than or equal to the preset concentration. When the dust concentration is less than or equal to the preset concentration, the dust removal system is in a steady-state maintenance phase, with the blowing device 30 blowing at the preset blowing pressure and the dust extraction device 40 extracting dust at the preset dust extraction power. Through closed-loop feedback, the blowing pressure and dust extraction power are always maintained at the optimal balance point under the current operating conditions, promptly reducing the dust concentration and improving the dust removal effect and efficiency.

[0020] In this embodiment, the detection laser receiving device 20 can employ photodiodes, PIN diodes, avalanche photodiodes (APDs), charge-coupled device (CCD) arrays, complementary metal-oxide-semiconductor (CMOS) arrays, etc., to acquire signals and convert the received detection laser energy (i.e., optical signal) into electrical signals (e.g., photocurrent / voltage). This electrical signal can be amplified by a trans-impedance amplifier (TIA), then fed into a bandpass filter to filter out interference signals such as ambient light and power supply ripple, and finally converted into a digital signal by an analog-to-digital converter (ADC) before entering the control device 50.

[0021] In this embodiment, a detection laser emitting device 10 and a detection laser receiving device 20 are arranged in pairs above the processing area. The detection laser emitting device 10 emits a detection laser, which illuminates the detection laser receiving device 20 to detect the amount of dust (i.e., dust concentration). The detection laser can be a point laser scan, a line laser scan, an area laser scan, etc., which can effectively cover and detect the entire processing area.

[0022] In this embodiment, the control device 50 (also referred to as an industrial computer) is used to generate air blowing commands and dust extraction commands based on electrical signals or corresponding digital signals. The control device 50 can be a programmable logic controller (PLC), a field programmable gate array (FPGA), an industrial computer (PC) + motion control card, or other controllers. The response time of the control device 50 can reach the microsecond to nanosecond level (where FPGA can achieve the nanosecond level), making it suitable for high-speed 3D scanning and synchronous control.

[0023] In this embodiment, the actuator of the dust extraction device 40 is a variable frequency negative pressure dust collector. That is, the dust extraction device 40 can be connected to a variable frequency negative pressure dust collector (also called a variable power negative pressure dust collector). The variable frequency negative pressure dust collector is a negative pressure dust collector whose power can be adjusted in real time. The power of the negative pressure dust collector is dynamically adjusted by detecting electrical signals, thereby controlling the dust extraction power of the dust extraction device 40. Variable frequency negative pressure dust collectors can be implemented in various ways; several examples are described below.

[0024] Example 1: A variable frequency negative pressure dust collector may include a frequency converter and a variable frequency fan. The variable frequency fan may be a three-phase asynchronous fan. The dust extraction power command carries the frequency of the frequency converter. Through frequency speed regulation, the dust extraction power is proportional to the frequency. The higher the frequency, the greater the speed and dust extraction power.

[0025] Example 2: Variable frequency negative pressure dust collectors may include electronically speed-controlled fans, such as electronically speed-controlled brushless direct current (BLDC) fans. The dust extraction power command carries a pulse-width modulation (PWM) signal, and the speed is controlled by PWM.

[0026] Example 3: The variable frequency negative pressure dust collector includes a fan with a built-in electronically commutated (EC) controller. The dust extraction power command carries a voltage signal or a current signal, and the speed is adjusted by voltage or current.

[0027] In this embodiment, the actuator of the air blowing device 30 is an electro-proportional valve. That is, the air blowing device 30 can be connected to a pneumatic control element composed of an electro-proportional valve. By adjusting the proportional valve according to the detected signal, the output gas pressure or gas flow rate is proportionally adjusted, mapping the compressed air pressure (or compressed air flow rate) to the electrical signal, thereby controlling the blowing pressure (or blowing volume) of the air blowing device 30. For example, a blowing command (e.g., voltage 0–10 V) controls the opening of the electro-proportional valve, thereby achieving continuous adjustment of the blowing pressure or blowing volume from 0–100%.

[0028] Dust extraction power and air volume are not necessarily better the higher they are. When the dust extraction power is too high, it is easy to suck up the material when processing lightweight materials such as films, which will hinder the processing. When the air volume is too high, it is easy to blow the dust out of the collection area, which will pollute the equipment and the environment.

[0029] Compared to setting a fixed air volume based on different materials, processing depths, and processing densities, the embodiments of this application directly detect dust concentration and adjust the air pressure (which is proportional to the air volume) and dust extraction power based on the dust concentration. Through closed-loop feedback, the air pressure and dust extraction power are always maintained at the optimal balance point under the current working conditions, achieving a more efficient and refined dust removal effect.

[0030] In this embodiment, a detection laser emitting device and a detection laser receiving device are installed above the processing area to detect changes in dust concentration in real time, and the blowing pressure and dust extraction power are dynamically adjusted based on the detection results (i.e., electrical signals). Figures 1-5 The dynamic adjustment dust removal process is explained, such as... Figure 6 As shown, Figure 6 This is a schematic diagram of a dynamic adjustment link provided in an embodiment of this application. When the amount of dust particles increases (dust quantity or concentration increases), the dust scatters and absorbs the detection laser (collectively referred to as extinction), resulting in less energy reaching the detection laser receiver. Therefore, the control device determines that the blowing pressure and dust extraction power should be increased. When the amount of dust particles decreases (dust quantity or concentration decreases), the control device determines that the blowing pressure and dust extraction power should be decreased. When the amount of dust particles is moderate (dust quantity or concentration is appropriate), the control device determines to maintain the current blowing pressure and dust extraction power. By dynamically adjusting the dust extraction power and blowing pressure in real time according to the actual amount of dust generated, effective dust removal can be achieved without affecting processing.

[0031] In this embodiment, the complete closed-loop signal control link is as follows: dust particles → detection laser emitted by the detection laser emitter (scattered and absorbed) → detection laser receiver (performs photoelectric conversion of the received detection laser energy) → transimpedance amplification → bandpass filtering → ADC → control equipment → DAC / digital output → dust extraction power of the frequency converter / blowing pressure of the electro-proportional valve → dust extraction device / blowing device → airflow / dust concentration change in the processing area → feedback to the detection laser receiver. By directly detecting the amount of dust to control the dust extraction power and blowing pressure, efficient removal of dust generated during processing is achieved.

[0032] In some embodiments, the detection laser emitting device 10 includes a laser emitter and a motion scanning device; the laser beam emitted by the laser emitter is transformed into a three-dimensional laser beam by the motion scanning device. The control device 50 controls the motion scanning device to perform scanning and controls the laser emitter to emit a detection laser, which is then scanned to form a three-dimensional laser beam. The laser beam emitted by the laser emitter can be a point laser, a line laser, or a surface laser, and works with the motion scanning device to perform point laser scanning, line laser scanning, or surface laser scanning, thereby forming a three-dimensional laser beam between the detection laser emitting device 10 and the detection laser receiving device 20. That is, the detection laser emitting device 10 and the detection laser receiving device 20 are positioned opposite each other, and the photosensitive surface of the detection laser receiving device 20 is parallel to the cross-section of the three-dimensional scanning area of ​​the three-dimensional laser beam. A three-dimensional space is formed between the emission field of view corresponding to the three-dimensional laser beam and the receiving field of view corresponding to the detection laser receiving device, wherein the emission field of view is determined by the scanning range of the motion scanning device and the divergence angle of the laser beam, and the receiving field of view is determined by the photosensitive range (or photosensitive area) of the photosensitive surface of the detection laser receiving device.

[0033] In other words, the photosensitive surface of the detection laser receiving device 20 faces the cross-section of the three-dimensional scanning area of ​​the three-dimensional laser beam, and the photosensitive area of ​​the photosensitive surface is greater than or equal to the area of ​​the cross-section, so that the photosensitive surface can receive the laser energy of the three-dimensional laser beam to a greater extent, thereby improving the accuracy of the detection results. The length of the three-dimensional space along the extension direction of the laser beam is the distance between the photosensitive surface and the exit point of the motion scanning device.

[0034] When the detection laser emitting device performs point laser scanning, the detection laser receiving device can be a single large-area photodiode or photomultiplier tube, parallel to the cross-section of the three-dimensional scanning area. When the detection laser emitting device performs line laser scanning, the detection laser receiving device can be a linear CCD / CMOS array or a one-dimensional photodiode array, directly opposite the sector of the line laser. When the detection laser emitting device performs area laser scanning, the detection laser receiving device can be a two-dimensional area CCD / CMOS array.

[0035] In related technologies, single-point or linear detection methods for dust concentration in the processing area cannot fully reflect the dust distribution across the entire three-dimensional space above the processing area. In this embodiment, a laser emitter and a motion scanning device work together. The motion scanning device uses a divergent laser beam to repeatedly scan the area above the processing area at high frequency, expanding the detection range from surface detection of the processing area to detection of the three-dimensional space above it. This increases the detection range, covering the entire three-dimensional space above the processing area, improving the accuracy of dust concentration detection, and thus enhancing the precision of dust control.

[0036] In some embodiments, the laser emitter is a point laser emitter, which emits a point laser beam that is approximately a thin ray of light. The motion scanning device includes two motorized mirrors. The point laser beam emitted by the point laser emitter is reflected twice by the two motorized mirrors to form a three-dimensional laser beam in a conical scanning area.

[0037] For example, such as Figure 7 As shown, Figure 7 This is a schematic diagram of a dust removal system provided in an embodiment of this application. Figure 7 Figure A shows the three-dimensional laser beam in the conical scanning region. Figure 7 Figure B shows a cross-section of the conical scanning area (i.e., the scanning trajectory is conical). Viewed from the side of the detection laser receiver 20, the cross-section is a circle, and at certain times, it presents the diameter of the circle.

[0038] In this embodiment, the point laser emitter can be a 650-nanometer (nm) semiconductor laser with a power of 5-50 milliwatts (mW). It is fixed to a frame, and the emitted point laser beam passes sequentially through an X-axis motorized reflector (oscillating around the X-axis) and a Y-axis motorized reflector (oscillating around the Y-axis). Both motorized reflectors are driven by their respective servo motors, allowing for ±20° angular oscillation. The angle is adjusted in space via the two motorized reflectors, similar to galvanometer scanning, resulting in a conical spatial shape.

[0039] It should be noted that the point laser emitter and two motorized reflectors are integrated into the laser emission detection device. The control equipment drives the servo motors of the two motorized reflectors to perform high-speed reciprocating oscillation (e.g., a 100 Hz sine wave) to achieve a conical spatial scanning range. Figure 7 The image only shows the approximate location of the detection laser emitting device 10, and does not show the specific structure of the detection laser emitting device 10.

[0040] In this embodiment, a conical three-dimensional spatial scanning mechanical design is achieved by using a point laser emitter and two motorized reflectors to detect dust concentration in the three-dimensional space above the processing area, thereby improving the accuracy of dust concentration detection and thus enhancing the precision of dust control.

[0041] In some embodiments, based on the above Figure 7 The motion scanning device also includes a planar focusing lens (e.g., an F-θ lens); the three-dimensional laser beam of the conical scanning area passes through the planar focusing lens to form a three-dimensional laser beam of the cylindrical scanning area.

[0042] For example, such as Figure 8 As shown, Figure 8 This is a schematic diagram of another dust removal system provided in an embodiment of this application. Figure 8 Figure A shows the three-dimensional laser beam over the cylindrical scanning area. Figure 8 Figure B shows a cross-section of the cylindrical scanning area (i.e., the scanning trajectory is cylindrical). When viewed from the side of the detection laser receiver 20, the cross-section is a circle, and at certain times, it presents the diameter of the circle.

[0043] In this embodiment, an F-θ mirror is installed after two motorized mirrors. The F-θ mirror acts as a field mirror, focusing laser beams with different incident angles onto the same focal plane, ensuring consistent focal spot size and constant scanning linear velocity. That is, the F-θ mirror ensures a linear relationship between the incident angle and the focal plane position (F-θ relationship), guaranteeing uniform movement of the scanning spot on the focal plane. The point laser emitter, two motorized mirrors, and a planar focusing lens are integrated into the detection laser emission device 10. The control device 50 drives the servo motors of the two motorized mirrors to perform high-speed reciprocating oscillations (e.g., a 100 Hz sine wave). After passing through the F-θ mirror, the conical spatial scanning range is transformed into a cylindrical spatial scanning range.

[0044] In this embodiment, a cylindrical three-dimensional spatial scanning mechanical design is achieved by using a point laser emitter, two motorized reflectors, and an F-θ mirror. This enables the detection of dust concentration in the three-dimensional space above the processing area, improving the accuracy of dust concentration detection and thus enhancing the precision of dust control.

[0045] In some embodiments, the laser emitter is a diverging line laser emitter, which emits a line laser beam in the form of a fan-shaped plane (a light fan that expands outward from the emission point), and the motion scanning device is a first rotating device, a first swinging device, or a first translational device, which will be described in detail below.

[0046] Example 1: A diverging line laser emitter is mounted on a first rotating device. The first rotating device rotates around the emission direction of the line laser beam from the diverging line laser emitter, causing the line laser beam to form a three-dimensional laser beam with a conical scanning area under the action of rotation. This conical scanning area can be seen in the above description. Figure 7 The description will not be repeated here.

[0047] The diverging line laser emitter can be mounted on a first rotating device, which can be driven by a stepper motor and can rotate continuously 360° around the emission direction of the line laser beam. The control device 50 controls the stepper motor of the first rotating device to rotate at a uniform speed, so that the space swept by the line laser beam is conical.

[0048] Example 2: A diverging line laser emitter is mounted on a first oscillating device (also known as a tilting device). The first oscillating device tilts around the emission direction of the line laser beam, so that the line laser beam forms a three-dimensional laser beam in a quadrangular pyramid scanning area under the action of the tilting motion.

[0049] For example, such as Figure 9 As shown, Figure 9 This is a schematic diagram of another dust removal system provided in the embodiments of this application. Figure 9 Figure A shows the three-dimensional laser beam in the square pyramidal scanning area. Figure 9 Figure B shows the cross-section of the quadrangular pyramidal scanning area (i.e., the scanning trajectory is quadrangular pyramidal). Viewed from the side of the detection laser receiver 20, the cross-section is a rectangle, and at certain times, it presents the side length of the rectangle.

[0050] The diverging laser emitter can be mounted on a first oscillating device, which can oscillate up and down (pitch) or oscillate left and right (yaw). The first oscillating device can be a pitch- or yaw-capable lever, and the control device 50 drives the lever to reciprocate in a preset angle range (e.g., ±15°, ±20°, ±30°) to form a pyramidal scanning area. Figure 9 Figure A shows the pyramidal scanning area formed by the tilting lever. The above... Figure 9 Rotating the quadrangular pyramidal scanning area shown in Figure A by 90° will yield the quadrangular pyramidal scanning area formed by the yawable pendulum.

[0051] Example 3: A diverging line laser emitter is mounted on a first translation device. The first translation device is translated in a direction perpendicular to the emission direction of the line laser beam, so that the line laser beam forms a three-dimensional laser beam in a triangular prism scanning area under the translation action.

[0052] For example, such as Figure 10 As shown, Figure 10 This is a schematic diagram of another dust removal system provided in the embodiments of this application. Figure 10 Figure A shows the three-dimensional laser beam in the triangular prism scanning region. Figure 10 Figure B shows the cross-section of the triangular prism scanning region (i.e., the scanning trajectory is triangular prism-shaped). Viewed from the side of the detection laser receiver 20, the cross-section is a rectangle, and at certain times, it presents the side length of the rectangle.

[0053] The diverging laser emitter can be mounted on a first translation device, which can move vertically or horizontally. The first translation device can be a linear motor (e.g., HIWIN LMC series) or a synchronous belt + servo motor. The control device 50 drives the first translation device to reciprocate vertically or horizontally within a preset translation range (e.g., ±0.5mm, ±5mm, ±5cm, ±10cm), forming a triangular prism-shaped scanning area. The preset translation range determines the height of the triangular prism. Figure 10 Figure A shows the triangular prism-shaped scanning area formed by the first translation device, which can be moved up and down. The above... Figure 10 Rotating the triangular prism scanning area shown in Figure A by 90° will yield the triangular prism scanning area formed by the first translation device, which can be moved left and right.

[0054] In this embodiment, a conical three-dimensional spatial scanning mechanical design is achieved by using a diverging laser emitter and a first rotating device; a quadrangular pyramidal three-dimensional spatial scanning mechanical design is achieved by using a diverging laser emitter and a first oscillating device; and a triangular prismal three-dimensional spatial scanning mechanical design is achieved by using a diverging laser emitter and a first translation device. This enables the detection of dust concentration in the three-dimensional space above the processing area, improving the accuracy of dust concentration detection and thus enhancing the precision of dust control.

[0055] In some embodiments, the laser emitter is a constant linewidth laser emitter, and the linewidth along the emission direction of the constant linewidth laser beam is constant (e.g., ±0.1mm, ±0.2mm, ±0.5mm). The emitted line laser beam is in the shape of a rectangular plane. The motion scanning device is a second rotating device, a second swinging device, or a second translational device, which will be described below.

[0056] Example 1: A constant linewidth laser emitter is mounted on a second rotating device. The second rotating device rotates around the emission direction of the constant linewidth laser beam from the constant linewidth laser emitter, causing the constant linewidth laser beam to form a three-dimensional laser beam with a cylindrical scanning area under the action of rotation. This cylindrical scanning area can be seen in the above description. Figure 8 The description will not be repeated here.

[0057] The constant linewidth laser emitter can be a constant linewidth laser beam shaped by a cylindrical mirror. The constant linewidth laser emitter can be mounted on a second rotating device. Control device 50 controls the stepper motor of the second rotating device to rotate at a uniform speed, so that the space swept by the constant linewidth laser beam is cylindrical. The radius of the cylindrical scanning area is the linewidth.

[0058] Example 2: A constant linewidth laser emitter is mounted on a second oscillating device. The second oscillating device tilts about the emission direction of the constant linewidth laser beam, causing the constant linewidth laser beam to form a three-dimensional laser beam with a triangular prism-shaped scanning area under the tilting action. This triangular prism-shaped scanning area can be seen in the above example. Figure 10 The description will not be repeated here.

[0059] The constant linewidth laser emitter can be mounted on a second oscillating device, which can oscillate up and down (pitch) or oscillate left and right (yaw). The second oscillating device can be a pitch- or yaw-capable lever, and the control device 50 drives the lever to reciprocate pitching or yawing within a preset angle range to form a triangular prism-shaped scanning area. The height of the triangular prism scanning area is the linewidth.

[0060] Example 3: A constant linewidth laser emitter is mounted on a second translation device. The second translation device is translated in a direction perpendicular to the emission direction of the constant linewidth laser beam, so that the constant linewidth laser beam forms a three-dimensional laser beam of a cuboid scanning area under the translation action.

[0061] For example, such as Figure 11 As shown, Figure 11 This is a schematic diagram of another dust removal system provided in the embodiments of this application. Figure 11 Figure A shows the three-dimensional laser beam over the cuboid scanning region. Figure 11 Figure B shows the cross-section of the cuboid scanning area (i.e., the scanning trajectory is cuboid). Viewed from the side of the detection laser receiver 20, the cross-section is a rectangle, and at certain times, it presents the side length of the rectangle.

[0062] A constant linewidth laser emitter can be mounted on a second translation device, which can move vertically or horizontally. Control device 50 drives the second translation device to reciprocate vertically or horizontally within a preset translation range, forming a cuboid scanning area. The preset translation range determines the height or width of the cuboid. Figure 11 Figure A shows the cuboid scanning area formed by the second translation device, which can be moved up and down. The above... Figure 11 Rotating the cuboid scanning area shown in Figure A by 90° yields a cuboid scanning area formed by a second translation device that can be moved left and right. The height of the cuboid scanning area is the line width, and the width is the translation range; conversely, the width of the cuboid scanning area is the line width, and the height is the translation range.

[0063] In this embodiment, a cylindrical three-dimensional spatial scanning mechanical design is achieved by using a constant linewidth laser emitter and a second rotating device; a triangular prism-shaped three-dimensional spatial scanning mechanical design is achieved by using a constant linewidth laser emitter and a second swinging device; and a cuboid-shaped three-dimensional spatial scanning mechanical design is achieved by using a constant linewidth laser emitter and a second translation device. This enables the detection of dust concentration in the three-dimensional space above the processing area, improving the accuracy of dust concentration detection and thus enhancing the precision of dust control.

[0064] In some embodiments, the dust-generating side is the light-emitting side of the processing laser, and the wavelength of the processing laser is inconsistent with the wavelength of the detection laser of the detection laser emitting device 10. When the laser beam of the processing laser processes the surface of the circuit board in the processing area, the material processed by the laser will vaporize into the air and then liquefy to form dust particles, or melt and splash to form dust. Based on this, an air blowing device 30 is provided on the side of the scanning range of the processing laser (i.e., the light-emitting side) to blow away the dust in the scanning area of ​​the processing laser, reduce the laser energy loss of the processing laser, and at the same time, blow the dust to the vicinity of the inlet of the dust extraction device 40, which will then suck away the dust. The detection laser emitted by the detection laser emitting device 10 is an auxiliary laser used to detect the dust concentration in the processing area. The wavelengths of the detection laser and the processing laser are staggered to avoid mutual interference.

[0065] For example, when the processing laser uses an infrared fiber laser with a wavelength of 1064 nm, the detection laser uses a visible semiconductor laser with a wavelength of 650 nm. The wavelengths of the two are staggered to avoid mutual interference.

[0066] Example 1: The detection laser receiving device 20 includes a detection laser receiver and a first filter plate for filtering out the processing laser. The first filter plate is mounted on the photosensitive surface of the detection laser receiver.

[0067] When the wavelengths of the processing laser and the detection laser differ significantly, a first filter plate (or filter) can be installed in front of the detection laser receiver. The filter is perpendicular to the processing stage where the processing area is located, that is, the filter is parallel to the photosensitive surface, in order to filter out the wavelength of the processing laser, prevent the laser energy of the processing laser from being received by the photosensitive surface, and improve the accuracy of the detection results.

[0068] Example 2: The detection laser receiving device 20 includes a detection laser receiver and a barrier plate. The barrier plate is installed between the detection laser receiver and the processing area, and its projection on the plane of the photosensitive surface does not overlap with the photosensitive surface. The barrier plate is a baffle or a second filter plate that filters out the processing laser.

[0069] In this embodiment, a baffle is installed along the lower edge of the detection laser receiver (on the side closest to the processing table), parallel to the processing table, to block the laser reflected back from the processing table, thereby improving the accuracy of the detection results. Alternatively, a second filter is installed along the lower edge of the detection laser receiver, parallel to the processing table, to filter out the wavelength of the processing laser, preventing the laser energy of the processing laser from being received by the photosensitive surface, thus improving the accuracy of the detection results.

[0070] Of course, the barrier plate can also be placed between the detection laser receiver and the processing table. The barrier plate is parallel to the processing table or at a certain angle (for example, tilted upwards or downwards), as long as it does not block the receiving path of the photosensitive surface to receive the detection laser. That is, the projection of the barrier plate on the plane of the photosensitive surface does not overlap with the photosensitive surface. In this way, under the premise of ensuring that there are no obstacles in the receiving path, the laser reflected back from the processing table can be blocked, thereby improving the accuracy of the detection results.

[0071] In some embodiments, the control device 50 is used to determine dynamic adjustment parameters based on the deviation between the preset concentration and the dust concentration using a negative feedback closed-loop control algorithm, and to map the dynamic adjustment parameters into air blowing commands and dust extraction commands.

[0072] The control equipment can normalize the dust concentration, taking a value from 0 to 1. Based on the normalized dust concentration C(t) and the preset concentration, it calculates and outputs two control signals in real time: a blowing command and a dust extraction command. The blowing command carries the blowing pressure P_blow(t)∈[P_blow min P_blow max The dust extraction command carries the dust extraction power P_suction(t)∈[P_suction] min P_suction max By normalizing the data and setting the range of blowing pressure and dust extraction power, the impact of abnormal data can be reduced, and the control fault tolerance can be improved. For example, when the control device is powered on and initialized, it first drives the detection laser emitting device to collect baseline light intensity I in a dust-free state in the processing area. During processing, the light intensity I(t) is collected in real time and normalized to the dust concentration C(t) = (I... I(t) / I (or mapped to [0,1] based on the calibration curve) is used as a feedback quantity to participate in PID hierarchical control, thereby ensuring that the normalization process has a reproducible calibration reference.

[0073] The dynamic adjustment parameters are calculated using a negative feedback closed-loop control (PID) algorithm, where PID stands for Proportional, Integral, and Derivative, respectively. For example, the dust concentration C(t) is compared with the preset concentration C_ref, and the deviation e(t) = C(t). C_ref. When the deviation e(t) is negative or 0, that is, C(t) is less than or equal to C_ref, the dust removal system is in a steady-state maintenance stage. The blowing device blows air according to the preset blowing pressure, and the dust extraction device extracts dust according to the preset dust extraction power. When the deviation e(t) is positive, the dynamic adjustment parameter u(t) = K is calculated using the PID algorithm. p ·e(t) + K i ·∫e(t)dt + K d ·de(t) / dt, where K p K i K d The proportional, integral, and derivative coefficients respectively serve to rapidly adjust, eliminate steady-state error, and suppress overshoot. After limiting, u(t) is mapped to the blowing voltage of the electro-proportional valve (e.g., 0–10 V or 4–20 mA) and the dust extraction power command of the variable frequency negative pressure dust collector. Taking the variable frequency negative pressure dust collector, which may include a frequency converter and a variable frequency fan, as an example, the dust extraction power is proportional to the frequency, which can be set between 0–50 Hz. This achieves a complete closed loop: "dust concentration deviation → control command (blowing command and dust extraction command) → electro-proportional valve / variable frequency negative pressure dust collector → blowing / dust extraction → dust concentration return."

[0074] It should be noted that K p K i K d It can be appropriately configured by those skilled in the art based on the actual situation, for example, K p =0.6, K i =0.05, K d =0.01, in this application embodiment, K p K i K d The value is not limited, as long as it can achieve the functions of rapid adjustment, elimination of steady-state error, and suppression of overshoot.

[0075] In some embodiments, the control device 50 is used to determine the target gear corresponding to the target level range where the dust concentration is located based on the dust concentration and multiple level ranges, with one level range corresponding to one gear; generate a blowing command based on the blowing ratio and blowing pressure threshold corresponding to the target gear; and generate a dust extraction command based on the dust extraction ratio and dust extraction power threshold corresponding to the target gear.

[0076] For example, dust concentration is divided into several levels, such as micro dust, light dust, medium dust, and heavy dust. Wherein, C∈[0, 0.2] corresponds to micro dust level → blowing pressure threshold × 30%, dust extraction power threshold × 30%; C∈(0.2, 0.5] corresponds to light dust level → blowing pressure threshold × 50%, dust extraction power threshold × 55%; C∈(0.5, 0.8] corresponds to medium dust level → blowing pressure threshold × 75%, dust extraction power threshold × 80%; C∈(0.8, 1.0] corresponds to heavy dust level → blowing pressure threshold × 100%, dust extraction power threshold × 100%. The level range parameters corresponding to each level can be appropriately configured by those skilled in the art in the control equipment according to the actual material and processing technology of the circuit board in the processing area. The above is only an exemplary illustration and does not constitute a limitation on the scope of protection of this application.

[0077] In this embodiment, the control device determines the target dust concentration range based on the electrical signal indicating dust concentration output by the detection device, extracts the target gear for that range, and assigns a blowing ratio and a dust extraction ratio to each gear. The product of the blowing ratio and a blowing pressure threshold is used as the blowing pressure, and the product of the dust extraction ratio and a dust extraction power threshold is used as the dust extraction power. The blowing pressure of the blowing device and the dust extraction power of the dust extraction device are controlled in real time and dynamically to achieve real-time dust concentration detection. A dual closed-loop control logic of blowing and dust extraction is constructed. Through closed-loop feedback, the blowing pressure and dust extraction power are always maintained at the optimal balance point under the current operating conditions, which promptly reduces the dust concentration and improves the dust removal effect and efficiency.

[0078] In some embodiments, the control device 50 is further configured to switch the first gear to the target gear when the dust concentration is less than the difference between the upper boundary of the target level range and the first preset threshold after the target gear is raised to the first gear; and to switch the second gear to the target gear when the dust concentration is greater than the sum of the lower boundary of the target level range and the second preset threshold after the target gear is lowered to the second gear.

[0079] In this embodiment, to avoid frequent jumps in control commands (including blowing and dust extraction commands) near thresholds during gear switching, a hysteresis band (or delay band) is set at the boundary of each gear, namely, a first preset threshold and a second preset threshold. The first preset threshold and the second preset threshold can be equal or unequal. The first preset threshold and the second preset threshold can be appropriately set by those skilled in the art according to the actual situation, for example, 0.05, 0.1, 0.15, etc. Correspondingly, the hysteresis band value can be ±0.05, ±0.1, ±0.15, etc., and this embodiment does not limit this.

[0080] For example, taking a hysteresis band of ±0.05 and both the first and second preset thresholds of 0.05 as an example, after rising from light dust level (0.2) to medium dust level (0.5), it must drop to below 0.45 before returning to light dust level; conversely, after falling from medium dust level (0.5) to light dust level (0.2), it must rise to above 0.25 before upgrading to medium dust level.

[0081] In this embodiment of the application, by setting a hysteresis band, the control command can be prevented from frequently jumping around the threshold during gear switching, thereby improving switching stability and dust removal safety.

[0082] In some embodiments, the dust-generating side is the light-emitting side of the processing laser; the control device 50 is further configured to generate, according to the growth rule corresponding to the degree of enhancement, a blowing command to increase the blowing pressure and a dust extraction command to increase the dust extraction power when the laser parameters of the processing laser indicate that the laser energy is enhanced; and to generate, according to the reduction rule corresponding to the degree of reduction, a blowing command to reduce the blowing pressure and a dust extraction command to reduce the dust extraction power when the laser parameters indicate that the laser energy is weakened.

[0083] In this embodiment, during laser processing, laser parameters such as processing power, processing pulse frequency, and processing speed can be acquired. By directly superimposing these laser parameters as feedforward quantities onto the control quantities (air blowing pressure and dust removal power), the adjustment time can be shortened. For example, when the laser parameters indicate increased laser energy (e.g., an increase in processing laser power), the air blowing pressure and dust removal power are increased according to a preset growth curve (i.e., a growth rule corresponding to the degree of enhancement), and then fine-tuned by the feedback loop. When the laser parameters indicate decreased laser energy (e.g., a decrease in processing pulse frequency), the air blowing pressure and dust removal power are decreased according to a preset decrease curve (i.e., a decrease rule corresponding to the degree of decrease), and then fine-tuned by the feedback loop. In this way, the dust removal process is closely related to the processing process, improving dust removal adjustment efficiency. For example, the growth rule and the decrease rule can be in the form of linear functions or exponential functions. The specific form and coefficients of the rules can be appropriately set by those skilled in the art based on the actual processing technology and the characteristics of the dust removal system.

[0084] In this embodiment, dust removal control can be achieved through one or more of the following methods: negative feedback closed-loop control (PID) algorithm, setting multiple level intervals, hysteresis loop, and a composite control scheme using laser parameters (feedforward parameters) and feedback loop fine-tuning. This improves the diversity and richness of dust removal control schemes, allowing for the selection of appropriate dust removal control schemes based on the specific scenario in practical applications. The aforementioned dust removal control schemes can be implemented individually or in combination. For example, they can be implemented by combining setting intervals with hysteresis loop, combining feedforward parameters with PID algorithm, or combining feedforward parameters with setting intervals, and so on.

[0085] In some embodiments, the control device 50 is further configured to trigger the start of processing in the processing area, and after triggering the start of processing in the processing area, send a blowing command indicating a preset blowing pressure to the blowing device 30 and a dust extraction command indicating a preset dust extraction power to the dust extraction device 40, turn on the detection laser emitting device 10, and receive the electrical signal output by the detection laser receiving device 20; after triggering the stop of processing in the processing area, generate a blowing command that gradually reduces the blowing pressure and a dust extraction command that gradually reduces the dust extraction power according to a preset reduction rule, until the blowing pressure and dust extraction power reach the stop threshold, and then turn off the detection laser emitting device 10 and the detection laser receiving device 20.

[0086] In this embodiment, the dust removal control sequence is as follows: The dust removal system is powered on, the control equipment is initialized, and the blowing device and dust extraction device are turned off. The control equipment sends a start signal to the processing laser, triggering the processing laser to start processing. Then, the control equipment turns on the blowing device and dust extraction device (e.g., 30%). The blowing device blows air at a preset blowing pressure (e.g., 30% × blowing pressure threshold), and the dust extraction device extracts dust at a preset dust extraction power (e.g., 30% × dust extraction power threshold). The control equipment starts the detection laser emitting device to emit a detection laser. After the detection laser stabilizes, it receives the electrical signal output by the detection laser receiving device. Entering the processing cycle, the control equipment collects the electrical signal at a first set frequency (e.g., 1 kHz) and executes a PID algorithm once, that is, calculates the PID output once every 10 ms. The blowing pressure of the blowing device (e.g., an electro-proportional valve) and the dust extraction power of the dust removal device (e.g., a frequency converter) are updated synchronously according to the PID output. Meanwhile, the three-dimensional scanning mechanism (detecting the laser emitting device and the laser receiving device) updates its position at a second set frequency (e.g., 100 Hz), covering the entire three-dimensional space.

[0087] The control equipment sends a shutdown signal to the processing laser, triggering the processing laser to stop processing. The control equipment gradually reduces the blowing pressure to 0% and the dust extraction power to 0% according to the preset reduction rules, achieving a soft shutdown to avoid sudden airflow changes. At the same time, it shuts down the detection laser emitting device and the detection laser receiving device.

[0088] In this embodiment, the control device acquires the scanning command of the processing laser and synchronizes the scanning path of the detection laser with the scanning path of the processing laser in time. That is, the three-dimensional scanning mechanism (detection laser emitting device and detection laser receiving device) is synchronized with the processing laser. For example, the scanning period of the detection laser is an integer fraction of the scanning period of the processing laser (e.g., 5–10 times), ensuring that each processing point has a corresponding dust concentration sample, thus improving the accuracy of the detection results (i.e., electrical signals). By controlling the entire dust removal control process, the scanning position of the three-dimensional scanning mechanism, and the on / off status of each device, the controllability and operability of the dust removal process are improved, interaction is reduced, and dust removal efficiency is increased.

[0089] It should be noted that the dust removal system provided in the above embodiments is only illustrated by the division of the above functional modules when removing dust from the processing area. In actual applications, the above functions can be assigned to different functional modules as needed, that is, the internal structure of the device can be divided into different functional modules to complete all or part of the functions described above.

[0090] The functional units and modules in the above embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit. Furthermore, the specific names of the functional units and modules are only for easy differentiation and are not intended to limit the scope of protection of the embodiments of this application.

[0091] Based on the dust removal system provided in the above embodiments, this application provides a dust removal method. The execution subject of this dust removal method is a control device, and this dust removal method can be applied to the above-mentioned dust removal system. The structure of the dust removal system can be found in the above description. Figure 12 As shown, Figure 12 This is a flowchart of a dust removal method provided in an embodiment of this application. The dust removal method includes: S101. Acquire the electrical signal output by the detection laser receiver; the electrical signal indicates the dust concentration in three-dimensional space; the three-dimensional space covers the area above the processing area.

[0092] S102. When the dust concentration is greater than the preset concentration, the blowing command and the dust extraction command are dynamically determined according to the electrical signal. The blowing command is used to drive the blowing device to dynamically adjust the blowing pressure, and the dust extraction command is used to drive the dust extraction device to dynamically adjust the dust extraction power until the dust concentration is less than or equal to the preset concentration.

[0093] S103. When the dust concentration is less than or equal to the preset concentration, control the blowing device to blow air at the preset blowing pressure and control the dust extraction device to extract dust at the preset dust extraction power.

[0094] In this embodiment, the detection range is expanded to cover a three-dimensional space encompassing the upper region, enabling real-time detection of dust concentration changes in the upper region and improving the accuracy of the detection results (i.e., electrical signals). Based on the detection results (i.e., electrical signals), the blowing pressure and dust extraction power are dynamically and cyclically adjusted. Both the blowing pressure and dust extraction power are positively correlated with the dust concentration; the higher the dust concentration, the higher the blowing pressure and dust extraction power, achieving refined dust removal control until the dust concentration is less than or equal to a preset concentration. When the dust concentration is less than or equal to the preset concentration, the blowing device is controlled to blow air at a preset blowing pressure, and the dust extraction device is controlled to extract dust at a preset dust extraction power. Through closed-loop feedback, the blowing pressure and dust extraction power are always maintained at the optimal balance point under the current operating conditions, promptly reducing the dust concentration and improving the dust removal effect and efficiency.

[0095] In some embodiments, S102 can also be implemented in the following ways: Based on the deviation between the preset concentration and the dust concentration, a negative feedback closed-loop control algorithm is used to determine dynamic adjustment parameters, which are then mapped to blowing commands and dust extraction commands; or, based on the dust concentration and multiple level ranges, a target gear corresponding to the target level range where the dust concentration is located is determined, with one level range corresponding to one gear; a blowing command is generated based on the blowing ratio and blowing pressure threshold corresponding to the target gear, and a dust extraction command is generated based on the dust extraction ratio and dust extraction power threshold corresponding to the target gear.

[0096] In some embodiments, the dust removal method further includes the following steps: when the target gear is raised to the first gear, if the dust concentration is less than the difference between the upper boundary of the target level range and the first preset threshold, the first gear is switched to the target gear; when the target gear is lowered to the second gear, if the dust concentration is greater than the sum of the lower boundary of the target level range and the second preset threshold, the second gear is switched to the target gear.

[0097] In some embodiments, the dust-generating side is the light-emitting side of the processing laser; S102 described above can also be implemented in the following ways. When the laser parameters of the processing laser indicate an increase in laser energy, a blowing command to increase the blowing pressure and a dust extraction command to increase the dust extraction power are generated according to a growth rule corresponding to the degree of enhancement. For example, the preset growth rule includes gradually increasing according to a linear curve or an exponential curve. When the laser parameters indicate a decrease in laser energy, a blowing command to decrease the blowing pressure and a dust extraction command to decrease the dust extraction power are generated according to a decrease rule corresponding to the degree of decrease. For example, the preset decrease rule includes gradually decreasing according to a linear curve or an exponential curve.

[0098] In some embodiments, the dust removal method further includes the following steps: triggering the processing zone to start processing; after triggering the processing zone to start processing, sending a blowing command indicating a preset blowing pressure to the blowing device and a dust extraction command indicating a preset dust extraction power to the dust extraction device; turning on the detection laser emitting device and receiving the electrical signal output by the detection laser receiving device; after triggering the processing zone to stop processing, generating a blowing command that gradually reduces the blowing pressure and a dust extraction command that gradually reduces the dust extraction power according to a preset reduction rule, until the blowing pressure and dust extraction power reach a stop threshold, and then turning off the detection laser emitting device and the detection laser receiving device.

[0099] The dust removal method and dust removal system provided in the above embodiments belong to the same concept. For the specific working process and technical effects of the above embodiments, please refer to the system embodiments section, which will not be repeated here.

[0100] Based on the dust removal method provided in the above embodiments, this application also provides a laser processing device, such as a laser drilling machine or a laser cutting machine. The laser processing device includes a laser processing head and the dust removal system described in any of the above embodiments. The dust removal system is used to extract dust generated in the processing area where the laser processing head is located.

[0101] Laser processing equipment may also include a stage located below the laser processing head, which forms a processing area for stably placing the workpiece to be processed (e.g., a circuit board).

[0102] The laser processing equipment provided in this application includes the dust removal system of any of the above embodiments, and therefore has all the technical effects of the dust removal system of any of the above embodiments, which will not be elaborated here.

[0103] The dust removal method provided in the above embodiments Figure 13 This is a schematic diagram of the structure of a control device provided in an embodiment of this application, such as... Figure 13 As shown, the control device 50 includes: a processor 501, a memory 502, and a computer program 503 stored in the memory 502 and executable on the processor 501. When the processor 501 executes the computer program 503, it implements the steps in the dust removal method in the above embodiments.

[0104] The control device 50 can be a general-purpose computer device or a special-purpose computer device. In specific implementations, the control device 50 can be a desktop computer, a portable computer, a network server, a handheld computer, a mobile phone, a tablet computer, a wireless terminal device, a communication device, or an embedded device. This application embodiment does not limit the type of control device 50. Those skilled in the art will understand that... Figure 13This is merely an example of control device 50 and does not constitute a limitation on control device 50. It may include more or fewer components than shown, or combine certain components, or different components, such as input / output devices, network access devices, etc.

[0105] Processor 501 can be a Central Processing Unit (CPU), or it can be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor can be a microprocessor or any conventional processor.

[0106] In some embodiments, memory 502 may be an internal storage unit of the control device 50, such as a hard disk or memory of the control device 50. In other embodiments, memory 502 may be an external storage device of the control device 50, such as a plug-in hard disk, smart media card (SMC), secure digital card (SD), flash card, etc., equipped on the control device 50. Furthermore, memory 502 may include both internal and external storage units of the control device 50. Memory 502 is used to store the operating system, applications, boot loader, data, and other programs. Memory 502 may also be used to temporarily store data that has been output or will be output.

[0107] This application embodiment also provides a control device 50, which includes: at least one processor, a memory, and a computer program stored in the memory and executable on the at least one processor. When the processor executes the computer program, it implements the steps in any of the above-described method embodiments.

[0108] This application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, can implement the steps in the various method embodiments described above.

[0109] This application provides a computer program product that, when run on a computer, causes the computer to perform the steps described in the various method embodiments above.

[0110] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, all or part of the processes in the above method embodiments of this application can be implemented by a computer program instructing related hardware. This computer program can be stored in a computer-readable storage medium, and when executed by a processor, it can implement the steps of the various method embodiments described above. The computer program includes computer program code, which can be in the form of source code, object code, executable files, or some intermediate form. The computer-readable medium can include at least: any entity or device capable of carrying the computer program code to a photographing device / terminal device, a recording medium, a computer memory, ROM (Read-Only Memory), RAM (Random Access Memory), CD-ROM (Compact Disc Read-Only Memory), magnetic tape, floppy disk, and optical data storage devices. The computer-readable storage medium mentioned in this application can be a non-volatile storage medium; in other words, it can be a non-transient storage medium.

[0111] It should be understood that all or part of the steps of the above embodiments can be implemented by software, hardware, firmware, or any combination thereof. When implemented in software, it can be implemented in whole or in part as a computer program product. The computer program product includes one or more computer instructions. The computer instructions can be stored in the above-described computer-readable storage medium.

[0112] In the above embodiments, the descriptions of each embodiment have different focuses. For parts that are not described in detail or recorded in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0113] Those skilled in the art will recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0114] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A dust removal system, characterized in that, The system includes a detection laser emitting device, a detection laser receiving device, an air blowing device, a dust extraction device, and a control device; The detection laser emitting device and the detection laser receiving device are arranged opposite each other on both sides of the processing area, so that the three-dimensional laser beam emitted by the detection laser emitting device and the three-dimensional space formed between the detection laser receiving device cover the upper area of ​​the processing area. The air blowing device is located on the dust-generating side of the processing area, and the dust extraction device is located opposite to the air blowing device. The control device receives the electrical signal output by the detection laser receiving device, and when the electrical signal indicates that the dust concentration in the three-dimensional space is greater than the preset concentration, it dynamically determines the blowing command and the dust extraction command based on the electrical signal. The blowing device dynamically adjusts the blowing pressure in response to the blowing command, and the dust extraction device dynamically adjusts the dust extraction power in response to the dust extraction command, until the dust concentration is less than or equal to the preset concentration; when the dust concentration is less than or equal to the preset concentration, the blowing device blows air at the preset blowing pressure, and the dust extraction device extracts dust at the preset dust extraction power.

2. The dust removal system as described in claim 1, characterized in that, The detection laser emission device includes a laser emitter and a motion scanning device; The laser beam emitted by the laser emitter is transformed into the three-dimensional laser beam by the motion scanning device. The photosensitive surface of the detection laser receiving device faces the cross section of the three-dimensional scanning area of ​​the three-dimensional laser beam, and the photosensitive area of ​​the photosensitive surface is greater than or equal to the area of ​​the cross section; The length of the three-dimensional space along the extension direction of the laser beam is the distance between the photosensitive surface and the emission point of the motion scanning device.

3. The dust removal system as described in claim 2, characterized in that, The laser emitter is a point laser emitter, and the motion scanning device includes two motorized reflectors; The point laser beam emitted by the point laser emitter is reflected twice by the two motorized mirrors to form a three-dimensional laser beam in a conical scanning area.

4. The dust removal system as described in claim 3, characterized in that, The motion scanning device also includes a planar focusing lens; The three-dimensional laser beam in the conical scanning area passes through the planar focusing lens to form a three-dimensional laser beam in the cylindrical scanning area.

5. The dust removal system as described in claim 2, characterized in that, The laser emitter is a diverging line laser emitter, and the motion scanning device is a first rotating device, a first swinging device, or a first translational device. The diverging line laser emitter is mounted on the first rotating device, which rotates around the emission direction of the line laser beam of the diverging line laser emitter, so that the line laser beam forms a three-dimensional laser beam in a conical scanning area under the action of rotation. Alternatively, the diverging line laser emitter is mounted on the first oscillating device, which tilts about the emission direction of the line laser beam, so that the line laser beam forms a three-dimensional laser beam with a square pyramidal scanning area under the action of the tilting motion. Alternatively, the diverging line laser emitter is mounted on the first translation device, which translates in a direction perpendicular to the emission direction of the line laser beam, so that the line laser beam forms a three-dimensional laser beam in a triangular prism scanning area under the translation action.

6. The dust removal system as described in claim 2, characterized in that, The laser emitter is a constant linewidth laser emitter, and the motion scanning device is a second rotation device, a second swing device, or a second translation device; The constant linewidth laser emitter is mounted on the second rotating device, which rotates around the emission direction of the constant linewidth laser beam of the constant linewidth laser emitter, so that the constant linewidth laser beam forms a three-dimensional laser beam with a cylindrical scanning area under the action of rotation. Alternatively, the constant linewidth laser emitter is mounted on the second oscillating device, which tilts about the emission direction of the constant linewidth laser beam, so that the constant linewidth laser beam forms a three-dimensional laser beam with a triangular prism scanning area under the tilting action; Alternatively, the constant linewidth laser emitter is mounted on the second translation device, which translates in a direction perpendicular to the emission direction of the constant linewidth laser beam, so that the constant linewidth laser beam forms a three-dimensional laser beam of a cuboid scanning region under the translation action.

7. The dust removal system according to any one of claims 1-6, characterized in that, The dust-generating side is the light-emitting side of the processing laser, and the wavelength of the processing laser is inconsistent with the wavelength of the detection laser of the detection laser emitting device. The detection laser receiving device includes a detection laser receiver and a first filter plate for filtering out the processing laser, wherein the first filter plate is mounted on the photosensitive surface of the detection laser receiver; Alternatively, the detection laser receiving device includes a detection laser receiver and a barrier plate, wherein the barrier plate is installed between the detection laser receiver and the processing area, and its projection on the plane where the photosensitive surface is located does not overlap with the photosensitive surface; the barrier plate is a baffle or a second filter plate that filters out the processing laser.

8. The dust removal system according to any one of claims 1-6, characterized in that, The control device is used to determine dynamic adjustment parameters based on the deviation between the preset concentration and the dust concentration using a negative feedback closed-loop control algorithm, and to map the dynamic adjustment parameters to the blowing command and the dust extraction command. Alternatively, based on the dust concentration and multiple grade ranges, determine the target gear corresponding to the target grade range where the dust concentration is located, with one grade range corresponding to one gear; generate the blowing command based on the blowing ratio and blowing pressure threshold corresponding to the target gear, and generate the dust extraction command based on the dust extraction ratio and dust extraction power threshold corresponding to the target gear.

9. The dust removal system as described in claim 8, characterized in that, The control device is further configured to, when the target gear is raised to the first gear, switch the first gear to the target gear if the dust concentration is less than the difference between the upper boundary of the target level range and the first preset threshold; and when the target gear is lowered to the second gear, switch the second gear to the target gear if the dust concentration is greater than the sum of the lower boundary of the target level range and the second preset threshold.

10. The dust removal system according to any one of claims 1-6, characterized in that, The dust-generating side is the light-emitting side of the processing laser; The control device is also used to generate a blowing command to increase the blowing pressure and a dust extraction command to increase the dust extraction power according to a growth rule corresponding to the degree of enhancement when the laser parameters of the processing laser indicate that the laser energy is enhanced. If the laser parameters indicate a decrease in laser energy, a blowing command to reduce the blowing pressure and a dust extraction command to reduce the dust extraction power are generated according to the reduction rules corresponding to the degree of reduction.

11. The dust removal system according to any one of claims 1-6, characterized in that, The control device is also used to trigger the processing area to start processing, and after triggering the processing area to start processing, to send a blowing command indicating the preset blowing pressure to the blowing device, and to send a dust extraction command indicating the preset dust extraction power to the dust extraction device, to turn on the detection laser emitting device, and to receive the electrical signal output by the detection laser receiving device. After the processing area is triggered to stop processing, a blowing command to gradually reduce the blowing pressure and a dust extraction command to gradually reduce the dust extraction power are generated according to a preset reduction rule until the blowing pressure and the dust extraction power reach the stop threshold, and the detection laser emitting device and the detection laser receiving device are turned off.

12. A dust removal method, characterized in that, The method includes: Acquire the electrical signal output by the detection laser receiving device; the electrical signal indicates the dust concentration in three-dimensional space; the three-dimensional space covers the area above the processing area; When the dust concentration is greater than the preset concentration, the blowing command and the dust extraction command are dynamically determined according to the electrical signal; the blowing command is used to drive the blowing device to dynamically adjust the blowing pressure, and the dust extraction command is used to drive the dust extraction device to dynamically adjust the dust extraction power until the dust concentration is less than or equal to the preset concentration. When the dust concentration is less than or equal to the preset concentration, the blowing device is controlled to blow air at a preset blowing pressure, and the dust extraction device is controlled to extract dust at a preset dust extraction power.

13. A laser processing device, characterized in that, The laser processing equipment includes a laser processing head and a dust removal system as described in any one of claims 1-11; The dust removal system is used to extract dust generated in the processing area where the laser processing head is located.

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