Cutting process and cutting apparatus for aluminum titanium carbon material

Abstract

The application provides a cutting process and cutting equipment of aluminum-titanium-carbon material, and relates to the technical field of aluminum-titanium-carbon material processing. The cutting process of the aluminum-titanium-carbon material comprises the following steps: placing the aluminum-titanium-carbon material to be cut on a fixed platform of a cutting equipment, so that the side surfaces of the aluminum-titanium-carbon material are respectively attached to bearing modules on the fixed platform; starting a vacuum adsorption function, and adsorbing and fixing the aluminum-titanium-carbon material on the fixed platform through a vacuum adsorption groove; controlling a main shaft to drive a scribing blade to cut downward and spray cutting cooling water to the aluminum-titanium-carbon material, so as to cut the aluminum-titanium-carbon material into a strip-shaped material; taking out the cut strip-shaped material, and pushing the remaining aluminum-titanium-carbon material against the bearing modules again, and continuing to cut the next strip-shaped material. The cutting process eliminates the cumbersome process of traditional film fixing, realizes continuous and automatic cutting, avoids cutting defects caused by material displacement, and lays a foundation for high-good-product-ratio cutting.

Description

Technical Field

[0001] This invention relates to the field of aluminum-titanium-carbon material processing technology, and more specifically, to a cutting process and cutting equipment for aluminum-titanium-carbon materials. Background Technology

[0002] The standard implementation process of the diamond dicing process currently used in the industry for processing ceramic and semiconductor magnetic storage wafers is as follows: After the Ti3AlC2 material is coated with a dicing blue film, it is rigidly fixed to the dicing stage by vacuum adsorption; a fixed-size diamond dicing wheel is selected, the spindle maintains a constant rotation speed, and the feed platform adopts a single uniform speed feed throughout the process; the cooling system only continuously sprays room temperature deionized water to achieve basic cooling and chip removal; the processing mode adopts a single pass to cut through 70% to 90% of the wafer thickness, and after dicing, the grain separation is completed by the external force of film expansion and stretching; there is no anti-oxidation lubrication composite cooling medium, and the dicing path, dicing wheel speed, and cooling flow rate adopt uniform constant parameters throughout the process. This process is widely used in the dicing of silicon wafers and alumina ceramic substrates, and it is also the mainstream processing method for dicing SOT-MRAM wafers (Spin-Orbit Torque Magnetic Random Access Memory) on Ti3AlC2 substrates in the laboratory and in small and medium batches at present.

[0003] The existing general constant parameter dicing process for processing SOT-MRAM wafers on Ti3AlC2 substrates has multiple inherent defects, which cannot meet the yield and reliability requirements for mass production of high-density spin magnetic memory devices: 1. The interlayer bonding strength of Ti3AlC2 is low. The constant dicing pressure throughout the process generates concentrated transverse shear stress, which easily leads to interlayer slippage, large-area edge chipping, and extended microcracks inside the wafer on both sides of the dicing track. The cracks continue to expand in the subsequent molding, high and low temperature cycling, and reflow soldering processes, damaging the MTJ magnetic tunnel junction array on both sides of the dicing track, causing mechanical breakage and leakage failure of the memory cells. 2. The lubrication and buffering performance of the single pure water cooling system is insufficient. The grinding friction of the cutter wheel generates local instantaneous high temperatures of 300℃~500℃, which rapidly oxidizes the Al element on the surface of Ti3AlC2 to form insulating TiO2 and Al2O3 films, blocking the conduction of spin current, significantly reducing spin orbital torque, and doubling the device write power consumption; 3. The diamond cutter wheel continuously rubs against the hard Ti3AlC2 grains, causing the cutter wheel to become passivated quickly, resulting in poor cutting edge quality; 4. Without segmented process control, the feed speed is fast and the impact load is large in the rough grooving stage, which aggravates wafer delamination damage; the speed in the fine cutting and forming stage is too low, limiting the batch processing capacity; after dicing, the grains are separated by pure external force to expand the film and tear it apart. The external force stretching further amplifies interlayer peeling and serrated defects, resulting in a finished product yield of less than 65%; there are many processes and the yield is low.

[0004] Therefore, there is an urgent need for a cutting process and equipment for aluminum-titanium-carbon materials that can improve the yield of aluminum-titanium-carbon materials and reduce the number of processes. Summary of the Invention

[0005] This application proposes a cutting process and cutting equipment for aluminum-titanium-carbon materials, which solves the problems of low yield and complex processes in related technologies.

[0006] Therefore, the first objective of this application is to provide a cutting process for aluminum-titanium-carbon materials.

[0007] The second objective of this application is to provide an aluminum-titanium-carbon material cutting device.

[0008] In view of the above, the first aspect of this application provides a cutting process for aluminum-titanium-carbon materials, comprising: placing the aluminum-titanium-carbon material to be cut on a fixed platform of a cutting device, such that at least two adjacent sides of the aluminum-titanium-carbon material are respectively attached to the support module on the fixed platform; activating the vacuum adsorption function, adsorbing and fixing the aluminum-titanium-carbon material onto the fixed platform through the vacuum adsorption groove on the surface of the fixed platform; controlling the spindle to drive the dicing blade to cut and spray cutting cooling water onto the aluminum-titanium-carbon material to cut the aluminum-titanium-carbon material into strips; removing the cut strips and pushing the remaining aluminum-titanium-carbon material back onto the support module to continue cutting the next strip.

[0009] In this technical solution, the dual fixing method of vacuum adsorption and support module bonding eliminates the cumbersome process of traditional film fixing, saves material costs and improves overall processing efficiency. At the same time, the combination of cutting and cooling water spraying, and the cyclical "take-out-push" operation, realizes continuous automated cutting, ensures processing efficiency and material fixation stability, avoids cutting defects caused by material displacement, and lays the foundation for high yield cutting.

[0010] In any of the above technical solutions, the cutting cooling water optionally includes pure water and lubricating fluid, wherein the ratio of pure water to lubricating fluid is 7:1.

[0011] In this technical solution, a specific ratio of 7:1 pure water to lubricant is used as the cutting cooling water. Compared with pure water cooling alone, the lubricant can effectively enhance the lubrication and buffering performance of the cooling medium, significantly reduce the friction coefficient between the dicing blade and the hard Ti3AlC2 grains, thereby avoiding local instantaneous high temperature caused by friction. This solves the problem of high-temperature oxidation of Al elements on the surface of Ti3AlC2 to form an insulating film, ensuring the material's electrical conductivity and spin transport performance.

[0012] In any of the above technical solutions, optionally, the cooling water supply method for cutting is a combination of side spray and front and rear spray, wherein the flow rate of the side spray is greater than or equal to 1.0 L / min and less than or equal to 1.4 L / min, and the flow rate of the front and rear spray is greater than or equal to 1.0 L / min and less than or equal to 1.4 L / min.

[0013] This technical solution employs a three-dimensional spraying method combining side spraying and front / rear spraying, with the flow rate limited to a reasonable range of 1.0 L / min to 1.4 L / min. This ensures sufficient and uniform cooling and lubrication of the cutting area, promptly flushing away metal debris generated during cutting, preventing debris from embedding in the cut surface or scratching the material surface, further preventing cut surface contamination and high-temperature oxidation, and guaranteeing the cleanliness of the cutting path and the electrical reliability of the device. Specifically, front / rear spraying refers to spraying from the front and rear sides of the dicing blade, while side spraying sprays directly onto the blade edge. The blade edge divides the cooling water into two streams to cool both the blade and the workpiece.

[0014] In any of the above technical solutions, optionally, after each strip of material is cut, the dicing blade is controlled to be sharpened, and after sharpening is completed, the cutting of the next strip of material continues.

[0015] In this technical solution, automatic sharpening is performed after each cutting operation (each piece of material is cut), which can promptly remove metal residues adhering to the edge of the diamond dicing blade, solving the problem of rapid dulling of the blade after continuous cutting. This ensures that the blade remains sharp with each cut, thereby significantly reducing the lateral shear stress caused by tool dulling. It effectively suppresses interlayer slippage on both sides of the cutting path, large-area edge chipping (which can be controlled within 10μm), and internal extended microcracks, greatly improving the cutting yield to 99%.

[0016] In any of the above technical solutions, optionally, when controlling the dicing cutter to perform grinding, the spindle speed is greater than or equal to 15000 RPM (revolutions per minute) and less than or equal to 25000 RPM, and the cutting depth is set to greater than or equal to 0.5 mm (millimeters) and less than or equal to 0.9 mm.

[0017] In this technical solution, controlling the spindle speed (15000 RPM - 25000 RPM) and depth of cut (0.5 mm - 0.9 mm) during dicing provides an optimal process window for online sharpening. The appropriate spindle speed and depth of cut effectively trim the cutting edge and restore sharpness without damaging the diamond tip or causing excessive wear on the sharpening plate due to excessive sharpening force, thus ensuring a balance between sharpening efficiency and tool life.

[0018] In any of the above technical solutions, optionally, when controlling the spindle to drive the dicing blade to cut, the spindle speed is greater than or equal to 15000 RPM and less than or equal to 25000 RPM, and the spindle cutting speed is greater than or equal to 0.4 mm / s and less than or equal to 1 mm / s.

[0019] In this technical solution, the spindle speed (15000 RPM - 25000 RPM) and cutting speed (0.4 mm / s - 1 mm / s) of the dicing blade are controlled during cutting. The reasonable speed combined with the relatively low cutting speed can regulate the feed stress and avoid the generation of concentrated transverse shear stress by constant high pressure throughout the process. Thus, while ensuring a certain cutting efficiency, the generation of interlayer slip, edge chipping and subsurface microcracks is suppressed to the greatest extent.

[0020] The second aspect of this application provides an aluminum-titanium-carbon material cutting device for implementing the aluminum-titanium-carbon material cutting process as provided in the first aspect. The aluminum-titanium-carbon material cutting device includes: a fixed platform with a vacuum adsorption tank for placing the aluminum-titanium-carbon material, the vacuum adsorption tank being connected to a vacuum source to adsorb and fix the aluminum-titanium-carbon material; a support mechanism including a first support module and a second support module, the first support module being used to support the aluminum-titanium-carbon material on a first side in a first direction, and the second support module being used to support the aluminum-titanium-carbon material on a second side in a second direction, the number of second sides being two, and the number of second support modules being two, respectively disposed on both sides of the aluminum-titanium-carbon material; a spindle system including a spindle and a dicing blade mounted on the spindle, the spindle being used to drive the dicing blade to rotate to perform the cutting action; and a spray system for spraying cutting cooling water onto the aluminum-titanium-carbon material.

[0021] In this technical solution, the aluminum-titanium-carbon material cutting equipment, through the coordinated operation of the fixed platform, support mechanism, spindle system and spray system, provides a reliable hardware carrier for realizing the film-free vacuum adsorption fixation, precise cutting, continuous feeding and cooling lubrication of aluminum-titanium-carbon materials, thereby improving the automation level and process adaptability of the equipment.

[0022] Optionally, in any of the above technical solutions, the first bearing module is provided with a plurality of circular holes with vacuum adsorption function for adsorbing and fixing the cut sample during cutting.

[0023] In this technical solution, a circular hole with vacuum adsorption function is set on the first support module. At the moment when the cutting is about to be completed (the material is cut off), the vacuum negative pressure can firmly adsorb the strip material that is about to be separated, effectively preventing the sample from being washed away by the cutting water flow or flying off due to the blade pull. This ensures the positional accuracy and surface quality of the cut sample and avoids secondary damage such as edge chipping and corner missing caused by flying off.

[0024] Optionally, in any of the above technical solutions, the aluminum-titanium-carbon material cutting equipment further includes: a grinding platform, which is set on the moving path of the spindle system and is used to grind the dicing blade.

[0025] In this technical solution, a grinding platform is added to the movement path of the spindle system, which enables the equipment to automatically grind the blades online. This eliminates the need for manual alignment of the blades, reduces auxiliary time, improves the continuous operation capability and automation level of the equipment, and ensures the consistency and stability of the cutting quality of each cut during mass production.

[0026] In any of the above technical solutions, optionally, the first direction is the propulsion direction of the aluminum-titanium-carbon material, and the second direction is the cutting direction of the spindle system.

[0027] The cutting equipment in this solution can firmly adhere to Ti3AlC2 material, ensuring minimal material displacement during cutting, saving consumables, reducing a film application process, and improving overall efficiency. The automatic online sharpening function solves the problem of blade dulling after cutting, keeping the blade sharp. The cutting cooling water uses a pure water + lubricant ratio to ensure sufficient cooling of the Ti3AlC2 material during cutting, avoiding oxidation caused by high temperatures. The cutting process described in this application can improve the cutting yield and quality of Ti3AlC2 material, with a yield rate of up to 99%. There is no interlayer slippage on both sides of the cutting path, edge chipping is within 10μm, and there are no extended microcracks inside the material. Cutting efficiency is improved, costs are saved, and the cutting equipment has a high degree of automation.

[0028] Additional aspects and advantages of this application will become apparent in the following description or may be learned by practice of this application. Attached Figure Description

[0029] Figure 1 This is a schematic flowchart of the cutting process of aluminum-titanium-carbon material according to an embodiment of this application;

[0030] Figure 2 This is a schematic diagram of the structure of an aluminum-titanium-carbon material cutting device according to an embodiment of this application;

[0031] Figure 3 yes Figure 2 Enlarged view of point A in the middle.

[0032] Among them, 1 is an aluminum-titanium-carbon material cutting equipment, 11 is a fixed platform, 111 is a vacuum adsorption tank, 12 is a support mechanism, 121 is a first support module, 122 is a second support module, 123 is a round hole, 13 is a spindle system, 131 is a spindle, 132 is a dicing blade, and 14 is a grinding platform. Detailed Implementation

[0033] To better understand the above-mentioned objectives, features, and advantages of this application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0034] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below.

[0035] An embodiment of the first aspect of the present invention provides a cutting process for aluminum-titanium-carbon materials, such as... Figure 1 As shown, it includes:

[0036] S101: Place the aluminum-titanium-carbon material to be cut on the fixed platform of the cutting equipment, so that at least two adjacent sides of the aluminum-titanium-carbon material are respectively in contact with the support module on the fixed platform;

[0037] S103: Activate the vacuum adsorption function to adsorb and fix the aluminum-titanium-carbon material onto the fixed platform through the vacuum adsorption groove on the surface of the fixed platform.

[0038] S105: Controls the spindle to drive the dicing blade to cut and sprays cutting cooling water onto the aluminum-titanium-carbon material to cut the aluminum-titanium-carbon material into strips.

[0039] S107: Remove the cut strip material and push the remaining aluminum-titanium-carbon material back onto the support module to continue cutting the next strip material.

[0040] In this embodiment, the dual fixing method of vacuum adsorption and bonding with the support module eliminates the cumbersome process of traditional film fixing, saves material costs and improves overall processing efficiency. At the same time, the combination of cutting and cooling water spraying, and the cyclical "take-out-push" operation, realizes continuous automated cutting, ensures processing efficiency and material fixing stability, avoids cutting defects caused by material displacement, and lays the foundation for high yield cutting.

[0041] In any of the above embodiments, the cutting cooling water optionally includes pure water and lubricating fluid, wherein the ratio of pure water to lubricating fluid is 7:1.

[0042] In this embodiment, a specific ratio of 7:1 pure water to lubricant is used as the cutting cooling water. Compared with pure water cooling alone, the lubricant can effectively enhance the lubrication and buffering performance of the cooling medium, significantly reduce the friction coefficient between the dicing blade and the hard Ti3AlC2 grains, thereby avoiding local instantaneous high temperatures caused by friction. This solves the problem of high-temperature oxidation of Al elements on the surface of Ti3AlC2 to form an insulating film, ensuring the material's electrical conductivity and spin transport performance.

[0043] In any of the above embodiments, optionally, the cooling water supply method is a combination of side spray and front and rear spray, wherein the flow rate of the side spray is greater than or equal to 1.0 L / min and less than or equal to 1.4 L / min, and the flow rate of the front and rear spray is greater than or equal to 1.0 L / min and less than or equal to 1.4 L / min.

[0044] In this embodiment, a three-dimensional spraying method combining side spraying and front and rear spraying is employed, with the flow rate limited to a reasonable range of 1.0 L / min to 1.4 L / min. This ensures that the cutting area receives sufficient and uniform cooling and lubrication, promptly flushes away metal debris generated during cutting, and prevents debris from embedding in the cut surface or scratching the material surface. This further prevents cut surface contamination and high-temperature oxidation, ensuring the cleanliness of the cutting path and the electrical reliability of the device. Specifically, front and rear spraying refers to spraying from the front and rear sides of the dicing blade, while side spraying sprays directly onto the blade edge. The blade edge divides the cooling water into two streams to cool both the blade and the workpiece.

[0045] In any of the above embodiments, optionally, after each strip of material is cut, the dicing blade is controlled to be sharpened, and after sharpening is completed, the cutting of the next strip of material continues.

[0046] In this embodiment, automatic sharpening is performed after each cutting operation (each piece of material cut), which can promptly remove metal residues adhering to the cutting edge of the dicing blade, solving the problem of rapid blade dulling after continuous cutting. This ensures that the blade remains sharp with each cut, thereby significantly reducing the lateral shear stress caused by blade dulling. It effectively suppresses interlayer slippage on both sides of the cutting path, large-area edge chipping (which can be controlled within 10μm), and internal extended microcracks, greatly improving the cutting yield to 99%. Specifically, the dicing blade is a diamond dicing blade.

[0047] In any of the above embodiments, optionally, when the dicing blade is being sharpened, the spindle speed is greater than or equal to 15,000 RPM and less than or equal to 25,000 RPM, and the cutting depth is set to greater than or equal to 0.5 mm and less than or equal to 0.9 mm.

[0048] In this embodiment, controlling the spindle speed (15000 RPM - 25000 RPM) and depth of cut (0.5 mm - 0.9 mm) during dicing provides an optimal process window for in-line sharpening. The appropriate spindle speed and depth of cut effectively trim the cutting edge and restore sharpness without damaging the diamond tip or causing excessive wear on the sharpening plate on the platform due to excessive sharpening force, thus ensuring a balance between sharpening efficiency and tool life.

[0049] In any of the above embodiments, optionally, when controlling the spindle to drive the dicing blade to cut, the spindle speed is greater than or equal to 15000 RPM and less than or equal to 25000 RPM, and the spindle cutting speed is greater than or equal to 0.4 mm / s and less than or equal to 1 mm / s.

[0050] In this embodiment, the spindle speed (15000 RPM - 25000 RPM) and cutting speed (0.4 mm / s - 1 mm / s) of the dicing blade are controlled during cutting. The reasonable spindle speed combined with the relatively low cutting speed can regulate the feed stress and avoid the generation of concentrated transverse shear stress by constant high pressure throughout the process. Thus, while ensuring a certain cutting efficiency, the generation of interlayer slip, edge chipping and subsurface microcracks is suppressed to the greatest extent.

[0051] The second aspect of this application provides an aluminum-titanium-carbon material cutting device 1, used to implement the aluminum-titanium-carbon material cutting process as provided in the first aspect, such as... Figure 2 As shown, the aluminum-titanium-carbon material cutting equipment 1 includes: a fixed platform 11, equipped with a vacuum adsorption tank 111 for placing aluminum-titanium-carbon material, the vacuum adsorption tank 111 being connected to a vacuum source to adsorb and fix the aluminum-titanium-carbon material; a support mechanism 12, including a first support module 121 for supporting the aluminum-titanium-carbon material on a first side in a first direction a, and a second support module 122 for supporting the aluminum-titanium-carbon material on a second side in a second direction b, the number of second sides being two, the number of second support modules 122 being two, respectively disposed on both sides of the aluminum-titanium-carbon material; a spindle system 13, including a spindle 131 and a dicing blade 132 mounted on the spindle 131, the spindle 131 being used to drive the dicing blade 132 to rotate to perform the cutting action; and a spray system for spraying cutting cooling water onto the aluminum-titanium-carbon material.

[0052] The aluminum-titanium-carbon material cutting equipment 1 also includes a main body, a fixed platform 11 and a supporting mechanism 12, both of which are fixed on the main body. The side of the supporting mechanism 12 abuts against the side of the fixed platform 11. The spindle system 13 can move relative to the fixed platform 11. The spindle system 13 can be movably connected to the main body or set independently of the main body. The spray system can move with the dicing blade 132 on the spindle system 13. The spray system can be movably connected to the main body, set independently of the main body, or fixedly set on the spindle system 13.

[0053] The aluminum-titanium-carbon material cutting equipment 1 in this application is mainly used for cutting SOT-MRAM wafers on Ti3AlC2 substrates, or for preparing raw materials for SOT-MRAM wafers on Ti3AlC2 substrates.

[0054] In this embodiment, the aluminum-titanium-carbon material cutting equipment 1, through the coordinated operation of the fixed platform 11, the bearing mechanism 12, the spindle system 13, and the spray system, provides a reliable hardware carrier for achieving film-free vacuum adsorption fixation, precise cutting, continuous feeding, and cooling and lubrication of aluminum-titanium-carbon materials, thereby improving the automation level and process adaptability of the equipment. Specifically, when the aluminum-titanium-carbon material is supported by the second bearing module 122, the second bearing module 122 that is primarily supported is selected based on the cutting direction. The selection method is that the second bearing module 122 that is primarily supported is the second bearing module 122 that the dicing blade 132 passes through first.

[0055] In any of the above embodiments, optionally, as Figure 3 As shown, the first support module 121 is provided with a plurality of circular holes 123 with vacuum adsorption function, which are used to adsorb and fix the cut sample during cutting.

[0056] In this embodiment, circular holes 123 with vacuum adsorption function are provided on the first bearing module 121. At the moment when the cutting is about to be completed (the material is cut), the vacuum negative pressure can firmly adsorb the strip material that is about to be separated, effectively preventing the sample from being washed away by the cutting water flow or flying off due to the blade pull. This ensures the positional accuracy and surface quality of the cut sample and avoids secondary damage such as chipping and missing corners caused by flying off. Specifically, there are 6 circular holes 123.

[0057] In any of the above embodiments, the aluminum-titanium-carbon material cutting device 1 may optionally include: a grinding platform 14, which is disposed on the moving path of the spindle system 13 and is used to grind the dicing blade 132.

[0058] In this embodiment, a grinding platform 14 is added to the moving path of the spindle system 13, which enables the equipment to automatically grind the blades online without the need for manual alignment. This reduces auxiliary time, improves the continuous operation capability and automation level of the equipment, and ensures the consistency and stability of the cutting quality of each cut during mass production.

[0059] In any of the above embodiments, optionally, the first direction a is the propulsion direction of the aluminum-titanium-carbon material, and the second direction b is the cutting direction of the spindle system 13.

[0060] The spray system includes a front spray head, a rear spray head, and side spray heads. The front and rear spray heads spray the dicing blade 132, while the side spray heads are positioned around the circumference of the dicing blade 132. The system employs a three-dimensional spraying method combining side and front sprays, and limits the flow rate to a reasonable range of 1.0 L / min to 1.4 L / min. This ensures that the cutting area receives sufficient and uniform cooling and lubrication, promptly flushes away metal debris generated during cutting, prevents debris from embedding in the cut surface or scratching the material surface, further prevents cut surface contamination and high-temperature oxidation, and ensures the cleanliness of the cutting path and the electrical reliability of the device.

[0061] The cutting equipment in this solution can firmly adhere to Ti3AlC2 material, ensuring minimal material displacement during cutting, saving consumables, reducing a film application process, and improving overall efficiency. The automatic online sharpening function solves the problem of blade dulling after cutting, keeping the blade sharp. The cutting cooling water uses a pure water + lubricant ratio to ensure sufficient cooling of the Ti3AlC2 material during cutting, avoiding oxidation caused by high temperatures. The cutting process described in this application can improve the cutting yield and quality of Ti3AlC2 material, with a yield rate of up to 99%. There is no interlayer slippage on both sides of the cutting path, edge chipping is within 10μm, and there are no extended microcracks inside the material. Cutting efficiency is improved, costs are saved, and the cutting equipment has a high degree of automation.

[0062] During cutting, the Ti3AlC2 material is placed on the device, with its front and left sides (i.e., the first side and the second side on the left when facing the device) tightly against the device's support surface. Vacuum adsorption is then activated to adhere the Ti3AlC2 material to the device. The device automatically aligns with the MARK (mark) point to find the cutting position and begins cutting. After cutting one strip, the blade automatically moves to the grinding platform 14 for grinding. After grinding, this strip cutting is complete. The cut strip is then removed and flows into the next process. The Ti3AlC2 material on the device is then pushed forward so that its left and front sides adhere to the device's support surface, and the cutting operation continues. Cutting process parameters: spindle speed 131 ranges from 15000 RPM to 25000 RPM; cutting speed is 0.4 mm / s to 1 mm / s; diamond dicing blade model is SD1000-76.2×0.12×40. M, flange size is Φ70mm (70 mm in diameter), blade protrusion (blade protrusion refers to the length of the dicing blade extending beyond the flange or hub, specifically calculated as the diameter of the dicing blade minus the diameter of the flange or hub where the dicing blade is fixed, then divided by 2, or written as blade exposure) is 2.9mm to 3.3mm. Specifically, the blade protrusion is 3.1mm, the cutting method is left-hand cut, one cut to the end; blade height (referring to the lowest point of the dicing blade) is the depth of the material being cut. The cutting coolant flow rate is 1.2L / min for the side spray and 1.2L / min for the front and rear sprays. The cutting coolant is pure water + lubricant, with a pure water to lubricant ratio of 7:1. The blade is sharpened once for each piece of material cut. During online sharpening, the spindle speed of the 131 is in the range of 15000RPM-25000RPM, and the blade height (referring to the lowest point of the scribe blade) is 0.7mm into the 1000# sharpening plate.

[0063] The support mechanism 12 can be replaced with wax to fix the Ti3AlC2 material.

[0064] Spindle 131 is a three-inch spindle. After tool mounting, the vibration of spindle 131 at high speed was measured to be 0.05 mm / s.

[0065] The first direction a is perpendicular to the second direction b.

[0066] Furthermore, the use of terms such as "first," "second," etc., in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0067] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0068] Furthermore, the embodiments of this application can be combined with each other, but only if they are based on what those skilled in the art can do. If the combination of embodiments is contradictory or cannot be implemented, it should be considered that such combination of embodiments does not exist and is not within the scope of protection claimed by this application.

[0069] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A cutting process for aluminum-titanium-carbon material, characterized in that, include: The aluminum-titanium-carbon material to be cut is placed on the fixed platform of the cutting equipment, so that at least two adjacent sides of the aluminum-titanium-carbon material are respectively attached to the support module on the fixed platform; The vacuum adsorption function is activated, and the aluminum-titanium-carbon material is adsorbed and fixed on the fixed platform through the vacuum adsorption groove on the surface of the fixed platform. The spindle is controlled to drive the dicing blade to cut and spray cutting cooling water onto the aluminum-titanium-carbon material to cut the aluminum-titanium-carbon material into strips. The cut strip material is removed, and the remaining aluminum-titanium-carbon material is pushed back onto the support module to continue cutting the next strip material.

2. The cutting process for aluminum-titanium-carbon material according to claim 1, characterized in that, The cutting cooling water includes pure water and lubricant, wherein the ratio of pure water to lubricant is 7:

1.

3. The cutting process for aluminum-titanium-carbon material according to claim 1 or 2, characterized in that, The cooling water for cutting is supplied by a combination of side spray and front and rear spray, wherein the flow rate of the side spray is greater than or equal to 1.0 L / min and less than or equal to 1.4 L / min, and the flow rate of the front and rear spray is greater than or equal to 1.0 L / min and less than or equal to 1.4 L / min.

4. The cutting process for aluminum-titanium-carbon material according to claim 1, characterized in that, After each strip of material is cut, the dicing blade is sharpened, and after sharpening, the next strip of material is cut.

5. The cutting process for aluminum-titanium-carbon material according to claim 4, characterized in that, When the dicing blade is being sharpened, the spindle speed is greater than or equal to 15,000 RPM and less than or equal to 25,000 RPM, and the depth of cut is set to greater than or equal to 0.5 mm and less than or equal to 0.9 mm.

6. The cutting process for aluminum-titanium-carbon material according to claim 1, characterized in that, When the spindle drives the dicing blade to cut, the spindle speed is greater than or equal to 15000 RPM and less than or equal to 25000 RPM, and the spindle cutting speed is greater than or equal to 0.4 mm / s and less than or equal to 1 mm / s.

7. A cutting device for aluminum-titanium-carbon materials, characterized in that, The aluminum-titanium-carbon material cutting equipment for implementing the cutting process of any one of claims 1 to 6 includes: A fixed platform is provided with a vacuum adsorption tank for placing aluminum-titanium-carbon material. The vacuum adsorption tank is connected to a vacuum source to adsorb and fix the aluminum-titanium-carbon material. The support mechanism includes a first support module and a second support module. The first support module is used to support the aluminum-titanium-carbon material on a first side in a first direction, and the second support module is used to support the aluminum-titanium-carbon material on a second side in a second direction. There are two second sides and two second support modules, which are respectively arranged on both sides of the aluminum-titanium-carbon material. A spindle system includes a spindle and a dicing blade mounted on the spindle, wherein the spindle drives the dicing blade to rotate in order to perform a cutting action; A spray system is used to spray cutting cooling water onto the aluminum-titanium-carbon material.

8. The aluminum-titanium-carbon material cutting equipment according to claim 7, characterized in that, The first support module is provided with multiple circular holes with vacuum adsorption function, which are used to adsorb and fix the cut sample during cutting.

9. The aluminum-titanium-carbon material cutting equipment according to claim 7, characterized in that, Also includes: A sharpening platform is positioned on the moving path of the spindle system and is used to sharpen the dicing blade.

10. The aluminum-titanium-carbon material cutting equipment according to claim 7, characterized in that, The first direction is the propulsion direction of the aluminum-titanium-carbon material, and the second direction is the cutting direction of the spindle system.

Images