Automatic transfer and positioning mechanism for quartz wafer chuck and method of use

Abstract

The application discloses a quartz wafer clamp automatic conveying and positioning mechanism and a use method thereof. The mechanism comprises a conveying structure, a clamp body for clamping a quartz wafer and a containing rack for limiting the clamp body, which are arranged in the conveying structure. The clamp body comprises two symmetrical clamping plates, the two clamping plates clamp the quartz wafer, and the opposite surfaces of the two clamping plates are provided with clamping structures. The clamping structure comprises a plurality of middle clamping blocks which can move up and down in a range and an outer sheet for pushing and extruding the middle clamping blocks in different positions. The middle clamping block is used for abutting against the edge position of the quartz wafer, and the different abutting positions can be changed in the sliding of the outer sheet. Compared with the prior art, the mechanism has the advantages that the clamping points of the quartz wafer are dynamically switched by arranging the middle clamping blocks which can move up and down and the outer sheet which can slide horizontally, and the containing rack which can change the inclination, the clamping of different positions is realized, the middle clamping block changes in extension, and the quartz wafer is prevented from being scratched.

Description

Technical Field

[0001] This invention relates to the field of quartz crystal processing technology, and in particular to an automated clamping and positioning mechanism and its usage method in the quartz crystal production process. Background Technology

[0002] Quartz crystals, as core components for frequency control and selection, are widely used in communication equipment, computer systems, navigation instruments, and various consumer electronics products. The manufacturing process of quartz crystals involves multiple steps, including cutting, grinding, chamfering, etching, coating, frequency fine-tuning, and packaging.

[0003] The patent, authorized by CN118571800B, is titled "An Automatic Integrated Cleaning and Drying Machine for Quartz Wafers." The background section describes how commercially available cleaning devices typically use clamps to fix and hold the quartz wafers during cleaning. While this clamp design ensures the stability of the wafers during the cleaning process, it also presents problems. The area where the clamp contacts the wafer often becomes a blind spot for cleaning. These blind spots are difficult to fully wet and rinse with the cleaning solution during the cleaning process, thus easily leaving behind corrosive liquid and other impurities.

[0004] Based on the above, quartz wafers usually need to be fixed, supported and transferred between processes using fixtures. The fixtures not only need to provide reliable support for the wafers during processing, but also need to ensure that the wafers are accurately positioned and stably oriented during transfer to avoid collisions, scratches or contamination between wafers.

[0005] Meanwhile, during the cleaning and drying processes, the clamping parts of the fixture may obstruct parts of the wafer surface, making it difficult for the cleaning solution to fully penetrate the obscured areas. Liquid residue may also remain in the gaps between the fixture structure and the wafer clamping position, leading to watermarks on the wafer surface after drying. Therefore, the fixture needs to securely hold the quartz wafer in place while ensuring that it can be cleaned from all angles. Summary of the Invention

[0006] This invention addresses the challenge of existing clamps, which struggle to securely hold quartz wafers while simultaneously cleaning them from all angles. It provides an automated quartz wafer clamping and positioning mechanism and its usage method.

[0007] The technical solution adopted by the present invention to solve the above-mentioned technical problems is: an automated transfer and positioning mechanism for quartz wafer clamps, including a transfer structure, wherein the transfer structure is provided with a clamp body for clamping quartz wafers and a holding rack for limiting the position of the clamp body; The fixture body includes two symmetrical clamping plates that hold the quartz wafer. Clamping structures are installed on the opposite surfaces of the two clamping plates. The clamping structure includes multiple sets of middle clamping blocks that can move up and down within a range and outer plates for pushing the middle clamping blocks at different positions. The middle clamping blocks are used to abut against the edge of the quartz wafer, and different abutting positions can be changed as the outer plates slide. The rack is equipped with a limiting engagement part to limit the outer wafer. When the clamp body moves laterally, the clamping blocks in different positions can abut against the quartz wafer respectively.

[0008] A further preferred embodiment of the present invention is: the edge of the clamping plate has a strip-shaped outer cavity communicating with its interior, the inner wall of the outer cavity has a rolled edge, the outer piece is located in the outer cavity and abuts against the rolled edge, and the outer piece can slide back and forth in the outer cavity to adjust its position; The outer sheet has a raised layer on the inward side. The raised layer is used to push the middle clamping block. When the outer sheet slides, the raised layer can be located outside different middle clamping blocks. When the raised layer is located between two adjacent sets of middle clamping blocks, it pushes both the outer sides of the two adjacent sets of middle clamping blocks.

[0009] A further preferred embodiment of the present invention is: the clamping structure further includes an inner plate that is detachably fixed inside the clamping plate, the inner plate having a through cavity on the outward side, and the inner wall of the cavity having an inward rolled edge; The middle clamping block is embedded in the inner cavity and extends outward from the inner cavity to abut against the quartz crystal. The outer side of the middle clamping block has a middle rolled edge, and a support spring is fixed on the middle rolled edge. The support spring is located between the middle rolled edge and the inner rolled edge and is used to generate a pushing force on the middle rolled edge outward.

[0010] A further preferred embodiment of the present invention is: the two ends of the convex layer and the outer sheet are smoothly transitioned, the convex layer is used for extrusion with the middle rolled edge, and the corners of the middle rolled edge are arc-shaped transitions.

[0011] A further preferred embodiment of the present invention is that the corners of both clamping plates are provided with mating structures, the mating structures including shaft body one and shaft body two; Shaft 1 and Shaft 2 are respectively embedded in two clamping plates. Shaft 1 is threadedly connected to the corresponding clamping plate and its end extends into the other clamping plate. The part of Shaft 1 extending into the other clamping plate is smooth and shaft-shaped. Shaft 2 is threadedly connected to its corresponding clamping plate. Shaft 1 and Shaft 2 abut against each other and are magnetically attracted to each other.

[0012] A further preferred embodiment of the present invention is: the inner walls on both sides of the holding rack have arranged sliding grooves, and the clamp body is slidably disposed in the corresponding sliding grooves; The limiting fitting part inside the rack is used to limit the outer piece of the clamp body, so that the clamp body can move horizontally back and forth.

[0013] A further preferred embodiment of the present invention is: the limiting and mating part includes upper and lower plates fixed to the inner wall of the holding rack, both plates have external thread sleeves on their outer sides, the external thread sleeves are connected to threaded caps, an inner spring is fixed inside the threaded caps, and a stop block is fixed at the end of the inner spring and disposed inside the external thread sleeves, with the outer edge of the stop block being rounded. The outer sheet has a groove on the outside that corresponds to the abutment, so that the outer sheet and the abutment can fit together.

[0014] A further preferred embodiment of the present invention is: the conveying structure includes a slide rail and a slider slidably disposed on the slide rail, and a cavity groove is formed on the slider, one side of which communicates with the outside, the cavity groove being used to limit the clamp body; One end of the slide rail is equipped with a drive source one, the output end of which is fixed to the slider. The end of the slider is equipped with a drive source two, the output end of which is flush with the edge of the cavity, and is used to push the fixture body.

[0015] A further preferred embodiment of the present invention is as follows: an outer frame is fixed to the other end of the slide rail, a third drive source is installed on the lower edge of the outer frame, and the holding rack is placed into the outer frame from the upper end of the outer frame, with the edge of the holding rack cooperating with the output end of the third drive source.

[0016] The method of using the automated transfer and positioning mechanism for quartz wafer clamps includes the following steps: Step 1: Place the quartz wafer between the two clamping plates, so that the middle clamping blocks of the two sets of clamping structures abut against the upper and lower surface edges of the quartz wafer, thus completing the initial clamping of the quartz wafer; Step 2: Place the entire clamp body holding the quartz wafer into the holding rack, and align the outer wafer with the limiting mating part to ensure that the clamp body can slide horizontally while the outer wafer remains stationary; Step 3: The fixture body moves laterally within the holding rack. During the movement, the limiting and fitting part limits and blocks the outer sheet, causing the outer sheet to slide relative to the clamping plate. The outer sheet pushes the middle clamping block at different positions in sequence, causing the middle clamping block to retract inward or pop outward, thereby changing the position of contact with the edge of the quartz crystal and realizing the switching of the clamping point.

[0017] Compared with the prior art, the advantages of the present invention are as follows: 1. By setting up a vertically movable central clamping block and a horizontally sliding outer plate, as well as adjusting the tilt of the holding rack, the clamping point of the quartz wafer will dynamically switch to achieve clamping at different positions. The central clamping block can extend and retract to avoid scratching the quartz wafer.

[0018] 2. The quartz wafer is always reliably limited and suspended when switching clamping points, which makes the quartz wafer clamped firmly and avoids large-area friction between the clamping structure and the wafer. The two clamping plates are connected by the threads of shaft one and shaft two with magnetic attraction, which enables quick manual assembly and disassembly. When the two clamping plates are limited by the sliding groove, they have high precision and will not misalign.

[0019] 3. The middle clamping block in the fixture body only limits the quartz wafer without squeezing it, thus ensuring the integrity of the quartz wafer. Attached Figure Description

[0020] The present invention will be further described in detail below with reference to the accompanying drawings and preferred embodiments. However, those skilled in the art will understand that these drawings are drawn only for the purpose of explaining the preferred embodiments and therefore should not be regarded as a limitation on the scope of the present invention. In addition, unless specifically indicated, the drawings are only schematic representations of the composition or structure of the described objects and may contain exaggerated displays, and the drawings are not necessarily drawn to scale.

[0021] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the fixture body and slider structure of the present invention; Figure 3 This is an exploded structural diagram of the fixture body of the present invention; Figure 4 This is a schematic diagram of the clamping plate structure of the present invention; Figure 5 For the present invention Figure 4 A magnified schematic diagram of the structure of part A in the diagram; Figure 6 This is a partially exploded structural diagram of the clamping structure of the present invention; Figure 7 For the present invention Figure 6 A magnified schematic diagram of the partial structure of B in the diagram; Figure 8 This is a partial cross-sectional view of the clamping plate of the present invention; Figure 9 This is a schematic diagram of the cross-sectional structure of the clamp body of the present invention; Figure 10 This is a schematic diagram of the structure of the present invention; Figure 11 This is a schematic diagram of the separate structure of the holding rack and outer frame of the present invention; Figure 12 This is a schematic diagram of the inner structure of the holding rack of the present invention; Figure 13 This is a schematic diagram of the limiting and mating part of the present invention; Figure 14 This is a schematic diagram of the structural changes in the clamp body after the holding rack of the present invention swings.

[0022] In the diagram: 1. Conveying structure; 11. Slide rail; 12. Slider; 121. Cavity; 13. Drive source one; 14. Drive source two; 15. Outer frame; 16. Drive source three; 2. Fixture body; 21. Clamping plate; 22. Clamping structure; 221. Outer cavity; 222. Outer rolled edge; 223. Outer piece; 224. Protruding layer; 225. Middle clamping block; 226. Middle rolled edge; 227. Support spring; 228. Inner plate; 229. Inner cavity; 220. Inner rolled edge; 23. Mating structure; 231. Shaft one; 232. Shaft two; 3. Container rack; 31. Slide groove; 4. Limiting mating part; 41. Plate; 42. External threaded sleeve; 43. Threaded cap; 44. Inner spring; 45. Abutment block. Detailed Implementation

[0023] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. Those skilled in the art will appreciate that these descriptions are merely descriptive and exemplary and should not be construed as limiting the scope of protection of the present invention.

[0024] It should be noted that similar labels in the following figures indicate similar items; therefore, once an item is defined in one figure, it may not be further defined and explained in subsequent figures. Example

[0025] This embodiment mainly describes the automated conveying and positioning mechanism for quartz wafer clamps. Please refer to [link / reference needed]. Figures 1-14 Specifically, the existing clamps firmly hold quartz wafers, but it is difficult to clean the quartz wafers from all angles. Based on this problem, an improvement is proposed: an automated transfer and positioning mechanism for quartz wafer clamps, including a transfer structure 1. The transfer structure 1 is provided with a clamp body 2 for clamping quartz wafers and a holding rack 3 for limiting the clamp body 2. The fixture body 2 includes two symmetrical clamping plates 21, which clamp the quartz wafer. Clamping structures 22 are installed on the opposite surfaces of the two clamping plates 21. The clamping structure 22 includes multiple sets of middle clamping blocks 225 that can move up and down within a range and outer plates 223 for pushing the middle clamping blocks 225 at different positions. The middle clamping blocks 225 are used to abut against the edge of the quartz wafer, and different abutting positions can be changed as the outer plates 223 slide. The holding rack 3 is provided with a limiting engagement part 4, which is used to limit the outer piece 223. When the clamp body 2 moves laterally, the clamping blocks 225 in different positions can respectively abut against the quartz wafer.

[0026] Specifically, traditional clamps typically use fixed-point clamping, which causes the area of ​​the quartz wafer to be covered, creating dead corners in subsequent cleaning or coating processes. By setting up a vertically movable central clamping block 225 and a horizontally sliding outer plate 223, when the clamp body 2 moves laterally within the holding rack 3, the limiting mating part 4 locks the outer plate 223 relative to the holding rack 3. The lateral movement of the clamping plate 21 forces the outer plate 223 to slide relative to the central clamping block 225, so that the central clamping block 225 at different positions clamps the quartz wafer, ensuring that all areas on both sides of the quartz wafer are exposed.

[0027] like Figures 5-8 As shown, the mounting structure of the outer piece 223 is further refined. The edge of the clamping plate 21 has a strip-shaped outer cavity 221 that communicates with its interior. The inner wall of the outer cavity 221 has a rolled edge 222. The outer piece 223 is located inside the outer cavity 221 and abuts against the rolled edge 222. The outer piece 223 can slide back and forth inside the outer cavity 221 to adjust its position. The outer sheet 223 has an integral protrusion 224 on the inward side. The protrusion 224 is used to push the middle clamping block 225. When the outer sheet 223 slides, the protrusion 224 can be located outside different middle clamping blocks 225. When the protrusion 224 is located between two adjacent sets of middle clamping blocks 225, it pushes both the outer sides of the two adjacent sets of middle clamping blocks 225.

[0028] Specifically, when the protrusion 224 is facing a certain set of clamping blocks 225, the clamping block 225 is pushed out individually. When the protrusion 224 is located in the middle gap between two adjacent sets of clamping blocks 225, since the protrusion 224 itself has a certain lateral width, the protrusion 224 simultaneously abuts against the outer side of the left and right sets of clamping blocks 225, ensuring that the quartz wafer is limited at all times, so that the quartz wafer is in the suspended position between the two clamping plates 21 and remains in the same position.

[0029] like Figures 5-8 As shown, further explanation of the clamping structure 22: the clamping structure 22 also includes an inner plate 228 that is detachably fixed in the clamping plate 21. The inner plate 228 has a through cavity 229 on the outward side, and the inner wall of the cavity 229 has an inward rolled edge 220. The middle clamping block 225 is embedded in the inner cavity 229 and extends outward from the inner cavity 229 to abut against the quartz crystal. The middle clamping block 225 has a middle rolled edge 226 on the outward side. A support spring 227 is fixed on the middle rolled edge 226. The support spring 227 is located between the middle rolled edge 226 and the inner rolled edge 220 and is used to generate a pushing force on the middle rolled edge 226 outward.

[0030] Specifically, when not pushed by the outer sheet 223, the middle clamping block 225 is positioned away from the quartz wafer under the action of the support spring 227. When the outer sheet 223 slides over, it needs to overcome the force of the support spring 227 to push the middle clamping block 225 inward to contact the wafer, so that the clamping action is completely controlled by the position of the outer sheet 223. Figure 14 Under the action of the rack 3, the reciprocating swing can achieve the clamping and separation of the clamping block 225 in different positions.

[0031] like Figures 5-8 The geometry is further optimized and defined as shown. The two ends of the convex layer 224 are smoothly transitioned to the outer sheet 223. The convex layer 224 is used to press with the middle rolled edge 226, and the corners of the middle rolled edge 226 are arc-shaped transitions.

[0032] Specifically, the smooth transition at both ends of the raised layer 224, namely the rounded corners and the arc-shaped corners of the rolled edge 226, ensures that the extrusion of the raised layer 224 and the rolled edge 226 is gradual, thus avoiding jamming.

[0033] like Figure 10 As shown, there is a quick assembly and disassembly structure between the upper and lower clamping plates 21. The corners of the two clamping plates 21 are provided with a mating structure 23, which includes a shaft body 1 231 and a shaft body 232. Shaft 1 231 and shaft 2 232 are respectively embedded in two clamping plates 21. Shaft 1 231 is threadedly connected to the corresponding clamping plate 21 and its end extends into the other clamping plate 21. The part of shaft 1 231 extending into the other clamping plate 21 is smooth shaft-shaped. Shaft 2 232 is threadedly connected to its corresponding clamping plate 21. Shaft 1 231 and shaft 2 232 abut against each other and are magnetically attracted to each other.

[0034] Specifically, the threaded end of shaft 231 is fixed to the upper clamping plate 21, while the smooth end passes through the hole in the lower clamping plate 21 to position the two clamping plates 21. Shaft 232 is threadedly fixed to the lower clamping plate 21. Shaft 231 and shaft 232 are magnetically attracted to fix the two clamping plates 21, which ensures convenient assembly and prevents misalignment.

[0035] like Figure 12 As shown, the inner walls on both sides of the holding rack 3 have arranged grooves 31, and the clamp body 2 is slidably disposed in the corresponding grooves 31. The limiting fitting part 4 inside the holding rack 3 is used to limit the outer piece 223 of the clamp body 2, so that the clamp body 2 can move horizontally back and forth.

[0036] The storage rack 3 can limit the position of multiple clamp bodies 2. Figure 14During the tilting process, different clamping blocks 225 can clamp the quartz wafers. It should be noted that the clamp body 2 is made of metal and has a certain weight. When the sliding position is smooth, the friction can be minimized. Therefore, tilting the rack 3 can cause the clamp body 2 to slide.

[0037] like Figure 13 As shown, the structure of the limiting fitting part 4 is further explained. The limiting fitting part 4 includes two plates 41 fixed to the inner wall of the holding rack 3. Both plates 41 have external threaded sleeves 42 on their outer sides. The external threaded sleeves 42 are connected to threaded caps 43 by external threads. An inner spring 44 is fixed inside the threaded caps 43. The end of the inner spring 44 is fixed with a stop block 45 disposed inside the external threaded sleeves 42. The outer edge of the stop block 45 is rounded. The outer sheet 223 has a groove on its outer side that corresponds to the abutment 45, so that the outer sheet 223 and the abutment 45 can fit together.

[0038] Specifically, when the clamp body 2 engages with the limiting engagement part 4, the clamp body 2 moves along the slide groove 31, and the abutment 45 is squeezed by the clamp body 2, causing the abutment 45 to squeeze the inner spring 44, forcing the abutment 45 to move outward. When the abutment 45 moves to the slot of the outer piece 223, it directly embeds into the slot. It should be noted that when the holding rack 3 is tilted, the weight of the clamp body 2 itself is insufficient to disengage the abutment 45 from the slot, and additional force needs to be applied when disengagement is required.

[0039] like Figure 1 As shown, the conveying structure 1 includes a slide rail 11 and a slider 12 slidably disposed on the slide rail 11. A cavity 121 with one side communicating with the outside is formed on the slider 12. The cavity 121 is used to limit the clamp body 2. One end of the slide rail 11 is equipped with a drive source 13, the output end of the drive source 13 is fixed to the slider 12, and the end of the slider 12 is equipped with a drive source 2 14, the output end of the drive source 2 14 is flush with the edge of the cavity 121, and is used to push the fixture body 2.

[0040] Specifically, drive source 13 drives slider 12 and clamp body 2 in cavity 121 to move along slide rail 11 to near the entrance of container rack 3, drive source 2 14 pushes clamp body 2 out of cavity 121 and smoothly pushes it into slide groove 31 of container rack 3.

[0041] The other end of the slide rail 11 is fixed with an outer frame 15. A drive source 3 16 is installed on the lower edge of the outer frame 15. The container 3 is placed into the outer frame 15 from the upper end. The edge of the container 3 is engaged with the output end of the drive source 3 16.

[0042] The output end of the drive source 316 is threadedly connected to the container 3. Rotation can control the lifting and lowering of the container 3, so that the slide 31 of the container 3 is aligned with the cavity 121. Only the process of installing the quartz wafer into the fixture body 2 requires manual operation, and the rest can be completed automatically.

[0043] Working principle: In the initial state, when clamping the quartz wafer, the quartz wafer is clamped between two clamping plates 21, with the edges of the wafer in contact with the inner wall of the clamping plates 21. The middle clamping block 225 protrudes towards the quartz wafer under the action of the convex layer 224 to clamp the quartz wafer. It should be noted that when the upper and lower convex layers 224 protrude towards the quartz wafer, the distance between them is exactly the thickness of the quartz wafer.

[0044] Secondly, when the clamp body 2 is placed into the holding rack 3, the stop block 45 in the limiting fitting part 4, under the action of the inner spring 44, engages with the slot on the outer side of the outer piece 223, fixing the outer piece 223 relative to the holding rack 3. Figure 14 In the tilted state, the clamping plate 21 moves under the action of gravity, but the outer piece 223 is held still by the limiting fitting part 4. The protrusion 224 on the outer piece 223 acts like a cam, sweeping across the outer side of the middle clamping block 225 at different positions. There are two states when sweeping across the outer side of the middle clamping block 225 at different positions: Firstly, when the protrusion 224 slides behind a certain set of clamping blocks 225, it pushes the clamping blocks 225 toward the quartz wafer, so that the position actively contacts the quartz wafer. Secondly, when the protrusion 224 slides between the two adjacent sets of clamping blocks 225, it will push the left and right sets at the same time, so that the adjacent clamping blocks 225 are simultaneously subjected to force and actively contact the quartz wafer. Third, when the protrusion 224 slides open, the middle clamping block 225, which has lost its pushing force, is reset under the action of the support spring 227 and separates from the quartz wafer. During the movement of the outer sheet 223, the protrusion 224 presses against the clamping block 225 at different positions, keeping the quartz wafer in a limited position. This allows both sides of the quartz wafer to be cleaned and dried, preventing water stains from remaining. It should be noted that, under the action of the limiting fitting part 4, the outer sheet 223 on the two clamping plates 21 maintains the same movement state. It should also be noted that the two clamping plates 21 are hollowed out and have storage space inside, keeping the quartz wafer suspended under the action of the clamping block 225.

[0045] The two clamping plates 21 are limited by shaft 1 231 and shaft 2 232. Shaft 1 231 and shaft 2 232 are magnetically attracted to each other, and shaft 1 231 extends from one clamping plate 21 into the other clamping plate 21. By applying force in the up and down direction, the two clamping plates 21 can be separated or installed without causing misalignment of the two clamping plates 21.

[0046] The automated conveying process is as follows: The holding rack 3 is placed from the top of the outer frame 15 and positioned and fixed by the drive source 3 16. The drive source 3 16 is a servo motor connected to the controller signal, and its output end cooperates with the holding rack 3 to control the lifting and lowering of the holding rack 3. The drive source 1 13 drives the slider 12 to slide along the slide rail 11, pushing the clamp body 2 close to the holding rack 3. Under the action of the drive source 2 14, the clamp body 2 is pushed into the slide groove 31 of the holding rack 3. After entering the slide groove 31, the limiting engagement part 4 automatically locks the outer piece 223 to cooperate with the subsequent cleaning, drying or coating process and avoid clamping dead angles. It should be noted that when the limiting engagement part 4 automatically locks the outer piece 223, the outer piece 223 can be compressed by applying a certain force to the inner spring 44, so that the limiting engagement part 4 and the outer piece 223 cooperate. It should also be noted that the drive source 1 13 and the drive source 2 14 are both electric telescopic cylinders connected to the controller signal. Example

[0047] This embodiment mainly describes the usage of the automated conveying and positioning mechanism for quartz wafer clamps. Please refer to [link / reference needed]. Figures 1-14 Specifically, the method of using the automated transfer and positioning mechanism for quartz wafer clamps includes the following steps: Step 1: Place the quartz wafer between the two clamping plates 21, so that the middle clamping blocks 225 of the two sets of clamping structures 22 abut against the upper and lower surface edges of the quartz wafer, thus completing the initial clamping of the quartz wafer. Step 2: Place the entire clamp body 2 holding the quartz wafer into the holding rack 3, and make the outer piece 223 correspond to and engage with the limiting engagement part 4 to ensure that the clamp body 2 can slide horizontally and the outer piece 223 remains stationary. Step 3: The clamp body 2 moves laterally within the holding rack 3. During the movement, the limiting fitting part 4 limits and blocks the outer piece 223, causing the outer piece 223 to slide relative to the clamping plate 21. The outer piece 223 pushes the middle clamping block 225 at different positions in sequence, causing the middle clamping block 225 to retract inward or pop outward, thereby changing the position of contact with the edge of the quartz crystal and realizing the switching of the clamping point.

[0048] In the description of this invention, it should be noted that the terms "upper," "lower," "front," "rear," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed when in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0049] The above provides a detailed description of the automated conveying and positioning mechanism and its usage method for quartz wafer clamps provided by the present invention. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only for the purpose of helping to understand the present invention and its core ideas. It should be noted that for those skilled in the art, several improvements and modifications can be made to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. An automated conveying and positioning mechanism for quartz wafer clamps, characterized in that, It includes a conveying structure, which contains a clamping body for holding a quartz wafer and a holding rack for limiting the position of the clamping body. The fixture body includes two symmetrical clamping plates that hold the quartz wafer. Clamping structures are installed on the opposite surfaces of the two clamping plates. The clamping structure includes multiple sets of middle clamping blocks that can move up and down within a range and outer plates for pushing the middle clamping blocks at different positions. The middle clamping blocks are used to abut against the edge of the quartz wafer, and different abutting positions can be changed as the outer plates slide. The rack is equipped with a limiting engagement part to limit the outer wafer. When the clamp body moves laterally, the clamping blocks in different positions can abut against the quartz wafer respectively.

2. The automated conveying and positioning mechanism for quartz wafer clamps according to claim 1, characterized in that, The edge of the clamp has a strip-shaped outer cavity that communicates with its interior. The inner wall of the outer cavity has a rolled edge. The outer piece is located inside the outer cavity and abuts against the rolled edge. The outer piece can slide back and forth inside the outer cavity to adjust its position. The outer sheet has a raised layer on the inward side. The raised layer is used to push the middle clamping block. When the outer sheet slides, the raised layer can be located outside different middle clamping blocks. When the raised layer is located between two adjacent sets of middle clamping blocks, it pushes both the outer sides of the two adjacent sets of middle clamping blocks.

3. The automated conveying and positioning mechanism for quartz wafer clamps according to claim 2, characterized in that, The clamping structure also includes an inner plate that can be detachably fixed inside the clamping plate. The inner plate has a through cavity on the outward side, and the inner wall of the cavity has a rolled edge around it. The middle clamping block is embedded in the inner cavity and extends outward from the inner cavity to abut against the quartz crystal. The outer side of the middle clamping block has a middle rolled edge, and a support spring is fixed on the middle rolled edge. The support spring is located between the middle rolled edge and the inner rolled edge and is used to generate a pushing force on the middle rolled edge outward.

4. The automated conveying and positioning mechanism for quartz wafer clamps according to claim 3, characterized in that, The two ends of the raised layer have a smooth transition with the outer sheet. The raised layer is used for extrusion with the middle rolled edge, and the corners of the middle rolled edge have an arc transition.

5. The automated conveying and positioning mechanism for quartz wafer clamps according to claim 1, characterized in that, Both clamping plates have mating structures at their corners, including shaft body one and shaft body two; Shaft 1 and Shaft 2 are respectively embedded in two clamping plates. Shaft 1 is threadedly connected to the corresponding clamping plate and its end extends into the other clamping plate. The part of Shaft 1 extending into the other clamping plate is smooth and shaft-shaped. Shaft 2 is threadedly connected to its corresponding clamping plate. Shaft 1 and Shaft 2 abut against each other and are magnetically attracted to each other.

6. The automated conveying and positioning mechanism for quartz wafer clamps according to claim 1, characterized in that, The inner walls on both sides of the rack have arranged grooves, and the clamp body is slidably disposed in the corresponding grooves. The limiting fitting part inside the rack is used to limit the outer piece of the clamp body, so that the clamp body can move horizontally back and forth.

7. The automated conveying and positioning mechanism for quartz wafer clamps according to claim 6, characterized in that, The limiting and fitting part includes two plates, upper and lower, fixed to the inner wall of the holding rack. Both plates have external threaded sleeves on their outer sides. The external threaded sleeves are connected to threaded caps. An inner spring is fixed inside the threaded caps. A stop block is fixed at the end of the inner spring and is set inside the external threaded sleeve. The outer edge of the stop block is rounded. The outer sheet has a groove on the outside that corresponds to the abutment, so that the outer sheet and the abutment can fit together.

8. The automated conveying and positioning mechanism for quartz wafer clamps according to claim 1, characterized in that, The conveying structure includes a slide rail and a slider that is slidably mounted on the slide rail. A cavity is formed on the slider, one side of which communicates with the outside. The cavity is used to limit the position of the fixture body. One end of the slide rail is equipped with a drive source one, the output end of which is fixed to the slider. The end of the slider is equipped with a drive source two, the output end of which is flush with the edge of the cavity, and is used to push the fixture body.

9. The automated conveying and positioning mechanism for quartz wafer clamps according to claim 8, characterized in that, The other end of the slide rail is fixed with an outer frame, and a third drive source is installed on the lower edge of the outer frame. The container is placed into the outer frame from the top, and the edge of the container is engaged with the output end of the third drive source.

10. A method for using an automated conveying and positioning mechanism for quartz wafer clamps, characterized in that, The automated transfer and positioning mechanism for quartz wafer clamps according to any one of claims 1-9 includes the following steps: Step 1: Place the quartz wafer between the two clamping plates, so that the middle clamping blocks of the two sets of clamping structures abut against the upper and lower surface edges of the quartz wafer, thus completing the initial clamping of the quartz wafer; Step 2: Place the entire clamp body holding the quartz wafer into the holding rack, and align the outer wafer with the limiting mating part to ensure that the clamp body can slide horizontally while the outer wafer remains stationary; Step 3: The fixture body moves laterally within the holding rack. During the movement, the limiting and fitting part limits and blocks the outer sheet, causing the outer sheet to slide relative to the clamping plate. The outer sheet pushes the middle clamping block at different positions in sequence, causing the middle clamping block to retract inward or pop outward, thereby changing the position of contact with the edge of the quartz crystal and realizing the switching of the clamping point.

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