Workpiece transfer robot and control method for workpiece transfer robot

Abstract

In the substrate transfer robot (100), the control section (30) performs the following processing: the workpiece (200) is moved to a gripping position (P) for gripping the workpiece (200) by the gripping section (53) by the pulling-out section (59), and the workpiece (200) moved to the gripping position (P) is gripped by the gripping section (53).

Description

Technical Field

[0001] This disclosure relates to a workpiece conveying robot and a control method for the workpiece conveying robot. Background Technology

[0002] Previously, workpiece conveying robots have been disclosed. Japanese Patent Application Publication No. 5-154431 discloses an industrial robot. This industrial robot includes a workpiece holding device. The workpiece holding device holds a glass substrate that serves as a workpiece. The glass substrate has a rectangular shape. The workpiece holding device includes a first clamping mechanism and a second clamping mechanism. The first clamping mechanism has claws. The claws of the first clamping mechanism clamp two opposite sides of the glass substrate from a first direction. The second clamping mechanism has a pair of rotating arms. The pair of rotating arms clamp two opposite sides of the glass substrate from a second direction.

[0003] Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 5-154431 Summary of the Invention

[0004] The technical problem that the invention aims to solve In cases where the glass substrate is housed in a box-shaped receiving portion, there may be insufficient space around the glass substrate for the first and second clamping mechanisms to perform the action of clamping the glass substrate. Therefore, there is a problem that the glass substrate cannot be properly held.

[0005] This disclosure was made to solve the problems described above. One object of this disclosure is to provide a workpiece conveying robot and a control method for the workpiece conveying robot, which can properly hold the workpiece even when there is no space for holding the workpiece in the location where the workpiece is located.

[0006] Technical means for solving technical problems The first aspect of this disclosure includes a workpiece conveying robot comprising a robot arm, a hand mounted on the robot arm and holding a workpiece, and a control unit for controlling the movements of the robot arm and the hand. The hand includes a pull-out part for pulling out a workpiece and a gripping part for holding the workpiece. The control unit performs the following processing: by pulling out the workpiece, the workpiece is moved to a gripping position for gripping the workpiece by the gripping part, and the workpiece moved to the gripping position is gripped by the gripping part.

[0007] The workpiece conveying robot of the first aspect of this disclosure, as described above, involves a control unit that performs the following process: a pull-out unit moves the workpiece to a gripping position for gripping by a gripping unit, and the workpiece moved to the gripping position is gripped by the gripping unit. Thus, even if there is insufficient space in the area where the workpiece is pre-positioned for gripping by the gripping unit, the workpiece is moved to the gripping position. As a result, the workpiece can be properly gripped.

[0008] The second aspect of this disclosure is a control method for a workpiece conveying robot, comprising a robot arm, a hand mounted on the robot arm and holding a workpiece, and a control unit for controlling the movements of the robot arm and the hand. The hand includes a pull-out part for pulling out a workpiece and a gripping part for holding the workpiece. The control method includes: moving a workpiece to a gripping position for holding the workpiece by the pull-out part; and causing the workpiece moved to the gripping position to be gripped by the gripping part.

[0009] The control method for a workpiece transport robot according to the second aspect of this disclosure, as described above, includes: moving a workpiece to a gripping position for gripping by a gripping part via a pull-out part; and gripping the workpiece in the gripping position by the gripping part. Thus, even if there is insufficient space in the area where the workpiece is pre-positioned for gripping by the gripping part, the workpiece is moved to the gripping position. As a result, a control method for a workpiece transport robot that can appropriately grip the workpiece is provided.

[0010] Invention Effects According to this disclosure, the workpiece conveying robot and its control method can properly hold the workpiece even when there is no space for holding the workpiece in the location where the workpiece is located. Attached Figure Description

[0011] Figure 1 This is a block diagram showing the substrate transport robot of the first embodiment.

[0012] Figure 2 This is a diagram showing the substrate transport robot, a receiving section, and other receiving sections of the first embodiment.

[0013] Figure 3 This is a perspective view of the hand in the first embodiment, viewed from the front side.

[0014] Figure 4 This is a perspective view of the hand in the first embodiment, viewed from the base side.

[0015] Figure 5 This is a diagram showing the claw portion of the hand in the first embodiment.

[0016] Figure 6This is a perspective view of the hand in the first embodiment, viewed from the side.

[0017] Figure 7 This is a diagram showing the claw portion of the hand in the first embodiment.

[0018] Figure 8 This is a side view of the substrate.

[0019] Figure 9 This is a flowchart illustrating the operation of a substrate transport robot in the first embodiment when transporting a substrate housed in one receiving section to another receiving section.

[0020] Figure 10 This is a perspective view showing the state in which the substrate is moved to the holding position by the friction pull-out part.

[0021] Figure 11 This is a side view showing the state in which the friction-pulled part is in contact with the lower surface of the substrate.

[0022] Figure 12 This is a side view showing the state in which the substrate is lifted from below by the friction pull-out part.

[0023] Figure 13 This is a side view showing the state in which the substrate is moved to the holding position by the friction pull-out part.

[0024] Figure 14 This diagram illustrates the state in which a substrate held by a holding part is transferred from one receiving part to another receiving part.

[0025] Figure 15 This is a flowchart illustrating the operation of a substrate transport robot in the first embodiment when transporting a substrate housed in other accommodating portions to one accommodating portion.

[0026] Figure 16 This diagram illustrates the state in the first embodiment where the substrate being held by the holding portion is transferred from other receiving portions to one receiving portion.

[0027] Figure 17 This is a perspective view of the hand in the second embodiment.

[0028] Figure 18 This is a perspective view of the friction pull-out portion of the second embodiment.

[0029] Figure 19 This is a top view of the friction pull-out portion of the second embodiment.

[0030] Figure 20 These are diagrams illustrating the action of holding the substrate by hand according to the second embodiment. (a) is a diagram showing the state before the substrate is held by hand. (b) is a diagram showing the state after the substrate is held by hand.

[0031] Figure 21 This is a perspective view of a hand representing a variation of the first embodiment.

[0032] Figure 22 This is a perspective view showing the gripping part of a modified example of the first embodiment.

[0033] Figure 23 This is a side view showing a modified example of the first embodiment, of the holding part.

[0034] Figure 24 This is a perspective view showing the friction pull-out portion of a modified example of the second embodiment. Detailed Implementation

[0035] [First Implementation] The first embodiment of this disclosure, embodied in the accompanying drawings, will be described below. In this specification, the vertical direction is defined as the Z direction. The upper side is defined as the Z1 side, and the lower side as the Z2 side. Furthermore, the direction from the front end to the base end of the hand 50 is defined as the A direction. The front end side and the base end side of the hand 50 are defined as the A1 side and the A2 side, respectively. The direction orthogonal to the A direction is defined as the B direction. The right side viewed from the front end of the hand 50 is defined as the B1 side, and the left side viewed from the front end of the hand 50 is defined as the B2 side. The A and B directions are directions along a horizontal plane. The A and B directions are examples of the first and second directions, respectively.

[0036] like Figure 1 As shown, the substrate transport robot 100 includes a robot arm 10, a self-propelled trolley 20, a control unit 30, a tool mounting unit 40, and a hand 50. Furthermore, the substrate transport robot 100 is an example of a workpiece transport robot.

[0037] like Figure 2 As shown, in the first embodiment, the substrate transport robot 100 is a vertical multi-joint robot. The substrate transport robot 100 includes multiple joint axes JT. For example, the robot arm 10 includes six joint axes JT1, JT2, JT3, JT4, JT5, and JT6. The number of joint axes JT can also be more than six. Furthermore, in each joint axis from joint axis JT1 to joint axis JT6, there are arranged... Figure 1 The drive unit 11 shown.

[0038] A robotic arm 10 is mounted on a self-propelled trolley 20. For example... Figure 1 As shown, the self-propelled trolley 20 includes wheels 21 and a drive unit 22. The drive unit 22 is a motor or the like that drives the wheels 21. The operation of the drive unit 22 is controlled by the control unit 30.

[0039] like Figure 1As shown, the control unit 30 controls the movements of the robot arm 10 and hand 50. Furthermore, the control unit 30 controls the overall movement of the board transport robot 100. The control unit 30 includes a main control unit 31, a servo control unit 32, and a drive circuit unit 33. The main control unit 31 and the servo control unit 32, for example, include a CPU (Central Processing Unit). The main control unit 31 controls the joint axes JT of the board transport robot 100. Based on instructions from the main control unit 31, the servo control unit 32 controls the power supplied to the drive unit 11 of the joint axes JT. The control unit 30 is a robot controller.

[0040] The drive circuit section 33 supplies drive power to the drive section 11 of the joint axis JT. The drive circuit section 33 includes an inverter circuit that supplies AC power to the drive section 11. The drive circuit section 33 is configured for each joint axis JT.

[0041] The drive unit 11 serves as the drive source for moving the substrate transport robot 100. The drive unit 11 includes a servo motor, an encoder, and a reducer. The servo motor rotates by being supplied with electricity. The rotating shaft of the servo motor rotates, for example, by three-phase alternating current. The encoder detects the rotation angle of the servo motor. Furthermore, the encoder outputs the detected value representing the rotation angle of the servo motor to the main control unit 31 and the servo control unit 32.

[0042] The tool mounting section 40 is interchangeably mounted with the hand 50 relative to the robot arm 10. The tool mounting section 40 is, for example, an automatic tool changer.

[0043] like Figure 3 As shown, the hand 50 is mounted on the robot arm 10 and holds the base plate 200. The hand 50 is mounted on the robot arm 10 via a tool mounting part 40. The hand 50 includes a support part 51, a support part 52, a gripping part 53, a drive part 55, and a moving mechanism 56. Figure 4 The drive unit 57, the moving mechanism 58, and the friction pull-out unit 59 are shown. The gripping unit 53 includes gripping parts 53a and 53b. The friction pull-out unit 59 is an example of a pull-out unit and a first friction pull-out unit. Furthermore, gripping parts 53a and 53b are examples of a first gripping part and a second gripping part, respectively. Additionally, the substrate 200 is an example of a workpiece.

[0044] Support 51 is a rod-shaped member extending along direction A. Support 52 is a rod-shaped member extending along direction B, which is orthogonal to direction A. Support 51 and support 52 are connected together.

[0045] In the first embodiment, the gripping portion 53a grips the substrate 200 from a direction A along the horizontal direction. Specifically, the gripping portion 53a includes a claw portion 531a and Figure 4The abutment portion 532a is shown. The claw portion 531a is mounted to the plate-shaped member 54a. The claw portion 531a is mounted to the member 54a in a manner that protrudes from the member 54a towards the Z2 side. The member 54a is mounted to the frame-shaped member 54b. The support portion 51 passes through the member 54b. Furthermore, the claw portion 531a is an example of a first claw portion.

[0046] The claw 531a grips the front end of the substrate 200 in the A direction. For example... Figure 5 As shown, a recess 533a is formed on the front end side of the claw portion 531a to hold the substrate 200.

[0047] In the first embodiment, such as Figure 4 As shown, the abutting portion 532a abuts against the base end side of the substrate 200. The abutting portion 532a is a columnar member extending along the Z2 direction. A pair of abutting portions 532a are provided as columnar members. Alternatively, the abutting portion 532a may also be a plate-shaped member extending along the B direction.

[0048] like Figure 3 As shown, the drive unit 55 drives the gripping part 53a. The drive unit 55 is disposed on the support part 51. The drive unit 55 is connected to the member 54b. Together with the member 54b and the member 54a, the drive unit 55 causes the claw part 531a to move along the A direction. The drive unit 55 is a linear movement mechanism that moves the claw part 531a along the A direction. The drive unit 55 is, for example, a cylinder or a motor. Figure 6 As shown, the drive unit 55 moves the claw portion 531a, thereby holding the substrate 200 from the A direction by the claw portion 531a and the abutment portion 532a. Furthermore, the moving mechanism 56 moves the abutment portion 532a along the Z direction. The moving mechanism 56 is, for example, a cylinder.

[0049] In the first embodiment, such as Figure 4 As shown, the gripping portion 53b grips the substrate 200 from a direction B, which is a horizontal direction intersecting direction A. The gripping portion 53b includes a pair of claw portions 531b. The pair of claw portions 531b grips the substrate 200 from direction B. Figure 7 As shown, a protrusion 532b protruding horizontally is disposed at the front end of a pair of claw portions 531b. The lower surface of the substrate 200 is supported by the protrusion 532b.

[0050] In the first embodiment, such as Figure 4As shown, the drive unit 57 drives the gripping unit 53b. The drive unit 57 is disposed on the support unit 52. The drive unit 57 is configured for each of the pair of claws 531b. The drive unit 57 moves the claws 531b along the B direction. The drive unit 57 is a linear movement mechanism that moves the claws 531b along the B direction. The drive unit 57 is, for example, a cylinder. By moving the pair of claws 531a closer to each other via the drive unit 57, the substrate 200 is gripped from the B direction by the pair of claws 531b.

[0051] The moving mechanism 58 causes each of the pair of claws 531b to move along the Z direction. The moving mechanism 58 is, for example, a cylinder.

[0052] like Figure 3 As shown, the friction pull-out portion 59 is a component for pulling out the substrate 200. The friction pull-out portion 59 pulls out the substrate 200 by frictional force. The friction pull-out portion 59 is disposed at the front end of the hand 50. The friction pull-out portion 59 includes a mounting portion 59a and an abutment portion 59b. The mounting portion 59a is mounted on the component 54a. The mounting portion 59a has a Y-shape. The abutment portion 59b is disposed on each of the two-stranded portions of the mounting portion 59a. The abutment portion 59b is, for example, rubber. In addition, the abutment portion 59b can be any component capable of pulling out the substrate 200 by frictional force, and can also be a component other than rubber.

[0053] Sensor unit 60 is mounted on robot arm 10. Sensor unit 60 illuminates and receives detection light to detect the position of a target object. Sensor unit 60 includes sensor unit 61 and sensor unit 62. Sensor unit 61 illuminates detection light toward mirror unit 63. Sensor unit 61 illuminates detection light along direction A. The detection light illuminated from sensor unit 61 is reflected to mirror unit 63. Detection light reflected from the target object is received by sensor unit 61 via mirror unit 63. Sensor unit 61 is mounted on tool mounting unit 40 via plate-shaped member 54c. Sensor unit 61 is mounted on side B1 of member 54c. Sensor unit 61 is, for example, an optical sensor.

[0054] Sensor 62 illuminates detection light in a direction different from that of sensor 61. Specifically, sensor 62 illuminates detection light in the Z2 direction. Sensor 62 is mounted on tool mounting part 40 via plate-shaped member 54c. Sensor 62 is mounted on the B2 side of member 54c. Sensor 62 is, for example, an optical sensor.

[0055] The reflector section 63 is disposed on the hand 50. The reflector section 63 reflects the detection light irradiated from the sensor section 61 toward the detection object, and reflects the detection light reflected from the detection object toward the sensor section 61. The reflector section 63 is mounted on the member 54a via the plate-shaped member 54d. The reflector section 63 is tilted at an angle of, for example, 45 degrees relative to the A direction.

[0056] The camera unit 64 captures images of the object being inspected. The camera unit 64 is, for example, a two-dimensional camera. The camera unit 64 is mounted to the tool mounting unit 40 via a plate-shaped member 54e. The imaging direction of the camera unit 64 is the Z2 direction.

[0057] In the first embodiment, such as Figure 2 As shown, a substrate transport robot 100 grasps a substrate 200 from a receiving section 300 that pre-contains a substrate 200 and transports it to a receiving section 310. The receiving section 300 includes a housing 301 and a plurality of shelf sections 302. Each shelf section 302 has multiple segments. A space 303 is formed between the shelf sections 302. The substrate 200 is disposed on the surface of the shelf section 302. That is, in the first embodiment, a plurality of substrates 200 are disposed along the vertical direction. The receiving section 310 includes a housing 311. The substrate 200 is transported into the housing 311. The receiving section 310 is mounted on a self-propelled trolley 20. Furthermore, the receiving section 300 and the receiving section 310 are examples of a first receiving section and a second receiving section, respectively.

[0058] In the first embodiment, such as Figure 8 As shown, substrate 200 includes multiple stacked substrate portions. The stacked substrate portions are temporarily fixed by temporary fixing members 210. Specifically, each substrate portion includes a processing target substrate 201, a metal plate 202 disposed on the upper surface of the processing target substrate 201, and a baking plate 203 disposed on the lower surface of the processing target substrate 201. Multiple processing target substrates 201 are, for example, stacked together. The baking plate 203 functions as a spacer during processing of the processing target substrate 201. The temporary fixing member 210 is, for example, an adhesive tape. Furthermore, a positioning pin 220 is disposed through the substrate 200. The positioning pin 220 is disposed on one end side and the other end side of the substrate 200. The positioning pin 220 protrudes downward from the baking plate 203. The processing target substrate 201, the metal plate 202, and the baking plate 203 are examples of a workpiece portion.

[0059] Next, refer to Figure 9 This describes the operation of the substrate transport robot 100 when transporting a substrate 200 housed in one housing 300 to another housing 310.

[0060] In step S1, the control unit 30 performs a process to move the self-propelled trolley 20 to the receiving part 300 that pre-accompanies the substrate 200.

[0061] In step S2, the control unit 30 performs a process of detecting the substrate 200 using sensor units 61 and 62. The control unit 30 also performs a process of capturing an image of the substrate 200 housed in the receiving portion 300 using camera unit 64. Based on the detection results from sensor units 61 and 62 and the image captured by camera unit 64, the control unit 30 identifies the position of the receiving portion 300.

[0062] In step S3, the control unit 30 identifies the number of segments of the shelf section 302 on which the initially held substrate 200 is arranged among the multiple substrates 200 housed in the receiving unit 300, based on the detection results of the sensor unit 61 and the sensor unit 62 and the image captured by the camera unit 64.

[0063] In step S4, in the first embodiment, as follows Figure 10 As shown, the control unit 30 performs the following process: by using the friction pull-out part 59, it moves the substrate 200 to a gripping position P for gripping the substrate 200 by the gripping part 53. Specifically, as... Figure 11 As shown, the control unit 30 moves the robot arm 10 to insert the friction pull-out portion 59 into the space 303 of the shelf portion 302 from below the substrate 200 disposed on the shelf portion 302. Furthermore, the friction pull-out portion 59 is located below the end of the substrate 200 on the A2 side. The control unit 30 moves the robot arm 10 to contact the lower surface of the substrate 200 with the friction pull-out portion 59.

[0064] In the first embodiment, such as Figure 12 and Figure 13 As shown, the control unit 30 performs the following processing: with the substrate 200 in contact with the friction pull-out portion 59, the substrate 200 is moved to the holding position P by sliding horizontally through the friction pull-out portion 59. Furthermore, the control unit 30 performs the following processing: with the substrate 200 lifted from below by the friction pull-out portion 59, the substrate 200 is moved to the holding position P by sliding horizontally through the friction pull-out portion 59. Additionally, the control unit 30 moves the robot arm 10 to slide the substrate 200 horizontally through the friction pull-out portion 59. Specifically, firstly, as... Figure 12 As shown, the robot arm 10 lifts the substrate 200 via the friction pull-out part 59. Then, as... Figure 13 As shown, the robot arm 10 slides the substrate 200 horizontally via the friction pull-out part 59. At this time, the substrate 200 tilts downwards towards side A1. The substrate 200 slides towards side A2. In the gripping position P, a portion of the substrate 200 is pulled out to the outside of the receiving part 300. In the gripping position P, the side of the substrate 200 is exposed from the outside of the receiving part 300.

[0065] In step S5, in the first embodiment, the control unit 30 performs a process to hold the substrate 200, which has been moved to the holding position P, by the holding unit 53. The control unit 30 drives the drive unit 55 so that the substrate 200 is held from direction A by the claws 531a and the abutment 532a. The control unit 30 drives the drive unit 57 so that the substrate 200 is held from direction B by a pair of claws 531b. At the holding position P, because the side of the substrate 200 is exposed outside the receiving portion 300, the substrate 200 is held by the pair of claws 531b in a state where the claws 531b do not interfere with the housing 301.

[0066] In step S6, as Figure 14 As shown, the control unit 30 performs the process of transferring the substrate 200 held by the gripping unit 53 to the receiving unit 310. The control unit 30 moves the robot arm 10 to transfer the substrate 200 held by the gripping unit 53 to the receiving unit 310. After transferring the substrate 200 to the receiving unit 310, the control unit 30 releases the gripping unit 53 from the substrate 200. In addition, the operations from steps S4 to S6 are repeated, corresponding to the number of substrates 200 stored in the receiving unit 300.

[0067] Next, refer to Figure 15 This describes the operation of the substrate transport robot 100 when transporting a substrate 200 housed in one housing 310 to another housing 300.

[0068] In step S11, the control unit 30 performs the same process as in step S1 above, moving the self-propelled trolley 20 to the receiving part 300 that pre-accompanies the substrate 200.

[0069] In step S12, the control unit 30 identifies the position of the receiving unit 300 based on the detection results of the sensor unit 61 and the sensor unit 62, as well as the image captured by the camera unit 64, just like in step S2 above.

[0070] In step S13, the control unit 30 identifies the number of segments of the shelf section 302 of the initially placed substrate 200 based on the detection results of the sensor unit 61 and the sensor unit 62, as well as the image captured by the camera unit 64, just like in step S3 above.

[0071] In step S14, the control unit 30 performs a process that causes the substrate 200 housed in the receiving unit 310 to be held by the holding unit 53.

[0072] In step S15, the control unit 30 performs a process of transferring the substrate 200 held by the gripping unit 53 to the receiving unit 300. First, the control unit 30 slides the substrate 200 held by the gripping unit 53 to the inside of the receiving unit 300. Then, when the substrate 200 reaches the gripping position P, the gripping state of the substrate 200 by the gripping unit 53 is released. Afterwards, as... Figure 16 As shown, the control unit 30, for example, slides the substrate 200 to the inside of the receiving portion 300 via the claw portion 531a. Alternatively, the control unit 30 can also slide the substrate 200 to the inside of the receiving portion 300 via a part of the hand 50 other than the claw portion 531a. Furthermore, the operations of steps S14 and S15, corresponding to the number of substrates 200 housed in the receiving portion 310, are repeated.

[0073] [Effects of the first embodiment] The control unit 30 performs the following process: by using the friction pull-out part 59, it moves the substrate 200 to a holding position P for holding the substrate 200 by the holding part 53, and the substrate 200 moved to the holding position P is held by the holding part 53. Therefore, even if there is insufficient space in the location where the substrate 200 is pre-positioned for holding the substrate 200 by the holding part 53, the substrate 200 is moved to the holding position P. As a result, the substrate 200 can be properly held.

[0074] The friction pull-out section 59 pulls out the substrate 200 by friction. The control section 30 performs the following process: with the substrate 200 in contact with the friction pull-out section 59, the substrate 200 is moved to the holding position P by sliding horizontally through the friction pull-out section 59. Therefore, without the need for an air-drawing mechanism as when the substrate 200 is adsorbed by an adsorption section, the substrate 200 can be moved by friction, thus suppressing the increase in the number of components.

[0075] The control unit 30 performs the following process: while the substrate 200 is lifted from below by the friction pull-out part 59, the substrate 200 is moved to the holding position P by sliding along the horizontal direction using the friction pull-out part 59. As a result, because the contact area between the substrate 200 and the portion on which the substrate 200 is disposed is reduced, the substrate 200 can be pulled out smoothly.

[0076] The holding portion 53 includes a holding portion 53a that holds the substrate 200 from a horizontal direction A, and a holding portion 53b that holds the substrate 200 from a horizontal direction B that intersects the direction A. The control portion 30 controls the holding portions 53a and 53b to hold the substrate 200 that has moved to the holding position P. Therefore, since the substrate 200 is held by both the holding portions 53a and 53b, it is possible to prevent the substrate 200 from falling off.

[0077] The substrate transport robot 100 includes a self-propelled trolley 20 carrying a robot arm 10. The control unit 30 performs the following processing: moves the self-propelled trolley 20 to a receiving section 300 pre-loaded with substrates 200; moves the substrates 200 placed in the receiving section 300 to a gripping position P via a friction pull-out part 59; grips the substrates 200 at the gripping position P with a gripping part 53; and transports the substrates 200 gripped by the gripping part 53 to the receiving section 310. Thus, in the substrate transport robot 100 equipped with the self-propelled trolley 20, substrates 200 can be properly gripped even when there is insufficient space for gripping by the gripping part 53. Furthermore, even when multiple receiving sections 300 are arranged in separate positions, one substrate transport robot 100 can self-propel to transport substrates from multiple receiving sections 300 to the receiving section 310.

[0078] A friction pull-out portion 59 is disposed at the front end of the hand 50. Therefore, when the substrate 200 is disposed in the receiving portion 300, the hand 50 can be pulled out from the front side of the receiving portion 300 without inserting it into the inner side of the receiving portion. Thus, interference between the hand 50 and the receiving portion 300 can be suppressed.

[0079] The substrate transport robot 100 is a vertical joint robot. Therefore, because the vertical joint robot is capable of performing complex movements, it can easily move the substrate 200 to the holding position P.

[0080] The substrate 200 includes a stacked processing target substrate 201, a metal plate 202, and a baking plate 203. The stacked processing target substrate 201, metal plate 202, and baking plate 203 are temporarily fixed by a temporary fixing member 210. Here, when the upper surfaces of the multiple substrates 200 temporarily fixed by the temporary fixing member 210 are adsorbed and lifted by an adsorption part or the like, the temporary fixing state may be released due to the weight of the substrates 200. Therefore, by moving the substrates 200 to a holding position P for holding the substrates 200 by the holding part 53, and by holding the substrates 200 moved to the holding position P by the holding part 53, the release of the temporary fixing state can be suppressed, and the multiple substrates 200 can be transported.

[0081] Multiple substrates 200 are arranged along the vertical direction. Therefore, by moving the substrates 200 to the holding position P using the friction pull-out part 59, it is possible to suppress the interference of the substrates 200 arranged in the vertical direction with the holding part 53.

[0082] [Second Implementation] The structure of the hand 150 in the second embodiment will be described. For example... Figure 17As shown, the hand 150 is substantially the same as the hand 50 of the first embodiment, except that the structure of the friction pull-out portion 160 differs from that of the friction pull-out portion 59 of the first embodiment, the mounting position of the camera portion 64 is on the A1 side of the support portion 52, and the reflector portion 63 is not provided. Furthermore, the friction pull-out portion 160 is an example of the pull-out portion and the second friction pull-out portion in the claims.

[0083] In the second embodiment, such as Figure 18 As shown, the friction pull-out portion 160 includes a first claw portion 161 that contacts the surface of the substrate 200 on the Z1 side and a second claw portion 162 that contacts the back surface of the substrate 200 on the Z2 side. The substrate 200 is pulled out by friction with the substrate 200. Specifically, the first claw portion 161 is disposed on the Z1 direction side of the friction pull-out portion 160, and the second claw portion 162 is disposed on the Z2 direction side of the friction pull-out portion 160. That is, the first claw portion 161 and the second claw portion 162 are separated in the Z direction. Furthermore, the friction pull-out portion 160 includes an upper support member 163 that is generally U-shaped and plate-shaped, and the first claw portion 161 is mounted on the B2 direction side of the upper support member 163. Additionally, the friction pull-out portion 160 includes a lower support member 164 that is plate-shaped, and the second claw portion 162 is mounted on the B1 direction side of the lower support member 164. Furthermore, the lower support member 164 includes a partially cut-out portion 164a. The cutout 164a is formed to prevent the lower support member 164 from interfering with other members.

[0084] like Figure 19 As shown, the width W of the first claw portion 161 and the width W of the second claw portion 162 in the B direction are approximately equal. Furthermore, in the B direction, the pitch p between the first claw portion 161 and the second claw portion 162 is approximately four to five times the width W. However, the aforementioned width W and pitch p are just examples and are not limited to these.

[0085] like Figure 18 As shown, a buffer member 165 is disposed on the side of the first claw portion 161 that contacts the surface of the substrate 200. Furthermore, a buffer member 165 is disposed on the side of the second claw portion 162 that contacts the back surface of the substrate 200. The buffer member 165 is formed of, for example, polyurethane. The buffer member 165 mitigates the impact generated by the contact between the first claw portion 161 and the second claw portion 162 and the substrate 200.

[0086] In the second embodiment, such as Figure 20 As shown, in the Z direction, which is the thickness direction of the substrate 200, the distance d between the first claw portion 161 and the second claw portion 162 is greater than the thickness t of the substrate 200. For example, the distance d is about 1.5 to 3 times the thickness t. In addition, the distance d described above is an example and is not limited to this.

[0087] In the second embodiment, such as Figure 19 As shown, in direction A, which is the direction in which the first claw portion 161 and the second claw portion 162 extend, the length of the first claw portion 161 is less than the length of the second claw portion 162. For example, the length L1 of the portion of the first claw portion 161 that is further forward than the limiter 166 is about 0.1 to 0.3 times the length L2 of the portion of the second claw portion 162 that is further forward than the limiter 166.

[0088] In the second embodiment, such as Figure 19 As shown, the front end face 161a of the first claw portion 161 is inclined at an angle of more than 90 degrees to the direction A, which is the direction in which the first claw portion 161 extends. For example, when viewed from the Z direction, the front end face 161a is inclined from the B1 side, which is the inner side of the first claw portion 161, toward the B2 side, which is the outer side, toward the A2 side. That is, when viewed from the Z direction, the B1 side, which is the inner side of the first claw portion 161, protrudes further toward the A1 side, which is the front end side, than the B2 side, which is the outer side. Therefore, even if the rectangular substrate 200 is rotated clockwise or counterclockwise in the AB plane, the increase in the contact area between the first claw portion 161 and the surface on the Z1 side of the substrate 200 can be suppressed. In addition, the arrangement in Figure 18 The front end face 165a of the buffer member 165 of the first claw portion 161 shown is also inclined in the same way as the front end face 161a of the first claw portion 161.

[0089] In the second embodiment, such as Figure 18 As shown, the friction pull-out portion 160 includes a stopper 166 that inhibits the substrate 200 from moving in the A2 direction, which is near the base end of the first claw portion 161 and the second claw portion 162. For example, a pair of stoppers 166 are provided. The pair of stoppers 166 are mounted on the generally U-shaped upper support member 163. The pair of stoppers 166 extend from the upper support member 163 in the Z2 direction. The pair of stoppers 166 are formed of resin, for example. Therefore, because resin is relatively hard, even if the substrate 200 abuts against the stopper 166, movement of the substrate 200 in the A2 direction can be inhibited. In addition, the pair of stoppers 166 have a cylindrical shape, for example. Therefore, even if the substrate 200 abuts against the stopper 166, breakage of the substrate 200 can be prevented.

[0090] In the second embodiment, such as Figure 17 As shown, the sensor unit 167 detects the contents contained in... Figure 2The substrate 200 is shown in the receiving portion 300. The sensor portion 167 includes a first sensor portion 167a disposed on the front end side of the support portion 51 and a second sensor portion 167b disposed on the base end side of the support portion 51. The second sensor portion 167b has the same structure as the sensor portion 62 of the first embodiment described above. The first sensor portion 167a and the second sensor portion 167b are, for example, light sensors, which illuminate and receive detection light in the Z2 direction in order to detect the position of the object being detected.

[0091] Next, refer to Figure 20 This describes the gripping action of the substrate 200 performed by hand 150. The control unit 30 executes the process of detecting the substrate 200 via the first sensor unit 167a and the second sensor unit 167b. Based on the detection results of the sensor unit 167, the control unit 30 executes the process of gripping the substrate 200 housed in the receiving portion 300 by hand 150. Specifically, as... Figure 20 As shown in (a), the control unit 30 moves the hand 150 to position the substrate 200 between the first claw portion 161 and the second claw portion 162. At this time, the substrate 200 abuts against the limiter 166, preventing the substrate 200 from moving further A2 than the limiter 166. Furthermore, even when the substrate 200 is tilted relative to the B direction, as long as the tilt direction of the substrate 200 is the same as the tilt direction of the front end face 161a of the first claw portion 161, the contact area between the substrate 200 and the first claw portion 161 becomes relatively small. Furthermore, in the second embodiment, as... Figure 20As shown in (b), the control unit 30 performs the following process: with the substrate 200 positioned between the first claw 161 and the second claw 162, the hand 150 is rotated so that the first claw 161 contacts the surface of the substrate 200 and the second claw 162 contacts the back surface of the substrate 200. For example, the control unit 30 rotates the hand 150 by rotating the joint axis JT6 at the foremost end of the robot arm 10. As a result, the substrate 200 is clamped by the first claw 161 and the second claw 162. Furthermore, by adjusting the amount of rotation of the joint axis JT6, the substrate 200 can be clamped by the first claw 161 and the second claw 162 even if the thickness t of the substrate 200 changes. For example, when the thickness t is small, the amount of rotation of the joint axis JT6 is increased, and when the thickness t is large, the amount of rotation of the joint axis JT6 is decreased. Moreover, even if the thickness t is the same, the friction between the first claw 161 and the second claw 162 and the substrate 200 can be adjusted by adjusting the amount of rotation of the joint axis JT6. For example, the frictional force is increased by increasing the rotation of the joint axis JT6, and decreased by decreasing the rotation of the joint axis JT6. Furthermore, the control unit 30 performs the following process: with the first claw 161 and the second claw 162 in contact with the substrate 200, the substrate 200 is moved to the holding position P by sliding horizontally through the friction pull-out part 160.

[0092] [Effects of the second embodiment] The friction pull-out section 160 includes a first claw portion 161 that contacts the surface of the substrate 200 and a second claw portion 162 that contacts the back surface of the substrate 200, and pulls out the substrate 200 by friction with the substrate 200. The control unit 30 performs the following process: with the first claw portion 161 and the second claw portion 162 in contact with the substrate 200, the friction pull-out section 160 slides the substrate 200 horizontally to a holding position. Here, there is a situation where the substrate 200 is attached with debris or the like generated in other processes. In this case, if only the back surface of the substrate 200 is supported as in the friction pull-out section 59 of the first embodiment described above, the substrate 200 may slide. Therefore, the sliding movement of the friction pull-out section 59 needs to be performed slowly. In contrast, in the second embodiment, since both sides of the substrate 200 are held by the first claw portion 161 and the second claw portion 162, the friction pull-out section 160 can slide at a relatively high speed. As a result, the time required to transport the substrate 200 can be shortened.

[0093] In the thickness direction of the substrate 200, the distance d between the first claw portion 161 and the second claw portion 162 is greater than the thickness t of the substrate 200. The control unit 30 performs the following process: with the substrate 200 positioned between the first claw portion 161 and the second claw portion 162, the hand 150 is rotated to bring the first claw portion 161 into contact with the surface of the substrate 200 and the second claw portion 162 into contact with the back surface of the substrate 200. Therefore, because the distance d between the first claw portion 161 and the second claw portion 162 is greater than the thickness t of the substrate 200 in the thickness direction, even if there are manufacturing errors in the thickness t of the substrate 200 or the distance d between the first claw portion 161 and the second claw portion 162, the substrate 200 can still be positioned between the first claw portion 161 and the second claw portion 162. Furthermore, because the substrate 200 is clamped by the first claw portion 161 and the second claw portion 162, slippage of the substrate 200 can be further suppressed.

[0094] In the direction in which the first claw portion 161 and the second claw portion 162 extend, the length of the first claw portion 161 is less than the length of the second claw portion 162. As a result, since the contact area between the surface of the substrate 200 and the first claw portion 161 becomes relatively small, it is particularly effective when it is desirable to minimize contact between the surface of the substrate 200 and the first claw portion 161.

[0095] The front end face 161a of the first claw portion 161 is inclined at an angle other than 90 degrees to the direction in which the first claw portion 161 extends. As a result, even when the substrate 200 rotates in the AB plane when viewed from the Z direction, the increase in the contact area between the substrate 200 and the first claw portion 161 can be suppressed.

[0096] The friction pull-out portion 160 includes a limiter 166 that inhibits the substrate 200 from moving toward the base end of the first claw portion 161 and the second claw portion 162. As a result, the contact area between the surface of the substrate 200 and the first claw portion 161 can be prevented from increasing due to the substrate 200 moving toward the base end of the first claw portion 161.

[0097] The hand 150 includes a sensor unit 167 that detects the substrate 200 housed in the first receiving portion 300. Based on the detection result of the sensor unit 167, the control unit 30 performs a process of holding the substrate 200 housed in the first receiving portion 300 by the hand 150. Thus, since the position of the substrate 200 is detected, the substrate 200 can be properly held by the hand 150.

[0098] [Variation Example] Furthermore, it should be considered that the embodiments disclosed herein are illustrative in all respects and are not restrictive. The scope of this disclosure is not defined by the description of the above embodiments, but by the claims, and includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0099] In the first embodiment described above, an example is shown where the control unit 30 slides the substrate 200 while it is tilted by lifting the substrate 200 from below via the friction pull-out portion 59. However, this disclosure is not limited to this. For example, the control unit 30 may also make the friction pull-out portion 59 contact the lower surface of the substrate 200 to slide the substrate 200 without tilting it.

[0100] In the first embodiment described above, an example is shown where the substrate 200 is pulled out by friction force through the friction pull-out portion 59, but this disclosure is not limited thereto. For example, it is also possible to... Figure 21 As shown in the modified example of the hand 250, the substrate 200 is pulled out via the suction part 251. The suction part 251 adsorbs the substrate 200. The control unit 30 performs a process that moves the substrate 200, which is adsorbed by the suction part 251, to the holding position P by sliding it horizontally. The suction part 251 adsorbs the substrate 200, for example, by the suction force of air. The suction part 251 adsorbs the upper surface of the substrate 200. In addition, the suction part 251 can also adsorb the lower surface of the substrate 200. The suction part 251 is mounted on the member 54a at the front end of the hand 250 via a plate-shaped member 252. By adsorbing the substrate 200 with the suction part 251, the adsorption force between the suction part 251 and the substrate 200 becomes relatively large, so the substrate 200 can be reliably pulled out. The suction part 251 is an example of a pull-out part.

[0101] In the first embodiment described above, an example is shown where the gripping portion 53a includes a claw portion 531a and an abutment portion 532a, but this disclosure is not limited thereto. For example, the gripping portion 53a may also include a pair of claw portions 531a.

[0102] In the first embodiment described above, an example is shown in which one gripping portion 53a and one gripping portion 53b are each arranged on the gripping portion 53, but this disclosure is not limited to this. For example, multiple gripping portions 53a and multiple gripping portions 53b may each be arranged. Thus, even when the substrate 200 is relatively heavy, the substrate 200 can be gripped by the gripping portion 53. Furthermore, the gripping portion 53 may also have only the gripping portion 53b.

[0103] In the first embodiment described above, an example is shown where the robotic arm 10 is mounted on a self-propelled trolley 20, but this disclosure is not limited thereto. For example, this disclosure can also be applied to a substrate transport robot 100 with the robotic arm 10 fixed to the ground.

[0104] In the first embodiment described above, an example is shown where the friction pull-out portion 59 is disposed at the front end of the hand 50, but this disclosure is not limited thereto. For example, the friction pull-out portion 59 may also be disposed at the center of the hand 50.

[0105] In the first embodiment described above, an example of a vertical jointed robot being shown is presented, but this disclosure is not limited thereto. For example, this disclosure can also be applied to a substrate transport robot that is a horizontal jointed robot.

[0106] In the first embodiment described above, an example is shown of a substrate transport robot 100 transporting a stacked substrate 201, a metal plate 202, and a baking plate 203, but this disclosure is not limited thereto. For example, the substrate transport robot 100 may also transport a single, unstacked substrate.

[0107] In the first embodiment described above, an example is shown where the gripping portion 53a is formed by a claw portion 531a and an abutment portion 532a, and the gripping portion 53b is formed with a pair of claw portions 531b; however, this disclosure is not limited thereto. For example, as... Figure 22 and Figure 23 As shown, the gripping portion of this disclosure can also be formed by a clamping portion 400. Specifically, a pair of clamping portions 400 that grip the substrate 200 from the A1 side and the A2 side can be arranged instead of the claw portion 531a and the abutment portion 532a. A pair of clamping portions 400 that grip the substrate 200 from the B1 side and the B2 side can also be arranged instead of the pair of claw portions 531b of the gripping portion 53b.

[0108] In the second embodiment described above, an example is shown where the distance d between the first claw portion 161 and the second claw portion 162 in the thickness direction of the substrate 200 is greater than the thickness t of the substrate 200; however, this disclosure is not limited thereto. For example, the distance d between the first claw portion 161 and the second claw portion 162 may also be approximately the same as the thickness t of the substrate 200. Furthermore, the substrate 200 may be inserted between the first claw portion 161 and the second claw portion 162 in such a way that the first claw portion 161 and the second claw portion 162 are in contact.

[0109] In the second embodiment described above, an example is shown where, in the direction A in which the first claw portion 161 and the second claw portion 162 extend, the length of the first claw portion 161 is less than the length of the second claw portion 162; however, this disclosure is not limited thereto. For example, the lengths of the first claw portion 161 and the second claw portion 162 may also be the same.

[0110] In the second embodiment described above, an example is shown where the front end face 161a of the first claw portion 161 is inclined at an angle other than 90 degrees to the direction A in which the first claw portion 161 extends; however, this disclosure is not limited thereto. For example, the front end face 161a of the first claw portion 161 may also be orthogonal to the direction A in which the first claw portion 161 extends.

[0111] In the second embodiment described above, an example is shown where the friction pull-out portion 160 includes a limiter 166 that inhibits the movement of the substrate 200 toward its base end near the first claw portion 161 and the second claw portion 162; however, this disclosure is not limited thereto. For example, the friction pull-out portion 160 may not be equipped with a limiter 166. Furthermore, an example is shown where a pair of limiters 166 are provided, but only one limiter 166 may be provided.

[0112] In the second embodiment described above, an example is shown where the lower support member 164 includes a cutout portion 164a, but this disclosure is not limited thereto. For example, like Figure 24 As shown in the friction pull-out portion 170, the lower support member 171 may not include a cutout portion. Furthermore, in the friction pull-out portion 170, a pair of limiters 166 extend from the lower support member 164 in the Z1 direction. Moreover, the friction pull-out portion 170 is an example of a pull-out portion and a second friction pull-out portion.

[0113] In the first and second embodiments described above, examples were shown of controlling the overall operation of the board transport robot 100 by the control unit 30, which serves as a robot controller; however, this disclosure is not limited to these examples. For instance, a higher-level control unit may be configured separately from the control unit 30, and the overall operation of the board transport robot 100 may be controlled by the higher-level control unit.

[0114] In the first and second embodiments described above, examples of applying this disclosure to a substrate transport robot 100 that transports substrate 200 are shown, but this disclosure is not limited thereto. For example, this disclosure can also be applied to a workpiece transport robot that transports workpieces other than substrate 200.

[0115] In the first and second embodiments described above, an example is shown where the drive unit 11, which is configured on each joint axis from joint axis JT1 to joint axis JT6, and the drive unit 22, which is configured on the self-propelled trolley 20, are controlled by the same control unit 30. However, this disclosure is not limited thereto. For example, the drive unit 11 and the drive unit 22 may also be controlled separately by different control units.

[0116] The functions of the elements disclosed in this specification can be executed using circuitry or processing circuitry comprising a general-purpose processor, a special-purpose processor, an integrated circuit, an ASIC (Application Specific Integrated Circuit), conventional circuitry, and / or combinations thereof configured or programmed to perform the disclosed functions. A processor contains transistors or other circuitry and is therefore considered a processing circuit or circuit. In this disclosure, a circuit, unit, or mechanism is hardware that performs the listed functions, or hardware programmed to perform the listed functions. The hardware can be the hardware disclosed in this specification, or it can be other known hardware programmed or configured to perform the listed functions. In the case where the hardware is a processor considered a type of circuit, the circuit, mechanism, or unit is a combination of hardware and software, with the software used in the configuration of the hardware and / or processor.

[0117] [Way] Those skilled in the art should understand that the above exemplary embodiments are specific examples of the following methods.

[0118] (Method 1) A workpiece conveying robot, comprising: Robotic arm; A hand, which is mounted on the robotic arm and holds the workpiece; and The control unit controls the movements of the robotic arm and the hand. The hand includes: The pull-out section pulls out the workpiece; and The holding part holds the workpiece. The control unit performs the following processing: The workpiece is moved to a holding position by the pull-out part to be held by the holding part. The workpiece, which has been moved to the holding position, is held by the holding part.

[0119] (Method 2) In the workpiece conveying robot described in Method 1, the pull-out section includes a first friction pull-out section that pulls out the workpiece by frictional force. The control unit performs the following process: while the workpiece is in contact with the first friction pull-out part, the workpiece is moved to the holding position by sliding along the horizontal direction through the first friction pull-out part.

[0120] (Method 3) In the workpiece conveying robot described in Method 2, the control unit performs the following process: while the workpiece is lifted from below by the first friction pull-out part, the workpiece is moved to the holding position by sliding along the horizontal direction by the first friction pull-out part.

[0121] (Method 4) In any one of the workpiece conveying robots described in methods 1 to 3, the pull-out section includes an adsorption section for adsorbing the workpiece. The control unit performs the following process: it moves the workpiece adsorbed by the adsorption unit to the holding position by sliding it horizontally.

[0122] (Method 5) In the workpiece conveying robot described in any one of methods 1 to 4, the gripping part includes: A first gripping part grips the workpiece in a first direction along the horizontal; and The second gripping part grips the workpiece from a second direction along a horizontal direction intersecting the first direction. The control unit controls the first gripping part and the second gripping part to grip the workpiece that has been moved to the gripping position.

[0123] (Method 6) In any one of the workpiece transport robots described in methods 1 to 5, a self-propelled trolley carrying the robot arm is provided. The control unit performs the following processing: The self-propelled trolley is moved to the first receiving section where the workpiece is pre-accommodated. The workpiece placed in the first receiving portion is moved to the holding position by the pull-out portion. The workpiece, moved to the holding position, is held by the holding part. The workpiece held by the gripping part is transferred to the second receiving part.

[0124] (Method 7) In any one of the workpiece conveying robots described in methods 1 to 6, the pull-out part is disposed at the front end of the hand.

[0125] (Method 8) In any one of the workpiece transport robots described in methods 1 to 7, the workpiece transport robot is a vertical multi-joint robot.

[0126] (Method 9) In any one of the workpiece conveying robots described in methods 1 to 8, the workpiece comprises a plurality of stacked workpiece parts. The stacked plurality of workpieces are temporarily fixed by temporary fixing components.

[0127] (Method 10) In any one of the workpiece conveying robots described in methods 1 to 9, multiple workpieces are arranged along the vertical direction.

[0128] (Method 11) In the workpiece conveying robot described in any one of methods 1 to 10, the pull-out part includes a second friction pull-out part, which includes a first claw portion that contacts the surface of the workpiece and a second claw portion that contacts the back side of the workpiece, and pulls out the workpiece by friction with the workpiece. The control unit performs the following process: while the first claw and the second claw are in contact with the workpiece, the workpiece is moved to the holding position by sliding horizontally through the second friction pull-out part.

[0129] (Method 12) In the workpiece conveying robot described in method 11, the distance between the first claw and the second claw in the thickness direction of the workpiece is greater than the thickness of the workpiece. The control unit performs the following process: with the workpiece positioned between the first claw and the second claw, the hand is rotated so that the first claw contacts the surface of the workpiece and the second claw contacts the back of the workpiece.

[0130] (Method 13) In the workpiece transport robot described in mode 11 or mode 12, the length of the first claw is less than the length of the second claw in the direction in which the first claw and the second claw extend.

[0131] (Method 14) In any one of the workpiece transport robots described in methods 11 to 13, the front end face of the first claw is inclined at an angle other than 90 degrees to the direction in which the first claw extends.

[0132] (Method 15) In any one of the workpiece conveying robots of methods 11 to 14, the second friction pull-out portion includes a limiter that inhibits the workpiece from moving toward the base end of the first claw portion and the second claw portion.

[0133] (Method 16) In the workpiece conveying robot described in any one of embodiments 11 to 15, the hand includes a sensor unit for detecting the workpiece housed in the first receiving portion. Based on the detection results of the sensor, the control unit performs the process of holding the workpiece contained in the first receiving part by the hand.

[0134] (Method 17) A control method for a workpiece conveying robot, the workpiece conveying robot comprising a robot arm, a hand mounted on the robot arm and holding a workpiece, and a control unit for controlling the movements of the robot arm and the hand, wherein the hand includes a pull-out part for pulling out the workpiece and a gripping part for holding the workpiece, wherein... The control method includes: The workpiece is moved to a gripping position by means of the pull-out portion for gripping the workpiece by means of the gripping portion; and The workpiece, which has been moved to the holding position, is held by the holding part.

[0135] Explanation of reference numerals in the attached figures 10 robotic arms 20 Self-propelled trolleys 30 Control Department 50 lots 53 Control Department 53a Control Section (First Control Section) 53b Control Section (Second Control Section) 59 Friction Pull-out Section (Pull-out Section, First Friction Pull-out Section) 100 Substrate Transfer Robot (Workpiece Transfer Robot) 150 lots 160 Friction pull-out section (pull-out section, second friction pull-out section) 161 First Claw 161a Front Face 162 Second Claw 166 limit switch 167 Sensor Department 170 Friction pull-out section (pull-out section, second friction pull-out section) 200 Substrate (workpiece) 201 Processing target substrate (workpiece section) 202 Metal sheet (workpiece section) 203 Baking Plate (Workpiece Section) 210 Temporarily fixed components 251 Adsorption section (pull-out section) 300-unit containment section (first containment section) 310 Reception Section (Second Reception Section) Direction A (First Direction) Direction B (Second Direction) d Spacing between the first claw and the second claw P holds the position t represents the thickness of the substrate.

Claims

1. A workpiece conveying robot, characterized in that, have: Robotic arm; Hand, which is mounted on the robotic arm and holds the workpiece; and The control unit controls the movements of the robotic arm and the hand. The hand includes: The pull-out section pulls out the workpiece; and The holding part holds the workpiece. The control unit performs the following processing: The workpiece is moved to a gripping position by the pull-out portion to be gripped by the gripping portion, and The workpiece, which has been moved to the holding position, is held by the holding part.

2. The workpiece conveying robot according to claim 1, characterized in that, The pull-out portion includes a first friction pull-out portion that pulls out the workpiece by frictional force. The control unit performs the following process: while the workpiece is in contact with the first friction pull-out part, the workpiece is moved to the holding position by sliding along the horizontal direction through the first friction pull-out part.

3. The workpiece conveying robot according to claim 2, characterized in that, The control unit performs the following process: while the workpiece is lifted from below by the first friction pull-out part, the workpiece is moved to the holding position by sliding along the horizontal direction by the first friction pull-out part.

4. The workpiece conveying robot according to claim 1, characterized in that, The pull-out section includes an adsorption section for adsorbing the workpiece. The control unit performs the following process: it moves the workpiece, which has been adsorbed by the adsorption unit, to the holding position by sliding it horizontally.

5. The workpiece conveying robot according to claim 1, characterized in that, The holding part includes: A first gripping part grips the workpiece in a first direction along the horizontal; and The second gripping part grips the workpiece from a second direction along a horizontal direction intersecting the first direction. The control unit controls the first gripping part and the second gripping part to grip the workpiece that has been moved to the gripping position.

6. The workpiece conveying robot according to claim 1, characterized in that, Equipped with a self-propelled trolley carrying the robotic arm. The control unit performs the following processing: The self-propelled trolley is moved to the first receiving section where the workpiece is pre-accommodated. The workpiece placed in the first receiving portion is moved to the holding position by the pull-out portion. The workpiece, having moved to the gripping position, is gripped by the gripping part, and The workpiece held by the gripping part is transferred to the second receiving part.

7. The workpiece conveying robot according to claim 1, characterized in that, The pull-out portion is located at the front end of the hand.

8. The workpiece conveying robot according to claim 1, characterized in that, The workpiece transport robot is a vertical multi-joint robot.

9. The workpiece conveying robot according to claim 1, characterized in that, The workpiece comprises multiple stacked workpiece parts. The stacked plurality of workpieces are temporarily fixed by temporary fixing components.

10. The workpiece conveying robot according to claim 1, characterized in that, The workpieces are arranged in multiple ways along the vertical direction.

11. The workpiece conveying robot according to claim 1, characterized in that, The pull-out portion includes a second friction pull-out portion, which comprises a first claw portion that contacts the surface of the workpiece and a second claw portion that contacts the back side of the workpiece, thereby pulling out the workpiece through friction with the workpiece. The control unit performs the following process: while the first claw and the second claw are in contact with the workpiece, the workpiece is moved to the holding position by sliding horizontally through the second friction pull-out part.

12. The workpiece conveying robot according to claim 11, characterized in that, In the thickness direction of the workpiece, the distance between the first claw and the second claw is greater than the thickness of the workpiece. The control unit performs the following process: with the workpiece positioned between the first claw and the second claw, the hand is rotated so that the first claw contacts the surface of the workpiece and the second claw contacts the back of the workpiece.

13. The workpiece conveying robot according to claim 11, characterized in that, In the direction in which the first claw and the second claw extend, the length of the first claw is less than the length of the second claw.

14. The workpiece conveying robot according to claim 11, characterized in that, The front end face of the first claw is inclined at an angle other than 90 degrees to the direction in which the first claw extends.

15. The workpiece conveying robot according to claim 11, characterized in that, The second friction pull-out portion includes a limiter that inhibits the workpiece from moving toward the base end of the first claw portion and the second claw portion.

16. The workpiece conveying robot according to claim 11, characterized in that, The hand includes a sensor unit for detecting the workpiece housed in the first receiving portion. Based on the detection results of the sensor, the control unit performs the process of holding the workpiece contained in the first receiving part by the hand.

17. A control method for a workpiece conveying robot, the workpiece conveying robot comprising a robot arm, a hand mounted on the robot arm and holding a workpiece, and a control unit for controlling the movements of the robot arm and the hand, the hand comprising a pull-out part for pulling out the workpiece and a gripping part for holding the workpiece, the control method being characterized by comprising the following steps: The workpiece is moved to a holding position by means of the pull-out part for holding the workpiece by means of the holding part; as well as The workpiece, which has been moved to the holding position, is held by the holding part.

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