Organic cleaning equipment

Abstract

The utility model relates to the technical field of wafer cleaning, and discloses organic cleaning equipment which comprises a machine shell, a cleaning cavity is arranged in the machine shell, a cleaning bottom plate is arranged in the cleaning cavity, a plurality of liquid medicine tanks and water tanks are arranged on the cleaning bottom plate, supports are fixedly arranged on the two sides of the liquid medicine tanks and the two sides of the water tanks, and water outlets are formed in the bottoms of the liquid medicine tanks and the bottoms of the water tanks. A plurality of buttons are arranged on the outer side face of the machine shell and electrically connected with the corresponding liquid medicine grooves and the corresponding water tanks respectively, water outlets are formed below the liquid medicine grooves and the water tanks and connected with a rear drainage pipe, and an electric control area is arranged above the drainage pipe. According to the utility model, the residual glue on the wafer is removed through the cooperation of the ultrasonic vibrator and the liquid medicine; the exhaust plate slides in the limiting plate and is matched with the air valve to adjust the air volume and open and close, it can be ensured that harmful gas is exhausted in time, the exposure risk of operators is reduced, meanwhile, the exhaust air volume can be adjusted according to actual needs, energy consumption is reduced, and energy consumption and emission to the environment are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer cleaning, in particular to an organic cleaning device. Background Art

[0002] After photolithography, there will be residues of chemical solution and photoresist on the wafer. The existing degumming equipment has poor cleaning effect, long cleaning time, and incomplete degumming effect, which may cause residues of photoresist or degumming agent to remain on the surface of the wafer, affecting the subsequent process steps and even affecting the performance of the device. The chemicals used in the degumming process may cause environmental pollution. If not handled properly, it may affect the working environment and employee health. Therefore, in response to the above problems, an organic cleaning equipment is proposed. Utility Model Content

[0003] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an organic cleaning device, comprising a casing, a cleaning chamber is arranged in the casing, a cleaning bottom plate is arranged in the cleaning chamber, a plurality of medicine liquid tanks and water tanks are arranged on the cleaning bottom plate, brackets are fixedly arranged on both sides of the medicine liquid tanks and the water tanks, drain outlets are arranged at the bottom of the medicine liquid tanks and the water tanks, a plurality of buttons are arranged on the outer side of the casing, the plurality of buttons are electrically connected to the corresponding medicine liquid tanks and the corresponding water tanks, respectively, water outlets are arranged below the medicine liquid tanks and the water tanks, the water outlets are connected to the rear drain pipe, and an electric control area is arranged above the drain pipe.

[0004] Furthermore, an ultrasonic vibrator is arranged at the center of the lower end of the medicine tank.

[0005] Furthermore, cleaning pipes are arranged on both sides of the cleaning chamber, nitrogen and pure water are respectively passed through the cleaning pipes, a nozzle is arranged at the upper end of the cleaning pipe, and a plurality of cleaning holes are arranged through the upper surface of the cleaning bottom plate.

[0006] Furthermore, a plurality of exhaust ports are arranged on the rear side of the cleaning chamber, an exhaust channel is arranged behind the cleaning chamber, a limiting plate is arranged in the exhaust channel, an exhaust plate is slidably arranged in the limiting plate, a plurality of slots are arranged on the exhaust plate, and the positions of the plurality of slots correspond one-to-one to the positions of the plurality of exhaust ports. The top of the exhaust channel is connected to an air valve, and the air valve is arranged above the casing.

[0007] Furthermore, the positions of the plurality of water tanks and the plurality of medicine liquid tanks correspond one to one, and the water tanks and the corresponding medicine liquid tanks are on the same vertical plane.

[0008] The utility model has the following beneficial effects:

[0009] In the utility model, the residual glue on the wafer is removed by the cooperation of an ultrasonic vibrator and a chemical solution; the exhaust plate slides in the limit plate and cooperates with the air valve to adjust the size and switch of the air volume, which can ensure that harmful gases are discharged in time and reduce the exposure risk of operators. At the same time, the exhaust volume can be adjusted according to actual needs, reducing energy consumption, and reducing energy consumption and emissions to the environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a structural schematic diagram of an organic cleaning device proposed by the utility model;

[0011] Figure 2 This is a schematic diagram of the structure in the cleaning chamber proposed by the utility model;

[0012] Figure 3 This is a cross-sectional view of the exhaust passage proposed by the utility model.

[0013] Legend:

[0014] 1. Casing; 2. Cleaning chamber; 3. Cleaning bottom plate; 4. Liquid tank; 5. Water tank; 6. Bracket; 7. Drain port; 8. Button; 9. Water outlet; 10. Drain pipe; 11. Electric control area; 12. Ultrasonic vibrator; 13. Cleaning pipe; 14. Nozzle; 21. Exhaust port; 22. Exhaust channel; 23. Limit plate; 24. Exhaust plate; 25. Notch; 26. Air valve; 31. Cleaning hole. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] Reference Figure 1-3As shown, an embodiment of the utility model is: an organic cleaning device, including a housing 1, a cleaning chamber 2 is arranged in the housing 1, a cleaning bottom plate 3 is arranged in the cleaning chamber 2, a plurality of liquid medicine tanks 4 and water tanks 5 are arranged on the cleaning bottom plate 3, brackets 6 are fixedly arranged on both sides of the liquid medicine tank 4 and the water tank 5, drain ports 7 are arranged at the bottom of the liquid medicine tank 4 and the water tank 5, an ultrasonic vibrator 12 is arranged at the center of the lower end of the liquid medicine tank 4, a plurality of buttons 8 are arranged on the outer side of the housing 1, and the plurality of buttons 8 are electrically connected to the corresponding liquid medicine tank 4 and the corresponding water tank 5, and a water outlet 9 is arranged below the liquid medicine tank 4 and the water tank 5. The water inlet 9 is connected to the rear drain pipe 10. An electric control area 11 is arranged above the drain pipe 10. The electric control area 11 is used to provide drive and power supply. Multiple buttons 8 respectively control the corresponding medicine liquid tank 4 and water tank 5. When the wafer is in the medicine liquid tank 4, the ultrasonic vibrator 12 is started. The ultrasonic vibrator 12 generates mechanical waves, which have tiny vibrations on the wafer and can also cause the medicine liquid to penetrate into the residual glue in the wafer gap, thereby improving the degumming effect. After the degumming is completed, the wafer is moved to the water tank 5 for rinsing, and the water outlet 9 is used to discharge the solution in the medicine liquid tank 4 and the water tank 5, and transport it to the outside through the drain pipe 10.

[0017] Furthermore, cleaning pipes 13 are arranged on both sides of the cleaning chamber 2, and nitrogen and pure water are respectively passed through the cleaning pipes 13. A nozzle 14 is arranged at the upper end of the cleaning pipe 13, and a plurality of cleaning holes 31 are arranged through the upper surface of the cleaning base plate 3. When the wafer is degummed, the chemical solution will splash or evaporate in the cleaning chamber 2. After the pure water cleans the cleaning chamber 2 through the cleaning pipe 13, the nitrogen is cleaned and blown dry again through the cleaning pipe 13. The wafer can also be directly cleaned through the nozzle 14 on the cleaning pipe 13 without being placed in the water tank 5. The cleaned solution flows into the bottom through the cleaning hole 31 and flows into the drain pipe 10 through the water outlet 9.

[0018] Furthermore, a plurality of exhaust ports 21 are arranged on the rear side of the cleaning chamber 2, an exhaust channel 22 is arranged on the rear of the cleaning chamber 2, a limiting plate 23 is arranged in the exhaust channel 22, an exhaust plate 24 is slidably arranged in the limiting plate 23, a plurality of notches 25 are arranged on the exhaust plate 24, and the positions of the plurality of notches 25 correspond one to one with the positions of the plurality of exhaust ports 21, the top of the exhaust channel 22 is connected with an air valve 26, the air valve 26 is arranged above the casing 1, and the air valve 26 is used for adjusting the size and switch of the air volume, the exhaust plate 24 slides in the limiting plate 23, and the size and switch of the air volume are adjusted by the overlap size of the notch 25 and the exhaust port 21, so as to ensure that the harmful gas is discharged in time, and at the same time, the exhaust volume is adjusted according to actual needs, energy consumption is reduced, and energy consumption and emissions to the environment are reduced.

[0019] Furthermore, the positions of multiple water troughs 5 and multiple chemical solution troughs 4 correspond one to one, and the water troughs 5 and the corresponding chemical solution troughs 4 are on the same vertical plane. After the wafer passes through the chemical solution, it only needs to be moved horizontally from the chemical solution trough 4 to the corresponding water trough 5 for cleaning, without the need for multiple position movements, thereby reducing the risk of wafer damage.

[0020] Working principle: After the wafer is photolithographically processed, the wafer is first placed in the liquid medicine tank 4 and the ultrasonic vibrator 12 is started. The ultrasonic vibrator 12 generates waves to make the liquid medicine penetrate the wafer gaps for degumming. When the wafer is degummed, the wafer is moved to the water tank 5 for cleaning. After cleaning, the drain ports 7 of the liquid medicine tank 4 and the water tank 5 are opened to allow the solution to flow into the water outlet 9 below and enter the drain pipe 10 through the water outlet 9. The exhaust plate 24 slides in the limit plate 23 to make the slot 25 coincide with the corresponding exhaust port 21, and at the same time cooperates with the air valve 26 to adjust and switch the air volume. After the wafer is degummed and cleaned, pure water is used to clean the cleaning chamber 2 through the cleaning pipe 13, and then nitrogen is transported to the cleaning chamber 2 through the cleaning pipe 13 for another cleaning and drying.

[0021] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An organic cleaning device, Features: The invention comprises a housing (1), wherein a cleaning chamber (2) is arranged in the housing (1), wherein a cleaning base plate (3) is arranged in the cleaning chamber (2), wherein a plurality of medicine liquid tanks (4) and water tanks (5) are arranged on the cleaning base plate (3), wherein brackets (6) are fixedly arranged on both sides of the medicine liquid tanks (4) and the water tanks (5), wherein drainage outlets (7) are arranged at the bottoms of the medicine liquid tanks (4) and the water tanks (5), wherein a plurality of buttons (8) are arranged on the outer side of the housing (1), wherein the plurality of buttons (8) are electrically connected to the corresponding medicine liquid tanks (4) and the corresponding water tanks (5), respectively, wherein water outlets (9) are arranged below the medicine liquid tanks (4) and the water tanks (5), wherein the water outlets (9) are connected to a rear drainage pipe (10), and an electric control area (11) is arranged above the drainage pipe (10).

2. An organic cleaning device according to claim 1, Features: An ultrasonic vibrator (12) is arranged at the center of the lower end of the medicine liquid tank (4).

3. An organic cleaning device according to claim 1, Features: Cleaning pipes (13) are arranged on both sides of the cleaning chamber (2), nitrogen and pure water are respectively passed through the cleaning pipes (13), a nozzle (14) is arranged at the upper end of the cleaning pipe (13), and a plurality of cleaning holes (31) are arranged in a penetrating manner on the upper surface of the cleaning bottom plate (3).

4. An organic cleaning device according to claim 1, Features: A plurality of exhaust ports (21) are arranged on the rear side of the cleaning chamber (2); an exhaust channel (22) is arranged at the rear of the cleaning chamber (2); a limit plate (23) is arranged in the exhaust channel (22); an exhaust plate (24) is slidably arranged in the limit plate (23); a plurality of notches (25) are arranged on the exhaust plate (24); the positions of the plurality of notches (25) correspond to the positions of the plurality of exhaust ports (21) in a one-to-one manner; the upper part of the exhaust channel (22) is connected to an air valve (26); and the air valve (26) is arranged above the casing (1).

5. An organic cleaning device according to claim 1, Features: The positions of the plurality of water tanks (5) and the plurality of medicine liquid tanks (4) correspond one to one, and the water tanks (5) and the corresponding medicine liquid tanks (4) are located on the same vertical plane.

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