Lifting device for guide cylinder of single crystal furnace

By designing a single crystal furnace diversion cylinder lifting device with external and internal clamping components and anti-slip layer, the safety hazards during the disassembly and assembly of the diversion cylinder in the prior art are solved, and uniform clamping and safe lifting of the diversion cylinder are achieved. , suitable for flow guide cylinders of different thicknesses.

CN222160465UActive Publication Date: 2024-12-13LESHAN JINGYUNTONG SEMICON MATERIALS CO LTD
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Patent Information

Application Number
CN202420880849.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-26
Publication Date
2024-12-13
Estimated Expiration
2034-04-26

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Abstract

The utility model discloses a lifting device for a guide cylinder of a single crystal furnace, which comprises a top plate, an outer clamping component and an inner clamping component, the outer clamping component and the inner clamping component are positioned below the top plate, the outer clamping component and the inner clamping component respectively clamp the outer wall and the inner wall of the guide cylinder, and a first hydraulic rod is fixedly arranged below the top plate. A sleeve and a connecting block are sequentially arranged on the periphery of the telescopic end of the first hydraulic rod, the sleeve is connected with the outer clamping assembly, and the connecting block is connected with the inner clamping assembly. The first arc-shaped plate and the second arc-shaped plate which are evenly distributed are arranged, the outer wall and the inner wall of the guide cylinder are evenly clamped, the clamping device is suitable for clamping the guide cylinders with different thicknesses, and the guide cylinders are safe and stable when lifted; meanwhile, anti-skid layers arranged in the first arc-shaped plate and the second arc-shaped plate make contact with the inner wall, friction force is increased, and the guide cylinder is prevented from being scratched.
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Description

Technical Field

[0001] The utility model relates to the technical field of disassembly and assembly of a single crystal furnace, in particular to a lifting device for a guide tube of a single crystal furnace. Background Art

[0002] As an important component of the single crystal furnace, the guide tube plays an important role in the production of single crystal silicon. The guide tube of the single crystal furnace has a great influence on the crystal growth. The guide tube can reduce the flow of argon gas on the upper part of the furnace body and ensure the quality of the single crystal silicon rod.

[0003] In the single crystal pulling production process, the furnace needs to be dismantled after each furnace is completed. The guide tube is located inside the furnace tube, and multiple people are required to work together during the removal process. In addition, the residual temperature inside the furnace is high during the dismantling process, which can easily cause burns to the workers, and safety cannot be guaranteed. When using the existing lifting device, only the outside of the guide tube or the inside of the guide tube can be clamped and lifted, which can easily cause loose clamping and lead to accidents. Utility Model Content

[0004] The purpose of the utility model is to provide a lifting device for a single crystal furnace guide tube, which mainly arranges an outer clamping component and an inner clamping component to clamp the outer wall and the inner wall of the guide tube simultaneously, and uniformly clamps the inside and outside of the guide tube, thereby solving the above-mentioned problems existing in the prior art.

[0005] In order to solve the above technical problems, the utility model adopts the following solutions:

[0006] A lifting device for a single crystal furnace guide tube comprises a top plate and an outer clamping assembly and an inner clamping assembly located below the top plate, wherein the outer clamping assembly and the inner clamping assembly respectively clamp the outer wall and the inner wall of the guide tube, and a first hydraulic rod is fixedly arranged below the top plate, and a sleeve and a connecting block are sequentially arranged on the outer periphery of the telescopic end of the first hydraulic rod, wherein the sleeve is connected to the outer clamping assembly, and the connecting block is connected to the inner clamping assembly.

[0007] Preferably, a plurality of second hydraulic rods are provided on the outer periphery of the sleeve, and telescopic ends of the second hydraulic rods are connected to the top of the outer clamping assembly.

[0008] Preferably, the outer clamping assembly includes an L-shaped plate and a first curved plate, the first curved plate is connected below the horizontal end of the L-shaped plate, and the surface of the horizontal end of the L-shaped plate abuts against the bottom surface of the top support plate of the guide tube, and the inner side of the first curved plate contacts the outer wall of the guide tube.

[0009] Preferably, the inner clamping assembly includes a base plate located at the bottom end of the first hydraulic rod, a symmetrical third hydraulic rod is provided on the bottom surface of the base plate, the telescopic end of the third hydraulic rod is connected to the second arc plate, and the inner wall of the second arc plate is also provided with a plurality of connecting rods movably connected to the connecting block.

[0010] Preferably, an assembly groove 1 is provided on the outer periphery of the connection block, an assembly groove 2 is provided on the inner side of the second arc-shaped plate, and both ends of the connecting rod are respectively located in the assembly groove 1 and the assembly groove 2 and fixed by positioning pins.

[0011] Preferably, an anti-slip layer is provided on the inner side of the first arc plate and the outer side of the second arc plate respectively, and the anti-slip layer is made of rubber or polytetrafluoroethylene.

[0012] Preferably, the number of the first curved plates and the second curved plates is at least four.

[0013] The utility model has the beneficial effects as follows: the utility model evenly clamps the outer wall and the inner wall of the guide tube by arranging the evenly distributed first arc plate and the second arc plate, and is suitable for clamping guide tubes of different thicknesses, and is safe and stable when lifting the guide tube; at the same time, the anti-skid layer arranged in the first arc plate and the second arc plate contacts the inner wall, thereby increasing the friction and avoiding scratching the guide tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of the utility model;

[0015] Figure 2 It is a schematic diagram of the top view of the inner clamping assembly of the utility model;

[0016] Figure 3 For this utility model Figure 2 Schematic diagram of the local enlarged structure in the connection block.

[0017] Figure markings: 1-top plate, 2-first hydraulic rod, 21-sleeve, 22-connecting block, 220-assembly groove one, 3-external clamping assembly, 30-second hydraulic rod, 31-L-shaped plate, 32-first arc plate, 4-inner clamping assembly, 40-bottom plate, 41-second arc plate, 410-assembly groove two, 42-connecting rod, 43-anti-slip layer, 44-third hydraulic rod, 5-guide tube, 50-support plate, 6-locating pin. DETAILED DESCRIPTION

[0018] The present invention will be further described in detail below in conjunction with the embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0019] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model.

[0020] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "disposed", "opened", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] Example 1

[0022] Embodiment 1 of the utility model is a lifting device for a single crystal furnace guide tube, comprising a top plate 1 and an outer clamping assembly 3 and an inner clamping assembly 4 located below the top plate 1, wherein the outer clamping assembly 3 and the inner clamping assembly 4 respectively clamp the outer wall and the inner wall of the guide tube 5, and a first hydraulic rod 2 is fixedly arranged below the top plate 1, and a sleeve 21 and a connecting block 22 are sequentially arranged on the outer periphery of the telescopic end of the first hydraulic rod 2, wherein the sleeve 21 is connected to the outer clamping assembly 3, and the connecting block 22 is connected to the inner clamping assembly 4.

[0023] Reference Figure 1The lifting device in the present application mainly includes a top plate 1, an outer clamping assembly 3, and an inner clamping assembly 4. The first hydraulic rod 2 drives the outer clamping assembly 3 and the inner clamping assembly 4 to move downward, so that the outer clamping assembly 3 descends on the outer wall of the guide tube 5, and at the same time, the inner clamping assembly 4 descends synchronously inside the guide tube 5. When the bottom of the outer clamping component 3 abuts against the top of the guide tube 5, the downward movement is stopped, so that the bottom of the outer clamping component 3 moves toward the outer wall of the guide tube 5 and contacts each other; at this time, the inner clamping component 4 is located inside the guide tube 5, and the two sides of the inner clamping component 4 will move toward the inner wall of the guide tube 5 until they contact the inner wall, and then the clamping work of the guide tube 5 by the lifting device is completed, thereby starting the first hydraulic rod 2, and the first hydraulic rod 2 will drive the outer clamping component 3 and the inner clamping component 4 to lift, so that the guide tube 5 in the inner and outer clamping state is lifted upward, and the inner and outer walls of the guide tube 5 are firmly clamped during the lifting process, with good clamping effect, and can adapt to the lifting of guide tubes 5 of different thicknesses, prevent the occurrence of dangerous accidents, and improve work safety.

[0024] In some preferred embodiments, a plurality of second hydraulic rods 30 are provided on the outer periphery of the sleeve 21, and the telescopic ends of the second hydraulic rods 30 are connected to the top of the outer clamping assembly 3. The outer clamping assembly 3 includes an L-shaped plate 31 and a first curved plate 32, the lower part of the horizontal end of the L-shaped plate 31 is connected to the first curved plate 32, and the surface of the horizontal end of the L-shaped plate 31 abuts against the bottom surface of the top support plate 50 of the guide tube 5, and the inner side of the first curved plate 32 contacts the outer wall of the guide tube 5.

[0025] In the present application, the second hydraulic rod 30 is fixed to the sleeve 21 so that its telescopic end is fixed to the first arc plate 32 in the outer clamping assembly 3. The second hydraulic rod 30 realizes the distance selection between the first arc plate 32 and the outer wall of the guide tube 5. The first hydraulic rod 2 is responsible for the overall downward movement of the outer clamping assembly 3. When the first arc plate 32 moves below the bottom surface of the support plate 50, the second hydraulic rod 30 will move the L-shaped plate 31 in the direction of the guide tube 5, and finally make the horizontal end surface of the L-shaped plate 31 contact with the bottom surface of the support plate 50, and the first arc plate 32 contacts with the outer wall of the guide tube 5, that is, the clamping of the outer wall of the guide tube 5 is completed.

[0026] In some preferred embodiments, the inner clamping assembly 4 includes a bottom plate 40 located at the bottom end of the first hydraulic rod 2, a symmetrical third hydraulic rod 44 is provided on the bottom surface of the bottom plate 40, the telescopic end of the third hydraulic rod 44 is connected to the second arc plate 41, and the inner wall of the second arc plate 41 is also provided with a plurality of connecting rods 42 movably connected to the connecting block 22. The outer periphery of the connecting block 22 is provided with a first assembly groove 220, the inner side of the second arc plate 41 is provided with a second assembly groove 410, and the two ends of the connecting rod 42 are respectively located in the first assembly groove 220 and the second assembly groove 410 and fixed with a positioning pin 6.

[0027] Specifically, the telescopic end of the first hydraulic rod 2 is provided with a connecting block 22, and the connecting block 22 is located below the sleeve 21. The bottom plate 40 arranged at the bottom end of the telescopic end is provided with a third hydraulic rod 44. When the inner clamping assembly 4 is located inside the guide tube 5, the third hydraulic mechanism will drive the second arc plate 41 to move toward the inner wall of the guide tube 5, so that the second arc plate 41 is based on the inner wall of the guide tube 5, thereby providing a more secure clamping for the inner clamping assembly 4.

[0028] Further, refer to Figure 2 and Figure 3 The connecting block 22 is fixedly sleeved on the outer periphery of the telescopic end of the first hydraulic rod 2. The connecting rod 42 is mainly connected through the assembly groove 1 220 in the connecting block 22 and the connecting rod 42 set in the assembly groove 2 410 in the second arc plate 41. The positioning pins 6 are used for fixing and limiting respectively, so that the connecting rod 42 can move vertically in the device groove 1. The connecting rod 42 is a spring component. When the inner clamping component 4 enters the guide cylinder 5, the spring is in a compressed state. When the third hydraulic rod 44 drives the second arc plate 41 to move, the spring will be extended outward and tightly abutted against the second arc plate 41. At this time, the second arc plate 41 compresses the spring. The interaction between the two enables the spring to provide auxiliary support for the clamping of the second arc plate 41, so that the second arc plate 41 is firmly in contact with the inner wall of the guide cylinder 5, thereby achieving the purpose of secondary support.

[0029] In some preferred embodiments, the inner side of the first curved plate 32 and the outer side of the second curved plate 41 are respectively provided with an anti-skid layer 43, and the anti-skid layer 43 is made of rubber or polytetrafluoroethylene. On the one hand, in order to increase the anti-skid effect, the anti-skid layer 43 can be evenly distributed with anti-skid protrusions on its contact surface, and the specific shape is not limited. On the other hand, the anti-skid layer 43 can also protect the inner and outer walls of the guide tube 5 to prevent surface scratches.

[0030] In some preferred embodiments, the number of the first curved plates 32 and the second curved plates 41 is at least 4. Specifically, the number of the first curved plates 32 and the second curved plates 41 is at least 4, and the first curved plates 32 and the second curved plates 41 are uniformly clamped on the inner and outer walls of the guide tube 5 to prevent accidents during the lifting of the guide tube 5 and improve safety performance. The arc-shaped first curved plates 32 and the second curved plates 41 are both for better adapting to the clamping of the guide tube 5.

[0031] When the utility model is used, first start the first hydraulic rod 2 to drive the outer clamping assembly 3 and the inner clamping assembly 4 to move downward to the bottom of the guide tube 5 support plate 50, then start the second hydraulic rod 30, drive the L-shaped plate 31 to drive the first curved plate 32 to contact the outer wall of the guide tube 5, and the horizontal end surface of the L-shaped plate 31 abuts against the support plate 50, so as to complete the clamping work of the outer wall of the guide tube 5; continue to start the third hydraulic rod 44, and the third hydraulic rod 44 drives the second curved plate 41 to move toward the inner wall of the guide tube 5 until it contacts the inner wall of the guide tube 5 to complete the clamping of its inner wall. The utility model evenly clamps the outer wall and the inner wall of the guide tube 5 by setting the evenly distributed first curved plates 32 and the second curved plates 41, and is suitable for clamping guide tubes 5 of different thicknesses, so that the guide tube 5 is safe and stable when it is lifted; at the same time, the anti-skid layer 43 set in the first curved plate 32 and the second curved plate 41 contacts the inner wall, increasing the friction force and avoiding scratching the guide tube 5.

[0032] The above is only a preferred embodiment of the utility model and does not limit the utility model in any form. According to the technical essence of the utility model, within the spirit and principles of the utility model, any simple modification, equivalent replacement and improvement made to the above embodiment still falls within the protection scope of the technical solution of the utility model.

Claims

1. A lifting device for a guide tube of a single crystal furnace, characterized in that: The invention comprises a top plate (1) and an outer clamping assembly (3) and an inner clamping assembly (4) located below the top plate (1); the outer clamping assembly (3) and the inner clamping assembly (4) respectively clamp the outer wall and the inner wall of a guide tube (5); a first hydraulic rod (2) is fixedly arranged below the top plate (1); a sleeve (21) and a connecting block (22) are arranged in sequence on the outer periphery of the telescopic end of the first hydraulic rod (2); the sleeve (21) is connected to the outer clamping assembly (3), and the connecting block (22) is connected to the inner clamping assembly (4).

2. The lifting device for the guide tube of a single crystal furnace according to claim 1, characterized in that: A plurality of second hydraulic rods (30) are provided on the outer periphery of the sleeve (21), and telescopic ends of the second hydraulic rods (30) are connected to the top of the outer clamping assembly (3).

3. The lifting device for the guide tube of a single crystal furnace according to claim 1, characterized in that: The outer clamping assembly (3) comprises an L-shaped plate (31) and a first curved plate (32), wherein the first curved plate (32) is connected below the horizontal end of the L-shaped plate (31), and the surface of the horizontal end of the L-shaped plate (31) abuts against the bottom surface of the top support plate (50) of the guide tube (5), and the inner side of the first curved plate (32) contacts the outer wall of the guide tube (5).

4. The lifting device for the guide tube of a single crystal furnace according to claim 3, characterized in that: The inner clamping assembly (4) comprises a bottom plate (40) located at the bottom end of the first hydraulic rod (2), a symmetrical third hydraulic rod (44) is provided on the bottom surface of the bottom plate (40), a telescopic end of the third hydraulic rod (44) is connected to the second arc plate (41), and the inner wall of the second arc plate (41) is also provided with a plurality of connecting rods (42) movably connected to the connecting block (22).

5. The lifting device for the guide tube of a single crystal furnace according to claim 4, characterized in that: The outer periphery of the connecting block (22) is provided with a first assembly groove (220), the inner side of the second arc-shaped plate (41) is provided with a second assembly groove (410), and the two ends of the connecting rod (42) are respectively located in the first assembly groove (220) and the second assembly groove (410) and fixed by positioning pins (6).

6. The lifting device for the guide tube of a single crystal furnace according to claim 4, characterized in that: The inner side of the first arc-shaped plate (32) and the outer side of the second arc-shaped plate (41) are respectively provided with an anti-slip layer (43), and the anti-slip layer (43) is made of rubber or polytetrafluoroethylene material.

7. The lifting device for the guide tube of a single crystal furnace according to claim 4, characterized in that: The number of the first curved plates (32) and the second curved plates (41) is at least four.