Rotating mechanism based on furnace tube cleaning

Abstract

The utility model discloses a rotating mechanism based on furnace tube cleaning, and relates to the technical field of furnace tube cleaning. According to the rotating mechanism based on furnace tube cleaning, through the driving shafts arranged in the main base plate and the side base plates and the transmission shafts connected with the ends of the driving shafts, a to-be-cleaned furnace tube in the groove body can be driven to rotate, cleaning operation is achieved, meanwhile, through cooperation of the driving shafts and the transmission shafts, the disassembly and assembly convenience of the rotating mechanism is improved, and the practicability is high. Through cooperation of the main base plate and the side base plates, when to-be-cleaned furnace tubes of different sizes need to be cleaned, the distance between the two driving shafts can be adjusted by loosening positioning bolts, so that the furnace tube supporting and driving device can be suitable for supporting and driving the furnace tubes of different sizes, and the application range of the device is widened.

Description

Technical Field

[0001] The utility model relates to the technical field of furnace tube cleaning, in particular to a rotating mechanism based on furnace tube cleaning. Background Art

[0002] The furnace tube is used for wafer diffusion. When in use, the quartz boat containing the wafer needs to be placed in the furnace tube together. If the furnace tube is not clean, it will affect the TRR value, IR value and other parameters of the wafer; therefore, regular cleaning of the furnace tube to ensure the cleanliness of the furnace tube is of great help to the electrical properties of the wafer. The existing furnace tube cleaning is mainly done by manually rotating the furnace tube at intervals. This method of cleaning the furnace tube has low cleaning efficiency, poor cleaning effect, and potential safety hazards, resulting in a waste of manpower. Referring to the Chinese patent, the application number is "201920875636.9" for "a furnace tube cleaning device". This patent solves the problem that the existing device mainly rotates the furnace tube manually at intervals. This method of cleaning the furnace tube has low cleaning efficiency, poor cleaning effect, and potential safety hazards, resulting in a waste of manpower. However, the rotating mechanism still has the defect of being inconvenient to install and disassemble. For this reason, we propose a rotating mechanism based on furnace tube cleaning to solve the above problems. Utility Model Content

[0003] In view of the deficiencies in the prior art, the utility model provides a rotating mechanism based on furnace tube cleaning, which solves the problems raised in the above-mentioned background technology.

[0004] To achieve the above objectives, the utility model is implemented through the following technical solutions: a rotating mechanism based on furnace tube cleaning includes a main base plate and a side base plate, wherein the main base plate and the side base plate are both rotatably connected with a driving shaft, and the ends of the driving shafts are both inserted with transmission shafts, and the outer side of the transmission shaft is fixedly sleeved with a plurality of transmission collars for driving the furnace tube to rotate;

[0005] A driving mechanism is provided above the main substrate to drive the two driving shafts to operate;

[0006] A driving socket is provided at the end of the driving shaft, a transmission rod matched with the driving socket is fixed at the end of the transmission shaft, a transmission socket is provided at the end of the transmission shaft away from the transmission rod, and the outer side of the transmission shaft is rotatably connected to a limiting block.

[0007] Preferably, a transmission ring sheet is fixedly sleeved on the outer sides of the plurality of transmission rings, and a plurality of limiting grooves are provided on the outer sides of the transmission ring sheets, and a transmission belt is rotatably connected between two corresponding limiting grooves.

[0008] Preferably, anti-slip pads are fixedly installed on the inner sides of the plurality of transmission rings.

[0009] Preferably, the main base plate and the side base plate are both provided with adjustment grooves, and adjustment ring sleeves are slidably installed inside the adjustment grooves, the drive shafts are rotatably connected to the corresponding adjustment ring sleeves, the outer sides of the adjustment ring sleeves are rotatably connected to mutually meshing positioning bolts, the main base plate and the side base plate are both provided with sliding grooves, and the positioning bolts are slidably connected to the corresponding sliding grooves.

[0010] Preferably, the driving mechanism includes a driving plate frame, the driving plate frame is fixed to the side of the main substrate, a driving motor is fixed to the top surface of the driving plate frame, and a transmission chain is rotatably connected between the output end of the driving motor and the ends of the two driving shafts.

[0011] Preferably, a side frame is fixed to the outer side of the driving plate frame, and a rectangular groove is opened inside the side frame, a locking block is slidably installed inside the rectangular groove, the end of the locking block is rotatably connected to a locking bolt that meshes with each other, and the other end of the locking block is rotatably installed with a transmission rod, the end of the transmission rod is rotatably sleeved with a transmission sprocket, and the transmission sprocket and the transmission chain mesh with each other.

[0012] The utility model provides a rotating mechanism based on furnace tube cleaning. Compared with the prior art, it has the following advantages:

[0013] Beneficial effects:

[0014] (1) The rotating mechanism for cleaning the furnace tube can drive the furnace tube to be cleaned inside the tank body to rotate through the driving shaft provided inside the main base plate and the side base plate and the transmission shaft connected to the end of the driving shaft, thereby realizing the cleaning operation. At the same time, the cooperation between the driving shaft and the transmission shaft improves the convenience of disassembly and assembly of the rotating mechanism.

[0015] (2) The rotating mechanism based on furnace tube cleaning, through the cooperation of the main base plate and the side base plate, can adjust the distance between the two driving shafts by loosening the positioning bolts when furnace tubes of different sizes need to be cleaned. Thus, the rotating mechanism can be suitable for supporting and driving furnace tubes of different sizes, thereby improving the application range of the equipment.

[0016] (3) The rotating mechanism based on furnace tube cleaning can further ensure the transmission effect and avoid slipping through the transmission ring sleeved on the outer side of the transmission shaft and the transmission belt connected between the transmission rings. At the same time, when the furnace body is pressed down, the transmission belt can be bent downward under pressure and fit with the bottom of the furnace body to form a support, thereby reducing the force on the transmission rings on both sides and improving the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2This is a schematic diagram of the structure of the driving mechanism of the utility model;

[0019] Figure 3 For this utility model Figure 2 A schematic diagram of the enlarged structure of point A;

[0020] Figure 4 This is a schematic diagram of the transmission shaft and transmission collar structure of the utility model;

[0021] Figure 5 It is a schematic diagram of the cross-sectional structure of the transmission sleeve ring of the utility model.

[0022] In the figure: 1. main base plate; 2. side base plate; 3. driving plate frame; 301. driving motor; 4. side frame; 401. rectangular groove; 402. locking block; 4021. locking bolt; 4022. transmission rod; 4023. transmission sprocket; 5. driving shaft; 501. driving socket; 502. adjusting ring sleeve; 503. positioning bolt; 6. driving shaft; 601. limiting block; 602. transmission plug rod; 603. transmission socket; 7. transmission sleeve; 701. anti-skid gasket; 702. transmission ring plate; 7021. limiting groove; 703. transmission belt; 8. transmission chain; 9. adjusting groove; 10. slide groove. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-Figure 5 The utility model provides two technical solutions, which specifically include the following embodiments:

[0025] Embodiment 1:

[0026] The rotating mechanism based on furnace tube cleaning includes a main base plate 1 and a side base plate 2. The main base plate 1 and the side base plate 2 are both rotatably connected with a driving shaft 5, and the ends of the driving shaft 5 are inserted with a transmission shaft 6. The outer side of the transmission shaft 6 is fixedly sleeved with a plurality of transmission collars 7 for driving the furnace tube to rotate. When installing, the main base plate 1 and the side base plate 2 are installed at the bottom of the tank body, and the driving shaft 5 is kept parallel during installation. After the installation is completed, the transmission shaft 6 is respectively inserted into the corresponding driving shaft 5.

[0027] Specifically, a driving mechanism is provided above the main substrate 1, which is used to drive the two driving shafts 5 to operate, thereby driving the transmission shaft 6 to rotate at the bottom of the tank body to drive the furnace tube to be cleaned to rotate and realize the cleaning operation;

[0028] Specifically, a driving socket 501 is provided at the end of the driving shaft 5, a driving rod 602 which is adapted to the driving socket 501 is fixed at the end of the transmission shaft 6, a driving socket 603 is provided at the end of the transmission shaft 6 away from the driving rod 602, and a limiting block 601 is rotatably connected to the outer side of the transmission shaft 6. During installation, the connection between the driving shaft 5 and the transmission shaft 6 can be completed by inserting the driving rod 602 into the driving socket 501. When the transmission shaft 6 is connected, the connection between the transmission shafts 6 can be completed by inserting the driving rod 602 into the transmission socket 603. The limiting block 601 is used to be fixed to the bottom of the tank body;

[0029] Furthermore, the outer sides of the plurality of transmission rings 7 are all fixedly sleeved with transmission ring pieces 702, and the outer sides of the transmission ring pieces 702 are all provided with a plurality of limiting grooves 7021. Through the arrangement of the transmission rings 7, when the furnace tube to be cleaned is placed in the tank body, the plurality of transmission rings 7 can form support for the bottom sides of the furnace tube. When the transmission shaft 6 rotates to drive the plurality of transmission rings 7 to operate, the furnace tube can be driven to rotate in the tank body at the same time to achieve the cleaning operation. Through the arrangement of the transmission ring pieces 702, the transmission can be transmitted by the transmission ring pieces 702 and the bottom sides of the furnace tube in a close fit, thereby further ensuring the transmission effect and avoiding the phenomenon of slipping.

[0030] Furthermore, anti-skid pads 701 are fixedly installed on the inner sides of the plurality of transmission collars 7 to prevent the transmission collars 7 from slipping during operation.

[0031] Specifically, the main base plate 1 and the side base plate 2 are both provided with adjustment grooves 9, and the adjustment ring sleeves 502 are slidably installed inside the adjustment grooves 9, the driving shafts 5 are rotatably connected to the corresponding adjustment ring sleeves 502, and the outer sides of the adjustment ring sleeves 502 are rotatably connected to mutually meshing positioning bolts 503, and the main base plate 1 and the side base plate 2 are both provided with slide grooves 10, and the positioning bolts 503 are slidably connected to the corresponding slide grooves 10. When it is necessary to adjust the distance between the two driving shafts 5 according to the size of the furnace body, the positioning bolts 503 can be loosened, and then the adjustment ring sleeves 502 can be pushed to slide inside the adjustment grooves 9 until the positioning bolts 503 are re-locked after the adjustment is completed, so that the adjustment can be completed, and it can be suitable for driving operations of furnaces of different sizes;

[0032] Specifically, the driving mechanism includes a driving plate frame 3, the driving plate frame 3 is fixed to the side of the main substrate 1, a driving motor 301 is fixed to the top surface of the driving plate frame 3, a transmission chain 8 is rotatably connected between the output end of the driving motor 301 and the ends of the two driving shafts 5, a sprocket is sleeved between the output end of the driving motor 301 and the ends of the two driving shafts 5, and the driving operation is realized by the cooperation of the sprocket and the transmission chain 8, and as the driving motor 301 runs, it can drive the two driving shafts 5 to run, thereby realizing the driving operation;

[0033] Specifically, a side frame 4 is fixed to the outer side of the driving plate frame 3, and a rectangular groove 401 is opened inside the side frame 4, and a locking block 402 is slidably installed inside the rectangular groove 401, and the end of the locking block 402 is rotatably connected with a locking bolt 4021 that meshes with each other, and the other end of the locking block 402 is rotatably installed with a transmission rod 4022, and the end of the transmission rod 4022 is rotatably sleeved with a transmission sprocket 4023, and the transmission sprocket 4023 and the transmission chain 8 are meshed with each other. When the position adjustment of the two driving shafts 5 is completed, by loosening the locking bolt 4021 and then pushing the locking block 402, the transmission sprocket 4023 at the end of the transmission rod 4022 is meshed with the transmission chain 8, so that the transmission chain 8 maintains tension, and then the position of the locking block 402 is re-fixed by the locking bolt 4021.

[0034] Embodiment 2:

[0035] Based on Example 1, on the basis of Example 1, a transmission belt 703 is rotatably connected between the corresponding two limit grooves 7021. Through the cooperation of the transmission belt 703, when the furnace body is pressed downward, the transmission belt 703 can be pressed to bend downward and deform, and fit together with the bottom of the furnace body to form a support, thereby reducing the force on the transmission rings 7 on both sides and improving the service life.

[0036] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0037] The above is a detailed description of an embodiment of the utility model, but the content is only a preferred embodiment of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. A rotating mechanism for cleaning a furnace tube, comprising a main substrate (1) and a side substrate (2), characterized in that: The main base plate (1) and the side base plate (2) are both rotatably connected with a driving shaft (5), and the ends of the driving shaft (5) are both inserted with a transmission shaft (6), and the outer side of the transmission shaft (6) is fixedly sleeved with a plurality of transmission collars (7) for driving the furnace tube to rotate; A driving mechanism is provided above the main substrate (1) for driving the two driving shafts (5) to operate; A driving socket (501) is provided at the end of the driving shaft (5), a driving plug rod (602) adapted to the driving socket (501) is fixed at the end of the transmission shaft (6), a transmission socket (603) is provided at the end of the transmission shaft (6) away from the transmission plug rod (602), and the outer side of the transmission shaft (6) is rotatably connected to a limit block (601).

2. The rotary mechanism based on furnace tube cleaning according to claim 1, characterized in that: A transmission ring piece (702) is fixedly sleeved on the outer sides of the plurality of transmission rings (7), and a plurality of limit grooves (7021) are provided on the outer sides of the transmission ring pieces (702), and a transmission belt (703) is rotatably connected between two corresponding limit grooves (7021).

3. The rotary mechanism based on furnace tube cleaning according to claim 1, characterized in that: Anti-skid pads (701) are fixedly mounted on the inner sides of the plurality of transmission collars (7).

4. The rotary mechanism based on furnace tube cleaning according to claim 1, characterized in that: The main base plate (1) and the side base plate (2) are both provided with adjustment grooves (9), and adjustment ring sleeves (502) are slidably installed inside the adjustment grooves (9); the drive shafts (5) are rotatably connected to the corresponding adjustment ring sleeves (502), and the outer sides of the adjustment ring sleeves (502) are rotatably connected to mutually meshing positioning bolts (503); the main base plate (1) and the side base plate (2) are both provided with sliding grooves (10), and the positioning bolts (503) are slidably connected to the corresponding sliding grooves (10).

5. The rotary mechanism based on furnace tube cleaning according to claim 1, characterized in that: The driving mechanism comprises a driving plate frame (3), wherein the driving plate frame (3) is fixed to the side of the main base plate (1), a driving motor (301) is fixed to the top surface of the driving plate frame (3), and a transmission chain (8) is rotatably connected between the output end of the driving motor (301) and the ends of two driving shafts (5).

6. The rotary mechanism based on furnace tube cleaning according to claim 5, characterized in that: A side frame (4) is fixed to the outer side of the driving plate frame (3), and a rectangular groove (401) is opened inside the side frame (4), a locking block (402) is slidably installed inside the rectangular groove (401), and the end of the locking block (402) is rotatably connected with a locking bolt (4021) that meshes with each other, and a transmission rod (4022) is rotatably installed on the other end of the locking block (402), and a transmission sprocket (4023) is rotatably sleeved on the end of the transmission rod (4022), and the transmission sprocket (4023) and the transmission chain (8) are meshed with each other.

Images