Special gas supply monitoring system

Abstract

The utility model belongs to the technical field of special gas supply, and relates to a special gas supply monitoring system, which comprises a gas holder, a plurality of gas cylinders for storing special gas are arranged in the gas holder, and the gas cylinders are connected in parallel; the purification device is connected with a gas cylinder in the gas holder; the purification device is connected with external equipment through the pressure regulating device; the gas sensors are distributed in a workshop; and the gas monitoring box is respectively connected with the gas cabinet, the purification device, the pressure regulating device and the gas sensor and is used for feeding back and monitoring gas supply management.

Description

Technical Field

[0001] The utility model belongs to the technical field of special gas supply and relates to a special gas supply monitoring system. Background Art

[0002] In the wafer production process, special gases (such as nitrogen, hydrogen, argon, etc.) play an important role. These special gases have the following functions in the wafer production process:

[0003] 1. Cleaning and protection: Special gases can be used to clean the wafer surface and protect the wafer from contamination. For example, nitrogen can be used to remove dust and impurities on the wafer surface to maintain the cleanliness of the wafer. Hydrogen can be used to reduce the surface oxide layer and reduce oxidation reactions.

[0004] 2. Atmosphere control: Special gases can be used to control the atmosphere during wafer production. For example, nitrogen can be used to create an inert atmosphere to prevent oxidation of the wafer surface. Hydrogen can be used to control the hydrogen concentration in the hydrogen atmosphere to reduce the oxidation reaction rate.

[0005] 3. Thermal management: Special gases can be used for thermal management to regulate the temperature of the wafer. For example, argon can be used to quickly cool the wafer to prevent overheating and thermal stress; hydrogen can be used for annealing during the heat treatment process to improve the quality and performance of the wafer.

[0006] 4. Transport and carrier: Special gases can also be used as transport media or carriers to transport materials or perform specific chemical reactions during wafer production. For example, in the vapor phase epitaxy (CVD) process, special gases such as silicon dioxide and ammonia can be used to deposit thin films; hydrogen can be used as a hydrogen carrier.

[0007] However, during the production process, how to monitor the supply of special gases to ensure the safety of producers has become a difficult problem that needs to be solved urgently. Utility Model Content

[0008] The purpose of the utility model is to provide a special gas supply monitoring system to improve the safety of gas supply monitoring by monitoring multiple data in view of the deficiencies in the prior art.

[0009] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0010] A special gas supply monitoring system, comprising:

[0011] A gas cabinet, wherein a plurality of gas cylinders storing special gases are arranged in the gas cabinet, and the gas cylinders are connected in parallel;

[0012] A purification device, wherein the purification device is connected to a gas cylinder in a gas cabinet;

[0013] A pressure regulating device, through which the purification device is connected to external equipment;

[0014] Gas sensors, wherein the gas sensors are distributed in the workshop;

[0015] A gas monitoring box is connected to a gas cabinet, a purification device, a pressure regulating device and a gas sensor respectively for gas supply management feedback and monitoring.

[0016] Furthermore, the gas cylinder of the gas cabinet is connected to the left pipeline and the right pipeline through a reversing valve, and the left pipeline and the right pipeline are respectively provided with a main valve, a pressure gauge and an exhaust valve, and the pressure gauge is connected to the gas monitoring box.

[0017] Furthermore, a dew point meter and a purification unit are provided in the purification device. The dew point meter is located between the purification unit and the gas cabinet, and the dew point meter is connected to the gas monitoring box.

[0018] Furthermore, the gas cabinet includes a hydrogen gas cabinet, an argon gas cabinet and a nitrogen gas cabinet.

[0019] Furthermore, a hydrogen concentration sensor is provided in the hydrogen gas cabinet.

[0020] Furthermore, the gas sensor includes a hydrogen sensor, an argon sensor and a nitrogen sensor.

[0021] By applying the technical solution of the utility model, gas sensors are distributed in the workshop to monitor parameters such as the concentration and pressure of special gases. These sensors can detect the gas supply status in real time to ensure the stability and reliability of the gas supply. The special gas supply monitoring system can set a threshold value. Once an abnormal situation of the special gas is detected, such as the concentration exceeds the safety range or the pressure is abnormal, the system will issue a warning or alarm signal. This can remind the operator to take timely measures to avoid potential safety risks. The dew point meter and purification unit in the purification device can purify and process the special gas. The dew point meter is used to detect the water vapor content in the gas to ensure the dryness of the gas. The purification unit can remove impurities and pollutants in the gas to improve the purity of the gas. The special gas supply monitoring system can record and store data in the gas supply process, such as concentration, pressure, temperature, etc. These data can be used for subsequent analysis and optimization to help improve the efficiency and stability of the gas supply process.

[0022] Other features and advantages of the utility model will be described in the following description, and partly become apparent from the description, or understood by implementing the utility model. The purpose and other advantages of the utility model can be realized and obtained by the structures particularly pointed out in the written description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The present invention is described in detail below in conjunction with the accompanying drawings to make the above advantages of the present invention more clear.

[0024] Figure 1 It is a schematic diagram of a special gas supply monitoring system of the utility model. DETAILED DESCRIPTION

[0025] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0026] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship described in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0028] In the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] Reference Figure 1 As shown, a special gas supply monitoring system comprises:

[0030] A gas cabinet is provided with a plurality of gas cylinders 100 for storing special gases, and the gas cylinders 100 are connected in parallel; these gas cylinders 100 store special gases and can be supplied through the system.

[0031] Purification device 200, the purification device 200 is connected to the gas cylinder 100 in the gas cabinet; the purification device 200 is connected to the gas cylinder 100 in the gas cabinet, and is mainly used to purify and process special gases. It can remove impurities and pollutants in the gas and improve the purity and quality of the gas.

[0032] The pressure regulating device 300, the purification device 200 is connected to external equipment through the pressure regulating device 300; the pressure regulating device 300 can adjust the pressure of special gas as needed to ensure the stability and accuracy of gas supply.

[0033] Gas sensors 400 are distributed in the workshops and are used to monitor parameters such as concentration and pressure of special gases. These sensors can monitor the gas supply status in real time to ensure the safety and stability of gas supply.

[0034] The gas monitoring box 500 is respectively connected to the gas cabinet, the purification device 200, the pressure regulating device 300 and the gas sensor 400 for gas supply management feedback and monitoring.

[0035] Through the monitoring and feedback of the gas sensor 400 and the monitoring box, the gas supply status of the special gas can be understood in real time, potential safety issues can be discovered and dealt with in a timely manner, and the safety of the gas supply can be ensured. Through the adjustment of the pressure regulating device 300, the stability and accuracy of the special gas supply can be maintained, and a stable gas pressure and flow rate can be provided to meet the gas demand of the production process. The use of the purification device 200 can remove impurities and pollutants in the special gas, improve the purity and quality of the gas, and ensure the purity of the gas supply. Through the linkage of the gas sensor 400 and the monitoring box, the concentration, pressure and other parameters of the special gas can be monitored in real time, gas supply anomalies can be discovered in a timely manner, and corresponding measures can be taken to ensure the stability and reliability of the gas supply.

[0036] In this implementation case, the gas cylinder 100 of the gas cabinet is connected to the left pipeline and the right pipeline through the reversing valve 110, and the left pipeline and the right pipeline are respectively provided with a main valve 120, a pressure gauge 130 and an exhaust valve 140, and the pressure gauge 130 is connected to the gas monitoring box 500. The two main valves 120 can provide backup and redundancy functions. If one of the main valves 120 fails or needs maintenance, the other main valve 120 can continue to operate normally to ensure the continuity of the gas supply. This can avoid the entire gas supply system from stopping operation due to a single failure, affecting production and process. The setting of the main valve 120 can facilitate the control and regulation of the gas supply. By controlling the switch of the main valve 120, the gas supply can be opened and closed to ensure the controllability of the gas supply.

[0037] The design of the pressure gauge 130 can monitor the gas pressure in real time and provide an intuitive display of the gas supply pressure, so that the operator can understand the pressure state of the gas supply at any time and master the stability of the gas supply process.

[0038] The exhaust valve 140 can be provided to conveniently discharge the gas in the pipeline. When it is necessary to stop the gas supply or discharge the residual gas in the pipeline, the exhaust valve 140 can be opened to ensure the safe handling of the gas in the pipeline.

[0039] The connection between the pressure gauge 130 and the gas monitoring box 500 enables the gas supply pressure data to be transmitted to the monitoring system in real time. The monitoring system can monitor and record the gas supply process in real time, and provide feedback and monitoring functions for gas supply management.

[0040] In this embodiment, a dew point meter 210 and a purification unit 220 are provided in the purification device 200 . The dew point meter 210 is located between the purification unit 220 and the gas cabinet. The dew point meter 210 is connected to the gas monitoring box 500 .

[0041] The dew point meter 210 in the purification device 200 is located between the purification unit 220 and the gas cabinet, and is used to measure the water vapor content in the special gas, that is, the dew point temperature. By measuring the dew point temperature in the gas, the humidity level of the gas can be determined to ensure the dryness of the gas. The connection between the dew point meter 210 and the gas monitoring box 500 can transmit the measurement data of the dew point temperature to the monitoring system. The monitoring system can monitor and record the humidity changes of the gas in real time, and provide feedback and monitoring functions for humidity management. The purification unit 220 is designed to purify special gases and remove impurities and pollutants therein. Through the processing of the purification unit 220, the purity and quality of the gas can be improved to ensure the purity of the gas supply.

[0042] By setting up the dew point meter 210 and connecting it to the gas monitoring box 500, the humidity of special gases can be monitored and managed. The humidity level of the gas can be timely understood to ensure the dryness and humidity control of the gas supply. The connection between the dew point meter 210 and the gas monitoring box 500 can transmit humidity data to the monitoring system in real time, realizing data recording and analysis of humidity changes. These data can be used for optimization of humidity management and process control.

[0043] The purification unit 220 is designed to purify the special gas and remove impurities and pollutants therein. Through the treatment of the purification unit 220, the purity and quality of the gas are improved to ensure the purity of the gas supply. By monitoring and purifying the humidity in the special gas, the adverse effects of humidity on the wafer production process can be avoided, ensuring the safety and stability of the gas supply.

[0044] In this implementation case, the gas cabinet includes a hydrogen gas cabinet, an argon gas cabinet and a nitrogen gas cabinet.

[0045] Storing different special gases in their own gas cabinets avoids mixing and cross contamination between gases. This ensures the purity and quality of each gas. Through independent gas cabinets and pipeline systems, the supply of each gas can be precisely controlled and adjusted. This can meet the precise requirements of gas supply for different processes and needs. Through independent gas cabinets and pipeline systems, the supply of each gas can be precisely controlled and adjusted. This can meet the precise requirements of gas supply for different processes and needs.

[0046] In this implementation case, a hydrogen concentration sensor is provided in the hydrogen gas cabinet. The hydrogen concentration sensor is installed inside the hydrogen gas cabinet, and by detecting the concentration of hydrogen, the concentration level of hydrogen can be monitored in real time. If the hydrogen concentration exceeds the safety threshold, the sensor will sound an alarm or trigger safety measures to protect the safety of operators and equipment. Through the setting of the hydrogen concentration sensor, the hydrogen concentration inside the hydrogen gas cabinet can be monitored in real time to ensure that the hydrogen concentration is within a safe range. This helps prevent hydrogen leaks, accumulation of excessive hydrogen, and prevent the occurrence of safety problems such as fire. The hydrogen concentration sensor can send out an alarm signal in time. Once the hydrogen concentration exceeds the set safety threshold, the operator can immediately take corresponding emergency measures to ensure the safety of personnel and equipment. By monitoring the hydrogen concentration, operators can be provided with real-time understanding of the hydrogen environment and remind them to take necessary protective measures to reduce potential risks.

[0047] In this embodiment, the gas sensor 400 includes a hydrogen sensor, an argon sensor, and a nitrogen sensor. The sensor can monitor the concentration and pressure of a specific gas in the gas. Once the safety threshold is exceeded, an alarm can be issued or safety measures can be triggered to ensure the safety of operators and equipment.

[0048] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A special gas supply monitoring system, characterized in that: include: A gas cabinet, wherein a plurality of gas cylinders storing special gases are arranged in the gas cabinet, and the gas cylinders are connected in parallel; A purification device, wherein the purification device is connected to a gas cylinder in a gas cabinet; A pressure regulating device, through which the purification device is connected to external equipment; Gas sensors, wherein the gas sensors are distributed in the workshop; A gas monitoring box is connected to a gas cabinet, a purification device, a pressure regulating device and a gas sensor respectively for gas supply management feedback and monitoring.

2. The special gas supply monitoring system according to claim 1, characterized in that: The gas cylinder of the gas cabinet is connected to a left pipeline and a right pipeline through a reversing valve. A main valve, a pressure gauge and an exhaust valve are respectively arranged on the left pipeline and the right pipeline. The pressure gauge is connected to a gas monitoring box.

3. The special gas supply monitoring system according to claim 1, characterized in that: A dew point meter and a purification unit are provided in the purification device. The dew point meter is located between the purification unit and the gas cabinet, and the dew point meter is connected to the gas monitoring box.

4. The special gas supply monitoring system according to claim 1, characterized in that: The gas cabinets include a hydrogen gas cabinet, an argon gas cabinet and a nitrogen gas cabinet.

5. The special gas supply monitoring system according to claim 4, characterized in that: A hydrogen concentration sensor is arranged in the hydrogen gas cabinet.

6. The special gas supply monitoring system according to claim 1, characterized in that: The gas sensors include a hydrogen sensor, an argon sensor and a nitrogen sensor.

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