In-situ electrochemical sample stage of scanning electron microscope

Abstract

The utility model provides a scanning electron microscope in-situ electrochemical sample stage, which comprises a switching base, a turnover chip carrier, a flange and an electrical transmission line, the top of the switching base is provided with a carrier mounting groove, and the bottom of the switching base is detachably provided with a positioning rod. A flexible circuit board for electrical connection and transmission with the turnover chip carrier is arranged in the switching base, an external interface is arranged on the flange, and the flange is connected with the flexible circuit board of the switching base through the electrical transmission line; and the turnover chip carrying platform is detachably assembled in the carrying platform mounting groove of the switching base and is connected with the flexible circuit board. The sample table is higher in universality.

Description

Technical Field

[0001] The utility model relates to the technical field of scanning electron microscope accessories, in particular to an in-situ electrochemical sample stage for a scanning electron microscope. Background Art

[0002] As a widely used material analysis and characterization equipment, scanning electron microscope can directly obtain information such as material morphology, element valence, and element distribution at the microscopic scale. It has become a very important and effective tool for material characterization and is widely used in materials, biology, chemistry, physics and other fields. With the development of in-situ testing technology, external fields such as heat, electricity, light, and force have been introduced into scanning electron microscopes to monitor the microstructural changes that occur during sample reactions in real time, combining the evolution of material structure and performance. As a new type of characterization method, scanning electron microscope in-situ electrochemical observation technology can dynamically monitor and record information such as microstructural changes, phase changes, and surface / interface structure and composition evolution of electrodes and electrolytes by introducing electrical signals to samples in the scanning electron microscope, so as to explore problems and explore mechanisms. Compared with traditional non-in-situ characterization methods, it has many advantages.

[0003] At present, scanning electron microscopes are equipped with a sample stage. However, the current sample stage can generally only be adapted to one type of scanning electron microscope and is not very versatile. Utility Model Content

[0004] Therefore, in order to solve the above problems, the utility model provides an in-situ electrochemical sample stage for a scanning electron microscope.

[0005] To achieve the above purpose, the technical solution provided by the utility model is as follows:

[0006] A scanning electron microscope in-situ electrochemical sample stage comprises an adapter base, a flip chip carrier, a flange and an electrical transmission line, wherein a carrier mounting groove is provided on the top of the adapter base, a positioning rod is detachably mounted on the bottom of the adapter base, a flexible circuit board for electrically connecting and transmitting with the flip chip carrier is arranged in the adapter base, the flange is connected to the flexible circuit board of the adapter base through the electrical transmission line and is provided with an external interface; the flip chip carrier is detachably mounted in the carrier mounting groove of the adapter base and is connected to the flexible circuit board.

[0007] Furthermore, a positioning rod mounting hole is provided at the bottom of the adapter base, a screw hole penetrating to the positioning rod mounting hole is opened on the side of the adapter base, a top screw is installed in the screw hole, the positioning rod is inserted into the positioning rod mounting hole and is tightened and fixed by the top screw.

[0008] Furthermore, the flip-type chip carrier includes a main body bracket and a pressure cover, the main body bracket has a circuit board slot and a chip slot, the circuit board is installed in the circuit board slot, the circuit board is connected to the flexible circuit board, and a first observation window is opened at the bottom of the chip slot; the pressure cover is detachably covered on the main body bracket, and the pressure cover is provided with electrode contact pins and a second observation window, the second observation window corresponds to the first observation window, and the electrode contact pins are used to connect the circuit board and the chip installed on the chip slot.

[0009] Furthermore, the chip slot is a square slot with a length of 8-16 mm and a width of 4-8 mm.

[0010] Furthermore, a hollow area extending to the middle position of the carrier mounting groove is provided on the side of the adapter base.

[0011] Furthermore, two carrier mounting grooves are provided on the adapter base, and the two carrier mounting grooves are distributed on the left and right, and the hollow areas are opened on the left and right sides of the adapter base, thereby forming an "I"-shaped structure.

[0012] Furthermore, the adapter base is provided with an interface for connecting the flexible circuit board, and the flange is also provided with an internal interface. One end of the electrical transmission line is connected to the interface of the adapter base, and the other end is connected to the internal interface on the flange.

[0013] Furthermore, the flange is also provided with a plurality of threaded holes for fixing on the door of the scanning electron microscope, and a sealing ring for sealingly connecting with the door of the scanning electron microscope.

[0014] Furthermore, the flange is also provided with a liquid delivery interface for connecting to an external liquid supply device, the flip-type chip carrier is provided with a liquid delivery pipeline, and a liquid inlet and a liquid outlet are provided in the chip slot, and the liquid inlet and the liquid outlet in the chip slot are connected to the liquid delivery interface on the flange through the liquid delivery pipeline.

[0015] The technical solution provided by the utility model has the following beneficial effects:

[0016] 1. The sample stage is assembled on the scanning electron microscope through a positioning rod. The positioning rod is detachable. By replacing the positioning rods with different lengths or diameters, it can be adapted to scanning electron microscopes of different models, making the sample stage more versatile.

[0017] 2. The flip chip carrier can be detachably assembled in the carrier mounting slot of the adapter base. After the flip chip carrier is disassembled and flipped, the reaction system can be observed from both the front and back perspectives, expanding the observation perspective and information of the reaction system. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The figure is a three-dimensional schematic diagram of a part of the structure of the in-situ electrochemical sample stage of the scanning electron microscope in the embodiment;

[0019] Figure 2 Shown Figure 1 A three-dimensional schematic diagram of the structure shown at another angle;

[0020] Figure 3 Shown Figure 1 a side view of the structure shown;

[0021] Figure 4 The figure shows a top view of the adapter base of the in-situ electrochemical sample stage of the scanning electron microscope in the embodiment;

[0022] Figure 5 The figure shows a schematic diagram of the structure of the hidden flange in the in-situ electrochemical sample stage of the scanning electron microscope in the embodiment;

[0023] Figure 6 The figure shows the structure of the main support of the flip chip carrier in the embodiment. Figure 1 ;

[0024] Figure 7 The figure shows the structure of the main support of the flip chip carrier in the embodiment. Figure 2 ;

[0025] Figure 8 The figure is a schematic structural diagram of a cover of a flip chip carrier in an embodiment;

[0026] Fig. 9 The structure of the flange in the embodiment is shown as follows Figure 1 ;

[0027] Fig.10 The structure of the flange in the embodiment is shown as follows Figure 2 . DETAILED DESCRIPTION

[0028] To further illustrate the various embodiments, the present invention provides drawings. These drawings are part of the disclosure of the present invention, which are mainly used to illustrate the embodiments and can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, a person of ordinary skill in the art should be able to understand other possible implementations and advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.

[0029] The utility model is now further described in conjunction with the accompanying drawings and specific implementation methods.

[0030] Embodiment 1

[0031] Reference Figures 1 to 10As shown, a scanning electron microscope in-situ electrochemical sample stage provided in this embodiment includes a transfer base 10, a flip chip carrier 20, a flange 50 and an electrical transmission line 60. The top of the transfer base 10 is provided with a carrier mounting groove 11, and the bottom of the transfer base 10 is detachably equipped with a positioning rod 40. The transfer base 10 is provided with a flexible circuit board (not shown in the figure) for electrical connection and transmission with the flip chip carrier 20. The flange 50 is connected to the flexible circuit board of the transfer base through the electrical transmission line 60 and is provided with an external interface 51; specifically, the external interface 51 adopts an aviation plug interface. The flip chip carrier 20 is detachably installed in the carrier mounting groove 11 of the transfer base 10 and connected to the flexible circuit board.

[0032] When in use, the chip carrying the sample is first placed on the flip chip stage 20, and then the flip chip stage 20 is installed in the stage installation groove 11 of the adapter base 10. After that, the adapter base 10 is installed on the electron microscope base through the positioning rod 40, and assembled on the electron microscope through the flange 50 to achieve electrical connection. In this way, the sample stage is installed in the scanning electron microscope, and then the electrochemical reaction of the sample is observed through the scanning electron microscope.

[0033] The above-mentioned scanning electron microscope in-situ electrochemical sample stage is adopted, and the positioning rod 40 is detachably arranged. By replacing the positioning rod 40 of different lengths or diameters, it is possible to adapt to different types of scanning electron microscopes, making the sample stage more versatile. At the same time, the flip chip carrier 20 is detachably assembled in the carrier mounting groove 11 of the adapter base 10. After the flip chip carrier 20 is disassembled and flipped, the reaction system can be observed from two perspectives, the front and the back, respectively, expanding the observation perspective and information of the reaction system.

[0034] Specifically, a preferred installation method of the positioning rod 40 is as follows: a positioning rod installation hole is provided at the bottom of the adapter base 10, a screw hole 13 penetrating to the positioning rod installation hole is provided on the side of the adapter base 10, a top screw is installed in the screw hole 13, and the positioning rod 40 is inserted into the positioning rod installation hole and fixed by the top screw. When disassembly is required, the positioning rod 40 can be disassembled by loosening the top screw so that the positioning rod loses the top screw; the operation is simple. Of course, in other embodiments, the detachable assembly method of the positioning rod 40 is not limited to this.

[0035] After the flip chip carrier 20 is installed in the carrier installation groove 11, it is fixed by bolts. When it needs to be disassembled, just unscrew the bolts, which is easy to operate. Of course, in other embodiments, other detachable fixed connection methods can also be used.

[0036] The flip chip carrier 20 includes a main support 21 and a pressure cover 22. The main support 21 has a circuit board slot 212 and a chip slot 211. The circuit board slot 212 is equipped with a circuit board, and the circuit board is connected to the flexible circuit board. The bottom of the chip slot 211 is provided with a first observation window 213. The pressure cover 22 is detachably covered on the main support 21. The pressure cover 22 is provided with an electrode contact pin 222 and a second observation window 221. The second observation window 221 corresponds to the first observation window 213. The electrode contact pin 222 is used to connect the circuit board and the chip installed on the chip slot 211. In this way, the chip is firmly fixed on the flip chip carrier 20, ensuring the safety of chip use and reducing the risk of contamination of the electron microscope due to accidental chip drop or damage.

[0037] The chip slot 211 is a square slot with a length of 8-16 mm and a width of 4-8 mm, which can be well matched to the installation of chips of different sizes. Of course, in other embodiments, the shape and size of the chip slot 211 are not limited thereto.

[0038] The side of the transfer base 10 is also provided with a hollow area 12 extending to the middle of the stage mounting groove 11. By giving way to the hollow area 12, it is convenient to disassemble and flip the flip chip stage 20. Specifically, the transfer base 10 is provided with two stage mounting grooves 11, which are distributed on the left and right, and the hollow area 12 is provided on both the left and right sides of the transfer base 10, thereby forming an "I"-shaped structure; the convenient installation of the two flip chip stages 20 on the left and right is realized.

[0039] The adapter base 10 is provided with an interface for connecting the flexible circuit board, and the flange 50 is also provided with an internal interface 52. One end of the electrical transmission line 60 is connected to the interface of the adapter base 10, and the other end is connected to the internal interface 52 on the flange 50, so as to achieve a detachable connection. Specifically, the interface and / or the internal interface 52 adopts a standard interface in the prior art, such as a USB interface.

[0040] Specifically, the external interface 51 and the internal interface 52 of the flange 50 use an internal flange circuit board for circuit connection and signal conversion, which is in the prior art and will not be described in detail here.

[0041] The flange 50 is also provided with a plurality of threaded holes 53 for fixing on the door of the scanning electron microscope, and a sealing ring for sealingly connecting with the door of the scanning electron microscope. When the flange 50 is installed, the sealing ring is sealed on the door of the scanning electron microscope, and the bolts on the door are screwed into the threaded holes 53 of the flange 50 to achieve the assembly of the fixed flange 50 and the door. The assembly structure is simple and the operation is easy.

[0042] Embodiment 2

[0043] The present embodiment provides a scanning electron microscope in-situ electrochemical sample stage, which has a substantially similar structure to that of the first embodiment, except that: on the basis of the first embodiment, in the present embodiment, the flange 50 is further provided with a liquid delivery interface for connecting to an external liquid supply device, the flip chip carrier 20 is provided with a liquid delivery pipeline, the chip slot 211 is provided with a liquid inlet and a liquid outlet, and the liquid inlet and the liquid outlet in the chip slot 211 are connected to the liquid delivery interface on the flange 50 through a liquid delivery pipeline. A set of in-situ electrochemical sample stages that can be fed with dynamic liquids in real time can be further formed.

[0044] Although the present invention has been specifically demonstrated and described in conjunction with the preferred embodiments, those skilled in the art should understand that various changes may be made to the present invention in form and detail without departing from the spirit and scope of the present invention as defined in the appended claims, all of which are within the scope of protection of the present invention.

Claims

1. An in-situ electrochemical sample stage for a scanning electron microscope, comprising a transfer base, a flip chip carrier, a flange and an electrical transmission line, characterized in that: A carrier mounting groove is provided on the top of the adapter base, a positioning rod is detachably installed on the bottom of the adapter base, a flexible circuit board for electrically connecting and transmitting with the flip-type chip carrier is arranged inside the adapter base, the flange is connected to the flexible circuit board of the adapter base through the electrical transmission line and is provided with an external interface; the flip-type chip carrier is detachably installed in the carrier mounting groove of the adapter base and is connected to the flexible circuit board.

2. The in-situ electrochemical sample stage for a scanning electron microscope according to claim 1, characterized in that: A positioning rod mounting hole is provided at the bottom of the adapter base, a screw hole penetrating to the positioning rod mounting hole is opened on the side of the adapter base, a top screw is installed in the screw hole, the positioning rod is inserted into the positioning rod mounting hole and is tightened and fixed by the top screw.

3. The in-situ electrochemical sample stage for a scanning electron microscope according to claim 1, characterized in that: The flip-type chip carrier includes a main body bracket and a pressure cover, the main body bracket has a circuit board slot and a chip slot, the circuit board is installed in the circuit board slot, the circuit board is connected to the flexible circuit board, and a first observation window is opened at the bottom of the chip slot; the pressure cover is detachably covered on the main body bracket, and an electrode contact pin and a second observation window are provided on the pressure cover, the second observation window corresponds to the first observation window, and the electrode contact pin is used to connect the circuit board and the chip installed on the chip slot.

4. The in-situ electrochemical sample stage for a scanning electron microscope according to claim 3, characterized in that: The chip slot is a square slot with a length of 8-16 mm and a width of 4-8 mm.

5. The in-situ electrochemical sample stage for a scanning electron microscope according to claim 1, characterized in that: The side of the adapter base is also provided with a hollow area extending to the middle position of the carrier mounting groove.

6. The in-situ electrochemical sample stage for a scanning electron microscope according to claim 5, characterized in that: The adapter base is provided with two carrier mounting grooves, which are distributed on the left and right sides, and the hollow areas are opened on the left and right sides of the adapter base, thereby forming an "I"-shaped structure.

7. The in-situ electrochemical sample stage for a scanning electron microscope according to claim 1, characterized in that: The adapter base is provided with an interface for connecting the flexible circuit board, and the flange is also provided with an inner interface. One end of the electrical transmission line is connected to the interface of the adapter base, and the other end is connected to the inner interface on the flange.

8. The in-situ electrochemical sample stage for a scanning electron microscope according to claim 1, characterized in that: The flange is also provided with a plurality of threaded holes for fixing on the door of the scanning electron microscope, and a sealing ring for sealingly connecting with the door of the scanning electron microscope.

9. The in-situ electrochemical sample stage for a scanning electron microscope according to claim 3, characterized in that: The flange is also provided with a liquid delivery interface for connecting to an external liquid supply device, the flip-type chip carrier is provided with a liquid delivery pipeline, and a liquid inlet and a liquid outlet are provided in the chip slot. The liquid inlet and the liquid outlet in the chip slot are connected to the liquid delivery interface on the flange through a liquid delivery pipeline.

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