Edge breaking equipment

Abstract

The utility model discloses an edge breaking device which comprises a device body, a first mechanical arm, an edge breaking assembly and a second mechanical arm, the first mechanical arm comprises a first mechanical arm used for adjusting poses, and the first mechanical arm is arranged on the device body; the edge breaking assembly comprises a supporting structure and an edge breaking cutter, the supporting structure is installed at the tail end of the first mechanical arm, and the edge breaking cutter is installed on the supporting structure; the second manipulator comprises a second mechanical arm used for adjusting the posture and a tray, the second mechanical arm is installed on the equipment body, and the tray is installed at the tail end of the second mechanical arm. According to the embodiment of the utility model, the second mechanical arm drives the tray to convey the wafer to the position below the edge-breaking cutter, at the moment, the edge-breaking cutter is driven to slide on the surface of the wafer along with the pose adjustment of the first mechanical arm so as to draw an edge-breaking track, and then the edge-breaking cutter applies force to redundant positions of the wafer so as to break off redundant waste materials. And manual edge breaking is replaced by an automatic mode, so that the working hours of edge breaking work are reduced, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor substrate material manufacturing, in particular to an edge bending device. Background Art

[0002] Indium phosphide substrates have application markets in many fields, including high-frequency and high-power device manufacturing, optical fiber communications, wireless transmission, radio astronomy and other RF device fields. RF devices made of Indium phosphide substrates have shown excellent performance in application scenarios such as satellites and radars, especially in the RF front end of radar and communication systems, analog / mixed signal wide-bandwidth circuits, and are highly competitive, suitable for applications such as high-speed data processing and high-precision wide-bandwidth A / D conversion.

[0003] However, in the current indium phosphide slicing process, the waxing step in the polishing process is time-consuming and labor-intensive, and the edge bending work of the indium phosphide slices after cutting the circle mainly relies on manual labor. Employees need to use diamond knives to manually break irregular wafers into squares, which is time-consuming and inefficient. Utility Model Content

[0004] The technical problem to be solved by the utility model is that the existing edge breaking work requires manual use of a diamond knife to manually break irregular wafers into squares, which is time-consuming and inefficient.

[0005] In order to solve the above technical problems, the utility model provides an edge bending device, comprising:

[0006] Equipment body;

[0007] A first manipulator, comprising a first manipulator arm for adjusting posture, wherein the first manipulator arm is arranged on the device body;

[0008] an edge breaking assembly, comprising a support structure and an edge breaking tool, wherein the support structure is mounted at the end of the first robot arm, and the edge breaking tool is mounted on the support structure; and

[0009] The second robot comprises a second robot arm for adjusting posture and a tray. The second robot arm is installed on the equipment body, and the tray is installed at the end of the second robot arm.

[0010] In some embodiments, the support structure includes a first bracket, two first driving members, and two second brackets slidably installed at both ends of the first bracket, the first bracket is installed at the end of the first robotic arm, the first driving member is installed on the first bracket, the first bracket has a first slide rail, the second bracket is slidably connected to the first slide rail of the first bracket, the output shaft of each first driving member is connected to the corresponding second bracket to drive the second bracket to slide along the first slide rail, the two second brackets are arranged at intervals, and the edge bending tool is installed on one of the second brackets, and the tool head of the edge bending tool faces the other second bracket.

[0011] In some embodiments, the device body has a sliding slot;

[0012] The first manipulator further includes a second driving member, a second slide rail, a first slider, a third driving member and a third slide rail, the first manipulator arm is mounted on the second slide rail, and the output shaft of the second driving member is connected to the first manipulator arm to drive the first manipulator arm to slide on the second slide rail;

[0013] The second slide rail is mounted on the first slider, the first slider is mounted on the third slide rail, and the output shaft of the third driving member is connected to the first slider to drive the first slider to slide on the third slide rail.

[0014] In some embodiments, the sliding groove is cross-shaped.

[0015] In some embodiments, the first robotic arm includes a first base, a fourth driving member, a fourth slide rail, a second slider and a first support arm, the first base has a mounting groove, the fourth slide rail is installed on the groove wall of the mounting groove, the second slider is slidably installed on the fourth slide rail, the first support arm is installed on the second slider, the fourth driving member is installed in the mounting groove, and the output shaft of the fourth driving member is connected to the second slider for driving the second slider to slide relative to the fourth slide rail to drive the first support arm to extend or retract the mounting groove, and the edge bending assembly is installed at the end of the first support arm.

[0016] In some embodiments, the first robotic arm further includes a second support arm, the second support arm is connected to the first support arm, and the second support arm is vertically arranged to the first support arm, and the edge bending assembly is installed at the end of the second support arm.

[0017] In some embodiments, the second robotic arm includes a second base, a third support arm, a fifth drive member, a fourth support arm and a sixth drive member, the second base is mounted on the device body, the fifth drive member is mounted on the second base, and the third support arm is rotatably connected to the second base via the fifth drive member, the sixth drive member is mounted on the third support arm, and the fourth support arm is rotatably connected to the third support arm via the sixth drive member, and the tray is mounted at the end of the fourth support arm.

[0018] In some embodiments, the second robotic arm further includes a clamping arm and a seventh driving member, the seventh driving member and the clamping arm are mounted on the fourth support arm, and the output shaft of the seventh driving member is connected to the clamping arm to drive the clamping arm to open to release the pallet or clamp and clamp the pallet.

[0019] In some embodiments, the clamping arm includes a mounting seat and two clamping arms movably connected to the mounting seat, the mounting seat is installed at the end of the fourth support arm, and the seventh driving member passes through the mounting seat and is connected to the two clamping arms to drive the two clamping arms to move relatively closer or farther away.

[0020] In some embodiments, the tray has a discharge hole for waste to pass through.

[0021] Compared with the prior art, the edge breaking device of the utility model has the following beneficial effects:

[0022] The second robot arm of the utility model embodiment drives the tray to transfer the chip to the bottom of the edge breaking tool. At this time, as the position of the first robot is adjusted, the edge breaking tool is driven to slide on the surface of the chip to draw an edge breaking trajectory. Then, the edge breaking tool applies force to the excess position of the chip to break off the excess waste to complete the edge breaking work. This embodiment uses an automated method to replace manual edge breaking, which reduces the working hours of the edge breaking work and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of the edge breaking device provided by an embodiment of the utility model;

[0024] Figure 2 It is a top view of the edge breaking device provided by an embodiment of the utility model;

[0025] Figure 3 It is a side view of the edge breaking device provided by an embodiment of the utility model;

[0026] Figure 4 It is a structural schematic diagram of a first manipulator and an edge breaking assembly provided in an embodiment of the utility model;

[0027] Figure 5 It is a structural schematic diagram of a second manipulator provided in an embodiment of the utility model;

[0028] In the figure, 1. equipment body; 11. sliding groove; 2. first manipulator; 21. first manipulator arm; 211. first base; 2111. mounting groove; 212. first support arm; 213. second support arm; 22. second slide rail; 23. third slide rail; 3. bend edge assembly; 31. supporting structure; 311. first bracket; 312. two second brackets; 32. bend edge tool; 4. second manipulator; 41. second manipulator arm; 411. second base; 412. third support arm; 413. fourth support arm; 414. clamping arm; 4141. clamping arm; 42. tray. DETAILED DESCRIPTION

[0029] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0030] like Figures 1 to 3 As shown, the utility model provides an edge breaking device, which is used for the edge trimming process of the wafer during the edging process (that is, the edge breaking work hereinafter), and includes a device body 1, a first manipulator 2, an edge breaking assembly 3 and a second manipulator 4. The device body 1 serves as a basic frame, providing an installation platform for the installation of other structures. The first manipulator 2 includes a first mechanical arm 21 for adjusting the posture. The first mechanical arm 21 is arranged on the device body 1, and is mainly used to carry and control the position of the edge breaking assembly 3. The edge breaking assembly 3 includes a support structure 31 and an edge breaking tool 32. The support structure 31 is installed at the end of the first mechanical arm 21, and the edge breaking tool 32 is installed on the support structure 31. When the wafer moves to the specified position, as the posture of the first manipulator 2 is adjusted, the edge breaking tool 32 slides on the surface of the wafer to draw an edge breaking track, and then as the edge breaking tool 32 applies force, the material outside the wafer track is cut off.

[0031] The second robot 4 includes a second robot arm 41 for adjusting the posture and a tray 42. The second robot arm 41 is installed on the equipment body 1. The tray 42 is installed at the end of the second robot arm 41. The tray 42 is used to carry the wafers to be bent or the wafers that have been bent. The position and posture of the workpiece can be accurately controlled by the second robot 4, so as to cooperate with the bend assembly 3 to perform the bend operation.

[0032] Based on the above structure, the second robot arm 41 drives the tray 42 to transfer the chip to the bottom of the edge breaking tool 32. At this time, as the position of the first robot 2 is adjusted, the edge breaking tool 32 is driven to slide on the surface of the chip to draw a edge breaking trajectory. Then, the edge breaking tool 32 applies force to the excess position of the chip to break off the excess waste.

[0033] Read also Figure 4 In some embodiments, the support structure 31 includes a first bracket 311, two first driving members, and two second brackets 312 slidably installed at both ends of the first bracket 311. The first bracket 311 is installed at the end of the first robotic arm 21, and the first driving member is installed on the first bracket 311. The first bracket 311 has a first slide rail; the second bracket is slidably connected to the first slide rail of the first bracket 311, and the output shaft of each first driving member is connected to the corresponding second bracket to drive the second bracket to slide along the first slide rail. The two second brackets 312 are arranged at intervals, and the bend tool 32 is installed on a second bracket, and the tool head of the bend tool 32 faces the other second bracket.

[0034] In this embodiment, when the wafer moves to the bottom of the edge breaking tool 32, a first driving member drives a second bracket to move to contact with the bottom of the tray 42 to provide a supporting force, and another first driving member drives another second bracket (the second bracket is equipped with the edge breaking tool 32) to move to the wafer surface, so that when the edge breaking tool 32 slides or applies force on the wafer surface, the second bracket at the bottom of the tray 42 plays a supporting role. The first driving member in this embodiment is located on one side of the first bracket 311 (not shown in the figure), and preferably, the first driving member is a motor.

[0035] In some embodiments, the device body 1 has a sliding groove 11, which is used to cooperate with the movement setting of the first manipulator 2. The first manipulator 2 also includes a second driving member, a second slide rail 22, a first slider, a third driving member and a third slide rail 23. The first manipulator 21 is installed on the second slide rail 22. The output shaft of the second driving member is connected to the first manipulator 21 to drive the first manipulator 21 to slide on the second slide rail 22, so that the first manipulator 21 can move along the second slide rail 22. Figure 1 The X direction movement shown,

[0036] The second slide rail 22 is mounted on the first slider, the first slider is mounted on the third slide rail 23, and the output shaft of the third driving member is connected to the first slider to drive the first slider to slide on the third slide rail 23. The above structure in this embodiment allows the first mechanical arm 21 to slide along the direction of the second slide rail 22 itself, and can also change position as the first slider slides on the third slide rail 23, thereby allowing the first mechanical arm 21 to move along the direction of the second slide rail 22. Figure 1 Movement in the Y direction as shown.

[0037] In this embodiment, the first robot arm 21 can be flexibly and accurately positionally controlled and operated in the X direction and the Y direction, thereby improving the automation and working efficiency of the equipment, and enabling the edge breaking tool 32 to draw an edge breaking track (such as a rectangle) on the wafer surface. Preferably, the second driving member and the third driving member in this embodiment are motors.

[0038] In some embodiments, the sliding groove 11 is cross-shaped, and cooperates with the second slide rail 22 and the third slide rail 23 which are perpendicular to each other to provide two sliding directions, so that the first robot arm 21 can move more flexibly and accurately on a two-dimensional plane.

[0039] In some embodiments, the first robotic arm 21 includes a first base 211, a fourth driving member, a fourth slide rail, a second slider and a first support arm 212. The first base 211 has a mounting groove 2111, which is located inside the first base 211 and is used to accommodate components such as the fourth slide rail, the fourth driving member and the second slider. The fourth slide rail is installed on the groove wall of the mounting groove 2111 to provide a sliding path for the second slider. The second slider is slidably installed on the fourth slide rail, the first support arm 212 is installed on the second slider, the fourth driving member is installed in the mounting groove 2111, and the output shaft of the fourth driving member is connected to the second slider, which is used to drive the second slider to slide relative to the fourth slide rail to drive the first support arm 212 to extend or retract the mounting groove 2111. The edge bending assembly 3 is installed at the end of the first support arm 212.

[0040] In this embodiment, when the fourth driving member is working, it drives the second slider to slide on the fourth slide rail. Since the first support arm 212 is installed on the second slider, the sliding of the second slider will drive the first support arm 212 to extend or retract the installation groove 2111. The edge bending assembly 3 is installed at the end of the first support arm 212, and changes its position and posture with the movement of the first support arm 212, thereby increasing the flexibility and working range of the first mechanical arm 21, so that it can handle workpieces of different sizes and positions. Preferably, the fourth driving member in this embodiment is a motor.

[0041] In some embodiments, the first robotic arm 21 also includes a second support arm 213, which is connected to the first support arm 212, and the second support arm 213 is vertically arranged to the first support arm 212, and the edge bending assembly 3 is installed at the end of the second support arm 213. In this embodiment, the first support arm 212 and the second support arm 213 are arranged to extend the distance of the edge bending assembly 3 in the height and length directions, so that the edge bending assembly 3 can reach a wider operating space and can perform more precise and flexible position adjustments in three-dimensional space.

[0042] Read also Figure 5In some embodiments, the second robotic arm 41 includes a second base 411, a third support arm 412, a fifth driving member, a fourth support arm 413 and a sixth driving member, the second base 411 is installed on the device body 1, the fifth driving member is installed on the second base 411, and the third support arm 412 is rotatably connected to the second base 411 through the fifth driving member, the sixth driving member is installed on the third support arm 412, and the fourth support arm 413 is rotatably connected to the third support arm 412 through the sixth driving member, and the tray 42 is installed at the end of the fourth support arm 413.

[0043] In this embodiment, the third support arm 412 is vertically arranged with the second base 411, and the fifth driving member is installed in the second base 411. The fifth driving member realizes the rotational movement of the second mechanical arm 41 around the axis of the second base 411 in the vertical plane by controlling the rotation of the third support arm 412 relative to the second base 411, thereby realizing the adjustment of the height direction position of the tray 42. The sixth driving member (not shown in the figure) is installed on one side of the second support arm 213, so as to realize the swing of the second mechanical arm 41 in the horizontal plane by controlling the rotation of the fourth support arm 413 relative to the third support arm 412, thereby realizing the adjustment of the horizontal direction position of the tray 42.

[0044] The above method enables the second robot arm 41 to accurately transport the tray 42 to the bottom of the edge breaking tool 32 by adjusting the position, thereby improving production efficiency and accuracy. Preferably, the fifth driving member and the sixth driving member in this embodiment are motors.

[0045] In some embodiments, the second robotic arm 41 also includes a clamping arm 414 and a seventh driving member. The seventh driving member and the clamping arm 414 are installed on the fourth support arm 413. The output shaft of the seventh driving member is connected to the clamping arm 414 to drive the clamping arm 414 to open to release the tray 42 or clamp and clamp the tray 42.

[0046] In this embodiment, the seventh driving member is installed in the fourth support arm 413. When the seventh driving member is working, it drives the clamping arm 414 to open or close. When the clamping arm 414 is opened, the tray 42 is released, allowing the tray 42 to be placed or taken out. When the clamping arm 414 is closed or clamped, it can firmly grasp the tray 42 to ensure that the tray 42 will not fall during transportation or operation. Preferably, the seventh driving member in this embodiment is a motor.

[0047] In some embodiments, the clamping arm 414 includes a mounting seat and two clamping arms 4141 movably connected to the mounting seat. The mounting seat is installed at the end of the fourth support arm 413. The seventh driving member passes through the mounting seat and is connected to the two clamping arms 414 to drive the two clamping arms 414 to move relatively closer or farther away.

[0048] In this embodiment, when the seventh driving member is working, it drives the two clamping arms 414 to move closer or farther away from each other. When the two clamping arms 4141 are close to each other, they clamp the tray 42; when the two clamping arms 4141 are farther away from each other, they release the tray 42 to achieve the grasping and releasing of the tray 42. In addition, it can also adapt to objects of different sizes and shapes, improving its operational flexibility and applicability. Through the control of the seventh driving member, the two clamping arms 4141 can accurately adjust the distance between each other to ensure that when grasping and releasing an object, it will not be too tight to cause damage to the object, nor too loose to cause the object to slip.

[0049] In some embodiments, the tray 42 has a discharge hole (not shown) for waste to pass through. The discharge hole has one or more holes to facilitate the discharge or removal of waste.

[0050] In summary, the embodiment of the utility model provides a bend edge device, the second robot arm 41 drives the tray 42 to transfer the wafer to the bottom of the bend edge tool 32, at this time, as the first robot arm 2 adjusts its position, it drives the bend edge tool 32 to slide on the wafer surface to draw a bend edge track, and then as the bend edge tool 32 applies force to the excess position of the wafer to break off the excess waste, the bend edge work is completed. The utility model uses an automated method to replace manual bend edge work, reduces the working hours of bend edge work, improves work efficiency, avoids stabbing employees, thereby reducing labor and loss costs and solving safety problems.

[0051] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A bending device, characterized in that: include; Equipment body; A first manipulator, comprising a first manipulator arm for adjusting posture, wherein the first manipulator arm is arranged on the device body; The edge breaking assembly comprises a support structure and an edge breaking tool, wherein the support structure is installed at the end of the first robot arm, and the edge breaking tool is installed on the support structure; as well as The second robot comprises a second robot arm for adjusting posture and a tray. The second robot arm is installed on the equipment body, and the tray is installed at the end of the second robot arm.

2. The edge bending device according to claim 1, characterized in that: The supporting structure includes a first bracket, two first driving members and two second brackets slidably installed at both ends of the first bracket, the first bracket is installed at the end of the first robotic arm, the first driving member is installed on the first bracket, the first bracket has a first slide rail, the second bracket is slidably connected to the first slide rail of the first bracket, the output shaft of each first driving member is connected to the corresponding second bracket to drive the second bracket to slide along the first slide rail, the two second brackets are arranged at intervals, and the edge bending tool is installed on one of the second brackets, and the tool head of the edge bending tool faces the other second bracket.

3. The edge bending device according to claim 1, characterized in that: The device body has a sliding groove; The first manipulator further includes a second driving member, a second slide rail, a first slider, a third driving member and a third slide rail, the first manipulator arm is mounted on the second slide rail, and the output shaft of the second driving member is connected to the first manipulator arm to drive the first manipulator arm to slide on the second slide rail; The second slide rail is mounted on the first slider, the first slider is mounted on the third slide rail, and the output shaft of the third driving member is connected to the first slider to drive the first slider to slide on the third slide rail.

4. The edge breaking device according to claim 3, characterized in that: The sliding groove is in a cross shape.

5. The edge bending device according to claim 1, characterized in that: The first robotic arm includes a first base, a fourth driving member, a fourth slide rail, a second slider and a first support arm, the first base has a mounting groove, the fourth slide rail is installed on the groove wall of the mounting groove, the second slider is slidably installed on the fourth slide rail, the first support arm is installed on the second slider, the fourth driving member is installed in the mounting groove, and the output shaft of the fourth driving member is connected to the second slider for driving the second slider to slide relative to the fourth slide rail to drive the first support arm to extend or retract the mounting groove, and the edge bending assembly is installed at the end of the first support arm.

6. The edge breaking device according to claim 5, characterized in that: The first mechanical arm also includes a second supporting arm, which is connected to the first supporting arm and is vertically arranged to the first supporting arm, and the edge bending assembly is installed at the end of the second supporting arm.

7. The edge bending device according to claim 1, characterized in that: The second robotic arm includes a second base, a third support arm, a fifth drive member, a fourth support arm and a sixth drive member. The second base is mounted on the device body, the fifth drive member is mounted on the second base, and the third support arm is rotatably connected to the second base via the fifth drive member. The sixth drive member is mounted on the third support arm, and the fourth support arm is rotatably connected to the third support arm via the sixth drive member. The tray is mounted at the end of the fourth support arm.

8. The edge breaking device according to claim 7, characterized in that: The second robotic arm also includes a clamping arm and a seventh driving member. The seventh driving member and the clamping arm are installed on the fourth supporting arm. The output shaft of the seventh driving member is connected to the clamping arm to drive the clamping arm to open to release the pallet or clamp and clamp the pallet.

9. The edge breaking device according to claim 8, characterized in that: The clamping arm includes a mounting seat and two clamping arms movably connected to the mounting seat. The mounting seat is installed at the end of the fourth support arm. The seventh driving member passes through the mounting seat and is connected to the two clamping arms to drive the two clamping arms to move relatively closer or farther away.

10. The edge bending device according to claim 1, characterized in that: The tray has a discharge hole for waste to pass through.

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