Substrate positioning structure and process cabin structure
By using positioning members and positioning drive components to push the top roller in the substrate positioning structure, the problem of inconsistent substrate positioning is solved, ensuring the position consistency and horizontal state of the substrate in the process cabin, and improving the processing quality.
Patent Information
- Application Number
- CN202420946522.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-29
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-04-29
AI Technical Summary
During the substrate processing process, due to the inconsistent position of the robot when the substrate is transported, the position and state after the substrate is loaded do not meet the processing requirements, which affects the subsequent processing quality.
Design a substrate positioning structure, including mounting plate, positioning member and positioning drive assembly. Through the rotation of the positioning member, push the top substrate to ensure the consistency of the positioning of the substrate in the process compartment and prevent tilting. Use push top rollers and push top surfaces to push The substrate is squeezed, and the positioning member is adjusted using the connecting section and bent bar to ensure that the substrate is placed horizontally.
The position consistency of the substrate after each loading is achieved, the inclination is avoided, the processing consistency and quality is ensured, and the application scope of the substrate positioning structure is expanded.
Smart Images
Figure CN222192679U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of display device processing equipment, and in particular to a substrate positioning structure and a process chamber structure. Background Art
[0002] Inkjet printing technology has broad application prospects in manufacturing fields such as information, energy, medical care, and national defense. In recent years, it has been increasingly used in flexible devices such as OLED, RFID, thin-film solar cells, wearable flexible devices, PCB, smart skin, and LED direct display fields.
[0003] When processing substrates, it is necessary to transfer the substrates to different process chambers for different processing. In different process chambers, the position of the substrates loaded into the process chambers needs to be consistent each time to ensure better consistency after the substrates are processed.
[0004] In the related art, a plurality of guide blocks are arranged on a support platform for supporting a substrate in a process chamber, and the plurality of guide blocks are arranged at the edge of the support platform, and the placement position of the substrate is adjusted by using the guide slopes on the guide blocks. Specifically, when a substrate is placed on the support platform from top to bottom by a robot, the edge of the substrate first contacts the guide slope of the guide block, and due to the gravity of the substrate, when the substrate falls, it falls along the guide slope to a designated position on the support platform.
[0005] However, since the position of the substrate relative to the robot arm is prone to change during the process of carrying the substrate and driving the substrate to be transported, the position of the substrate is inconsistent each time it is sent to the support platform. In the process of lowering the substrate to the support platform, it is easy for the substrate to fall directly onto the guide block, and part of the substrate is supported by the guide block, making it difficult for the substrate to slide down along the guide slope, resulting in a tilted state of the substrate. Therefore, after the substrate is loaded, its position and state are likely to not meet the processing requirements, which will have an adverse effect on the subsequent processing of the substrate. Utility Model Content
[0006] The embodiments of the present application provide a substrate positioning structure and a process chamber structure to solve the technical problem in the related art that after the substrate is loaded, its position and placement state may not meet the processing requirements, which may have an adverse effect on the subsequent processing of the substrate.
[0007] In a first aspect, a substrate positioning structure is provided, which is installed on a side wall of a process chamber, and the substrate positioning structure includes:
[0008] A mounting plate, wherein a mounting opening is provided on the side wall of the process chamber, and the mounting plate is fixed to the mounting opening on the outer wall of the process chamber and blocks the mounting opening;
[0009] A positioning member, the positioning member is hinged to the inner side surface of the mounting plate, the positioning member comprises a first push-up surface and a second push-up surface, and the angle between the first push-up surface and the second push-up surface is not greater than 90 degrees;
[0010] A positioning drive assembly, wherein the positioning drive assembly is mounted on the mounting plate, and the driving end of the positioning drive assembly is suitable for pushing the positioning member to cause the positioning member to rotate; wherein,
[0011] As the positioning member rotates, the first pushing surface and the second pushing surface respectively approach and push adjacent two side edges of the substrate.
[0012] In some embodiments, a distance is left between the connection between the positioning member and the mounting plate and the first pushing surface, and when the positioning member rotates, the first pushing surface and the second pushing surface successively approach and push the substrate.
[0013] In some embodiments, the positioning member includes a first positioning segment and a second positioning segment, the ends of the first positioning segment and the second positioning segment are fixed, and the first positioning segment and the second positioning segment form a bending strip, and the inner side surfaces of the first positioning segment and the second positioning segment are the first pushing surface and the second pushing surface, respectively.
[0014] In some embodiments, the positioning member further includes a first ejection roller and a second ejection roller;
[0015] The first pushing roller is rotatably connected to the first positioning section, and a portion of the first pushing roller extends out of the first pushing surface;
[0016] The second pushing roller is rotatably connected to the second positioning section, and a portion of the second pushing roller extends out of the second pushing surface.
[0017] In some embodiments, the mounting portion of the first pushing roller is slidably disposed on the first positioning section to adjust the length of the first pushing roller extending out of the first pushing surface;
[0018] The mounting portion of the second pushing roller is slidably disposed on the second positioning section to adjust the length of the second pushing roller extending out of the second pushing surface.
[0019] In some embodiments, the positioning member also includes a connecting section, one end of which is fixed to the end of the first positioning section away from the second positioning section, and the other end of the connecting section is hinged to the mounting plate, the connecting section and the first positioning section form a bending strip, and the connecting section and the second positioning section have opposite bending directions relative to the first positioning section.
[0020] In some embodiments, the positioning drive assembly includes:
[0021] An ejector rod, the ejector rod being inserted through the mounting plate;
[0022] The positioning linear module is installed on the outside of the mounting plate and is drivingly connected to the ejector rod to drive the ejector rod to push the positioning member and drive the positioning member to rotate.
[0023] In some embodiments, the positioning drive assembly further includes a connecting plate, the ejection rod and the positioning member are both hinged to the connecting plate, and the connection position between the connecting plate and the positioning member is close to the junction of the first ejection surface and the second ejection surface.
[0024] In some embodiments, the positioning drive assembly further includes a sealing assembly, and the sealing assembly includes:
[0025] A sealing plate, wherein the ejector rod is fixedly disposed through the sealing plate;
[0026] A flexible sleeve is provided on the ejection rod, and two ends of the flexible sleeve are respectively fixed to the sealing plate and the mounting plate.
[0027] The beneficial effects of the technical solution provided by this application include:
[0028] The embodiment of the present application provides a substrate positioning structure, and after the substrate is loaded into the process chamber, the position of the substrate is adjusted by the substrate positioning structure. Specifically, the substrate positioning structure is installed on the process chamber through a mounting plate, and the positioning member is located inside the process chamber. The positioning member is driven to rotate by a positioning drive assembly, and the first push-up surface and the second push-up surface of the positioning member rotate, and respectively approach and push up the adjacent two side edges of the substrate. Since the relative positions of the first push-up surface and the second push-up surface are determined, and the final position of the positioning member after rotation is determined, each time the substrate is pushed up, the first push-up surface and the second push-up surface push the substrate to a fixed position, ensuring that the position of the substrate is consistent after each substrate is loaded, and in the process of adjusting the position of the substrate, it is not easy to cause the substrate to tilt, ensuring that the substrate is in a horizontal state. Therefore, the processing consistency is guaranteed each time the substrate is processed, and the processing quality of the substrate is guaranteed.
[0029] In a second aspect, a process chamber structure is provided, comprising a process chamber and at least two substrate positioning structures as described above, wherein the two substrate positioning structures act on two opposite corners of a substrate respectively.
[0030] Another embodiment of the present application provides a process chamber structure. Since the process chamber structure includes the substrate positioning structure as described above, the beneficial effects of the process chamber structure are consistent with the beneficial effects of the above-mentioned substrate positioning structure, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0032] Figure 1 A schematic diagram of a substrate positioning structure and a process chamber provided in an embodiment of the present application;
[0033] Figure 2 A schematic diagram of a substrate positioning structure provided in an embodiment of the present application when adjusting the position of a substrate;
[0034] Figure 3 A schematic diagram of a positioning member provided in an embodiment of the present application after rotating and adjusting a substrate;
[0035] Figure 4 This is a schematic diagram of the positioning member provided in an embodiment of the present application before rotating and adjusting the substrate.
[0036] In the figure: 1. mounting plate; 2. positioning member; 2a. first push-up surface; 2b. second push-up surface; 21. first positioning section; 22. second positioning section; 23. connecting section; 24. first push-up roller; 25. second push-up roller; 3. positioning drive assembly; 31. push-up rod; 32. positioning linear module; 33. connecting plate; 34. sealing assembly; 341. sealing plate; 342. flexible sleeve; 4. process chamber. DETAILED DESCRIPTION
[0037] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.
[0038] The embodiment of the present application provides a substrate positioning structure and a process chamber structure, wherein the substrate positioning structure uses a positioning drive assembly to drive a positioning member to rotate, so that the first push-up surface and the second push-up surface of the positioning member respectively push the adjacent two sides of the substrate, thereby adjusting the position of the substrate, ensuring that the position of the substrate is consistent after each substrate loading. The present application solves the technical problem in the related art that after the substrate is loaded, its position and placement state are easily unable to meet the processing requirements, which will have an adverse effect on the subsequent processing of the substrate.
[0039] Reference Figure 1, a substrate positioning structure, which is installed on the side wall of the process chamber 4. Figure 3 The substrate positioning structure includes a mounting plate 1, a positioning member 2 and a positioning drive assembly 3. Specifically, a mounting opening is provided on the side wall of the process chamber 4, the mounting plate 1 is fixed to the outer wall of the process chamber 4 and blocks the mounting opening, the positioning member 2 and the positioning drive assembly 3 are both connected to the mounting plate 1, and the substrate positioning structure is mounted on the process chamber 4 using the mounting plate 1.
[0040] In this way, the substrate positioning structure is independently arranged, can be conveniently installed on the process chamber 4, and can be adapted to process chambers 4 of various specifications, thus broadening the scope of application of the substrate positioning structure. In addition, the substrate positioning structure can be installed and disassembled as a whole, which is convenient for early installation and later maintenance.
[0041] Reference Figure 3 and Figure 4 , wherein the positioning member 2 includes an inner side surface hinged to the mounting plate 1, specifically, a connecting seat is fixed to the inner side surface of the mounting plate 1, and the positioning member 2 is hinged to the connecting seat to be connected to the mounting plate 1. By providing the connecting seat, the distance between the positioning member 2 and the mounting plate 1 is increased, the position of the positioning member 2 in the process chamber 4 is conveniently adjusted, and the mounting plate 1 is prevented from interfering with the rotation of the positioning member 2.
[0042] Reference Figure 3 and Figure 4 The positioning member 2 includes a first push-up surface 2a and a second push-up surface 2b, and the angle between the first push-up surface 2a and the second push-up surface 2b is not greater than 90 degrees. In this embodiment, the angle between the first push-up surface 2a and the second push-up surface 2b is set at an acute angle. The first push-up surface 2a and the second push-up surface 2b are suitable for pushing up the adjacent two sides of the substrate respectively.
[0043] Reference Figure 3 and Figure 4 The positioning drive assembly 3 is mounted on the mounting plate 1, and the driving end of the positioning drive assembly 3 is suitable for pushing the positioning member 2 to rotate the positioning member 2. Through the rotation of the positioning member 2, the first push-up surface 2a and the second push-up surface 2b respectively approach and push the adjacent two sides of the substrate.
[0044] In this way, after the substrate is loaded into the process chamber 4, the substrate positioning structure adjusts the position of the substrate. Specifically, the substrate positioning structure is installed on the process chamber 4 through the mounting plate 1. Figure 1 and Figure 2The positioning member 2 is located inside the process chamber 4, and the positioning member 2 is driven to rotate by the positioning drive assembly 3, so that the first push-up surface 2a and the second push-up surface 2b of the positioning member 2 rotate, and respectively approach and push up the adjacent two side edges of the substrate. Since the relative positions of the first push-up surface 2a and the second push-up surface 2b are determined, and the final position of the positioning member 2 after rotation is determined, each time the substrate is pushed up, the first push-up surface 2a and the second push-up surface 2b push the substrate to a fixed position, ensuring that the position of the substrate is consistent after each substrate loading, and in the process of adjusting the position of the substrate, it is not easy to cause the substrate to tilt, ensuring that the substrate is in a horizontal state. Therefore, the processing consistency is guaranteed each time the substrate is processed, and the processing quality of the substrate is guaranteed.
[0045] Reference Figure 3 and Figure 4 Preferably, a distance is left between the connection between the positioning member 2 and the mounting plate 1 and the first push-up surface 2a. When the positioning member 2 rotates, the first push-up surface 2a and the second push-up surface 2b successively approach and push up the substrate.
[0046] In this way, by designing the position of the rotation axis of the positioning member 2, when the positioning member 2 rotates, the first push surface 2a will gradually approach and push the substrate. When the substrate is loaded, the positioning member 2 can leave space for the substrate to be loaded, so as to avoid the positioning member 2 blocking the position of the substrate loading.
[0047] Reference Figure 3 and Figure 4 Specifically, the positioning member 2 includes a first positioning segment 21 and a second positioning segment 22, the ends of the first positioning segment 21 and the second positioning segment 22 are fixed, and the first positioning segment 21 and the second positioning segment 22 form a bending strip. The inner side surfaces of the first positioning segment 21 and the second positioning segment 22 are respectively the first push-up surface 2a and the second push-up surface 2b. It can be understood that the side surface of the first positioning segment 21 and the second positioning segment 22 forming a bad angle is the inner side surface.
[0048] In this way, when adjusting the position of the substrate, the adjacent two sides of the substrate are pushed and adjusted by the first positioning section 21 and the second positioning section 22. The volume of the first positioning section 21 and the second positioning section 22 can be easily designed to be smaller, thereby reducing the space occupied in the process chamber 4.
[0049] Reference Figure 3 and Figure 4 Furthermore, the positioning member 2 further includes a first push-up roller 24 and a second push-up roller 25. The first push-up roller 24 is rotatably connected to the first positioning section 21, and a portion of the first push-up roller 24 extends out of the first push-up surface 2a. The second push-up roller 25 is rotatably connected to the second positioning section 22, and a portion of the second push-up roller 25 extends out of the second push-up surface 2b.
[0050] In this arrangement, the first push roller 24 and the second push roller 25 are used to contact the substrate instead of the first push surface 2a and the second push surface 2b. When the substrate is pushed, the substrate is subjected to a single-point force, thereby ensuring the push direction of the substrate. In addition, when the substrate contacts the first push roller 24 and the second push roller 25, the first push roller 24 and the second push roller 25 rotate, thereby reducing the wear on the side of the substrate and avoiding damage to the substrate. Similarly, the first push roller 24 and the second push roller 25 are easy to replace after being worn, without replacing the entire positioning member 2.
[0051] Reference Figure 3 and Figure 4 Further, the mounting portion of the first pushing roller 24 is slidably disposed on the first positioning section 21 to adjust the length of the first pushing roller 24 extending out of the first pushing surface 2a. The mounting portion of the second pushing roller 25 is slidably disposed on the second positioning section 22 to adjust the length of the second pushing roller 25 extending out of the second pushing surface 2b.
[0052] Reference Figure 3 and Figure 4 Specifically, the first positioning section 21 and the second positioning section 22 are both provided with adjustment grooves, and the first pushing roller 24 and the second pushing roller 25 are respectively slidably arranged in the adjustment grooves on the first positioning section 21 and the second positioning section 22, and the positions of the first pushing roller 24 and the second pushing roller 25 are fixed by bolts.
[0053] In this way, by adjusting the positions of the first pushing roller 24 and the second pushing roller 25, the positions of the first pushing roller 24 and the second pushing roller 25 can be adjusted after the positioning member 2 pushes the substrate to rotate, thereby changing the position of the adjusted substrate, so as to fine-tune the position of the substrate after adjustment and positioning, and ensure that the substrate is placed at the preset processing position in the process chamber 4.
[0054] Reference Figure 3 and Figure 4 Specifically, the positioning member 2 further includes a connecting section 23, and the positioning member 2 is hinged to the mounting plate 1 through the connecting section 23. One end of the connecting section 23 is fixed to the end of the first positioning section 21 away from the second positioning section 22, and the other end of the connecting section 23 is hinged to the mounting plate 1, and the connecting section 23 and the first positioning section 21 form a bending strip. The bending directions of the connecting section 23 and the second positioning section 22 relative to the first positioning section 21 are opposite. In this embodiment, the bending angle between the connecting section 23 and the first positioning section 21 is set to be an obtuse angle.
[0055] In this way, the connection section 23 is arranged so that the connection position of the positioning member 2 and the mounting plate 1 is away from the first push-up surface 2a. When the positioning member 2 is pushed and rotated, it will gradually approach the substrate and then push the substrate. In this way, when the substrate is loaded, the first positioning section 21 and the second positioning section 22 can be away from the loading position of the substrate to avoid interfering with the loading of the substrate.
[0056] Reference Figure 3 and Figure 4 The positioning drive assembly 3 includes a push rod 31 and a positioning linear module 32. The push rod 31 is inserted into the mounting plate 1, and the positioning linear module 32 is installed on the outer side of the mounting plate 1, and the positioning linear module 32 is drivingly connected to the push rod 31 to drive the push rod 31 to be inserted into the mounting plate 1.
[0057] One end of the ejector rod 31 extends into the process chamber 4 , and driven by the positioning linear module 32 , pushes the positioning member 2 to rotate the positioning member 2 .
[0058] In this embodiment, the positioning linear module 32 includes a cylinder, a screw mechanism or a linear motor.
[0059] Reference Figure 3 and Figure 4 Furthermore, the positioning drive assembly 3 further includes a connecting plate 33, the ejector rod 31 and the positioning member 2 are both hinged to the connecting plate 33, and the connection position of the connecting plate 33 and the positioning member 2 is close to the junction of the first ejector surface 2a and the second ejector surface 2b. In this embodiment, the connection position of the connecting plate 33 and the positioning member 2 is close to the junction of the first positioning section 21 and the second positioning section 22.
[0060] Reference Figure 3 and Figure 4 In this way, when the ejector rod 31 extends forward, it pushes the positioning member 2 to rotate through the connecting plate 33 to push the substrate to adjust the positioning of the substrate. When the ejector rod 31 retreats, it pulls the positioning member 2 to rotate through the connecting plate 33 to reserve a loading position for the substrate.
[0061] It should be noted that the ejector rod 31 , the connecting plate 33 , the positioning member 2 and the mounting plate 1 form a connecting rod mechanism, thereby realizing the rotation of the positioning member 2 .
[0062] Reference Figure 3 and Figure 4 Further, the positioning drive assembly 3 also includes a sealing assembly 34, and the sealing assembly 34 includes a sealing plate 341 and a flexible sleeve 342. The ejector rod 31 is fixedly arranged on the sealing plate 341, and the flexible sleeve 342 is located on the outer side of the mounting plate 1. The flexible sleeve 342 is sleeved on the ejector rod 31, and the two ends of the flexible sleeve 342 are respectively fixed to the sealing plate 341 and the mounting plate 1.
[0063] With this arrangement, a sealed space is formed between the flexible sleeve 342, the sealing plate 341 and the mounting plate 1, and the penetration opening on the mounting plate 1 for the ejector rod 31 to penetrate is connected to the sealed space between the flexible sleeve 342, the sealing plate 341 and the mounting plate 1, thereby avoiding air leakage in the process chamber 4 due to the connection position between the ejector rod 31 and the mounting plate 1, thereby improving the sealing performance of the process chamber 4 and ensuring the atmosphere environment in the process chamber 4.
[0064] As the ejector rod 31 moves relative to the mounting plate 1, the flexible sleeve 342 deforms adaptively to ensure sealing between the flexible sleeve 342, the sealing plate 341 and the mounting plate 1. In this embodiment, the flexible sleeve 342 includes a bellows.
[0065] The embodiment of the present application provides a substrate positioning structure, after the substrate is loaded into the process chamber 4, the position of the substrate is adjusted by the substrate positioning structure. Specifically, the substrate positioning structure is installed on the process chamber 4 through the mounting plate 1, and the positioning member 2 is located inside the process chamber 4. The positioning drive assembly 3 is used to drive the positioning member 2 to rotate, and the first push-up surface 2a and the second push-up surface 2b of the positioning member 2 rotate, and respectively approach and push the adjacent two sides of the substrate. Since the relative position of the first push-up surface 2a and the second push-up surface 2b is determined, and the final position after the rotation of the positioning member 2 is determined, each time the substrate is pushed up, the first push-up surface 2a and the second push-up surface 2b push the substrate to a fixed position, ensuring that the position of the substrate is consistent after each substrate is loaded, and in the process of adjusting the position of the substrate, it is not easy to cause the substrate to tilt, and the substrate is guaranteed to be in a horizontal state. Therefore, the processing consistency is guaranteed each time the substrate is processed, and the processing quality of the substrate is guaranteed.
[0066] Reference Figure 1 and Figure 2 Another embodiment of the present application provides a process chamber structure, including a process chamber 4 and at least two substrate positioning structures as described above, and the two substrate positioning structures act on two opposite corners of the substrate respectively.
[0067] The two opposite corners of the substrate are positioned by two substrate positioning structures, thereby ensuring that the position of the substrate is fixed in the process chamber 4 after each loading.
[0068] In the description of the present application, it should be noted that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.
[0069] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.
[0070] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.
Claims
1. A substrate positioning structure, which is installed on the side wall of a process chamber, characterized in that: The substrate positioning structure comprises: A mounting plate, wherein a mounting opening is provided on the side wall of the process chamber, and the mounting plate is fixed to the mounting opening on the outer wall of the process chamber and blocks the mounting opening; A positioning member, the positioning member is hinged to the inner side surface of the mounting plate, the positioning member comprises a first push-up surface and a second push-up surface, and the angle between the first push-up surface and the second push-up surface is not greater than 90 degrees; A positioning drive assembly, wherein the positioning drive assembly is mounted on the mounting plate, and the driving end of the positioning drive assembly is suitable for pushing the positioning member to cause the positioning member to rotate; wherein, As the positioning member rotates, the first pushing surface and the second pushing surface respectively approach and push adjacent two side edges of the substrate.
2. The substrate positioning structure according to claim 1, characterized in that: A distance is left between the connection between the positioning member and the mounting plate and the first pushing surface. When the positioning member rotates, the first pushing surface and the second pushing surface successively approach and push the substrate.
3. The substrate positioning structure according to claim 2, characterized in that: The positioning member includes a first positioning segment and a second positioning segment, the ends of the first positioning segment and the second positioning segment are fixed, and the first positioning segment and the second positioning segment form a bending strip, and the inner side surfaces of the first positioning segment and the second positioning segment are the first pushing surface and the second pushing surface respectively.
4. The substrate positioning structure according to claim 3, characterized in that: The positioning member further includes a first pushing roller and a second pushing roller; The first pushing roller is rotatably connected to the first positioning section, and a portion of the first pushing roller extends out of the first pushing surface; The second pushing roller is rotatably connected to the second positioning section, and a portion of the second pushing roller extends out of the second pushing surface.
5. The substrate positioning structure according to claim 4, characterized in that: The mounting portion of the first pushing roller is slidably disposed on the first positioning section to adjust the length of the first pushing roller extending out of the first pushing surface; The mounting portion of the second pushing roller is slidably disposed on the second positioning section to adjust the length of the second pushing roller extending out of the second pushing surface.
6. The substrate positioning structure according to claim 3, characterized in that: The positioning member also includes a connecting section, one end of which is fixed to the end of the first positioning section away from the second positioning section, and the other end of the connecting section is hinged to the mounting plate. The connecting section and the first positioning section form a bending strip, and the connecting section and the second positioning section have opposite bending directions relative to the first positioning section.
7. The substrate positioning structure according to claim 1, characterized in that: The positioning drive components include: An ejector rod, the ejector rod being inserted through the mounting plate; The positioning linear module is installed on the outside of the mounting plate and is drivingly connected to the ejector rod to drive the ejector rod to push the positioning member and drive the positioning member to rotate.
8. The substrate positioning structure according to claim 7, characterized in that: The positioning drive assembly also includes a connecting plate, the ejection rod and the positioning member are both hinged to the connecting plate, and the connection position between the connecting plate and the positioning member is close to the junction of the first ejection surface and the second ejection surface.
9. The substrate positioning structure according to claim 7, characterized in that: The positioning drive assembly further includes a sealing assembly, and the sealing assembly includes: A sealing plate, wherein the ejector rod is fixedly disposed through the sealing plate; A flexible sleeve is provided on the ejection rod, and two ends of the flexible sleeve are respectively fixed to the sealing plate and the mounting plate.
10. A process chamber structure, characterized in that: The process chamber comprises a process chamber and at least two substrate positioning structures according to any one of claims 1 to 9, wherein the two substrate positioning structures act on two opposite corners of the substrate respectively.