Waste gas treatment mechanism of epitaxial furnace

Abstract

The waste gas treatment mechanism comprises a working box, a plurality of partition plates are fixedly connected to the upper inner wall and the lower inner wall of the working box respectively, adsorption plates are arranged between every two adjacent partition plates and between the partition plates at the two ends and the left inner wall and the right inner wall of the working box respectively, and the upper ends of the adsorption plates penetrate through the working box. A sealing cover plate is arranged at the upper end of the working box, a containing groove is formed in the upper end of the working box, a sealing rubber plate is arranged in the containing groove, the upper end of the sealing rubber plate is fixedly connected with the lower end of the sealing cover plate, the front lower end and the upper right end of the working box are fixedly connected with an air inlet pipe and an air outlet pipe respectively, and the air inlet pipe and the air outlet pipe are both communicated with the interior of the working box. By adopting the structures such as the detection box and the like, a harmful gas detection structure is arranged at the gas outlet pipe to detect adsorbed gas, so that whether an adsorbent reaches a saturated state or not is judged, and a worker can conveniently replace the adsorbent in time.

Description

Technical Field

[0001] The utility model relates to a waste gas treatment mechanism, in particular to a waste gas treatment mechanism of an epitaxial furnace applied in the field of epitaxial furnaces. Background Art

[0002] The epitaxial furnace is an important equipment in the semiconductor production process. It can grow crystal layers under high temperature and high pressure environment, so that the semiconductor forms different structures and components on the crystal layer, thereby achieving specific electrical, optical, magnetic and other properties. In semiconductor production, the epitaxial furnace is also one of the main equipment that produces pollution and garbage. Harmful gases and materials are often used in epitaxial furnaces. These substances may cause harm to the production environment and production personnel.

[0003] When treating harmful gases generated by epitaxial furnaces, adsorbents are generally used to adsorb harmful substances in the gases. However, the adsorbents will reach a saturated state after long-term use, and the adsorption effect will be greatly reduced after saturation. At present, traditional adsorption detection methods generally adopt empirical methods. According to the adsorption capacity of the adsorption system and the concentration level of the adsorption object, the cycle of replacing the adsorbent is roughly estimated. It is impossible to accurately judge whether the adsorbent is truly saturated with adsorption. If the adsorbent is replaced before the adsorption is not saturated, it will cause a waste of adsorbent; if the adsorbent is not replaced in time after adsorption saturation, the adsorption effect of the adsorbent cannot be achieved, which may cause environmental pollution. Utility Model Content

[0004] In view of the above-mentioned prior art, the technical problem to be solved by the utility model is that when performing adsorption treatment on harmful gases, it is impossible to accurately judge whether the adsorbent has reached a saturated state. If the activated carbon is replaced before the adsorption is saturated, it will cause a waste of activated carbon; if the activated carbon is not replaced in time after the adsorption is saturated, the activated carbon adsorption effect cannot be achieved, which may cause environmental pollution.

[0005] In order to solve the above problems, the utility model provides an exhaust gas treatment mechanism of an epitaxial furnace, including a working box, wherein the upper and lower inner walls of the working box are fixedly connected with a plurality of partitions, adsorption plates are arranged between two adjacent partitions and between the partitions at both ends and the left and right inner walls of the working box, the upper end of the adsorption plate passes through the working box, a sealing cover plate is arranged at the upper end of the working box, a receiving groove is opened at the upper end of the working box, a sealing rubber plate is arranged in the receiving groove, the upper end of the sealing rubber plate is fixedly connected with the lower end of the sealing cover plate, the front lower end and the upper right end of the working box are respectively fixedly connected with an air inlet pipe and an air outlet pipe, The air inlet pipe and the air outlet pipe are both connected to the working box. A detection box is provided at the right end of the air outlet pipe. The end of the air outlet pipe away from the working box passes through the detection box. A sealing plug and a sealing pressure plate are respectively inserted at the upper end of the detection box. A color-changing ball is provided in the detection box. A fixing rod is fixedly connected to the outer surface of the color-changing ball. The upper end of the fixing rod passes through the sealing pressure plate and is fixedly connected to a rubber piston. The lower end and the upper right end of the detection box are respectively fixedly connected to a water outlet pipe and an exhaust pipe. An electric valve is fixedly installed on the outer ring of the water outlet pipe. The front end of the detection box is fixedly inlaid with glass, and the front end of the glass is fixedly connected with a color plate.

[0006] In the exhaust gas treatment mechanism of the above-mentioned epitaxial furnace, a harmful gas detection structure is provided at the gas outlet pipe to detect the gas after adsorption, so as to determine whether the adsorbent has reached a saturated state, thereby facilitating the staff to replace the adsorbent in time.

[0007] As a further improvement of the present application, a gap is left between the partition located at the lower end and the inner top wall of the working box, a gap is left between the partition located at the upper end and the inner bottom wall of the working box, and multiple partitions are arranged in equal rows and staggered.

[0008] As a further improvement of the present application, the air intake pipe is located directly in front of the adsorption plate at the far left end, the distance between the partition located at the outermost end and the adjacent inner wall of the working box is consistent with the distance between two adjacent partitions, and the width of the adsorption plate is the same as the distance between two adjacent partitions.

[0009] As a further improvement of the present application, the upper end of the adsorption plate is fixedly connected to a fixing plate, the upper end of the fixing plate is provided with an embedded groove, and a soft handle is movably connected in the embedded groove.

[0010] As another improvement of the present application, an absorption tank is provided at the right end of the detection box, the longitudinal section of the exhaust pipe is L-shaped, the end of the exhaust pipe away from the detection box passes through the absorption tank, the upper end and the outer surface of the absorption tank are respectively fixedly connected with a functional pipe and a drain pipe, and an electric valve 2 is fixedly installed on the outer ring of the drain pipe.

[0011] As another improved supplement of the present application, a motor is fixedly connected to the middle part of the upper end of the absorption tank, and the output end of the motor passes through the absorption tank and is fixedly connected to a stirring rod, and the stirring rod does not contact the exhaust pipe.

[0012] To sum up, in actual application, harmful gases enter the working box through the air inlet pipe, and the adsorption plate adsorbs harmful substances in the gas. The presence of the partition can extend the gas travel path, so that multiple adsorption plates can fully absorb harmful substances. The treated gas enters the detection box through the air outlet pipe and merges with water to form an aqueous solution. The color-changing ball reacts with the aqueous solution to change color. The color depth is judged by comparing the color plate, thereby judging whether the adsorption plate has reached a saturated state, which is convenient for the staff to replace the adsorption plate in time, neither replacing it too early, resulting in waste of adsorbent, nor replacing it too late, causing harmful substances in the gas to escape. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the structure of the first implementation method of this application;

[0014] Figure 2 This is a cross-sectional view of the working box structure of the first embodiment of the present application;

[0015] Figure 3 This is a schematic diagram of the sealing cover plate structure of the first embodiment of the present application;

[0016] Figure 4 This is a schematic diagram of the color-changing ball structure of the first embodiment of the present application;

[0017] Figure 5 This is a schematic diagram of the adsorption plate structure of the first embodiment of the present application;

[0018] Figure 6 This is a structural schematic diagram of the second implementation mode of the present application;

[0019] Figure 7 This is a cross-sectional view of the absorption tank structure of the second embodiment of the present application.

[0020] Description of the numbers in the figure:

[0021] 1 working box, 2 partition, 3 adsorption plate, 4 sealing cover plate, 5 containing tank, 6 sealing rubber plate, 7 air inlet pipe, 8 air outlet pipe, 9 detection box, 10 sealing pressure plate, 11 color changing ball, 12 fixing rod, 13 rubber piston, 14 exhaust pipe, 15 color plate, 16 absorption tank, 17 motor, 18 stirring rod. DETAILED DESCRIPTION

[0022] Two implementation modes of the present application are described in detail below with reference to the accompanying drawings.

[0023] The first implementation method:

[0024] Figure 1It shows: a waste gas treatment mechanism of an epitaxial furnace, including a working box 1, the front lower end and the upper right end of the working box 1 are fixedly connected with an air inlet pipe 7 and an air outlet pipe 8, the air inlet pipe 7 is located in front of the adsorption plate 3 at the far left end, the air inlet pipe 7 and the air outlet pipe 8 are both connected to the working box 1, and a detection box 9 is provided at the right end of the air outlet pipe 8, the end of the air outlet pipe 8 away from the working box 1 passes through the detection box 9, and the upper end of the detection box 9 is respectively plugged with a sealing plug and a sealing pressure plate 10, the lower end and the upper right end of the detection box 9 are respectively fixedly connected with a water outlet pipe and an exhaust pipe 14, an electric valve 1 is fixedly installed on the outer ring of the water outlet pipe, and the front end of the detection box 9 is fixedly inlaid with glass, the glass allows the staff to intuitively observe the color change of the inverted color-changing ball 11, and the front end of the glass is fixedly connected with a color plate 15, the color plate 15 is convenient for the staff to directly compare the color of the color-changing ball 11, so as to intuitively judge whether the adsorption plate 3 has reached a saturated state.

[0025] Figure 2 and Figure 3 It is shown that: the upper and lower inner walls of the working box 1 are fixedly connected with a plurality of partitions 2, and adsorption plates 3 are arranged between two adjacent partitions 2 and between the partitions 2 at both ends and the left and right inner walls of the working box 1, the upper end of the adsorption plate 3 passes through the working box 1, and a sealing cover plate 4 is arranged at the upper end of the working box 1, and a receiving groove 5 is opened at the upper end of the working box 1, and a sealing rubber plate 6 is arranged in the receiving groove 5, and the sealing cover plate 4 and the sealing rubber plate 6 seal the working box 1, thereby effectively preventing the exhaust gas from escaping, and the upper end of the sealing rubber plate 6 is fixedly connected to the lower end of the sealing cover plate 4 There is a gap between the partition 2 at the lower end and the inner top wall of the working box 1, and there is a gap between the partition 2 at the upper end and the inner bottom wall of the working box 1. The gaps at different positions facilitate the movement of exhaust gas, thereby facilitating the adsorption of harmful substances in the exhaust gas by multiple adsorption plates 3. The multiple partitions 2 are arranged in equal rows and staggered with each other. The distance between the partition 2 at the outermost end and the adjacent inner wall of the working box 1 is consistent with the distance between two adjacent partitions 2, and the width of the adsorption plate 3 is the same as the distance between two adjacent partitions 2.

[0026] Figure 4 It is shown that: a color-changing ball 11 is arranged in the detection box 9, and a fixing rod 12 is fixedly connected to the outer surface of the color-changing ball 11, and the upper end of the fixing rod 12 passes through the sealing pressure plate 10 and is fixedly connected to a rubber piston 13. The fixing rod 12 can be separated from the sealing pressure plate 10 by the rubber piston 13, thereby completing the replacement of the color-changing ball 11.

[0027] Figure 5 It is shown that: the upper end of the adsorption plate 3 is fixedly connected to a fixing plate, the upper end of the fixing plate is provided with an embedded groove, a soft handle is movably connected in the embedded groove, and the embedded groove and the soft handle are convenient for replacing the adsorption plate 3.

[0028] During use, harmful gases enter the working box 1 through the air inlet pipe 7, and the adsorption plates 3 adsorb harmful substances in the gas. The presence of the partition 2 can extend the gas travel path, so that multiple adsorption plates 3 can fully absorb the harmful substances. The treated gas enters the detection box 9 through the air outlet pipe 8 and merges with water to form an aqueous solution. The color-changing ball 11 reacts with the aqueous solution to change color. The color depth is judged by comparing the color plate 15, thereby judging whether the adsorption plate 3 has reached a saturated state, which is convenient for the staff to replace the adsorption plate 3 in time, neither replacing it too early, resulting in waste of adsorbent, nor replacing it too late, causing the harmful substances in the gas to escape.

[0029] The second implementation method:

[0030] Based on the first embodiment, this embodiment adds an absorption tank 16, a motor 17 and a stirring rod 18, and the rest of the parts are consistent with the first embodiment.

[0031] Figure 6 It is shown that an absorption tank 16 is provided at the right end of the detection box 9, the longitudinal section of the exhaust pipe 14 is L-shaped, and the end of the exhaust pipe 14 away from the detection box 9 passes through the absorption tank 16, the upper end and the outer surface of the absorption tank 16 are respectively fixedly connected with a functional pipe and a drain pipe, and an electric valve 2 is fixedly installed on the outer ring of the drain pipe.

[0032] Figure 7 It is shown that a motor 17 is fixedly connected to the middle of the upper end of the absorption tank 16, and the output end of the motor 17 passes through the absorption tank 16 and is fixedly connected to a stirring rod 18. The stirring rod 18 can stir the adsorption liquid to fully blend the harmful substances in the gas with the adsorption liquid. The stirring rod 18 does not contact the exhaust pipe 14.

[0033] During use, after the adsorption plate 3 is in a saturated state, the exhausted gas will still contain a small amount of harmful substances. The gas is introduced into the absorption tank 16 through the exhaust pipe 14, and the motor 17 is started to drive the stirring rod 18 to rotate, so that the gas and the adsorption liquid in the absorption tank 16 are fully absorbed, thereby effectively avoiding the exhaust gas treatment not meeting the standards and causing harmful substances to be discharged into the air.

[0034] In view of current practical needs, the protection scope of the above-mentioned implementation mode adopted in this application is not limited to this. Various changes made within the knowledge scope of technical personnel in this field without departing from the concept of this application still fall within the protection scope of this utility model.

Claims

1. An exhaust gas treatment mechanism for an epitaxial furnace, comprising a working box (1), characterized in that: The upper and lower inner walls of the working box (1) are fixedly connected with a plurality of partitions (2); adsorption plates (3) are provided between two adjacent partitions (2) and between the partitions (2) at both ends and the left and right inner walls of the working box (1); the upper end of the adsorption plate (3) passes through the working box (1); the upper end of the working box (1) is provided with a sealing cover plate (4); the upper end of the working box (1) is provided with a receiving groove (5); the receiving groove (5) is provided with a sealing rubber plate (6); the upper end of the sealing rubber plate (6) is fixedly connected with the lower end of the sealing cover plate (4); the front lower end and the upper right end of the working box (1) are respectively fixedly connected with an air inlet pipe (7) and an air outlet pipe (8); the air inlet pipe (7) and the air outlet pipe (8) are both in communication with the working box (1); A detection box (9) is provided at the right end of the air outlet pipe (8), and the end of the air outlet pipe (8) away from the working box (1) passes through the detection box (9). A sealing plug and a sealing pressure plate (10) are respectively inserted at the upper end of the detection box (9). A color-changing ball (11) is provided in the detection box (9). The outer surface of the color-changing ball (11) is fixedly connected to a fixing rod (12). The upper end of the fixing rod (12) passes through the sealing pressure plate (10) and is fixedly connected to a rubber piston (13). The lower end and the upper right end of the detection box (9) are respectively fixedly connected to a water outlet pipe and an exhaust pipe (14). An electric valve is fixedly installed on the outer ring of the water outlet pipe. The front end of the detection box (9) is fixedly inlaid with glass, and the front end of the glass is fixedly connected to a color plate (15).

2. The exhaust gas treatment mechanism of an epitaxial furnace according to claim 1, characterized in that: A gap is left between the partition plate (2) at the lower end and the inner top wall of the working box (1), and a gap is left between the partition plate (2) at the upper end and the inner bottom wall of the working box (1), and the plurality of partition plates (2) are arranged in equal rows and staggered.

3. The exhaust gas treatment mechanism of an epitaxial furnace according to claim 2, characterized in that: The air inlet pipe (7) is located directly in front of the adsorption plate (3) at the leftmost end, the distance between the partition plate (2) at the outermost end and the adjacent inner wall of the working box (1) is consistent with the distance between two adjacent partition plates (2), and the width of the adsorption plate (3) is the same as the distance between two adjacent partition plates (2).

4. The exhaust gas treatment mechanism of an epitaxial furnace according to claim 3, characterized in that: The upper end of the adsorption plate (3) is fixedly connected to a fixing plate, the upper end of the fixing plate is provided with an embedded groove, and a soft handle is movably connected in the embedded groove.

5. The exhaust gas treatment mechanism of an epitaxial furnace according to claim 1, characterized in that: An absorption tank (16) is provided at the right end of the detection box (9); the longitudinal section of the exhaust pipe (14) is L-shaped; the end of the exhaust pipe (14) away from the detection box (9) passes through the absorption tank (16); the upper end and the outer surface of the absorption tank (16) are respectively fixedly connected with a functional pipe and a drainage pipe; the outer ring of the drainage pipe is fixedly installed with an electric valve 2.

6. The exhaust gas treatment mechanism of an epitaxial furnace according to claim 5, characterized in that: A motor (17) is fixedly connected to the middle of the upper end of the absorption tank (16); an output end of the motor (17) penetrates into the absorption tank (16) and is fixedly connected to a stirring rod (18); the stirring rod (18) does not contact the exhaust pipe (14).

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