Adjustable fixing assembly for silicon carbide wafer cleaning

Abstract

The utility model discloses an adjustable fixing assembly for cleaning silicon carbide wafers, which comprises a workbench, a cleaning box is mounted on the upper surface of the workbench, and a water falling opening is formed in the cleaning box; an adjusting assembly is arranged at one corner of the upper surface of the workbench, and fixing mechanisms are arranged on the two sides of the workbench. The adjusting assembly comprises an adjusting motor fixedly connected with the workbench, the output end of the adjusting motor is fixedly connected with a driving disc, the driving disc is connected with a clamping disc in a clamped mode, the clamping disc is connected with a driving shaft in a penetrating mode, the other end of the driving shaft is fixedly connected with a worm, the worm is connected with a worm gear in a meshed mode, and the worm gear is connected with a worm wheel. The worm wheel is connected with a push rod extending into the cleaning box in a penetrating mode. The silicon carbide wafer can be rotated to a specific angle through the clamping disc, the silicon carbide wafer is continuously washed at the specific angle, time and labor are saved, meanwhile, automatic rotation can be achieved, and finally impurities are effectively cleaned.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide wafers, in particular to an adjustable fixing component for cleaning silicon carbide wafers. Background Art

[0002] The Chinese patent discloses a fixing mechanism for cleaning silicon carbide wafers (publication number: CN218014750U), comprising a cleaning machine body, a mounting wheel is fixedly installed at the bottom of the cleaning machine body, a water storage box is fixedly installed on the inner top wall of the cleaning machine body, a bellows is fixedly installed on the right side of the water storage box, and a mounting cylinder is fixedly installed at the bottom of the bellows; the fixing mechanism for cleaning silicon carbide wafers is provided with a clamping mechanism, and under the action of two electric push rods, the two electric push rods are retracted to the opposite side, driving the mounting rods at the two output shafts to slide on the outer surface of the support rod to the opposite side through the two mounting sleeves, and the two mounting rods move while driving the two movable rods, so that the two movable rods slide to the opposite side inside the slide groove through the movable shaft, and the two stabilizing rods drive the two clamping rods through the two mounting shafts, so that the distance between the two clamping rods becomes larger, and the silicon carbide wafer to be cleaned can be put in at this time;

[0003] At the beginning of cleaning, current silicon carbide wafers need to be continuously rinsed with clean water to remove impurities attached to the surface of the silicon carbide wafer. The existing fixing mechanism makes it difficult to flip the silicon carbide wafer without disassembling it. Even if it can be flipped directly, its angle cannot be controlled at multiple angles, and the accuracy of the rotation angle is limited. Utility Model Content

[0004] The technical problems to be solved by the utility model are as follows:

[0005] 1. The angle of the fixing mechanism cannot be adjusted to multiple angles. Even if it can be adjusted, the accuracy of the rotation angle is limited.

[0006] The purpose of the utility model can be achieved through the following technical solutions:

[0007] The cleaning agent is connected to the cleaning box, and the cleaning agent is connected to the cleaning box on the upper surface of the cleaning box.

[0008] As a further solution of the utility model: the middle of the driving disk is fixedly connected to a limiting disk, the limiting disk is fitted with the engaging disk, the edge of the driving disk is fixedly connected to a limiting column, the engaging disk is provided with an engaging groove, and the limiting column is engaged with the engaging groove.

[0009] As a further solution of the utility model: a conveyor belt is sleeved on the driving wheel, the other end of the conveyor belt is meshingly connected with a driven wheel, and the side of the driven wheel is fixedly connected with another worm.

[0010] As a further solution of the utility model: the fixing mechanism includes a second motor installed on the side of the workbench, the output end of the second motor is fixedly connected with a bidirectional screw, the bidirectional screw is provided with a sliding sleeve, and the sliding sleeve is rotatably connected to the push rod.

[0011] As a further solution of the utility model: one end of the push rod extending into the interior of the cleaning box is fixedly connected to a clamping sleeve, the interior of the clamping sleeve is rotatably connected to a micro screw, a screw sleeve is sleeved on the micro screw, the side of the screw sleeve and the bottom of the clamping sleeve are fixedly connected to a fixed splint, and one end of the micro screw is fixedly connected to a micro motor.

[0012] As a further solution of the utility model: the side of the worm wheel is rotatably connected to a support frame fixedly connected to the upper surface of the workbench, the worm wheel is slidably connected, and the push rod is through-connected to the support frame.

[0013] As a further solution of the utility model: the driven wheel is rotatably connected to the workbench, and the two worms are both rotatably connected to the workbench.

[0014] Beneficial effects of the utility model:

[0015] 1. By setting an adjustment component with a driving disk and a clamping disk, the push rod can automatically adjust and rotate to a specific angle under the control of the adjustment motor, saving time and effort while ensuring that the clamped silicon carbide wafer can be continuously rinsed at a horizontal or vertical angle and gradually rotate during the rinsing process, so that impurities are effectively cleaned.

[0016] 2. By setting up a fixing assembly with a bidirectional screw and a clamping sleeve, the push rod can push the clamping sleeve to move, thereby adapting to various sizes of silicon carbide wafers, and the fixed clamping plate can ensure that silicon carbide wafers of various thicknesses can be effectively clamped to prevent the silicon carbide wafers from slipping during rotation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The utility model is further described below in conjunction with the accompanying drawings.

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 It is a top view structural diagram of the workbench;

[0020] Figure 3 It is a structural schematic diagram of the driving disk and the engaging disk;

[0021] Figure 4 It is a schematic diagram of the connection structure between the worm wheel and the worm;

[0022] Figure 5 yes Figure 2 Schematic diagram of the enlarged structure of area A in the middle.

[0023] In the figure: 1. workbench; 101. support plate; 102. cleaning nozzle; 103. cleaning box; 104. drain outlet; 2. adjustment component; 201. adjustment motor; 202. drive disk; 203. engaging disk; 204. drive shaft; 205. drive wheel; 206. conveyor belt; 207. driven wheel; 208. worm; 209. worm wheel; 210. support frame; 211. limit disk; 212. limit column; 213. engaging groove; 3. fixing mechanism; 301. second motor; 302. bidirectional screw; 303. sliding sleeve; 304. push rod; 305. clamping sleeve; 306. micro motor; 307. micro screw; 308. screw sleeve; 309. fixing splint. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] like Figure 1-5 As shown, an adjustable fixing assembly for cleaning silicon carbide wafers comprises a workbench 1, a support plate 101 is fixedly connected to one side of the workbench 1, a cleaning nozzle 102 is fixedly connected to the top of the support plate 101, a cleaning box 103 is installed on the upper surface of the workbench 1, the cleaning nozzle 102 is obliquely inserted into the cleaning box 103, and a water droplet 104 located on the workbench 1 is opened inside the cleaning box 103; an adjustment assembly 2 is arranged at a corner of the upper surface of the workbench 1, and fixing mechanisms 3 are arranged on both sides of the workbench 1; the adjustment assembly 2 comprises an adjustment motor 201 fixedly connected to the workbench 1, a driving disk 202 is fixedly connected to the output end of the adjustment motor 201, the driving disk 202 is snap-connected to the snap-in disk 203, and the snap-in disk 203 penetrates A driving shaft 204 is penetrated and connected, and a driving wheel 205 is fixedly connected to the driving shaft 204. A worm 208 is fixedly connected to the other end of the driving shaft 204. The worm 208 is meshingly connected to a worm wheel 209. The worm wheel 209 is penetrated and connected with a push rod 304 extending into the interior of the cleaning box 103; the side of the worm wheel 209 is rotatably connected to a support frame 210 fixedly connected to the upper surface of the workbench 1, the worm wheel 209 is slidably connected to the push rod 304, and the push rod 304 is penetrated and connected to the support frame 210; when the cleaning nozzle 102 is spraying, its waste water will flow away through the drain port 104, and the cleaning box 103 has an opening and closing door to prevent water from splashing everywhere during cleaning. The outside of the driving shaft 204 is provided with a mechanical compartment fixedly connected to the workbench 1.

[0026] The middle part of the driving disk 202 is fixedly connected to a limiting disk 211, which fits with the engaging disk 203. The edge of the driving disk 202 is fixedly connected to a limiting post 212. The engaging disk 203 is provided with an engaging groove 213, and the limiting post 212 is engaged with the engaging groove 213. The limiting disk 211 can maintain the angle of the engaging disk 203 to prevent it from shaking after the limiting post 212 pushes the engaging disk 203 to rotate.

[0027] A conveyor belt 206 is sleeved on the driving wheel 205, and the other end of the conveyor belt 206 is meshedly connected with a driven wheel 207, and another worm 208 is fixedly connected to the side of the driven wheel 207. The driven wheel 207 is rotatably connected to the workbench 1, and both worms 208 are rotatably connected to the workbench 1; the conveyor belt 206 and the driven wheel 207 can ensure that both sides of the silicon carbide wafer rotate at the same time.

[0028] The fixing mechanism 3 includes a second motor 301 installed on the side of the workbench 1, and the output end of the second motor 301 is fixedly connected to a bidirectional screw 302, and the bidirectional screw 302 is sleeved with a sliding sleeve 303, and the sliding sleeve 303 is rotatably connected to the push rod 304; the middle part of the bidirectional screw 302 is a straight rod, and the straight rod passes through the water outlet 104.

[0029] One end of the push rod 304 extending into the cleaning box 103 is fixedly connected to a clamping sleeve 305, and the interior of the clamping sleeve 305 is rotatably connected to a micro screw 307, on which a screw sleeve 308 is sleeved, and the side of the screw sleeve 308 and the bottom of the clamping sleeve 305 are fixedly connected to a fixed clamping plate 309, and one end of the micro screw 307 is fixedly connected to a micro motor 306; the push rod 304 can push the clamping sleeve 305 to move, so as to adapt to silicon carbide wafers of various sizes, and the fixed clamping plate 309 can ensure that silicon carbide wafers of various thicknesses can be effectively clamped to prevent the silicon carbide wafers from slipping during rotation, and the micro motor 306 can make the installation of silicon carbide wafers semi-automatic, saving time.

[0030] The working principle of this utility model:

[0031] When the utility model works, the second motor 301 is first started to make the sliding sleeve 303 drive the bidirectional screw 302 to move, and finally the push rod 304 pushes the clamping sleeve 305 to move to a suitable distance, and the silicon carbide wafer is placed between the fixed clamping plates 309, and then the micro motor 306 is started to make the fixed clamping plates 309 clamp the silicon carbide wafer;

[0032] Then start the regulating motor 201 and the cleaning nozzle 102;

[0033] The cleaning nozzle 102 will continuously rinse the silicon carbide wafer from the upper side;

[0034] When the adjustment motor 201 is started, the driving disk 202 will rotate, and the limiting column 212 will be engaged in the engaging groove 213 and disengaged, so that the engaging disk 203 will rotate 90 degrees. At this time, through the driving wheel 205, the conveyor belt 206 and the driven wheel 207, the two engaging disks 203 will drive the driving shaft 204 to rotate, so that the worm 208 will drive the worm wheel 209 to rotate, and then the push rod 304 will drive the clamping sleeve 305 to rotate 90 degrees. After the rotation, this state is maintained for continuous flushing until the next time the limiting column 212 engages with the engaging groove 213.

[0035] The above is a detailed description of an embodiment of the utility model, but the content is only a preferred embodiment of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. An adjustable fixing assembly for cleaning a silicon carbide wafer, comprising a workbench (1), a support plate (101) being fixedly connected to one side of the workbench (1), a cleaning nozzle (102) being fixedly connected to the top of the support plate (101), a cleaning box (103) being installed on the upper surface of the workbench (1), the cleaning nozzle (102) being obliquely inserted into the cleaning box (103), and a water outlet (104) being located on the workbench (1) being opened inside the cleaning box (103); Features: An adjustment component (2) is provided at one corner of the upper surface of the workbench (1), and fixing mechanisms (3) are provided on both sides of the workbench (1); The adjusting assembly (2) comprises an adjusting motor (201) fixedly connected to the workbench (1); the output end of the adjusting motor (201) is fixedly connected to a driving disk (202); the driving disk (202) is snap-connected to a snap-connecting disk (203); the snap-connecting disk (203) is penetrated by a driving shaft (204); the driving shaft (204) is fixedly connected to a driving wheel (205); the other end of the driving shaft (204) is fixedly connected to a worm (208); the worm (208) is meshingly connected to a worm wheel (209); the worm wheel (209) is penetrated by a push rod (304) extending into the interior of the cleaning box (103).

2. The adjustable fixing assembly for cleaning a silicon carbide wafer according to claim 1, characterized in that: The middle of the driving disk (202) is fixedly connected to a limiting disk (211), the limiting disk (211) is fitted with the engaging disk (203), the edge of the driving disk (202) is fixedly connected to a limiting post (212), the engaging disk (203) is provided with an engaging groove (213), and the limiting post (212) is engaged with the engaging groove (213).

3. The adjustable fixing assembly for cleaning a silicon carbide wafer according to claim 1, characterized in that: A conveyor belt (206) is sleeved on the driving wheel (205), the other end of the conveyor belt (206) is meshingly connected with a driven wheel (207), and another worm (208) is fixedly connected to the side of the driven wheel (207).

4. The adjustable fixing assembly for cleaning a silicon carbide wafer according to claim 1, characterized in that: The fixing mechanism (3) comprises a second motor (301) installed on the side of the workbench (1); the output end of the second motor (301) is fixedly connected to a bidirectional screw rod (302); the bidirectional screw rod (302) is sleeved with a sliding sleeve (303); the sliding sleeve (303) is rotatably connected to a push rod (304).

5. The adjustable fixing assembly for cleaning a silicon carbide wafer according to claim 4, characterized in that: One end of the push rod (304) extending into the interior of the cleaning box (103) is fixedly connected to a clamping sleeve (305), and a micro screw (307) is rotatably connected inside the clamping sleeve (305). A screw sleeve (308) is sleeved on the micro screw (307), and the side of the screw sleeve (308) and the bottom of the clamping sleeve (305) are fixedly connected to a fixed clamping plate (309), and one end of the micro screw (307) is fixedly connected to a micro motor (306).

6. The adjustable fixing assembly for cleaning a silicon carbide wafer according to claim 1, characterized in that: The side of the worm wheel (209) is rotatably connected to a support frame (210) fixedly connected to the upper surface of the workbench (1), the worm wheel (209) is slidably connected to a push rod (304), and the push rod (304) is through-connected to the support frame (210).

7. The adjustable fixing assembly for cleaning a silicon carbide wafer according to claim 3, characterized in that: The driven wheel (207) is rotationally connected to the workbench (1), and the two worm gears (208) are both rotationally connected to the workbench (1).

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