High-pressure cleaning device

By adding pressure at the outlet of the high-pressure pump and designing support components in the high-pressure cleaning device, the problems of long cleaning time and waste of resources are solved, the use rate of medicine liquid and cleaning efficiency are improved, and the cleaning efficiency is improved by more than 50%.

CN222198074UActive Publication Date: 2024-12-20SHANGHAI BONA MICROELECTRONIC EQUIP CO LTD
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Patent Information

Application Number
CN202420922058.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-29
Publication Date
2024-12-20
Estimated Expiration
2034-04-29

AI Technical Summary

Technical Problem

The existing high-pressure cleaning devices have problems such as long cleaning time, waste of resources and low efficiency, especially the large amount of nitrogen and low drug use rate.

Method used

A high-pressure cleaning device is designed, including cleaning housing, support components and high-pressure nozzles. By increasing the pressure at the outlet of the high-pressure pump, the nitrogen usage is reduced, and the use rate and cleaning efficiency of the medicine liquid are improved through the filter and rotary swing arm. .

Benefits of technology

The nitrogen usage is reduced, the use rate of medicine liquid and high-pressure cleaning efficiency are improved, the cleaning efficiency is improved by more than 50%, and the stability and adaptability of the device are enhanced.

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Abstract

The utility model relates to the technical field of electronic semiconductors, and discloses a high-pressure cleaning device which comprises a cleaning shell and a supporting component arranged at the top of the cleaning shell. A cleaning pipeline is fixedly mounted at the top of the cleaning shell, a filter is fixedly mounted at the other end of the cleaning pipeline, a rotary swing arm is connected to the left side of the filter, a pressure release valve is connected to the left side of the rotary swing arm, and a high-pressure nozzle is mounted at the top of the cleaning pipeline between the rotary swing arm and the pressure release valve; the supporting component comprises a fixing support which is fixedly installed on the outer surface of the rotary swing arm. According to the high-pressure cleaning device, by increasing the pressure at the outlet of the high-pressure pump and reducing the usage amount of nitrogen, cost can be saved after a long time, meanwhile, a small amount of particulate matter is generated in the subsequent liquid medicine cleaning process through high-pressure cleaning, the property of recycled liquid medicine is reduced, the utilization rate of the liquid medicine is increased, and the cleaning efficiency of products is improved by 50% or above through high-pressure cleaning.
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Description

Technical Field

[0001] The utility model relates to the technical field of electronic semiconductors, in particular to a high-pressure cleaning device. Background Art

[0002] High-pressure cleaning devices are mainly used in the electronics and semiconductor industries to clean dirt particles and organic residues from product surfaces.

[0003] The current high-pressure cleaning method mainly uses a two-fluid cleaning method, which can only clean part of the particles and takes a long time to clean. In addition, during the cleaning process, the two-fluid gas consumption is large, which consumes energy excessively. Therefore, a high-pressure cleaning device is proposed. Utility Model Content

[0004] 1. Technical issues to be solved

[0005] In view of the deficiencies in the prior art, the utility model provides a high-pressure cleaning device, which has the advantages of reducing nitrogen usage and improving liquid medicine utilization and high-pressure cleaning efficiency, thereby solving the problems of long cleaning time, waste of resources and low cleaning efficiency.

[0006] (II) Technical solution

[0007] In order to achieve the above-mentioned purpose of reducing the amount of nitrogen used and improving the use rate of liquid medicine and the efficiency of high-pressure cleaning, the utility model provides the following technical solutions: a high-pressure cleaning device, including a cleaning shell and a supporting component, the supporting component is arranged on the top of the cleaning shell;

[0008] A liquid inlet pipe is provided on the right side of the cleaning shell, a cleaning pipe is fixedly installed on the top of the cleaning shell, a filter is fixedly installed on the other end of the cleaning pipe, a rotating swing arm is connected to the left side of the filter, a pressure relief valve is connected to the left side of the rotating swing arm, and a high-pressure nozzle is installed on the top of the cleaning pipe between the rotating swing arm and the pressure relief valve;

[0009] The supporting component comprises a fixing bracket, which is fixedly mounted on the outer surface of the rotating swing arm, and a fixing bolt fixedly connected to the filter is arranged on the right side of the fixing bracket.

[0010] As a preferred technical solution of the utility model, a high-pressure gauge is fixedly installed at the connection of the cleaning pipe located just above the cleaning shell, and a cleaning pipe connected to the filter is sleeved on the top of the high-pressure gauge, and the cleaning pipe is made of anti-corrosion material.

[0011] As a preferred technical solution of the utility model, cleaning pipes are sleeved on both sides of the rotating swing arm, the cleaning pipe on the right side is sleeved on the left end of the filter, the cleaning pipe on the left side is sleeved on the right end of the pressure relief valve, and the cleaning pipe on the left side is rotatably installed on the left side of the rotating swing arm.

[0012] As a preferred technical solution of the utility model, a connecting pipe fitting penetrated by a cleaning pipe is provided at the bottom of the high-pressure nozzle, a threaded cover is threadedly connected to the top of the high-pressure nozzle, a filter screen is fixedly installed on the inner side of the threaded cover, and a spray hole is provided at the top of the threaded cover.

[0013] As a preferred technical solution of the utility model, two upper and lower opposite telescopic shafts are fixedly installed on the left side of the fixed bracket, and the opposite ends of the two telescopic shafts are transmission-connected with fixed blocks, an upper support plate is fixedly installed on the bottom of the upper fixed block, and a lower support plate is fixedly installed on the top of the lower fixed block.

[0014] As a preferred technical solution of the utility model, the inner walls of the upper support plate and the lower support plate can be fitted on the outer surface of the cleaning pipe, buffer layers are provided on the opposite sides of the upper support plate and the lower support plate, and the cleaning pipe can be rotated on the inner side of the upper support plate and the lower support plate by rotating the swing arm.

[0015] The beneficial effects of the above preferred technical solution are: the design of the supporting component not only improves the stability and adaptability of the high-pressure cleaning device, but also enhances the protection of the cleaning pipeline, while ensuring the flexibility of operation, thereby improving the efficiency and effect of the cleaning work.

[0016] (III) Beneficial effects

[0017] Compared with the prior art, the utility model provides a high-pressure cleaning device, which has the following beneficial effects:

[0018] The high-pressure cleaning device reduces the amount of nitrogen used by increasing the pressure at the outlet of the high-pressure pump, thereby saving costs in the long term. At the same time, high-pressure cleaning produces a small amount of particulate matter in the subsequent liquid cleaning process, reduces the properties of the recovered liquid, and increases the liquid utilization rate. High-pressure cleaning also improves the cleaning efficiency of the product by more than 50%. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the planar structure of the utility model;

[0020] Figure 2 This is an enlarged structural diagram of the high-pressure nozzle of the utility model;

[0021] Figure 3 This is a schematic diagram of the structure of the support component of the utility model.

[0022] In the figure: 1. Cleaning shell; 2. Liquid inlet pipe; 3. Cleaning pipeline; 4. High-pressure gauge; 5. Filter; 6. Rotating swing arm; 7. Pressure relief valve; 8. High-pressure nozzle; 81. Connecting pipe fittings; 82. Threaded cover; 83. Spray hole; 84. Filter screen; 9. Fixed bracket; 91. Upper support plate; 92. Lower support plate; 93. Buffer layer; 94. Fixed block; 95. Telescopic shaft; 10. Fixing bolt. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] See also Figure 1-3 A high-pressure cleaning device comprises a cleaning shell 1 and a supporting component, wherein the supporting component is arranged on the top of the cleaning shell 1.

[0027] A liquid inlet pipe 2 is opened on the right side of the cleaning shell 1, a cleaning pipe 3 is fixedly installed on the top of the cleaning shell 1, a filter 5 is fixedly installed on the other end of the cleaning pipe 3, a rotating swing arm 6 is connected to the left side of the filter 5, a pressure relief valve 7 is connected to the left side of the rotating swing arm 6, and a high-pressure nozzle 8 is installed on the top of the cleaning pipe 3 between the rotating swing arm 6 and the pressure relief valve 7.

[0028] Among them, an additional path is added under the action of the air pump high pressure pump to increase the pressure at the liquid outlet. The high pressure output switch is fan-shaped (angle 10-15 degrees) or high pressure needle type (below 0.5mm), and the maximum output pressure of the pneumatic pump can reach 20Mpa.

[0029] In this embodiment, a high-pressure gauge 4 is fixedly installed at the connection of the cleaning pipe 3 located just above the cleaning shell 1, and the top of the high-pressure gauge 4 is sleeved with a cleaning pipe 3 connected to the filter 5, and the cleaning pipe 3 is made of anti-corrosion material.

[0030] Among them, the cleaning pipeline 3 after the output of the high-pressure pump can use an explosion-proof pipe.

[0031] In this embodiment, cleaning pipes 3 are sleeved on both sides of the rotating swing arm 6. The cleaning pipe 3 on the right is sleeved on the left end of the filter 5, and the cleaning pipe 3 on the left is sleeved on the right end of the pressure relief valve 7. The cleaning pipe 3 on the left is rotatably installed on the left side of the rotating swing arm 6.

[0032] In this embodiment, a connecting pipe 81 penetrated by the cleaning pipe 3 is provided at the bottom of the high-pressure nozzle 8, a threaded cover 82 is threadedly connected to the top of the high-pressure nozzle 8, a filter screen 84 is fixedly installed on the inner side of the threaded cover 82, and a spray hole 83 is provided at the top of the threaded cover 82.

[0033] Among them, the filter screen 84 of the 50um filter device is designed at the front end of the high-pressure pump, which can effectively filter out impurities and particulate matter before entering the spray hole 83, ensure the internal cleanliness of the high-pressure pump, and prevent impurities from damaging or blocking the spray hole 83.

[0034] The nozzle hole 83 is designed to have a smaller diameter. Reducing it helps to form a finer and more concentrated high-pressure jet flow, thereby enhancing the cleaning ability.

[0035] Adding a filter 5 after the output of the high-pressure pump can further filter out possible tiny impurities before entering the high-pressure nozzle 8 to prevent them from entering the high-pressure nozzle 8 and causing blockage or damage. This double filtering system can effectively extend the service life of the high-pressure pump and the high-pressure nozzle 8 and reduce the frequency of maintenance and replacement.

[0036] The supporting component comprises a fixing bracket 9 , which is fixedly mounted on the outer surface of the rotating swing arm 6 , and a fixing bolt 10 fixedly connected to the filter 5 is arranged on the right side of the fixing bracket 9 .

[0037] It should be noted that the design of the fixed bracket 9 enables the support component to be firmly mounted on the rotating swing arm 6, reducing the loosening or displacement that may occur during the high-pressure cleaning process, thereby enhancing the overall stability of the device.

[0038] In this embodiment, two upper and lower opposite telescopic shafts 95 are fixedly installed on the left side of the fixed bracket 9, and the opposite ends of the two telescopic shafts 95 are transmission-connected with fixed blocks 94. The upper fixed block 94 is fixedly installed with an upper support plate 91 at the bottom, and the lower fixed block 94 is fixedly installed with a lower support plate 92 at the top.

[0039] It should be noted that, through the design of the telescopic shaft 95, the upper support plate 91 and the lower support plate 92 can be adaptively adjusted according to the different diameters of the cleaning pipe 3. This design enables the high-pressure cleaning device to be suitable for cleaning pipes 3 of different sizes, thereby improving its adaptability and scope of use.

[0040] In this embodiment, the inner walls of the upper support plate 91 and the lower support plate 92 can be attached to the outer surface of the cleaning pipe 3, and a buffer layer 93 is provided on the opposite sides of the upper support plate 91 and the lower support plate 92. The cleaning pipe 3 can be rotated on the inner side of the upper support plate 91 and the lower support plate 92 by rotating the swing arm 6.

[0041] It should be noted that the inner walls of the upper support plate 91 and the lower support plate 92 are attached to the outer surface of the cleaning pipe 3, which can not only provide stable support for the cleaning pipe 3, but also prevent the pipe from being damaged during the cleaning process. At the same time, the setting of the buffer layer 93 further reduces the damage that may be caused to the cleaning pipe 3 due to friction or impact.

[0042] The working principle of the above embodiment is:

[0043] When high-pressure cleaning is selected in the product cleaning mode, the product runs at high speed on the cleaning disc, and the pressure relief valve 7 connected to the high-pressure pump cleaning pipeline 3 is closed. The air pump high-pressure pump increases the pressure of the liquid output under the pressure of the compressed air gas in the cleaning shell 1 to a certain extent, and transports it to the high-pressure nozzle 8 to spray toward the product surface. The high-pressure nozzle 8 continuously sprays high pressure to the product at a certain speed and angle on the rotating swing arm 6, and cleans the particles and residual organic matter on the product surface at a certain height and time.

[0044] The beneficial effects of the above embodiments are:

[0045] By increasing the pressure at the outlet of the high-pressure pump and reducing the amount of nitrogen used, it is convenient to save costs in the long run. At the same time, high-pressure cleaning produces a small amount of particulate matter in the subsequent liquid cleaning process, which reduces the properties of the recovered liquid and increases the liquid utilization rate. High-pressure cleaning also improves the cleaning efficiency of the product, increasing the efficiency by more than 50%.

[0046] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-pressure cleaning device, comprising a cleaning housing (1) and a supporting component, wherein the supporting component is arranged on the top of the cleaning housing (1); Features: A liquid inlet pipe (2) is provided on the right side of the cleaning housing (1); a cleaning pipe (3) is fixedly installed on the top of the cleaning housing (1); a filter (5) is fixedly installed on the other end of the cleaning pipe (3); a rotating swing arm (6) is connected to the left side of the filter (5); a pressure relief valve (7) is connected to the left side of the rotating swing arm (6); a high-pressure nozzle (8) is installed on the top of the cleaning pipe (3) between the rotating swing arm (6) and the pressure relief valve (7); The supporting component comprises a fixing bracket (9), wherein the fixing bracket (9) is fixedly mounted on the outer surface of the rotating swing arm (6), and a fixing bolt (10) fixedly connected to the filter (5) is arranged on the right side of the fixing bracket (9).

2. A high pressure cleaning device according to claim 1, characterized in that: A high-pressure gauge (4) is fixedly installed at the connection of the cleaning pipe (3) located directly above the cleaning shell (1), and a cleaning pipe (3) connected to the filter (5) is sleeved on the top of the high-pressure gauge (4), and the cleaning pipe (3) is made of anti-corrosion material.

3. A high pressure cleaning device according to claim 1, characterized in that: The left and right sides of the rotating swing arm (6) are both sleeved with cleaning pipes (3), the right cleaning pipe (3) is sleeved on the left end of the filter (5), the left cleaning pipe (3) is sleeved on the right end of the pressure relief valve (7), and the left cleaning pipe (3) is rotatably mounted on the left side of the rotating swing arm (6).

4. A high pressure cleaning device according to claim 1, characterized in that: The bottom of the high-pressure nozzle (8) is provided with a connecting pipe (81) penetrated by the cleaning pipe (3), the top of the high-pressure nozzle (8) is threadedly connected with a threaded cover (82), a filter screen (84) is fixedly installed on the inner side of the threaded cover (82), and a spray hole (83) is provided at the top of the threaded cover (82).

5. A high pressure cleaning device according to claim 1, characterized in that: Two upper and lower opposite telescopic shafts (95) are fixedly mounted on the left side of the fixed bracket (9), and opposite ends of the two telescopic shafts (95) are both drivingly connected to fixed blocks (94), an upper support plate (91) is fixedly mounted on the bottom of the upper fixed block (94), and a lower support plate (92) is fixedly mounted on the top of the lower fixed block (94).

6. A high pressure cleaning device according to claim 5, characterized in that: The inner walls of the upper support plate (91) and the lower support plate (92) can be fitted on the outer surface of the cleaning pipe (3), and buffer layers (93) are provided on opposite sides of the upper support plate (91) and the lower support plate (92). The cleaning pipe (3) can be rotated on the inner side of the upper support plate (91) and the lower support plate (92) by means of a rotating swing arm (6).