Silicon carbide wafer single-face grinding machine with protective cover

Abstract

The silicon carbide wafer single-face grinding machine comprises a device body, a protection mechanism is arranged in the middle of the device body, the protection mechanism comprises the protection cover, a plurality of first dustproof nets are embedded in the inner side wall of the protection cover, a connecting port is formed in one end of the outer side wall of the protection cover, and a plurality of second dustproof nets are embedded in the other end of the outer side wall of the protection cover. A second dustproof net is fixedly installed at the position, located on the inner side of the connecting port, of the protective cover, a through groove is formed in the middle of the bottom of the protective cover, a dust collecting pipe is slidably connected to the position, located on the outer side wall of the through groove, of the bottom of the protective cover, and the protective cover playing a dust intercepting role in the protective mechanism is connected with an exhaust fan. And after work is finished, the disintegrating slag in the dust accumulation groove can be swept out through the collecting groove, the dust accumulation pipe convenient to disassemble and assemble is arranged at the bottom of the protective cover, the dust accumulation pipe can be rapidly disassembled by pushing the dust accumulation pipe upwards and then pressing the dust accumulation pipe downwards, and dust in the dust accumulation pipe can be conveniently cleaned.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide wafers, in particular to a silicon carbide wafer single-side grinding machine with a protective cover. Background Art

[0002] Silicon carbide is an inorganic compound with high hardness, high melting point and excellent thermal conductivity. Silicon carbide is often used as a high temperature resistant material, in the manufacture of electronic components and abrasives, and has attracted much attention due to its excellent performance under extreme conditions.

[0003] The Chinese patent discloses a grinding and polishing device for silicon carbide wafers (publication number: CN217992125U). The device uses a protective cover to reduce dust, a grinding and polishing machine to grind and polish silicon carbide wafers, a polishing seat to place the left end storage tray and the right end storage tray, and the left end storage tray and the right end storage tray are used to increase the space for taking and storing materials. The support column is used to install and position the positioning plate. However, the device still has the following defects:

[0004] In the above device, the protective cover is only an isolation structure arranged on the outside of the grinding and polishing machine and the polishing seat, and the volume of the protective cover is too large. When the grinding and polishing machine is used to grind the silicon carbide wafer, the dust generated may be scattered everywhere inside the protective cover, thereby increasing the difficulty of cleaning when cleaning the inside of the protective cover. Utility Model Content

[0005] The technical problems to be solved by the utility model are as follows:

[0006] When a silicon carbide wafer is polished using a grinding and polishing machine, the generated dust may be scattered everywhere inside the protective cover, which may increase the difficulty of cleaning the inside of the protective cover.

[0007] The purpose of the utility model can be achieved through the following technical solutions:

[0008] A single-side grinding machine for silicon carbide wafers with a protective cover comprises a device body, a protective mechanism is arranged in the middle of the device body, and a grinding machine and an exhaust fan are arranged inside the device body;

[0009] Also includes:

[0010] The protection mechanism includes a protection cover, which is a ring-shaped cover with a hollow interior, and the inner wall of the protection cover is inlaid with a plurality of dustproof nets 1, and a connection port is opened at one end of the outer wall of the protection cover, and a dustproof net 2 is fixedly installed on the inner side of the connection port of the protection cover;

[0011] Wherein, a through groove is provided in the middle of the bottom of the protective cover, and the through groove of the protective cover is arranged in a ring shape;

[0012] Wherein, a dust collecting pipe is slidably connected to the bottom of the protective cover and the outer side wall of the through groove, and the dust collecting pipe is arranged in a ring shape.

[0013] As a further solution of the utility model: connecting sleeves are fixedly installed at the bottom of the protective cover and on both sides of the dust collecting pipe. The connecting sleeves are symmetrically arranged on both sides above the dust collecting pipe, and the dust collecting pipes are arranged in pairs around the bottom of the protective cover.

[0014] As a further solution of the utility model: the middle part of the connecting sleeve is hollowed out, and a clamping block is slidably connected to the inside of the middle part of the connecting sleeve; an inclined surface is provided at one end of the clamping block close to the hollow part of the connecting sleeve, and the inclined surface of the outer wall of the clamping block faces downward; a spring is fixedly connected to the other side of the clamping block, and the other end of the spring is fixedly connected to the connecting sleeve, and the clamping block and the spring are symmetrically arranged on both sides of the inner wall of the connecting sleeve.

[0015] As a further solution of the utility model: a connecting shaft is fixedly installed on the top of the dust collecting tube and below each connecting sleeve, the top of the connecting shaft is set as a hemisphere, the outer wall of the connecting shaft and below the hemisphere is provided with an extrusion ring, the upper and lower ends of the extrusion ring are set as cones, the middle diameter of the extrusion ring is larger than the top and bottom diameters, and the connecting shaft is located at the bottom of the hemisphere and is engaged with the extrusion ring.

[0016] As a further solution of the utility model: the outer wall of the connecting shaft located at the hemisphere is slidably connected to the inner wall of the connecting sleeve, the outer wall of the connecting shaft is slidably connected to the block, and the outer wall of the extrusion ring is slidably connected to the block.

[0017] As a further solution of the utility model: the device body includes a base, a placing table is fixedly installed on one side of the top of the base, the top outer side of the placing table is fixedly installed with the protective cover, a dust accumulation groove is opened on the top of the placing table and on the inner side of the dustproof net, the dust accumulation groove is arranged in a ring shape, and a collection groove is opened on the top of the placing table and at one end close to the dust accumulation groove.

[0018] As a further solution of the utility model: the other end of the top of the base is fixedly installed with the exhaust fan, the exhaust port of the exhaust fan is fixedly installed with a connecting pipe, the other end of the connecting pipe is fixedly connected to the connecting port, and the air outlet of the exhaust fan is fixedly connected with a dustproof bag.

[0019] Beneficial effects of the utility model:

[0020] (1) The utility model blocks dust generated when the silicon carbide wafer is polished by setting a protective mechanism on the side of the placement table. The protective cover inside the protective mechanism, which plays a role in intercepting dust, is connected to the exhaust fan. When the exhaust fan is started, the protective cover forms a negative pressure around the silicon carbide wafer, thereby forming an airflow to push dust and debris into the dust storage tank. After the work is completed, the debris inside the dust storage tank can be swept out through the collection tank;

[0021] (2) Some smaller dust particles remain inside the protective cover, and a dust collection tube that is easy to disassemble is provided at the bottom of the protective cover. The dust collection tube can be quickly disassembled by pushing it upward and then pressing it downward, making it convenient to clean the dust inside the dust collection tube;

[0022] (3) The air outlet of the exhaust fan in the device is connected to a dust bag. Some small dust particles pass through the exhaust fan and are discharged from the air outlet. The dust bag intercepts and collects the dust to prevent pollution of the external environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The utility model is further described below in conjunction with the accompanying drawings.

[0024] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0025] Figure 2 It is a schematic diagram of the top view of the placement table in the utility model;

[0026] Figure 3 It is a schematic cross-sectional view of the overall structure of the protective cover in the utility model;

[0027] Figure 4 yes Figure 3 A schematic diagram of the enlarged structure of region A;

[0028] Figure 5 It is a schematic diagram of the internal structure of the connecting sleeve in the utility model;

[0029] Figure 6 It is a cross-sectional view of the connecting sleeve and the connecting shaft after being engaged in the utility model.

[0030] In the figure: 1. device body; 101. base; 102. placing table; 103. dust storage tank; 104. grinder; 105. exhaust fan; 106. connecting pipe; 107. dust bag; 108. collecting tank; 2. protection mechanism; 201. protection cover; 202. dust net 1; 203. dust net 2; 204. connecting port; 205. dust collecting pipe; 206. connecting sleeve; 207. connecting shaft; 208. extrusion ring; 209. block; 210. spring. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] like Figure 1-6 As shown, a single-side grinder for silicon carbide wafers with a protective cover comprises a device body 1, a protective mechanism 2 is arranged in the middle of the device body 1, and a grinder 104 and an exhaust fan 105 are arranged inside the device body 1; wherein, the protective mechanism 2 comprises a protective cover 201, the protective cover 201 is a ring-shaped cover connected at the end and hollow inside, the inner side wall of the protective cover 201 is inlaid with a plurality of dust-proof nets 202, a connecting port 204 is provided at one end of the outer side wall of the protective cover 201, and a dust-proof net 203 is fixedly installed on the inner side of the connecting port 204 of the protective cover 201; wherein, a through groove is provided in the middle of the bottom of the protective cover 201, and the through groove of the protective cover 201 is arranged in a ring shape; wherein, a dust collecting pipe 205 is slidably connected to the bottom of the protective cover 201 and the outer side wall of the through groove, and the dust collecting pipe 205 is arranged in a ring shape, as shown in FIG. Figure 3-Figure 4 As shown, the mesh aperture of the dustproof net 1 202 is larger than the mesh aperture of the dustproof net 2 203;

[0033] A connecting sleeve 206 is fixedly installed at the bottom of the protective cover 201 and on both sides of the dust collecting pipe 205. The connecting sleeves 206 are symmetrically arranged on both sides above the dust collecting pipe 205, and the dust collecting pipes 205 are arranged in pairs around the bottom of the protective cover 201. The middle part of the connecting sleeve 206 is hollowed out, and a clamping block 209 is slidably connected to the middle part of the connecting sleeve 206. An inclined surface is provided at one end of the clamping block 209 close to the hollow part of the connecting sleeve 206, and the outer wall inclined surface of the clamping block 209 faces downward, and the other side of the clamping block 209 is fixedly connected with a spring 210, and the other end of the spring 210 is fixedly connected to the connecting sleeve 206. The clamping block 209 and the spring 210 are symmetrically arranged on both sides of the inner wall of the connecting sleeve 206, such as Figure 5-Figure 6 As shown, the spring 210 pushes the block 209 to return to its original position. When the inclined side of the block 209 is pushed in the vertical direction, the block 209 is subjected to a force in the horizontal direction, so that the block 209 can be retracted.

[0034] A connecting shaft 207 is fixedly installed at the top of the dust collecting tube 205 and below each connecting sleeve 206. The top of the connecting shaft 207 is set as a hemisphere, and an extrusion ring 208 is sleeved on the outer wall of the connecting shaft 207 and below the hemisphere. The upper and lower ends of the extrusion ring 208 are both set as cones, and the middle diameter of the extrusion ring 208 is larger than the top and bottom diameters, and the connecting shaft 207 is located at the bottom of the hemisphere and is engaged with the extrusion ring 208. Figure 5-Figure 6 As shown, the hemispherical body at the top of the connecting shaft 207 facilitates pushing the inclined side of the block 209, and the top and bottom cones of the extrusion ring 208 also facilitate pushing the inclined side of the block 209;

[0035] The outer wall of the connecting shaft 207 located in the hemisphere is slidably connected to the inner wall of the connecting sleeve 206, and the outer wall of the connecting shaft 207 is slidably connected to the block 209, and the outer wall of the extrusion ring 208 is slidably connected to the block 209. Figure 6 As shown, after the top of the connecting shaft 207 passes through the block 209 and reaches the top of the block 209, the spring 210 pushes the block 209 to hold the connecting shaft 209 against the connecting shaft 209 to prevent the connecting shaft 209 from falling;

[0036] The device body 1 includes a base 101, a placing table 102 is fixedly installed on one side of the top of the base 101, the top outer side of the placing table 102 is fixedly installed with the protective cover 201, a dust accumulation groove 103 is opened on the top of the placing table 102 and located on the inner side of the dustproof net 202, and the dust accumulation groove 103 is set in an annular shape, and a collection groove 108 is opened on the top of the placing table 102 and close to one end of the dust accumulation groove 103. Figure 2 As shown, a cleaning brush is used to brush the dust in the dust collection tank 103 and guide it out of the collection tank 108;

[0037] The other end of the top of the base 101 is fixedly installed with the exhaust fan 105, the exhaust port of the exhaust fan 105 is fixedly installed with a connecting pipe 106, the other end of the connecting pipe 106 is fixedly connected to the connecting port 204, and the air outlet of the exhaust fan 105 is fixedly connected with a dust bag 107. Figure 1 As shown, the dust bag 107 intercepts and collects small dust particles.

[0038] The working principle of this utility model:

[0039] The silicon carbide wafer is placed on the placement table 102 and polished by the grinder 104. At this time, the exhaust fan 105 is started to extract the gas inside the protective cover 201 through the connecting pipe 106, so that negative pressure is generated inside the protective cover 201, and the airflow pushes the dust and debris generated during the polishing to move to the dustproof net 202. The debris moves to the top of the dust storage tank 103 and then falls to the bottom. After the polishing is completed, the debris inside the dust storage tank 103 is brushed by a cleaning brush and discharged from the collection tank 108;

[0040] Secondly, some dust passes through the dustproof net 202 and stays inside the dust collecting tube 205. After the grinding is completed, the dust collecting tube 205 is pushed upward, and the hemisphere at the top of the connecting shaft 207 pushes away the inclined end of the block 209, and then the extrusion ring 208 pushes away the inclined end of the block 209. When the spring 210 drives the block 209 to reset, the block 208 is against the lower end of the extrusion ring 208. At this time, the dust collecting tube 205 is pulled down, and the lower end of the block 209 pushes the block 209 away again. Since the block 208 and the extrusion ring 208 are in an integrated state at this time, the dust collecting tube 205 is continued to be pulled down. After the spacing between the blocks 208 increases, the top hemisphere of the connecting shaft 207 falls close to the block 209, and finally the connecting shaft 207 is separated from the connecting sleeve 206 as a whole.

[0041] The above is a detailed description of an embodiment of the utility model, but the content is only a preferred embodiment of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. A single-side grinding machine for silicon carbide wafers with a protective cover, comprising a device body (1), a protective mechanism (2) being arranged in the middle of the device body (1), and a grinding machine (104) and an exhaust fan (105) being arranged inside the device body (1); It is characterized in that Also includes: The protection mechanism (2) comprises a protection cover (201), the protection cover (201) is a ring-shaped cover connected at the ends and hollow inside, the inner wall of the protection cover (201) is inlaid with a plurality of dustproof nets (202), a connection port (204) is opened at one end of the outer wall of the protection cover (201), and a dustproof net (203) is fixedly installed on the inner side of the connection port (204) of the protection cover (201); A through groove is provided in the middle of the bottom of the protective cover (201), and the through groove of the protective cover (201) is arranged in a ring shape; A dust collecting pipe (205) is slidably connected to the bottom of the protective cover (201) and the outer wall of the through groove, and the dust collecting pipe (205) is arranged in a ring shape.

2. A single-side grinding machine for silicon carbide wafers with a protective cover according to claim 1, characterized in that: A connecting sleeve (206) is fixedly installed at the bottom of the protective cover (201) and on both sides of the dust collecting pipe (205); the connecting sleeve (206) is symmetrically arranged on both sides above the dust collecting pipe (205), and the dust collecting pipes (205) are arranged in pairs around the bottom of the protective cover (201).

3. A single-side grinding machine for silicon carbide wafers with a protective cover according to claim 2, characterized in that: The middle part of the connecting sleeve (206) is hollowed out, and a clamping block (209) is slidably connected inside the middle part of the connecting sleeve (206). An inclined surface is provided at one end of the clamping block (209) close to the hollowed-out part of the connecting sleeve (206), and the inclined surface of the outer wall of the clamping block (209) faces downward. A spring (210) is fixedly connected to the other side of the clamping block (209), and the other end of the spring (210) is fixedly connected to the connecting sleeve (206). The clamping block (209) and the spring (210) are symmetrically arranged on both sides of the inner wall of the connecting sleeve (206).

4. The single-side grinding machine for silicon carbide wafers with a protective cover according to claim 1, characterized in that: A connecting shaft (207) is fixedly mounted on the top of the dust collecting pipe (205) and below each connecting sleeve (206); the top of the connecting shaft (207) is configured as a hemisphere; an extrusion ring (208) is sleeved on the outer wall of the connecting shaft (207) and below the hemisphere; the upper and lower ends of the extrusion ring (208) are configured as cones; the diameter of the middle portion of the extrusion ring (208) is larger than the diameters of the top and bottom ends; and the connecting shaft (207) is located at the bottom of the hemisphere and is snap-connected to the extrusion ring (208).

5. The single-side grinding machine for silicon carbide wafers with a protective cover according to claim 4, characterized in that: The outer wall of the connecting shaft (207) located on the hemisphere is slidably connected to the inner wall of the connecting sleeve (206), and the outer wall of the connecting shaft (207) is slidably connected to the block (209), and the outer wall of the extrusion ring (208) is slidably connected to the block (209).

6. The single-side grinding machine for silicon carbide wafers with a protective cover according to claim 1, characterized in that: The device body (1) comprises a base (101), a placing table (102) is fixedly mounted on one side of the top of the base (101), the top outer side of the placing table (102) is fixedly mounted to the protective cover (201), a dust collection groove (103) is provided at the top of the placing table (102) and on the inner side of a dustproof net (202), the dust collection groove (103) is arranged in a ring shape, and a collecting groove (108) is provided at the top of the placing table (102) and at one end close to the dust collection groove (103).

7. A single-side grinding machine for silicon carbide wafers with a protective cover according to claim 6, characterized in that: The other end of the top of the base (101) is fixedly mounted to the exhaust fan (105), a connecting pipe (106) is fixedly mounted to the exhaust port of the exhaust fan (105), the other end of the connecting pipe (106) is fixedly connected to the connecting port (204), and a dustproof bag (107) is fixedly connected to the air outlet of the exhaust fan (105).

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