Storage tank for disilane production

Abstract

The utility model discloses a storage tank for disilane production, which comprises a protection box, a storage tank body and a protection component, the storage tank body is arranged in the protection box, the protection component is fixedly arranged in the protection box, and the internal storage tank body is protected by the protection component to prevent air leakage. The protection assembly comprises a leakproof cavity, a vacuum pump, a top cover, an air inlet pipe, a sealing cover and an air inlet valve, the leakproof cavity is formed in the protection box and arranged on the outer side of the storage tank body, and the vacuum pump is fixedly installed on one side of the protection box; the effect of protecting the storage tank body is achieved by arranging the protection box, when the vacuum pump is driven to be used, an inner cavity of the storage tank body is changed into a vacuum cavity through the vacuum pump, after silane gas leaks from the storage tank body, the change can be detected through the alarm, and the alarm rings and flickers, so that the silane gas is prevented from leaking out of the storage tank body. Leakage can be quickly known, and safety is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of storage equipment, in particular to a storage tank for disilane production. Background Art

[0002] As an important chemical raw material, disilane plays a key role in many industries, especially in high-tech fields such as solar cells, amorphous silicon films, and chemical deposition. Due to its special chemical properties, disilane appears as a colorless and transparent gas at room temperature and pressure, and has a pungent odor. In addition, disilane is highly flammable and explosive. When its concentration in the air exceeds 0.2%, it is extremely easy to burn or even explode; when the concentration is lower than 0.2%, it will react with oxygen to produce colorless silicon dioxide.

[0003] In the existing document 202320619040.9, the export and import of gas is very inconvenient, and the existing storage tanks may have problems such as insufficient sealing performance and susceptibility to external environmental influences, which may lead to leakage and quality degradation of disilane, thereby affecting the efficiency and safety of the entire production process. Therefore, the utility model proposes a storage tank for disilane production to solve the problems existing in the prior art. Utility Model Content

[0004] In view of the above problems, the purpose of the utility model is to propose a storage tank for disilane production. The storage tank for disilane production cooperates with the storage tank body, the anti-leakage cavity and the vacuum pump, and a protective box is provided to protect the storage tank body. When the vacuum pump is driven for use, the internal cavity of the storage tank body is converted into a vacuum cavity by the vacuum pump. When silane gas leaks from the storage tank body, the change is detected by an alarm, which rings and flashes, so that leakage can be quickly known, thereby improving safety.

[0005] To achieve the purpose of the utility model, the utility model is implemented through the following technical solutions: a storage tank for disilane production, comprising a protective box, a storage tank body and a protective assembly, the storage tank body is placed and installed inside the protective box, the protective assembly is fixedly installed inside the protective box, the storage tank body inside is protected by the protective assembly to prevent air leakage, the protective assembly comprises an anti-leakage chamber, a vacuum pump, a top cover, an air inlet pipe, a sealing cover and an air inlet valve, an anti-leakage chamber is opened inside the protective box, the anti-leakage chamber is arranged on the outside of the storage tank body, a vacuum pump is fixedly installed on one side of the protective box, the output end of the vacuum pump is arranged on the inside of the storage tank body, a top cover is fixedly installed on the top of the protective box, an air inlet pipe is arranged below the top cover, a sealing cover is movably installed above the top cover, an air inlet valve is fixedly installed above the storage tank body, and the air inlet valve is arranged below the air inlet pipe.

[0006] A further improvement is that a connecting head is movably installed above the storage tank body, the air intake valve is arranged between the air intake pipe and the connecting head, the air intake valve is connected to the connecting head and the air intake pipe, and the connecting head is detachably installed.

[0007] A further improvement is that a mounting plate is rotatably mounted on one side of the storage tank body, an air outlet pipe is fixedly connected to one side of the mounting plate, an air outlet valve is fixedly mounted on one side of the air outlet pipe, and the air outlet valve is arranged on one side of the protective box.

[0008] A further improvement is that an alarm is fixedly mounted on one side above the top cover, a control panel is fixedly mounted on the front of the top cover, and the control panel is electrically connected to the inside of the protective box.

[0009] A further improvement is that a connecting column is movably installed between the protection box and the top cover.

[0010] A further improvement is that a heat-insulating layer is fixedly installed inside the protection box, and the heat-insulating layer is arranged on the outside of the storage tank body.

[0011] A further improvement is that a sealing door is movably mounted on the front of the protection box, and a handle is fixedly mounted on the front of the sealing door.

[0012] The beneficial effects of the utility model are as follows: the utility model provides a protective box to protect the storage tank body through the coordinated use of the storage tank body, the anti-leakage cavity and the vacuum pump; when the vacuum pump is driven for use, the internal cavity of the storage tank body is converted into a vacuum cavity by the vacuum pump; when the silane gas leaks from the storage tank body, the change is detected by the alarm, which rings and flashes, so that the leakage can be quickly known, thereby improving safety; and through the provision of the anti-leakage cavity, when the storage tank body leaks, the gas will flow into the anti-leakage cavity to avoid flowing into the air, thereby ensuring the safety of the device; and the inlet pipe, the sealing cover, the inlet valve and the outlet valve are coordinated to import and export disilane, so that the disilane can be used at any time. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor.

[0014] Figure 1 It is a front schematic diagram of the utility model;

[0015] Figure 2 It is a front sectional view of the utility model.

[0016] Among them: 1. Protection box; 2. Storage tank body; 3. Anti-leakage chamber; 4. Vacuum pump; 5. Top cover; 6. Inlet pipe; 7. Sealing cover; 8. Inlet valve; 9. Connector; 10. Mounting plate; 11. Outlet pipe; 12. Outlet valve; 13. Alarm; 14. Control panel; 15. Connecting column; 16. Insulation layer; 17. Sealed door; 18. Handle. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the practical embodiment to clearly and completely describe the technical solution in the practical embodiment. Obviously, the described embodiment is only a part of the embodiment of the practical, not all of the embodiments. Based on the embodiment in the practical, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this practical.

[0018] In the description of this utility model, it should be noted that, unless otherwise clearly specified and limited, the terms installation, connection and connection should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0019] according to Figure 1 , Figure 2As shown, this embodiment provides a storage tank for disilane production, including a protective box 1, a storage tank body 2 and a protective component. The storage tank body 2 is placed and installed inside the protective box 1, and the protective component is fixedly installed inside the protective box 1. The storage tank body 2 inside is protected by the protective component to prevent air leakage. The protective component includes an anti-leakage chamber 3, a vacuum pump 4, a top cover 5, an air inlet pipe 6, a sealing cover 7 and an air inlet valve 8. The interior of the protective box 1 is provided with an anti-leakage chamber 3, and the anti-leakage chamber 3 is arranged on the outside of the storage tank body 2. The anti-leakage chamber 3 is arranged on the outside of the storage tank body 2 to prevent the leakage of disilane for temporary storage. One side of the protective box 1 A vacuum pump 4 is fixedly installed, and the output end of the vacuum pump 4 is arranged on the inner side of the storage tank body 2. The interior of the storage tank body 2 is evacuated by driving the vacuum pump 4. A top cover 5 is fixedly installed on the top of the protective box 1, and an air inlet pipe 6 is arranged below the top cover 5. By opening the top cover 5 and utilizing the air inlet pipe 6, a sealing cover 7 is movably installed above the top cover 5. The sealing cover 7 is opened to introduce disilane into the air inlet pipe 6. An air inlet valve 8 is fixedly installed above the storage tank body 2, and the air inlet valve 8 is arranged below the air inlet pipe 6. The air inlet valve 8 is driven to open to introduce disilane into the storage tank body 2. Various protections are provided to facilitate the good storage and use of disilane.

[0020] A connector 9 is movably installed on the top of the storage tank body 2, and the air intake valve 8 is arranged between the air intake pipe 6 and the connector 9. The air intake valve 8 is connected to the connector 9 and the air intake pipe 6. The connector 9 is detachably installed. The setting of the connector 9 facilitates the connection of different air intake pipes 6 and the installation of different storage tank bodies 2 for gas conduction, thereby improving the functionality of the device.

[0021] A mounting plate 10 is rotatably mounted on one side of the storage tank body 2, an air outlet pipe 11 is fixedly connected to one side of the mounting plate 10, and an air outlet valve 12 is fixedly mounted on one side of the air outlet pipe 11. The mounting plate 10 is used to facilitate installation of the air outlet pipe 11 on one side of the storage tank body 2, and the air outlet valve 12 is arranged on one side of the protective box 1. When the internal gas needs to be discharged, the air outlet valve 12 is driven to drive the air outlet pipe 11 to discharge the internal disilane, so that the air outlet pipe 11 can be disassembled, installed and replaced at any time.

[0022] An alarm 13 is fixedly installed on one side above the top cover 5, and an alarm is sounded through the alarm 13 when a leak occurs in the storage tank body 2. A control panel 14 is fixedly installed on the front of the top cover 5, and the control panel 14 is electrically connected to the inside of the protective box 1. The entire device is operated and used through the control panel 14.

[0023] A connecting column 15 is movably installed between the protection box 1 and the top cover 5 , and the protection box 1 and the top cover 5 are connected by the setting of the connecting column 15 .

[0024] A heat-insulating layer 16 is fixedly installed inside the protection box 1 , and the heat-insulating layer 16 is arranged outside the storage tank body 2 . The temperature inside the storage tank body 2 is controlled by the heat-insulating layer 16 , so that the storage tank body 2 can maintain a balanced temperature.

[0025] A sealing door 17 is movably installed on the front of the protective box 1, and the protective box 1 is sealed by the sealing door 17. A handle 18 is fixedly installed on the front of the sealing door 17. The sealing door 17 can be opened by pulling the handle 18 to perform maintenance or installation operations on the inside of the protective box 1 when the storage tank is not in use.

[0026] When the storage tank for disilane production is used, the internal storage tank body 2 is protected by a protective component to prevent air leakage, and the anti-leakage cavity 3 is set on the outside of the storage tank body 2 to prevent leakage of disilane for temporary storage, and the interior of the storage tank body 2 is evacuated by driving the vacuum pump 4, and the air inlet pipe 6 in the top cover 5 is opened, and the sealing cover 7 is opened to introduce the disilane into the air inlet pipe 6, and then the air inlet valve 8 is driven to open to introduce the disilane into the storage tank body 2. Various protections facilitate the storage and use of disilane, and the setting of the connector 9 facilitates the connection of different air inlet pipes 6 and the installation of different storage tank bodies 2 for gas conduction, thereby improving the functionality of the device, and driving the outlet when the internal gas needs to be discharged. The air valve 12 drives the air outlet pipe 11 to discharge the internal disilane for use. The installation plate 10 makes it convenient to install the air outlet pipe 11 on one side of the storage tank body 2, so that the air outlet pipe 11 can be disassembled, installed and replaced at any time. The alarm 13 will sound an alarm when a leak occurs in the storage tank body 2. The entire device is operated and used through the control panel 14. The protection box 1 is connected to the top cover 5 through the setting of the connecting column 15. The temperature inside the storage tank body 2 is controlled by the insulation layer 16 to keep the temperature of the storage tank body 2 balanced. The protection box 1 is sealed by the sealing door 17. The sealing door 17 is pulled by the handle 18 to facilitate the opening of the sealing door 17 so that the inside of the protection box 1 can be repaired or installed when the storage tank is not in use.

[0027] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A storage tank for disilane production, comprising a protection box (1), a storage tank body (2) and a protection assembly, characterized in that: A storage tank body (2) is placed and installed inside the protection box (1), and a protection component is fixedly installed inside the protection box (1), and the protection component includes an anti-leakage chamber (3), a vacuum pump (4), a top cover (5), an air intake pipe (6), a sealing cover (7) and an air intake valve (8). The protection box (1) is provided with an anti-leakage chamber (3), a vacuum pump (4) is fixedly installed on one side of the protection box (1), a top cover (5) is fixedly installed on the top of the protection box (1), an air intake pipe (6) is arranged below the top cover (5), a sealing cover (7) is movably installed above the top cover (5), and an air intake valve (8) is fixedly installed above the storage tank body (2), and the air intake valve (8) is arranged below the air intake pipe (6).

2. A storage tank for disilane production according to claim 1, characterized in that: A connecting head (9) is movably mounted above the storage tank body (2); the air intake valve (8) is arranged between the air intake pipe (6) and the connecting head (9); the air intake valve (8) is connected to the connecting head (9) and the air intake pipe (6); and the connecting head (9) is detachably mounted.

3. A storage tank for disilane production according to claim 1, characterized in that: A mounting plate (10) is rotatably mounted on one side of the storage tank body (2); an air outlet pipe (11) is fixedly connected to one side of the mounting plate (10); an air outlet valve (12) is fixedly mounted on one side of the air outlet pipe (11); and the air outlet valve (12) is arranged on one side of the protective box (1).

4. A storage tank for disilane production according to claim 1, characterized in that: An alarm (13) is fixedly mounted on one side above the top cover (5), and a control panel (14) is fixedly mounted on the front of the top cover (5); the control panel (14) is electrically connected to the inside of the protection box (1).

5. A storage tank for disilane production according to claim 1, characterized in that: A connecting column (15) is movably installed between the protection box (1) and the top cover (5).

6. A storage tank for disilane production according to claim 1, characterized in that: A heat-insulating layer (16) is fixedly installed inside the protection box (1), and the heat-insulating layer (16) is arranged on the outside of the storage tank body (2).

7. A storage tank for disilane production according to claim 1, characterized in that: A sealing door (17) is movably mounted on the front of the protection box (1), and a handle (18) is fixedly mounted on the front of the sealing door (17).

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