Semi-automatic probe station pull-out mechanism

Abstract

A semi-automatic probe station pull-out mechanism relates to the technical field of sliding structures, and comprises a fixed structure which comprises a fixed plate, a fixed guide rail and a fixed sliding block, and the fixed guide rail and the fixed sliding block are fixed on the same side surface of the fixed plate; the sliding structure comprises a sliding plate, a sliding guide rail and a sliding block, the sliding guide rail is parallel to the fixed guide rail, the sliding guide rail and the sliding block are fixed to the same side face of the sliding plate, the fixed sliding block can slide on the sliding guide rail, the sliding block is used for sliding on the fixed guide rail, and the sliding plate and the fixed plate can be in an overlapped state; the braking device comprises a braking button and a braking block, the braking button is installed on the sliding plate, the braking block is installed on the fixed sliding block, and after the braking button is pressed down, the braking block protrudes out of the fixed sliding block, so that the sliding guide rail cannot move relative to the fixed sliding block. When the pull-out mechanism is folded, the fixed plate and the sliding plate are overlapped, and the guide rail and the sliding block are arranged between the fixed plate and the sliding plate, so that the size of the pull-out mechanism is smaller.

Description

Technical Field

[0001] The present application relates to the technical field of sliding structures, and in particular to a semi-automatic probe station pulling-out mechanism. Background Art

[0002] In the process of semiconductor material testing, a probe station is usually required. The probe station can perform precise and complex detection operations. The material to be tested usually needs to be moved in the probe station, so a mobile device is often configured in the probe station.

[0003] At present, the mobile device of the probe station often uses a guide rail to move the semiconductor material to be tested. The utility model patent announcement number CN218625296U discloses a large-stroke mobile module for a wafer test probe station, including a first mounting plate, a first screw slide and a first linear guide pair are arranged on the top of the first mounting plate, and the first screw slide is connected to the first linear guide pair through a second mounting plate. The large-stroke mobile module for the wafer test probe station, because the two ends of the screw rod are respectively plugged with the fixed axis and the fixed bearing, the screw rod can be quickly pulled out of the fixed frame after the end cover is separated from the fixed frame, and because the side support and the table body are split-type designs, after the side support and the table body are separated, the side support can be fixedly connected to the fixed frame by the first positioning pin and the second positioning pin, so that the fixed frame is used as a load-bearing member of the mechanism above the screw slide, and the table body can be taken out from the fixed frame for replacement. However, this large-stroke mobile module requires a large installation space, resulting in a large volume of the probe station and an increased space requirement. Summary of the invention

[0004] In order to solve the problem that the moving device of the probe station is relatively large, the present application provides a semi-automatic probe station pulling-out mechanism.

[0005] The semi-automatic probe station pulling mechanism provided in this application adopts the following technical solution:

[0006] A semi-automatic probe station pulling mechanism, comprising:

[0007] The fixing structure includes a fixing plate, a fixing guide rail and a fixing slide block, wherein the fixing guide rail and the fixing slide block are fixed to the same side of the fixing plate;

[0008] The sliding structure comprises a sliding plate, a sliding guide rail and a sliding slider, wherein the sliding guide rail is parallel to the fixed guide rail, the sliding guide rail and the sliding slider are fixed to the same side of the sliding plate, the fixed slider can slide on the sliding guide rail, the sliding slider is used to slide on the fixed guide rail, and the sliding plate can be in an overlapping state with the fixed plate;

[0009] The brake device comprises a brake button and a brake block. The brake button is mounted on the sliding plate and the brake block is mounted on the fixed slider. When the brake button is pressed, the brake block protrudes from the fixed slider, so that the sliding guide rail cannot move relative to the fixed slider.

[0010] By adopting the above technical scheme, the fixed plate and the sliding plate can overlap, so that the pull-out mechanism occupies a smaller space when not in use, and when the sliding plate is pulled out, it will only occupy a position the size of the sliding plate, which can reduce the space occupied by the pull-out mechanism while maintaining a longer moving distance. By arranging guide rails and sliders on both the sliding plate and the fixed plate, the sliding structure and the fixed structure can support each other when the pull-out mechanism is pulled out and slid, so as to keep the sliding process of the sliding plate stable, which is conducive to ensuring that the semiconductor device will not fall off or shift in position during the transportation process; through the braking device, the sliding plate can be quickly paused manually at any time during the sliding process, and through the brake button arranged on the sliding plate, the operator can press the brake button at any time when manually sliding the sliding structure, and the brake button will trigger the brake block, which will lock the sliding guide rail by protruding the fixed slider, so that the sliding plate can no longer slide relative to the fixed plate. Through the brake button and the brake block, the pull-out mechanism can manually control the position distance of the sliding plate, so that the pull-out mechanism can be used in different detection occasions, thereby increasing the applicability of the pull-out mechanism.

[0011] Optionally, the fixed plate and the sliding plate are both rectangular and have the same shape and size.

[0012] By adopting the above technical solution, the rectangle is conducive to extending the sliding distance while maintaining sliding stability, and the pull-out mechanism composed of the rectangular plate is easier to arrange in the probe station, reducing the required installation space.

[0013] Optionally, the fixed slider is close to an edge of the fixed plate, and when the fixed plate and the sliding plate overlap, the sliding slider moves away from the fixed slider.

[0014] By adopting the above technical solution, during the sliding process, the sliding plate will move relative to the fixed plate, and the sliding guide rail is fixed on the sliding plate, and the fixed guide rail is fixed on the fixed plate. Therefore, during sliding, the moving direction of the fixed slider relative to the sliding guide rail is opposite to the moving direction of the sliding slider relative to the fixed guide rail. In order to extend the sliding distance of the sliding plate, it is necessary to keep the fixed slider and the sliding slider as far apart as possible when the fixed plate and the sliding plate overlap, which is beneficial to increase the moving distance of the pulling mechanism.

[0015] Optionally, the number of the fixed guide rails is two, the number of the sliding guide rails is one, and the sliding guide rail is arranged between the fixed guide rails.

[0016] By adopting the above technical solution, the three guide rails are conducive to improving the stability of the pulling mechanism. Since the fixed structure is fixed on the support, by arranging two fixed guide rails on the fixed plate and a sliding guide rail on the sliding plate, the sliding burden of the sliding structure can be reduced. By arranging the sliding guide rail between the fixed guide rails, the support of the sliding plate during the sliding process can be more stable.

[0017] Optionally, the sliding structure also includes a handle.

[0018] By adopting the above technical solution, since the semi-automatic pulling mechanism usually requires manual control of the sliding distance of the sliding structure, a handle is provided on the sliding structure to make manual control of the sliding more convenient.

[0019] Optionally, the brake button is arranged on the handle.

[0020] By adopting the above technical solution, when the sliding structure is manually controlled to slide by the handle, the braking of the sliding structure can be quickly and conveniently completed through the brake button on the handle. The operator can complete the operation with one hand, making the operation of the pulling mechanism more convenient.

[0021] Optionally, a bearing groove is provided on a side of the sliding plate away from the sliding guide rail for mounting semiconductor materials to be detected by the probe station.

[0022] By adopting the above technical solution, the bearing groove can be used to install and fix the semiconductor material to be detected. By moving the sliding plate, the semiconductor material in the bearing groove can move with the sliding plate, which can improve the stability of the pulling mechanism for carrying items.

[0023] Optionally, the brake device includes a conductive wire connecting the brake button and the brake block.

[0024] By adopting the above technical solution, the conduction line transmits the brake signal generated by the brake button to the brake block through an electrical signal. The signal is transmitted through the conduction line, so that the brake can be transmitted more quickly and the stability of the transmission is guaranteed, which is conducive to the rapid and stable braking of the sliding structure.

[0025] Optionally, the conductive wire is arranged in the sliding guide rail, and the sliding guide rail is provided with a connecting long hole, and the connecting long hole is used to not block the connection between the conductive wire and the brake block when the sliding guide rail slides.

[0026] By adopting the above technical solution, in order to reduce the space occupied by the pulling-out mechanism, the sliding plate and the fixed plate are arranged close to each other, and the conductive wire cannot be arranged between the two plates. Therefore, the conductive wire is arranged in the sliding guide rail. However, since the brake block is arranged on the outside of the sliding guide rail, the connection between the conductive wire and the brake block needs to pass through the sliding guide rail. Therefore, a connecting long hole is opened so that the sliding guide rail can maintain the connection between the conductive wire and the brake block during the sliding process, which is beneficial to ensure the stability of braking.

[0027] In summary, the present application includes at least one of the following beneficial technical effects:

[0028] 1. By installing guide rails and sliders on both the sliding structure and the fixed structure, the sliding structure and the fixed structure are more closely connected during the sliding process. When the pull-out mechanism is retracted, the sliding plate and the fixed plate overlap, which can reduce the space required for installing the pull-out mechanism. By providing a braking device, the sliding structure can be braked at any time during the sliding process and can be fixed at any position within the moving range, which is conducive to improving the applicability of the pull-out mechanism;

[0029] 2. The brake button and the brake block are connected by a conductive wire, so that the brake transmission is faster and more stable. The conductive wire is set in the sliding guide rail. On the one hand, since the sliding guide rail is the part of the sliding structure that always contacts the brake block, on the other hand, it can avoid the conductive wire being arranged between the fixed plate and the sliding plate, resulting in the fixed plate and the sliding plate not being able to fit closely, thereby increasing the installation space of the pull-out mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application;

[0031] Figure 2 It is a schematic diagram of the explosion structure of an embodiment of the present application;

[0032] Figure 3 is a schematic structural diagram of a sliding device according to an embodiment of the present application;

[0033] Figure 4 is a schematic structural diagram of a sliding guide rail according to an embodiment of the present application;

[0034] Figure 5 is a schematic cross-sectional structural diagram of a sliding guide rail according to an embodiment of the present application;

[0035] Figure 6 is a schematic structural diagram of a fixed slider according to an embodiment of the present application;

[0036] Figure 7 It is a schematic diagram of the cross-sectional structure of the brake pad according to an embodiment of the present application.

[0037] Figure numerals: 1. fixed structure; 11. fixed plate; 12. fixed guide rail; 13. fixed slider; 2. sliding structure; 21. sliding plate; 22. sliding guide rail; 22a. connecting long hole; 23. sliding slider; 24. handle; 25. bearing groove; 3. braking device; 31. braking button; 32. braking block; 33. conduction line; 34. connecting block. DETAILED DESCRIPTION

[0038] The following is combined with Figure 1 To Attachment Figure 7 , further details of this application are given.

[0039] A semi-automatic probe station pull-out mechanism, referring to Figure 1 , including a fixed structure 1, a sliding structure 2 and a braking device 3, the fixed structure 1 includes a fixed plate 11, a fixed guide rail 12 and a fixed slider 13, the fixed structure 1 is the fixed part of the pull-out mechanism, and the pull-out mechanism is fixed on the probe platform by fixing the fixed plate 11 on the probe platform, and two fixed guide rails 12 are provided on the fixed plate 11, which are respectively arranged on both sides of the fixed plate 11, so that the sliding structure 2 can be more stable when sliding out, and the fixed slider 13 is arranged between the two fixed guide rails 12; the sliding structure 2 includes a sliding plate 21, a sliding guide rail 22, a sliding slider 23, a handle 24 and a bearing groove 25, the sliding structure 2 is the movable bearing part of the pull-out mechanism, which can slide relative to the fixed structure 1, and can be used to carry the semiconductor material to be moved, the sliding plate 21 is provided with a sliding guide rail 22 on the lower surface, and the sliding guide rail 22 can slide in the fixed slider 13, and the two sides of the sliding guide rail 22 Each is provided with a sliding block 23, which can slide on the fixed guide rail 12. A bearing groove 25 is provided on the upper surface of the sliding plate 21. The bearing groove 25 is used to place semiconductor materials that need to be moved on the probe station. The sliding plate 21 is also provided with a handle 24. The handle 24 can provide a fulcrum for manually moving the sliding structure 2, making it easier to move the sliding structure 2. The fixed plate 11 and the sliding plate 21 are rectangular plates of equal size. When folded, the two plates overlap and occupy a smaller space. The guide rail and the slider for movement are arranged between the fixed plate 11 and the sliding plate 21, further reducing the space occupied by the pulling mechanism. It can be more conveniently arranged inside the probe station, so that the pulling mechanism can move a longer distance in a smaller volume. In addition, three guide rails are provided, wherein a sliding guide rail 22 is provided between the two fixed guide rails 12, so that the sliding structure 2 is more stable during the sliding process.

[0040] Referring to the figure, it also includes a braking device 3, which includes a braking button 31, a braking block 32, a conductive wire 33 and a connecting block 34. The braking device 3 can make the sliding structure 2 pause sliding at any time during the sliding process, and can be stably fixed in the pause position. The braking button 31 is installed on the handle 24, so that the operator can fix the sliding structure 2 with one hand at any time when sliding the sliding structure 2 through the handle 24, so that the operation of the pulling mechanism is more convenient. The braking block 32 is installed in the fixed slider 13, and is used to clamp the sliding guide rail 22 when braking and fixing are required. The conductive wire 33 is arranged in the sliding guide rail 22, one end of which is connected to the braking button 31, and the other end is connected to the connecting block 34. The connecting block 34 is arranged on the fixed slider 13 and connected to the braking block. 32 is connected in the fixed slider 13, and the brake block 32 receives the signal sent when the brake button 31 is pressed through the conductive line 33 and the connecting block 34. The connecting block 34 extends into the sliding guide rail 22. In order to keep the connecting block 34 able to continue to extend into the sliding guide rail 22 during the sliding process, a connecting long hole 22a is opened on the side of the sliding guide rail 22. The connecting block 34 extends into the sliding guide rail 22 through the connecting long hole 22a, and will not form an obstacle when the sliding guide rail 22 slides relative to the fixed slider 13. The conductive line 33 can make the signal sent by the brake button more stably and quickly transmitted to the brake block 32. The connecting block 34 and the connecting long hole 22a enable the sliding structure 2 to remain smooth when sliding, thereby avoiding the conductive line from pulling the sliding guide rail during the sliding process.

[0041] The implementation principle of the embodiment of the present application is: when using the pull-out mechanism, first place the semiconductor material to be tested in the carrying groove 25, then pull out the sliding plate 21 through the handle 24, the sliding slider 23 slides on the fixed guide rail 12, and the sliding guide rail 22 slides on the fixed slider 13. By providing guide rails and sliders on both the sliding plate 21 and the fixed plate 11, the pull-out mechanism is more stable during the sliding process. When it is pulled to a position where it needs to be paused and fixed, press the brake button 31. The brake button 31 is connected to the brake block 32 through the conductive line 33 and the connecting block 34. The brake block 32 clamps the sliding guide rail 22, so that the sliding structure 2 can no longer slide relative to the fixed structure 1, so that the sliding structure 2 completes the braking and fixing. When it needs to move again, press the brake button 31 again, and the brake block 32 releases the clamping of the sliding guide rail 22, so that the sliding structure 2 can slide again. When the pulling-out mechanism is folded, the fixed plate 11 and the sliding plate 21 overlap, and the guide rails and the sliders are arranged between the fixed plate 11 and the sliding plate 21, so that the pulling-out mechanism occupies less space when folded, and when pulled out, the three guide rails can disperse the force, so that the sliding structure 2 can slide stably, and the braking device 3 can be fixed by braking at any time, so that the sliding structure 2 can stop at any sliding position, so that the pulling-out mechanism can be applied to more scenarios.

[0042] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A semi-automatic probe station pulling mechanism, characterized in that: include: A fixed structure (1) comprising a fixed plate (11), a fixed guide rail (12) and a fixed slide block (13), wherein the fixed guide rail (12) and the fixed slide block (13) are fixed to the same side of the fixed plate (11); A sliding structure (2), comprising a sliding plate (21), a sliding guide rail (22) and a sliding slider (23), wherein the sliding guide rail (22) and the fixed guide rail (12) are parallel, the sliding guide rail (22) and the sliding slider (23) are fixed to the same side of the sliding plate (21), the fixed slider (13) can slide on the sliding guide rail (22), the sliding slider (23) is used to slide on the fixed guide rail (12), and the sliding plate (21) can be in an overlapping state with the fixed plate (11); The brake device (3) comprises a brake button (31) and a brake block (32), wherein the brake button (31) is mounted on the sliding plate (21), and the brake block (32) is mounted on the fixed sliding block (13); when the brake button (31) is pressed, the brake block (32) protrudes from the fixed sliding block (13), so that the sliding guide rail (22) cannot move relative to the fixed sliding block (13).

2. The semi-automatic probe station pulling mechanism according to claim 1, characterized in that: The fixed plate (11) and the sliding plate (21) are both rectangular and have the same shape and size.

3. The semi-automatic probe station pulling mechanism according to claim 1, characterized in that: The fixed slide block (13) is close to the edge of the fixed plate (11), and when the fixed plate (11) and the sliding plate (21) overlap, the sliding slide block (23) moves away from the fixed slide block (13).

4. The semi-automatic probe station pulling mechanism according to claim 1, characterized in that: The number of the fixed guide rails (12) is two, the number of the sliding guide rail (22) is one, and the sliding guide rail (22) is arranged between the fixed guide rails (12).

5. The semi-automatic probe station pulling mechanism according to claim 1, characterized in that: The sliding structure (2) also includes a handle (24).

6. The semi-automatic probe station pulling mechanism according to claim 5, characterized in that: The brake button (31) is arranged on the handle (24).

7. The semi-automatic probe station pulling mechanism according to claim 1, characterized in that: A bearing groove (25) is provided on the side of the sliding plate (21) away from the sliding guide rail (22) for mounting semiconductor materials to be detected by the probe station.

8. The semi-automatic probe station pulling mechanism according to claim 1, characterized in that: The braking device (3) comprises a conductive line (33), wherein the conductive line (33) connects the braking button (31) and the braking block (32).

9. The semi-automatic probe station pulling mechanism according to claim 8, characterized in that: The conductive wire (33) is arranged in the sliding guide rail (22), and the sliding guide rail (22) is provided with a connecting long hole (22a). The connecting long hole (22a) is used to prevent the connection between the conductive wire (33) and the brake block (32) from being blocked when the sliding guide rail (22) slides.

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