Self-adaptive partition suction cup

By designing an adaptive partition suction cup, using the cooperation of logic valves and negative pressure equipment, the problem that existing suction cups cannot meet the adsorption requirements of PCB boards of multiple sizes is solved, and the adsorption area is adaptively adjusted, meeting the customized PCB boards Production demand.

CN222213197UActive Publication Date: 2024-12-20HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
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Patent Information

Application Number
CN202323376153.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2023-12-11
Publication Date
2024-12-20
Estimated Expiration
2033-12-11

AI Technical Summary

Technical Problem

The existing suction cups cannot meet the adsorption needs of PCB boards of multiple sizes, especially customized PCB boards, which cannot effectively solve the adsorption problems of silicon wafers of different specifications.

Method used

An adaptive partition suction cup is designed, using a logic valve arranged in an array. The air inlet and outlet of the logic valve are respectively arranged at both ends of the air conduction channel. Through the cooperation of the piston and the elastic member, the negative pressure device is used to logic. When the valve is not covered by the plate, it will prevent air leakage and generate adsorption force when covered by the plate, achieving adaptive changes in the adsorption area.

Benefits of technology

Adaptive adjustment of adsorption area is achieved according to the actual size of the PCB board, meeting the production needs of PCB boards of various sizes, and improving production efficiency and flexibility.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a self-adaptive partition sucker, which belongs to the technical field of suckers and comprises a plurality of logic valves arranged in an array, air outlets of the logic valves are communicated with negative pressure equipment, and air inlets of the logic valves form an adsorption plane for adsorbing plates; the logic valve comprises an air guide channel and a piston, and an air inlet and an air outlet are formed in the two ends of the air guide channel respectively. The piston is movably arranged between the air inlet and the air outlet through an elastic piece, and an annular air guide gap is formed between the piston and the inner wall of the air guide channel; wherein the piston in the logic valve of which the air inlet is not covered by the plate blocks the air outlet through the suction force of the negative pressure equipment. According to the utility model, the suction area of the suction cup can be adaptively changed according to the actual size of the plate, so that the production requirements of plates with various sizes can be met.
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Description

Technical Field

[0001] The utility model belongs to the technical field of suction cups, and in particular relates to an adaptive partition suction cup. Background Art

[0002] The suction cup of the direct-write lithography machine is an important part of the lithography machine. Factors such as the size, flatness, adsorption method and adsorption force of the suction cup have an important impact on the actual production and manufacturing of PCB plate making. When using a direct-write lithography machine for PCB plate making, due to the large differences in PCB boards, the suction cup parts of the commonly used single-table and double-table models on the market are similar, and are all for PCB boards of conventional uniform sizes such as 24 and 32 inches. However, with the development of the market, the sizes of customized PCB boards are increasing, and the sizes are not uniform. The existing suction cups can no longer meet the demand. As a result, there is a gradual need to customize large-sized suction cups to meet the needs of PCB boards of different sizes through multi-area designs.

[0003] For example, the Chinese utility model patent with announcement number CN202221515U discloses a multi-zone vacuum suction cup for direct writing photolithography. It includes a rectangular disc-shaped suction cup body, a circular cavity is provided in the middle of one side of the suction cup body, and a cavity cover is provided at the cavity through screws; a mounting groove is provided on the other side of the suction cup body extending from one side edge to the middle, and more than two large semicircular vacuum grooves are evenly distributed on the suction cup body, wherein the innermost vacuum groove is located in the mounting groove, and the other vacuum grooves are all surrounded on the outside of the mounting groove; the bottom of each vacuum groove is connected to an air inlet pipe, and the air inlet of the air inlet pipe is located at the other side edge of the suction cup body; two stop pins are provided on the suction cup body outside each vacuum groove. The utility model realizes that a vacuum suction cup can absorb silicon wafers of different specifications, avoids the production of suction cups for silicon wafers of various specifications, and reduces production costs; at the same time, it avoids frequent replacement of silicon wafer suction cups during exposure, and improves production efficiency.

[0004] Although the technical solution provided by the above patent realizes the adsorption of silicon wafers of various specifications, facing more and more customized sizes, this solution can no longer meet the actual production needs. Therefore, in order to meet the demand for suction cups, the utility model will design an adaptive partition suction cup to solve this problem. Utility Model Content

[0005] The utility model aims to solve the problem that the current suction cup cannot meet the adsorption requirements of PCBs of various sizes, and proposes an adaptive partition suction cup.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] An adaptive partitioned suction cup comprises a plurality of logic valves arranged in an array, wherein the air outlets of the logic valves are connected to a negative pressure device, and the air inlets of the plurality of logic valves form an adsorption plane for adsorbing a plate;

[0008] The logic valve comprises:

[0009] An air guide channel, an air inlet and an air outlet are respectively arranged at two ends of the air guide channel; and

[0010] A piston is movably arranged between the air inlet and the air outlet through an elastic member, and an annular air guide gap is formed between the piston and the inner wall of the air guide channel;

[0011] Among them, the piston inside the logic valve whose air inlet is not covered by the plate blocks the air outlet through the suction force of the negative pressure device.

[0012] Preferably, a sealing ring is embedded inside the air guide channel and is coaxially arranged with the air guide channel. The piston inside the logic valve whose air inlet is not covered by the plate is pressed against the sealing ring by the suction force of the negative pressure device, so that the air outlet is blocked.

[0013] Preferably, the logic valve further comprises a valve body and a valve cover, the air outlet and the air guide channel are both provided on the valve body, and the air inlet is provided on the valve cover.

[0014] Preferably, a mounting plate is further included, and the logic valve is mounted inside a mounting hole opened on one of the plate surfaces of the mounting plate.

[0015] Preferably, the air inlet of the logic valve is arranged inside the mounting hole or flush with one of the plate surfaces of the mounting plate.

[0016] Preferably, a vacuum chamber is provided inside the mounting plate, the air outlet is communicated with the vacuum chamber, and the vacuum chamber is communicated with the negative pressure device.

[0017] Preferably, the mounting plate comprises an upper plate body and a lower plate body which are fixedly connected, the mounting hole is opened on the upper plate body, and the vacuum chamber is arranged between the upper plate body and the lower plate body.

[0018] Preferably, the vacuum chamber is opened on the plate surface of the lower plate body close to the upper plate body.

[0019] Preferably, it further comprises a suction cup pad arranged at the air inlet position of the logic valve, and an air hole is opened on the suction cup pad at a position corresponding to the air inlet.

[0020] Preferably, the method further comprises a filter screen arranged at the air inlet of the logic valve, wherein the filter screen is used for filtering the gas entering into the air inlet.

[0021] In summary, due to the adoption of the above technical solution, the beneficial effects of the utility model are:

[0022] In the utility model, by setting a plurality of logic valves arranged in an array, when the air inlet of the logic valve is not covered by the plate (such as PCB), the logic valve can be closed at the moment when the negative pressure device is started to prevent the logic valve from leaking. When the air inlet of the logic valve is covered by the plate (such as PCB), the air in the external environment cannot enter the interior of the air guide channel through the air inlet. Therefore, the negative pressure generated by the negative pressure device will be transmitted to the position of the air inlet, thereby completing the adsorption and fixation of the plate (such as PCB). The entire suction cup can adaptively change the adsorption area according to the actual size of the plate (such as PCB), thereby meeting the production needs of plates (such as PCB) of various sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic cross-sectional structure diagram of an adaptive zoned suction cup logic valve proposed by the utility model;

[0024] Figure 2 This is a schematic diagram of the unfolded structure of an adaptive zoned suction cup logic valve proposed by the utility model;

[0025] Figure 3 This is a structural schematic diagram of an adaptive partition suction cup mounting plate proposed by the utility model;

[0026] Figure 4 This is a schematic diagram of the exploded structure of an adaptive partition suction cup mounting plate proposed by the utility model;

[0027] Figure 5 The utility model is a schematic cross-sectional structure diagram of an adaptive partition suction cup mounting plate.

[0028] Legend: 1. Logic valve; 11. Valve body; 111a. Air inlet; 111b. Air outlet; 111c. Air guide channel; 111d. Air guide gap; 12. Piston; 13. Elastic member; 14. Sealing ring; 15. Valve cover; 2. Mounting plate; 21. Upper plate body; 211. Mounting hole; 22. Lower plate body; 23. Vacuum chamber; 3. Suction cup pad; 31. Air hole; 4. Filter. DETAILED DESCRIPTION

[0029] The utility model is described below in conjunction with specific embodiments.

[0030] like Figures 1 to 5As shown, the present embodiment provides an adaptive partition suction cup. Specifically, the adaptive partition suction cup includes a plurality of logic valves 1 arranged in an array. The air outlet 111b of the logic valve 1 is connected to the negative pressure device, and the air inlet 111a of the plurality of logic valves 1 forms an adsorption plane for adsorbing the plate. In the present embodiment, there is no specific limitation on the negative pressure device. For example, it may be an air pump. In actual use, a suitable negative pressure device may be selected according to the actual situation. The function of the negative pressure device in the present embodiment is to generate negative pressure, so that an adsorption force can be generated at the position of the air inlet 111a of the logic valve 1, and the plate (such as a PCB) covering the air inlet 111a of the logic valve 1 is firmly adsorbed and fixed, so as to perform related operations on the plate (such as a PCB).

[0031] like Figure 1 and Figure 2 As shown, the logic valve 1 comprises an air-guiding channel 111c and a piston 12. The air-guiding channel 111c is generally a cylindrical cavity, and the piston 12 is an annular shape. The matching relationship between the air-guiding channel 111c and the piston 12 is as follows.

[0032] The air inlet 111a and the air outlet 111b are respectively disposed at two ends of the air guide channel 111c, that is, the air inlet 111a and the air outlet 111b are communicated with each other through the air guide channel 111c.

[0033] The piston 12 is movably arranged between the air inlet 111a and the air outlet 111b through the elastic member 13. In this embodiment, the elastic member 13 can be a straight spring. Specifically, one end of the straight spring is fixedly connected to the piston 12, and the other end of the straight spring is fixed to the step surface formed on the air outlet 111b inside the air guide channel 111c, and an annular air guide gap 111d is formed between the piston 12 and the inner wall of the air guide channel 111c.

[0034] Among them, the piston 12 inside the logic valve 1 whose air inlet 111a is not covered by the plate blocks the air outlet 111b through the suction force of the negative pressure device. Specifically, on the one hand, when the air inlet 111a of the logic valve 1 is not covered by the plate (such as PCB), the negative pressure device is started at this time, and the negative pressure generated by the negative pressure device will quickly draw out the gas under the piston 12. Since the air inlet 111a is not blocked by the plate (such as PCB) at this time, and the air guide volume of the air guide gap 111d is limited, it is impossible to quickly introduce sufficient air at the position of the air inlet 111a to the bottom of the piston 12. Therefore, at this time, the piston 12 will move downward quickly under the action of air pressure, thereby blocking the air outlet 111b, that is, the logic valve 1 that is not covered by the plate will be under the negative pressure device. On the other hand, when the air inlet 111a of the logic valve 1 is covered by a plate (such as a PCB), the negative pressure device is started at this time. Since the air inlet 111a is blocked by the plate (such as a PCB), the air in the external environment cannot enter the interior of the air guide channel 111c through the air inlet 111a. Therefore, the negative pressure generated by the negative pressure device will be transmitted to the position of the air inlet 111a, that is, all logic valves 1 blocked by the plate (such as a PCB) will generate adsorption force on the plate (such as a PCB), thereby completing the adsorption and fixation of the plate (such as a PCB).

[0035] In the above scheme, by setting up a plurality of logic valves 1 arranged in an array, when the air inlet 111a of the logic valve 1 is not covered by the plate (such as PCB), the logic valve 1 can be closed at the moment the negative pressure device is started to prevent the logic valve 1 from leaking. When the air inlet 111a of the logic valve 1 is covered by the plate (such as PCB), the air in the external environment cannot enter the interior of the air guide channel 111c through the air inlet 111a. Therefore, the negative pressure generated by the negative pressure device will be transmitted to the position of the air inlet 111a, thereby completing the adsorption and fixation of the plate (such as PCB). The entire suction cup can adaptively change the adsorption area according to the actual size of the plate (such as PCB), thereby meeting the production needs of plates (such as PCB) of various sizes.

[0036] like Figure 1 and Figure 2As shown, a sealing ring 14 is embedded in the air guide channel 111c, that is, an annular groove is formed on the inner surface of the air guide channel 111c, and a part of the sealing ring 14 is clamped in the interior of the groove. Furthermore, an annular step surface is formed on the inner surface of the air guide channel 111c for supporting the sealing ring 14, so as to prevent the sealing ring 14 from falling off from the inside of the groove when the piston 12 presses down the sealing ring 14. The sealing ring 14 is coaxially arranged with the air guide channel 111c, and the piston 12 inside the logic valve 1 whose air inlet 111a is not covered by the plate is pressed against the sealing ring 14 by the suction force of the negative pressure equipment, so that the air outlet 111b is blocked.

[0037] like Figure 1 and Figure 2 As shown, the logic valve 1 further includes a valve body 11 and a valve cover 15. Figure 1 As shown, the valve body 11 and the valve cover 15 can be fixedly connected by threads, the air outlet 111 b and the air guide channel 111 c are both provided on the valve body 11 , and the air inlet 111 a is provided on the valve cover 15 .

[0038] The adaptive partition suction cup in this embodiment also includes a mounting plate 2, and the logic valve 1 is mounted inside a mounting hole 211 opened on one of the surfaces of the mounting plate 2. Further, the air inlet 111a of the logic valve 1 is arranged inside the mounting hole 211 or flush with one of the surfaces of the mounting plate 2, so that the plate (such as a PCB) can be completely attached to one of the surfaces of the mounting plate 2, which is convenient for adsorbing the plate (such as a PCB).

[0039] like Figures 3 to 5 As shown, a vacuum chamber 23 is provided inside the mounting plate 2, the air outlet 111b is connected to the vacuum chamber 23, and the vacuum chamber 23 is connected to the negative pressure device.

[0040] like Figures 3 to 5 As shown, the mounting plate 2 includes an upper plate body 21 and a lower plate body 22 that are fixedly connected. The specific connection method between the upper plate body 21 and the lower plate body 22 is not specifically limited. In this embodiment, bolt connection can be adopted. The mounting hole 211 is opened on the upper plate body 21, and the vacuum chamber 23 is arranged between the upper plate body 21 and the lower plate body 22.

[0041] Further, such as Figures 3 to 5 As shown, the vacuum chamber 23 is opened on the plate surface of the lower plate body 22 close to the upper plate body 21 .

[0042] The adaptive partition suction cup in this embodiment further includes a suction cup pad 3 arranged at the position of the air inlet 111 a of the logic valve 1 , and an air hole 31 is opened on the suction cup pad 3 at a position corresponding to the air inlet 111 a .

[0043] like Figure 3 to Figure 4As shown, the adaptive partition suction cup in this embodiment also includes a filter screen 4 arranged at the air inlet 111a position of the logic valve 1, and the filter screen 4 is used to filter the gas entering the air inlet 111a. In this embodiment, the filter screen 4 is arranged between the air inlet 111a and the suction cup pad 3.

Claims

1. An adaptive partition suction cup, characterized in that: It comprises a plurality of logic valves (1) arranged in an array, wherein the air outlets (111b) of the logic valves (1) are connected to a negative pressure device, and the air inlets (111a) of the plurality of logic valves (1) form an adsorption plane for adsorbing a plate; The logic valve (1) comprises: An air guide channel (111c), an air inlet (111a) and an air outlet (111b) are respectively arranged at two ends of the air guide channel (111c); and A piston (12) is movably arranged between the air inlet (111a) and the air outlet (111b) via an elastic member (13), and an annular air guide gap (111d) is formed between the piston (12) and the inner wall of the air guide channel (111c); The piston (12) inside the logic valve (1) whose air inlet (111a) is not covered by the plate blocks the air outlet (111b) through the suction force of the negative pressure device.

2. The adaptive partitioning suction cup according to claim 1, characterized in that: A sealing ring (14) is embedded in the air guide channel (111c), and the sealing ring (14) is coaxially arranged with the air guide channel (111c). The piston (12) inside the logic valve (1) whose air inlet (111a) is not covered by the plate is pressed against the sealing ring (14) by the suction force of the negative pressure device, so that the air outlet (111b) is blocked.

3. The adaptive partitioning suction cup according to claim 1, characterized in that: The logic valve (1) further comprises a valve body (11) and a valve cover (15); the air outlet (111b) and the air guide channel (111c) are both provided on the valve body (11); and the air inlet (111a) is provided on the valve cover (15).

4. The adaptive partitioning suction cup according to claim 1, characterized in that: It also includes a mounting plate (2), wherein the logic valve (1) is mounted inside a mounting hole (211) opened on one of the plate surfaces of the mounting plate (2).

5. The adaptive partitioning suction cup according to claim 4, characterized in that: The air inlet (111a) of the logic valve (1) is arranged inside the mounting hole (211) or flush with one of the plate surfaces of the mounting plate (2).

6. The adaptive partitioning suction cup according to claim 4, characterized in that: A vacuum chamber (23) is provided inside the mounting plate (2), the air outlet (111b) is connected to the vacuum chamber (23), and the vacuum chamber (23) is connected to the negative pressure device.

7. The adaptive partitioning suction cup according to claim 6, characterized in that: The mounting plate (2) comprises an upper plate body (21) and a lower plate body (22) which are fixedly connected, the mounting hole (211) is opened on the upper plate body (21), and the vacuum chamber (23) is arranged between the upper plate body (21) and the lower plate body (22).

8. The adaptive partitioning suction cup according to claim 7, characterized in that: The vacuum chamber (23) is provided on the plate surface of the lower plate body (22) close to the upper plate body (21).

9. The adaptive partitioning suction cup according to claim 1, characterized in that: It also comprises a suction cup pad (3) arranged at the position of the air inlet (111a) of the logic valve (1), and an air hole (31) is opened on the suction cup pad (3) at a position corresponding to the air inlet (111a).

10. The adaptive partitioning suction cup according to claim 1 or 9, characterized in that: It also comprises a filter screen (4) arranged at the air inlet (111a) of the logic valve (1), wherein the filter screen (4) is used to filter the gas entering the air inlet (111a).

Citation Information

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