Mask safety interactive transmission structure

Abstract

The utility model discloses a mask safety interactive transmission structure which comprises a tool, an execution component, a first Y-direction sensor, a second Y-direction sensor, a third Y-direction sensor, a first Z-direction sensor and a second Z-direction sensor, wherein the tool is provided with a material placing station used for placing a mask, the execution part is provided with a material supporting part used for supporting the mask, the execution part is used for being connected to a mechanical arm, the mechanical arm is connected with a controller, the first Y-direction sensor is connected to the execution part, and the second Y-direction sensor is connected to the controller. The second Y-direction sensor and the third Y-direction sensor are both connected to the tool, the first Z-direction sensor is connected to the execution component, and the second Z-direction sensor is connected to the tool. According to the mask conveying device, the mask conveying safety can be improved, deviation during mask conveying is avoided, the risks that masks are collided and fall off in the conveying process are reduced, and the mask conveying safety level is improved.

Description

Technical Field

[0001] The utility model relates to a mask safety interactive transmission structure. Background Art

[0002] At present, masks are an indispensable component in the semiconductor manufacturing process. The mask carries the design pattern, and the light passes through the mask to transmit the design pattern onto the photoresist. The mask needs to be transmitted between various equipment and workstations during the semiconductor manufacturing process.

[0003] Since high-end masks are very expensive and even a slight bump on them will cause damage and scrap, it is particularly important to improve the safety of mask transmission. At present, the automated transmission of masks is mainly completed by robots. The rate of mask drop when the robot transmits the mask can reach one in 100,000. Under normal circumstances, the robot can correctly and safely transmit the mask. However, there are many unexpected and uncontrollable situations in the actual production process. For example, in the case of multi-station interactive transmission, the robot is affected by interference factors in the surrounding environment, which will cause deviations when the robot transmits the mask, which will cause unexpected situations such as bumps and drop during the transmission process, increasing the risk of mask damage. Therefore, the safety of the robot transmitting the mask still needs to be improved. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the defects of the prior art and provide a mask safety interactive transmission structure, which can improve the safety of mask transmission, avoid deviation when transmitting masks, reduce the risk of masks being knocked and falling during transmission, and improve the safety level of mask transmission.

[0005] In order to solve the above technical problems, the technical solution of the utility model is: a mask safety interactive transmission structure, which includes a tooling, an execution component, a first Y-direction sensor, a second Y-direction sensor, a third Y-direction sensor, a first Z-direction sensor and a second Z-direction sensor;

[0006] The tooling is provided with a material placing station for placing the mask;

[0007] The execution component has a supporting part for supporting the mask, and the execution component is used to be connected to a manipulator, and the manipulator is connected to a controller so that the controller controls the manipulator to drive the execution component to move, thereby placing the mask on the supporting part in the unloading station and taking the mask in the unloading station away through the supporting part;

[0008] The first Y-direction sensor is connected to the execution component, the second Y-direction sensor and the third Y-direction sensor are both connected to the tooling, and the second Y-direction sensor is located above the third Y-direction sensor;

[0009] The first Z-direction sensor is connected to the actuator, and the second Z-direction sensor is connected to the tooling;

[0010] The first Y-direction sensor, the second Y-direction sensor, the third Y-direction sensor, the first Z-direction sensor and the second Z-direction sensor are all through-beam sensors;

[0011] When the first Y-direction sensor is aligned with the second Y-direction sensor in both the X-direction and the Z-direction, the first Y-direction sensor and the second Y-direction sensor are mutually sensing along the Y-direction, and the supporting portion is aligned with the unloading station in the X-direction and is higher than the unloading station in the Z-direction;

[0012] When the first Y-direction sensor is aligned with the third Y-direction sensor in both the X-direction and the Z-direction, the first Y-direction sensor and the third Y-direction sensor are mutually sensing along the Y-direction, and the supporting portion is aligned with the unloading station in the X-direction and is lower than the unloading station in the Z-direction;

[0013] When the first Z-direction sensor is aligned with the second Z-direction sensor in both the X-direction and the Y-direction, the first Z-direction sensor and the second Z-direction sensor are mutually sensing along the Z-direction and the supporting portion is aligned with the unloading station in both the X-direction and the Y-direction;

[0014] The first Y-direction sensor, the second Y-direction sensor, the third Y-direction sensor, the first Z-direction sensor and the second Z-direction sensor are all connected to the controller. When the first Y-direction sensor and the second Y-direction sensor perform face-to-face sensing, the first Y-direction sensor and the second Y-direction sensor generate a first signal and transmit the first signal to the controller. When the first Y-direction sensor and the third Y-direction sensor perform face-to-face sensing, the first Y-direction sensor and the third Y-direction sensor generate a second signal and transmit the second signal to the controller. When the first Z-direction sensor and the second Z-direction sensor perform face-to-face sensing, the first Z-direction sensor and the second Z-direction sensor generate a third signal and transmit the third signal to the controller.

[0015] Furthermore, the execution component is connected to a first on-site sensor for detecting whether there is a mask on the supporting portion, and / or the tooling is connected to a second on-site sensor for detecting whether there is a mask in the unloading station.

[0016] A specific structure of the supporting portion is further provided, wherein the supporting portion comprises at least two supporting rods arranged in parallel.

[0017] A specific structure of the support rod is further provided, wherein the support rod is provided with two material supporting steps, and a downwardly recessed groove is provided between the two material supporting steps.

[0018] Furthermore, a bracket is connected to the actuator, the first Y-direction sensor is connected to the bracket and arranged forward along the Y direction, and the first Z-direction sensor is connected to the bracket and arranged downward along the Z direction.

[0019] Furthermore, the tooling is connected to a mounting assembly, the second Y-direction sensor is connected to the mounting assembly and arranged rearward along the Y direction, the third Y-direction sensor is connected to the mounting assembly and arranged rearward along the Y direction, and the second Z-direction sensor is connected to the mounting assembly and arranged upward along the Z direction.

[0020] Further providing a specific structure of the mounting assembly, the mounting assembly comprises a base, a first mounting block, a second mounting block, a third mounting block, a first support rod, a second support rod, a first mounting rod, a second mounting rod and a third mounting rod;

[0021] The base is connected to the tooling;

[0022] The first support rod and the second support rod are both connected to the base;

[0023] The first mounting block and the second mounting block are both connected to the first support rod;

[0024] The third mounting block is connected to the second support rod;

[0025] The first mounting rod is connected to the first mounting block, and the second Y-direction sensor is connected to the first mounting rod;

[0026] The second mounting rod is connected to the second mounting block, and the third Y-direction sensor is connected to the second mounting rod;

[0027] The third mounting rod is connected to the third mounting block, and the second Z-direction sensor is connected to the third mounting rod.

[0028] Furthermore, the tooling has a plurality of support rods for holding the mask in the material discharging station.

[0029] Furthermore, the support rod is provided with a supporting groove for supporting the mask.

[0030] A specific structure of the tooling is further provided, the tooling comprising a left side plate, a right side plate, an upper horizontal plate and a lower horizontal plate;

[0031] The upper horizontal plate is connected to the left side plate and the right side plate;

[0032] The lower horizontal plate is connected to the left side plate and the right side plate and is located below the upper horizontal plate;

[0033] The support rod is connected to the upper horizontal plate.

[0034] After adopting the above technical solution, during the material discharge process, the manipulator first drives the execution component to move to Figure 1 The first position shown in the figure, in the first position, the first Y-direction sensor and the second Y-direction sensor are aligned and sensed in the Y direction, at this time, the support part is aligned with the unloading station in the X direction and is higher than the unloading station in the Z direction, and at the same time, the first Y-direction sensor and the second Y-direction sensor generate a first signal and transmit the first signal to the controller. Then the manipulator drives the actuator to move forward in the Y direction as shown in the figure. Figure 2 In the second position shown, the first Y-direction sensor and the second Y-direction sensor always generate the first signal during the process of moving from the first position to the second position. The generation of the first signal indicates that the first Y-direction sensor and the second Y-direction sensor always remain aligned, that is, the actuator moves along the set path without deviation, so the moving path of the actuator is safe; if the first signal disappears, it means that the first Y-direction sensor and the second Y-direction sensor are misaligned, that is, the actuator carries the mask and deviates from the set path. At this time, there is a risk of the mask being damaged, and the action needs to be stopped immediately and wait for the staff to handle it. When the actuator moves along the Y direction to the second position, the first Z-direction sensor is aligned with the second Z-direction sensor and senses in the Z direction. At this time, the support part is aligned with the discharge station in both the X and Y directions, that is, the support part is located directly above the discharge station. At the same time, the first Z-direction sensor and the second Z-direction sensor generate a third signal and feed the third signal back to the controller. Then the manipulator drives the actuator downward and moves in sequence as shown in the figure. Figure 3 The third position shown and Figure 4In the fourth position shown, the first Z-direction sensor and the second Z-direction sensor always generate a third signal in the process of moving from the second position to the third position and the fourth position in sequence. Because the third signal is generated, it means that the first Z-direction sensor and the second Z-direction sensor are always aligned, that is, the actuator moves along the set correct path without deviation, so the moving path of the actuator is safe; if the third signal disappears, it means that the first Z-direction sensor and the second Z-direction sensor are misaligned, that is, the actuator carries the mask and deviates from the set path. At this time, the mask is at risk of being damaged and needs to be stopped immediately to wait for the staff to handle it. When the actuator moves downward to the third position, the mask on the support part is placed in the material discharge station. When the actuator continues to move downward to the fourth position, the support part is separated from the mask in the material discharge station and the first Y-direction sensor moves to align with the third Y-direction sensor and senses along the Y direction. At this time, the support part is located directly below the material discharge station and the first Y-direction sensor and the third Y-direction sensor generate a second signal and feed the second signal back to the controller. Then the robot drives the actuator to move backward along the Y direction to the position as shown in FIG. Figure 5In the fifth position shown, the first Y-direction sensor and the third Y-direction sensor always generate the second signal during the process of moving from the fourth position to the fifth position. The second signal indicates that the first Y-direction sensor and the third Y-direction sensor are always aligned, that is, the actuator moves along the set path without deviation, so the moving path of the actuator is safe; if the second signal disappears, it means that the first Y-direction sensor and the third Y-direction sensor are misaligned, that is, the actuator deviates from the set path, and the mask is at risk of being damaged, so it is necessary to stop the action immediately and wait for the staff to handle it. When the actuator moves backward to the fifth position, the support part is completely withdrawn from the tooling, and the material discharge process ends. Further, the moving path of the actuator during the material collection process is opposite to the path during the material discharge process. During the material collection process, the actuator first moves to the fifth position, then moves forward along the Y direction to the fourth position, then moves upward along the Z direction to the third position and the second position in sequence, and then moves backward along the Y direction from the second position to the first position. Similarly, when the actuator moves forward from the fifth position to the fourth position along the Y direction, the first Y direction sensor and the third Y direction sensor must always generate the second signal. Once the second signal disappears during this process, it means that the first Y direction sensor and the third Y direction sensor are misaligned, that is, the actuator deviates from the set path. At this time, the mask is at risk of being damaged, and the action needs to be stopped immediately and wait for the staff to handle it. When the actuator moves upward from the fourth position to the third position and the second position along the Z direction, the first Z direction sensor and the second Z direction sensor must always generate the third signal. Once the third signal disappears during this process, it means that the first Z direction sensor and the second Z direction sensor are misaligned, that is, the actuator deviates from the set path. At this time, the mask is at risk of being damaged, and the action needs to be stopped immediately and wait for the staff to handle it. When the actuator moves backward from the second position to the first position along the Y direction, the first Y direction sensor and the second Y direction sensor must always generate the first signal. Once the first signal disappears during this process, it means that the first Y direction sensor and the second Y direction sensor are misaligned, that is, the actuator deviates from the set path. At this time, the mask is at risk of being damaged, and the action needs to be stopped immediately and wait for the staff to handle it. Therefore, through the Y-direction opposite sensing of the first Y-direction sensor and the second Y-direction sensor, the Y-direction opposite sensing of the first Y-direction sensor and the third Y-direction sensor, and the Z-direction opposite sensing of the first Z-direction sensor and the second Z-direction sensor, it is ensured that the actuator can accurately move along the set path in each stage. Once the actuator deviates from the set path, the corresponding signal sent to the controller will disappear. At this time, the controller will control the manipulator to stop moving to prevent the actuator from deviating from the correct path and causing the mask to be bumped or fall off.The functions of the first Y-direction sensor, the second Y-direction sensor, the third Y-direction sensor, the first Z-direction sensor and the second Z-direction sensor are to monitor the moving path of the actuator at each stage, and to monitor and judge the correctness of the moving path of the actuator. Even in the case of multi-station interactive transmission and interference, it is possible to ensure that the actuator moves accurately along the set path at each stage, prevent the actuator from deviating from the set path, and avoid deviations when transmitting masks, thereby improving the safety of mask transmission, improving the safety level, and reducing the risk of mask bumping and falling during transmission. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a structural schematic diagram of the execution component in the mask safety interactive transmission structure of the utility model when it is located at the first position;

[0036] Figure 2 It is a structural schematic diagram of the execution component in the mask safety interactive transmission structure of the utility model when it is located at the second position;

[0037] Figure 3 It is a structural schematic diagram of the execution component in the mask safety interactive transmission structure of the utility model when it is located at the third position;

[0038] Figure 4 It is a structural schematic diagram of the execution component in the mask safety interactive transmission structure of the utility model when it is located at the fourth position;

[0039] Figure 5 It is a structural schematic diagram of the execution component in the mask safety interactive transmission structure of the utility model when it is located at the fifth position;

[0040] Figure 6 It is a structural schematic diagram of the execution component of the utility model;

[0041] Figure 7 It is a structural schematic diagram of the tooling of the utility model. DETAILED DESCRIPTION

[0042] In order to make the content of the utility model more clearly understood, the utility model is further described in detail below based on specific embodiments and in conjunction with the accompanying drawings.

[0043] like Figures 1 to 7 As shown, a mask safety interactive transmission structure includes a tool 1, an execution component 2, a first Y-direction sensor 3, a second Y-direction sensor 4, a third Y-direction sensor 5, a first Z-direction sensor 6 and a second Z-direction sensor 7;

[0044] The tooling 1 is provided with a material placing station for placing the mask 8;

[0045] The execution component 2 has a supporting part 9 for supporting the mask 8, and the execution component 2 is used to be connected to a manipulator, and the manipulator is connected to a controller so that the controller controls the manipulator to drive the execution component 2 to move, thereby placing the mask 8 on the supporting part 9 in the unloading station and taking the mask 8 in the unloading station away through the supporting part 9;

[0046] The first Y-direction sensor 3 is connected to the actuator 2, the second Y-direction sensor 4 and the third Y-direction sensor 5 are both connected to the tooling 1, and the second Y-direction sensor 4 is located above the third Y-direction sensor 5;

[0047] The first Z-direction sensor 6 is connected to the actuator 2, and the second Z-direction sensor 7 is connected to the tooling 1;

[0048] The first Y-direction sensor 3, the second Y-direction sensor 4, the third Y-direction sensor 5, the first Z-direction sensor 6 and the second Z-direction sensor 7 are all through-beam sensors;

[0049] When the first Y-direction sensor 3 is aligned with the second Y-direction sensor 4 in both the X-direction and the Z-direction, the first Y-direction sensor 3 and the second Y-direction sensor 4 are mutually sensing along the Y-direction, and the supporting portion 9 is aligned with the unloading station in the X-direction and is higher than the unloading station in the Z-direction;

[0050] When the first Y-direction sensor 3 is aligned with the third Y-direction sensor 5 in both the X-direction and the Z-direction, the first Y-direction sensor 3 and the third Y-direction sensor 5 are mutually sensing along the Y-direction, and the supporting portion 9 is aligned with the unloading station in the X-direction and is lower than the unloading station in the Z-direction;

[0051] When the first Z-direction sensor 6 is aligned with the second Z-direction sensor 7 in both the X-direction and the Y-direction, the first Z-direction sensor 6 and the second Z-direction sensor 7 are mutually sensed in the Z-direction and the supporting portion 9 is aligned with the unloading station in both the X-direction and the Y-direction;

[0052] The first Y-direction sensor 3, the second Y-direction sensor 4, the third Y-direction sensor 5, the first Z-direction sensor 6 and the second Z-direction sensor 7 are all connected to the controller. When the first Y-direction sensor 3 and the second Y-direction sensor 4 are in direct contact with each other, the first Y-direction sensor 3 and the second Y-direction sensor 4 generate a first signal and transmit the first signal to the controller. When the first Y-direction sensor 3 and the third Y-direction sensor 5 are in direct contact with each other, the first Y-direction sensor 3 and the third Y-direction sensor 5 generate a second signal and transmit the second signal to the controller. When the first Z-direction sensor 6 and the second Z-direction sensor 7 are in direct contact with each other, the first Z-direction sensor 6 and the second Z-direction sensor 7 generate a third signal and transmit the third signal to the controller; specifically, when the first Y-direction sensor 3 and the second Y-direction sensor 4 are offset, they are out of the opposing sensing state, and the first signal generated by the first Y-direction sensor 3 and the second Y-direction sensor 4 will disappear; similarly, when the first Y-direction sensor 3 and the third Y-direction sensor 5 are offset, they are out of the opposing sensing state, and the second signal generated by the first Y-direction sensor 3 and the third Y-direction sensor 5 will disappear; similarly, when the first Z-direction sensor 6 and the second Z-direction sensor 7 are offset, they are out of the opposing sensing state, and the third signal generated by the first Z-direction sensor 6 and the second Z-direction sensor 7 will disappear.

[0053] like Figures 1 to 5 As shown, when the manipulator drives the execution component 2 to move, it can drive the mask 8 on the support part 9 to move. In the process of unloading, first, the manipulator drives the execution component 2 to move as shown in FIG. Figure 1 The first position shown in the figure, in the first position, the first Y-direction sensor 3 and the second Y-direction sensor 4 are aligned and sensed in the Y direction, at this time, the support part 9 is aligned with the unloading station in the X direction and is higher than the unloading station in the Z direction, and at the same time, the first Y-direction sensor 3 and the second Y-direction sensor 4 generate a first signal and transmit the first signal to the controller. Then the manipulator drives the actuator 2 to move forward in the Y direction as shown in the figure. Figure 2In the second position shown, the first Y-direction sensor 3 and the second Y-direction sensor 4 always generate the first signal during the process of moving from the first position to the second position. The generation of the first signal indicates that the first Y-direction sensor 3 and the second Y-direction sensor 4 always remain aligned, that is, the actuator 2 moves along the set path without deviation, so the movement path of the actuator 2 is safe; if the first signal disappears, it means that the first Y-direction sensor 3 and the second Y-direction sensor 4 are misaligned, that is, the actuator 2 carrying the mask 8 deviates from the set path. At this time, there is a risk of the mask 8 being damaged, and it is necessary to stop the action immediately and wait for the staff to handle it. When the actuator 2 moves along the Y direction to the second position, the first Z-direction sensor 6 is aligned with the second Z-direction sensor 7 and senses in the Z direction. At this time, the support part 9 is aligned with the discharge station in both the X direction and the Y direction, that is, the support part 9 is located directly above the discharge station. At the same time, the first Z-direction sensor 6 and the second Z-direction sensor 7 generate a third signal and feed the third signal back to the controller. Then the manipulator drives the actuator 2 downward to move in sequence as shown in the figure. Figure 3 The third position shown and Figure 4 In the fourth position shown, the first Z-direction sensor 6 and the second Z-direction sensor 7 always generate the third signal in the process of moving from the second position to the third position and the fourth position in sequence, because the generation of the third signal indicates that the first Z-direction sensor 6 and the second Z-direction sensor 7 always remain aligned, that is, the actuator 2 moves along the set correct path without deviation, so the moving path of the actuator 2 is safe; if the third signal disappears, it means that the first Z-direction sensor 6 and the second Z-direction sensor 7 are misaligned, that is, the actuator 2 carrying the mask 8 deviates from the set path, and at this time the mask 8 is at risk of being damaged, and it is necessary to stop the action immediately and wait for the staff to handle it. When the actuator 2 moves downward to the third position, the mask 8 on the support 9 is placed in the unloading station. When the actuator 2 continues to move downward to the fourth position, the support 9 is separated from the mask 8 in the unloading station and the first Y-direction sensor 3 moves to align with the third Y-direction sensor 5 and senses in the Y direction. At this time, the support 9 is located directly below the unloading station and the first Y-direction sensor 3 and the third Y-direction sensor 5 generate a second signal and feed the second signal back to the controller. Then the manipulator drives the actuator 2 to move backward along the Y direction as shown in FIG. Figure 5In the fifth position shown, the first Y-direction sensor 3 and the third Y-direction sensor 5 always generate the second signal during the process of moving from the fourth position to the fifth position, because the second signal generation indicates that the first Y-direction sensor 3 and the third Y-direction sensor 5 always keep aligned, that is, the actuator 2 moves along the set path without deviation, so the moving path of the actuator 2 is safe; if the second signal disappears, it means that the first Y-direction sensor 3 and the third Y-direction sensor 5 are misaligned, that is, the actuator 2 deviates from the set path, and at this time, the mask 8 is at risk of being damaged, and the action needs to be stopped immediately and wait for the staff to handle it. When the actuator 2 moves backward to the fifth position, the support part 9 is completely withdrawn from the tooling 1, and the material discharge process ends.

[0054] More specifically, the moving path of the actuator 2 during the material picking process is opposite to the path during the material unloading process. During the material picking process, the actuator 2 first moves to the fifth position, then moves forward along the Y direction to the fourth position, then moves upward along the Z direction to the third position and the second position in sequence, and then moves backward along the Y direction from the second position to the first position. Similarly, during the process of the actuator 2 moving forward along the Y direction from the fifth position to the fourth position, the first Y direction sensor 3 and the third Y direction sensor 5 must always generate a second signal. Once the second signal disappears during this process, it means that the first Y direction sensor 3 and the third Y direction sensor 5 are misaligned, that is, the actuator 2 deviates from the set path. At this time, there is a risk of the mask 8 being damaged, and it is necessary to stop the action immediately and wait for the staff to handle it. During the process of the actuator 2 moving from the fourth position to the third position and the second position in sequence along the Z direction upward, the first Z direction sensor 6 and the second Z direction sensor 7 should always generate the third signal. During this process, once the third signal disappears, it means that the first Z direction sensor 6 and the second Z direction sensor 7 are misaligned, that is, the actuator 2 deviates from the set path. At this time, the mask 8 is at risk of being damaged, and the action needs to be stopped immediately and wait for the staff to handle it. During the process of the actuator 2 moving from the second position to the first position along the Y direction backward, the first Y direction sensor 3 and the second Y direction sensor 4 should always generate the first signal. During this process, once the first signal disappears, it means that the first Y direction sensor 3 and the second Y direction sensor 4 are misaligned, that is, the actuator 2 deviates from the set path. At this time, the mask 8 is at risk of being damaged, and the action needs to be stopped immediately and wait for the staff to handle it.

[0055] To summarize, through the Y-direction opposite sensing of the first Y-direction sensor 3 and the second Y-direction sensor 4, the Y-direction opposite sensing of the first Y-direction sensor 3 and the third Y-direction sensor 5, and the Z-direction opposite sensing of the first Z-direction sensor and the second Z-direction sensor 7, it is ensured that the actuator 2 can accurately move along the set path in each stage. Once the actuator 2 deviates from the set path, the corresponding signal sent to the controller will disappear. At this time, the controller will control the manipulator to stop moving to prevent the actuator 2 that deviates from the correct path from causing the mask 8 to be bumped or fall off. The functions of the first Y-direction sensor 3, the second Y-direction sensor 4, the third Y-direction sensor 5, the first Z-direction sensor 6 and the second Z-direction sensor 7 are to monitor the moving path of the actuator 2 at each stage, and to monitor and judge the correctness of the moving path of the actuator 2. Even in the case of multi-station interactive transmission and interference, it is possible to ensure that the actuator 2 moves accurately along the set path at each stage, prevent the actuator 2 from deviating from the set path, and avoid deviations when transmitting the mask 8, thereby improving the safety of the mask 8 transmission, improving the safety level, and reducing the risk of the mask 8 bumping and falling during transmission.

[0056] More specifically, taking the first Y-direction sensor 3 and the second Y-direction sensor 4 as an example, when the first Y-direction sensor 3 and the second Y-direction sensor 4 generate the first signal, it means that the first Y-direction sensor 3 and the second Y-direction sensor 4 are in the opposite-direction sensing state, and the first Y-direction sensor 3 and the second Y-direction sensor 4 remain aligned. When the first signal disappears, it means that the first Y-direction sensor 3 and the second Y-direction sensor 4 are out of the opposite-direction sensing state, that is, the first Y-direction sensor 3 and the second Y-direction sensor 4 are offset.

[0057] In this embodiment, the first Y-direction sensor 3, the second Y-direction sensor 4, the third Y-direction sensor 5, the first Z-direction sensor 6 and the second Z-direction sensor 7 can all be laser beam sensors; wherein, the first Y-direction sensor 3 can be used to emit laser, the second Y-direction sensor 4 and the third Y-direction sensor 5 can be used to receive laser, the first Z-direction sensor 6 can be used to emit laser, and the second Z-direction sensor 7 can be used to receive laser.

[0058] like Figures 1 to 7As shown, the actuator 2 may be connected to a first in-position sensor for detecting whether there is a mask 8 on the support 9, and the tooling 1 may be connected to a second in-position sensor 10 for detecting whether there is a mask 8 in the unloading station; specifically, if there is a mask 8 on the support 9, the first in-position sensor has a signal, if there is no mask 8 on the support 9, the first in-position sensor has no signal, if there is a mask 8 in the unloading station, the second in-position sensor 10 has a signal, and if there is no mask 8 in the unloading station, the second in-position sensor 10 has no signal. More specifically, when the actuator 2 is in the first position, the first in-position sensor has a signal and the second in-position sensor 10 has no signal, when the actuator 2 is in the second position, the first in-position sensor has a signal and the second in-position sensor 10 has no signal, when the actuator 2 is in the third position, both the first in-position sensor and the second in-position sensor 10 have signals, when the actuator 2 is in the fourth position, the first in-position sensor has no signal and the second in-position sensor 10 has a signal, and when the actuator 2 is in the fifth position, the first in-position sensor has no signal and the second in-position sensor 10 has a signal.

[0059] like Figure 5 , 6 As shown, the supporting portion 9 may include at least two supporting rods 11 arranged in parallel; in this embodiment, two supporting rods 11 are provided.

[0060] like Figure 5 , 6 As shown, the support rod 11 is provided with two support steps 12, and a downwardly recessed groove 13 is provided between the two support steps 12; specifically, the groove 13 is used to reduce the contact area between the mask 8 and the support rod 11, so as to reduce the risk of the mask 8 being scratched.

[0061] like Figure 5 , 6 As shown, the actuator 2 may be connected to a bracket 14, the first Y-direction sensor 3 is connected to the bracket 14 and arranged forward along the Y direction, and the first Z-direction sensor 6 is connected to the bracket 14 and arranged downward along the Z direction. The tooling 1 may be connected to a mounting assembly 100, the second Y-direction sensor 4 is connected to the mounting assembly 100 and arranged backward along the Y direction, the third Y-direction sensor 5 is connected to the mounting assembly 100 and arranged backward along the Y direction, and the second Z-direction sensor 7 is connected to the mounting assembly 100 and arranged upward along the Z direction.

[0062] like Figure 7 As shown, the mounting assembly 100 includes, for example but not limited to, the following structure, which includes a base 15, a first mounting block 16, a second mounting block 17, a third mounting block 18, a first support rod 19, a second support rod 20, a first mounting rod 21, a second mounting rod 22, and a third mounting rod 23;

[0063] The base 15 is connected to the tooling 1;

[0064] The first support rod 19 and the second support rod 20 are both connected to the base 15;

[0065] The first mounting block 16 and the second mounting block 17 are both connected to the first support rod 19;

[0066] The third mounting block 18 is connected to the second support rod 20;

[0067] The first mounting rod 21 is connected to the first mounting block 16, and the second Y-direction sensor 4 is connected to the first mounting rod 21;

[0068] The second mounting rod 22 is connected to the second mounting block 17, and the third Y-direction sensor 5 is connected to the second mounting rod 22;

[0069] The third mounting rod 23 is connected to the third mounting block 18 , and the second Z-direction sensor 7 is connected to the third mounting rod 23 .

[0070] like Figure 1 , 2 As shown in Figures 3, 4, 5 and 7, the tooling 1 has a plurality of support rods 24 for holding the mask 8 in the material discharging station, and the support rods 24 are provided with supporting grooves 25 for holding the mask 8; in the present embodiment, four support rods 24 are provided.

[0071] like Figure 1 , 7 As shown, the tooling 1 may include a left side plate 26, a right side plate 27, an upper horizontal plate 28 and a lower horizontal plate 29;

[0072] The upper horizontal plate 28 is connected to the left side plate 26 and the right side plate 27;

[0073] The lower transverse plate 29 is connected to the left side plate 26 and the right side plate 27 and is located below the upper transverse plate 28;

[0074] The support rod 24 is connected to the upper horizontal plate 28 ; in this embodiment, the base 15 is connected to the left side plate 26 , and the second in-position sensor 10 is connected to the left side plate 26 and the right side plate 27 , respectively.

[0075] In summary, during the unloading process, the manipulator first drives the execution component 2 to move to the Figure 1The first position shown in the figure, in the first position, the first Y-direction sensor 3 and the second Y-direction sensor 4 are aligned and sensed in the Y direction, at this time, the support part 9 is aligned with the unloading station in the X direction and is higher than the unloading station in the Z direction, and at the same time, the first Y-direction sensor 3 and the second Y-direction sensor 4 generate a first signal and transmit the first signal to the controller. Then the manipulator drives the actuator 2 to move forward in the Y direction as shown in the figure. Figure 2 In the second position shown, the first Y-direction sensor 3 and the second Y-direction sensor 4 always generate the first signal during the process of moving from the first position to the second position. The generation of the first signal indicates that the first Y-direction sensor 3 and the second Y-direction sensor 4 always remain aligned, that is, the actuator 2 moves along the set path without deviation, so the movement path of the actuator 2 is safe; if the first signal disappears, it means that the first Y-direction sensor 3 and the second Y-direction sensor 4 are misaligned, that is, the actuator 2 carrying the mask 8 deviates from the set path. At this time, there is a risk of the mask 8 being damaged, and it is necessary to stop the action immediately and wait for the staff to handle it. When the actuator 2 moves along the Y direction to the second position, the first Z-direction sensor 6 is aligned with the second Z-direction sensor 7 and senses in the Z direction. At this time, the support part 9 is aligned with the discharge station in both the X direction and the Y direction, that is, the support part 9 is located directly above the discharge station. At the same time, the first Z-direction sensor 6 and the second Z-direction sensor 7 generate a third signal and feed the third signal back to the controller. Then the manipulator drives the actuator 2 downward to move in sequence as shown in the figure. Figure 3 The third position shown and Figure 4In the fourth position shown, the first Z-direction sensor 6 and the second Z-direction sensor 7 always generate the third signal in the process of moving from the second position to the third position and the fourth position in sequence, because the generation of the third signal indicates that the first Z-direction sensor 6 and the second Z-direction sensor 7 always remain aligned, that is, the actuator 2 moves along the set correct path without deviation, so the moving path of the actuator 2 is safe; if the third signal disappears, it means that the first Z-direction sensor 6 and the second Z-direction sensor 7 are misaligned, that is, the actuator 2 carrying the mask 8 deviates from the set path, and at this time the mask 8 is at risk of being damaged, and it is necessary to stop the action immediately and wait for the staff to handle it. When the actuator 2 moves downward to the third position, the mask 8 on the support 9 is placed in the unloading station. When the actuator 2 continues to move downward to the fourth position, the support 9 is separated from the mask 8 in the unloading station and the first Y-direction sensor 3 moves to align with the third Y-direction sensor 5 and senses in the Y direction. At this time, the support 9 is located directly below the unloading station and the first Y-direction sensor 3 and the third Y-direction sensor 5 generate a second signal and feed the second signal back to the controller. Then the manipulator drives the actuator 2 to move backward along the Y direction as shown in FIG. Figure 5In the fifth position shown, the first Y-direction sensor 3 and the third Y-direction sensor 5 always generate the second signal during the process of moving from the fourth position to the fifth position. The second signal indicates that the first Y-direction sensor 3 and the third Y-direction sensor 5 are always aligned, that is, the actuator 2 moves along the set path without deviation, so the moving path of the actuator 2 is safe; if the second signal disappears, it means that the first Y-direction sensor 3 and the third Y-direction sensor 5 are misaligned, that is, the actuator 2 deviates from the set path, and the mask 8 is at risk of being damaged at this time, and the action needs to be stopped immediately and wait for the staff to handle it. When the actuator 2 moves backward to the fifth position, the support part 9 completely withdraws from the tooling 1, and the material discharge process ends at this time. Further, the moving path of the actuator 2 during the material collection process is opposite to the path during the material discharge process. During the material collection process, the actuator 2 first moves to the fifth position, and then the actuator 2 moves forward along the Y direction to the fourth position, and then the actuator 2 moves upward along the Z direction to the third position and the second position in sequence, and then moves backward along the Y direction from the second position to the first position. Similarly, when the actuator 2 moves forward from the fifth position to the fourth position along the Y direction, the first Y direction sensor 3 and the third Y direction sensor 5 must always generate the second signal. Once the second signal disappears during this process, it means that the first Y direction sensor 3 and the third Y direction sensor 5 are misaligned, that is, the actuator 2 deviates from the set path. At this time, the mask 8 is at risk of being damaged, and the action needs to be stopped immediately and wait for the staff to handle it. When the actuator 2 moves upward from the fourth position to the third and second positions along the Z direction, the first Z direction sensor 6 and the second Z direction sensor 7 must always generate the third signal. Once the third signal disappears during this process, it means that the first Z direction sensor 6 and the second Z direction sensor 7 are misaligned, that is, the actuator 2 deviates from the set path. At this time, the mask 8 is at risk of being damaged, and the action needs to be stopped immediately and wait for the staff to handle it. During the process of the actuator 2 moving backward along the Y direction from the second position to the first position, the first Y-direction sensor 3 and the second Y-direction sensor 4 must always generate the first signal. During this process, once the first signal disappears, it means that the first Y-direction sensor 3 and the second Y-direction sensor 4 are misaligned, that is, the actuator 2 deviates from the set path. At this time, there is a risk of the mask 8 being damaged, and it is necessary to stop the action immediately and wait for the staff to handle it.Therefore, through the Y-direction sensing of the first Y-direction sensor 3 and the second Y-direction sensor 4, the Y-direction sensing of the first Y-direction sensor 3 and the third Y-direction sensor 5, and the Z-direction sensing of the first Z-direction sensor and the second Z-direction sensor 7, it is ensured that the actuator 2 can accurately move along the set path at each stage. Once the actuator 2 deviates from the set path, the corresponding signal sent to the controller will disappear, and the controller will control the manipulator to stop the action to prevent the actuator 2 deviating from the correct path from causing the mask 8 to be bumped or dropped. The first Y-direction sensor 3, the second Y-direction sensor 4, the third Y-direction sensor 5, the first Z-direction sensor 6 and the second Z-direction sensor 7 are used to monitor the moving path of the actuator 2 at each stage, monitor and judge the correctness of the moving path of the actuator 2, and ensure that the actuator 2 accurately moves along the set path at each stage even in the case of multi-station interactive transmission and interference, prevent the actuator 2 from deviating from the set path, and avoid deviations when transmitting the mask 8, thereby improving the safety of the mask 8 transmission, improving the safety level, and reducing the risk of the mask 8 bumping and dropping during the transmission process.

[0076] The specific embodiments described above further illustrate the technical problems, technical solutions and beneficial effects solved by the present invention. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A mask security interactive transmission structure, characterized in that: It comprises a tooling (1), an execution component (2), a first Y-direction sensor (3), a second Y-direction sensor (4), a third Y-direction sensor (5), a first Z-direction sensor (6) and a second Z-direction sensor (7); The tooling (1) is provided with a material placing station for placing the mask (8); The execution component (2) has a supporting part (9) for supporting the mask (8), and the execution component (2) is used to be connected to a manipulator, and the manipulator is connected to a controller so that the controller controls the manipulator to drive the execution component (2) to move, thereby placing the mask (8) on the supporting part (9) in the material discharge station and taking the mask (8) in the material discharge station away through the supporting part (9); The first Y-direction sensor (3) is connected to the actuator (2), the second Y-direction sensor (4) and the third Y-direction sensor (5) are both connected to the tooling (1), and the second Y-direction sensor (4) is located above the third Y-direction sensor (5); The first Z-direction sensor (6) is connected to the actuator (2), and the second Z-direction sensor (7) is connected to the tooling (1); The first Y-direction sensor (3), the second Y-direction sensor (4), the third Y-direction sensor (5), the first Z-direction sensor (6) and the second Z-direction sensor (7) are all through-beam sensors; When the first Y-direction sensor (3) is aligned with the second Y-direction sensor (4) in both the X-direction and the Z-direction, the first Y-direction sensor (3) and the second Y-direction sensor (4) perform opposite sensing in the Y-direction and the support portion (9) is aligned with the material discharge station in the X-direction and is higher than the material discharge station in the Z-direction; When the first Y-direction sensor (3) is aligned with the third Y-direction sensor (5) in both the X-direction and the Z-direction, the first Y-direction sensor (3) and the third Y-direction sensor (5) perform opposite sensing in the Y-direction and the supporting portion (9) is aligned with the material discharging station in the X-direction and is lower than the material discharging station in the Z-direction; When the first Z-direction sensor (6) is aligned with the second Z-direction sensor (7) in both the X-direction and the Y-direction, the first Z-direction sensor (6) and the second Z-direction sensor (7) sense each other in the Z-direction and the support portion (9) is aligned with the unloading station in both the X-direction and the Y-direction; The first Y-direction sensor (3), the second Y-direction sensor (4), the third Y-direction sensor (5), the first Z-direction sensor (6) and the second Z-direction sensor (7) are all connected to the controller. When the first Y-direction sensor (3) and the second Y-direction sensor (4) are subjected to cross-sensing, the first Y-direction sensor (3) and the second Y-direction sensor (4) generate a first signal and transmit the first signal to the controller. When the first Y-direction sensor (3) and the third Y-direction sensor (5) are subjected to cross-sensing, the first Y-direction sensor (3) and the third Y-direction sensor (5) generate a second signal and transmit the second signal to the controller. When the first Z-direction sensor (6) and the second Z-direction sensor (7) are subjected to cross-sensing, the first Z-direction sensor (6) and the second Z-direction sensor (7) generate a third signal and transmit the third signal to the controller.

2. The mask security interactive transmission structure according to claim 1, characterized in that: The execution component (2) is connected to a first on-site sensor for detecting whether there is a mask (8) on the support portion (9), and / or the tooling (1) is connected to a second on-site sensor (10) for detecting whether there is a mask (8) in the material discharge station.

3. The mask security interactive transmission structure according to claim 1, characterized in that: The material supporting portion (9) comprises at least two supporting rods (11) arranged in parallel.

4. The mask security interactive transmission structure according to claim 3, characterized in that: The supporting rod (11) is provided with two material supporting steps (12), and a downwardly recessed groove (13) is provided between the two material supporting steps (12).

5. The mask security interactive transmission structure according to claim 1, characterized in that: The actuator (2) is connected to a bracket (14), the first Y-direction sensor (3) is connected to the bracket (14) and arranged forward along the Y direction, and the first Z-direction sensor (6) is connected to the bracket (14) and arranged downward along the Z direction.

6. The mask security interactive transmission structure according to claim 1, characterized in that: The tooling (1) is connected to a mounting assembly (100), the second Y-direction sensor (4) is connected to the mounting assembly (100) and arranged rearwardly along the Y-direction, the third Y-direction sensor (5) is connected to the mounting assembly (100) and arranged rearwardly along the Y-direction, and the second Z-direction sensor (7) is connected to the mounting assembly (100) and arranged upwardly along the Z-direction.

7. The mask security interactive transmission structure according to claim 6, characterized in that: The mounting assembly (100) comprises a base (15), a first mounting block (16), a second mounting block (17), a third mounting block (18), a first support rod (19), a second support rod (20), a first mounting rod (21), a second mounting rod (22) and a third mounting rod (23); The base (15) is connected to the tooling (1); The first support rod (19) and the second support rod (20) are both connected to the base (15); The first mounting block (16) and the second mounting block (17) are both connected to the first support rod (19); The third mounting block (18) is connected to the second support rod (20); The first mounting rod (21) is connected to the first mounting block (16), and the second Y-direction sensor (4) is connected to the first mounting rod (21); The second mounting rod (22) is connected to the second mounting block (17), and the third Y-direction sensor (5) is connected to the second mounting rod (22); The third mounting rod (23) is connected to the third mounting block (18), and the second Z-direction sensor (7) is connected to the third mounting rod (23).

8. The mask security interactive transmission structure according to claim 1, characterized in that: The tooling (1) is provided with a plurality of support rods (24) for supporting the mask (8) in the material discharging station.

9. The mask security interactive transmission structure according to claim 8, characterized in that: The support rod (24) is provided with a supporting groove (25) for supporting the mask (8).

10. The mask security interactive transmission structure according to claim 8, characterized in that: The tooling (1) comprises a left side plate (26), a right side plate (27), an upper horizontal plate (28) and a lower horizontal plate (29); The upper horizontal plate (28) is connected to the left side plate (26) and the right side plate (27); The lower transverse plate (29) is connected to the left side plate (26) and the right side plate (27) and is located below the upper transverse plate (28); The support rod (24) is connected to the upper transverse plate (28).

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