Drawing type electric control cabinet and process waste gas treatment system

Abstract

The utility model discloses a drawing type electric control cabinet and a process waste gas treatment system, belongs to the technical field of waste gas treatment, and aims to solve the problems of small maintenance space and difficulty in maintenance of the process waste gas treatment system in the prior art. The drawing type electric control cabinet is used for the process waste gas treatment system, the process waste gas treatment system comprises a process waste gas treatment device and a drawing type electric control cabinet, the drawing type electric control cabinet comprises a cabinet body and a sliding part, the cabinet body is arranged on the side face of the process waste gas treatment device, and the cabinet body is in sliding connection with the process waste gas treatment device through the sliding part. The device can be used for waste gas treatment.

Description

Technical Field

[0001] The utility model belongs to the technical field of waste gas treatment, and in particular relates to a pull-out type electric control cabinet and a process waste gas treatment system. Background Art

[0002] In industries such as semiconductors and solar energy, when a process waste gas treatment system is used to treat waste gas, a one-machine-one-standby mode is usually adopted. That is, when a pipeline in a device fails, the device is shut down and the waste gas is introduced into the standby machine to continue working, and the operating status of the equipment is not affected.

[0003] However, the existing process waste gas treatment system is large in size. The main machine and the standby machine are two independent machines with exactly the same configuration and the same requirements for maintenance space. In order to meet the waste gas treatment needs of the clean room, the process waste gas treatment system needs to be placed in the limited space of the clean room. Due to the spatial layout, the maintenance space is small and maintenance is difficult. Utility Model Content

[0004] In view of the above analysis, the utility model aims to provide a pull-out type electric control cabinet and a process waste gas treatment system, so as to solve the problem of small maintenance space and difficult maintenance of the electric control cabinet of the process waste gas treatment system in the prior art.

[0005] The purpose of the utility model is mainly achieved through the following technical solutions.

[0006] The utility model provides a pull-out type electric control cabinet, which is used for a process waste gas treatment system. The process waste gas treatment system comprises a process waste gas treatment device and the pull-out type electric control cabinet. The pull-out type electric control cabinet comprises a cabinet body and a sliding member. The cabinet body is arranged on the side of the process waste gas treatment device, and the cabinet body is slidably connected to the process waste gas treatment device through the sliding member.

[0007] Furthermore, it also includes an installation platform, and the cabinet and the process waste gas treatment device are both arranged on the installation platform.

[0008] Furthermore, the sliding member includes a top sliding member located at the top end of the cabinet and a bottom sliding member located at the bottom end of the cabinet, and the cabinet is slidably connected to the process waste gas treatment device via the top sliding member and the bottom sliding member.

[0009] Furthermore, the top sliding member includes a guide rail and a guide block. The guide rail is arranged at the top of the cabinet and fixedly connected to the cabinet. The guide block is arranged at the top of the process waste gas treatment device and fixedly connected to the process waste gas treatment device. A guide groove is opened on one side of the guide block facing the guide rail. The guide rail is inserted into the guide groove and is slidably connected to the guide block.

[0010] Furthermore, the bottom sliding member includes a slide rail and a slider. The slide rail is arranged on the mounting platform and fixedly connected to the mounting platform. The slider is arranged at the bottom of the cabinet and fixedly connected to the cabinet. A slide groove is provided on a side of the slider facing the slide rail. The slide rail is inserted into the slide groove and is slidably connected to the slider.

[0011] Furthermore, it also includes casters arranged at the bottom of the cabinet; and / or, it also includes a locking plate arranged on the process waste gas treatment device, and the cabinet is detachably fixedly connected to the process waste gas treatment device through the locking plate; and / or, it also includes a handle arranged on the cabinet.

[0012] Furthermore, it also includes a brake pad arranged on the caster.

[0013] The utility model also provides a process waste gas treatment system, comprising the above-mentioned pull-out type electric control cabinet.

[0014] Furthermore, the process waste gas treatment device includes a shell and a main machine and a standby machine arranged in parallel in the shell, a pull-out electric control cabinet is arranged on the side of the shell, and the electrical components of the main machine and the standby machine are all arranged in the pull-out electric control cabinet.

[0015] Furthermore, the main machine and the standby machine both include a three-way valve and an intake pipe, a reaction chamber, a water tank and a spray tower connected in sequence. The intake pipes of the main machine and the standby machine are connected through the three-way valve, the intake port of the three-way valve is connected to the upstream exhaust gas outlet, the first outlet of the three-way valve is connected to the intake pipe of the main machine, and the second outlet of the three-way valve is connected to the intake pipe of the standby machine.

[0016] Compared with the prior art, the utility model can achieve at least one of the following beneficial effects.

[0017] The pull-out electric control cabinet provided by the utility model is slidably connected to the process waste gas treatment device of the process waste gas treatment system, and the cabinet body and the process waste gas treatment device have a compact structure. When the pull-out electric control cabinet needs to be maintained, the cabinet body is directly pulled out from the process waste gas treatment system, and the cabinet body and the process waste gas treatment device are maintained from the front of the process waste gas treatment system, that is, the cabinet body can be maintained in front, on the left side, and on the right side, thereby ensuring the maintenance space of the pull-out electric control cabinet and facilitating the maintenance of the pull-out electric control cabinet. After the cabinet body is pulled out, the space where the original cabinet body is located can be vacated, leaving maintenance space for the process waste gas treatment device.

[0018] The technical solution of the utility model adopts a modular design, which separates the process waste gas treatment device and the electrical components of the waste gas treatment device. The pull-out electric control cabinet not only facilitates the maintenance of the process waste gas treatment system, but also effectively prevents the electrical module of the waste gas treatment system from being damaged when leakage occurs in the treatment device.

[0019] In the present invention, the above-mentioned technical solutions can also be combined with each other to achieve more preferred combination solutions. Other features and advantages of the present invention will be described in the subsequent description, and some advantages can become obvious from the description, or can be understood by implementing the present invention. The purpose and other advantages of the present invention can be achieved and obtained through the contents particularly pointed out in the embodiments of the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings are only used for the purpose of illustrating specific embodiments and are not to be considered as limiting the present invention. In the entire drawings, the same reference symbols represent the same components.

[0021] Figure 1 A schematic diagram of the positions of the pull-out electric control cabinet and the process waste gas treatment device provided in the first embodiment of the utility model;

[0022] Figure 2 for Figure 1 The main view;

[0023] Figure 3 A schematic diagram of the layout of the process waste gas treatment system provided in Example 2 of the utility model;

[0024] Figure 4 A schematic diagram of the structure of a spray tower in a process waste gas treatment system provided in Example 2 of the utility model;

[0025] Figure 5 A schematic structural diagram of an annular scraper assembly in a process waste gas treatment system provided in Embodiment 2 of the present utility model;

[0026] Figure 6 A top view of an annular scraper assembly in a process waste gas treatment system provided in Example 2 of the utility model;

[0027] Figure 7 A schematic diagram of the first structure of the belt body in the process waste gas treatment system provided in the second embodiment of the utility model;

[0028] Figure 8 A schematic diagram of a second structure of a belt body in a process waste gas treatment system provided in Embodiment 2 of the present utility model;

[0029] Fig. 9 A third structural schematic diagram of the belt body in the process waste gas treatment system provided in the second embodiment of the utility model;

[0030] Fig.10 This is a schematic diagram of the fourth structure of the belt body in the process waste gas treatment system provided in Example 2 of the utility model.

[0031] Reference numerals:

[0032] 1-mounting ring; 2-elastic scraper strip; 21-belt body; 211-straight strip; 212-Z-shaped strip; 213-S-shaped strip; 214-first main strip; 215-second main strip; 216-support strip; 22-binding ring; 3-rotating cylinder; 4-wiping layer; 5-spray tower; 6-swirl blade; 7-spray head; 8-cabinet; 9-guide rail; 10-guide block; 11-slide rail; 12-slider; 13-castor; 14-locking plate; 15-handle; 16-main machine; 17-standby machine. DETAILED DESCRIPTION

[0033] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0034] Embodiment 1

[0035] This embodiment provides a pull-out electric control cabinet for a process waste gas treatment system. The process waste gas treatment system includes a process waste gas treatment device and a pull-out electric control cabinet. The pull-out electric control cabinet includes a cabinet body 8 and a sliding member. Figure 1 to Figure 2 The cabinet 8 is provided with electrical components such as an air switch, a power supply, a relay and a terminal block. The cabinet 8 is located on the side of the process waste gas treatment device. The cabinet 8 is slidably connected to the process waste gas treatment device through a sliding member.

[0036] At the customer site, there is a reserved space for the process waste gas treatment system, which is usually one, two or more process waste gas treatment systems set in parallel, with almost no free space between the process waste gas treatment systems, that is, no maintenance space. When the process waste gas treatment system needs to be maintained, it is necessary to laboriously remove the components that need to be maintained in the process waste gas treatment system before they can be maintained, which is time-consuming and laborious.

[0037] Compared with the existing technology, Figure 3 As shown, the pull-out electric control cabinet provided in this embodiment is slidably connected to the process waste gas treatment device of the process waste gas treatment system. The cabinet body 8 and the process waste gas treatment device have a compact structure. When the pull-out electric control cabinet needs to be maintained, the cabinet body 8 can be directly pulled out and maintained from the front of the process waste gas treatment system, that is, the front, left and right sides of the pulled-out cabinet body 8 can be maintained, ensuring the maintenance space of the pull-out electric control cabinet and facilitating the maintenance of the pull-out electric control cabinet. After the cabinet body 8 is pulled out, the space where the original cabinet body 8 is located can be vacated, leaving maintenance space for the process waste gas treatment device.

[0038] In order to improve the integrity of the process waste gas treatment system, the above-mentioned pull-out type electric control cabinet also includes a mounting platform, and the cabinet body 8 and the process waste gas treatment device are both arranged on the mounting platform.

[0039] Exemplarily, the sliding member includes a top sliding member located at the top of the cabinet 8 and a bottom sliding member located at the bottom of the cabinet 8, and the cabinet 8 is slidably connected to the process waste gas treatment device through the top sliding member and the bottom sliding member. This is because the cabinet 8 is relatively high and thin, and the provision of the top sliding member can prevent the cabinet 8 from tilting outward.

[0040] As for the structure of the top sliding part, specifically, it includes a guide rail 9 and a guide block 10. The guide rail 9 is arranged at the top of the cabinet 8 and is fixedly connected to the cabinet 8. The guide block 10 is arranged at the top of the process waste gas treatment device and is fixedly connected to the process waste gas treatment device. The guide block 10 has a guide groove formed on one side facing the guide rail 9. The guide rail 9 is inserted into the guide groove and is slidably connected to the guide block 10.

[0041] It should be understood that although in this embodiment the guide rail 9 is arranged on the cabinet and the guide block 10 is arranged on the process waste gas treatment device, so that the cabinet 8 is slidably connected to the process waste gas treatment device; in other embodiments, the guide rail can also be arranged on the process waste gas treatment device, and the guide block can be correspondingly arranged on the cabinet 8, which does not deviate from the scope of the present invention, and those skilled in the art can make arrangements according to actual needs.

[0042] As for the structure of the bottom sliding part, specifically, it includes a slide rail 11 and a slider 12. The slide rail 11 is arranged on the mounting platform and fixedly connected to the mounting platform. The slider 12 is arranged at the bottom end of the cabinet 8 and fixedly connected to the cabinet 8. A slide groove is provided on the side of the slider 12 facing the slide rail 11. The slide rail 11 is inserted into the slide groove and is slidably connected to the slider 12.

[0043] It should be understood that a slide groove may be provided at the bottom of the cabinet 8, and a corresponding slider may be provided on the mounting platform, so as to realize a sliding connection between the cabinet 8 and the process waste gas treatment device without departing from the scope of the present invention.

[0044] From the perspective of installation stability, in the bottom sliding member, the number of the slide rails 11 and the number of the sliders 12 are both at least two, and the slide rails 11 and the sliders 12 correspond one to one.

[0045] In order to facilitate the sliding of the cabinet body 8 , the push-pull type electric control cabinet further includes casters 13 arranged at the bottom end of the cabinet body 8 .

[0046] During maintenance, in order to ensure that the push-pull type electric control cabinet is in a stable state, the push-pull type electric control cabinet further includes brake pads arranged on the casters 13 .

[0047] Similarly, during transportation, the push-pull type electric control cabinet should be located on the side of the process waste gas treatment device. Therefore, the above-mentioned push-pull type electric control cabinet also includes a locking plate 14 provided on the process waste gas treatment device. During transportation, the locking plate 14 can be locked, and the cabinet body 8 is detachably fixedly connected to the process waste gas treatment device through the locking plate 14. During maintenance, the locking plate 14 can be loosened, and the cabinet body 8 is slidably connected to the process waste gas treatment device through a sliding member. Specifically, a first threaded hole is provided on the locking plate 14, and a second threaded hole is correspondingly provided on the cabinet body 8. When the cabinet body 8 needs to be locked with the process waste gas treatment device, screws can be screwed into the first threaded hole and the second threaded hole. When the cabinet body 8 needs to be pulled out, the screws can be screwed out of the first threaded hole and the second threaded hole.

[0048] In order to facilitate the pulling of the push-pull type electric control cabinet, the push-pull type electric control cabinet further includes a handle 15 arranged on the cabinet body 8 .

[0049] Embodiment 2

[0050] This embodiment provides a process waste gas treatment system, see Figure 3 , including a process waste gas treatment device and a pull-out type electric control cabinet provided in Example 1.

[0051] Compared with the prior art, the beneficial effects of the process waste gas treatment system provided in this embodiment are basically the same as the beneficial effects of the pull-out type electric control cabinet provided in the first embodiment, and are not described in detail here.

[0052] Specifically, the process waste gas treatment device includes a housing and a main unit 16 and a standby unit 17 arranged in parallel in the housing, and a pull-out electric control cabinet is arranged on the side of the housing. The electric control components of the main unit 16 and the standby unit 17 (such as circuit breakers, power supplies, relays, wiring terminals and other electrical components) are integrated into the pull-out electric control cabinet, further reducing the footprint of the process waste gas treatment system.

[0053] It should be noted that both the main unit 16 and the standby unit 17 can independently process the exhaust gas, and the two have the same structure, both including a three-way valve and an intake pipe, a reaction chamber, a water tank and a spray tower 5 connected in sequence. The intake pipes of the main unit 16 and the standby unit 17 are connected through a three-way valve, and the intake port of the three-way valve is connected to the upstream exhaust gas outlet. The first outlet of each three-way valve is connected to an intake pipe of the main unit 16, and the second outlet of the three-way valve is connected to a corresponding intake pipe of the standby unit 17.

[0054] Exemplarily, the process waste gas treatment system further comprises a swirl sheet 6, a spray head 7 and an annular scraper assembly arranged in the spray tower 5, see Figure 4Along the flow direction of the exhaust gas, the swirl sheet 6, the spray head 7, and the annular scraper assembly are arranged in sequence. This is because dust accumulation is likely to occur behind the spray head 7. The rotating cylinder 3 rotates and then drives the mounting ring 1 to rotate. Under the action of mechanical contact, the mounting ring 1 can scrape off the dust on the inner wall of the spray tower 5. The mounting ring 1 will also drive the elastic scraper 2 to rotate and beat the inner wall of the spray tower 5 to scrape off the dust adhering to the inner wall. The dust can fall from the gap between the blades of the swirl sheet 6, or fall downward with the flushing of the spray water, ensuring that the airflow of the spray tower 5 is unobstructed and the normal and stable operation of the process exhaust gas treatment system is guaranteed.

[0055] For the structure of the annular scraper assembly, see Figures 5 and 6 , including a scraper and a rotating cylinder 3, wherein the scraper includes a mounting ring 1 and a plurality of elastic scraper strips 2 arranged on the mounting ring 1, the rotating shaft of the rotating cylinder 3 is fixed to the mounting ring 1, and is used to drive the mounting ring 1 to rotate with the diameter as the axis, one end of the elastic scraper strip 2 is detachably connected to the mounting ring 1, and the other end of the elastic scraper strip 2 contacts the inner wall of the cavity of the process exhaust gas treatment system during the rotation of the mounting ring 1, and the radial projection of the elastic scraper strip 2 along the mounting ring 1 is non-linear. In this way, the annular scraper assembly is arranged in the process waste gas treatment system. On the one hand, the mounting ring 1 is driven to rotate with the diameter as the axis by rotating the cylinder 3, thereby driving multiple elastic scraper strips 2 to move relative to the inner wall of the cavity of the process waste gas treatment system, scraping and patting the inner wall of the cavity, so that the dust accumulated on the inner wall of the cavity can be cleaned, avoiding the problems of poor flow, dust accumulation and blockage of the process waste gas treatment system; on the other hand, since the multiple elastic scraper strips 2 are independently arranged, when one of the elastic scraper strips 2 is damaged, only the elastic scraper strip 2 needs to be replaced, and there is no need to replace the entire annular scraper assembly, thereby simplifying the replacement process and reducing the replacement cost; on the other hand, the radial projection of the elastic scraper strip 2 along the mounting ring 1 is non-linear. During the rotation of the mounting ring 1, the contact area between the elastic scraper strip 2 and the inner wall of the cavity of the process waste gas treatment system can be increased, thereby improving the dust cleaning efficiency and cleaning effect, and ensuring the normal and stable operation of the process waste gas treatment system.

[0056] In order to facilitate the detachability of the elastic scraper strip 2, the above-mentioned elastic scraper strip 2 can be an elastic cable tie, including a belt body 21 and a tie ring 22. One end of the belt body 21 is fixedly connected to the tie ring 22 and is integrally formed in actual application. The other end of the belt body 21 passes around the mounting ring 1 and then passes through the tie ring 22, so that the elastic scraper strip 2 can be detachably connected to the mounting ring 1.

[0057] Specifically, the structure of the belt body 21 can be in the following forms in order to further increase the contact area between the elastic scraper strip 2 and the inner wall of the chamber of the process waste gas treatment system:

[0058] In the first form, the belt body 21 is in an arc shape. Figure 7.

[0059] In the second form, the belt body 21 includes a straight strip 211 and a Z-shaped strip 212, see Figure 8 One end of the straight strip 211 is fixedly connected to the tie ring 22, and the other end of the straight strip 211 is detachably connected to the Z-shaped strip 212, or the belt body 21 is integrally formed. When the other end of the straight strip 211 is detachably connected to the Z-shaped strip 212, during actual installation, the other end of the straight strip 211 passes through the tie ring 22 after passing through the installation ring 1, and then the Z-shaped strip 212 is connected to the straight strip 211.

[0060] In the third form, the belt body 21 includes a straight strip 211 and an S-shaped strip 213, see Fig. 9 One end of the straight strip 211 is fixedly connected to the ring 22, and the other end of the straight strip 211 is detachably connected to the S-shaped strip 213, or the belt body 21 is integrally formed. When the other end of the straight strip 211 is detachably connected to the S-shaped strip 213, during actual installation, the other end of the straight strip 211 passes through the ring 22 after passing through the installation ring 1, and then the S-shaped strip 213 is connected to the straight strip 211.

[0061] In the fourth form, the belt body 21 includes a first main strip 214, a second main strip 215 and a plurality of branch strips 216, see Fig.10 One end of the first main strip 214 is fixedly connected to the ring 22, and the other end of the first main strip 214 is detachably connected to the second main strip 215. A plurality of branch strips 216 are provided on the second main strip 215, so that the belt body 21 forms a tree branch shape, or the belt body 21 is integrally formed. When the other end of the first main strip 214 is detachably connected to the second main strip 215, during actual installation, the other end of the first main strip 214 passes through the ring 22 after passing through the installation ring 1, and then the second main strip 215 is connected to the first main strip 214.

[0062] Taking into account that the mounting ring 1 also has relative movement with respect to the inner wall of the cavity, the structure of the mounting ring 1, specifically, includes a ring body and a wiping layer 4 (for example, a sponge layer, a steel wire layer, etc.) arranged on the outer wall of the ring body. During the rotation of the mounting ring 1, the wiping layer 4 contacts with the inner wall of the cavity of the process waste gas treatment system.

[0063] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the present invention should be included in the protection scope of the present invention.

Claims

1. A pull-out electric control cabinet, used in a process waste gas treatment system, the process waste gas treatment system comprising a process waste gas treatment device and the pull-out electric control cabinet, characterized in that: The pull-out type electric control cabinet comprises a cabinet body and a sliding member. The cabinet body is arranged on the side of the process waste gas treatment device, and the cabinet body is slidably connected to the process waste gas treatment device via the sliding member.

2. The pull-out electric control cabinet according to claim 1, characterized in that: It also includes an installation platform, and the cabinet and the process waste gas treatment device are both arranged on the installation platform.

3. The pull-out electric control cabinet according to claim 2, characterized in that: The sliding member comprises a top sliding member located at the top end of the cabinet and a bottom sliding member located at the bottom end of the cabinet. The cabinet is slidably connected to the process waste gas treatment device via the top sliding member and the bottom sliding member.

4. The pull-out type electric control cabinet according to claim 3, characterized in that: The top sliding member includes a guide rail and a guide block. The guide rail is arranged at the top of the cabinet and fixedly connected to the cabinet. The guide block is arranged at the top of the process waste gas treatment device and fixedly connected to the process waste gas treatment device. The guide block has a guide groove on one side facing the guide rail. The guide rail is inserted into the guide groove and is slidably connected to the guide block.

5. The pull-out electric control cabinet according to claim 3, characterized in that: The bottom sliding member includes a slide rail and a slider, the slide rail is arranged on the mounting platform and fixedly connected to the mounting platform, the slider is arranged at the bottom of the cabinet and fixedly connected to the cabinet, a slide groove is provided on a side of the slider facing the slide rail, the slide rail is inserted into the slide groove and is slidably connected to the slider.

6. The pull-out electric control cabinet according to claim 1, characterized in that: Also includes casters disposed at the bottom of the cabinet; And / or, it also includes a locking piece provided on the process waste gas treatment device, and the cabinet is detachably fixedly connected to the process waste gas treatment device through the locking piece; And / or, it also includes a handle arranged on the cabinet body.

7. The pull-out electric control cabinet according to claim 6, characterized in that: The utility model also comprises a brake pad arranged on the caster.

8. A process waste gas treatment system, characterized in that: It comprises a pull-out type electric control cabinet as described in any one of claims 1 to 7.

9. The process waste gas treatment system according to claim 8, characterized in that: The process waste gas treatment device comprises a shell and a main machine and a standby machine arranged in parallel in the shell. The pull-out electric control cabinet is arranged on the side of the shell. The electrical components of the main machine and the standby machine are all arranged in the pull-out electric control cabinet.

10. The process waste gas treatment system according to claim 9, characterized in that: The main machine and the standby machine both include a three-way valve and an intake pipe, a reaction chamber, a water tank and a spray tower connected in sequence. The intake pipes of the main machine and the standby machine are connected through the three-way valve, the intake port of the three-way valve is connected to the upstream exhaust gas outlet, the first outlet of the three-way valve is connected to the intake pipe of the main machine, and the second outlet of the three-way valve is connected to the intake pipe of the standby machine.

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