Film coating equipment for semiconductor production

Abstract

The utility model discloses coating equipment for semiconductor production, which comprises a supporting plate, the upper surface of the supporting plate is fixedly connected with a box body, a fixing plate is arranged in the box body, the upper surface of the fixing plate is respectively and fixedly connected with a fixing block and a double-head motor which are symmetrical, and the double-head motor is arranged in the box body. First bearings are fixedly embedded in the side faces, close to each other, of the fixing blocks, two sets of symmetrical sliding ways are formed in the upper surface of the fixing plate, second bearings are fixedly embedded in the side faces, close to each other, of the connecting plates, and a rotating rod is fixedly connected to the inner ring of each second bearing. According to the device, two output ends of a double-end motor drive clamping plates and a connecting plate to move through rotation of the screw rod by arranging the screw rod, so that the two clamping plates can conveniently clamp and fix a semiconductor, and output ends of two driving motors drive the two clamping plates to rotate at the same time through the rotating rod by arranging the rotating rod; and the two rotating clamping plates drive the semiconductor to rotate.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a film coating device for semiconductor production. Background Art

[0002] A semiconductor is a material with an electrical conductivity between that of an insulator and that of a conductor. Its electrical conductivity is easily controlled and can be used as a component material for information processing. From the perspective of science and technology or economic development, semiconductors are very important. The core units of many electronic products, such as computers, mobile phones, and digital recorders, use changes in the electrical conductivity of semiconductors to process information. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., and silicon is the most influential semiconductor material in commercial applications.

[0003] According to a semiconductor production coating device that prevents deviation, the device adjusts the position of the first clamping block to facilitate adjustment of the distance between the first clamping block and the second clamping block so as to clamp the semiconductor to be processed and prevent the semiconductor to be processed from deviating. However, when coating the semiconductor, the device can only coat one side of the semiconductor, and the other side needs to be manually flipped by the staff to complete the semiconductor processing and coating. This method greatly increases the difficulty of the staff's work and affects the staff's work efficiency. For this reason, we propose a semiconductor production coating device to solve the above problems. Utility Model Content

[0004] The purpose of the utility model is to provide a coating device for semiconductor production to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A coating device for semiconductor production, comprising a support plate, the upper surface of the support plate is fixedly connected to a box body, a fixing plate is arranged inside the box body, and symmetrical fixing blocks and double-headed motors are fixedly connected to the upper surface of the fixing plate respectively, a first bearing is fixedly inlaid on the side of each fixing block close to each other, two output ends of the double-headed motor are fixedly connected to screw rods, an end of each screw rod away from each other passes through the first bearing and is fixedly connected to the inner ring of the first bearing, a threaded tube is threadedly connected to the outer surface of each screw rod, two groups of symmetrical slideways are opened on the upper surface of the fixing plate, the interior of one group of the slideways is threadedly connected to the threaded tube through a slider, the outer surface of each threaded tube is fixedly connected to a connecting plate, the interior of one group of the slideways is slidably connected to the connecting plate through a slider, a second bearing is fixedly inlaid on the side of each connecting plate close to each other, the inner ring of each second bearing is fixedly connected to a rotating rod, and a clamp is fixedly connected to the end of each rotating rod close to each other, and a driving motor is fixedly connected to the side of each connecting plate away from each other, and the output end of each driving motor is fixedly connected to the rotating rod.

[0007] In a further embodiment, two groups of support legs are fixedly connected to the bottom surface of the support plate, and a support pad is fixedly connected to the bottom surface of each group of support legs.

[0008] In a further embodiment, a pump body is fixedly connected to the upper surface of the box body, a connecting pipe is provided inside the box body, and an output end of the pump body is fixedly connected to the connecting pipe.

[0009] In a further embodiment, two groups of support seats are fixedly connected inside the box body, and the top ends of the two groups of support seats are fixedly connected to the fixing plate.

[0010] In a further embodiment, a filter is fixedly embedded on the upper surface of the fixed plate, and a recovery bin is fixedly connected to the bottom surface of the fixed plate. The bottom end of the recovery bin passes through the box body and the support plate respectively and extends to the outside of the support plate. The top of the recovery bin is connected to the bottom surface of the filter, and a recovery box is fixedly connected to the bottom surface of the support plate, and the upper surface of the recovery box is connected to the recovery bin.

[0011] In a further embodiment, a control panel is fixedly connected to the left side of the box body, and the control panel is electrically connected to the pump body, the double-head motor and the drive motor through wires.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] This device uses a set screw, in cooperation with a double-headed motor, so that the two output ends of the double-headed motor drive the clamping plate and the connecting plate to move through the rotation of the screw, so that the two clamping plates can clamp and fix the semiconductor. Through the set rotating rod, in cooperation with the driving motor, the output ends of the two driving motors drive the two clamping plates to rotate simultaneously through the rotating rod, so that the two rotating clamping plates drive the semiconductor to rotate, thereby facilitating the staff to coat the two sides of the semiconductor. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A three-dimensional diagram of a coating device used in semiconductor production.

[0015] Figure 2 A perspective view of a side view of a coating device used in semiconductor production.

[0016] Figure 3 A perspective view of a front cross-section of a coating device used in semiconductor production.

[0017] Figure 4 A coating equipment for semiconductor production Figure 1 A schematic diagram of the enlarged structure in the middle.

[0018] In the figure: 1. support plate; 2. support leg; 3. support pad; 4. box body; 5. recovery box; 6. support seat; 7. fixing plate; 8. pump body; 9. fixing block; 10. control panel; 11. double-head motor; 12. connecting pipe; 13. recovery bin; 14. first bearing; 15. screw; 16. threaded pipe; 17. splint; 18. filter; 19. rotating rod; 20. slideway; 21. connecting plate; 22. drive motor; 23. second bearing. DETAILED DESCRIPTION

[0019] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0020] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-4 In the utility model, a coating device for semiconductor production includes a support plate 1, the upper surface of the support plate 1 is fixedly connected with a box body 4, a fixing plate 7 is arranged inside the box body 4, and the upper surface of the fixing plate 7 is respectively fixedly connected with symmetrical fixing blocks 9 and double-headed motors 11, and the side surfaces of each fixing block 9 close to each other are fixedly inlaid with a first bearing 14, and the two output ends of the double-headed motor 11 are fixedly connected with screws 15, and the ends of each screw 15 away from each other penetrate the first bearing 14 and are fixedly connected to the inner ring of the first bearing 14, and the outer surface of each screw 15 is threadedly connected with a threaded tube 16, and the upper surface of the fixing plate 7 is provided with two groups of symmetrical slideways 20, and the interior of one group of slideways 20 is threadedly connected with the threaded tube 16 through a slider, and each threaded tube The outer surface of 16 is fixedly connected with a connecting plate 21, and the interior of a group of slideways 20 is slidably connected to the connecting plate 21 through a slider, and the side of each connecting plate 21 close to each other is fixedly inlaid with a second bearing 23, and the inner ring of each second bearing 23 is fixedly connected with a rotating rod 19, and the end of each rotating rod 19 close to each other is fixedly connected with a clamping plate 17, and the side of each connecting plate 21 away from each other is fixedly connected with a driving motor 22, and the output end of each driving motor 22 is fixedly connected to the rotating rod 19. Through the arranged clamping plate 17, with the cooperation of the screw 15 and the rotating rod 19, the double-headed motor 11 drives the clamping plate 17 to move, and the driving motor 22 drives the clamping plate 17 to rotate through the rotating rod 19, so as to facilitate better efficiency of rotating semiconductor coating.

[0023] Two groups of support legs 2 are fixedly connected to the bottom surface of the support plate 1, and a support pad 3 is fixedly connected to the bottom surface of each group of support legs 2. A pump body 8 is fixedly connected to the upper surface of the box body 4. A connecting pipe 12 is provided inside the box body 4. The output end of the pump body 8 is fixedly connected to the connecting pipe 12. Through the provided pump body 8, in connection with the connecting pipe 12, it is convenient to perform coating treatment on the semiconductor.

[0024] Two groups of support seats 6 are fixedly connected inside the box body 4, and the top ends of the two groups of support seats 6 are fixedly connected to the fixed plate 7. The upper surface of the fixed plate 7 is fixedly inlaid with a filter screen 18, and the bottom surface of the fixed plate 7 is fixedly connected to a recovery bin 13. The bottom end of the recovery bin 13 passes through the box body 4 and the support plate 1 respectively and extends to the outside of the support plate 1. The top of the recovery bin 13 is connected to the bottom surface of the filter screen 18, and the bottom surface of the support plate 1 is fixedly connected to a recovery box 5. The upper surface of the recovery box 5 is connected to the recovery bin 13. The left side of the box body 4 is fixedly connected to a control panel 10, and the control panel 10 is electrically connected to the pump body 8, the double-head motor 11 and the drive motor 22 through wires. The recovery bin 13 and the recovery box 5 are set to facilitate the recovery of excess coating liquid.

[0025] The working principle of the utility model is: when in use, the staff first starts the double-headed motor 11, and the two output ends of the double-headed motor 11 drive the connecting plate 21 and the clamping plate 17 to move through the rotation of the screw 15. After the two clamping plates 17 are moved to the appropriate position, the staff places the semiconductor to be coated between the two clamping plates 17, so that the two clamping plates 17 clamp and fix the semiconductor, and then starts the pump body 8, the pump body 8 draws liquid and sprays it through the connecting pipe 12, so as to coat the semiconductor. When the coating is completed on one side of the semiconductor, the two rotating rods 19 are controlled by the driving motor 22 to drive the clamping plate 17 and the semiconductor to rotate, and the other side of the semiconductor is coated. After the coating is completed, the excess liquid falls into the inside of the recycling box 5 through the recycling bin 13 and is cleaned by the staff.

[0026] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0027] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A film coating device for semiconductor production, characterized in that: The invention comprises a support plate (1), the upper surface of which is fixedly connected to a box body (4), a fixing plate (7) is arranged inside the box body (4), the upper surface of which is fixedly connected to symmetrical fixing blocks (9) and double-headed motors (11), the side surfaces of each fixing block (9) close to each other are fixedly inlaid with a first bearing (14), the two output ends of the double-headed motor (11) are fixedly connected to screw rods (15), the ends of each screw rod (15) away from each other pass through the first bearing (14) and are fixedly connected to the inner ring of the first bearing (14), the outer surface of each screw rod (15) is threadedly connected to a threaded tube (16), and the upper surface of the fixing plate (7) is provided with two sets of symmetrical slideways (2 0), wherein the interior of a group of the slideways (20) is threadedly connected to the threaded tube (16) through a slider, and the outer surface of each threaded tube (16) is fixedly connected to a connecting plate (21), wherein the interior of a group of the slideways (20) is slidably connected to the connecting plate (21) through a slider, and a second bearing (23) is fixedly embedded on a side surface of each connecting plate (21) close to each other, and the inner ring of each second bearing (23) is fixedly connected to a rotating rod (19), and an end of each rotating rod (19) close to each other is fixedly connected to a clamping plate (17), and a side surface of each connecting plate (21) away from each other is fixedly connected to a driving motor (22), and the output end of each driving motor (22) is fixedly connected to the rotating rod (19).

2. The semiconductor production coating equipment according to claim 1, characterized in that: Two groups of support legs (2) are fixedly connected to the bottom surface of the support plate (1), and a support pad (3) is fixedly connected to the bottom surface of each group of support legs (2).

3. The semiconductor production coating equipment according to claim 1, characterized in that: A pump body (8) is fixedly connected to the upper surface of the box body (4), a connecting pipe (12) is provided inside the box body (4), and an output end of the pump body (8) is fixedly connected to the connecting pipe (12).

4. The semiconductor production coating equipment according to claim 1, characterized in that: Two groups of support seats (6) are fixedly connected inside the box body (4), and the top ends of the two groups of support seats (6) are fixedly connected to a fixing plate (7).

5. The semiconductor production coating equipment according to claim 1, characterized in that: The upper surface of the fixed plate (7) is fixedly inlaid with a filter screen (18), the bottom surface of the fixed plate (7) is fixedly connected to a recovery bin (13), the bottom end of the recovery bin (13) respectively penetrates the box body (4) and the support plate (1) and extends to the outside of the support plate (1), the top end of the recovery bin (13) is connected to the bottom surface of the filter screen (18), the bottom surface of the support plate (1) is fixedly connected to a recovery box (5), and the upper surface of the recovery box (5) is connected to the recovery bin (13).

6. The semiconductor production coating equipment according to claim 1, characterized in that: A control panel (10) is fixedly connected to the left side of the box body (4), and the control panel (10) is electrically connected to the pump body (8), the double-headed motor (11) and the driving motor (22) respectively through wires.

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