Lens cleaning device

Abstract

The embodiment of the utility model provides a lens cleaning device, and relates to the technical field of semiconductor manufacturing. The device comprises a solution tank and a containing basket, the solution tank is used for containing a cleaning solution, the containing basket is used for containing a to-be-cleaned lens, and the containing basket containing the to-be-cleaned lens can be placed in the solution tank to be soaked and cleaned. The containing basket comprises a plurality of limiting grooves and isolation plates, the distance between every two adjacent isolation plates can be adjusted by disassembling and installing the isolation plates, and the space between every two adjacent isolation plates is used for containing the lens to be cleaned. Through mutual cooperation of the limiting grooves and the detachable isolation plates, the space for containing the to-be-cleaned lenses can be flexibly adjusted, the to-be-cleaned lenses can be effectively separated, it is ensured that each to-be-cleaned lens can be fully exposed in a cleaning solution, the problem that cleaning is not thorough due to lens stacking is solved, and the cleaning efficiency is improved. In addition, the solution tank is used for containing the cleaning solution, the cleaning solution can be recycled, and the production cost is reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a lens cleaning device. Background Art

[0002] In the semiconductor integrated circuit manufacturing process, lens cleanliness is one of the important factors affecting the reliability of evaporated film-coated semiconductor devices.

[0003] In existing cleaning technology, lenses are usually cleaned in an overlapping manner. However, during the cleaning process, metal skin may be stuck between the lenses and cannot be cleaned off. Operators are required to remove their gloves and clean them multiple times, resulting in low cleaning efficiency. Utility Model Content

[0004] In order to at least overcome the above-mentioned deficiencies in the prior art, the purpose of the present application is to provide a lens cleaning device.

[0005] In a first aspect, an embodiment of the present application provides a lens cleaning device, the lens cleaning device comprising a solution tank and a containing basket, the containing basket being placed in the solution tank, the containing basket being used to place a lens to be cleaned;

[0006] The solution tank is also used to hold the cleaning solution;

[0007] The containing basket includes a first side wall and a second side wall which are arranged opposite to each other, and a plurality of limiting grooves are correspondingly arranged on the first side wall and the second side wall. The containing basket also includes an isolation plate which is detachably installed in the limiting grooves of the first side wall and the second side wall, wherein the space between adjacent isolation plates is used for placing the lenses to be cleaned.

[0008] In a possible implementation manner, the limiting grooves are arranged at equal intervals on the first side wall and the second side wall, and an extending direction of the limiting grooves is perpendicular to the bottom of the accommodating basket.

[0009] In a possible implementation, the containing basket further includes a plurality of water leakage holes, and the plurality of water leakage holes are evenly arranged at the bottom of the containing basket.

[0010] In a possible implementation, a plurality of the water leakage holes are arranged in an array at the bottom of the containing basket, and a distance between the centers of two adjacent water leakage holes is 15 to 25 cm.

[0011] In a possible implementation, the accommodating basket further includes an adjusting member disposed at the position of the water leakage hole, and the adjusting member is used to adjust the aperture size of the water leakage hole.

[0012] In a possible implementation, the lens cleaning device further includes a cleaning nozzle, and the cleaning nozzle includes a circulation pipeline connected to the solution tank;

[0013] The cleaning nozzle is arranged at one side of the opening of the solution tank, and a water outlet direction of the cleaning nozzle and an extending direction of the limiting groove form a certain angle.

[0014] In a possible implementation, the cleaning nozzle further includes a monitoring component and a control component;

[0015] The monitoring component is arranged in the circulation pipeline and is used to detect the flow rate and pressure of the solution in the circulation pipeline;

[0016] The control component is used to adjust the water flow size and flushing force of the cleaning nozzle.

[0017] In a possible implementation, the solution tank includes a filter isolation plate and a filter screen disposed in the solution tank;

[0018] The filter isolation plate is arranged on one side close to the bottom of the solution tank, and is used to filter large particles of impurities in the cleaning solution;

[0019] The filter screen is arranged at the position where the solution tank is connected to the circulation pipeline, and is used for filtering small particle impurities in the cleaning solution.

[0020] In a possible implementation, the containing basket includes a third side wall and a fourth side wall disposed between the first side wall and the second side wall, and a limiting card slot is disposed on a side of the third side wall and the fourth side wall away from the bottom of the containing basket, and the opening of the limiting card slot faces the inside of the containing basket and is disposed opposite to each other;

[0021] The lens cleaning device also includes a detachable handle, and the handle is detachably mounted on the accommodating basket through the limiting slot.

[0022] In a possible implementation, the material of the containing basket includes fluororubber and polypropylene material.

[0023] Based on any of the above aspects, the lens cleaning device provided in the embodiment of the present application includes a solution tank and a containing basket, wherein the solution tank is used to hold the cleaning solution, and the containing basket is used to place the lenses to be cleaned, and the containing basket containing the lenses to be cleaned can be placed in the solution tank for soaking and cleaning. The containing basket includes a plurality of limiting grooves and isolation plates, wherein the spacing between adjacent isolation plates can be adjusted by disassembling and installing the isolation plates, and the space between adjacent isolation plates is used to place the lenses to be cleaned. Through the mutual cooperation of the limiting grooves and the detachable isolation plates, the space for placing the lenses to be cleaned can be flexibly adjusted, and the lenses to be cleaned can be effectively separated to ensure that each lens to be cleaned can be fully exposed to the cleaning solution, thereby solving the problem of incomplete cleaning caused by lens stacking and improving the cleaning efficiency. In addition, by using the solution tank to hold the cleaning solution, the cleaning solution can be recycled to reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 A possible structural schematic diagram of a lens cleaning device provided in an embodiment of the present application;

[0026] Figure 2 A schematic diagram of a partial structure of a container basket provided in an embodiment of the present application Figure 1 ;

[0027] Figure 3 A schematic diagram of a partial structure of a container basket provided in an embodiment of the present application Figure 2 ;

[0028] Figure 4 A schematic diagram of a partial structure of a container basket provided in an embodiment of the present application Figure 3 . DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0030] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0031] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0032] In the description of this application, it should be noted that the terms "upper", "lower", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0033] In the description of this application, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "disposed", "connected", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0034] It should be noted that, in the absence of conflict, different features in the embodiments of the present application may be combined with each other.

[0035] Please refer to Figure 1-3 The present application provides a lens cleaning device 100, which includes a solution tank 110 and a receiving basket 120. The solution tank 110 is used to contain the cleaning solution, and the receiving basket 120 is used to place the lenses to be cleaned. The receiving basket 120 containing the lenses to be cleaned can be placed in the solution tank 110 for soaking and cleaning, wherein the above-mentioned lenses can be used for wafer evaporation.

[0036] The receiving basket 120 includes a first side wall A1 and a second side wall A2 which are arranged opposite to each other, and a plurality of limiting grooves 121 are correspondingly arranged on the first side wall A1 and the second side wall A2. The receiving basket 120 also includes a separation plate 122 which is detachably mounted in the limiting grooves 121 of the first side wall A1 and the second side wall A2, wherein the spacing between adjacent separation plates 122 can be adjusted by removing and mounting the separation plates 122, and the space between adjacent separation plates 122 is used to place the lenses to be cleaned. Specifically, when the separation plates 122 are not installed in the receiving basket 120, a plurality of dirty lenses to be cleaned can be stacked and placed in the receiving basket 120, and the receiving basket 120 containing the lenses to be cleaned can be placed in the solution tank 110 for preliminary soaking and cleaning. After removing the surface impurities of the lenses, the separation plates 122 can be installed through the limiting grooves 121, and the lenses can be placed one by one in the space between the adjacent separation plates 122, and then the receiving basket 120 containing the lenses to be cleaned can be placed in the solution tank 110 for deep cleaning.

[0037] In the above structure, the space for placing the lenses to be cleaned can be flexibly adjusted by the cooperation between the limiting groove 121 and the detachable isolation plate 122, and the lenses to be cleaned can be effectively separated to ensure that each lens to be cleaned can be fully exposed to the cleaning solution, thereby solving the problem of incomplete cleaning caused by lens stacking and improving the cleaning efficiency. In addition, by using the solution tank 110 to hold the cleaning solution, the cleaning solution can be recycled to reduce production costs.

[0038] As a possible implementation, please refer again to Figure 2 and Figure 3 The limiting grooves 121 can be arranged at equal intervals on the first side wall A1 and the second side wall A2, and the extension direction of the limiting grooves 121 can be perpendicular to the bottom of the containing basket 120, or it can be non-perpendicular to the bottom of the containing basket 120. Exemplarily, the extension direction of the limiting grooves 121 is perpendicular to the bottom of the containing basket 120, which means that the isolation plate 122 installed in the containing basket 120 through the limiting grooves 121 is perpendicular to the bottom of the containing basket 120.

[0039] Further, please refer to 4, the receiving basket 120 may also include a plurality of water leakage holes 123, which are convenient for leaking out the cleaning solution and impurities, and preventing the cleaning solution from remaining in the isolation plate 122. At the same time, in the process of drying the cleaned lenses, the water leakage holes 123 can also promote the upper and lower air convection and improve the drying efficiency. The plurality of water leakage holes 123 can be evenly and / or unevenly arranged at the bottom of the receiving basket 120. For example, the plurality of water leakage holes 123 can be evenly arranged in the form of an array at the bottom of the receiving basket 120. The receiving basket 120 also includes an adjustment member arranged at the position of the water leakage hole 123, and the adjustment member is used to adjust the aperture size of the water leakage hole 123. For example, the adjustment member can be a rotary valve. In addition, when multiple leakage holes 123 can be evenly arranged in an array at the bottom of the containing basket 120, there is a certain distance between the leakage holes 123 located at the outermost side of the array and the side wall connected to the bottom of the containing basket 120, wherein the distance between the centers of two adjacent leakage holes 123 can be 15 to 25 cm.

[0040] Furthermore, the containing basket 120 may also include a third side wall and a fourth side wall disposed between the first side wall A1 and the second side wall A2, and a limiting card slot is disposed on one side of the third side wall and the fourth side wall away from the bottom of the containing basket 120, and the opening of the limiting card slot faces the inside of the containing basket 120 and is disposed opposite to each other. The lens cleaning device also includes a detachable handle, which is detachably mounted on the containing basket 120 through the limiting card slot, so as to facilitate the transfer of the lenses placed in the containing basket 120. Exemplarily, the handle can be installed after the lens cleaning is completed, and the lenses in the containing basket 120 can be transferred to the drying device for drying through the handle. In addition, the containing basket 120 can be made of fluororubber and polypropylene materials.

[0041] As a possible implementation, the lens cleaning device 100 may further include a cleaning nozzle and a circulation pipeline. The cleaning nozzle is disposed above the solution tank 110 and connected to the solution tank 110 through the circulation pipeline to circulate the cleaning solution and reduce production costs. At the same time, there is a certain angle between the water outlet direction of the cleaning nozzle and the extension direction of the limiting groove 121, that is, there is a certain angle between the cleaning nozzle and the lens to be cleaned placed in the receiving basket 120. The water flow of the cleaning nozzle can effectively remove impurities attached to the lens, thereby improving the cleaning effect of the lens.

[0042] In addition, in order to better control the water flow and flushing force of the cleaning nozzle, the cleaning nozzle may also include a monitoring component and a control component. The monitoring component can monitor the solution flow and pressure in the circulation pipeline in real time, and adjust the water flow and flushing force through the control component to prevent the flushing force from being too strong to damage the lens while effectively cleaning the dirt on the lens surface. It is not difficult to understand that in order for the cleaning nozzle to effectively flush the lens surface, the depth of the isolation plate 122 should be less than or equal to the depth of the accommodating basket 120 to prevent the isolation plate 122 from blocking the water flow.

[0043] Furthermore, the solution tank 110 may also include a filter isolation plate 122 and a filter screen. The filter isolation plate 122 may be disposed on one side close to the bottom of the solution tank 110 to block large particles of impurities and prevent the impurities from clogging the circulation pipe. In order to further filter small particles of impurities, a filter screen may be disposed at the connection position between the solution tank 110 and the circulation pipe to prevent small particles of impurities from entering the circulation pipe and clogging the cleaning nozzle. The aperture of the filter hole on the filter isolation plate 122 may be smaller than the aperture of the above-mentioned leakage hole 123, and in order to facilitate the removal of large particles of impurities on the filter isolation plate 122, the filter isolation plate 122 may be configured as a detachable isolation plate 122. For example, the two filter isolation plates 122 may include two handles hung on the side wall of the solution tank 110, the length of which is less than the depth of the solution tank.

[0044] Based on the above lens cleaning device 100, the specific method of cleaning the lens can be: first, the isolation plate 122 in the receiving basket 120 can be removed, and multiple dirty lenses to be cleaned are stacked and placed in the receiving basket 120, and the receiving basket 120 containing the lenses to be cleaned is placed in the solution tank 110 for preliminary soaking and cleaning, and the surface impurities of the lenses are first removed. Then, the isolation plate 122 is installed through the limiting groove 121, and the lenses are placed one by one in the space of the adjacent isolation plates 122, and then the receiving basket 120 is placed in the solution tank 110 for deep cleaning. At this time, the cleaning nozzle can be turned on, and the water flow size and pressure can be adjusted by the control component, and the impurities attached to the lens can be removed by the flowing water flow until the lens is cleaned. Then, the receiving basket 120 is taken out, and the handle is installed through the limiting card slot, and the lens in the receiving basket 120 is transferred to the drying equipment for drying through the handle. In addition, after the cleaning of the lens is completed, the impurities of the cleaning solution in the solution tank 110 can be removed by filtering the partition and the filter.

[0045] In summary, an embodiment of the present application provides a lens cleaning device, which includes a solution tank and a containing basket, wherein the solution tank is used to hold a cleaning solution, and the containing basket is used to place lenses to be cleaned, and the containing basket containing the lenses to be cleaned can be placed in the solution tank for soaking and cleaning. The containing basket includes a plurality of limiting grooves and isolation plates, wherein the spacing between adjacent isolation plates can be adjusted by disassembling and installing the isolation plates, and the space between adjacent isolation plates is used to place the lenses to be cleaned. Through the mutual cooperation of the limiting grooves and the detachable isolation plates, the space for placing the lenses to be cleaned can be flexibly adjusted, and the lenses to be cleaned can be effectively separated to ensure that each lens to be cleaned can be fully exposed to the cleaning solution, thereby solving the problem of incomplete cleaning caused by lens stacking and improving the cleaning efficiency. In addition, by using the solution tank to hold the cleaning solution, the cleaning solution can be recycled to reduce production costs.

[0046] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A lens cleaning device, characterized in that: The lens cleaning device comprises a solution tank and a containing basket, wherein the containing basket is placed in the solution tank and is used to place the lens to be cleaned; The solution tank is also used to hold the cleaning solution; The containing basket includes a first side wall and a second side wall which are arranged opposite to each other, and a plurality of limiting grooves are correspondingly arranged on the first side wall and the second side wall. The containing basket also includes an isolation plate which is detachably installed in the limiting grooves of the first side wall and the second side wall, wherein the space between adjacent isolation plates is used for placing the lenses to be cleaned.

2. The lens cleaning device according to claim 1, characterized in that: The limiting grooves are arranged at equal intervals on the first side wall and the second side wall, and an extending direction of the limiting grooves is perpendicular to the bottom of the accommodating basket.

3. The lens cleaning device according to claim 2, characterized in that: The containing basket further comprises a plurality of water leakage holes, and the plurality of water leakage holes are evenly arranged at the bottom of the containing basket.

4. The lens cleaning device according to claim 3, characterized in that: A plurality of the water leakage holes are arranged in an array at the bottom of the accommodating basket, and the distance between the centers of two adjacent water leakage holes is 15 to 25 cm.

5. The lens cleaning device according to claim 4, characterized in that: The containing basket further comprises an adjusting member arranged at the position of the water leakage hole, and the adjusting member is used to adjust the aperture size of the water leakage hole.

6. The lens cleaning device according to claim 1, characterized in that: The lens cleaning device also includes a cleaning nozzle, and the cleaning nozzle includes a circulation pipeline connected to the solution tank; The cleaning nozzle is arranged at one side of the opening of the solution tank, and a water outlet direction of the cleaning nozzle and an extending direction of the limiting groove form a certain angle.

7. The lens cleaning device according to claim 6, characterized in that: The cleaning nozzle also includes a monitoring component and a control component; The monitoring component is arranged in the circulation pipeline and is used to detect the flow rate and pressure of the solution in the circulation pipeline; The control component is used to adjust the water flow size and flushing force of the cleaning nozzle.

8. The lens cleaning device according to claim 6, characterized in that: The solution tank comprises a filter isolation plate and a filter screen arranged in the solution tank; The filter isolation plate is arranged on one side close to the bottom of the solution tank, and is used to filter large particles of impurities in the cleaning solution; The filter screen is arranged at the position where the solution tank is connected to the circulation pipeline, and is used for filtering small particle impurities in the cleaning solution.

9. The lens cleaning device according to claim 2, characterized in that: The containing basket comprises a third side wall and a fourth side wall disposed between the first side wall and the second side wall, and a limiting slot is disposed on a side of the third side wall and the fourth side wall away from the bottom of the containing basket, and the opening of the limiting slot faces the inside of the containing basket and is disposed opposite to each other; The lens cleaning device also includes a detachable handle, and the handle is detachably mounted on the accommodating basket through the limiting slot.

10. The lens cleaning device according to claim 1, characterized in that: The material of the containing basket includes fluororubber and polypropylene.

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