Clamp for producing silicon single crystal rod

Abstract

The utility model discloses a clamp for producing a silicon single crystal rod, and relates to the technical field of silicon single crystal rod production equipment. The device comprises a bottom plate, two symmetrically-distributed supporting bases are fixedly arranged on the upper surface of the bottom plate, the tops of the supporting bases are arranged in an arc shape, grooves are formed in the two ends of the bottom plate in a penetrating mode, moving blocks are arranged in the grooves in a sliding mode, and a vertically-arranged positioning plate is fixedly arranged on the tops of the moving blocks. A three-jaw chuck is installed on the side, facing the supporting base, of each positioning plate, a rotating shaft is fixedly arranged at the center of the back face of each three-jaw chuck, and a driving motor is installed on the side, away from the supporting base, of one positioning plate. After a single crystal silicon rod is placed by a worker, the driving motor can be started to drive the single crystal silicon rod to stably rotate by rotating the rotating wheel, so that the worker can conveniently inspect, the operation steps of the worker are reduced, the labor amount is reduced, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon rod production equipment, in particular to a clamp for single crystal silicon rod production. Background Art

[0002] Monocrystalline silicon is a relatively active non-metallic element and an important component of crystal materials. It is at the forefront of the development of new materials. Its main uses are as semiconductor materials and solar photovoltaic power generation and heating. The production process of monocrystalline silicon goes through processes such as crystal pulling, truncation, inspection, cylindrical grinding, and surface grinding before the monocrystalline silicon rod is sliced. When inspecting the truncated monocrystalline silicon rod, it is necessary to conduct a complete observation and inspection of its surface to avoid defects on the surface of the monocrystalline silicon wafer, which will affect the subsequent production of silicon wafers.

[0003] However, when inspecting the cut single crystal silicon rod, the staff needs to rotate the single crystal silicon rod to inspect different positions. This operation will increase the workload of the staff, and it is also inconvenient to return the material after inspection, and the overall operability is poor. Utility Model Content

[0004] In order to solve the above-mentioned problems, the purpose of the utility model is to provide a clamp for producing single crystal silicon rods.

[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions: a clamp for producing single crystal silicon rods, comprising a base plate, two symmetrically distributed supporting bases are fixedly arranged on the upper surface of the base plate, the top of the supporting base is arranged in an arc shape, grooves are penetrated at both ends of the base plate, and a moving block is slidably arranged in the groove, a vertically arranged positioning plate is fixedly arranged on the top of the moving block, a three-jaw chuck is installed on the side of the positioning plate facing the supporting base, a rotating shaft is fixedly arranged at the center of the back side of the three-jaw chuck, a driving motor is installed on the side of one of the positioning plates away from the supporting base, the output end of the driving motor is coaxially fixed on the rotating shaft, and a connecting component is provided between the bottoms of the two moving blocks.

[0006] Preferably, the connecting assembly includes a first rotating rod and a second rotating rod, the first rotating rod and the second rotating rod are movably inserted on two movable blocks respectively, a limiting bar is fixedly provided on the outside of the first rotating rod, the first rotating rod and the limiting bar are movably inserted in the second rotating rod, and the first rotating rod and the second rotating rod are connected to the adjacent rotating shafts through belt transmission.

[0007] Preferably, the two moving blocks are located below the first rotating rod and the second rotating rod and are provided with a double-headed screw, the threads at both ends of the double-headed screw are opposite, the bottoms of the two moving blocks are respectively threaded on the double-headed screw, and vertically arranged vertical plates are fixed at both ends of the lower surface of the base plate, and the two ends of the double-headed screw are rotatably arranged on the vertical plates.

[0008] Preferably, a support plate is installed on the upper surface of the bottom plate between the two support bases, an arc-shaped groove identical to the top of the support base is provided at the middle end of the upper surface of the support plate, and a cylinder is installed at the bottom of the support plate.

[0009] Compared with the prior art, the beneficial effects of the utility model are:

[0010] 1. In the utility model, after placing the single crystal silicon rod, the staff rotates the rotating wheel to start the driving motor to drive the single crystal silicon rod to rotate stably, so as to facilitate the staff to carry out inspection while reducing their own operation steps, reducing labor and improving work efficiency;

[0011] 2. The cylinder in the utility model can push the support plate upward, and the single crystal silicon rods arranged on the support plate will be forced to move upward and out of the working range of the device, making it convenient for the staff to return the material. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0014] Figure 2 This is a schematic diagram of the positioning plate structure of the utility model.

[0015] Figure 3 This is a schematic diagram of the bottom plate structure of the utility model when viewed from above.

[0016] In the figure: 1. bottom plate; 11. supporting base; 12. groove; 13. positioning plate; 14. three-jaw chuck; 15. rotating shaft; 16. driving motor; 17. rotating ring; 2. moving block; 21. first rotating rod; 22. second rotating rod; 23. limiting strip; 24. belt; 25. stopper; 3. vertical plate; 31. double-headed screw; 32. rotating wheel; 4. supporting plate; 41. cylinder; 42. limiting rod. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] Example: Figure 1-3 As shown, the utility model provides a clamp for producing single crystal silicon rods, including a base plate 1, two symmetrically distributed supporting bases 11 are fixedly provided on the upper surface of the base plate 1, the top of the supporting base 11 is arranged in an arc shape, grooves 12 are penetrated at both ends of the base plate 1, a moving block 2 is slidably arranged in the groove 12, a vertically arranged positioning plate 13 is fixedly provided on the top of the moving block 2, a three-jaw chuck 14 is installed on the side of the positioning plate 13 facing the supporting base 11, a rotating shaft 15 is fixedly provided at the center of the back side of the three-jaw chuck 14, a driving motor 16 is installed on the side of one of the positioning plates 13 away from the supporting base 11, the output end of the driving motor 16 is coaxially fixed on the rotating shaft 15, and a connecting component is provided between the bottoms of the two moving blocks 2.

[0019] A rotating ring 17 is installed on the back of the three-jaw chuck 14 , and the rotating ring 17 is movably inserted on the positioning plate 13 . The provision of a rotating block can increase the stability of the three-jaw chuck 14 when it rotates.

[0020] The connecting assembly includes a first rotating rod 21 and a second rotating rod 22. The first rotating rod 21 and the second rotating rod 22 are respectively movably inserted on the two moving blocks 2. A limiting strip 23 is fixedly arranged on the outside of the first rotating rod 21. The first rotating rod 21 and the limiting strip 23 are movably inserted in the second rotating rod 22. The first rotating rod 21 and the second rotating rod 22 are connected to the adjacent rotating shaft 15 through a belt 24. When the driving motor 16 is working, the rotating shaft 15 can drive the second rotating rod 22 to rotate through the belt 24. The rod 21 is inserted into the second rotating rod 22 through the limit bar 23. At this time, the first rotating rod 21 and the second rotating rod 22 will be together, so that the three-jaw chuck 14 on the other positioning plate 13 can move and rotate, ensuring the stability of the single crystal silicon rod when it is clamped; the first rotating rod 21 and the second rotating rod 22 are fixedly provided with stoppers 25 on both sides of the moving block 2 outside. The setting of the stoppers 25 can ensure that when the first rotating rod 21 and the second rotating rod 22 move, they can stably drive the moving block 2 to move together, thereby ensuring the stability of the operation.

[0021] The two moving blocks 2 are located below the first rotating rod 21 and the second rotating rod 22 and are provided with a double-headed screw 31. The threads at both ends of the double-headed screw 31 are opposite, and the bottoms of the two moving blocks 2 are respectively threaded on the double-headed screw 31. The two ends of the lower surface of the bottom plate 1 are fixed with vertically arranged vertical plates 3. The two ends of the double-headed screw 31 are rotatably arranged on the vertical plates 3. When the double-headed screw 31 is driven to rotate, the moving blocks 2 at both ends of the double-headed screw 31 will move toward each other at the same time, so that the moving blocks 2 drive the positioning plate 13 and the three-jaw chuck 14 to contact the single crystal silicon wafer. Subsequently, the three-jaw chuck 14 will clamp the end of the single crystal silicon rod for subsequent rotation; a rotating wheel 32 is installed at one end of the double-headed screw 31. The arranged rotating wheel 32 can be conveniently driven by the staff. At the same time, a servo motor can be arranged to drive according to actual conditions to increase the convenience of driving.

[0022] A support plate 4 is installed on the upper surface of the bottom plate 1 between the two support bases 11. An arc groove identical to the top of the support base 11 is provided at the middle end of the upper surface of the support plate 4. A cylinder 41 is installed at the bottom of the support plate 4. The cylinder 41 can push the support plate 4 upward. At this time, the single crystal silicon rods arranged on the support plate 4 will be forced to move upward out of the working range of the device, which is convenient for the staff to return the material. At the same time, the single crystal silicon rods can be directly placed on the support plate 4 during subsequent loading, without the need to go deep into the device for operation, thereby reducing the operation steps and the workload; limit rods 42 are movably inserted at the four corners of the support plate 4, and the bottom of the limit rods 42 is fixedly arranged on the bottom plate 1. The limit rods 42 can support the support plate 4 when it moves, thereby ensuring the stability of the support plate 4 when it moves.

[0023] Working principle: During actual operation, the cylinder 41 pushes the support plate 4 upward, and the staff can place the single crystal silicon rod to be inspected after being cut on the raised support plate 4. Then, the cylinder 41 gradually moves down to the initial position, and the two ends of the single crystal silicon rod will be stably placed on the support base 11. At this time, the double-headed screw 31 is driven to rotate by the rotating wheel 32, and the moving blocks 2 at both ends of the double-headed screw 31 will move toward each other at the same time, so that the moving block 2 drives the positioning plate 13 and the three-jaw chuck 14 to contact the single crystal silicon rod. At this time, the clamping block on the three-jaw chuck 14 will position and clamp the end of the single crystal silicon rod, and wait for the clamping to be completed. , the driving motor 16 will work to drive the rotating shaft 15 fixedly connected thereto to rotate, and the rotating shaft 15 can drive the second rotating rod 22 to rotate through the belt 24. Since the first rotating rod 21 is inserted into the second rotating rod 22 through the limiting strip 23, the first rotating rod 21 and the second rotating rod 22 will rotate together at this time, so that the three-jaw chuck 14 on the other positioning plate 13 rotates synchronously, and the three-jaw chucks 14 at both ends of the single crystal silicon rod rotate at the same time, ensuring the stability of the clamped single crystal silicon rod when rotating. The staff can inspect the surface of the single crystal silicon rod or use a visual sensor to detect it after waiting for rotation;

[0024] When the inspection is completed, the cylinder 41 can push the support plate 4 to move upward. At this time, the single crystal silicon rods set on the support plate 4 will be forced to move upward and out of the working range of the device, making it convenient for the staff to return the material.

[0025] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A fixture for producing single crystal silicon rods, comprising a bottom plate (1), characterized in that: Two symmetrically distributed support bases (11) are fixedly provided on the upper surface of the base plate (1), the top of the support base (11) is arranged in an arc shape, grooves (12) are provided through both ends of the base plate (1), a moving block (2) is slidably provided in the groove (12), a vertically arranged positioning plate (13) is fixedly provided on the top of the moving block (2), a three-jaw chuck (14) is installed on the side of the positioning plate (13) facing the support base (11), a rotating shaft (15) is fixedly provided at the center of the back side of the three-jaw chuck (14), a driving motor (16) is installed on the side of one of the positioning plates (13) away from the support base (11), the output end of the driving motor (16) is coaxially fixedly provided on the rotating shaft (15), and a connecting component is provided between the bottoms of the two moving blocks (2).

2. A single crystal silicon rod production fixture as claimed in claim 1, characterized in that: A rotating ring (17) is installed on the back of the three-jaw chuck (14), and the rotating ring (17) is movably inserted on the positioning plate (13).

3. A single crystal silicon rod production fixture as claimed in claim 1, characterized in that: The connecting assembly comprises a first rotating rod (21) and a second rotating rod (22), wherein the first rotating rod (21) and the second rotating rod (22) are respectively movably inserted on two moving blocks (2), a limiting strip (23) is fixedly provided on the outside of the first rotating rod (21), the first rotating rod (21) and the limiting strip (23) are movably inserted in the second rotating rod (22), and the first rotating rod (21) and the second rotating rod (22) are connected to the adjacent rotating shaft (15) through a belt (24).

4. A single crystal silicon rod production fixture as claimed in claim 3, characterized in that: Stoppers (25) are fixedly provided on the outside of the first rotating rod (21) and the second rotating rod (22) on both sides of the moving block (2).

5. A fixture for producing single crystal silicon rods as claimed in claim 3, characterized in that: The two moving blocks (2) are provided with double-headed screws (31) located below the first rotating rod (21) and the second rotating rod (22), the threads at the two ends of the double-headed screw (31) are opposite, the bottoms of the two moving blocks (2) are respectively threadedly arranged on the double-headed screws (31), and the two ends of the lower surface of the base plate (1) are fixedly provided with vertically arranged vertical plates (3), and the two ends of the double-headed screw (31) are rotatably arranged on the vertical plates (3).

6. A fixture for producing single crystal silicon rods as claimed in claim 5, characterized in that: A rotating wheel (32) is mounted on one end of the double-headed screw (31).

7. A fixture for producing single crystal silicon rods as claimed in claim 1, characterized in that: A support plate (4) is installed on the upper surface of the bottom plate (1) between the two support bases (11); an arc-shaped groove identical to the top of the support base (11) is provided at the middle end of the upper surface of the support plate (4); and a cylinder (41) is installed at the bottom of the support plate (4).

8. A fixture for producing single crystal silicon rods as claimed in claim 7, characterized in that: Limiting rods (42) are movably inserted at the four corners of the support plate (4), and the bottoms of the limiting rods (42) are fixedly arranged on the bottom plate (1).

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