Dust collector for PVD (Physical Vapor Deposition)

Abstract

The utility model discloses a dust collector for PVD (Physical Vapor Deposition), which comprises a fixed bottom plate and a fixed bottom plate, the fixed bottom plate is of a metal structure, the upper end of the fixed bottom plate is fixedly connected with a dust storage box, the dust storage box is of a metal structure, a heating inner cover is arranged in the dust storage box, and collected dust is placed in the heating inner cover; a water vapor through hole is formed in the middle section of the rear end ventilation plate, the rear end ventilation plate is fixedly connected to the rear end of the dust storage box, the water vapor through hole is right opposite to the heating inner cover, and a ventilation hole is formed in the rear end of the heating inner cover. And the heating inner cover is arranged in the dust storage box and is communicated with the heating motor, so that the work of heating the dust with relatively high internal humidity is completed. The rear end ventilation plate with the water vapor through holes is arranged at the rear end of the dust storage box and right faces the ventilation holes of the heating inner cover, so that internal evaporated water vapor is discharged.

Description

Technical Field

[0001] The utility model relates to the technical field of PVD working environment management, in particular to a dust collector for PVD. Background Art

[0002] In industrial production, PVD (physical vapor deposition) is a technology that uses physical methods to vaporize the surface of a material source (solid or liquid) into gaseous atoms or molecules, or partially ionizes it into ions, and deposits a thin film with special functions on the surface of the substrate in a vacuum environment. To improve the working quality and working environment of PVD.

[0003] A general PVD dust collector is connected to a collection hose by using a pump, and the collection hood at the front end of the collection hose is facing the floor of the PVD workshop and the surface of the working equipment to complete the dust collection work inside the PVD workshop. However, the working raw materials of some PVDs are liquids, and the collected dust has a high humidity, which causes structural damage to the dust storage box. A Chinese patent discloses a PVD dust collector with an application number of "CN202121384895.5", including a dust collection tank and a cover arranged axially opposite to each other, characterized in that: a partition is provided in the dust collection tank for separating the dust collection tank into a left chamber and a right chamber, and a through hole is provided at the upper end of the partition for connecting the left and right chambers, and the dust collection tank is provided with a PVD pump end interface connected to the left chamber, and an interface for connecting the vacuum pump end is provided on the cover, and the interface is connected to the right chamber. The utility model can suck the dust after the PVD reaction into the dust collection tank through the vacuum pump and PVD gas. The structure is easy to process, simple and practical, has a certain installation margin, and is more convenient to install and use. However, this structure does not solve the problem of high humidity of some dust. Utility Model Content

[0004] The purpose of the utility model is to solve at least one of the technical problems existing in the prior art, and to provide a PVD dust collector. By arranging a heating inner cover inside the dust storage box and connecting it to a heating motor, the dust with high humidity inside is heated. By arranging a rear ventilation plate with water vapor through holes at the rear end of the dust storage box, which is directly opposite to the ventilation holes of the heating inner cover, the internal evaporated water vapor is discharged.

[0005] The utility model also provides a dust collector for PVD as described above, comprising: a fixed bottom plate, the fixed bottom plate is a metal structure, a dust storage box is fixedly connected to the upper end of the fixed bottom plate, the dust storage box is a metal structure, a heating inner cover is arranged inside the dust storage box, and collected dust is placed inside the heating inner cover; a rear end ventilation plate, a water vapor through hole is arranged in the middle section of the rear end ventilation plate, the rear end ventilation plate is fixedly connected to the rear end of the dust storage box, the water vapor through hole is directly opposite to the heating inner cover, and a ventilation hole is arranged at the rear end of the heating inner cover. By arranging the heating inner cover inside the dust storage box and connecting it to the heating motor, the dust with high internal humidity is heated. By arranging the rear end ventilation plate with water vapor through holes at the rear end of the dust storage box, which is directly opposite to the ventilation hole of the heating inner cover, the internal evaporated water vapor is discharged.

[0006] According to the dust collector for PVD described in the utility model, the rear end ventilation plate is fixedly connected to the rear end of the dust storage box, and the front end of the dust storage box is fixedly connected with a transparent glass observation cover.

[0007] According to the PVD dust collector described in the utility model, the upper end of the dust storage box is connected to a pump, and the front end of the pump is connected to a conductive hose.

[0008] According to the PVD dust collector described in the utility model, the front end of the conductive hose is connected to a collecting hood, and a sealing ring is provided at the connection between the collecting hood and the conductive hose.

[0009] According to the PVD dust collector described in the utility model, the end of the conductive hose is covered with a grab handle, and the rear end of the grab handle is fixedly connected to a rear end retaining ring.

[0010] According to the PVD dust collector described in the utility model, a connecting column is fixedly connected to the lower end of the fixed bottom plate, and a transport wheel housing is fixedly connected to the end of the connecting column.

[0011] According to the PVD dust collector described in the utility model, the middle section of the transport wheel shell is rotatably connected to the rotating shaft, and the middle section of the transport wheel shell rotating shaft is fixedly connected to the rotating wheel.

[0012] According to the PVD dust collector described in the utility model, a heating motor is fixedly connected to the side end of the fixed bottom plate, and the heating motor is connected to the heating inner cover.

[0013] Beneficial Effects

[0014] 1. Compared with the prior art, this PVD dust collector heats the dust with high humidity inside by setting a heating inner cover inside the dust storage box and connecting it to a heating motor.

[0015] 2. Compared with the prior art, this PVD dust collector is equipped with a rear ventilation plate with water vapor holes at the rear end of the dust storage box, which is directly opposite to the ventilation holes of the heating inner cover, thereby completing the discharge of the internal evaporated water vapor. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0017] Figure 1 It is a structural diagram of the entire utility model;

[0018] Figure 2 This is a structural diagram of the utility model from a rear perspective;

[0019] Figure 3 This is a structural diagram of the utility model from a bottom-up perspective;

[0020] Figure 4 It is a structural diagram of the internal section of the utility model.

[0021] Legend:

[0022] 1. Fixed bottom plate; 2. Dust storage box; 3. Transparent glass observation cover; 4. Pump; 5. Conducting hose; 6. Rear end resistance ring; 7. Grabbing handle; 8. Sealing ring; 9. Collecting cover; 10. Rear end ventilation plate; 11. Water vapor hole; 12. Heating motor; 13. Connecting column; 14. Transport wheel shell; 15. Rotating wheel; 16. Heating inner cover; 17. Vent hole. DETAILED DESCRIPTION

[0023] This section will describe in detail the specific embodiments of the utility model. The preferred embodiments of the utility model are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.

[0024] refer to Figure 1-4The PVD dust collector of this embodiment includes: a fixed base plate 1, which is a metal structure and supports the whole structure to form a whole. A dust storage box 2 is fixedly connected to the upper end of the fixed base plate 1 to complete the storage of collected dust. The dust storage box 2 is a metal structure, and a heating inner cover 16 is arranged inside the dust storage box 2 to heat the dust with high humidity inside and discharge the moisture. The collected dust is placed inside the heating inner cover 16; the upper end of the dust storage box 2 is connected to a pump 4, and the front end of the pump 4 is connected to a conductive hose 5. The front end of the conductive hose 5 is connected to a collection cover 9 to complete the collection of dust inside the workshop. A sealing ring 8 is arranged at the connection between the collection cover 9 and the conductive hose 5. The end of the conductive hose 5 is covered with a grab handle 7 to complete the grabbing of the conductive hose 5. The rear end of the grab handle 7 is fixedly connected to a rear end retaining ring 6. Prevent it from falling off during grabbing. The lower end of the fixed base plate 1 is fixedly connected to a connecting column 13, and the end of the connecting column 13 is fixedly connected to a transport wheel housing 14. The middle section of the transport wheel housing 14 is rotatably connected to a rotating shaft, and the middle section of the rotating shaft of the transport wheel housing 14 is fixedly connected to a rotating wheel 15. The transportation of the entire device is achieved. The side end of the fixed bottom plate 1 is fixedly connected to a heating motor 12, and the heating motor 12 is connected to the heating inner cover 16 to provide power for the operation of the heating inner cover 16.

[0025] The rear ventilation plate 10 is provided with a water vapor through hole 11 in the middle section of the rear ventilation plate 10. The rear ventilation plate 10 is fixedly connected to the rear end of the dust storage box 2. The water vapor through hole 11 is directly opposite to the heating inner cover 16. The rear end of the heating inner cover 16 is provided with a ventilation hole 17. The rear ventilation plate 10 is fixedly connected to the rear end of the dust storage box 2. The front end of the dust storage box 2 is fixedly connected with a transparent glass observation cover 3. It is convenient to observe the internal dust collection amount to prevent the risk of explosion due to excessive internal dust accumulation.

[0026] Working principle: When using the device, move the rotating wheel 15 to transport the collection device. After moving to the corresponding position, use the collection cover 9 to face the part that needs to be processed, and transfer the collected dust to the inside of the dust storage box 2 through the pump 4.

[0027] Then, the heating motor 12 is started to increase the temperature of the heating inner cover 16, and the generated water vapor is discharged through the vent holes 17 and the rear end vent plate 10, thereby reducing the internal humidity and extending the service life of the dust collector.

[0028] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A PVD dust collector is characterized by: include: A fixed base plate (1), the fixed base plate (1) being a metal structure, a dust storage box (2) being fixedly connected to the upper end of the fixed base plate (1), the dust storage box (2) being a metal structure, a heating inner cover (16) being arranged inside the dust storage box (2), and dust collection being placed inside the heating inner cover (16); A rear end ventilation plate (10), wherein a water vapor through hole (11) is provided in the middle section of the rear end ventilation plate (10), wherein the rear end ventilation plate (10) is fixedly connected to the rear end of the dust storage box (2), wherein the water vapor through hole (11) is directly opposite to the heating inner cover (16), and a ventilation hole (17) is provided at the rear end of the heating inner cover (16).

2. A PVD dust collector according to claim 1, characterized in that: The rear end ventilation plate (10) is fixedly connected to the rear end of the dust storage box (2), and the front end of the dust storage box (2) is fixedly connected to a transparent glass observation cover (3).

3. A PVD dust collector according to claim 1, characterized in that: The upper end of the dust storage box (2) is connected to a pump (4), and the front end of the pump (4) is connected to a conductive hose (5).

4. A PVD dust collector according to claim 3, characterized in that: The front end of the conductive hose (5) is connected to a collecting hood (9), and a sealing ring (8) is provided at the connection between the collecting hood (9) and the conductive hose (5).

5. A PVD dust collector according to claim 4, characterized in that: The end of the conductive hose (5) is covered with a grab handle (7), and the rear end of the grab handle (7) is fixedly connected to a rear end retaining ring (6).

6. A PVD dust collector according to claim 1, characterized in that: The lower end of the fixed base plate (1) is fixedly connected to a connecting column (13), and the end of the connecting column (13) is fixedly connected to a transport wheel housing (14).

7. A PVD dust collector according to claim 6, characterized in that: The middle section of the transport wheel housing (14) is rotatably connected to a rotating shaft, and the middle section of the rotating shaft of the transport wheel housing (14) is fixedly connected to a rotating wheel (15).

8. The PVD dust collector according to claim 1, characterized in that: A heating motor (12) is fixedly connected to the side end of the fixed bottom plate (1), and the heating motor (12) is connected to the heating inner cover (16).

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