Maintenance-free vacuum system for crystal czochralski growth equipment

Abstract

The utility model discloses a maintenance-free vacuum system for crystal czochralski growth equipment, which comprises a single crystal furnace, a vacuum pump and a filter device, the filter device comprises a barrel, a floating ring and a filter screen, a first pipe joint is arranged at the bottom of the barrel, a first pipeline is arranged between the single crystal furnace and the first pipe joint, and a second pipeline is arranged between the single crystal furnace and the first pipe joint. A cover plate is arranged at the top of the cylinder body, a second pipe joint is arranged on the cover plate, a second pipeline is arranged between the vacuum pump and the second pipe joint, a first limiting block and a second limiting block are arranged in the cylinder body in an up-down spaced mode, and the floating ring is concentrically arranged in the cylinder body and located between the first limiting block and the second limiting block; a cylindrical cage body is concentrically arranged at the top of the floating ring, and the filter screen is arranged on the outer side of the cylindrical cage body in a sleeving mode. According to the maintenance-free vacuum system for the crystal czochralski growth equipment disclosed by the utility model, the vacuumizing of a single crystal furnace and the automatic maintenance of a filter screen are realized.

Description

Technical Field

[0001] The utility model relates to the field of crystal production equipment, in particular to a maintenance-free vacuum system for crystal Czochralski growth equipment. Background Art

[0002] When performing crystal pulling, a single crystal furnace is required. During the crystal pulling process, argon gas needs to be introduced into the single crystal furnace for protection, and a vacuum pump is used to evacuate the single crystal furnace.

[0003] The vacuum pump has high requirements on the quality of the inhaled gas. If the inhaled gas contains particles, it is easy to cause damage to the vacuum pump. Therefore, a filter is usually required to filter the gas before it enters the vacuum pump. The filter can isolate the particles in the gas, but the particles are retained in the filter, which reduces the ventilation rate and often needs to be disassembled for maintenance, which is labor-intensive and affects the CZ growth of the crystal. Improvements are needed. Utility Model Content

[0004] The utility model aims to provide a maintenance-free vacuum system for a crystal Czochralski growth device, so as to realize vacuum pumping of a single crystal furnace, improve working stability and reduce maintenance frequency.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A maintenance-free vacuum system for a crystal vertical pulling growth device comprises: a single crystal furnace, a vacuum pump and a filtering device, wherein the filtering device comprises a cylinder, a floating ring and a filter screen, a first pipe joint is arranged at the bottom of the cylinder, a first pipeline is arranged between the single crystal furnace and the first pipe joint, a cover plate is arranged at the top of the cylinder, a second pipe joint is arranged on the cover plate, a second pipeline is arranged between the vacuum pump and the second pipe joint, a first limit block and a second limit block are arranged at intervals in the cylinder at upper and lower positions, the floating ring is concentrically arranged in the cylinder and located between the first limit block and the second limit block, a cylindrical cage is concentrically arranged on the top of the floating ring, and the filter screen is sleeved on the outside of the cylindrical cage.

[0007] Wherein, a first valve is arranged on the first pipeline.

[0008] Wherein, the second pipeline is a corrugated pipe.

[0009] Wherein, an air supply pipe is arranged in the cylinder body, which is connected with the first pipe joint and extends upward into the cylindrical cage body.

[0010] Wherein, an annular groove is arranged on the outer circle of the floating ring, and a sealing ring in contact with the inner wall of the cylinder is arranged in the annular groove.

[0011] Wherein, a clamp is arranged at the bottom of the filter screen.

[0012] Wherein, a dust dropping pipe is arranged at the bottom of the cylinder, and a second valve is arranged on the dust dropping pipe.

[0013] The beneficial effects of the utility model include: a maintenance-free vacuum system for crystal vertical pulling growth equipment, which, after turning on the vacuum pump, extracts the gas in the single crystal furnace through the filtering device to achieve vacuumization of the single crystal furnace and filtering of the gas, thereby avoiding the problem of damage to the vacuum pump due to the inhalation of particulate matter; as the particulate matter adheres to the inner wall of the filter, it blocks the filter holes of some of the filter screens, reducing the ventilation rate of the filter screen; at this time, the pressure difference between the upper and lower parts of the floating ring increases, driving the floating ring to rise and collide with the first limit block, thereby achieving vibration of the cylindrical cage body and the filter screen, shaking off some of the particulate matter attached to the inner wall of the filter screen, restoring the ventilation rate of the filter screen, reducing the pressure difference between the upper and lower parts of the floating ring, and allowing the floating ring to freely fall to the second limit block according to its own weight, thereby achieving automatic maintenance of the filter screen and reducing the problem of disassembly and maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of the utility model;

[0015] Figure 2 yes Figure 1 A partial enlarged view of part A. DETAILED DESCRIPTION

[0016] Combine the following Figure 1 to Figure 2 The technical solution of the utility model is further illustrated by specific embodiments.

[0017] like Figure 1 and Figure 2 The maintenance-free vacuum system for the crystal CZ growth device shown comprises: a single crystal furnace 5, a vacuum pump 4 and a filtering device, wherein the filtering device comprises a cylinder 1, a floating ring 16 and a filter 17, a first pipe joint 11 is provided at the bottom of the cylinder 1, a first pipe 7 is provided between the single crystal furnace 5 and the first pipe joint 11, and the gas in the single crystal furnace 5 is extracted through the first pipe 7. In this embodiment, a first valve 6 is provided on the first pipe 7 to control the gas path in the first pipe 7, and the operation is convenient.

[0018] A cover plate 2 is provided on the top of the cylinder 1, a second pipe joint 12 is provided on the cover plate 2, a second pipe 3 is provided between the vacuum pump 4 and the second pipe joint 12, and vacuum is drawn by the vacuum pump 4. The cover plate 2 is fixed to the cylinder 1 by screws, and has a stable structure and is easy to disassemble. In this embodiment, the second pipe 3 is a corrugated pipe, which can be bent without affecting the disassembly of the cover plate 2.

[0019] like Figure 2As shown, the cylinder 1 is provided with a first stopper 13 and a second stopper 15 at intervals in the upper and lower parts, and the floating ring 16 is concentrically provided in the cylinder 1 and located between the first stopper 13 and the second stopper 15, so as to limit the floating ring 16 in the upper and lower floating positions. In this embodiment, an annular groove is provided on the outer circumference of the floating ring 16, and a sealing ring 14 in contact with the inner wall of the cylinder 1 is provided in the annular groove to prevent gas from passing through the gap between the outer circumference of the floating ring 16 and the inner wall of the cylinder 1.

[0020] A cylindrical cage 18 is concentrically arranged on the top of the floating ring 16, and the filter 17 is sleeved on the outside of the cylindrical cage 18. In this embodiment, a clamp 19 is arranged at the bottom of the filter 17 to fix the bottom of the filter 17 to the bottom of the cylindrical cage 18, and the structure is stable. The filter 17 is supported by the cylindrical cage 18 to keep the filter 17 straight without affecting the vibration of the filter 17.

[0021] An air supply pipe 8 is provided in the cylinder 1, which is connected to the first pipe joint 11 and extends upward to the cylindrical cage 18, so that the gas in the single crystal furnace 1 enters the cylindrical cage 18 and is filtered through the filter 17 to avoid the problem of damage to the vacuum pump 4 due to inhalation of particulate matter.

[0022] As the particles adhere to the inner wall of the filter 17, the filter holes on the upper part of the filter are blocked, reducing the ventilation rate of the filter 17. At this time, the pressure difference between the upper and lower parts of the floating ring 16 increases, driving the floating ring 16 to rise and collide with the first limit block 13, thereby realizing the vibration of the cylindrical cage 18 and the filter 17, shaking off some of the particles attached to the inner wall of the filter 17, restoring the ventilation rate of the filter 17, and reducing the pressure difference between the upper and lower parts of the floating ring 16. The floating ring 16 freely falls to the second limit block 15 according to its own weight, thereby realizing automatic maintenance of the filter 17, reducing the problem of disassembly and maintenance, and realizing maintenance-free operation of the single crystal furnace 5.

[0023] An ash dropping pipe 10 is provided at the bottom of the cylinder 1, and a second valve 9 is provided on the ash dropping pipe 10. When the single crystal furnace 5 is not working, the second valve 9 can be opened to guide the particles in the cylinder 1 through the ash dropping pipe 10 to avoid the problem of excessive accumulation.

[0024] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. A maintenance-free vacuum system for a crystal Czochralski growth device, characterized in that: include: A single crystal furnace, a vacuum pump and a filtering device, wherein the filtering device comprises a cylinder, a floating ring and a filter screen, a first pipe joint is arranged at the bottom of the cylinder, a first pipeline is arranged between the single crystal furnace and the first pipe joint, a cover plate is arranged at the top of the cylinder, a second pipe joint is arranged on the cover plate, a second pipeline is arranged between the vacuum pump and the second pipe joint, a first limit block and a second limit block are arranged at intervals in the cylinder, the floating ring is concentrically arranged in the cylinder and located between the first limit block and the second limit block, a cylindrical cage is concentrically arranged on the top of the floating ring, and the filter screen is sleeved on the outside of the cylindrical cage.

2. The maintenance-free vacuum system for the crystal Czochralski growth equipment according to claim 1, characterized in that: The first pipeline is provided with a first valve.

3. The maintenance-free vacuum system for the crystal Czochralski growth equipment according to claim 1, characterized in that: The second pipeline is a corrugated pipe.

4. The maintenance-free vacuum system for the crystal Czochralski growth equipment according to claim 1, characterized in that: The cylinder body is provided with an air supply pipe which is connected with the first pipe joint and extends upward into the cylindrical cage body.

5. The maintenance-free vacuum system for the crystal Czochralski growth equipment according to claim 1, characterized in that: An annular groove is arranged on the outer circle of the floating ring, and a sealing ring in contact with the inner wall of the cylinder is arranged in the annular groove.

6. The maintenance-free vacuum system for the crystal Czochralski growth equipment according to claim 1, characterized in that: A clamp is arranged at the bottom of the filter screen.

7. The maintenance-free vacuum system for a crystal Czochralski growth device according to claim 1, characterized in that: A dust dropping pipe is arranged at the bottom of the cylinder, and a second valve is arranged on the dust dropping pipe.

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