Graphite crucible for Czochralski single crystal furnace

Abstract

The utility model discloses a graphite crucible for a Czochralski single crystal furnace, relates to the field of graphite crucibles, solves the problems that the existing limiting mechanism is limited in stability and lower in disassembly and assembly efficiency, and adopts the following scheme that the graphite crucible comprises a graphite crucible arranged in a single crystal furnace body; a ring seat is clamped on the bottom side of the graphite crucible and is fixedly mounted on the inner wall of the furnace body; a main body of the graphite crucible is a crucible seat, a crucible hopper is fixedly mounted at the top of the crucible seat, a lapping part is assembled between the crucible seat and the crucible hopper, and a clamping block is fixedly mounted at the bottom of the lapping part; the ring base is composed of an outer ring plate and an inner ring plate, and clamping grooves matched with the clamping blocks in specification are formed in the inner side wall of the inner ring plate. According to the graphite crucible for the Czochralski single crystal furnace, through the arrangement of the graphite crucible and the ring seat on the outer side of the graphite crucible, the lapping part on the graphite crucible can be clamped on the inner side of the clamping groove in the ring seat from the top side, so that the effect of stably mounting the graphite crucible is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite crucibles, in particular to a graphite crucible for a Czochralski single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method.

[0003] After searching, the application with patent application number CN202121680904.5 discloses a graphite crucible for a single crystal furnace that is easy to disassemble and assemble, including: a box body, a first hydraulic rod is fixedly connected to the bottom of the box body, a support rod is fixedly connected to the top output end of the first hydraulic rod, the support rod is fixedly connected to the bottom of the box body at one end away from the first hydraulic rod, a fixed plate is fixedly connected to the middle of the first hydraulic rod, a second hydraulic rod is fixedly connected to the top of the fixed plate, a baffle is fixedly connected to the top output end of the second hydraulic rod, and one end of the second hydraulic rod passing through the baffle is fixedly connected to a loading platform;

[0004] The above application document can realize the disassembly and assembly of the graphite crucible by setting an electric push rod, but uses a spring component as a limiting component, has limited stability, and is disassembled from the bottom side. At the same time, a traditional crucible is used, and the crystal pulling effect is limited.

[0005] Therefore, we proposed a graphite crucible for a Czochralski single crystal furnace. Utility Model Content

[0006] In view of the deficiencies in the prior art, the utility model provides a graphite crucible for a Czochralski single crystal furnace, which solves the problems of limited stability and low disassembly and assembly efficiency of the existing limiting mechanism.

[0007] To achieve the above objectives, the utility model is implemented through the following technical solutions: A graphite crucible for a Czochralski single crystal furnace, comprising a graphite crucible arranged in a single crystal furnace body;

[0008] The bottom side of the graphite crucible is clamped with a ring seat, and the ring seat is fixedly mounted on the inner wall of the furnace body;

[0009] The main body of the graphite crucible is a crucible seat, a crucible bucket is fixedly installed on the top of the crucible seat, and a mounting portion is arranged between the crucible seat and the crucible bucket, and a clamping block is fixedly installed on the bottom of the mounting portion;

[0010] The ring seat is composed of an outer ring plate and an inner ring plate, and a clamping groove matching the specifications of the clamping block is opened on the inner side wall of the inner ring plate.

[0011] Preferably, the block is an oblique triangular block, and the outer oblique edge of the block is a pointed edge;

[0012] The setting of the shape of the clamping block facilitates the clamping of the graphite crucible in the clamping groove inside the ring seat, thereby ensuring the stability of the placement of the graphite crucible.

[0013] Preferably, an annular arc sliding portion is provided between the top side of the crucible seat and the bottom side of the crucible bucket;

[0014] Among them, the setting of the arc sliding part is convenient for cooperating with the setting of the crucible bucket shape, so that the material in the crystal pulling process can automatically slide into the crucible seat below, avoiding the leakage and adhesion of the material.

[0015] Preferably, the bottom of the crucible seat is provided with a temperature conducting groove adapted to the outer curvature thereof, and the inner wall of the temperature conducting groove is closely attached to the heat insulation strip on the heat insulation wall;

[0016] Among them, the setting of the temperature conduction groove can ensure the heat preservation effect of the graphite crucible.

[0017] Preferably, the crucible seat is a bucket-shaped seat inclined downward and inward, and the inner side of the crucible seat contains crystal pulling materials.

[0018] Preferably, the outer ring plate and the inner ring plate of the ring seat are both made of rock wool board;

[0019] Among them, the setting of the ring seat material can prevent heat from moving outward and increase the thermal insulation effect on the side.

[0020] The utility model provides a graphite crucible for a Czochralski single crystal furnace. It has the following beneficial effects:

[0021] 1. The graphite crucible for a CZ single crystal furnace can clamp the mounting portion of the graphite crucible on the inner side of the clamping groove in the ring seat from the top side through the arrangement of the graphite crucible and its outer ring seat, thereby achieving the effect of stably installing the graphite crucible. At the same time, the disassembly effect can be achieved by simply pushing it upwards. The operation is simple and the stability is strong, which solves the problems of limited stability and low disassembly efficiency of the existing limiting mechanism.

[0022] 2. The graphite crucible used in the vertical single crystal pulling furnace can increase the crystal pulling range by setting the crucible seat and the crucible bucket on the top side. At the same time, the setting of the arc sliding part between them can ensure that part of the crystal pulling material automatically slides to the crucible seat below, avoiding the situation that the material falls and sticks to the top side or surrounding of the graphite crucible during the crystal pulling process. The setting of the temperature conduction groove can maximize the insulation effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of the utility model;

[0024] Figure 2 It is a structural schematic diagram of the ring seat of the utility model;

[0025] Figure 3 This is a schematic diagram of the structure of the graphite crucible of the utility model;

[0026] Figure 4 It is a structural schematic diagram of the bottom side of the graphite crucible of the utility model.

[0027] In the figure: 1. graphite crucible; 11. crucible seat; 12. crucible bucket; 13. arc sliding part; 14. mounting part; 15. clamping block; 16. temperature conduction groove; 2. ring seat; 21. outer ring plate; 22. inner ring plate; 23. clamping groove. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] A graphite crucible for a CZ single crystal furnace comprises a graphite crucible 1 arranged in a furnace body of the single crystal furnace; a ring seat 2 is clamped on the bottom side of the graphite crucible 1, and the ring seat 2 is fixedly installed on the inner wall of the furnace body; the main body of the graphite crucible 1 is a crucible seat 11, a crucible bucket 12 is fixedly installed on the top of the crucible seat 11, and a mounting portion 14 is arranged between the crucible seat 11 and the crucible bucket 12, and a clamping block 15 is fixedly installed on the bottom of the mounting portion 14; the ring seat 2 is composed of an outer ring plate 21 and an inner ring plate 22, and a clamping groove 23 matching the specifications of the clamping block 15 is opened on the inner side wall of the inner ring plate 22;

[0030] Among them, the graphite crucible for the vertical pulling single crystal furnace, through the configuration of the graphite crucible 1 and the outer ring seat 2, can clamp the mounting part 14 on the graphite crucible 1 on the inner side of the clamping groove 23 in the ring seat 2 from the top side, thereby achieving the effect of stable installation of the graphite crucible 1, and at the same time, the disassembly effect can be achieved by simply pushing it upward, which is simple to operate and has strong stability, and solves the problems of limited stability and low disassembly and assembly efficiency of the existing limiting mechanism.

[0031] The block 15 is an oblique triangular block, and the outer oblique edge of the block 15 is a pointed edge; wherein, the shape of the block 15 is convenient for clamping the graphite crucible 1 in the clamping groove 23 inside the ring seat 2, ensuring the stability of the placement of the graphite crucible 1.

[0032] An annular arc sliding portion 13 is arranged between the top side of the crucible seat 11 and the bottom side of the crucible bucket 12; wherein, the setting of the arc sliding portion 13 is convenient for cooperating with the setting of the shape of the crucible bucket 12, so that the material in the crystal pulling process can automatically slide into the crucible seat 11 below, avoiding the leakage and adhesion of the material.

[0033] The bottom of the crucible seat 11 is provided with a heat conducting groove 16 matching the outer curvature thereof, and the inner wall of the heat conducting groove 16 is closely attached to the heat insulation strip on the heat insulation wall; wherein, the setting of the heat conducting groove 16 can ensure the heat insulation effect for the graphite crucible 1 .

[0034] The crucible seat 11 is a bucket-shaped seat that is tilted downward and inward, and the inner side of the crucible seat 11 contains crystal pulling materials.

[0035] The outer ring plate 21 and the inner ring plate 22 of the ring seat 2 are both made of rock wool board;

[0036] The material setting of the ring seat 2 can prevent heat from migrating outwards and increase the thermal insulation effect on the side.

[0037] In addition, the graphite crucible used in the vertical single crystal pulling furnace can increase the crystal pulling range by arranging the crucible seat 11 and the crucible bucket 12 on the top side thereof. At the same time, the arrangement of the arc sliding portion 13 therebetween can ensure that part of the crystal pulling material automatically slides into the crucible seat 11 below, thereby preventing the material from falling and sticking to the top side or surrounding of the graphite crucible 1 during the crystal pulling process. The arrangement of the heat conducting groove 16 can maximize the insulation effect.

[0038] The working principle and use process of the utility model are as follows: when the device is required to work, the ring seat 2 is fixedly installed on the inner wall of the furnace body. When placing, the mounting part 14 on the graphite crucible 1 is clamped in the clamping groove 23 inside the ring seat 2 to ensure stability during placement. Finally, the crystal column is pulled upward from the inside of the graphite crucible 1 to ensure the crystal pulling effect.

[0039] The above shows and describes the basic principles and main features of the utility model and the advantages of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, and it is intended to include all changes within the meaning and scope of the equivalent elements of the claims. Any figure mark in the claims should not be regarded as limiting the claims involved.

[0040] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A graphite crucible for a Czochralski single crystal furnace, comprising a graphite crucible (1) arranged in a single crystal furnace body; Features: The bottom side of the graphite crucible (1) is clamped with a ring seat (2), and the ring seat (2) is fixedly mounted on the inner wall of the furnace body; The main body of the graphite crucible (1) is a crucible seat (11), a crucible bucket (12) is fixedly mounted on the top of the crucible seat (11), a mounting portion (14) is arranged between the crucible seat (11) and the crucible bucket (12), and a clamping block (15) is fixedly mounted on the bottom of the mounting portion (14); The ring seat (2) is composed of an outer ring plate (21) and an inner ring plate (22), and a clamping groove (23) matching the specifications of the clamping block (15) is provided on the inner side wall of the inner ring plate (22).

2. The graphite crucible for a Czochralski single crystal furnace according to claim 1, characterized in that: The clamping block (15) is an oblique triangular block, and the outer oblique edge of the clamping block (15) is a pointed edge.

3. The graphite crucible for a Czochralski single crystal furnace according to claim 1, characterized in that: An annular arc sliding portion (13) is provided between the top side of the crucible seat (11) and the bottom side of the crucible bucket (12).

4. The graphite crucible for a Czochralski single crystal furnace according to claim 1, characterized in that: The bottom of the crucible seat (11) is provided with a temperature conducting groove (16) matching the curvature of the outer side thereof, and the inner wall of the temperature conducting groove (16) is closely attached to the heat insulation strip on the heat insulation wall.

5. The graphite crucible for a Czochralski single crystal furnace according to claim 1, characterized in that: The crucible seat (11) is a bucket-shaped seat that is inclined downward and inward, and the inner side of the crucible seat (11) contains crystal pulling materials.

6. The graphite crucible for a Czochralski single crystal furnace according to claim 1, characterized in that: The outer ring plate (21) and the inner ring plate (22) of the ring seat (2) are both made of rock wool board.

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