Vacuum breaking device for vacuum reaction equipment

Abstract

The utility model discloses a vacuum breaking device for vacuum reaction equipment, which comprises an air inlet box, an air inlet pipe is arranged on one side surface of the air inlet box, an air distribution pipe is arranged on the other side surface, far away from the air inlet pipe, of the air inlet box, and an inflatable rubber ring is arranged on the inner side of the connecting position of the air distribution pipe and the air inlet box. An air distribution ring communicated with the interior of the air distribution pipe is arranged on the outer ring side of the air distribution pipe, air distribution holes are formed in the side face of the air distribution ring, an air distribution pipe is connected to the inflation rubber ring and connected with the inner side face of the air inlet box through a pipe hoop, and an inflation pipe is arranged on the lower side of the air distribution pipe. According to the utility model, gas entering a vacuum environment is blown out from the gas distribution holes, and the gas distribution holes on the adjacent gas distribution rings enable the kinetic energy of the gas to be mutually impacted and counteracted, so that the kinetic energy of the gas is reduced, and impurities are prevented from being blown off to pollute a wafer; and the other path of gas can be inflated into the inflation rubber ring through the inflation pipe and the gas distribution pipe, so that the expansion degree of the inflation rubber ring is adjusted, the diameter of the gas inlet inner hole of the gas distribution pipe is adjusted, and the vacuum breaking effect is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum breaking equipment, in particular to a vacuum breaking device for vacuum reaction equipment. Background Art

[0002] Vacuum reaction equipment is widely used in many fields, such as semiconductor chip processing, optical coating, etc. Taking semiconductor chip processing as an example, many chip manufacturing process flows need to be completed in a low-pressure (vacuum) reaction chamber, such as ion implantation, LPCVD (low-pressure chemical vapor deposition), evaporation and sputtering processes. Ion implantation is to inject doped ions into the wafer in a vacuum system, and use a high-resolution mass analyzer to ensure that the doped ions have extremely high purity. After the ion implantation process is completed, it is necessary to blow gas into the vacuum reaction equipment through the air inlet so that the internal and external air pressures can be consistent before the wafer can be taken out. This is the process of breaking the vacuum. In this process, the faster the air intake speed is, the better, which can improve the chip manufacturing efficiency. But in fact, the air intake speed cannot be too fast, because the long-term use of the vacuum reaction equipment causes more impurities to adhere to its inner wall. If the air intake speed is too fast, the impurities in the vacuum reaction equipment will be blown onto the wafer, causing the wafer to be contaminated. Therefore, it usually takes several hours to break the vacuum, which restricts the efficiency of chip processing and increases the processing cost.

[0003] When the existing vacuum breaking device is in use, the inner hole diameter of the gas distribution pipe is fixed and cannot be adjusted according to the demand for gas distribution, so that the air intake speed cannot be accurately adjusted, affecting the vacuum breaking effect. At the same time, when the existing vacuum breaking device is in use, the kinetic energy of the incoming gas cannot be effectively offset, making it easy for the gas with greater kinetic energy to blow impurities attached to the inner wall onto the wafer, causing the wafer to be contaminated. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the existing defects and provide a vacuum breaking device for vacuum reaction equipment. By setting an inflatable rubber ring, an inflating pipe and an air distribution pipe, gas can be filled into the inflatable rubber ring through the inflating pipe and the air distribution pipe, and then the expansion degree of the inflatable rubber ring is adjusted, so that the diameter of the air inlet inner hole of the air distribution pipe is adjusted, thereby ensuring the vacuum breaking effect, and can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A vacuum breaking device for vacuum reaction equipment comprises an air intake box, an air intake pipe is arranged on one side of the air intake box, an air distribution pipe is arranged on the other side of the air intake box away from the air intake pipe, an inflatable rubber ring is arranged on the inner side of the connection position between the air distribution pipe and the air intake box, an air distribution ring communicating with the inside of the air distribution pipe is arranged on the outer ring side of the air distribution pipe, air distribution holes are arranged on the side of the air distribution ring, an air distribution pipe is connected to the inflatable rubber ring, the air distribution pipe is connected to the inner side of the air intake box by a pipe clamp, and an inflatable pipe is arranged on the lower side of the air distribution pipe.

[0007] Furthermore, the air distribution ring further includes a first air distribution ring located in the middle and second air distribution rings located on the front and rear sides. The two second air distribution rings are symmetrically arranged, and air distribution holes are opened on the opposite sides. The first air distribution ring has air distribution holes symmetrically arranged front and back.

[0008] Furthermore, the air distribution pipe has three sections: front, middle and rear. A second air distribution ring is welded between the front and middle sections, a first air distribution ring is welded between the middle and rear sections, and a second air distribution ring is welded at the rear end of the rear section.

[0009] Furthermore, the air distribution holes on adjacent air distribution rings correspond to each other.

[0010] Furthermore, the inflation pipe and the air distribution pipe are connected by a flange, the air intake pipe and the air intake box are welded, the inflation pipe and the air intake box are welded, the inflation rubber ring and the inner ring side of the air distribution pipe are glued, the air distribution ring and the air distribution pipe are welded, and the air distribution pipe and the air intake box are welded.

[0011] The utility model provides an inflatable rubber ring, an inflatable pipe and an air distribution pipe, so that a path of gas can be filled into the inflatable rubber ring through the inflatable pipe and the air distribution pipe, and then the expansion degree of the inflatable rubber ring is adjusted, so that the diameter of the air inlet inner hole of the air distribution pipe is adjusted, thereby ensuring the vacuum breaking effect.

[0012] The utility model provides an air distribution pipe, an air distribution ring and air distribution holes, so that the gas entering the vacuum environment is blown out from the air distribution holes. The air distribution holes on adjacent air distribution rings cause the kinetic energy of the gas to collide with each other and offset each other, thereby reducing the kinetic energy of the gas and preventing gas with greater kinetic energy from blowing off impurities and contaminating the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model;

[0014] Figure 2 This is a schematic diagram of the main cross-sectional structure of the air intake box in the utility model;

[0015] Figure 3 It is a right side structural schematic diagram of the air intake box in the utility model;

[0016] Figure 4 It is a schematic diagram of the structure of the air distribution pipe and the air distribution ring in the utility model;

[0017] Figure 5 It is a right sectional structural schematic diagram of the inflatable rubber ring in the utility model;

[0018] Figure 6 It is a right sectional structural schematic diagram of the air distribution pipe and the air distribution ring in the utility model.

[0019] In the figure: 1. air intake box; 2. air intake pipe; 3. inflation pipe; 4. air distribution pipe; 5. inflation rubber ring; 6. air distribution pipe; 7. air distribution ring; 71. first air distribution ring; 72. second air distribution ring; 8. air distribution hole. DETAILED DESCRIPTION

[0020] See also Figure 1-Figure 6 A vacuum breaking device for vacuum reaction equipment comprises an air intake box 1, an air intake pipe 2 is arranged on one side of the air intake box 1, an air distribution pipe 6 is arranged on the other side of the air intake box 1 away from the air intake pipe 2, an inflatable rubber ring 5 is arranged on the inner side of the connection position between the air distribution pipe 6 and the air intake box 1, an air distribution ring 7 communicating with the inside of the air distribution pipe 6 is arranged on the outer ring side of the air distribution pipe 6, air distribution holes 8 are arranged on the side of the air distribution ring 7, an air distribution pipe 4 is connected to the inflatable rubber ring 5, the air distribution pipe 4 is connected to the inner side of the air intake box 1 through a pipe clamp, and an inflatable pipe 3 is arranged on the lower side of the air distribution pipe 4.

[0021] The air distribution pipe 4 can be made of stainless steel. The air distribution pipe 4 can evenly distribute the gas inside the inflation pipe 3 to the inflatable rubber ring 5. The inflation and deflation of the inflatable rubber ring 5 can be adjusted through the inflation pipe 3 and the air distribution pipe 4, and then the expansion degree of the inflatable rubber ring 5 can be adjusted, so that the diameter of the air hole inside the air inlet end of the air distribution pipe 6 can be adjusted, and then the air intake amount of the air distribution pipe 6 can be adjusted to ensure the vacuum breaking effect; the air distribution ring 7 is connected to the inner side of the connection part of the air distribution pipe 6, and the air intake pipe 2 sends the injected gas to the inner side of the air intake box 1, and sends the gas into the vacuum environment through the air distribution pipe 6, the air distribution ring 7 and the air distribution hole 8.

[0022] The air distribution ring 7 further includes a first air distribution ring 71 in the middle and second air distribution rings 72 on the front and rear sides. The two second air distribution rings 72 are symmetrically arranged, and air distribution holes 8 are opened on the opposite sides. The first air distribution ring 71 is provided with air distribution holes 8 symmetrically arranged front and rear.

[0023] Three air distribution rings 7 are arranged on the air distribution pipe 6. The air distribution holes 8 on the middle first air distribution ring 71 are arranged on both sides, and the air distribution holes 8 on the other two second air distribution rings 72 are arranged on only one side, and the air distribution holes 8 on the two second air distribution rings 72 face the middle first air distribution ring 71.

[0024] The air distribution pipe 6 has three sections: front, middle and rear. A second air distribution ring 72 is welded between the front and middle sections, a first air distribution ring 71 is welded between the middle and rear sections, and a second air distribution ring 72 is welded at the rear end of the rear section.

[0025] The air distribution pipe 6 is divided into three sections so that the air distribution pipe and the three air distribution rings 7 can be welded in order.

[0026] Among them, the air distribution holes 8 on adjacent air distribution rings 7 correspond to each other. The air distribution holes 8 arranged correspondingly can make the kinetic energy of the gas rushing out of the air distribution holes 8 offset each other, reduce the kinetic energy of the gas, and avoid the gas with greater kinetic energy blowing off impurities and contaminating the wafer.

[0027] Among them, the inflation pipe 3 and the air distribution pipe 4 are connected by a flange, the intake pipe 2 is welded to the air intake box 1, the inflation pipe 3 is welded to the air intake box 1, the inflation rubber ring 5 is glued to the inner ring side of the air distribution pipe 6, the air distribution ring 7 is welded to the air distribution pipe 6, and the air distribution pipe 6 is welded to the air intake box 1.

[0028] When breaking the vacuum, one path of gas enters the inflatable rubber ring 5 through the inflation pipe 3 and the gas distribution pipe 4, and the inner diameter of the inflatable rubber ring 5 is adjusted to control the air intake of the air distribution pipe 6. The other path of gas enters the air intake box 1 through the air intake pipe 2. The gas in the air intake box 1 flows into the air distribution holes 8 in the air distribution ring 7 through the air distribution pipe 6. The relatively arranged air distribution holes 8 can make the kinetic energy of the rushing gases offset each other, reduce the kinetic energy of the gas, and prevent the gas with greater kinetic energy from blowing off impurities and contaminating the wafer.

Claims

1. A vacuum breaking device for vacuum reaction equipment, comprising an air inlet box (1), an air inlet pipe (2) being arranged on one side of the air inlet box (1), characterized in that: An air distribution pipe (6) is arranged on the other side of the air intake box (1) away from the air intake pipe (2); an inflatable rubber ring (5) is arranged on the inner side of the connection position between the air distribution pipe (6) and the air intake box (1); an air distribution ring (7) communicating with the inside of the air distribution pipe (6) is arranged on the outer ring side of the air distribution pipe (6); air distribution holes (8) are arranged on the side of the air distribution ring (7); an air distribution pipe (4) is connected to the inflatable rubber ring (5); the air distribution pipe (4) is connected to the inner side of the air intake box (1) through a pipe clamp; and an inflatable pipe (3) is arranged on the lower side of the air distribution pipe (4).

2. A vacuum breaking device for vacuum reaction equipment according to claim 1, characterized in that: The air distribution ring (7) further comprises a first air distribution ring (71) located in the middle and second air distribution rings (72) located at the front and rear sides. The two second air distribution rings (72) are symmetrically arranged and have air distribution holes (8) on opposite sides. The first air distribution ring (71) has air distribution holes (8) symmetrically arranged at the front and rear sides.

3. A vacuum breaking device for vacuum reaction equipment according to claim 2, characterized in that: The air distribution pipe (6) has three sections: front, middle and rear. A second air distribution ring (72) is welded between the front section and the middle section, a first air distribution ring (71) is welded between the middle section and the rear section, and a second air distribution ring (72) is welded at the rear end of the rear section.

4. A vacuum breaking device for vacuum reaction equipment according to claim 2, characterized in that: The air distribution holes (8) on adjacent air distribution rings (7) correspond to each other.

5. The vacuum breaking device for vacuum reaction equipment according to claim 1, characterized in that: The inflation pipe (3) is connected to the air distribution pipe (4) via a flange, the air intake pipe (2) is welded to the air intake box (1), the inflation pipe (3) is welded to the air intake box (1), the inflation rubber ring (5) is glued to the inner ring side of the air distribution pipe (6), the air distribution ring (7) is welded to the air distribution pipe (6), and the air distribution pipe (6) is welded to the air intake box (1).

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