Vacuumizing equipment for preparing perovskite thin film

Abstract

The utility model discloses a vacuum-pumping device for preparing a perovskite film, which comprises a shell, a base station and a vacuum-pumping assembly, and is characterized in that the shell is internally provided with a closed accommodating space; the base station is mounted in the accommodating space and is used for bearing a glass substrate; the vacuumizing assembly comprises a plurality of vacuum pumps and vacuumizing pipes, one end of each vacuumizing pipe is communicated with one vacuum pump, the other end of each vacuumizing pipe is communicated with the containing space, and the vacuumizing pipes are equal in length. According to the vacuum-pumping equipment for preparing the perovskite film, the lengths of the plurality of vacuum-pumping pipes are equal, so that the time of the suction action on the accommodating space after the plurality of vacuum pumps are started is relatively consistent, the airflow in the accommodating space is relatively stable, the uncrystallized perovskite is not easily influenced, and the service life of the perovskite film is prolonged. And the uniformity of perovskite film formation can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of film formation of perovskite solar cells, in particular to a vacuum pumping device for preparing perovskite films. Background Art

[0002] Perovskite solar cells are solar cells that use perovskite-type organic metal halide semiconductors as light-absorbing materials and belong to the third generation of solar cells. Common perovskite solar cells are mainly composed of a conductive glass layer, a bottom electrode, an electron transport layer, a perovskite layer, a hole transport layer, and a top electrode. The preparation of high-quality perovskite films is an important basis for achieving efficient and stable perovskite solar cells. The main steps for preparing perovskite films include: 1) using a coating method to prepare a perovskite liquid film; 2) using an air knife drying method or a vacuum drying method to dry and crystallize the perovskite liquid film to form a perovskite dry film; 3) high-temperature annealing of the perovskite dry film to obtain a perovskite film; after research and development by domestic and foreign equipment manufacturers, coating equipment and high-temperature annealing equipment have become very mature and can meet the current technical requirements of the perovskite industry. At present, the main difficulty restricting the development of perovskite solar energy lies in the drying and crystallization equipment. If the perovskite liquid film is dried and crystallized, problems such as small crystal grains and poor uniformity will directly affect the performance and life of the perovskite solar cell.

[0003] At present, the main methods for drying and crystallizing perovskite films include vacuum pumping. The vacuum pumping method is to quickly draw a vacuum under the glass to achieve negative pressure to guide the drying and crystallization of the perovskite film. The vacuum pumping method has a short cycle and can meet the current demand for large-area perovskite battery mass production. However, the conventional vacuum pumping device structure is prone to poor crystallization uniformity, affecting the efficiency and stability of perovskite solar cells. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to provide a vacuum pumping device for preparing a perovskite film, wherein the vacuum pumping device for the perovskite film is conducive to improving the uniformity of the perovskite film formation.

[0005] According to an embodiment of the utility model, the vacuum pumping equipment for preparing the perovskite film comprises: a shell having a sealed containing space; a base installed in the containing space and used to support a glass substrate; and a vacuum pumping component, the vacuum pumping component comprises a vacuum pump and a vacuum pumping tube, and a plurality of the vacuum pumps and the vacuum pumping tubes are provided, one end of each of the vacuum pumping tubes is connected to a vacuum pump, and the other end is connected to the containing space, wherein the lengths of the plurality of vacuum pumping tubes are equal.

[0006] According to the vacuum pumping equipment for preparing perovskite film according to the embodiment of the utility model, by making the lengths of multiple vacuum pumps equal, the time of the suction action on the containing space after the multiple vacuum pumps are started can be relatively consistent, thereby making the airflow in the containing space relatively stable, and not easily affecting the uncrystallized perovskite, which is beneficial to improving the uniformity of perovskite film formation.

[0007] In some embodiments of the present invention, the shell includes an upper shell plate and a wall plate connected to the outer peripheral edge of the upper shell plate, the upper shell plate is provided with a first exhaust hole, the wall plate is provided with a second exhaust hole, the first exhaust hole is located directly above the center position of the glass substrate, and a plurality of second exhaust holes are provided, and the plurality of second exhaust holes are respectively arranged on both sides of the glass substrate opposite to each other.

[0008] In some embodiments of the utility model, the vacuum pumping assembly also includes an exhaust pipe, which includes a main pipe, a first branch pipe and a second branch pipe, the first branch pipe and the second branch pipe are connected in parallel between the main pipe and the storage space, and each of the vacuum pumping pipes is connected to the main pipe at one end facing the storage space, and is connected to the storage space through the vacuum pumping pipe.

[0009] In some embodiments of the utility model, the main pipe is provided with: a first control valve, the opening of which is adjustable; and a second control valve, which is located on a side of the first control valve facing the vacuum pump.

[0010] In some embodiments of the present invention, the vacuum equipment further includes a driving assembly, the shell includes an upper shell and a lower shell, and the driving assembly is used to drive the upper shell and / or the lower shell to move to open or close the accommodating space.

[0011] In some embodiments of the utility model, the upper shell includes an upper shell plate and a wall panel surrounding the outer peripheral side of the upper shell plate, the upper shell plate and the wall panel construct a accommodating space opening downward, the lower shell is suitable for entering the accommodating space from the opening and being sealingly connected to the wall panel to seal the accommodating space.

[0012] In some embodiments of the present invention, the base includes a plurality of lifting rods installed on the lower shell, and the lifting rods are lifted and lowered to enable the glass substrate to move up and down.

[0013] In some embodiments of the present invention, a temperature control device is installed in the lower shell, and the temperature control device is used to transfer heat to the glass substrate through the base to control the temperature of the glass substrate.

[0014] In some embodiments of the present invention, the vacuum pumping equipment further includes a vacuum breaking component, which includes an air pump and an air supply pipe, one end of the air supply pipe is connected to the air pump, and the other end is connected to the accommodating space.

[0015] In some embodiments of the utility model, the shell includes a bottom wall, the bottom wall is provided with an air inlet hole connected to the accommodating space, the air supply pipe is connected to the air inlet hole, wherein there are multiple air inlet holes, and the multiple air inlet holes are symmetrically arranged along the center position of the bottom wall.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 It is a schematic diagram of the pipeline of the vacuum pumping equipment according to the embodiment of the utility model.

[0019] Figure 2 It is a structural schematic diagram of the open state of the shell according to an embodiment of the utility model.

[0020] Figure 3 It is a structural schematic diagram of the closed state of the shell according to an embodiment of the utility model.

[0021] Reference numerals:

[0022] Vacuum equipment 100,

[0023] Shell 1, accommodating space 10, upper shell 11, upper shell plate 111, wall plate 112, lower shell 12, air inlet 121, first air exhaust hole 13, second air exhaust hole 14, lifting rod 21, glass substrate 3, vacuum pump 41, first control valve 42, main pipeline 431, first branch pipeline 432, second branch pipeline 433, second control valve 44, air pump 51, air supply pipe 52, vacuum pipe 61. DETAILED DESCRIPTION

[0024] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0025] In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0026] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0027] Reference below Figure 1-Figure 3 A vacuum pumping device 100 for preparing a perovskite film according to an embodiment of the present invention is described.

[0028] like Figure 1-Figure 3 As shown, the vacuum equipment 100 for preparing perovskite film according to the embodiment of the utility model includes a shell 1, a base and a vacuum assembly. The shell 1 has a closed containing space 10. The base is installed in the containing space 10 for carrying a glass substrate 3. The vacuum assembly includes a vacuum pump 41 and a vacuum tube 61. A plurality of vacuum pumps 41 and vacuum tubes 61 are provided. One end of each vacuum tube 61 is connected to a vacuum pump 41, and the other end is connected to the containing space 10. The lengths of the plurality of vacuum tubes 61 are equal.

[0029] In one example, when performing a vacuum pumping action, a portion of the multiple vacuum pumps 41 are started to perform vacuum pumping, and one or more vacuum pumps 41 in the other portion are used as backup pumps. In this way, when one or several vacuum pumps 41 are damaged, the backup pumps can be directly started without affecting the vacuum pumping action, thereby providing good stability.

[0030] In one example, when multiple vacuum pumps 41 perform a vacuuming action, if the lengths of the vacuum tubes 61 are not equal, the timing of the suction action on the containing space 10 after the multiple vacuum pumps 41 are started is inconsistent, which can easily affect the gas flow direction of the containing space 10 and thus affect the uncrystallized perovskite. In the present application, the lengths of the multiple vacuum tubes 61 are made equal. In this way, the timing of the suction action on the containing space 10 after the multiple vacuum pumps 41 are started can be more consistent, so that the airflow in the containing space 10 is more stable and less likely to affect the uncrystallized perovskite.

[0031] Therefore, according to the vacuum equipment 100 for preparing perovskite film according to the embodiment of the utility model, by making the lengths of multiple vacuum tubes 61 equal, the time of the suction action of the multiple vacuum pumps 41 on the containing space 10 can be relatively consistent after being started, thereby making the airflow in the containing space 10 relatively stable, and not easily affecting the uncrystallized perovskite, which is beneficial to improving the uniformity of perovskite film formation.

[0032] In some embodiments of the present invention, the shell 1 includes an upper shell plate 111 and a wall plate 112 surrounding the outer peripheral side of the upper shell plate 111, the upper shell plate 111 is provided with a first exhaust hole 13, the wall plate 112 is provided with a second exhaust hole 14, the first exhaust hole 13 is located directly above the center position of the glass substrate 3, and a plurality of second exhaust holes 14 are provided, and the plurality of second exhaust holes 14 are respectively arranged on both sides of the glass substrate 3 opposite to each other.

[0033] like Figure 2 and Figure 3 In a specific example shown, the housing 1 includes an upper housing 11 and a lower housing 12, and the vacuum pumping device 100 for preparing a perovskite film also includes a driving component, which is used to drive the upper housing 11 and / or the lower housing 12 to move up and down to open or close the accommodating space 10. The upper housing 11 includes an upper shell plate 111 and a wall plate 112 surrounding the outer peripheral side of the upper shell plate 111, the upper shell plate 111 has a first air extraction hole 13, and the wall plate 112 is provided with a second air extraction hole 14, the first air extraction hole 13 is located directly above the center of the glass substrate 3, and the air extraction pipe includes a main pipeline 431, a first branch pipeline 432 and a second branch pipeline 433, the first branch pipeline 432 and the second branch pipeline 433 are connected in parallel between the main pipeline 431 and the housing 1, and are respectively connected to the first air extraction hole 13 and the second air extraction hole 14. Therefore, when the containing space 10 is evacuated, the airflow is relatively uniform and stable, so that the perovskite in the containing space 10 is relatively stable, which is beneficial to the film formation effect of the perovskite.

[0034] Optionally, a plurality of second air extraction holes 14 are provided, and the plurality of second air extraction holes 14 are respectively provided on both sides of the glass substrate 3 in pairs. Figure 2In a specific example shown, there are two second gas extraction holes 14, and the two second gas extraction holes 14 are respectively arranged on both sides of the glass substrate 3. Therefore, when vacuuming, the gas in the accommodating space 10 can be extracted from the two second gas extraction holes 14 and one first gas extraction hole 13 respectively, and the two second gas extraction holes 14 are symmetrically arranged on both sides of the first gas extraction hole 13, so that the gas in the accommodating space 10 can be extracted more stably and is not easy to affect the perovskite.

[0035] In some embodiments of the present invention, Figure 1-Figure 3 As shown, the upper shell plate 111 has a first exhaust hole 13, and the wall plate 112 is provided with a second exhaust hole 14. The first exhaust hole 13 is located directly above the center of the glass substrate 3. The exhaust pipe includes a main line 431, a first branch line 432, and a second branch line 433. The first branch line 432 and the second branch line 433 are connected in parallel between the main line 431 and the shell 1, and are respectively connected to the first exhaust hole 13 and the second exhaust hole 14. Each vacuum tube 61 is connected to the main line 431 at one end facing the accommodating space 10, and is connected to the accommodating space 10 through the exhaust pipe. For further reference Figure 1 In the example shown, one end of the vacuum tube 61 is connected to the outlet of a vacuum pump 41, and the other end is connected to the end of the main line 431 away from the storage space 10. When the lengths of the plurality of vacuum tubes 61 are equal, the storage space 10 is evacuated by using the main line 431, the first branch line 432 and the second branch line 433 of the vacuum tube, so that the flow can be more uniform and stable, and the perovskite in the storage space 10 can be more stable, which is conducive to more uniform film formation of the perovskite and a good film formation effect.

[0036] Alternatively, if Figure 1-Figure 3 As shown, the first control valve 42 is installed on the main pipe 431, and the second control valve 44 is also provided on the main pipe 431, and the second control valve 44 is located between the vacuum pump 41 and the first control valve 42. That is to say, when performing a vacuum operation, the opening of the first control valve 42 can be adjusted first, and when the opening of the first control valve 42 is adjusted to a predetermined opening size, the second control valve 44 is opened, which can help to make the air extraction rate more stable.

[0037] In a specific example, after the glass substrate 3 coated with perovskite is placed in the receiving space 10 of the shell 1, the receiving space 10 can be evacuated by vacuuming, so that the perovskite coated on the glass substrate 3 is crystallized to form a perovskite film. During the vacuuming process, the vacuuming rate in the receiving space 10 can be adjusted by controlling the opening of the first control valve 42, so as to avoid the vacuuming rate in the receiving space 10 being too high or too low. If the vacuuming rate is too high, the perovskite is likely to be deformed under the action of the airflow, and if the vacuuming rate is too low, it is easy to increase the vacuuming time and also easy to affect the uniformity of the perovskite film formation.

[0038] In one example, the opening of the first control valve 42 can be adjusted according to the thickness of the perovskite film and the size of the accommodating space 10, so that the vacuum pumping equipment 100 of the present application can adapt to different working conditions, with strong practicality and high flexibility.

[0039] In one example, when the vacuum pump 41 is performing vacuum extraction, the opening degree of the first control valve 42 can also be changed. For example, the opening degree can be continuously increased from a closed state, and then opened to a predetermined size, and then stabilized in this state for a certain period of time to perform vacuum extraction, and then after a predetermined time, the opening degree of the first control valve 42 is gradually reduced.

[0040] In one example, the first control valve 42 may be a butterfly valve.

[0041] Therefore, according to the vacuum pumping equipment 100 for preparing perovskite film according to the embodiment of the utility model, the vacuum pumping component is provided with a control valve with adjustable opening, so that the vacuum pumping rate of the containing space 10 is adjustable, which is beneficial to improve the uniformity of perovskite film formation.

[0042] In some embodiments of the present invention, Figure 2 Figure 3 As shown, the vacuum equipment 100 for preparing perovskite film also includes a driving component, the shell 1 includes an upper shell 11 and a lower shell 12, and the driving component is used to drive the upper shell 11 and / or the lower shell 12 to move up and down to open or close the accommodating space 10.

[0043] In one example, the lower shell 12 is fixed, and the driving component can drive the upper shell 11 to move up and down. Specifically, the driving component drives the upper shell 11 to move upward to open the accommodating space 10, and the driving component can also drive the upper shell 11 to move downward, so that the upper shell 11 cooperates with the lower shell 12 to construct a closed accommodating space 10. It can be understood that by providing two shells 1, and by the two shells 1 being able to open and close up and down, it is convenient to put the glass substrate 3 into the accommodating space 10, and it is also convenient to take out the glass substrate 3. In addition, it should be noted here that the above example is only for illustration. It can be understood that only the lower shell 12 can be movable, and the upper shell 11 is fixed, or both the upper shell 11 and the lower shell 12 can move up and down, and this application does not limit it.

[0044] In some embodiments of the present invention, Figure 2-Figure 3 As shown, the upper shell 11 includes an upper shell plate 111 and a wall plate 112 surrounding the outer peripheral side of the upper shell plate 111. The upper shell plate 111 and the wall plate 112 construct a downwardly opening accommodation space 10. The lower shell 12 is suitable for entering the accommodation space 10 from the opening and is sealed and connected with the wall plate 112 to seal the accommodation space 10. Such a configuration is not only conducive to the design of the upper shell 11 and the lower shell 12, but also convenient for production and manufacturing. At the same time, when the upper shell 11 or the lower shell 12 is active, it is also conducive to the cooperation of the upper shell 11 and the lower shell 12. In addition, the lower shell 12 can enter the accommodation space 10, so that the sealing area between the lower shell 12 and the wall plate 112 is larger, which is conducive to setting a sealing structure to seal the assembly gap between the lower shell 12 and the wall plate 112, and the assembly space is large and the sealing effect is good.

[0045] In some examples, the sealing structure may be a sealing ring, and a sealing groove for assembling the sealing ring may be provided on the wall panel 112 or the lower shell 12, which is not limited here.

[0046] In some embodiments of the present invention, the base includes a plurality of lifting rods 21 mounted on the lower shell 12 , and the lifting rods 21 are lifted and lowered to enable the glass substrate 3 to move up and down.

[0047] In a specific example, Figure 1-Figure 3As shown, the plurality of lifting rods 21 can rise to the same height, so that the glass substrate 3 is placed on the platform formed by the plurality of lifting rods 21. At this time, the plurality of lifting rods 21 descend at the same rate, specifically, the lower surface of the glass substrate 3 can be made to fit or approximately fit with the upper surface of the lower shell 12. Here, approximately fitting means that there is still a gap space, but the gap space is very small. At this time, since the lower surface of the glass substrate 3 fits or approximately fits with the upper surface of the lower shell 12, the upper shell 11 can be lowered to a lower position when it descends, which can help reduce the size of the accommodation space 10, increase the vacuuming speed of the accommodation space 10, save vacuuming time, and thus save costs.

[0048] Furthermore, if Figure 1-Figure 3 As shown, the upper shell 11 includes an upper shell plate 111 and a wall plate 112 surrounding the outer peripheral side of the upper shell plate 111. The upper shell plate 111 and the wall plate 112 construct a accommodating space 10 with an opening facing downward. The lower shell 12 is suitable for entering the accommodating space 10 from the opening and is sealed with the wall plate 112 to seal the accommodating space 10. Therefore, when the upper shell 11 is descending, the upper shell plate 111 can be descended to a position closer to the glass substrate 3.

[0049] In some embodiments of the utility model, a temperature control device is installed in the lower housing 12, and the temperature control device is used to transfer heat to the glass substrate 3 through the base to control the temperature of the glass substrate 3. The temperature of the glass substrate 3 can be well controlled by the temperature control device, so that the glass substrate 3 can reach different temperatures according to different process requirements. In addition, the temperature control device can also preheat the glass substrate 3 so that the perovskite on the glass substrate 3 is dried to a certain extent, so that when vacuuming, the airflow has less influence on the perovskite, which is conducive to the uniformity of the perovskite film formation.

[0050] Furthermore, the temperature control device can also quickly cool the glass substrate 3 after the vacuuming operation is completed.

[0051] In some embodiments of the present invention, Figure 1-Figure 3 As shown, the vacuum pumping device 100 for preparing the perovskite film further includes a vacuum breaking component, which includes an air pump 51 and an air supply pipe 52, one end of the air supply pipe 52 is connected to the air pump 51, and the other end is connected to the receiving space 10. The air pump 51 can provide compressed air to the air supply pipe 52, and by providing compressed air toward the receiving space 10, it can be helpful to quickly release the vacuum state of the receiving space 10, and it is helpful to open the receiving space 10.

[0052] In one example, the number of the air supply pipes 52 may be multiple, for example, two or more. The lower shell 12 may be provided with multiple air inlet holes 121 , and the multiple air inlet holes 121 correspond to the multiple air supply pipes 52 one by one.

[0053] In some embodiments of the utility model, the shell 1 includes a bottom wall (refer to the lower shell 12), and an air inlet hole 121 connected to the accommodating space 10 is provided on the bottom wall, and the air supply pipe 52 is connected to the air inlet hole 121, wherein a plurality of air inlet holes 121 are provided, and the plurality of air inlet holes 121 are symmetrically arranged along the center position of the bottom wall.

[0054] In one example, two air inlet holes 121 may be provided. Figure 2 In the diagram shown, two air inlet holes 121 are symmetrically arranged along the middle position of the lower shell 121. The purpose of such arrangement is to make the air pump 51 more uniform when providing compressed air toward the containing space 10. The uniform air supply helps to ensure the uniformity of gas composition and concentration in the containing space 10, which is necessary to obtain a uniform film thickness. In addition, the uniform delivery of compressed gas to the containing space 10 helps to remove residual impurities or oxides and ensure the quality of film surface treatment. Therefore, it can be understood that the number of air inlet holes 121 can also be set to three or more, so as to improve the efficiency of releasing the vacuum state of the containing space 10. The present application does not limit the number of air inlet holes 121.

[0055] Other structures and operations of the vacuum pumping device 100 for preparing a perovskite film according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0056] In the description of this specification, the description with reference to the terms "some embodiments", "optionally", "further" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0057] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A vacuum pumping device for preparing a perovskite film, characterized in that: include: A housing having a sealed accommodation space therein; A base, which is installed in the containing space and is used to carry the glass substrate; as well as A vacuum pumping component, wherein the vacuum pumping component comprises a vacuum pump and a vacuum pumping tube, wherein a plurality of the vacuum pumps and the vacuum pumping tubes are provided, wherein one end of each of the vacuum pumping tubes is connected to a vacuum pump, and the other end is connected to the accommodating space, wherein the lengths of the plurality of vacuum pumping tubes are equal.

2. The vacuum pumping device for preparing a perovskite film according to claim 1, characterized in that: The shell includes an upper shell plate and a wall plate connected to the outer peripheral edge of the upper shell plate, the upper shell plate is provided with a first exhaust hole, the wall plate is provided with a second exhaust hole, the first exhaust hole is located directly above the center position of the glass substrate, a plurality of second exhaust holes are provided, and the plurality of second exhaust holes are respectively arranged on both sides of the glass substrate opposite to each other.

3. The vacuum pumping device for preparing a perovskite film according to claim 1, characterized in that: The vacuum pumping assembly also includes an exhaust pipe, which includes a main pipe, a first branch pipe and a second branch pipe. The first branch pipe and the second branch pipe are connected in parallel between the main pipe and the accommodating space. One end of each of the vacuum pumping pipes facing the accommodating space is connected to the main pipe and communicates with the accommodating space through the exhaust pipe.

4. The vacuum pumping device for preparing a perovskite film according to claim 3, characterized in that: The main pipe is provided with: a first control valve, wherein the opening of the first control valve is adjustable; A second control valve is located on a side of the first control valve facing the vacuum pump.

5. The vacuum pumping device for preparing a perovskite film according to claim 1, characterized in that: It also includes a driving assembly, the housing includes an upper housing and a lower housing, and the driving assembly is used to drive the upper housing and / or the lower housing to move so as to open or close the accommodating space.

6. The vacuum pumping device for preparing a perovskite film according to claim 5, characterized in that: The upper shell includes an upper shell plate and a wall plate surrounding the outer peripheral side of the upper shell plate, the upper shell plate and the wall plate constitute a storage space opening downward, the lower shell is suitable for entering the storage space from the opening and is sealed with the wall plate to seal the storage space.

7. The vacuum pumping device for preparing a perovskite film according to claim 5, characterized in that: The base comprises a plurality of lifting rods mounted on the lower shell, and the lifting rods are lifted and lowered to enable the glass substrate to move up and down.

8. The vacuum pumping device for preparing a perovskite film according to claim 5, characterized in that: A temperature control device is installed in the lower shell, and the temperature control device is used to transfer heat to the glass substrate through the base to control the temperature of the glass substrate.

9. The vacuum pumping device for preparing a perovskite film according to claim 1, characterized in that: It also includes a vacuum breaking component, which includes an air pump and an air supply pipe, one end of the air supply pipe is connected to the air pump, and the other end is connected to the accommodating space.

10. The vacuum pumping device for preparing a perovskite film according to claim 9, characterized in that: The shell includes a bottom wall, the bottom wall is provided with an air inlet hole connected to the accommodating space, the air supply pipe is connected to the air inlet hole, wherein a plurality of air inlet holes are provided, and the plurality of air inlet holes are symmetrically arranged along the center position of the bottom wall.

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