Direct-mounted high-stability silicon pressure sensor

Abstract

The utility model relates to a direct installation type high-stability silicon pressure sensor. The shell connecting piece, the oil filling base and the connector piece are coaxially welded in sequence, an outer injection opening is formed in the side wall of the shell connecting piece in a penetrating mode, a connecting ring is arranged in the shell connecting piece in a sealed and contained mode, an inner injection opening communicated with the outer injection opening is formed in the side wall of the connecting ring in a penetrating mode, a sintering base is arranged in the connecting ring in a sealed and contained mode, and a chip is fixedly arranged on the sintering base in a sealed mode. The oil filling base abuts against the connecting ring and the sintering base, a diaphragm is arranged on the oil filling base in a sealing covering mode, and the diaphragm is contained in the connector piece. According to the directly-installed high-stability silicon pressure sensor provided by the utility model, a glue injection mode is adopted after assembling and welding processes.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure detection, in particular to a direct-mounted high-stability silicon pressure sensor. Background Art

[0002] High-stability silicon pressure sensor is a pressure sensor manufactured by using the piezoresistive effect of silicon chips. It has the characteristics of high stability, high precision, fast response and long life. It is usually used in various industrial fields, including automobiles, aerospace, medical equipment, industrial automation and other fields. The piezoresistive effect is that when the silicon chip is subjected to pressure, the resistance inside the silicon chip will change. By measuring the change in resistance, the magnitude of the pressure applied can be determined.

[0003] At present, in the production and processing of conventional high-stability silicon pressure sensors, the sealing of each external component is ensured by welding, and the sealing of the silicon chip is ensured by gluing. However, the conventional production and processing of high-stability silicon pressure sensors still has the following shortcomings:

[0004] The sealing method of applying glue to the silicon chip is carried out before assembly, so it will cause uneven extrusion of the sealant during assembly; and the high temperature during welding will affect the sealant. Utility Model Content

[0005] In order to solve the technical problems existing in the background technology, the utility model provides a direct-mounted high-stability silicon pressure sensor, which is performed by glue injection after the assembly and welding processes.

[0006] The technical solution adopted by the utility model is:

[0007] A direct-mounted high-stability silicon pressure sensor, comprising:

[0008] A shell connector, an oil filling seat and a joint piece are coaxially welded in sequence, wherein an outer injection port is penetrated on the side wall of the shell connector, a connecting ring is provided in a sealed container inside the shell connector, an inner injection port connected to the outer injection port is penetrated on the side wall of the connecting ring, a sintering seat is provided in the sealed container inside the connecting ring, a chip is sealed and fixedly provided on the sintering seat, the oil filling seat is in contact with the connecting ring and the sintering seat, a diaphragm is provided on the sealing cover on the oil filling seat, and the diaphragm is contained in the joint piece.

[0009] Furthermore, the shell connector is provided with a lead bin and a receiving bin, a connecting bin is provided between the lead bin and the receiving bin, the connecting bin is used to abut against the connecting ring, and a reduced diameter opening is provided at the outer edge of the connecting bin.

[0010] Furthermore, the connecting ring is inserted into the storage bin and abuts against the connecting bin. The connecting ring is provided with a bayonet and a storage chamber. The bayonet is used to clamp the sintering seat, and the storage chamber is used to accommodate the sintering seat in a gap.

[0011] Furthermore, a concave sealing ring groove is provided on the abutting surface between the connecting ring and the shell connecting piece, and the sealing ring groove is used to accommodate a sealing ring.

[0012] Furthermore, a sub-mouth protrudes on the end surface of the sintering seat close to the chip side.

[0013] Furthermore, the oil filling seat is inserted into the reduced diameter port, an oil hole is provided through the oil filling seat, one end of the oil hole is a diaphragm, and an inwardly concave annular groove is provided on the oil filling seat at the other end of the oil hole, and the annular groove is used to insert the sub-port of the sintering seat.

[0014] Furthermore, a joint thread is provided on the outer wall of the joint component, and the joint thread is used to seal the joint component and the pressure vessel to be measured. A measuring hole is provided through the joint component, and a concave buffer groove is provided at the edge of the measuring hole away from the joint thread. The buffer groove is used to accommodate a diaphragm.

[0015] Furthermore, the sintering seat gap is arranged in the accommodation chamber, and an inwardly concave oil chamber is arranged at one end of the sintering seat, and the oil chamber is connected with the oil hole. An outer oil pipe and an inner oil pipe are arranged on the sintering seat, and the outer oil pipe is connected with the back side of the chip, and the inner oil pipe is connected with the oil chamber.

[0016] Furthermore, the middle portion of the outer wall of the connector is configured to be hexagonal.

[0017] Furthermore, a sealing thread is provided outside the shell connector, and the sealing thread is used to connect with an explosion-proof hose.

[0018] The advantages of the direct-mounted high-stability silicon pressure sensor of the utility model are:

[0019] 1. Preheat the vaporized ammonia through the preheating tube in the furnace shell;

[0020] 2. The decomposition tubes are arranged in a multi-circle concentric circular array to increase the accommodation space for the output gas, thereby improving the fluidity of the output gas and ensuring the output gas volume under a pressurized environment that ensures the reaction rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation of the utility model, the drawings required in the specific implementation are briefly introduced below. The drawings in the following description are implementations of the utility model.

[0022] Figure 1 This is a general schematic diagram of a direct-mounted high-stability silicon pressure sensor provided by an example of the utility model;

[0023] Figure 2 This is a cross-sectional schematic diagram of a direct-mounted high-stability silicon pressure sensor provided by an example of the utility model;

[0024] Figure 3 This is a schematic cross-sectional view of a housing connector of a direct-mounted high-stability silicon pressure sensor provided by an example of the utility model;

[0025] Figure 4 This is a cross-sectional schematic diagram of an oil-filled seat of a direct-mounted high-stability silicon pressure sensor provided by an example of the utility model;

[0026] Figure 5 This is a cross-sectional schematic diagram of a connector of a direct-mounted high-stability silicon pressure sensor provided by an example of the utility model;

[0027] Figure 6 This is a cross-sectional schematic diagram of a connection ring of a direct-mounted high-stability silicon pressure sensor provided by an example of the utility model;

[0028] Figure 7 The utility model provides a cross-sectional schematic diagram of a sintering base of a direct-mounted high-stability silicon pressure sensor.

[0029] In the figure:

[0030] 1. Shell connector,

[0031] 11. Lead warehouse, 12. Container warehouse, 13. Connecting warehouse, 14. Reduced diameter port, 15. External injection port,

[0032] 2. Oil filling seat,

[0033] 21. Oil hole, 22. Ring groove,

[0034] 3. Connectors,

[0035] 31. Connector thread, 32. Measuring hole, 33. Buffer groove,

[0036] 4. Connecting ring,

[0037] 41. bayonet, 42. chamber, 43. inner injection port, 44. sealing ring groove,

[0038] 5. Diaphragm,

[0039] 6. Sintering seat,

[0040] 61, oil chamber, 62, outer oil pipe, 63, inner oil pipe,

[0041] 7. Chip. DETAILED DESCRIPTION

[0042] In order to more clearly and explicitly illustrate the specific implementation purpose and implementation method of the utility model, the technical solution of the utility model will be fully described below. The described embodiment is a part of the embodiment of the utility model, not all the embodiments. Without making creative work, all other embodiments based on the embodiment described in the utility model belong to the protection scope of the utility model.

[0043] The utility model discloses a direct-mounted high-stability silicon pressure sensor. Figure 1 , Figure 2 As shown, it includes: a shell connecting part 1, an oil filling seat 2, and a joint part 3 which are coaxially welded in sequence.

[0044] like Figure 3 As shown, the shell connector 1 is provided with a lead bin 11 and a storage bin 12, and a connecting bin 13 is provided between the lead bin 11 and the storage bin 12. The connecting bin 13 is used to abut the connecting ring 4, and a reducing port 14 is provided at the outer edge of the connecting bin 13. An external injection port 15 is provided through the side wall of the shell connector 1, and a sealing thread is provided on the outside of the shell connector 1, and the sealing thread is used to connect with an explosion-proof hose.

[0045] The shell connector 1 is sealed with a connecting ring 4. Figure 6 As shown, the connecting ring 4 is inserted into the storage bin 12 and abuts against the connecting bin 13. The connecting ring 4 is provided with a bayonet 41 and a storage chamber 42. The bayonet 41 is used to clamp the sintering seat 6, and the storage chamber 42 is used to accommodate the sintering seat 6 in a gap. An inwardly concave sealing ring groove 44 is provided on the abutting surface between the connecting ring 4 and the shell connecting piece 1. The sealing ring groove 44 is used to accommodate a sealing ring. An inner injection port 43 connected with the outer injection port 15 is penetrated on the side wall of the connecting ring 4.

[0046] The connection ring 4 is sealed with a sintering seat 6. Figure 7 As shown, the sintering seat 6 is spaced within the containing chamber 42, and a concave oil chamber 61 is provided at one end of the sintering seat 6, the oil chamber 61 is connected to the oil hole 21, and an outer oil pipe 62 and an inner oil pipe 63 are provided on the sintering seat 6, the outer oil pipe 62 is connected to the back of the chip 7, and the inner oil pipe 63 is connected to the oil chamber 61; the chip 7 is sealed and fixedly provided on the sintering seat 6, and a sub-mouth protrudes on the end face of the sintering seat 6 close to the chip 7.

[0047] The oil-filled seat 2 is in contact with the connecting ring 4 and the sintering seat 6. Figure 4 As shown, the oil filling seat 2 is inserted into the reduced diameter port 14, and an oil hole 21 is provided through the oil filling seat 2. One end of the oil hole 21 is a diaphragm 5, and an inwardly concave annular groove 22 is provided on the oil filling seat 2 at the other end of the oil hole 21. The annular groove 22 is used to insert the sub-port of the sintering seat 6.

[0048] The sealing cover on the oil filling seat 2 is provided with a diaphragm 5, and the diaphragm 5 is accommodated in the joint member 3. Figure 5 As shown, a joint thread 31 is provided on the outer wall of the joint member 3, and the joint thread 31 is used to seal the joint member 3 with the pressure vessel to be measured. A measuring hole 32 is provided through the joint member 3, and a concave buffer groove 33 is provided at the edge of the measuring hole 32 away from the side of the joint thread 31, and the buffer groove 33 is used to accommodate the diaphragm 5; the middle part of the outer wall of the joint member 3 is set to be hexagonal.

[0049] Based on the above, the embodiment of the utility model of a direct-mounted high-stability silicon pressure sensor is inspired. Through the above description, relevant staff can make various changes and modifications without deviating from the technical idea of ​​this utility model. The technical scope of this utility model is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A direct-mounted high-stability silicon pressure sensor, characterized in that: include: A shell connecting member (1), an oil filling seat (2), and a joint member (3) are coaxially welded in sequence. An external injection port (15) is provided through the side wall of the shell connecting member (1). A connecting ring (4) is provided in a sealed container inside the shell connecting member (1). An internal injection port (43) connected to the external injection port (15) is provided through the side wall of the connecting ring (4). A sintering seat (6) is provided in a sealed container inside the connecting ring (4). A chip (7) is sealed and fixedly provided on the sintering seat (6). The oil filling seat (2) is in contact with the connecting ring (4) and the sintering seat (6). A diaphragm (5) is provided on the sealing cover of the oil filling seat (2). The diaphragm (5) is accommodated in the joint member (3).

2. A direct-mounted high-stability silicon pressure sensor according to claim 1, characterized in that: The housing connector (1) is provided with a lead wire bin (11) and a receiving bin (12); a connecting bin (13) is provided between the lead wire bin (11) and the receiving bin (12); the connecting bin (13) is used to abut against a connecting ring (4); and a reduced diameter opening (14) is provided at the outer edge of the connecting bin (13).

3. A direct-mounted high-stability silicon pressure sensor according to claim 2, characterized in that: The connecting ring (4) is inserted into the storage bin (12) and abuts against the connecting bin (13). The connecting ring (4) is provided with a bayonet (41) and a storage chamber (42). The bayonet (41) is used to clamp the sintering seat (6), and the storage chamber (42) is used to accommodate the sintering seat (6) in a gap.

4. The direct-mounted high-stability silicon pressure sensor according to claim 3, characterized in that: An inwardly concave sealing ring groove (44) is provided on the abutting surface between the connecting ring (4) and the housing connecting piece (1), and the sealing ring groove (44) is used to accommodate a sealing ring.

5. The direct-mounted high-stability silicon pressure sensor according to claim 3, characterized in that: A sub-mouth protrudes on the end surface of the sintering seat (6) close to the chip (7).

6. A direct-mounted high-stability silicon pressure sensor according to claim 4, characterized in that: The oil filling seat (2) is inserted into the reduced diameter port (14), and an oil hole (21) is provided through the oil filling seat (2). One end of the oil hole (21) is a diaphragm (5), and an inwardly concave annular groove (22) is provided on the oil filling seat (2) at the other end of the oil hole (21). The annular groove (22) is used to insert the sub-port of the sintering seat (6).

7. A direct-mounted high-stability silicon pressure sensor according to claim 6, characterized in that: The outer wall of the joint member (3) is provided with a joint thread (31), and the joint thread (31) is used to seal the joint member (3) and the pressure vessel to be measured. A measuring hole (32) is provided through the joint member (3), and an inwardly concave buffer groove (33) is provided at the edge of the measuring hole (32) away from the joint thread (31), and the buffer groove (33) is used to accommodate the diaphragm (5).

8. The direct-mounted high-stability silicon pressure sensor according to claim 7, characterized in that: The sintering seat (6) is spaced within the containing chamber (42); an inwardly concave oil chamber (61) is provided at one end of the sintering seat (6); the oil chamber (61) is connected to the oil hole (21); an outer oil pipe (62) and an inner oil pipe (63) are provided on the sintering seat (6); the outer oil pipe (62) is connected to the back of the chip (7); and the inner oil pipe (63) is connected to the oil chamber (61).

9. The direct-mounted high-stability silicon pressure sensor according to claim 6, characterized in that: The middle part of the outer wall of the joint piece (3) is arranged in a hexagonal shape.

10. The direct-mounted high-stability silicon pressure sensor according to claim 1, characterized in that: The shell connector (1) is provided with a sealing thread on the outside, and the sealing thread is used to be connected to an explosion-proof hose.

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