SMIF box linkage opening and closing device and SMIF box loading equipment

Abstract

The utility model provides an SMIF box linkage opening and closing device and SMIF box loading equipment, relates to the technical field of semiconductor equipment, and aims to solve the problems that the separation of a box cover and a bottom substrate of an existing SMIF box and the connection of the box cover and a moving mechanism after the box cover is opened are realized by adopting different power sources respectively. The SMIF box linkage opening and closing device comprises a fixed part, a movable part, an unlocking mechanism and a second locking part. The unlocking mechanism is installed on the fixed part, the second locking part is movably installed on the movable part, and the second locking part is provided with a follow-up position for connecting the box cover and the movable part and a separation position for releasing the connection state of the box cover and the movable part; the unlocking mechanism is in transmission connection with the first lock piece and the second lock piece and used for driving the first lock piece to move to the unlocking position and meanwhile linkage the second lock piece to move to the follow-up position and driving the first lock piece to move to the locking position and meanwhile linkage the second lock piece to move to the separation position. According to the utility model, the separation of the box cover and the substrate and the connection of the box cover and the moving mechanism are realized by adopting the same power source.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a SMIF box linkage opening and closing device and a SMIF box loading device. Background Art

[0002] In the semiconductor manufacturing process, wafer transfer is crucial to IC (Integrated Circuit) manufacturing. In order to ensure the quality of wafers when they are transferred between different processes and to prevent the wafers from being contaminated by dust or other pollutants, SMIF (Standard Mechanical Interface) boxes are often used for wafer transfer. They can significantly reduce the dust particles flowing through the wafers, thereby reducing the contamination of the wafers by dust particles, ensuring that the gas around the wafers remains stationary relative to the wafers during wafer transfer, storage, and most processes, and that dust particles in the external environment do not enter the wafer environment.

[0003] However, in the existing SMIF box, the separation of the box cover and the bottom substrate, and the fixed connection of the box cover and the moving mechanism after the box cover is opened, are respectively realized by using different power sources, which is not only not conducive to control, but also has a high driving cost. Utility Model Content

[0004] The first purpose of the utility model is to provide a SMIF box linkage opening and closing device to solve the technical problems of the existing SMIF box, the separation of the box cover and the bottom substrate, and the fixed connection between the box cover and the moving mechanism after the box cover is opened, which are respectively achieved by using different power sources.

[0005] The utility model provides a SMIF box linkage opening and closing device, the SMIF box includes a base plate and a box cover arranged on the base plate, a wafer accommodating cavity is formed between the box cover and the base plate, a first lock is arranged between the box cover and the base plate, the first lock has a locking position connecting the box cover and the base plate and an unlocking position releasing the connection state between the box cover and the base plate.

[0006] The SMIF box linkage opening and closing device includes a fixed part, a movable part, an unlocking mechanism and a second locking part; the fixed part is used to support the substrate, the unlocking mechanism is installed on the fixed part, the second locking part is movably installed on the movable part, and the second locking part has a follow-up position connecting the box cover and the movable part and a separation position for releasing the connection between the box cover and the movable part; the unlocking mechanism is transmission-connected with both the first locking part and the second locking part, and is used to drive the first locking part to move to the unlocking position while linking the second locking part to move to the follow-up position, and drive the first locking part to move to the locking position while linking the second locking part to move to the separation position.

[0007] Further, the unlocking mechanism includes a rotating cam, which is rotatably mounted on the fixing member, and has a first outer contour and a second outer contour, the curvature radius of the first outer contour is greater than the curvature radius of the second outer contour, wherein the first outer contour cooperates with the second locking element to move the second locking element away from the box cover so that the second locking element moves to the separation position, and the second outer contour cooperates with the second locking element to move the second locking element close to the box cover so that the second locking element moves to the follow-up position; the second locking element always has a tendency to move toward the follow-up position.

[0008] Furthermore, the unlocking mechanism also includes a push rod, which is movably mounted on the fixing member and is located between the rotating cam and the second locking member; one end of the push rod is used to abut and cooperate with the outer contour of the rotating cam, and the other end of the push rod is used to abut and cooperate with the second locking member; the push rod always has a tendency to abut against the outer contour of the rotating cam.

[0009] Furthermore, the second outer contour is an arc shape.

[0010] Further, the second locking elements are arranged at the positions of a group of opposite side walls of the box cover, and the push rod is arranged between each of the second locking elements and the rotating cam; the rotating cam has two first outer contours and two second outer contours, and the first outer contours and the second outer contours are arranged alternately; and / or, a cam follower is arranged at one end of the push rod facing the rotating cam, and the push rod abuts against the rotating cam through the cam follower; and / or, the unlocking mechanism also includes a guide rail, which is fixedly connected to the fixing element, and the push rod is slidably arranged on the guide rail, and the sliding direction of the push rod is along the length direction of the push rod; and / or, the unlocking mechanism also includes a reset spring, and the push rod includes an active section for abutting and cooperating with the outer contour of the rotating cam, and a driven section for abutting and cooperating with the second locking element, and the reset spring is fixedly connected to the active section and the driven section, and the reset spring is used to make the push rod always have a tendency to abut against the outer contour of the rotating cam.

[0011] Furthermore, the box cover includes a cover body and a flange extending outward from the cover body, and the second locking element includes a locking tongue; in the follow-up position of the second locking element, the locking tongue extends above the flange.

[0012] Furthermore, the second locking element includes a plurality of locking tongues that move synchronously, and the plurality of locking tongues are arranged at intervals along the edge of the cover body.

[0013] Furthermore, the rotating cam is fixedly provided with a box-opening pin, and the box-opening pin is used to cooperate with the first locking element so that the first locking element can switch between the locked position and the unlocked position; the rotating cam is located below the fixing element, and the fixing element is provided with an arc-shaped guide groove, and the box-opening pin passes through the arc-shaped guide groove to cooperate with the first locking element.

[0014] Furthermore, the SMIF box linkage opening and closing device also includes an in-place sensor, which is installed on the movable part, and the in-place sensor is used to detect the position of the second lock; and / or the movable part has a middle opening, and the movable part is arranged around the fixed part through the middle opening; the movable part is used to be connected to the lifting drive device; and / or the SMIF box also includes a wafer basket, which is arranged on the substrate, and the wafer basket is used to carry wafers.

[0015] The beneficial effects brought by the utility model SMIF box linkage opening and closing device are:

[0016] By setting up a SMIF box linkage opening and closing device mainly composed of a fixed part, a movable part, an unlocking mechanism and a second lock, when the SMIF box is in the locked box position, that is, when the first lock is in the locked position connecting the box cover and the substrate, at this time, the SMIF box is placed on the fixed part through the substrate, and the second lock is in a separation position to release the connection between the box cover and the movable part. When the wafer needs to be transferred, that is: when the box cover needs to be opened, the action of the unlocking mechanism can be used to switch the first lock to the unlocking position separating the box cover from the substrate, wherein, when the first lock is switched to the above-mentioned unlocking position, the second lock will also switch from the separation position to the follow-up position connecting the box cover and the movable part, so that the box cover and the movable part are connected together, so as to use the movement of the movable part to drive the box cover to open, thereby completing the subsequent wafer transfer process.

[0017] After completing the transfer of the wafer, that is, when the box cover needs to be closed, the movable part can be used to drive the box cover to move to the position of the substrate. At this time, the box cover and the substrate are only in a placing and being placed relationship, and there is no connection between the two. Afterwards, the reverse action of the unlocking mechanism is used to switch the first lock from the unlocking position to the locking position connecting the box cover and the substrate, so that the box cover and the substrate are connected together. Among them, when the first lock is switched to the above-mentioned locking position, the second lock will also switch from the follow-up position to the separation position to release the connection state between the box cover and the movable part, so that the box cover is separated from the movable part, so that the SMIF box can be removed from the fixed part.

[0018] The SMIF box linkage opening and closing device can realize the simultaneous driving of the first lock and the second lock by the action of the unlocking mechanism through the above-mentioned setting, so that when the box cover needs to be opened, the connection state between the box cover and the base plate is released and the box cover and the movable part are connected together at the same time, and when the box cover needs to be closed, the connection state between the box cover and the movable part is released and the box cover and the base plate are connected together at the same time, so as to realize the linkage of the first lock and the second lock in the process of opening and locking the box. The setting enables the separation of the box cover and the base plate, the connection of the box cover and the movable part after the box cover is opened, and the separation of the box cover and the movable part and the connection of the box cover and the base plate after the box cover is closed, all of which can be realized by using the same power source, which is convenient for control and has a low driving cost, thereby well solving the technical problems existing in the prior art.

[0019] The second object of the utility model is to provide a SMIF box loading device to solve the technical problems of the existing SMIF box, the separation of the box cover and the bottom substrate, and the fixed connection between the box cover and the moving mechanism after the box cover is opened, which are respectively achieved by using different power sources.

[0020] The utility model provides a SMIF box loading device, comprising a carrying frame, a lifting drive device and the above-mentioned SMIF box linkage opening and closing device, wherein the lifting drive device is installed on the carrying frame and is drivingly connected to the movable part; the fixed part is fixedly connected to the carrying frame.

[0021] The beneficial effects brought by the SMIF box loading device of the utility model are:

[0022] By arranging the above-mentioned SMIF box linkage opening and closing device in the SMIF box loading device, accordingly, the SMIF box loading device has all the advantages of the above-mentioned SMIF box linkage opening and closing device, which will not be described one by one here. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0024] Figure 1 A schematic structural diagram of a SMIF box using the SMIF box linkage opening and closing device provided by an embodiment of the utility model;

[0025] Figure 2 A schematic diagram of the relative position relationship between the SMIF box linkage opening and closing device and the SMIF box provided in an embodiment of the utility model;

[0026] Figure 3 A top view of the structure of the SMIF box linkage opening and closing device provided by the embodiment of the utility model, in which the first locking element is in the locking position and the second locking element is in the separation position;

[0027] Figure 4 A top view of the structure of the SMIF box linkage opening and closing device provided by the embodiment of the utility model, in which the first lock element is in the unlocking position and the second lock element is in the following position;

[0028] Figure 5 A schematic diagram of the structure of the SMIF box loading device provided by an embodiment of the utility model when the box cover of the SMIF box is closed;

[0029] Figure 6 A schematic diagram of the structure of the SMIF box loading device provided by the embodiment of the utility model when the box cover of the SMIF box is opened;

[0030] Figure 7 A schematic transverse cross-sectional view of a SMIF box linkage opening and closing device provided in an embodiment of the utility model.

[0031] Description of reference numerals:

[0032] 101-box cover; 102-wafer basket; 103-substrate; 104-wafer;

[0033] 201-rotating cam; 202-opening pin; 203-arc guide groove; 204-cam follower; 205-push rod; 206-second locking member; 207-in-place sensor; 208-fixing member; 209-moving member; 210-guide rail; 211-spring guide block; 212-reset spring; 213-opening impact block;

[0034] 301- load-bearing frame; 302- film transmission port. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific embodiments of the utility model are described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0036] This embodiment provides a SMIF box linkage opening and closing device.

[0037] Figure 1 This is a schematic diagram of the structure of a SMIF box using the SMIF box linkage opening and closing device provided in this embodiment. Figure 1As shown, the SMIF box includes a substrate 103 and a box cover 101 covering the substrate 103, a wafer accommodating cavity is formed between the box cover 101 and the substrate 103, a first lock is arranged between the box cover 101 and the substrate 103, and the first lock has a locking position connecting the box cover 101 and the substrate 103 and an unlocking position releasing the connection state between the box cover 101 and the substrate 103.

[0038] Figure 2 A schematic diagram of the relative position relationship between the SMIF box linkage opening and closing device and the SMIF box provided in this embodiment; Figure 3 A top view of the structure of the SMIF box linkage opening and closing device provided in this embodiment, in which the first locking element is in the locked position and the second locking element 206 is in the separated position; Figure 4 A top view of the structure of the SMIF box linkage opening and closing device provided in this embodiment, in which the first lock element is in the unlocking position and the second lock element 206 is in the following position. Figures 2 to 4 As shown, in this embodiment, the SMIF box linkage opening and closing device includes a fixed part 208, a movable part 209, an unlocking mechanism and a second locking part 206.

[0039] Please continue to refer to Figures 2 to 4 In the present embodiment, specifically, the fixing member 208 is used to carry the substrate 103, the unlocking mechanism is installed on the fixing member 208, the second locking member 206 is movably installed on the movable member 209, and the second locking member 206 has a following position connecting the box cover 101 and the movable member 209 and a separation position releasing the connection between the box cover 101 and the movable member 209; the unlocking mechanism is transmission-connected to both the first locking member and the second locking member 206, and is used to drive the first locking member to move to the unlocking position while linking the second locking member 206 to move to the following position, and drive the first locking member to move to the locking position while linking the second locking member 206 to move to the separation position.

[0040] Please continue to refer to Figure 3 When the SMIF box is in the locked box position, that is, when the first lock is in the locked position connecting the box cover 101 and the substrate 103, at this time, the SMIF box is placed on the fixed part 208 through the substrate 103, and the second lock 206 is in the separated position to release the connection between the box cover 101 and the movable part 209. When the wafer 104 needs to be transferred, that is, when the box cover 101 needs to be opened, the action of the unlocking mechanism can be used to switch the first lock to the unlocked position to separate the box cover 101 from the substrate 103, wherein, when the first lock is switched to the unlocked position, the second lock 206 will also switch from the separated position to the follow-up position connecting the box cover 101 and the movable part 209, so that the box cover 101 and the movable part 209 are connected together, so that the box cover 101 is driven to open by the movement of the movable part 209, thereby completing the subsequent wafer 104 transfer process.

[0041] Please continue to refer to Figure 4 After completing the transfer of the wafer 104, that is, when the box cover 101 needs to be closed, the movable member 209 can be used to drive the box cover 101 to move to the position of the substrate 103. At this time, the box cover 101 and the substrate 103 are only in a placing and being placed relationship, and there is no connection between the two. Afterwards, the reverse action of the unlocking mechanism is used to switch the first lock from the unlocking position to the locking position connecting the box cover 101 and the substrate 103, so that the box cover 101 and the substrate 103 are connected together. Among them, when the first lock is switched to the above-mentioned locking position, the second lock 206 will also switch from the follow-up position to the separation position for releasing the connection state between the box cover 101 and the movable member 209, so that the box cover 101 is separated from the movable member 209, so that the SMIF box can be removed from the fixing member 208.

[0042] The SMIF box linkage opening and closing device can realize the simultaneous driving of the first lock and the second lock 206 by the action of the unlocking mechanism through the above arrangement, so that when the box cover 101 needs to be opened, the connection state between the box cover 101 and the base plate 103 is released and the box cover 101 and the movable member 209 are connected together at the same time, and when the box cover 101 needs to be closed, the connection state between the box cover 101 and the movable member 209 is released and the box cover 101 and the base plate 103 are connected together at the same time, so as to realize the linkage of the first lock and the second lock 206 in the process of opening and locking the box. The arrangement enables the separation of the box cover 101 and the base plate 103 and the connection of the box cover 101 and the movable member 209 after the box cover 101 is opened, and the separation of the box cover 101 and the movable member 209 and the connection of the box cover 101 and the base plate 103 after the box cover 101 is closed, all of which can be realized by using the same power source, which is conducive to control, and the driving cost is low, thereby well solving the technical problems existing in the prior art.

[0043] Please continue to refer to Figure 3 and Figure 4 In this embodiment, the unlocking mechanism may include a rotating cam 201. Specifically, the rotating cam 201 is rotatably mounted on the fixing member 208. The rotating cam 201 has a first outer contour and a second outer contour. The curvature radius of the first outer contour is greater than the curvature radius of the second outer contour. The first outer contour cooperates with the second locking member 206 to move the second locking member 206 away from the box cover 101, so that the second locking member 206 moves to the separation position (see Figure 3 ), the second outer contour cooperates with the second locking member 206 to make the second locking member 206 close to the box cover 101, so that the second locking member 206 moves to the follow-up position; the second locking member 206 always has a tendency to move toward the follow-up position.

[0044] Please continue to refer to Figure 3When the SMIF box is in the locked box position, the rotating cam 201 maintains an abutment state with the second locking piece 206 through the first outer contour, the first locking piece is in the locked position, the box cover 101 and the substrate 103 are connected together to close the wafer accommodating cavity. At the same time, due to the large curvature radius of the first outer contour, the second locking piece 206 can be driven away from the box cover 101, so that the second locking piece 206 is in the separation position to release the restriction of the box cover 101 by the second locking piece 206. At this time, the SMIF box can be removed from the fixing piece 208.

[0045] When the box cover 101 needs to be opened, the rotating cam 201 can be rotated according to Figure 3 The viewing angle shown rotates counterclockwise to Figure 4 , so that the part of the rotating cam 201 used to cooperate with the second locking member 206 transitions from the first outer contour to the second outer contour; in the above process, the first locking member will switch from the locking position to the unlocking position, so that the box cover 101 and the substrate 103 are in a separated state. By setting the second locking member 206 to always have a tendency to move toward the follower position, when the rotating cam 201 rotates to the second outer contour toward the second locking member 206, due to the reduction in the radius of curvature of the outer contour of the rotating cam 201 used to cooperate with the second locking member 206, the second locking member 206 will move close to the box cover 101, connecting the box cover 101 and the movable member 209 together, so that the box cover 101 and the movable member 209 can move synchronously, so as to use the movable member 209 to drive the box cover 101 to move and open the SMIF box, thereby facilitating the subsequent wafer 104 transfer process.

[0046] Please continue to refer to Figure 4 After the wafer 104 is transferred, when the box cover 101 needs to be closed, the movable member 209 can be used to drive the box cover 101 to move to the position of the substrate 103 and place the box cover 101 on the substrate 103; then, the rotating cam 201 is rotated according to Figure 4 The viewing angle shown rotates clockwise to Figure 3 , so that the portion of the rotating cam 201 used to cooperate with the second locking member 206 transitions from the second outer contour to the first outer contour; since the curvature radius of the first outer contour is larger, the rotating cam 201 will push the second locking member 206 away from the box cover 101 during the above-mentioned rotational movement, thereby releasing the connection between the box cover 101 and the movable member 209; at the same time, the first locking member switches from the unlocking position to the locking position, connecting the box cover 101 and the substrate 103 together, so that the SMIF box can be removed from the fixing member 208 as a whole.

[0047] By arranging the rotating cam 201 in the unlocking mechanism, when the box cover 101 needs to be opened or closed, the rotating process of the rotating cam 201 can be utilized, thereby simplifying the opening process and closing process of the box cover 101.

[0048] In this embodiment, the SMIF box linkage opening and closing device may further include a rotary motor. Specifically, the housing of the rotary motor may be connected to the fixing member 208, and the motor shaft of the rotary motor may be fixedly connected to the rotary cam 201, so as to utilize the action of the rotary motor to drive the rotary cam 201. The counterclockwise rotation and clockwise rotation of the rotary cam 201 may be achieved by the forward or reverse rotation of the rotary motor. This arrangement can realize the automatic opening and closing of the box cover 101.

[0049] In other embodiments, the rotation drive of the rotating cam 201 may also be achieved manually or by other rotation drive members, which will not be elaborated in detail in this embodiment.

[0050] In this embodiment, the second locking member 206 may be connected to the movable member 209 via an elastic element, so that the second locking member 206 always has a tendency to move toward the follow-up position.

[0051] Please continue to refer to Figure 3 and Figure 4 In this embodiment, the unlocking mechanism may further include a push rod 205. Specifically, the push rod 205 is movably mounted on the fixing member 208, and the push rod 205 is located between the rotating cam 201 and the second locking member 206; one end of the push rod 205 is used to abut against the outer contour of the rotating cam 201, and the other end of the push rod 205 is used to abut against the second locking member 206; the push rod 205 always has a tendency to abut against the outer contour of the rotating cam 201.

[0052] By providing a push rod 205 in the unlocking mechanism, the push rod 205 is used to realize power transmission to the second locking member 206 during the rotation of the rotating cam 201 , which can effectively reduce the size of the rotating cam 201 and reduce the cost of the rotating cam 201 .

[0053] In the SMIF box linkage opening and closing device, during the rotation of the rotating cam 201, the entire rotation stroke of the rotating cam 201 realizes the opening and closing of the first lock. At the same time, when the rotating cam 201 rotates to cooperate with the push rod 205 through the second outer contour, the rotating cam 201 no longer generates a driving force on the push rod 205. That is to say, in this stage where the second outer contour of the rotating cam 201 cooperates with the push rod 205, the position of the push rod 205 remains unchanged, that is, the position of the second lock 206 remains unchanged, and is always in the follow-up position of connecting the box cover 101 to the movable part 209.

[0054] The above arrangement enables the SMIF box linkage opening and closing device to be compatible with first locks with different opening and closing angles. For example, when the first lock can be opened or closed by rotating the rotating cam 201 by 90° (the first lock is opened or closed during the process of rotating the rotating cam 201 by 90°), when the specification of the first lock is changed, such as when the rotating cam 201 needs to rotate 100° to open or close the first lock, the position of the push rod 205 remains unchanged when the rotating cam 201 rotates to the second outer contour to cooperate with the push rod 205. Therefore, even if the maximum rotation stroke of the rotating cam 201 changes to adapt to the opening or closing angle of the first lock, it will not affect the original locking position of the push rod 205, that is, it will not affect the position of the second lock 206. The second lock 206 remains at the original position when the box cover 101 is connected to the movable member 209, and the action of the second lock 206 will not be affected by the rotation angle of the rotating cam 201. It can be seen that the SMIF box linkage opening and closing device can adapt to first locks with different unlocking angles.

[0055] In this embodiment, the second outer contour is an arc shape. By setting the second outer contour to an arc shape, when the rotating cam 201 cooperates with the push rod 205 through the second outer contour, the position of the push rod 205 is more stable and does not fluctuate.

[0056] Please continue to refer to Figure 3 and Figure 4 In this embodiment, a cam follower 204 is provided at one end of the push rod 205 facing the rotating cam 201 . Specifically, the push rod 205 abuts against the rotating cam 201 through the cam follower 204 .

[0057] The arrangement of the cam follower 204 can reduce the friction force during the contact between the push rod 205 and the outer contour of the rotating cam 201 , thereby ensuring the smoothness of the rotating cam 201 during rotation.

[0058] Figure 7 This is a schematic cross-sectional view of the SMIF box linkage opening and closing device provided in this embodiment. Figure 7 As shown, the unlocking mechanism may further include a guide rail 210 , wherein the guide rail 210 is fixedly connected to the fixing member 208 , the push rod 205 is slidably disposed on the guide rail 210 , and the sliding direction of the push rod 205 is along the length direction of the push rod 205 .

[0059] The setting of the above-mentioned guide rail 210 can guide the push rod 205 during its movement, ensuring that the moving path of the push rod 205 is always along the direction of the rotating cam 201 to the second locking element 206. While ensuring the smoothness of the movement of the push rod 205, it can also improve the unlocking efficiency of the second locking element 206.

[0060] Please continue to refer to Figure 7 In this embodiment, the unlocking mechanism may further include a reset spring 212. Specifically, the push rod 205 includes an active section for abutting and cooperating with the outer contour of the rotating cam 201, and a driven section for abutting and cooperating with the second locking member 206, wherein the reset spring 212 fixedly connects the active section and the driven section, and the reset spring 212 is used to ensure that the push rod 205 always has a tendency to abut against the outer contour of the rotating cam 201.

[0061] By providing the return spring 212 , the push rod 205 always has a tendency to abut against the rotating cam 201 , so that the push rod 205 can be reliably driven during the rotation of the rotating cam 201 .

[0062] Specifically, the active section can be set as a hollow structure so that the driven section is inserted into the active section, and the return spring 212 is sleeved on the driven section so that one end of the return spring 212 is fixedly connected to the active section, and the other end of the return spring 212 is fixedly connected to the driven section. This setting can guide the return spring 212 during the expansion and contraction process of the return spring 212. On the one hand, it prevents the return spring 212 from bending and twisting. On the other hand, it also ensures the installation stability of the return spring 212 and prevents the return spring 212 from falling off the push rod 205.

[0063] In this embodiment, a high-strength plastic can be provided at the driven section of the push rod 205 for abutting and matching with the second locking member 206, and the high-strength plastic is used to achieve abutting and matching with the second locking member 206. This arrangement can reduce wear and tear, thereby reducing the pollution of the internal environment by particles generated due to wear and tear.

[0064] In other embodiments, a roller may be provided on the driven section of the push rod 205 for abutting and matching with the second locking element 206, and the roller is used to achieve abutting and matching with the second locking element 206. This arrangement can also achieve the effect of reducing wear.

[0065] Please continue to refer to Figure 3 and Figure 4 In this embodiment, a second locking member 206 is disposed at a group of opposite side walls of the box cover 101, and a push rod 205 is disposed between each second locking member 206 and the rotating cam 201; the rotating cam 201 has two first outer contours and two second outer contours, wherein the first outer contours and the second outer contours are alternately disposed.

[0066] Through the above arrangement, the number of connection points between the box cover 101 and the movable part 209 and the distribution area of ​​the connection points are increased, so that when the box cover 101 is connected with the movable part 209 through the second locking member 206, a group of opposite side walls of the box cover 101 are all limited by the connection, which ensures the stability of the box cover 101 when it moves with the movable part 209. At the same time, the reliability of the connection between the box cover 101 and the movable part 209 is also improved.

[0067] In this embodiment, the box cover 101 includes a cover body and a flange extending outward from the cover body, and the second locking element 206 includes a locking tongue; in the follow-up position of the second locking element 206, the locking tongue extends above the flange.

[0068] This cooperation between the box cover 101 and the second locking member 206 can not only realize reliable positioning of the box cover 101 and prevent the box cover 101 from falling off during the movement of the movable member 209, but also has a simple structure.

[0069] In other embodiments, a slot may be provided on the outer surface of the box cover 101 , so that when the second locking member 206 is in the follow-up position, the locking tongue is inserted into the slot to achieve connection between the box cover 101 and the movable member 209 .

[0070] Please continue to refer to Figures 2 to 4 In this embodiment, the second locking member 206 includes two locking tongues that move synchronously, and the two locking tongues are arranged at intervals along the edge of the cover body.

[0071] This arrangement can increase the number of connection points between the second locking member 206 and the corresponding edges of the box cover 101 , and has a certain turning limit effect on the box cover 101 , thereby preventing the box cover 101 from turning over.

[0072] In this embodiment, a connecting rod may be provided in the second locking member 206 to fix the two locking tongues together, and the second locking member 206 may be driven to move closer to or away from the box cover 101 by the abutment between the push rod 205 and the connecting rod.

[0073] In other embodiments, multiple branch segments may be provided on the driven segment of the push rod 205 for abutting and cooperating with the second locking member 206, and the multiple branch segments are used to abut against the connecting rod of the second locking member 206. This arrangement can increase the number of points of action of the push rod 205 on the second locking member 206 to ensure the smooth movement of the second locking member 206.

[0074] In other embodiments, the number of locking tongues in the second locking member 206 may also be three or four, that is, three or four locking tongues are arranged on the same edge of the box cover 101 .

[0075] Please continue to refer to Figures 2 to 4In this embodiment, the rotating cam 201 is fixedly provided with a box opening pin 202, wherein the box opening pin 202 is used to cooperate with the first locking element to switch the first locking element between a locked position and an unlocked position.

[0076] The arrangement of the box opening pin 202 facilitates the driving of the first locking element by the rotating cam 201, thereby realizing reliable switching of the first locking element between the locked position and the unlocked position.

[0077] It should be noted that, in this embodiment, the driving of the first locking element by the box opening pin 202 can refer to the fork mechanism of the prior art, and the connection structure between the box cover 101 and the base plate 103 is also the prior art in this field.

[0078] In this embodiment, the rotating cam 201 is located below the fixing member 208 . The fixing member 208 is provided with an arc-shaped guide groove 203 . The box opening pin 202 passes through the arc-shaped guide groove 203 and cooperates with the first locking member.

[0079] By arranging the rotating cam 201 below the fixing member 208, the flatness of the bearing surface of the fixing member 208 can be ensured, so that the SMIF box will not shake after being placed on the fixing member 208. By providing an arc-shaped guide groove 203 on the fixing member 208 so that the box opening pin 202 passes through the arc-shaped guide groove 203 and cooperates with the first locking member, the arc-shaped guide groove 203 can play a certain guiding role in the movement process of the box opening pin 202, thereby ensuring the smoothness of the rotating cam 201 to rotate to open and close the box cover 101.

[0080] In addition, the provision of the arc-shaped guide groove 203 also plays a certain role in limiting the rotational travel of the rotating cam 201, thereby realizing the limitation of the clockwise and counterclockwise rotation processes of the rotating cam 201, and ensuring that the rotating cam 201 does not rotate excessively when the rotating cam 201 rotates to open or close the first locking element.

[0081] Please continue to refer to Figure 2 In this embodiment, the SMIF box linkage opening and closing device may further include an in-place sensor 207 , which is mounted on the movable member 209 and is used to detect the position of the second locking member 206 .

[0082] During the opening process of the box cover 101, when the in-position sensor 207 detects that the second locking member 206 is in the follow-up position, a corresponding detection signal can be sent to the controller of the SMIF box loading device, so that the controller can control the movement of the movable member 209. This setting can avoid the situation where the box cover 101 does not move at the same time due to the movement of the movable member 209 caused by the second locking member 206 not switching to the follow-up position, thereby reducing the risk of misoperation and ensuring the reliability of the SMIF box linkage opening and closing device.

[0083] In this embodiment, a detection port can be provided in the movable member 209, so that the lower end of the second lock member 206 extends downward from the detection port, and the in-position sensor 207 is installed on the lower surface of the movable member 209 to detect the lower end of the second lock member 206. When the in-position sensor 207 detects the second lock member 206, it indicates that the second lock member 206 is in a separation position away from the box cover 101; when the in-position sensor 207 does not detect the second lock member 206, it indicates that the second lock member 206 is in a follow-up position close to the box cover 101.

[0084] The above-mentioned position arrangement of the in-place sensor 207 can reduce the occupation of the space above the movable member 209 and will not interfere with the movement of the SMIF box.

[0085] Please continue to refer to Figures 2 to 4 In this embodiment, the movable member 209 has a middle opening, and the movable member 209 is arranged around the fixed member 208 through the middle opening; the movable member 209 is used to connect with the lifting drive device.

[0086] After the second locking member 206 is switched from the separation position to the follow-up position, the lifting drive device is activated to drive the movable member 209 to rise, thereby driving the box cover 101 to rise synchronously, completing the purpose of opening the box cover 101, thereby exposing the wafer 104 in the wafer accommodating cavity, so as to realize the conveying process of the wafer 104; after completing the conveying of the wafer 104, the lifting drive device is activated to drive the movable member 209 to descend, thereby driving the box cover 101 to descend synchronously, thereby placing the box cover 101 on the substrate 103.

[0087] The above arrangement can not only ensure that the box cover 101 will not collide with the wafer 104 inside during opening and closing, but also, by arranging the movable part 209 to have a middle opening, it can also improve the structural strength of the movable part 209 and reduce the deformation of the movable part 209.

[0088] Please continue to refer to Figure 1 In this embodiment, the SMIF box may further include a wafer basket 102 . Specifically, the wafer basket 102 is disposed on the substrate 103 , and the wafer basket 102 is used to carry the wafer 104 .

[0089] By arranging the wafer basket 102 in the SMIF box, reliable carrying of multiple wafers 104 can be achieved.

[0090] Figure 5 A schematic diagram of the structure of the SMIF box loading device provided in this embodiment when the box cover 101 of the SMIF box is closed; Figure 6 The schematic diagram of the structure of the SMIF box loading device provided in this embodiment when the box cover 101 of the SMIF box is opened. Figure 5 and Figure 6As shown, this embodiment also provides a SMIF box loading device, including a supporting frame 301, a lifting drive device (not shown in the figure) and the above-mentioned SMIF box linkage opening and closing device, wherein the lifting drive device is installed on the supporting frame 301 and is driven and connected to the movable part 209; the fixed part 208 is fixedly connected to the supporting frame 301.

[0091] By arranging the above-mentioned SMIF box linkage opening and closing device in the SMIF box loading device, accordingly, the SMIF box loading device has all the advantages of the above-mentioned SMIF box linkage opening and closing device, which will not be described one by one here.

[0092] Please continue to refer to Figure 5 and Figure 6 The carrying frame 301 is provided with a wafer transfer port 302. When the wafer 104 needs to be transferred, the first locking member is in the unlocking position and the second locking member 206 is in the following position by rotating the rotating cam 201. At this time, the box cover 101 and the substrate 103 are in a separated state, and the box cover 101 and the movable member 209 are in a connected state. Under the action of the lifting drive device, the box cover 101 can be driven to rise to Figure 6 The wafer basket 102 is exposed and faces the wafer transfer port 302, so that the wafer 104 can be transferred through the wafer transfer port 302. After the wafer 104 is transferred, the lifting drive device drives the box cover 101 to descend to Figure 5 In the position shown, the box cover 101 is placed on the substrate 103, and the reverse rotation of the rotating cam 201 is used to make the first locking element in the locked position and the second locking element 206 in the separated position. At this time, the box cover 101 and the substrate 103 are in a connected state, and the box cover 101 and the movable element 209 are in a separated state, and the SMIF box can be taken out from the film transfer port 302 as a whole.

[0093] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.

[0094] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprises" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprises a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0095] In the above embodiments, the descriptions of directions such as “upper”, “lower”, “inner”, “outer”, and “side” are all based on the drawings.

[0096] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A SMIF box linkage opening and closing device, the SMIF box comprising a base plate (103) and a box cover (101) covered on the base plate (103), a wafer accommodating cavity being formed between the box cover (101) and the base plate (103), a first locking member being arranged between the box cover (101) and the base plate (103), the first locking member having a locking position for connecting the box cover (101) and the base plate (103) and an unlocking position for releasing the connection state between the box cover (101) and the base plate (103); characterized in that: The SMIF box linkage opening and closing device comprises a fixed part (208), a movable part (209), an unlocking mechanism and a second locking part (206); The fixing member (208) is used to support the substrate (103), the unlocking mechanism is installed on the fixing member (208), the second locking member (206) is movably installed on the movable member (209), and the second locking member (206) has a follow-up position connecting the box cover (101) and the movable member (209) and a separation position releasing the connection between the box cover (101) and the movable member (209); the unlocking mechanism is transmission-connected to both the first locking member and the second locking member (206), and is used to drive the first locking member to move to the unlocking position and simultaneously link the second locking member (206) to move to the follow-up position, and drive the first locking member to move to the locking position and simultaneously link the second locking member (206) to move to the separation position.

2. The SMIF box linkage opening and closing device according to claim 1, characterized in that: The unlocking mechanism comprises a rotating cam (201), wherein the rotating cam (201) is rotatably mounted on the fixing member (208), and the rotating cam (201) has a first outer contour and a second outer contour, wherein the curvature radius of the first outer contour is greater than the curvature radius of the second outer contour, wherein the first outer contour cooperates with the second locking member (206) to move the second locking member (206) away from the box cover (101) so that the second locking member (206) moves to the separation position, and the second outer contour cooperates with the second locking member (206) to move the second locking member (206) close to the box cover (101) so that the second locking member (206) moves to the follow-up position; The second locking element (206) always has a tendency to move toward the following position.

3. The SMIF box linkage opening and closing device according to claim 2, characterized in that: The unlocking mechanism further comprises a push rod (205), wherein the push rod (205) is movably mounted on the fixing member (208), and the push rod (205) is located between the rotating cam (201) and the second locking member (206); one end of the push rod (205) is used for abutting and cooperating with the outer contour of the rotating cam (201), and the other end of the push rod (205) is used for abutting and cooperating with the second locking member (206); the push rod (205) always has a tendency to abut against the outer contour of the rotating cam (201).

4. The SMIF box linkage opening and closing device according to claim 2, characterized in that: The second outer contour is in an arc shape.

5. The SMIF box linkage opening and closing device according to claim 3, characterized in that: The second locking members (206) are arranged at positions of a group of opposite side walls of the box cover (101), and the push rod (205) is arranged between each of the second locking members (206) and the rotating cam (201); the rotating cam (201) has two first outer contours and two second outer contours, and the first outer contours and the second outer contours are arranged alternately; and / or, a cam follower (204) is arranged at one end of the push rod (205) facing the rotating cam (201), and the push rod (205) abuts against the rotating cam (201) through the cam follower (204); and / or, the unlocking mechanism further includes a guide rail (210), and the guide rail ( 210) is fixedly connected to the fixing member (208), the push rod (205) is slidably arranged on the guide rail (210), and the sliding direction of the push rod (205) is along the length direction of the push rod (205); and / or the unlocking mechanism also includes a reset spring (212), the push rod (205) includes an active section for abutting and cooperating with the outer contour of the rotating cam (201), and a driven section for abutting and cooperating with the second locking member (206), the reset spring (212) is fixedly connected to the active section and the driven section, and the reset spring (212) is used to make the push rod (205) always have a tendency to abut against the outer contour of the rotating cam (201).

6. The SMIF box linkage opening and closing device according to claim 2, characterized in that: The box cover (101) comprises a cover body and a flange extending outward from the cover body, and the second locking element (206) comprises a locking tongue; in the follow-up position of the second locking element (206), the locking tongue extends above the flange.

7. The SMIF box linkage opening and closing device according to claim 6, characterized in that: The second locking element (206) comprises a plurality of locking tongues that move synchronously, and the plurality of locking tongues are arranged at intervals along the edge of the cover body.

8. The SMIF box linkage opening and closing device according to claim 2, characterized in that: The rotating cam (201) is fixedly provided with a box opening pin (202), and the box opening pin (202) is used to cooperate with the first locking element so that the first locking element switches between the locking position and the unlocking position; the rotating cam (201) is located below the fixing element (208), and the fixing element (208) is provided with an arc-shaped guiding groove (203), and the box opening pin (202) passes through the arc-shaped guiding groove (203) to cooperate with the first locking element.

9. The SMIF box linkage opening and closing device according to claim 1, characterized in that: The SMIF box linkage opening and closing device further comprises an in-position sensor (207), the in-position sensor (207) is installed on the movable part (209), and the in-position sensor (207) is used to detect the position of the second locking part (206); and / or, the movable part (209) has a middle opening, and the movable part (209) is arranged around the fixed part (208) through the middle opening; the movable part (209) is used to be connected to the lifting drive device; and / or, the SMIF box further comprises a wafer basket (102), the wafer basket (102) is arranged on the substrate (103), and the wafer basket (102) is used to carry wafers (104).

10. A SMIF box loading device, characterized in that: It comprises a supporting frame (301), a lifting drive device and a SMIF box linkage opening and closing device as described in any one of claims 1 to 9, wherein the lifting drive device is installed on the supporting frame (301) and is drivingly connected to the movable part (209); and the fixed part (208) is fixedly connected to the supporting frame (301).

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