SMIF box loading equipment

Abstract

The utility model provides SMIF box loading equipment, relates to the technical field of semiconductor equipment, and is designed for solving the problem that the posture of a port door cannot meet the high-precision loading requirement of an SMIF box due to the existing SMIF box loading equipment. The SMIF box loading equipment comprises a bearing device, a lifting device and an opening and closing device, the bearing device comprises a back plate, a port door fixedly connected to the back plate and an adjusting assembly used for adjusting the pitching angle and the left-right deflection angle of the back plate 101, and the port door is used for bearing an SMIF box; the lifting device comprises a supporting frame and a detection assembly arranged on the supporting frame, the supporting frame is arranged on the back plate in a lifting mode, and the detection assembly is used for detecting wafer state parameters of the wafer containing cavity when the supporting frame ascends; the opening and closing device is used for separating the box cover from the base plate and connecting the box cover with the supporting frame in a linkage mode and enabling the box cover to be connected with the base plate and separating the box cover from the supporting frame in a linkage mode. By adjusting the posture of the back plate, the port door can meet the high-precision loading requirement of the SMIF box.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a SMIF box loading device. Background Art

[0002] In the semiconductor manufacturing process, wafer transfer is crucial to IC (Integrated Circuit) manufacturing. In order to ensure the quality of wafers when they are transferred between different processes and to prevent the wafers from being contaminated by dust or other pollutants, SMIF (Standard Mechanical Interface) boxes are often used for wafer transfer. They can significantly reduce the dust particles flowing through the wafers, thereby reducing the contamination of the wafers by dust particles, ensuring that the gas around the wafers remains stationary relative to the wafers during wafer transfer, storage, and most processes, and that dust particles in the external environment do not enter the wafer environment.

[0003] However, the existing SMIF box loading equipment is greatly affected by the flatness of the ground, resulting in the posture of the port door being unable to meet the high-precision loading requirements of the SMIF box. Utility Model Content

[0004] The utility model aims to provide a SMIF box loading device to solve the technical problem that the existing SMIF box loading device is greatly affected by the flatness of the ground, resulting in the posture of the port door being unable to meet the high-precision loading requirements of the SMIF box.

[0005] The utility model provides a SMIF box loading device, which comprises a bearing device, a lifting device and an opening and closing device.

[0006] The carrying device includes a back plate, a port door and an adjustment component, wherein the port door is fixedly connected to the back plate, and the port door is used to carry a SMIF box, wherein the SMIF box includes a base plate and a box cover covered on the base plate, and a wafer accommodating cavity is formed between the box cover and the base plate; the adjustment component is used to adjust the pitch angle and left and right deflection angle of the back plate.

[0007] The lifting device includes a support frame and a detection component arranged on the support frame. The support frame can be lifted and lowered on the back plate. The detection component is used to detect the wafer state parameters of the wafer accommodating cavity when the support frame rises.

[0008] The opening and closing device is used to separate the box cover from the base plate and link the box cover to the support frame, and to connect the box cover to the base plate and link the box cover to separate from the support frame.

[0009] Furthermore, the adjustment component includes a pitch adjustment structure, a base and a deflection adjustment structure, wherein the pitch adjustment structure is installed in the upper area of ​​the back plate, and the pitch adjustment structure is used to adjust the pitch angle of the back plate; the base is located at the bottom of the back plate, and the deflection adjustment structure connects the base and the back plate, and the deflection adjustment structure is used to adjust the left and right deflection angles of the back plate.

[0010] Furthermore, the pitch adjustment structure comprises an adjustment block with an adjustable extension length, and the extension direction of the adjustment block is perpendicular to the back plate.

[0011] Furthermore, the deflection adjustment structure is provided with multiple groups, and the multiple groups of deflection adjustment structures are arranged at intervals along the left and right directions; the deflection adjustment structure includes a first adjustment pad, a second adjustment pad and an adjustment screw, the first adjustment pad connects the back plate and the base, and the first adjustment pad allows an adjustment margin between the back plate and the base along the lifting direction; the second adjustment pad is fixedly connected to the base, the adjustment screw is threadedly connected to the second adjustment pad, and the free end of the adjustment screw abuts against the first adjustment pad.

[0012] Furthermore, the deflection adjustment structure also includes a first adjustment bracket and a second adjustment bracket, the first adjustment bracket is fixedly arranged on the base, and the second adjustment bracket is fixedly arranged on the back plate, wherein the first adjustment bracket is provided with a V-shaped groove, and the second adjustment bracket is provided with an arc surface, and the arc surface cooperates with the V-shaped groove.

[0013] Furthermore, the detection component includes a Mapping component, a flying wafer detection component and an in-situ detection sensor, wherein the Mapping component is used to detect the number and position of wafers; the flying wafer detection component is used to detect the flying wafer status of wafers; and the in-situ detection sensor is used to detect the in-situ status of the wafer basket of the wafer accommodating cavity.

[0014] Furthermore, the support frame is of a frame structure, the Mapping component and the flying chip detection component are both located at the top of the support frame, and the in-situ detection sensor is located in the middle of the support frame along the lifting direction.

[0015] Furthermore, the Mapping component is located on opposite side walls of the support frame along the front-to-back direction, and the flying chip detection component is located on opposite side walls of the support frame along the left-to-right direction.

[0016] Furthermore, the lifting device also includes a lifting drive module, which is installed on the back plate, and the output end of the lifting drive module is connected to the support frame for driving the support frame to lift and lower; and / or, a linear slide rail is fixedly provided on a side of the back plate facing the port door, and the linear slide rail extends along the lifting direction of the support frame, and the support frame is fixedly provided with a slider that slides with the linear slide rail.

[0017] Furthermore, the SMIF box loading device also includes an exterior component, which is connected to the back panel to form a component installation cavity; and / or, the SMIF box loading device also includes a walking component, which is located at the bottom of the carrying device; and / or, the back panel is provided with a film transmission port, which is higher than the port door.

[0018] Furthermore, a first lock is arranged between the box cover and the base plate, and the opening and closing device includes a rotating cam and a second lock, the rotating cam is rotatably mounted on the port door, and the second lock is movably mounted on the support frame; the rotating cam has a first outer contour and a second outer contour, and the curvature radius of the first outer contour is greater than the curvature radius of the second outer contour, wherein the rotating cam is used to rotate around a first direction to open the first lock, and cooperate with the second lock through the second outer contour to make the second lock approach and connect to the box cover, and rotate around a second direction to close the first lock, and cooperate with the second lock through the first outer contour to make the second lock move away from and release the box cover; the second lock always has a movement tendency to approach the box cover.

[0019] Furthermore, the opening and closing device also includes a push rod, which is movably mounted on the port door and is located between the rotating cam and the second locking element; one end of the push rod is used to abut and cooperate with the outer contour of the rotating cam, and the other end of the push rod is used to abut and cooperate with the second locking element; the push rod always has a tendency to abut against the outer contour of the rotating cam.

[0020] The beneficial effects brought by the SMIF box loading device of the utility model are:

[0021] By setting a SMIF box loading device mainly composed of a bearing device, a lifting device and an opening and closing device, when the SMIF box loading device is placed on the equipment installation surface (such as the ground), the pitch angle and the left and right deflection angle of the back plate can be adjusted by using an adjustment component to make the port door in a horizontal posture. When the wafer is being transferred, the wafer is located in the SMIF box, in a wafer accommodating cavity formed by the docking of the box cover and the substrate. When the wafer is being transferred, under the action of the opening and closing device, the box cover is separated from the substrate and the linkage box cover is connected to the support frame, so that the box cover can follow the support frame to rise on the back plate of the bearing device, so that the wafer accommodating cavity is exposed. Among them, during the process of the support frame rising, the detection component arranged on the support frame detects the wafer state parameters of the wafer accommodating cavity to obtain the wafer information of the wafer accommodating cavity, so that the wafer handling work in the subsequent semiconductor production process can be smoothly carried out and the wafer transmission purpose can be achieved. After the wafer is transferred, the support frame drives the box cover to descend and place the box cover on the substrate. The opening and closing device connects the box cover to the substrate and separates the box cover from the support frame again, so that the SMIF box can be taken away as a whole.

[0022] The SMIF box loading device can adjust the posture of the port door by setting an adjustment component, meeting the high-precision loading requirements of the SMIF box, thereby ensuring the stability and reliability of the SMIF box. In addition, the SMIF box loading device can automatically detect the wafer state parameters of the wafer accommodating cavity when the support frame rises, so that the operator can obtain the information of the wafer in the closed space in time, which is convenient for the smooth progress of the subsequent production process. In addition, the setting form of the opening and closing device enables the separation of the box cover and the substrate, and the connection of the box cover and the support frame after the box cover is opened, and the separation of the box cover and the support frame after the box cover is closed, and the connection of the box cover and the substrate, all of which can be achieved using the same power source, which is conducive to control and has a low driving cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0024] Figure 1 One of the structural schematic diagrams of the SMIF box loading device provided by the embodiment of the utility model when the box cover of the SMIF box is closed;

[0025] Figure 2 The second structural schematic diagram of the SMIF box loading device provided by the embodiment of the utility model when the box cover of the SMIF box is closed;

[0026] Figure 3 A schematic diagram of the structure of the SMIF box loading device provided by the embodiment of the utility model when the box cover of the SMIF box is opened;

[0027] Figure 4 A front view of a carrying device of a SMIF box loading device provided by an embodiment of the utility model;

[0028] Figure 5 A schematic diagram of the structure of a SMIF box of a SMIF box loading device provided by an embodiment of the utility model;

[0029] Figure 6 A schematic diagram of the partial structure of a SMIF box loading device provided by an embodiment of the utility model;

[0030] Figure 7 A schematic diagram of the relative position relationship between the opening and closing device of the SMIF loading device and the SMIF box provided in an embodiment of the utility model;

[0031] Figure 8 One of the installation schematic diagrams of the opening and closing device of the SMIF box loading device provided by the embodiment of the utility model;

[0032] Fig. 9 The second installation diagram of the opening and closing device of the SMIF box loading device provided by the embodiment of the utility model;

[0033] Fig.10 A schematic diagram of the structure of the opening and closing device of the SMIF box loading device provided by the embodiment of the utility model, in which the first locking element is in the locking position and the second locking element is in the separation position;

[0034] Fig.11 A schematic diagram of the structure of the opening and closing device of the SMIF box loading device provided by the embodiment of the utility model, in which the first locking element is in the unlocking position and the second locking element is in the following position;

[0035] Fig.12 A schematic diagram of the partial structure of a carrying device of a SMIF box loading device provided in an embodiment of the utility model.

[0036] Description of reference numerals:

[0037] 1-carrying device; 2-opening and closing device; 3-lifting device; 4-exterior decoration component; 5-SMIF box;

[0038] 101-back plate; 102-pitch adjustment structure; 103-first adjustment pad; 104-second adjustment pad; 105-linear slide rail; 106-port door; 107-film transmission port; 108-first adjustment bracket; 109-second adjustment bracket; 110-adjustment screw; 111-base;

[0039] 201-rotating cam; 202-box opening pin; 203-arc guide groove; 204-cam follower; 205-push rod; 206-second locking element;

[0040] 301-support frame; 302-lifting drive module; 303-mapping component; 304-flying piece detection component; 305-in-place detection sensor;

[0041] 401-upper trim; 402-middle trim; 403-lower trim; 404-mobile support; 405-travel assembly;

[0042] 501-box cover; 502-wafer basket; 503-substrate. DETAILED DESCRIPTION

[0043] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific embodiments of the utility model are described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0044] Figure 1 One of the structural schematic diagrams of the SMIF box loading device provided in this embodiment when the box cover 501 of the SMIF box 5 is closed; Figure 2 The second structural schematic diagram of the SMIF box loading device provided in this embodiment when the box cover 501 of the SMIF box 5 is closed; Figure 3 The schematic diagram of the structure of the SMIF box loading device provided in this embodiment when the box cover 501 of the SMIF box 5 is opened. Figures 1 to 3 As shown, this embodiment provides a SMIF box loading device, including a carrying device 1, a lifting device 3 and an opening and closing device 2.

[0045] Figure 4 This is a front view of the carrying device 1 of the SMIF box loading device provided in this embodiment. Figure 4 As shown, the carrying device 1 includes a back plate 101 , a port door 106 and an adjustment component. Specifically, the port door 106 is used to carry the SMIF box 5 ; the adjustment component is used to adjust the pitch angle and left and right deflection angle of the back plate 101 . Figure 5 The schematic diagram of the structure of the SMIF box 5 of the SMIF box loading device provided by this embodiment is shown. Figure 5 As shown, the SMIF box 5 includes a substrate 503 and a box cover 501 covering the substrate 503 , and a wafer accommodating cavity is formed between the box cover 501 and the substrate 503 , and a wafer basket 502 can be placed in the wafer accommodating cavity.

[0046] Figure 6A schematic diagram of the partial structure of the SMIF box loading device provided in this embodiment. Figure 6 As shown, the lifting device 3 includes a support frame 301 and a detection component arranged on the support frame 301. The support frame 301 can be lifted and lowered on the back plate 101. The detection component is used to detect the wafer state parameters of the wafer accommodating cavity when the support frame 301 rises.

[0047] Figure 7 A schematic diagram of the relative position relationship between the opening and closing device 2 and the SMIF box 5 of the SMIF loading device provided in this embodiment; Figure 8 One of the installation schematic diagrams of the opening and closing device 2 of the SMIF box loading device provided in this embodiment; Fig. 9 The second installation diagram of the opening and closing device 2 of the SMIF box loading device provided in this embodiment. Figures 7 to 9 As shown, the opening and closing device 2 is used to separate the box cover 501 from the base plate 503 and link the box cover 501 to the support frame 301, and to connect the box cover 501 to the base plate 503 and link the box cover 501 to the support frame 301.

[0048] When the SMIF box loading device is placed on the equipment installation surface (such as the ground), the pitch angle and the left and right deflection angle of the back plate 101 can be adjusted by using the adjustment component to make the port door 106 in a horizontal posture. When the wafer is transferred, the wafer is located in the SMIF box 5, in the wafer accommodating cavity formed by the docking of the box cover 501 and the substrate 503. When the wafer is transferred, under the action of the opening and closing device 2, the box cover 501 is separated from the substrate 503 and the linkage box cover 501 is connected to the support frame 301, so that the box cover 501 can follow the support frame 301 to rise on the back plate 101 of the carrier device 1, so that the wafer accommodating cavity is exposed. Among them, during the rise of the support frame 301, the detection component arranged on the support frame 301 detects the wafer state parameters of the wafer accommodating cavity to obtain the wafer information of the wafer accommodating cavity, so as to smoothly carry out the wafer handling work in the subsequent production process of the semiconductor and achieve the purpose of wafer transmission. After completing the transfer of the wafer, the support frame 301 drives the box cover 501 to descend, and places the box cover 501 on the substrate 503, and again under the action of the opening and closing device 2, the box cover 501 is connected to the substrate 503 and the linkage box cover 501 is separated from the support frame 301, so that the SMIF box 5 can be taken away as a whole.

[0049] The SMIF box loading device can adjust the posture of the port door 106 by setting an adjustment component, meeting the high-precision loading requirements of the SMIF box 5, thereby ensuring the stability and reliability of the SMIF box 5. In addition, the SMIF box loading device can automatically detect the wafer state parameters of the wafer accommodating cavity when the support frame 301 rises, so that the operator can timely obtain the information of the wafer in the closed space, which is convenient for the smooth progress of the subsequent production process. In addition, the setting form of the opening and closing device 2 enables the separation of the box cover 501 and the substrate 503 and the connection of the box cover 501 and the support frame 301 after the box cover 501 is opened, and the separation of the box cover 501 and the support frame 301 and the connection of the box cover 501 and the substrate 503 after the box cover 501 is closed, all of which can be achieved by using the same power source, which is conducive to control and has a low driving cost.

[0050] Please continue to refer to Figure 6 In this embodiment, the detection component may include a Mapping (through-beam type - wafer scanning and position sensor) component 303, a flying chip detection component 304 and an in-situ detection sensor 305, wherein the Mapping component 303 is used to detect the number and position of wafers; the flying chip detection component 304 is used to detect the flying chip status of the wafer; and the in-situ detection sensor 305 is used to detect the in-situ status of the wafer basket 502 of the wafer accommodating cavity.

[0051] During the operation of the SMIF box loading device, when it is necessary to transfer wafers, the support frame 301 drives the box cover 501 to rise, exposing the wafer basket 502 inside the SMIF box 5. During the rising process of the support frame 301, the Mapping component 303 rises synchronously, scans the wafers in the wafer basket 502, and identifies the quantity and position information of the wafers, wherein the quantity information of the wafers may include the number and layer of the wafers, and the position information of the wafers may include whether the wafers are stacked or tilted, etc. At the same time, the flying chip detection component 304 and the in-situ detection sensor 305 arranged on the support frame 301 will also rise synchronously, and the flying chip detection component 304 detects whether there is a wafer edge protruding on the front side of the wafer basket 502, and the in-situ detection sensor 305 detects whether there is a wafer basket 502 in the SMIF box 5, so as to indirectly obtain the relevant information of the wafer.

[0052] The above-mentioned setting of the detection component can realize the detection of various state parameters of the wafer, thereby facilitating the smooth progress of the subsequent production process and ensuring the reliability of wafer transmission.

[0053] Please continue to refer to Figure 6 In this embodiment, the support frame 301 is a frame structure, the Mapping component 303 and the flying piece detection component 304 are both located at the top of the support frame 301, and the in-position detection sensor 305 is located in the middle of the support frame 301 along the lifting direction.

[0054] By arranging the Mapping component 303 and the flying wafer detection component 304 at the top of the support frame 301, the wafers inside the SMIF box 5 can be detected when the support frame 301 starts to rise, ensuring the comprehensiveness of the detection area, thereby improving the accuracy of the detection of wafer status parameters. By arranging the in-position detection sensor 305 in the middle of the support frame 301 along the lifting direction, it is possible to avoid the situation where the wafer basket 502 cannot be detected due to the in-position detection sensor 305 being too high or too low, thereby improving the accuracy of the in-position detection of the wafer basket 502.

[0055] Please continue to refer to Figure 6 In this embodiment, the Mapping component 303 is located on the side walls of the support frame 301 opposite to each other along the front-to-back direction, and the flying chip detection component 304 is located on the side walls of the support frame 301 opposite to each other along the left-to-right direction.

[0056] By arranging the Mapping component 303 and the flying chip detection component 304 at the above positions, not only the accuracy of the wafer-related parameter detection can be ensured, but also interference between the Mapping component 303 and the flying chip detection component 304 during the installation process can be avoided.

[0057] Please continue to refer to Figure 4 In this embodiment, the adjustment component may include a pitch adjustment structure 102, a base 111 and a deflection adjustment structure. Specifically, the pitch adjustment structure 102 is installed in the upper area of ​​the back plate 101, and the pitch adjustment structure 102 is used to adjust the pitch angle of the back plate 101; the base 111 is located at the bottom of the back plate 101, and the deflection adjustment structure connects the base 111 and the back plate 101, and the deflection adjustment structure is used to adjust the left and right deflection angles of the back plate 101.

[0058] When the SMIF box loading device is in use, the back plate 101 can be locked on the EFEM (Equipment Front End Module) device, and the pitch adjustment structure 102 is used to adjust the pitch angle of the back plate 101, and the deflection adjustment structure is used to adjust the deflection angle of the back plate 101 relative to the base in the left and right directions, so as to achieve the purpose of adjusting the left and right deflection angle of the back plate 101. Through the above adjustment, the port door 106 fixedly connected to the back plate 101 can maintain a horizontal posture, thereby ensuring the stability and reliability of the SMIF box 5.

[0059] In this embodiment, the “left-right deflection angle” is Figure 4 The deflection angle along the left and right direction under the viewing angle.

[0060] Please continue to refer to Figure 4In this embodiment, the pitch adjustment structure 102 includes an adjustment block with an adjustable extension length, wherein the extension direction of the adjustment block is perpendicular to the back plate 101 .

[0061] After the back plate 101 is locked to the EFEM device, the pitch adjustment structure 102 is supported on the EFEM device. By changing the extension length of the pitch adjustment structure 102, the pitch angle of the back plate 101 can be adjusted.

[0062] It should be noted that, in this embodiment, the adjustment block can adjust the extension length by means of a screw transmission.

[0063] Fig.12 This is a partial structural diagram of the carrying device of the SMIF box loading device provided in this embodiment. Please continue to refer to Figure 4 , and combined with Fig.12 In this embodiment, a plurality of deflection adjustment structures are provided, and the plurality of deflection adjustment structures are arranged at intervals along the left-right direction; the deflection adjustment structure may include a first adjustment pad 103, a second adjustment pad 104 and an adjustment screw 110, wherein the first adjustment pad 103 connects the back plate 101 and the base 111, and the first adjustment pad 103 allows an adjustment margin between the back plate 101 and the base 111 along the lifting direction; the second adjustment pad 104 is fixedly arranged on the base, the adjustment screw 110 is threadedly connected to the second adjustment pad 104, and the free end of the adjustment screw 110 abuts against the first adjustment pad 103. By changing the extension amount of the adjustment screw 110, the first adjustment pad 103 is driven to rise and fall, thereby achieving the purpose of adjusting the left-right deflection angle of the back plate 101.

[0064] Please continue to refer to Fig.12 In this embodiment, the first adjustment pad 103 is provided with a strip hole extending in the lifting direction, and the base 111 is fixedly provided with a limit screw, which is passed through the strip hole provided in the first adjustment pad 103. This arrangement can limit the back plate 101 in the front-to-back direction. At the same time, after the left-right deflection angle of the back plate 101 is adjusted, the limit screw can be tightened to fix the position of the back plate 101 relative to the base 111.

[0065] The “front-back direction” is Fig.12 In the direction perpendicular to the paper surface.

[0066] Please continue to refer to Fig.12 In this embodiment, the deflection adjustment structure may further include a first adjustment bracket 108 and a second adjustment bracket 109. Specifically, the first adjustment bracket 108 is fixedly disposed on the base 111, and the second adjustment bracket 109 is fixedly disposed on the back plate 101, wherein the first adjustment bracket 108 is provided with a V-shaped groove, and the second adjustment bracket 109 is provided with an arc surface, and the arc surface cooperates with the V-shaped groove.

[0067] By providing the first adjustment bracket 108 and the second adjustment bracket 109 in the deflection adjustment structure, the cooperation of the first adjustment bracket 108 and the second adjustment bracket 109 can be utilized to support the back plate 101 to ensure the stability of the back plate 101 .

[0068] Please continue to refer to Figure 6 In this embodiment, the lifting device 3 may further include a lifting drive module 302. Specifically, the lifting drive module 302 is installed on the back plate 101. The output end of the lifting drive module 302 is connected to the support frame 301 for driving the support frame 301 to lift.

[0069] By providing the lifting drive module 302, the support frame 301 can be automatically lifted and lowered, thereby ensuring the automation of wafer transmission.

[0070] In this embodiment, the lifting drive module 302 may be a screw lifting module.

[0071] Please continue to refer to Figure 4 In this embodiment, a linear slide rail 105 is fixedly provided on one side of the back plate 101 facing the port door 106 , wherein the linear slide rail 105 extends along the lifting direction of the support frame 301 , and the support frame 301 is fixedly provided with a slider that slidably cooperates with the linear slide rail 105 .

[0072] The coordinated arrangement of the above-mentioned slider and the linear guide rail 105 can play a certain guiding role in the lifting process of the support frame 301, thereby ensuring the smoothness of the support frame 301 during the lifting process.

[0073] Please continue to refer to Figure 1 In this embodiment, the SMIF box loading device may further include an exterior decoration component 4, wherein the exterior decoration component 4 is connected to the back plate 101 to form a component installation cavity.

[0074] The setting of the exterior component 4 can separate the internal components of the SMIF box loading device from the external environment. On the one hand, it plays a certain protective role on the internal components and effectively prevents the internal components from being contaminated. On the other hand, it can also shield structures such as line connectors, making the appearance of the SMIF box loading device more neat and beautiful.

[0075] Please continue to refer to Figure 1 In this embodiment, the exterior decoration component 4 may include an upper decoration panel 401 , a middle decoration panel 402 and a lower decoration panel 403 .

[0076] Please continue to refer to Figure 1In this embodiment, the SMIF box loading device may further include a walking assembly 405, wherein the walking assembly 405 is located at the bottom of the carrying device 1. Specifically, a movable support 404 is provided on the upper portion of the walking assembly 405, and the movable support 404 can play a certain supporting role on the back plate 101, so that the weight of the back plate 101 can be carried by the movable support 404.

[0077] Please continue to refer to Figures 1 to 3 The back plate 101 is provided with a wafer transfer port 107, wherein the wafer transfer port 107 is higher than the port door 106. Through the wafer transfer port 107, the wafer inside the SMIF box 5 can be transferred.

[0078] Fig.10 A schematic diagram of the structure of the opening and closing device 2 of the SMIF box loading device provided in this embodiment, in which the first locking element is in the locked position and the second locking element 206 is in the separated position; Fig.11 The structural diagram of the opening and closing device 2 of the SMIF box loading device provided in this embodiment is that the first lock is in the unlocking position and the second lock 206 is in the follow-up position. Figure 8 and Fig. 9 , and combined with Fig.10 and Fig.11 In this embodiment, a first lock is provided between the box cover 501 and the base plate 503, and the opening and closing device 2 includes a rotating cam 201 and a second lock 206, the rotating cam 201 is rotatably mounted on the port door 106, and the second lock 206 is movably mounted on the support frame 301; the rotating cam 201 has a first outer contour and a second outer contour, and the curvature radius of the first outer contour is greater than the curvature radius of the second outer contour, wherein the rotating cam 201 is used to rotate around a first direction to open the first lock, and cooperate with the second lock 206 through the second outer contour so that the second lock 206 locks the box cover 501, and rotate around a second direction to close the first lock, and cooperate with the second lock 206 through the first outer contour so that the second lock 206 moves away from and releases the box cover 501; the second lock 206 always has a movement tendency to approach the box cover 501.

[0079] Please continue to refer to Fig.10 When the SMIF box 5 is in the locked box position, the rotating cam 201 maintains abutment with the second locking member 206 through the first outer contour, the first locking member is in a locked position connecting the box cover 501 and the base plate 503, and the second locking member 206 is in a separated position to release the connection between the box cover 501 and the support frame 301. At this time, the SMIF box 5 can be removed from the port door 106.

[0080] When the box cover 501 needs to be opened, the rotating cam 201 can be rotated in the first direction ( Fig.10 Counterclockwise from the viewing angle) to Fig.11, so that the part of the rotating cam 201 used to cooperate with the second locking element 206 transitions from the first outer contour to the second outer contour; in the above process, the first locking element will switch from the locking position to the unlocking position of releasing the connection state between the box cover 501 and the substrate 503, so that the box cover 501 and the substrate 503 are in a separated state. By setting the second locking element 206 to always have a tendency to move toward the box cover 501, when the rotating cam 201 rotates to the second outer contour toward the second locking element 206, due to the reduction of the curvature radius of the outer contour of the rotating cam 201 used to cooperate with the second locking element 206, the second locking element 206 will move close to the box cover 501, connecting the box cover 501 with the support frame 301, so that the box cover 501 and the support frame 301 can move synchronously, so that the support frame 301 drives the box cover 501 to rise and open the SMIF box 5, thereby facilitating the subsequent wafer transfer process.

[0081] Please continue to refer to Fig.11 After the wafer is transferred, when the box cover 501 needs to be closed, the support frame 301 can be used to drive the box cover 501 to move to the position of the substrate 503 and place the box cover 501 on the substrate 503; then, the rotating cam 201 rotates in the second direction ( Fig.11 Clockwise from the viewing angle) to Figure 3 , so that the part of the rotating cam 201 used to cooperate with the second locking element 206 transitions from the second outer contour to the first outer contour; since the curvature radius of the first outer contour is larger, the rotating cam 201 will push the second locking element 206 away from the box cover 501 during the above-mentioned rotational movement, release the connection between the box cover 501 and the support frame 301, and make the second locking element 206 switch from the follow-up position connecting the box cover 501 and the support frame 301 to the separation position that releases the connection between the two; at the same time, the first locking element switches from the unlocking position to the locking position, connecting the box cover 501 and the base plate 503 together, so that the SMIF box 5 can be removed from the port door 106 as a whole.

[0082] By arranging the rotating cam 201 in the unlocking mechanism, when the box cover 501 needs to be opened or closed, the rotating process of the rotating cam 201 can be utilized, thereby simplifying the opening process and closing process of the box cover 501.

[0083] In this embodiment, the opening and closing device 2 may further include a rotating motor. Specifically, the housing of the rotating motor may be connected to the port door 106, and the motor shaft of the rotating motor may be fixedly connected to the rotating cam 201, so as to utilize the action of the rotating motor to drive the rotating cam 201. The counterclockwise rotation and clockwise rotation of the rotating cam 201 may be achieved by the forward or reverse rotation of the rotating motor. This arrangement can realize the automatic opening and closing of the box cover 501.

[0084] In actual use, the rotating motor is connected to the rotating cam 201 via a reducer, and the rotating cam 201 is arranged in a housing frame, and the housing frame is used to accommodate and protect the rotating cam 201 .

[0085] In other embodiments, the rotation drive of the rotating cam 201 may also be achieved manually or by other rotation drive members, which will not be elaborated in detail in this embodiment.

[0086] In this embodiment, the second locking member 206 may be connected to the support frame 301 via an elastic element, so that the second locking member 206 always has a movement tendency to approach the box cover 501 .

[0087] Please continue to refer to Figure 8 , Fig.10 and Fig.11 In this embodiment, the opening and closing device 2 may further include a push rod 205. Specifically, the push rod 205 is movably installed on the port door 106, and the push rod 205 is located between the rotating cam 201 and the second locking piece 206; one end of the push rod 205 is used to abut against the outer contour of the rotating cam 201, and the other end of the push rod 205 is used to abut against the second locking piece 206; the push rod 205 always has a tendency to abut against the outer contour of the rotating cam 201.

[0088] By providing a push rod 205 in the unlocking mechanism, the push rod 205 is used to realize power transmission to the second locking member 206 during the rotation of the rotating cam 201 , which can effectively reduce the size of the rotating cam 201 and reduce the cost of the rotating cam 201 .

[0089] In addition, this form of applying driving force to the second locking member 206 by using the push rod 205 can reduce the contact area between the push rod 205 and the second locking member 206 to reduce wear.

[0090] In the SMIF box loading device, during the rotation of the rotating cam 201, the entire rotation stroke of the rotating cam 201 realizes the opening and closing of the first lock. At the same time, when the rotating cam 201 rotates to cooperate with the push rod 205 through the second outer contour, the rotating cam 201 no longer generates a driving force on the push rod 205. That is to say, in this stage where the second outer contour of the rotating cam 201 cooperates with the push rod 205, the position of the push rod 205 remains unchanged, that is, the position of the second lock 206 remains unchanged, and is always in the follow-up position of connecting the box cover 501 to the support frame 301.

[0091] The above-mentioned arrangement enables the opening and closing device 2 of the SMIF box loading device to be compatible with first locks of different opening and closing angles. For example, when the first lock can be opened or closed by rotating the rotating cam 201 by 90° (the first lock is opened or closed during the process of rotating the rotating cam 201 by 90°), when the specification of the first lock is changed, such as when the rotating cam 201 needs to be rotated by 100° to open or close the first lock, the position of the push rod 205 remains unchanged when the rotating cam 201 is rotated to the second outer contour to cooperate with the push rod 205. Therefore, even if the maximum rotation stroke of the rotating cam 201 changes to adapt to the opening or closing angle of the first lock, it will not affect the original locking position of the push rod 205, that is, it will not affect the position of the second lock 206, and the second lock 206 will still remain at the position when the box cover 501 is originally connected to the support frame 301, and the action of the second lock 206 will not be affected by the rotation angle of the rotating cam 201. It can be seen that the opening and closing device 2 of the SMIF box loading device can adapt to the first locking member with different unlocking angles.

[0092] In this embodiment, the second outer contour is an arc shape. By setting the second outer contour to an arc shape, when the rotating cam 201 cooperates with the push rod 205 through the second outer contour, the position of the push rod 205 is more stable and does not fluctuate.

[0093] In this embodiment, the push rod 205 can be connected to the port door 106 through an elastic element, so that the push rod 205 always has a tendency to abut against the outer contour of the rotating cam 201.

[0094] Please continue to refer to Figure 8 , Fig.10 and Fig.11 In this embodiment, a cam follower 204 is provided at one end of the push rod 205 facing the rotating cam 201 , and the push rod 205 abuts against the rotating cam 201 through the cam follower 204 .

[0095] The arrangement of the cam follower 204 can reduce the friction force during the contact between the push rod 205 and the outer contour of the rotating cam 201 , thereby ensuring the smoothness of the rotating cam 201 during rotation.

[0096] In this embodiment, the box cover 501 includes a cover body and a flange extending outward from the cover body, and the second locking element 206 includes a locking tongue; in the follow-up position of the second locking element 206, the locking tongue extends above the flange.

[0097] Please continue to refer to Figures 8 to 11 In this embodiment, the rotating cam 201 is fixedly provided with a box opening pin 202, wherein the box opening pin 202 is used to cooperate with the first locking element to switch the first locking element between a locked position and an unlocked position.

[0098] The arrangement of the box opening pin 202 facilitates the driving of the first locking element by the rotating cam 201, thereby realizing reliable switching of the first locking element between the locked position and the unlocked position.

[0099] It should be noted that, in this embodiment, the driving of the first locking element by the box opening pin 202 can refer to the fork mechanism of the prior art, and the connection structure between the box cover 501 and the base plate 503 is also the prior art in this field.

[0100] In this embodiment, the rotating cam 201 is located below the port door 106 . The port door 106 is provided with an arc-shaped guide groove 203 . The box opening pin 202 passes through the arc-shaped guide groove 203 and cooperates with the first locking member.

[0101] By arranging the rotating cam 201 below the port door 106, the flatness of the bearing surface of the port door 106 can be ensured, so that the SMIF box 5 will not shake after being placed on the port door 106. By providing an arc-shaped guide groove 203 in the port door 106, so that the box opening pin 202 passes through the arc-shaped guide groove 203 and cooperates with the first lock, the arc-shaped guide groove 203 can play a certain guiding role in the movement process of the box opening pin 202, ensuring the smoothness of the rotating cam 201 to rotate to open and close the box cover 501.

[0102] In addition, the provision of the arc-shaped guide groove 203 also plays a certain role in limiting the rotational travel of the rotating cam 201, thereby realizing the limitation of the clockwise and counterclockwise rotation processes of the rotating cam 201, and ensuring that the rotating cam 201 does not rotate excessively when the rotating cam 201 rotates to open or close the first locking element.

[0103] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.

[0104] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprises" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprises a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0105] In the above embodiments, the descriptions of directions such as “upper”, “lower”, “inner”, “outer”, and “side” are all based on the drawings.

[0106] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A SMIF box loading device, characterized in that: include: A carrying device (1) comprises a back plate (101), a port door (106) and an adjustment component, wherein the port door (106) is fixedly connected to the back plate (101), the port door (106) is used to carry a SMIF box (5), the SMIF box (5) comprises a base plate (503) and a box cover (501) arranged on the base plate (503), a wafer accommodating cavity is formed between the box cover (501) and the base plate (503); the adjustment component is used to adjust the pitch angle and the left and right deflection angle of the back plate (101); A lifting device (3), comprising a support frame (301) and a detection component arranged on the support frame (301), wherein the support frame (301) is liftably arranged on the back plate (101), and the detection component is used to detect wafer state parameters of the wafer accommodating cavity when the support frame (301) rises; and an opening and closing device (2) for separating the box cover (501) from the base plate (503) and linking the box cover (501) to be connected to the support frame (301), and for connecting the box cover (501) to the base plate (503) and linking the box cover (501) to be separated from the support frame (301).

2. The SMIF box loading device according to claim 1, characterized in that: The adjustment component comprises a pitch adjustment structure (102), a base (111) and a deflection adjustment structure, wherein the pitch adjustment structure (102) is installed in the upper area of ​​the back plate (101), and the pitch adjustment structure (102) is used to adjust the pitch angle of the back plate (101); the base (111) is located at the bottom of the back plate (101), and the deflection adjustment structure connects the base (111) and the back plate (101), and the deflection adjustment structure is used to adjust the left and right deflection angles of the back plate (101).

3. The SMIF box loading device according to claim 2, characterized in that: The pitch adjustment structure (102) comprises an adjustment block with an adjustable extension length, and the extension direction of the adjustment block is perpendicular to the back plate (101).

4. The SMIF box loading device according to claim 2, characterized in that: The deflection adjustment structure is provided with a plurality of groups, and the plurality of groups of deflection adjustment structures are arranged at intervals along the left-right direction; the deflection adjustment structure comprises a first adjustment pad (103), a second adjustment pad (104) and an adjustment screw (110); the first adjustment pad (103) connects the back plate (101) and the base (111), and the first adjustment pad (103) allows an adjustment margin between the back plate (101) and the base (111) along the lifting direction; the second adjustment pad (104) is fixedly connected to the base (111), the adjustment screw (110) is threadedly connected to the second adjustment pad (104), and the free end of the adjustment screw (110) abuts against the first adjustment pad (103).

5. The SMIF box loading device according to claim 4, characterized in that: The deflection adjustment structure further comprises a first adjustment support block (108) and a second adjustment support block (109), wherein the first adjustment support block (108) is fixedly arranged on the base (111), and the second adjustment support block (109) is fixedly arranged on the back plate (101), wherein the first adjustment support block (108) is provided with a V-shaped groove, and the second adjustment support block (109) is provided with an arc surface, and the arc surface cooperates with the V-shaped groove.

6. The SMIF box loading device according to any one of claims 1 to 5, characterized in that: The detection component comprises a Mapping component (303), a flying wafer detection component (304) and an in-situ detection sensor (305), wherein the Mapping component (303) is used to detect the number and position of wafers; the flying wafer detection component (304) is used to detect the flying wafer status of wafers; and the in-situ detection sensor (305) is used to detect the in-situ status of a wafer basket (502) of the wafer accommodating cavity.

7. The SMIF box loading device according to claim 6, characterized in that: The support frame (301) is of a frame structure, the Mapping component (303) and the flying chip detection component (304) are both located at the top of the support frame (301), and the in-position detection sensor (305) is located in the middle of the support frame (301) along the lifting direction; and / or, the Mapping component (303) is located on the side walls of the support frame (301) that are opposite to each other along the front-back direction, and the flying chip detection component (304) is located on the side walls of the support frame (301) that are opposite to each other along the left-right direction.

8. The SMIF box loading device according to any one of claims 1 to 5, characterized in that: The lifting device (3) further comprises a lifting drive module (302), the lifting drive module (302) being mounted on the back plate (101), the output end of the lifting drive module (302) being connected to the support frame (301) for driving the support frame (301) to lift; and / or a linear slide rail (105) is fixedly arranged on a side of the back plate (101) facing the port door (106), the linear slide rail (105) extending along the lifting direction of the support frame (301), the support frame (301) A slider is fixedly provided to slide with the linear slide rail (105); and / or, the SMIF box loading device also includes an exterior component (4), and the exterior component (4) is connected to the back plate (101) to form a component installation cavity; and / or, the SMIF box loading device also includes a walking component (405), and the walking component (405) is located at the bottom of the carrying device (1); and / or, the back plate (101) is provided with a film transmission port (107), and the film transmission port (107) is higher than the port door (106).

9. The SMIF box loading device according to any one of claims 1 to 5, characterized in that: A first locking element is arranged between the box cover (501) and the base plate (503), and the opening and closing device (2) comprises a rotating cam (201) and a second locking element (206), wherein the rotating cam (201) is rotatably mounted on the port door (106), and the second locking element (206) is movably mounted on the support frame (301); the rotating cam (201) has a first outer contour and a second outer contour, and the curvature radius of the first outer contour is greater than the curvature radius of the second outer contour, wherein the rotating cam (201) is used to rotate around a first direction to open the first locking element, and cooperate with the second locking element (206) through the second outer contour so that the second locking element (206) approaches and connects to the box cover (501), and rotate around a second direction to close the first locking element, and cooperate with the second locking element (206) through the first outer contour so that the second locking element (206) moves away from and releases the box cover (501); the second locking element (206) always has a movement tendency to approach the box cover (501).

10. The SMIF box loading device according to claim 9, characterized in that: The opening and closing device (2) further comprises a push rod (205), the push rod (205) being movably mounted on the port door (106), and the push rod (205) being located between the rotating cam (201) and the second locking element (206); one end of the push rod (205) being used for abutting and cooperating with the outer contour of the rotating cam (201), and the other end of the push rod (205) being used for abutting and cooperating with the second locking element (206); the push rod (205) always has a tendency to abut against the outer contour of the rotating cam (201).

Images